JP2007158056A - Piezoelectric element and electronic equipment using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a layered piezoelectric element that can be manufactured easily, can utilize shearing strain, and can be driven by a low voltage. <P>SOLUTION: In the piezoelectric element, a first piezoelectric element and a second one are laminated alternately. The first piezoelectric element has a first electrode, a second electrode, and a third electrode arranged with an interval mutually on a first surface. The second piezoelectric element has a fourth electrode, a fifth electrode, and a sixth electrode arranged with an interval mutually on the first surface. Polarization treatment is performed between the third and fourth electrodes, and voltage is applied at least between the second electrode and the fifth electrode for shearing deformation. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an actuator using a piezoelectric element, a piezoelectric transducer such as a sensor, and an electronic apparatus using the same, and more particularly to a structure of a piezoelectric element that undergoes shear deformation.

  In recent years, as electronic devices have been reduced in size, thickness, functionality, and power consumption, transducers such as sensors, transformers, and actuators mounted on electronic devices have increased in number.

  Piezoelectric elements are sintered products made of PZT (lead zirconate titanate) or barium titanate as a raw material. Polarization direction when an electric field is applied to the polarization direction according to the required transducer specifications. Or strain in a direction perpendicular to the polarization direction when an electric field is applied in the polarization direction, or slips in the polarization direction when an electric field is applied in a direction perpendicular to the polarization direction. It is selected whether to use a shear strain that takes a deformed form.

  Among these, use of shear strain increases the use of actuators because a large piezoelectric effect can be obtained. Furthermore, application to sensors and transformers is being studied together with having a high resonance frequency.

  However, when the shear strain of the piezoelectric element is used, in order to obtain a large displacement and force, a large thickness and width must be ensured, and a very large driving voltage is required. For the same reason, the impedance of the piezoelectric element has become large, and the degree of freedom in designing sensors and transformers has been narrowed. And the drive circuit mounted in the electronic device which mounts this piezoelectric element caused the enlargement of the drive circuit and the cost increase, and the application field was restrict | limited.

On the other hand, lamination of piezoelectric elements is performed as means for lowering the drive voltage and lowering the impedance of the piezoelectric elements (Patent Document 1). In this case, a method of alternately stacking piezoelectric elements and planar electrodes is employed, and these members are generally joined with an adhesive.
Patent application publication number JP-A-2005-237173

  However, in the case of a conventional multilayer piezoelectric element using shear strain, it is difficult to reduce the thickness per piezoelectric element in the manufacturing process, and a large driving voltage is required. For the same reason, there is a limit to reducing the impedance of the piezoelectric element. In addition, since an adhesive is used in production, there are problems such as a decrease in reliability due to performance deterioration under high temperature and high humidity environments and a large variation in performance of individual products. In addition, the cost is high and the application field is limited.

  An object of the present invention is to obtain a laminated piezoelectric element using a shearing strain that can be driven at a low voltage with a simple manufacturing method.

  Therefore, in order to solve the above-described problem, the piezoelectric element of the present invention has a first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other. A piezoelectric element having a fourth electrode, a fifth electrode, and a sixth electrode arranged on the surface at a distance from each other, and performing polarization treatment between the third electrode and the fourth electrode, A piezoelectric element is characterized by shear deformation by applying a voltage between at least the second electrode and the fifth electrode.

  According to this, the cost of providing the electrode for polarization on the side surface (the surface orthogonal to the surface to which the drive voltage is applied) of the piezoelectric element and removing this electrode after polarization can be reduced, so that the cost of the piezoelectric element can be reduced.

  Furthermore, the first electrode has a first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other, and a fourth electrode arranged on the second surface at a distance from each other. A piezoelectric element having a first electrode, a fifth electrode, and a sixth electrode, wherein a polarization treatment is applied between the third electrode and the fourth electrode, and between the first electrode and the sixth electrode. The piezoelectric element is characterized in that it undergoes shear deformation by applying a voltage between at least the second electrode and the fifth electrode.

  According to this, since the polarization process is performed uniformly over the entire piezoelectric element, the displacement and generated force of the piezoelectric element are increased.

  A first piezoelectric element having a first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other; and arranged on the first surface at a distance from each other. The fourth electrode, the fifth electrode, and the second piezoelectric element having the sixth electrode are laminated alternately, and a polarization treatment is applied between the third electrode and the fourth electrode. The piezoelectric element is characterized in that shear deformation is obtained by applying a voltage between at least the second electrode and the fifth electrode.

