JP2007163804A5 - - Google Patents
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- Publication number
- JP2007163804A5 JP2007163804A5 JP2005359585A JP2005359585A JP2007163804A5 JP 2007163804 A5 JP2007163804 A5 JP 2007163804A5 JP 2005359585 A JP2005359585 A JP 2005359585A JP 2005359585 A JP2005359585 A JP 2005359585A JP 2007163804 A5 JP2007163804 A5 JP 2007163804A5
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- fluoride
- index material
- optical
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 239000000463 material Substances 0.000 claims 18
- 239000012788 optical film Substances 0.000 claims 17
- 230000003287 optical effect Effects 0.000 claims 13
- 239000010408 film Substances 0.000 claims 12
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 claims 10
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 6
- TYIZUJNEZNBXRS-UHFFFAOYSA-K trifluorogadolinium Chemical compound F[Gd](F)F TYIZUJNEZNBXRS-UHFFFAOYSA-K 0.000 claims 6
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 claims 6
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 5
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 5
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 5
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 5
- 230000010287 polarization Effects 0.000 claims 4
- 238000000926 separation method Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005359585A JP2007163804A (ja) | 2005-12-13 | 2005-12-13 | 偏光ビームスプリッター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005359585A JP2007163804A (ja) | 2005-12-13 | 2005-12-13 | 偏光ビームスプリッター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007163804A JP2007163804A (ja) | 2007-06-28 |
| JP2007163804A5 true JP2007163804A5 (zh) | 2009-01-29 |
Family
ID=38246762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005359585A Withdrawn JP2007163804A (ja) | 2005-12-13 | 2005-12-13 | 偏光ビームスプリッター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007163804A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101979979B1 (ko) * | 2012-11-06 | 2019-05-17 | 가부시키가이샤 니콘 | 편광 빔 스플리터, 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법 |
| CN106443862B (zh) * | 2016-11-24 | 2019-01-29 | 福建福特科光电股份有限公司 | 可见宽光谱消偏振分光片 |
-
2005
- 2005-12-13 JP JP2005359585A patent/JP2007163804A/ja not_active Withdrawn
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