JP2007153401A - Container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an antistatic container capable of preventing the deposition of dust caused by an electrification, electrostatic breakdown and an adverse influence by the generation of organic gas, and capable of being efficiently mass-produced by vacuum molding and pneumatic molding. <P>SOLUTION: The container is composed of a container body 1 and a lid 2 made of a synthetic resin for storing an article to be kept away from dust. Both the container body 1 and the lid 2 have integrally laminated translucent antistatic layers 6 including extremely thin conductive fibers 5 scattered on both surfaces or either of the surface of a translucent synthetic resin base layer 4. The conductive fibers are stretched during the vacuum molding or pneumatic molding to be kept in contact, thereby preventing the antistatic performance of the antistatic layer 6 from being hindered. This fully prevents the dust deposition. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an antistatic container suitable for accommodating and transporting an article that dislikes dust.

Articles that do not like dust, such as semiconductor wafer-related products, photomask plates (including mask blank plates), liquid crystal displays, and IC products, can be stored and transported in containers that can prevent dust adhesion and electrostatic breakdown due to electrification. is necessary. As such a container, for example, a container having a main body portion and a lid portion made of a vacuum or compressed air body provided with reinforcing ribs for antistatic thermoplastic resin sheet is known (Patent Document 1).
Also, a container in which a plurality of resin partial bodies are solvent-bonded to each other, and the resin partial bodies are composed of 50 to 95% by weight of a polyacrylonitrile resin and 5 to 50% by weight of a hydrophilic polymer. What consists of a thing is also known (patent document 2).
JP 2005-173556 A JP 2005-145469 A

  Since the container of patent document 1 is what manufactures a main-body part and a cover body part by carrying out the vacuum or pressure forming of the antistatic thermoplastic resin sheet, it has several resin partial bodies like the container of patent document 2. Compared to those manufactured by solvent bonding to each other, there is an advantage that manufacturing is easy and mass productivity is excellent. However, since the containers of Patent Documents 1 and 2 use a sheet or plate made of an antistatic resin composition comprising a polyacrylonitrile-based resin and a hydrophilic polymer as materials, they are shown in the experimental data described later. As described above, there is a problem that the surface resistivity of the container is large and it is difficult to exhibit sufficient antistatic performance. In addition, as shown in experimental data described later, various organic gases are generated, and the organic gas may adversely affect the stored articles, for example, haze of a photomask plate or the like stored in the container is deteriorated.

  The present invention has been made to cope with the above circumstances, and can prevent dust adhesion and electrostatic breakdown due to electrification, and can be efficiently mass-produced by vacuum forming or pressure forming without causing adverse effects due to the generation of organic gas. Providing an antistatic container that can be used is an issue to be solved.

  In order to solve the above problems, the container of the present invention is a container made of a synthetic resin container main body and a lid, and contains an article that dislikes dust inside the container main body and the lid. However, the light-transmitting synthetic resin base layer is formed by laminating and integrating a light-transmitting antistatic layer in which ultrafine conductive fibers are dispersed on both surfaces or any one surface thereof.

In the container of the present invention, the ultrafine conductive fiber is preferably a carbon nanotube, and the basis weight of the carbon nanotube contained in the antistatic layer is preferably 0.5 to 50 mg / m ² . Further, the light-transmitting synthetic resin base layer preferably shields light in the ultraviolet region and short-wavelength visible region, and in particular, polyethylene terephthalate or polycarbonate that substantially blocks light having a wavelength of 520 nm or less. It is preferable that it is a base layer which consists of polyester resins, such as. It is also preferable to sandwich a sealing material between the upper flange portion of the container body and the lower flange portion of the lid that are in contact with each other.

  In the container of the present invention, both the container body and the lid are formed by laminating and integrating a light-transmitting antistatic layer in which ultrafine conductive fibers are dispersed on both surfaces or any one surface of the light-transmitting synthetic resin base layer. The antistatic layer prevents charging and prevents dust from adhering, and can prevent adverse effects of the dust on the contained articles. Since the container main body and the lid are both translucent, the type and content of the contained article can be confirmed by seeing through from the outside.

