JP5080518B2 - Multilayer piezoelectric element, method for manufacturing multilayer piezoelectric element, and electronic apparatus provided with multilayer piezoelectric element - Google Patents

Description

  The present invention relates to a multilayer piezoelectric element, an ultrasonic motor, a method for manufacturing the multilayer piezoelectric element, and an electronic apparatus including the ultrasonic motor.

  An ultrasonic motor using the resonance mode of an elastic body has excellent controllability, and has recently attracted attention as a precision positioning actuator in recent years. In particular, linear actuators are often required as actuators for various stages, and many types have been proposed and studied. Among them, various ultrasonic motors using a combined vibration of a longitudinal (extension / contraction) vibration and a bending vibration of a rectangular plate have been studied (for example, see Patent Document 1). Among these, for example, as shown in Patent Document 1, a rectangular piezoelectric element single plate is polarized in the thickness direction and provided with four divided electrodes, and the diagonal electrodes are used as a set and driven by a set of electrodes. The principle of driving a moving body in contact with a vibration body made of a piezoelectric element by applying a signal to excite longitudinal vibration and bending vibration has been put into practical use for various applications.

Japanese Patent No. 2980541 (pages 7-8, FIG. 1)

  However, the conventional structure requires a very high voltage for driving the vibrating body, and requires a large booster circuit, which increases the size and complexity of the drive circuit and makes the drive circuit expensive. In this case, it is difficult to apply to a small device, particularly a battery-driven application. Further, as the structure of the vibrating body, if the thickness of the piezoelectric element is thin, sufficient output cannot be obtained, and mechanical strength is low, which may lead to damage. On the other hand, when the thickness is increased, the polarization voltage is extremely high, and the manufacturing process becomes complicated. In this configuration, since the piezoelectric lateral effect of the piezoelectric element is used, a large output cannot be obtained.

  Therefore, a first aspect of the present invention is a laminated piezoelectric element in which a plurality of piezoelectric elements having a plurality of internal electrodes are laminated in the same plane, and the internal electrodes are arranged on the side surfaces of the laminated piezoelectric elements. The multilayer piezoelectric element includes an external electrode that is short-circuited in the stacking direction and an external electrode that short-circuits the plurality of internal electrodes in the same plane.

According to a second aspect of the present invention , there is provided a laminated piezoelectric element in which a plurality of piezoelectric elements having a plurality of internal electrodes are laminated in the same plane, wherein the plurality of internal electrodes in the same plane are short-circuited and A laminated piezoelectric element having an external electrode for short-circuiting internal electrodes of a plurality of piezoelectric elements in a lamination direction .

  A third aspect of the present invention is a method for manufacturing a laminated piezoelectric element according to the first aspect, and is a method for producing a laminated piezoelectric element in which a plurality of piezoelectric elements are laminated, wherein the same is provided with a plurality of internal electrodes. The piezoelectric element sheet material is laminated while shifting the position in the in-plane direction, divided into individual laminated piezoelectric element shapes, and then the internal electrodes of the laminated piezoelectric elements are short-circuited in the lamination direction of the piezoelectric elements on the divided surfaces. There is provided a method for manufacturing a laminated piezoelectric element comprising a step of providing an external electrode to be connected and an external electrode for short-circuiting a plurality of internal electrodes in the same plane.

According to a fourth aspect of the present invention, there is provided an electronic apparatus including the laminated piezoelectric element according to the first or second aspect.

  According to the present invention, the internal electrodes provided at the interfaces of the plurality of piezoelectric elements have the same shape, and by using at least three external electrodes that short-circuit the internal electrodes, only the internal electrodes having the same shape are used. In addition, variations during manufacturing are less likely to occur. One of the external electrodes is a common electrode (GND), for example, a signal is applied to one of the other two external electrodes to change the phase of two different vibrations, or the other two external electrodes are separated. Various driving methods such as exciting two vibrations independently by applying a signal become possible.