  Alternatively, a first piezoelectric element having a first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other, and arranged on the first surface at a distance from each other. In addition, a second piezoelectric element having a fourth electrode, a fifth electrode, and a sixth electrode is alternately stacked, and the third electrode is interposed between the fourth electrode and the sixth electrode. The piezoelectric element is characterized in that a polarization process is performed between the first electrode and the first electrode, and shear deformation is performed by applying a voltage between at least the second electrode and the fifth electrode.

  According to these, a large output can be obtained at a low voltage.

  The laminated piezoelectric elements are formed by laminating a plurality of piezoelectric sheets, dividing the laminated piezoelectric sheets into individual piezoelectric elements, and sintering the laminated piezoelectric sheets or individual piezoelectric elements. The piezoelectric element is characterized by undergoing a process.

  According to this, since no adhesive is used for coupling the piezoelectric elements, the reliability is improved, and variations in the characteristics of the laminated piezoelectric elements can be suppressed small.

  Furthermore, with respect to the piezoelectric element that has undergone the step of removing the piezoelectric element in the portion where the second electrode and the fifth electrode are not provided from the piezoelectric element having the above structure, the second electrode and the fifth electrode The piezoelectric element is characterized in that shear deformation is obtained by applying a voltage therebetween.

  According to this, since the drive voltage is applied to the entire piezoelectric element, the use efficiency of the piezoelectric element is increased, and the displacement and generated force of the piezoelectric element are increased.

  If a piezoelectric device is constituted by these piezoelectric elements, when the piezoelectric device is an actuator, it can be driven at a low voltage, and a small size and a high output can be obtained. When the piezoelectric device is a sensor, it is small and high sensitivity can be obtained. If this piezoelectric device is mounted on an electronic device, a small electronic device with low power consumption can be realized.

  Since the piezoelectric element of the present invention is a laminated piezoelectric element that can use shear strain (d15), it is small in size and can provide a high output at a low voltage. In addition, the impedance can be lowered and the thickness and the number of piezoelectric elements to be stacked can be set freely, so that the degree of freedom in designing piezoelectric devices such as sensors and transformers is increased. The cost of the multilayer piezoelectric element is greatly increased by manufacturing a multilayer piezoelectric element having a size capable of obtaining a plurality of target multilayer piezoelectric elements by integrally sintering it and dividing it into individual multilayer piezoelectric elements. Is lowered. By using such a laminated piezoelectric element, a laminated piezoelectric element having small individual characteristic variations and high reliability can be obtained.

  In addition, if this multilayered piezoelectric element is applied to a transducer such as an actuator or a sensor and further mounted on an electronic device, a small electronic device with low power consumption and high reliability can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a view showing the structure of laminated piezoelectric elements 1 and 20 of the present invention. The laminated piezoelectric element 1 has a structure in which piezoelectric elements 1a, 1b, 1c, and 1d are laminated. The laminated piezoelectric element 1 shown in Embodiment 1 and the laminated piezoelectric element 20 shown later (Embodiment 2) have the same laminated structure of the piezoelectric elements 1a, 1b, 1c, and 1d, and are different only in polarization treatment. The same structural diagram is shown.
FIGS. 2A and 2B are a diagram showing a cross section of the laminated piezoelectric element 1 when the laminated piezoelectric element 1 is viewed from the direction of the arrow 2a, and a modified view thereof. On the upper surfaces of the piezoelectric elements 1a and 1c, rectangular first electrodes 2 and 8, second electrodes 3 and 9, and third electrodes 4 and 10 are arranged with a gap therebetween. The fourth electrodes 5 and 11, the fifth electrodes 6 and 12, and the sixth electrodes 7 and 13 are arranged on the upper surfaces of the piezoelectric elements 1b and 1d with a gap therebetween. Between the third electrodes 4 and 10 and the fourth electrodes 5 and 11, polarization treatment is performed in the direction indicated by the arrow 5 in the figure. In this state, the first electrode 2, 8, the second electrode 3, 9 and the third electrode 4, 10 are short-circuited, the fourth electrode 5, 11, the fifth electrode 6, 12, When a voltage is applied between the terminals where the sixth electrodes 7 and 13 are short-circuited, shear deformation occurs as shown by the dotted line in FIG. Incidentally, it can be driven even if a voltage is applied only between the second electrodes 3 and 9 and the fifth electrodes 6 and 12, but it is preferable because the displacement and the generated force are reduced due to the restraint of the portion where no voltage is applied. Absent. Here, the structure in which the piezoelectric elements 1a, 1b, 1c, and 1d are stacked is shown, but only the piezoelectric element 1a is shown, and the fourth electrode 5, the fifth electrode 6, and the sixth electrode 7 are provided on the back surface of the piezoelectric element 1a. A single plate element provided with a can be driven by the same principle.