  Further, as in the container of the present invention, if the antistatic layer is one in which ultrafine conductive fibers are dispersed, a material resin plate in which the antistatic layer is laminated on the synthetic resin base layer is formed by vacuum or pressure forming and the container body Even when the lid is manufactured, it is possible to maintain the contact state while the ultrafine conductive fibers are stretched along with the stretching deformation of the material resin plate during vacuum or pressure forming, and the antistatic containing conductive particles such as metal oxides. Since the contact between the conductive particles is not cut off as the layer is stretched and deformed, sufficient antistatic performance that is substantially the same as that before the secondary processing such as vacuum or pressure forming can be exhibited. . Therefore, since the container body and the lid can be easily manufactured by adopting means such as vacuum or pressure forming, the manufacturing efficiency of the container of the present invention is improved accordingly.

Furthermore, the container in which the ultrafine conductive fiber is a carbon nanotube and the basis weight of the carbon nanotube in the antistatic layer is 0.5 to 50 mg / m ² substantially inhibits the translucency of the antistatic layer. In addition, since the surface resistivity exhibits a sufficient antistatic property of about 10 ⁵ to 10 ¹¹ Ω / □, adhesion of dust and the like can be reliably prevented.
In addition, the container in which the synthetic resin base layer of the container body and the lid shields light in the ultraviolet region and the visible light region of a short wavelength can be synthesized even if it contains a mask blank plate of a photomask that is exposed to ultraviolet rays as an article. Since the ultraviolet rays are shielded by the resin base layer, it is possible to prevent the mask blank plate from being exposed. In particular, the container in which the synthetic resin base layer of the container main body and the lid body is a base layer made of a polyester resin such as polyethylene terephthalate or polycarbonate that substantially blocks light having a wavelength of 520 nm or less, in addition to the above-described anti-photosensitive effect As shown in the experimental data to be described later, the generation of organic gas is substantially absent and the elution of ions is negligible, so that it is possible to prevent the adverse effects of the organic gas and ions on the contained article. In addition, a container in which a sealing material is sandwiched between the flange part around the upper end of the container body and the flange part around the lower end of the lid body, which are in contact with each other, prevents dust from entering the container by the sealing material. Can do.

  Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

  1 is a front view of a container according to an embodiment of the present invention, FIG. 2 is a longitudinal sectional view of the container, FIG. 3 is an exploded sectional view of an end of the container, and FIG. 4 is a container body or lid of the container. FIG.

  This container accommodates, conveys and stores semiconductor-related products, photomask plates (including mask blank plates), liquid crystal displays, IC products, and other articles that do not like dust. As shown, it consists of a container body 1 and a lid 2. Then, in the flange portion 1a around the upper end of the container main body 1 and the flange portion 2a around the lower end of the lid body 2 as shown in FIG. The sealing material 3 is fitted into the grooves 1b and 2b and is sandwiched between the flange portions 1a and 2a. Therefore, the sealing material 3 prevents entry of dust from the outside into the container.

  Both the container body 1 and the lid body 2 are made of a material resin plate as shown in FIG. 4, that is, a translucent antistatic material in which ultrafine conductive fibers 5 are dispersed on both the inside and outside surfaces of the translucent synthetic resin base layer 4. A material resin plate in which the layer 6 is laminated and integrated through the adhesive layer 7 is used, and this is manufactured by performing secondary processing such as vacuum forming or pressure forming. Therefore, both the container body 1 and the lid body 2 have a five-layer laminated structure shown in FIG. Further, reinforcing ribs (not shown) or the like are formed on the container body 1 and the lid body 2 as necessary.