  In addition, with this vibrating body structure, the same piezoelectric element sheet material provided with a plurality of internal electrodes is stacked while shifting the position in the in-plane direction, divided into individual vibrating body shapes, and then on the divided surfaces. Since a manufacturing method of providing an external electrode can be adopted, the manufacturing process is simple, and a large amount of vibrating bodies can be manufactured in a short time, so that the manufacturing cost can be greatly reduced.

  In addition, by providing a piezoelectric element that does not have electrodes between the external electrodes, it is possible to prevent short-circuiting of the external electrodes during manufacturing, or when polarizing the portion where the internal electrode short-circuited by this external electrode is provided. Less influence.

  Further, by short-circuiting a plurality of internal electrodes existing in the same plane among at least one of the external electrodes, even when the internal electrodes have the same shape but actually have different internal electrodes It becomes equivalent and can excite various vibrations.

  Also, it has a plurality of conduction means for short-circuiting the plurality of external electrodes, and at least one conduction means can be polarized once if the external electrode grounded during polarization and the external electrode applied with a potential during polarization are short-circuited. At the same time, it is possible to prevent differences in piezoelectric characteristics at portions with different polarization directions, strength reduction due to stress concentration at boundaries with different polarization directions, and the like.

  The vibrating body has a rectangular shape, and can be driven by switching the moving direction of the moving body by reversing the phases of longitudinal vibration and bending vibration excited by the vibrating body by selecting an external electrode to which a driving signal is applied. The circuit becomes simple.

  The vibrating body has a rectangular shape, and the first drive signal or the second drive signal is applied to the plurality of external electrodes, and longitudinal vibration is excited in the vibrator by the first drive signal, so that the second drive If bending vibration is excited in the vibrating body by the signal, longitudinal vibration and bending vibration can be excited independently, and the speed and driving force of the moving body can be varied over a wide range. Accurate positioning control is possible.

  In addition, an electronic device including an ultrasonic motor using these vibrators can be reduced in size, thickness, and power consumption.

  As described above, according to the present invention, since a laminated piezoelectric element that can be manufactured by a simple manufacturing process is used as a vibrating body, it can be driven at a low voltage, and a small and high output and an inexpensive ultrasonic motor can be realized. . In particular, by integrally sintering the entire laminated element, it is possible to obtain an ultrasonic motor with small product characteristic variations, high reliability, low internal loss, and high efficiency. And the electronic device using this can be reduced in size, thickness and power consumption.

It is a figure which shows the structural example of the linear type | mold ultrasonic motor concerning this invention. It is a figure which shows the vibration mode of the laminated piezoelectric element concerning this invention. It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 1 of this invention. It is a figure which shows the manufacturing method of the laminated piezoelectric element concerning this invention. It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 2 of this invention. It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 3 of this invention. It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 4 of this invention. It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 5 of this invention. It is a figure which shows another structure of the laminated piezoelectric element concerning Embodiment 5 of this invention. It is a figure which shows another structure of the laminated piezoelectric element concerning Embodiment 5 of this invention. It is a block diagram which shows the electronic device using the ultrasonic motor concerning this invention.

  Embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a configuration example of a linear ultrasonic motor using the laminated piezoelectric element 1 of the present invention as a vibrating body. A rectangular laminated piezoelectric element 1 is provided with a support member 3 having protrusions 2a and 2b and a recess. The shaft portion 4a of the pressure member 4 has a stepped portion and is guided by the guide hole 5a of the guide plate 5 so as to be movable only in the axial direction. Under the projections 2a and 2b, a moving body 7 guided by the guide members 8a and 8b is provided. The support member 3 engages with the recess of the pressure member 4, and the pressure member 4 is added by the pressure means 6. The protrusions 2a and 2b and the moving body 7 are in contact with each other by pressing.