  Next, a specific structure and manufacturing method of the multilayer piezoelectric element 1 will be described with reference to FIGS. 3A, 3B, 3C, and 3D are views of the piezoelectric elements 1a, 1b, 1c, and 1d as viewed from above. 4 (a), 4 (b), 4 (c), 4 (d), and 4 (e) are side views and top views of the laminated piezoelectric element 1 viewed from the directions of arrows 2b, 2d, 2c, 2f, and 2a in FIG. FIG.

  A rectangular first electrode 2, second electrode 3, and third electrode 4 are arranged on the upper surface of the piezoelectric element 1a with a gap therebetween. The step 2a of the first electrode 2, the step 3a of the second electrode 3, and the step 4a of the third electrode 4 extend to one side surface of the piezoelectric element 1a. A rectangular fourth electrode 5, fifth electrode 6, and sixth electrode 7 are arranged on the upper surface of the piezoelectric element 1b with a gap therebetween. The step portion 5a of the fourth electrode 5, the step portion 6a of the fifth electrode 6, and the step portion 7a of the sixth electrode 7 extend to one side surface of the piezoelectric element 1b. A rectangular first electrode 8, second electrode 9, and third electrode 10 are arranged on the upper surface of the piezoelectric element 1c with a gap therebetween. The end 8a of the first electrode 8, the step 9a of the second electrode 9, and the end 10a of the third electrode 10 extend to one side surface of the piezoelectric element 1c. A rectangular fourth electrode 11, fifth electrode 12, and sixth electrode 13 are arranged on the upper surface of the piezoelectric element 1d with a gap therebetween. The end part 11a of the fourth electrode 11, the step part 12a of the fifth electrode 12, and the end part 13a of the sixth electrode 13 extend to one side surface of the piezoelectric element 1d.

  The step 2 a of the first electrode 2 of the piezoelectric element 1 a is short-circuited by the external electrode 18. The end 3 a of the second electrode 3 is short-circuited by the external electrode 25. The step portion 4 a of the third electrode 4 of the piezoelectric element 1 b is short-circuited by the external electrode 20. The step portion 5 a of the fourth electrode 5 is short-circuited by the external electrode 19. The end 6 a of the fifth electrode 6 is short-circuited by the external electrode 23. The step portion 7 a of the sixth electrode 7 is short-circuited by the external electrode 21. The end 8 a of the first electrode 8 of the piezoelectric element 1 c is short-circuited by the external electrode 17. The end 9 a of the second electrode 9 is short-circuited by the external electrode 16. The end 10 a of the third electrode 10 is short-circuited by the external electrode 15. The end 11 a of the fourth electrode 11 of the piezoelectric element 1 d is short-circuited by the external electrode 22. The end 12 a of the fifth electrode 12 is short-circuited by the external electrode 26. The end 13 a of the sixth electrode 13 is short-circuited by the external electrode 24.

  Next, a specific manufacturing method will be described. A piezoelectric sheet (not shown) on which electrodes 2, 3, and 4 are printed so that a plurality of piezoelectric elements 1a can be taken; a piezoelectric sheet (not shown) on which electrodes 5, 6, and 7 are printed so that a plurality of piezoelectric elements 1b can be taken; A piezoelectric sheet (not shown) on which electrodes 8, 9, and 10 are printed so that a plurality of piezoelectric elements 1c can be taken, and a piezoelectric sheet (not shown) on which electrodes 11, 12, and 13 are printed so that a plurality of piezoelectric elements 1d can be taken. Then, the binder is blown off by calcination. Then, firing is performed at the traces cut into the shapes of the individual laminated piezoelectric elements 1, and after applying the external electrodes 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, polarization treatment is performed. Completion.