  The synthetic resin base layer 4 of the container body 1 and the lid body 2 may be a light-transmitting thermoplastic resin layer. For example, polyolefin resin such as polyethylene, polypropylene, cyclic polyolefin, polyvinyl chloride, polymethyl methacrylate, Polyvinyl resins such as polystyrene, polycarbonate, polyethylene terephthalate, ethylene-1,4-cyclohexylene dimethylene terephthalate copolymer, polyester resins such as aromatic polyester, ABS resins, copolymer resins of these resins, these A base layer made of a mixed resin of these resins is preferably used. Preferably, pigments, dyes, ultraviolet absorbers and the like are appropriately blended with these thermoplastic resins to emit light in the ultraviolet region and the visible region of short wavelengths. A light-transmitting synthetic resin base layer that is shielded is employed. Such a synthetic resin base layer 11 is colored orange or yellow. If the synthetic resin base layer 4 of the container body 1 and the lid 2 shields light in the ultraviolet region and the short wavelength visible light region as described above, a photomask that may be exposed to ultraviolet rays as a contained article. Even when the mask blank plate is accommodated, since the ultraviolet rays are shielded by the synthetic resin base layer 4, there is an advantage that the mask blank plate or the like can be prevented from being exposed.

  More preferable as the synthetic resin base layer 4 is a base layer made of a polyester-based resin such as polyethylene terephthalate or polycarbonate, which contains a pigment, a dye or an ultraviolet absorber so as to substantially block light having a wavelength of 520 nm or less. Since the container body 1 and the lid body 2 having such a polyester resin base layer do not substantially generate 2-ethyl-1-hexanol, phenol, or other organic gas, which will be described later, the stored articles (for example, There is an advantage that it is possible to prevent adverse effects such as the occurrence of haze on the foot mask plate). In particular, when the synthetic resin base layer 4 is made of copolymerized polyethylene terephthalate in which 10 to 70% of the ethylene glycol component is substituted with cyclohexanedimethanol, in addition to the above-mentioned advantages, the total light transmittance is high and thus the transparency is improved. In addition, vacuum or pressure formability and cold secondary bending workability are improved, and since it is amorphous, there are advantages such as easy production, which is extremely preferable.

The translucent antistatic layer 6 laminated on both the inner and outer surfaces of the synthetic resin base layer 4 via the adhesive layer 7 is a layer in which the ultrafine conductive fibers 5 are dispersed, and the basis weight of the ultrafine conductive fibers 5 is adjusted. By improving the dispersibility, the surface resistivity is adjusted to a range of 10 ⁵ to 10 ¹¹ Ω / □ so that sufficient antistatic performance can be exhibited. A layer having a surface resistivity lower than 10 ⁵ Ω / □ may cause another problem such as a spark because it exhibits conductivity rather than antistatic properties, and has a surface resistance higher than 10 ¹¹ Ω / □. Any layer having a rate is not preferable because sufficient anti-static performance is not exhibited and adhesion of dust cannot be prevented. In order to obtain an excellent dust adhesion preventing effect, it is preferable to adjust the surface resistivity of the antistatic layer 6 to a range of 10 ⁷ to 10 ¹⁰ Ω / □.

The ultrafine conductive fibers 5 of the antistatic layer 6 are preferably dispersed and in contact with each other without agglomeration. That is, it is preferable that the ultrafine conductive fibers 5 are separated and contacted with each other in a state in which the fine conductive fibers 5 are separated one by one without being entangled or in a state where a plurality of bundles are separated one by one. When dispersed in this way, compared to the case of agglomeration, since the ultrafine conductive fibers 5 are present in a wide range, the chances of contact between these fibers are significantly increased, resulting in conduction. The antistatic property can be remarkably improved. When the ultrafine conductive fiber is dispersed without being sufficiently unraveled, it is necessary to contain a large amount of ultrafine conductive fiber in order to obtain a surface resistivity of 10 ⁵ to 10 ¹¹ Ω / □. However, if the fine conductive fibers are dispersed as described above, the same contact opportunity can be obtained even if the amount of the fine conductive fibers is reduced. Only the translucency of the antistatic layer 6 can be improved.

