JP2007140506A - Inspection stage for liquid crystal display panel inspecting equipment - Google Patents

Inspection stage for liquid crystal display panel inspecting equipment Download PDF

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JP2007140506A
JP2007140506A JP2006290974A JP2006290974A JP2007140506A JP 2007140506 A JP2007140506 A JP 2007140506A JP 2006290974 A JP2006290974 A JP 2006290974A JP 2006290974 A JP2006290974 A JP 2006290974A JP 2007140506 A JP2007140506 A JP 2007140506A
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inspection stage
plate
optical plate
work table
liquid crystal
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Jae Hun Park
宰 勳 朴
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PAIKOMU CORP
Soulbrain ENG Co Ltd
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PAIKOMU CORP
Phicom Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133524—Light-guides, e.g. fibre-optic bundles, louvered or jalousie light-guides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/69—Arrangements or methods for testing or calibrating a device

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection stage which can prevent an electrostatic attraction phenomenon of a light guide plate and a diffusion plate and where a liquid crystal display panel is mounted. <P>SOLUTION: The inspection stage includes a worktable where the liquid crystal display panel to be inspected is mounted on its top surface, a backlight unit arranged on the bottom surface of the worktable, a first optical plate provided to the worktable, a second optical plate placed on the first optical plate, and a height adjusting member which adjusts the height of the optical plate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は液晶表示パネルの検査装備に係り、より詳細には点灯検査のための液晶表示パネルが置かれる検査ステージに関する。   The present invention relates to an inspection equipment for a liquid crystal display panel, and more particularly to an inspection stage on which a liquid crystal display panel for lighting inspection is placed.

一般に、平板ディスプレイの注力製品である液晶表示装置（ＴＦＴ−ＬＣＤ）は、量産技術確保と研究開発の成果により大型化と高解像度化が急速度に進行され、ノートパソコン用のみならず、大型モニター応用製品としても開発されて、従来のＣＲＴ製品を漸次代替して、ディスプレイ産業での重要性が漸次増えている。最近の情報化社会におけるディスプレイは、視覚情報伝達媒体としてその重要性がより一層強調されており、特に、全ての電子製品の軽薄短小傾向によって、低消費電力化、薄型化、軽量化、高画質、携帯性がより重要になっている。   In general, liquid crystal display devices (TFT-LCDs), which are the focus of flat panel displays, are rapidly increasing in size and resolution due to the achievement of mass production technology and research and development. It has also been developed as an application product, gradually replacing the conventional CRT product, and gradually gaining importance in the display industry. The display in the modern information society has been more emphasized as a visual information transmission medium. In particular, all electronic products are becoming lighter, thinner and lighter, resulting in lower power consumption, thinner, lighter, and higher image quality. Portability is becoming more important.

液晶表示装置は、平板ディスプレイのこのような条件を満足させることができる性能のみならず、量産性まで有するディスプレイ装置である。従って、これを利用した各種新製品創出が急速度で行われており、電子産業界で半導体以上にその重要性が爆発的に増加する次世帯注力技術として注目されている。   The liquid crystal display device is a display device having not only performance that can satisfy such conditions of a flat panel display but also mass production. Accordingly, various new products are being created at a rapid pace, and it is attracting attention as a next-generation household-focused technology whose importance has increased explosively over the semiconductor industry.

このような液晶表示装置は、製造ラインの最終段階で点灯検査を行うことになるが、これは、特定な検査設備でプローブユニットを利用して液晶表示パネルのデータラインとゲートラインのそれぞれの断線検査と色相検査、そして顕微鏡等を利用した肉眼検査を実施している。   Such a liquid crystal display device performs a lighting inspection at the final stage of the production line. This is because the data line and the gate line of the liquid crystal display panel are disconnected using a probe unit in a specific inspection facility. We conduct inspections, hue inspections, and visual inspections using microscopes.