  The polarization process is performed by the following steps. (1) A high voltage is applied to the external electrode 19 with the external electrode 20 as GND. (2) A high voltage is applied to the external electrode 22 using the external electrode 15 as GND. (3) A high voltage is applied to the external electrode 15 with the external electrode 19 as GND. (4) A high voltage is applied to the external electrode 20 using the external electrode 22 as GND. As a result, a polarization process is performed between the third electrodes 4 and 10 and the fourth electrodes 5 and 11 (in the direction indicated by the arrow 5 in FIG. 2A).

The laminated piezoelectric element 1 undergoes shear deformation by applying a voltage between the external electrodes 15, 16, 17, 18, 20, 25 and the external electrodes 19, 21, 22, 23, 24, 26.
A piezoelectric element that is shear-deformed by applying a voltage between at least the second electrode and the fifth electrode.

  In the present embodiment, the structure in which the internal electrodes 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 are short-circuited on the side surface of the multilayer piezoelectric element 1 is shown. May be used. If the piezoelectric elements 1a, 1b, 1c, and 1d are stacked in this order, the number of stacked layers is not limited. And of course, you may provide an electrode also in the lower surface of the piezoelectric element 1a in the lowest part.

(Embodiment 2)
The laminated piezoelectric element 20 of the present invention will be described. The structure of the laminated piezoelectric element 20 is the same as that of the laminated piezoelectric element 1, and only the polarization process is different.

  FIG. 5 is a view showing a cross section of the laminated piezoelectric element 20 when the laminated piezoelectric element 20 is viewed from the direction of the arrow 2a. On the upper surfaces of the piezoelectric elements 1a and 1c, rectangular first electrodes 2 and 8, second electrodes 3 and 9, and third electrodes 4 and 10 are arranged with a gap therebetween. The fourth electrodes 5, 11, the fifth electrodes 6, 12, and the sixth electrodes 7, 13 are arranged on the upper surfaces of the piezoelectric elements 1b, 1d with a gap therebetween.

  Polarization treatment is performed between the first electrodes 2 and 8 and the sixth electrodes 7 and 13 and between the third electrodes 4 and 10 and the fourth electrodes 5 and 11 in the direction indicated by the arrow 14 in the figure. ing. In this state, the first electrode 2, 8, the second electrode 3, 9 and the third electrode 4, 10 are short-circuited, the fourth electrode 5, 11, the fifth electrode 6, 12, When a voltage is applied between the terminals where the six electrodes 7 and 13 are short-circuited, shear deformation occurs as shown by the dotted line in FIG. Incidentally, it can be driven even if a voltage is applied only between the second electrodes 3 and 9 and the fifth electrodes 6 and 12, but it is preferable because the displacement and the generated force are reduced due to the restraint of the portion where no voltage is applied. There is no.

  Desirably, the piezoelectric element in the portion where the second electrode and the fifth electrode are not provided is removed from the laminated piezoelectric element 20 (cut along dotted lines 27 and 28). According to this, the influence of the portion that does not contribute to driving (the gap between the electrodes to which no voltage is applied during driving), or the portion that is not subjected to polarization treatment (the side surface portion (with respect to the polarization direction) of the laminated piezoelectric element 20) Since there is no influence, the displacement and generated force of the laminated piezoelectric element 20 increase.

  The actual polarization process is performed using an external electrode, and is performed according to the following procedure. (1) A high voltage is applied to the external electrode 19 with the external electrode 20 as GND. (2) A high voltage is applied to the external electrode 18 with the external electrode 21 as GND. (3) A high voltage is applied to the external electrode 15 with the external electrode 19 as GND. (4) A high voltage is applied to the external electrode 15 with the external electrode 17 as GND. (5) A high voltage is applied to the external electrode 22 with the external electrode 15 as GND. (6) A high voltage is applied to the external electrode 17 as the external electrode 24. (7) A high voltage is applied to the external electrode 20 with the external electrode 22 as GND. (8) A high voltage is applied to the external electrode 24 using the external electrode 18 as GND.

  The laminated piezoelectric element 1 undergoes shear deformation by applying a voltage between the external electrodes 15, 16, 17, 18, 20, 25 and the external electrodes 19, 21, 22, 23, 24, 26.

(Embodiment 3)
Next, as an application of the laminated piezoelectric elements 1 and 20 of the present invention to a piezoelectric device, application to an ultrasonic motor will be described with reference to FIG.