  By the way, the laminated piezoelectric element 1 excites longitudinal vibration and bending vibration. For example, FIG. 2 shows the state of vibration amplitude with respect to the longitudinal direction of the multilayer piezoelectric element 1, FIG. 2 (a) shows the state of longitudinal vibration, and FIG. 2 (b) shows the state of bending vibration. is there. The central portion of the laminated piezoelectric element 1 serves as a vibration node for both longitudinal vibration and bending vibration, and the support member 3 is provided at this position. Protrusions 2a and 2b are provided at the antinodes of bending vibration. By simultaneously exciting the longitudinal vibration and the bending vibration, the protrusions 2a and 2b drive the moving body 7 by performing an elliptical motion consisting of a displacement in the longitudinal direction of the laminated vibrator 1 and a displacement in the width direction perpendicular thereto. By the way, the two vibration modes are not limited in their orders, and other modes may be used. Further, the moving body 7 may be fixed and the vibrating body itself may be driven.

(Embodiment 1)
A specific configuration example of the laminated piezoelectric element 9 will be described with reference to FIG. 3 (a) and 3 (c) are each a rectangular shape, and are views of the laminated piezoelectric element 9 seen from the front and back, and FIGS. 3 (d) and 3 (e) are cross-sectional views. That is, as shown in FIGS. 3D and 3E, the internal electrodes 10a and 10b or the piezoelectric elements 9a and 9b having the internal electrodes 10c and 10d on one surface are alternately laminated. The internal electrodes 10a, 10b, 10c, and 10d are substantially bisected in the longitudinal direction of the piezoelectric elements 9a and 9b, projecting only in one surface direction of the multilayer piezoelectric element 9, and on the side surface of the multilayer piezoelectric element 9 The external electrodes 11a, 11b, 11c, 11d, and 11e are short-circuited. The external electrodes 11a, 11b, 11c, and 11d short-circuit the internal electrodes 10a and 10b in each of four regions divided by lines connecting the centers of opposite sides in the plane of the multilayer piezoelectric element 9. The external electrode 11e shorts all the internal electrodes 10c and 10d.

  Here, the external electrode 11e is set to GND, and a high voltage is applied to the external electrodes 11a, 11b, 11c, and 11d to perform polarization processing in the stacking direction.

  The method for driving the present laminated piezoelectric element 9 includes, for example, the following two methods. Divided by lines connecting the centers of opposite sides of the multilayer piezoelectric element 9 by applying a drive signal between the external electrodes 11a, 11d and the external electrode 11e or between the external electrodes 11b, 11c and the external electrode 11e. The longitudinal and bending vibrations are excited in the laminated piezoelectric element 9 by expanding and contracting two regions diagonally to the four regions. By switching the region to which the drive signal is applied, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. As another method, the external electrode 11e is set to GND, and drive signals having different phases are applied between the external electrodes 11a and 11d and the external electrodes 11b and 11c, for example, signals different from each other by 90 degrees or −90 degrees to the laminated piezoelectric element 9. Longitudinal vibration and bending vibration are excited. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed.

  Incidentally, a manufacturing method of the laminated piezoelectric element 9 is shown in FIG. 4. For example, electrodes 10 corresponding to a plurality of laminated piezoelectric elements are provided on a sheet 12 of piezoelectric elements having a size capable of taking a plurality of laminated piezoelectric elements 9 by printing or the like. After stacking a plurality of sheets 12, the piezoelectric elements without electrodes are stacked one after the other, temporarily sintered, and the binder is blown off, and then divided into individual laminated piezoelectric elements 9 by dicing or the like, and then fired. The Then, after the external electrodes 11a, 11b, 11c, 11d, and 11e are attached, a polarization process is performed to complete. Since only the same sheet 12 needs to be laminated in this way, all the same operations are repeated including the electrode attaching process of each sheet, and the manufacturing time is greatly shortened and the number of jigs such as an electrode attaching mask is reduced. That's it.