このような検査装置には、液晶表示パネルが載置される検査ステージを具備される。しかし、この検査ステージは、次のような問題点を有する。検査ステージで使用される導光板と拡散板は、相互摩擦接触によって静電気、即ち、摩擦電荷を発生する。このような摩擦電荷の発生で拡散板が導光板の上面に張り付く吸着現象によって斑が発生され、検査進行が不可能な状況が頻繁に発生されるという問題点があった。又、偏光板が拡散板の熱変形によってワークテーブルの上面に突出されながらワークテーブルの上面に置かれた液晶表示パネルを押して、液晶表示パネルの検査進行が不可能な状態が発生する場合もある。
韓国特許出願公開第２０００−６４３１５号明細書 韓国特許出願公開第２００１−５４２７９号明細書 Such an inspection apparatus includes an inspection stage on which a liquid crystal display panel is placed. However, this inspection stage has the following problems. The light guide plate and the diffusing plate used in the inspection stage generate static electricity, that is, a triboelectric charge by mutual frictional contact. There is a problem in that spots are generated due to the adsorption phenomenon that the diffusion plate sticks to the upper surface of the light guide plate due to the generation of such frictional charges, and the situation in which the inspection cannot be performed frequently occurs. In addition, the liquid crystal display panel placed on the upper surface of the work table may be pushed while the polarizing plate protrudes from the upper surface of the work table due to thermal deformation of the diffusion plate, which may cause a state where the inspection of the liquid crystal display panel cannot proceed. .
Korean Patent Application Publication No. 2000-64315 Korean Patent Application Publication No. 2001-54279 Specification

本発明は、前述した問題点を鑑みてなされたものであり、その目的は、静電気による導光板と拡散板の吸着現象を防止することができる液晶表示パネル検査装備の検査ステージを提供することにある。
本発明の他の目的は、偏光板がワークテーブルの上面に突出されることを防止することができる液晶表示パネル検査装備の検査ステージを提供することにある。
本発明の更に他の目的は、ワークテーブルに設けられた導光板の高低を調節することができる液晶表示パネル検査装備の検査ステージを提供することにある。 The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an inspection stage of a liquid crystal display panel inspection equipment that can prevent the adsorption phenomenon of the light guide plate and the diffusion plate due to static electricity. is there.
Another object of the present invention is to provide an inspection stage of a liquid crystal display panel inspection equipment that can prevent a polarizing plate from protruding on the upper surface of a work table.
Still another object of the present invention is to provide an inspection stage of a liquid crystal display panel inspection equipment that can adjust the height of a light guide plate provided on a work table.

前述した目的を達成するために、本発明は上面に検査のための液晶表示パネルが搭載されるワークテーブル、前記ワークテーブルの底面に配置されるバックライトユニット、前記ワークテーブルに設けられる第１光学板と前記第１光学板の上部に置かれる第２光学板
、及び前記第１光学板の高低を調節するための高低調節部材を含む。 In order to achieve the above-described object, the present invention provides a work table on which a liquid crystal display panel for inspection is mounted on an upper surface, a backlight unit disposed on the bottom surface of the work table, and a first optical provided on the work table. A plate, a second optical plate placed on top of the first optical plate, and a height adjusting member for adjusting the height of the first optical plate.

本発明の実施例によると、前記高低調節部材は、前記第１光学板の底面に水平に設けられるカム軸、前記第１光学板の底面と接するように前記カム軸に装着され前記第１光学板の高低を可変させるカム、及び前記カム軸を回転させるためのハンドルを含むことができる。   According to an embodiment of the present invention, the height adjustment member is mounted on the cam shaft so as to contact the bottom surface of the first optical plate and the cam shaft horizontally provided on the bottom surface of the first optical plate. A cam for changing the height of the plate and a handle for rotating the cam shaft may be included.

本発明の実施例によると、前記高低調節部材は、前記カム軸を回転させるための駆動部を更に含むが、前記駆動部は、モーターと前記モーターを制御する制御部を含むことができる。   According to an embodiment of the present invention, the height adjustment member further includes a driving unit for rotating the cam shaft, and the driving unit may include a motor and a control unit for controlling the motor.