  The fine conductive fibers 5 do not have to be separated one by one or one bundle at a time, and there may be small agglomerates that are partially entangled. The diameter is preferably not more than 0.5 μm.

  The antistatic layer 6 may be a layer of only the ultrafine conductive fibers 5, but is preferably a layer in which the ultrafine conductive fibers 5 are dispersed in the above-described dispersion state in a binder resin. When the antistatic layer 6 is made of the ultrafine conductive fiber 5 and a transparent binder resin as in the latter case, the ultrafine conductive fiber 5 may be dispersed in the above dispersion state inside the binder resin, or the ultrafine conductive fiber. Part of 5 may protrude or be exposed from the surface of the binder resin and may be dispersed in the above dispersed state, or may have both of these dispersed states.

  As the ultrafine conductive fiber 5, an ultrafine carbon fiber such as carbon nanotube, carbon nanohorn, carbon nanowire, carbon nanofiber, and graphite fibril, or an ultrafine length such as metal nanotube or nanowire such as platinum, gold, silver, nickel, and silicon. A metal fiber, or a metal oxide nanotube such as zinc oxide, or an ultrafine metal oxide fiber such as a nanowire having a diameter of 0.3 to 100 nm and a length of 0.1 to 20 μm, preferably What is 0.1-10 micrometers is used.

Among these ultrafine conductive fibers 5, carbon nanotubes are extremely thin fibers with a diameter of 0.3 to 80 nm, and if they are dispersed one by one or one bundle, the light transmission is less likely to be disturbed. This is particularly preferable for obtaining the antistatic layer 6 having a good translucency with a rate of 50% or more. When such carbon nanotubes are dispersed in the antistatic layer 6 without agglomerating in the above dispersion state, and the basis weight of the carbon nanotubes is adjusted to a range of 0.5 to 50 mg / m ² , the thickness of the antistatic layer 6 is increased. The surface resistivity of the antistatic layer 6 can be controlled to 10 ⁵ to 10 ¹¹ Ω / □ even if the light transmission is improved by reducing the thickness to 500 nm or less, preferably 100 nm or less, more preferably 50 nm or less. it can.

  Here, “without agglomeration” means that the antistatic layer 6 is observed with an optical microscope, and if there is an agglomerated mass, its major axis and minor axis are measured, and the average value is 0.5 μm or more. Means there is no lump. The weight per unit area of the carbon nanotubes is determined by observing the antistatic layer 6 with an electron microscope, measuring the area ratio of the carbon nanotubes in the plane area, and measuring the thickness of the carbon nanotubes with the specific gravity of the carbon nanotubes (graphite It is a value calculated by multiplying the average value 2.2 of the literature values 2.1 to 2.3.

  The carbon nanotubes described above include multi-walled carbon nanotubes concentrically provided with a plurality of cylindrically closed carbon walls having different diameters around the central axis, and a single cylindrically closed carbon wall around the central axis. Single-walled carbon nanotubes provided. The former multi-walled carbon nanotubes are dispersed and contacted with each other in a separated state, and the latter single-walled carbon nanotubes are dispersed together in bundles and contacted with each other in a separated state. . Preferable multi-walled carbon nanotubes have 2 to 30 carbon walls, more preferably 2 to 15 layers, and the amount of light transmission can be improved if the layers overlap in this range. Moreover, 10 to 50 single-walled carbon nanotubes are preferably used in a bundle.

  In order to achieve good antistatic performance and translucency by containing a small amount of carbon nanotubes in the antistatic layer 6, it is necessary to improve the dispersibility of the carbon nanotubes as described above. It is preferable to use carbon nanotubes with excellent thickness and length, and to use a dispersant together. Multi-walled carbon nanotubes having an outer diameter of 1 to 20 nm and an aspect ratio of 50 to 10000, particularly those having an outer diameter of 5 to 15 nm and an aspect ratio of 100 to 1000 are excellent in dispersibility and are preferably used. Is done. In addition, the single-walled carbon nanotube has a bundle outer diameter of 1 to 20 nm and a length of 0.1 to 10 μm, particularly a bundle outer diameter of 5 to 15 nm and a length of 0.5 to 5 μm. Is preferably used because of its excellent dispersibility.