  Here, the dicing portions are indicated by dotted lines 50, but one side of the internal electrode 10 is alternately positioned on the dotted line 50, and after the division, the sheets are alternately formed so as to constitute the internal electrodes 10a, 10b, 10c, and 10d. 12 are stacked with the position shifted. Actually, the electrode 10 on the sheet 12 is slightly larger than the actual internal electrodes 10a, 10b, 10c, and 10d, so that even if a dimensional error occurs during division, the electrode 10 protrudes from the division surface. Set to In this way, by stacking the piezoelectric elements 9c having no electrodes on the uppermost surface, the piezoelectric elements on the uppermost surface and the lowermost surface do not generate a driving force, so that vibrations are balanced, and unnecessary vibrations are unlikely to occur. .

  Here, the laminated piezoelectric element 9 may be bonded to an elastic body such as a metal to constitute a vibrating body, and the short circuit of the electrodes of each piezoelectric element is not limited to the side surface of the laminated piezoelectric element, but a through hole or the like. May be used.

(Embodiment 2)
Next, a modification of the first embodiment is shown below. Here, since the laminated piezoelectric element 13 expands and contracts in the stacking direction, the piezoelectric longitudinal effect can be used and a large output can be obtained.

5 (a) and 5 (c) are views of the laminated piezoelectric element 13 according to the second embodiment having a rectangular shape as viewed from the front and back sides, and FIGS. 5 (d) and 5 (e) are cross-sectional views. is there. That is, as shown in FIGS. 5D and 5E, the piezoelectric elements 13a and 13b having the internal electrodes 14a and 14b or the internal electrodes 14c and 14d on one surface are alternately stacked.
The internal electrodes 14 a, 14 b, 14 c, and 14 d are substantially bisected in the longitudinal direction of the piezoelectric elements 13 a and 13 b, and project only in one surface direction of the laminated piezoelectric element 13. The external electrodes 15a, 15b, 15c, 15d, and 15e are short-circuited. The external electrodes 15a, 15b, 15c, and 15d short-circuit the internal electrodes 14a and 14b in each of four regions divided by lines connecting the centers of opposite sides in the plane of the multilayer piezoelectric element 13. The external electrode 15e short-circuits all the internal electrodes 14c and 14d.

  Here, the external electrode 15e is set to GND, and a high voltage is applied to the external electrodes 15a, 15b, 15c, and 15d to perform polarization processing in the stacking direction.

  The method for driving the present laminated piezoelectric element 13 includes, for example, the following two methods. Divided by lines connecting the centers of opposite sides of the laminated piezoelectric element 13 by applying a drive signal between the external electrodes 15a, 15d and the external electrode 15e or between the external electrodes 15b, 15c and the external electrode 15e. Two regions at the diagonal of the four regions are expanded and contracted, and longitudinal vibration and bending vibration are excited in the laminated piezoelectric element 13. By switching the region to which the drive signal is applied, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. As another method, the external electrode 15e is set to GND and drive signals having different phases are applied between the external electrodes 15a and 15d and the external electrodes 15b and 15c, for example, signals different from each other by 90 degrees or -90 degrees to the laminated piezoelectric element 13. Longitudinal vibration and bending vibration are excited. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed.

(Embodiment 3)
The configuration of the laminated piezoelectric element 16 shown in the third embodiment is shown in FIG. 6, but is basically the same as that shown in the first embodiment, with the difference being the external electrodes 17a, 17b, 17c, 17d and the polarization direction. Since only the driving method is used, only the differences are described and the description of the common points is omitted.

  The external electrode 17e is short-circuited with the internal electrodes 10a and 10b at the center in the width direction of one surface of the multilayer piezoelectric element 16. At both sides of the piezoelectric element portion short-circuited by the external electrode 17e, the internal electrode 10a is short-circuited by the external electrodes 17a and 17b, and the internal electrode 10b is short-circuited by the external electrodes 17c and 17d. On the opposite surface of the laminated piezoelectric element 16, the internal electrodes 10c and 10d are short-circuited by the external electrode 17f.