  The ultrasonic motor 100 of the present invention includes a vibrating body 200, guide members 31 and 32 that support the vibrating body 200, a moving body 35 that is in contact with the vibrating body 200 and is driven by vibration of the vibrating body 200, and movement of the moving body 35. , And a pressurizing spring 33 that pressurizes the vibrating body 200 against the moving body 35.

  The vibrating body 200 is a rectangular-shaped longitudinal vibration piezoelectric element 29, laminated piezoelectric elements 1 and 20 that are joined to or integrally formed on the upper surface of the longitudinal vibration piezoelectric element 29, and are subjected to shear deformation. 20 includes a protrusion 34 formed of a hard material such as ceramics fixed to the upper surface of 20, and a rectangular fixed plate 30 fixed to the lower surface of the longitudinal vibration piezoelectric element 29. Both end portions 30a and 30b of the fixed plate 30 are engaged with the groove portions 31a and 32a of the guide members 31 and 32, respectively. Support in the direction immovable. The rollers 36 and 37 guide the moving body 35 so as to be movable in the moving direction of the moving body 35 (direction indicated by the arrow 38).

  The protrusion 34 is displaced in the direction indicated by the arrow 40 by the longitudinal vibration piezoelectric element 29. The protrusion 29 is displaced in the direction indicated by the arrow 39 by the laminated piezoelectric elements 1 and 20. By giving a phase difference between these two displacement components, the miracle of the movement of the protrusion 39 becomes an ellipse or a square, and the moving body 35 can be frictionally driven. In order to give a phase difference between the two displacement components, the level of two signals output from a drive circuit (not shown) (one supplied to the longitudinal vibration piezoelectric element 29 and one supplied to the laminated piezoelectric elements 1 and 20). Change the phase difference.

In the present embodiment, an example in which the laminated piezoelectric elements 1 and 20 of the present invention are applied as the piezoelectric elements of the conventional ultrasonic motor shown in Patent Document 1 is shown. However, in the conventional piezoelectric devices such as other actuators, sensors, and transformers. It can be easily applied to the part where shear deformation is used.
(Embodiment 4)
Electronic devices equipped with piezoelectric devices such as piezoelectric actuators, piezoelectric sensors, and piezoelectric transformers using the piezoelectric element of the present invention will be described.

  FIG. 7 is a block diagram of an electronic apparatus equipped with a piezoelectric actuator 200 to which the piezoelectric element of the present invention is applied. The piezoelectric element 200 is composed of the piezoelectric element 42 and the moving body 43. When a command from a control circuit 40 such as a CPU in the electronic device is transmitted to the driver 41, the driver 41 outputs a drive signal to the piezoelectric element 42. The moving body 43 receives the driving force of the piezoelectric element 42 and moves. At that time, the operating unit 44 moves due to the force of the moving body 43. For example, when the electronic device is a camera, when a command to start zooming is transmitted from the control circuit 40, the driver 41 applies a drive signal to the piezoelectric element 42 to rotate the moving body 43. Here, the piezoelectric actuator 200 is an ultrasonic motor. The lens which is the operation part 44 is moved through the cam which is not illustrated in response to the force of the moving body 43.

  FIG. 8 is a block diagram of an electronic device equipped with a piezoelectric sensor 45 to which the piezoelectric element of the present invention is applied. A signal is output to the signal processing circuit 46 according to the environment to which the piezoelectric sensor 45 is exposed. The signal processed by the signal processing circuit 46 is input to a control circuit 47 such as a CPU in the electronic device, and controls the control unit 48 according to the external environment. For example, when the electronic device is an HDD, when the piezoelectric sensor 45 serving as an acceleration sensor detects the fall of the HDD, the signal processing circuit 46 amplifies the output signal of the piezoelectric sensor 45, converts it into a digital signal, and transmits it to the control circuit 47. The control circuit 47 moves the actuator which is the control unit 48 so as to avoid the head so that the head does not contact the medium.

  FIG. 9 is a block diagram of an electronic apparatus equipped with a piezoelectric transformer 50 to which the piezoelectric element of the present invention is applied. The electronic device is a personal computer or the like having a display unit 56. Receiving the signal from the oscillation circuit 49, the piezoelectric transformer 50 resonates and outputs an AC voltage that is extremely higher than the input voltage to the signal processing circuit 51. The signal processing circuit 51 performs processing such as rectification and turns on a backlight 52 for brightening the display unit 56 such as a liquid crystal. Information of the information processing unit including the memory 53 and the control circuit 54 such as a CPU is signal-processed by the driver 55 so as to be displayed on the display unit 56. The backlight 52 is an example of a drive unit driven by the piezoelectric transformer 50, and the piezoelectric transformer 50 of the present invention can be applied to drive any drive unit in an electronic apparatus.