  Examples of the dispersant added to the antistatic layer 6 include polymeric dispersants such as alkylammonium salt solutions of acidic polymers, tertiary amine-modified acrylic copolymers, and polyoxyethylene-polyoxypropylene copolymers, and cups. A ring agent or the like is preferably used, and the addition amount thereof is about 5 to 85% by mass, preferably about 10 to 40% by mass with respect to the carbon nanotube.

  The binder resin of the antistatic layer 6 is a thermoplastic resin such as polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, polymethyl methacrylate, nitrocellulose, chlorinated polyethylene, chlorinated polypropylene, and vinylidene fluoride. Preferably used. An inorganic material such as colloidal silica may be added to these binder resins. In that case, there is an advantage that the wear resistance of the antistatic layer 13 is improved.

  Further, a thin transparent resin layer having a thickness of about 20 to 500 nm made of only the above binder resin may be provided on the surface of the antistatic layer 6. In addition to the improvement in chemical properties, it is possible to prevent the ultrafine conductive fibers 5 from falling off, so that there is an advantage that the antistatic performance over a long period can be maintained. In particular, when the antistatic layer 6 is a layer composed of only carbon nanotubes (which may contain a very small amount of resin), the above-mentioned transparent resin layer is preferably provided because the carbon nanotubes may fall off. In addition, when the content of the carbon nanotube is made zero or very small on the surface of the antistatic layer 6 and the content is increased as it approaches the opposite surface of the antistatic layer 6, Even when carbon nanotubes are included in the carbon nanotubes, the chemical resistance can be improved and the carbon nanotubes can be prevented from falling off as described above.

  Further, the antistatic layer 6 may contain a powder of conductive metal fine particles such as tin oxide as long as the transparency is not impaired, and addition of an ultraviolet absorber, a surface modifier, a stabilizer, etc. An agent may be added as appropriate to improve weather resistance and other physical properties.

  The thickness of the antistatic layer 6 is preferably 50 to 500 nm. If the thickness is less than 50 nm, the chance of contact between the ultrafine conductive fibers 5 is reduced and it becomes difficult to exhibit antistatic performance. On the other hand, if it is thicker than 500 nm, it is not preferable because the transparency is lowered, and it is not preferable because the surface resistivity may be too low to cause a spark or the like.

  The adhesive layer 7 in the container body 1 and the lid 2 is a layer made of a light-transmitting thermoplastic resin that is the same as or compatible with the binder resin of the synthetic resin base layer 4 or the antistatic layer 6, for example, An adhesive layer made of an acrylic resin, a vinyl chloride resin, a vinyl chloride-vinyl acetate copolymer resin, a modified urethane resin, or the like is preferable. The thickness of the adhesive layer 7 may be about 0.5 to 100 μm. If the thickness is less than 0.5 μm, the adhesive performance is inferior, and even if the thickness is greater than 100 μm, no further improvement in the adhesive performance is observed. A preferable thickness of the adhesive layer 7 is about 0.5 to 30 μm, and a more preferable thickness is about 1 to 10 μm. The adhesive layer 7 may be omitted if the binder resin of the antistatic layer 6 has good adhesion to the synthetic resin base layer 4.

  In order to obtain sufficient strength, the material resin plate of the container body 1 and the lid body 2 of the five-layer laminated structure in which the antistatic layer 6 is laminated on both the inner and outer surfaces of the synthetic resin base layer 4 via the adhesive layer 7 is about 2 to 10 mm. It is preferable to have a thickness of

Such a material resin plate is manufactured, for example, by the following method.
One manufacturing method is to apply an adhesive paint obtained by dissolving the adhesive resin in a solvent on both surfaces of a light-transmitting thermoplastic resin plate to be the synthetic resin base layer 4, and form an adhesive layer 7 by drying. Next, an antistatic coating material in which the binder resin is dissolved in a solvent to uniformly disperse the ultrafine conductive fibers 5 is applied on the adhesive layer 7 and dried to form the antistatic layer 6, thereby forming a resin resin plate. Is the way to get.