  Here, polarization is performed by applying a voltage to the external electrodes 17a, 17b, 17c, 17d, and 17e with the external electrode 17f as GND. As a driving method in this case, longitudinal vibration is excited by applying a first drive signal to the external electrode 17e with the external electrode 17f as GND. Further, by applying a second drive signal to the external electrodes 17a and 17d or the external electrodes 17b and 17c, bending vibration is excited, and the moving body 7 is driven. Depending on which external electrode the signal is applied to, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 also changes.

  As another driving method, the external electrode 17f is set to GND and a positive voltage is applied to the external electrodes 17a, 17d and 17e, and a negative voltage is applied to the external electrodes 17b and 17c. As a driving method in this case, first and second driving signals having different phases between the external electrodes 17a, 17b, 17c and 17d and the external electrode 17e, for example, 90 degrees or By applying signals different by −90 degrees, longitudinal vibration and bending vibration are excited in the laminated piezoelectric element 16. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed. This phase is arbitrary, and switching between 0 degree and 180 degrees may be performed.

  The polarization direction is arbitrary, and the same vibration is excited if the phase of the drive signal is reversed according to the polarization direction.

(Embodiment 4)
FIG. 7 shows another example of the laminated piezoelectric element of the present invention. 7 (a) and 7 (c) are views of the laminated piezoelectric element 18 according to the fourth embodiment having a rectangular shape as viewed from the front and back sides, and FIGS. 7 (d) and 7 (e) are cross-sectional views. is there. That is, as shown in FIGS. 7 (d) and 7 (e), piezoelectric elements 18a and 18b having internal electrodes 19a, 19b and 19c or internal electrodes 19d, 19e and 19f on one surface are alternately laminated. ing. The internal electrodes 19a, 19b, 19c, 19d, 19e, and 19f are substantially equally divided into three in the longitudinal direction of the piezoelectric elements 18a and 18b, and project only in one surface direction of the laminated piezoelectric element 18, The side surfaces of the piezoelectric element 18 are short-circuited by external electrodes 20a, 20b, 20c, 20d, 20e, 21a, 21b, 21c, 21d, and 21e. The external electrode 20e short-circuits the internal electrode 19b within one surface of the laminated piezoelectric element 18. The external electrodes 20a and 20b short-circuit the electrode 19a in a region that bisects the laminated piezoelectric element 18 in the longitudinal direction. The external electrodes 20c and 20d short-circuit the electrode 19c in a region that bisects the laminated piezoelectric element 18 in the longitudinal direction.

  Further, the external electrode 21e is short-circuited to the internal electrode 19e in one surface of the multilayer piezoelectric element 18 on the other surface. The external electrodes 21a and 21b short-circuit the electrode 19d in a region that bisects the laminated piezoelectric element 18 in the longitudinal direction. The external electrodes 21c and 21d short-circuit the electrode 19f in a region that bisects the laminated piezoelectric element 18 in the longitudinal direction. For example, a piezoelectric element 18c that does not have an electrode may be inserted at a location located in the gap so that the external electrodes 20a and 20b are not short-circuited.

  Here, the external electrodes 21a, 21b, 21c, 21d, and 21e are set to GND, and a high voltage is applied to the external electrodes 20a, 20b, 20c, 20d, and 20e, whereby polarization processing is performed in the stacking direction.

  This multilayer piezoelectric element 13 is driven by, for example, the external electrodes 21c, 21b, 21e, 20b, and 20c being short-circuited by a conduction means (not shown), and the external electrode 20a shorted by a conduction means (not shown) as the GND. , 20d, 21a, and 21d, by applying a drive signal having a different phase, that is, a first drive signal and a second drive signal, for example, a signal different by 90 degrees or −90 degrees, longitudinal vibrations to the laminated piezoelectric element 18 And bending vibration is excited. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed.

  According to the present invention, since the piezoelectric longitudinal effect is used, a large output can be obtained and the polarization direction can be the same direction. Therefore, the process can be simplified and a high voltage can be used without being destroyed. Also, there is no characteristic variation caused by the difference in polarization direction.