    The actuator, sensor, and other transducers using the multilayer piezoelectric element of the present invention are compact and can be driven at a low voltage, have high reliability, have characteristics of high output or high sensitivity, and are low in cost. It can be applied to small electronic devices such as clocks, personal computers, mobile phones, information recording devices such as HDDs and optical discs, as well as to manufacturing equipment such as precision stages and robots, and precision measurement in the industrial and aerospace fields. Applicable to equipment.

It is a figure which shows the structure of the laminated piezoelectric element of this invention. It is a figure which shows the mode of polarization of the laminated piezoelectric element of Embodiment 1 of this invention, and the state of displacement. It is a figure which shows the electrode structure of the laminated piezoelectric element of this invention. It is a figure which shows the side view and top view of the multilayer piezoelectric element of this invention. It is a figure which shows the mode of polarization of the laminated piezoelectric element of Embodiment 2 of this invention. It is a figure which shows the structure of the ultrasonic motor using the piezoelectric element of this invention. FIG. 3 is a block diagram showing an electronic device equipped with a piezoelectric actuator using the piezoelectric element of the present invention. FIG. 3 is a block diagram showing an electronic device equipped with a piezoelectric sensor using the piezoelectric element of the present invention. FIG. 3 is a block diagram showing an electronic device equipped with a piezoelectric transformer using the piezoelectric element of the present invention.

Explanation of symbols

1,20 Multilayer piezoelectric elements 1a, 1b, 1c, 1d Piezoelectric elements 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13 Electrodes 15, 16, 17, 18, 19, 20 , 21, 22, 23, 24, 25, 26 External electrode
200 Vibrating bodies 35, 43 Moving body 33 Pressure springs 31, 32 Guide member

Claims (8)

A first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other, and a fourth electrode and a second electrode arranged adjacent to each other in order on the second surface A piezoelectric element having five electrodes and a sixth electrode,
A piezoelectric treatment characterized in that a polarization treatment is performed between the third electrode and the fourth electrode, and shear deformation is caused by applying a voltage between at least the second electrode and the fifth electrode. element. A first electrode, a second electrode, and a third electrode arranged on the first surface at a distance from each other, and a fourth electrode and a second electrode arranged adjacent to each other in order on the second surface A piezoelectric element having five electrodes and a sixth electrode,
Polarization treatment is performed between the third electrode and the fourth electrode and between the first electrode and the sixth electrode, and a voltage is applied at least between the second electrode and the fifth electrode. A piezoelectric element characterized by being subjected to shear deformation by applying. A first piezoelectric element having a first electrode, a second electrode, and a third electrode arranged spaced apart from each other on a first surface;
Second piezoelectric elements having fourth electrodes, fifth electrodes, and sixth electrodes arranged on the first surface at intervals from each other, and alternately stacked,
A piezoelectric treatment characterized in that a polarization treatment is performed between the third electrode and the fourth electrode, and shear deformation is caused by applying a voltage between at least the second electrode and the fifth electrode. element. A first piezoelectric element having a first electrode, a second electrode, and a third electrode arranged spaced apart from each other on a first surface;
Second piezoelectric elements having fourth electrodes, fifth electrodes, and sixth electrodes arranged on the first surface at intervals from each other, and alternately stacked,
Polarization treatment is performed between the third electrode and the fourth electrode, and between the sixth electrode and the first electrode, and at least between the second electrode and the fifth electrode. A piezoelectric element that undergoes shear deformation by applying a voltage. Laminating a plurality of piezoelectric sheets;
Dividing the laminated piezoelectric sheet into individual piezoelectric elements;
Sintering the laminated piezoelectric sheets or the individual piezoelectric elements;
The piezoelectric element according to claim 3 or 4, wherein A piezoelectric element that has undergone a step of removing a portion of the piezoelectric element that is not provided with the second electrode and the fifth electrode from the piezoelectric element according to claim 1,
A piezoelectric element that is shear-deformed by applying a voltage between the second electrode and the fifth electrode. A piezoelectric device comprising the piezoelectric element according to claim 1. An electronic apparatus comprising the piezoelectric device according to claim 7.

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