  Another manufacturing method is to manufacture the antistatic laminate film by applying the antistatic coating to the surface of the adhesive layer film made of the adhesive resin and drying to form the antistatic layer 6. In this method, the antistatic laminate film is laminated on both surfaces of the thermoplastic resin plate to be the synthetic resin base layer 4 by means such as thermocompression bonding or extrusion laminating to obtain a material resin plate.

  In still another manufacturing method, the antistatic coating is applied to the surface of the release film and dried to form the antistatic layer 6, and the adhesive coating is applied and dried thereon to form the adhesive layer 7. Thus, an antistatic transfer film is manufactured, and this antistatic transfer film is bonded to the antistatic layer 6 by being thermocompression bonded to the thermoplastic resin plate so that the adhesive layer 7 is on the synthetic resin base layer 4 side. In this method, the material resin plate is obtained by transferring the layer 7.

  When the container body 1 and the lid body 2 are manufactured by subjecting the material resin plate to secondary processing such as vacuum forming or pressure forming, the material resin plate is stretched and deformed at the time of molding. Since the ultrafine conductive fiber 5 of the electric layer 6 can maintain the contact state between the fibers while being stretched (stretched) along with the deformation, the container body 1 and the lid body 2 are substantially made of the material resin plate before molding. Expresses good antistatic performance that remains unchanged. That is, even when the material resin plate is stretched and deformed by about 300% by secondary processing such as vacuum forming or pressure forming, the ultrafine conductive fibers 5 of the antistatic layer 6 are kept in contact with each other, and the material resin before forming Excellent anti-static performance that is substantially the same as that of the plate. Therefore, the container composed of the container main body 1 and the lid body 2 can sufficiently prevent the adhesion of dust and protect the stored articles from the dust.

  In this embodiment, both the container body 1 and the lid body 2 have a five-layer laminated structure in which the antistatic layer 6 is laminated on both the inner and outer surfaces of the synthetic resin base layer 4 via the adhesive layer 7. A laminated structure in which the antistatic layer 6 is laminated directly or via the adhesive layer 7 only on the inner surface or the outer surface of the base layer 4 may be employed. When the antistatic layer 6 is provided on the outer surface, it prevents dust from adhering to the outer surface during storage and transportation, and prevents dust from being caught when the case is opened, thereby preventing dust from adhering to the photomask plate and the like. . Further, if the antistatic layer 6 is provided on the inner surface, it is possible to prevent the dust from adhering to the inner surface of the case and to eliminate the adhesion due to the dust falling on the photomask plate.

  A holding member (not shown) for holding the contained articles, a partitioning member (not shown) for separating a plurality of contained articles, etc., are disposed inside the container, particularly the inside of the container body 1 as necessary. Is preferred. For example, when the contained article is a plate-like product such as a photomask plate, it is preferable to arrange a holding member that holds the end portion from both sides, and the contained article is a semiconductor wafer related product or the like. In such a case, it is preferable to arrange the partition members at a predetermined interval. Furthermore, a container holding these plate-like bodies, a container containing semiconductor wafer-related products between partition members, and the like can be placed in the container of the present invention.

  Such a container composed of the container body 1 and the lid body 2 is bound with a belt (not shown) or the like so that the container body 1 and the lid body 2 are not separated from each other, or connected to the container body 1 and the lid body 2. It is transported and stored after being tightly coupled and tightened so as not to be separated by a metal fitting (not shown). Further, if necessary, a handle may be provided on the container body 1 to facilitate carrying.

  Next, as a reference example, various physical properties of a polyester resin plate in which antistatic layers are laminated on both surfaces to be a material resin plate of the container of the present invention will be described.