(Embodiment 5)
FIG. 8 shows another example of the laminated piezoelectric element of the present invention. FIGS. 8 (a) and 8 (c) are views of the laminated piezoelectric element 22 corresponding to the example of Embodiment 4 having a rectangular shape, as seen from the front and back sides, and FIGS. 8 (d) and 8 (e). Is a cross-sectional view. That is, as shown in FIGS. 8D and 8E, a structure in which piezoelectric elements 22a and 22b having internal electrodes 23a, 23b and 23c or internal electrodes 23d, 23e and 23f on one surface are alternately laminated. It has become. The internal electrodes 23b and 23e are provided at the center in the longitudinal direction of the piezoelectric elements 22a and 22b. The internal electrodes 23a, 23c, 23d and 23f are provided on both sides of the internal electrodes 23b and 23e. In addition, the side surfaces of the laminated piezoelectric element 22 are short-circuited by external electrodes 24a, 24b, 24c, 24d, 24e, 24f. The external electrode 24e short-circuits the internal electrode 23b within one surface of the laminated piezoelectric element 22. The external electrodes 24a and 24b short-circuit the electrode 23a in a region that bisects the laminated piezoelectric element 18 in the width direction. The external electrodes 24c and 24d short-circuit the electrode 23c in a region that bisects the laminated piezoelectric element 18 in the width direction. On the other side, the external electrode 24f short-circuits the internal electrodes 23d, 23e, and 23f.

  Here, the external electrode 24f is set to GND, and a high voltage in the positive direction is applied to the external electrodes 24a, 24b, and 24e, and a high voltage in the negative direction is applied to the external electrodes 24b and 24c, whereby the polarization process is performed in the stacking direction. .

  This laminated piezoelectric element 22 is driven by, for example, a driving signal having a different phase between the external electrode 24e and the external electrodes 24a, 24b, 24c, and 24d with the external electrode 24f as GND, that is, the first drive signal and the first drive signal. By applying two drive signals, for example, signals different by 90 degrees or −90 degrees, longitudinal vibration and bending vibration are excited in the laminated piezoelectric element 18. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 also changes.

  A modification of the present embodiment will be described with reference to FIGS. FIGS. 9 and 10 are shown corresponding to FIG. 8A, that is, FIGS. 9 and 10 show only the difference in the external electrodes on one surface of the laminated piezoelectric element 22. FIG. In FIG. 9, the external electrode 25e is provided at the center in the width direction of the laminated piezoelectric element 22, and short-circuits the internal electrodes 23a, 23b, and 23c. The external electrodes 25a and 25b short-circuit the internal electrode 23a on both sides of the external electrode 25e. The external electrodes 26c and 26d short-circuit the internal electrode 23c on both sides of the external electrode 25e. Here, the external electrodes 25a, 25b, 25c, 25d and 25e may be polarized and driven corresponding to the external electrodes 24a, 24b, 24c, 24d and 24e in FIG.

  In FIG. 10, the external electrode 26e is provided at the center in the width direction and the longitudinal direction of the laminated piezoelectric element 22, and short-circuits the internal electrodes 23a, 23b, and 23c. The external electrodes 26a and 26b short-circuit the internal electrode 23a on both sides of the external electrode 26e. The external electrodes 26c and 26d short-circuit the internal electrode 23c on both sides of the external electrode 26e. Here, the external electrodes 26a, 26b, 26c, 26d, and 26e may be polarized and driven corresponding to the external electrodes 24a, 24b, 24c, 24d, and 24e in FIG.

This embodiment has a great feature that vibration can be efficiently excited as compared with the third embodiment which takes the same embodiment. An electrode is provided at a node effective for excitation of longitudinal vibration, that is, at the center in the longitudinal direction of the laminated piezoelectric element 22. In the case of FIG. 9, since the electrode 23b of the piezoelectric element that excites bending vibration is not used for driving, it becomes a substantial gap, and the gap between the internal electrodes 23a, 23b, 23c and 23d, 23e, 23f is reduced. Even if it is made smaller, it is not affected by polarization or drive signal application. Therefore, the excitation efficiency of the longitudinal vibration performed using all the electrodes 23a, 23b, 23c, 23d, 23e, and 23f is good. In addition, since the portions of the electrodes 23b and 23e do not contribute much to the excitation of bending vibration, it is not necessary to consume useless power by not using these portions.
(Embodiment 6)
An example in which an electronic apparatus is configured using the ultrasonic motor of the present invention will be described with reference to FIG.

  FIG. 11 is a block diagram in which an ultrasonic motor 100 driven by a drive circuit of the present invention is applied to a drive source of an electronic device. The multilayer piezoelectric elements 1, 9, 13, 16, 18, and 22 are laminated. The moving body 7 frictionally driven by the friction member 2 joined to the piezoelectric elements 1, 9, 16, and 19, the transmission mechanism 32 that operates integrally with the moving body 7, and the output mechanism that operates based on the operation of the transmission mechanism 32 33. Here, an example in which the moving body is a rotating body and the moving body is rotated will be described.

  Here, the transmission mechanism 32 uses a transmission wheel such as a gear train and a friction wheel, for example. The output mechanism 33 includes a paper feed mechanism in a printer, a shutter drive mechanism, a lens drive mechanism, a film winding mechanism in a camera, a pointer in an electronic device and a measuring instrument, an arm mechanism in a robot, and a machine tool. In this case, a tooth tool feeding mechanism, a processing member feeding mechanism, or the like is used.

  Note that an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a robot, a machine tool, a game machine, an optical information device, a medical device, a moving device, and the like can be realized as the electronic device in this embodiment. Furthermore, if the moving body 7 is provided with an output shaft and has a power transmission mechanism for transmitting torque from the output shaft, an ultrasonic motor driving device can be realized.

DESCRIPTION OF SYMBOLS 1, 9, 13, 16, 18, 22 Multilayer piezoelectric element 2 Friction member 3 Support member 4 Pressurization member 6 Pressurization means 7 Moving body 10, 14, 19, 23 Internal electrode 11, 15, 17, 20, 21, 24, 25, 26 External electrode

Claims (6)

A laminated piezoelectric element obtained by laminating a plurality of piezoelectric elements having a plurality of internal electrodes in the same plane,
On the side surface of the multilayer piezoelectric element, an external electrode that short-circuits an internal electrode in the stacking direction of the piezoelectric element, and an external electrode that short-circuits a plurality of internal electrodes in the same plane,
A laminated piezoelectric element comprising: A laminated piezoelectric element obtained by laminating a plurality of piezoelectric elements having a plurality of internal electrodes in the same plane,
A multilayer piezoelectric element comprising: an external electrode that short-circuits the plurality of internal electrodes in the same plane and short-circuits the internal electrodes of the plurality of piezoelectric elements in the stacking direction of the piezoelectric elements. The laminated piezoelectric element according to claim 1 or 2, wherein the laminated piezoelectric element is laminated with a piezoelectric element having no electrode . A plurality of conducting means for short-circuiting the plurality of external electrodes, at least one of said conducting means, according to claim 1, characterized in that short-circuiting the external electrodes plus potential during polarization the external electrode which is grounded when the polarization 4. The laminated piezoelectric element according to any one of items 1 to 3 . A method of manufacturing a laminated piezoelectric element in which a plurality of piezoelectric elements are laminated, wherein the same piezoelectric element sheet material provided with a plurality of internal electrodes is laminated while shifting the position in the in-plane direction to form individual laminated piezoelectric element shapes. A step of providing an external electrode for short-circuiting the internal electrodes of the multilayer piezoelectric element in the stacking direction of the piezoelectric elements and an external electrode for short-circuiting a plurality of internal electrodes in the same plane after the division. A method for producing a laminated piezoelectric element comprising: An electronic device comprising the laminated piezoelectric element according to claim 1 .

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