[Reference example]
A vinyl chloride-vinyl acetate copolymer resin as a binder resin is dissolved in a solvent (cyclohexanone), and a single-walled carbon nanotube [the diameter synthesized based on the literature Chemical Physics Letters 323 (2000), P580-585 is 1.3- 1.8 nm one] and an alkylammonium salt of an acidic polymer as a dispersing agent, and uniformly mixed and dispersed to obtain 0.3% by mass of single-walled carbon nanotubes, 0.1% by mass of dispersing agent, and binder resin. A coating liquid containing 2.0% by mass (hereinafter referred to as CNT coating liquid) was prepared.

  As the adhesive layer film, a polymethyl methacrylate film (PMMA film) having a thickness of 100 μm, a total light transmittance of 94%, and a haze of 0.6% is used. The above CNT coating solution is applied to the surface of the film and dried. Thus, an antistatic laminate film was manufactured by forming an antistatic layer having a thickness of 100 nm. And this antistatic laminate film is formed on both sides of a polycarbonate resin plate (PC1600 manufactured by Takiron Co., Ltd.) having a thickness of 5 mm, a total light transmittance of 89.5%, and a haze of 0.2%. By overlapping and thermocompression bonding, a material resin plate A was obtained in which the antistatic layer was laminated and integrated on both surfaces of the polycarbonate resin layer via an adhesive layer.

  Further, the antistatic laminate film is a polyethylene terephthalate resin plate having a thickness of 5 mm, a total light transmittance of 45.0%, and a haze of 0.5% (adding a colorant and an ultraviolet absorber to emit light having a wavelength of 520 nm or less. The antistatic layer is formed on both sides of the polyethylene terephthalate resin layer via an adhesive layer by thermocompression bonding on both sides of the substantially transparent orange amorphous polyethylene terephthalate resin plate (PET-6025 manufactured by Takiron). A laminated material resin plate B was obtained.

  For these material resin plates A and B, surface resistivity, saturation voltage, half-life, wear amount, generated gas (outgas), eluted ions, deflection temperature under load, total light transmittance, and light transmittance at a wavelength of 500 nm are measured. did. The results are shown in Table 1 below.

The surface resistivity is a value measured based on JIS K6911, and the deflection temperature under load is a value measured based on JIS K7191. In addition, the saturation voltage and half-life are determined using a static Honest meter, after applying an applied voltage of 10,000 V for 30 seconds, 23 ° C., 50% RH, a voltage application part-sample distance of 20 mm, and a voltage detection part-sample distance. It is a value measured under the condition of 15 mm. The amount of wear is a value measured under the conditions of wear wheel CS-10F, load 500 g × 2, 60 rpm, 1000 revolutions using a rotary ablation tester, and the generated gas is 23 ° C. based on the dynamic headspace method. It collected 2 hours, the total gas amount of the value in terms of hexadecane conversion value (detection limit 0.01ng ^/ cm 2 ^/ 2hr). The eluted ions are obtained by measuring chlorine ions, nitrate ions, phosphite ions, phosphate ions and sulfate ions using a high sensitivity ion chromatograph IC7000. The total light transmittance is a value measured based on JIS K7361-1, and the light transmittance at a wavelength of 500 nm is a value measured using Shimadzu Shimadzu spectrophotometer UV-3100PC.

  For comparison, a conventional antistatic material resin plate molded with an antistatic resin composition comprising a polyacrylonitrile-based resin and a hydrophilic polymer, similarly, surface resistivity, saturation voltage, half-life, The amount of wear, generated gas (outgas), eluted ions, deflection temperature under load, total light transmittance, and light transmittance at a wavelength of 500 nm were measured. The results are shown in Table 1 below.

Table 1 shows that the material resin plates (A) and (B) of the container of the present invention all ^exhibit sufficient antistatic performance with a surface resistivity of the order of 10 ^{7 to 8} Ω / □. It can be seen that the material resin plate has a surface resistivity of the order of 10 ¹² Ω / □ and has substantially no antistatic performance. Furthermore, the material resin plates (A) and (B) of the container of the present invention both discharge instantaneously with a half-life of 1 second or less, whereas the conventional material resin plates require a half-life of 4 seconds, It can be seen that it takes time to discharge. Therefore, the container of the present invention using the material resin plates (A) and (B) can prevent electrostatic breakdown due to charging, but the conventional container is considered to have a risk of electrostatic breakdown. Furthermore, the container of the present invention using the material resin plates (A) and (B) is sufficiently prevented from adhering dust by charging, but the conventional container is insufficient to prevent the adhesion of dust.

Further, the material resin plate of the present invention the container (A) (B) either, compared generated gas that is below the detection limit, the conventional materials resin plate generated gas is Toka 44.96ng ^/ cm 2 ^/ 2hr In many cases, therefore, the container of the present invention is substantially not adversely affected by the generated gas, whereas the container is substantially not adversely affected by the generated gas (for example, haze deterioration).

  Furthermore, the material resin plates (A) and (B) of the container of the present invention are all superior to the conventional material resin plates in terms of saturation voltage, half-life, wear amount, deflection temperature under load, and the like. The container is considered to be of higher quality than conventional containers.

  Furthermore, the material resin plates (A) and (B) of the present invention both have a high total light transmittance and excellent transparency, and the contained articles can be easily seen through from the outside, and their types and contents are confirmed. You can see that The material resin plate B transmits only 0.2% of light with a wavelength of 500 nm and shields light in the visible light region with a short wavelength, thereby eliminating the influence of the light on the contained article. I understand that I can do it.

  As described above, the container of the present invention is formed by laminating and integrating the translucent antistatic layer 6 in which the ultrafine conductive fibers 5 are dispersed on both surfaces or any one surface of the translucent synthetic resin base layer 4. The container body 1 and the lid body 2 are manufactured by vacuum or pressure molding of the material resin plate, and thus have good antistatic performance even when secondary processing such as vacuum molding or pressure molding is performed. In addition, since no dust adheres to the container body 1 and the lid body 2 and the dust does not enter the inside by the sealing material 3, it is possible to prevent adverse effects of the dust on the contained articles. The contained article W can be easily confirmed by seeing through the inner plate-like article W through the translucent container main body 1 and the lid 2, and the contained article is photosensitive like a mask blank plate. Even if there is a fear of the above, since the ultraviolet rays are shielded by the synthetic resin base layer 4 of the container body 1 and the lid 2, there is no concern that the contained article is exposed. In addition, since the container of the present invention is substantially free from the generation of organic gas and the elution of ions, there is no fear that the contained article is adversely affected by the organic gas or the eluted ions.

It is a front view of the container concerning one embodiment of the present invention. It is a longitudinal cross-sectional view of the same container. It is a disassembled sectional view of the edge part of the container. It is a partial expanded sectional view of the container main body or lid of the container.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container body 2 Cover body 3 Sealing material 4 Synthetic resin base layer 5 Extra fine conductive fiber 6 Antistatic layer 7 Adhesive layer

Claims (6)

  A container body made of a synthetic resin and a cover body, and a container for storing an article that dislikes dust inside the container body, wherein both the container body and the cover body are both surfaces of the translucent synthetic resin base layer. A container characterized in that a light-transmitting antistatic layer in which ultrafine conductive fibers are dispersed on one side is laminated and integrated.   The container according to claim 1, wherein the ultrafine conductive fiber is a carbon nanotube. The container according to claim ² , wherein the basis weight of the carbon nanotubes contained in the antistatic layer is 0.5 to 50 mg / m2.   2. The container according to claim 1, wherein the light-transmitting synthetic resin base layer shields light in an ultraviolet region and a short wavelength visible region.   The container according to claim 4, wherein the light-transmitting synthetic resin base layer is a base layer made of a polyester resin such as polyethylene terephthalate or polycarbonate that substantially blocks light having a wavelength of 520 nm or less. The container according to claim 1, wherein a sealing material is sandwiched between a flange portion around the upper end of the container main body and the flange portion around the lower end of the lid body.

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