本発明の実施例によると、前記ワークテーブルは、前記第１光学板より小さいサイズの開口部、前記開口部を取り囲むそして上面には液晶表示パネルが置かれ、底面には前記第１光学板のエッジが位置されるフランジ部を有し、前記フランジ部の底面には前記第１光学板の上面エッジに弾力的に接触される弾性部材を含むことができる。   According to an embodiment of the present invention, the work table has an opening having a size smaller than that of the first optical plate, surrounds the opening, and has a liquid crystal display panel on the top surface, and a bottom surface of the first optical plate. The flange portion may include a flange portion, and a bottom surface of the flange portion may include an elastic member that is elastically contacted with the upper surface edge of the first optical plate.

本発明の実施例によると、前記高低調節部材のカム軸は、前記第１光学板の底面を横切って配置されることができる。
前述した目的を達成するための本発明の液晶表示パネル検査装備の検査ステージは、上面に検査のための液晶表示パネルが搭載されるワークテーブル、前記ワークテーブルの底面に配置されるバックライトユニット、前記ワークテーブルに設けられ、前記バックライトユニットから発生した光が入射する光入射面、入射した光が出射する光出射面を有する第１光学板、及び前記第１光学板の光入射面のエッジに設けられ前記第１光学板の高低を可変させるための高低調節部材を含むことができる。 According to an embodiment of the present invention, the cam shaft of the height adjusting member may be disposed across the bottom surface of the first optical plate.
The inspection stage of the liquid crystal display panel inspection equipment of the present invention for achieving the above-mentioned object is a work table on which a liquid crystal display panel for inspection is mounted on the upper surface, a backlight unit disposed on the bottom surface of the work table, A first optical plate provided on the work table and having a light incident surface on which light generated from the backlight unit is incident, a light emitting surface from which incident light is emitted, and an edge of the light incident surface of the first optical plate And a height adjusting member for varying the height of the first optical plate.

本発明の実施例によると、前記高低調節部材は、前記第１光学板の光入射面に水平に設けられるカム軸、前記第１光学板の光入射面と接するように前記カム軸に装着されるカム、及び前記カム軸を回転させるためのハンドルを含むことができる。   According to an embodiment of the present invention, the height adjusting member is mounted on the cam shaft so as to be in contact with the light incident surface of the first optical plate, and a cam shaft provided horizontally on the light incident surface of the first optical plate. And a handle for rotating the cam shaft.

本発明の実施例によると、前記ワークテーブルは、前記第１光学板より小さいサイズの開口部、前記開口部を取り囲むそして上面には液晶表示パネルが置かれ、底面には前記第１光学板のエッジが位置されるフランジ部を有し、前記フランジ部の底面には前記第１光学板の上面エッジに弾力的に接触される弾性部材を含むことができる。   According to an embodiment of the present invention, the work table has an opening having a size smaller than that of the first optical plate, surrounds the opening, and has a liquid crystal display panel on the top surface, and a bottom surface of the first optical plate. The flange portion may include a flange portion, and a bottom surface of the flange portion may include an elastic member that is elastically contacted with the upper surface edge of the first optical plate.

本発明の実施例によると、前記高低調節部材は、前記第１光学板のエッジ４所に設けられ前記第１光学板の傾きを調節することができる。
例えば、本発明の実施例は多様な形態に変形されることができ、本発明の範囲が下記する実施例によって限定されることと解釈すべきではない。本実施例は、当業界で平均的な知識を有する者に本発明をより完全に説明するために提供されるものである。従って、図面での要素の形状等は、より明確な説明を強調するために誇張されたものである。 According to an embodiment of the present invention, the height adjusting member is provided at four positions of the edge of the first optical plate, and can adjust the inclination of the first optical plate.
For example, the embodiments of the present invention can be modified in various forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. This example is provided to more fully describe the present invention to those skilled in the art. Accordingly, the shape and the like of the elements in the drawings are exaggerated to emphasize a clearer description.

本発明の実施例を図１乃至図６を参照して詳細に説明する。又、前記図面で同じ機能を行う構成要素には同じ参照符号を付与する。
本発明による検査ステージ１００は、プローブユニットを利用して検査対象物（以下、液晶表示パネル）のデータラインとゲートラインのそれぞれの断線検査と色相検査、そして顕微鏡等を利用した肉眼検査を実施する液晶表示パネル検査装備から光源に液晶表示パネルを照明する装置である。 An embodiment of the present invention will be described in detail with reference to FIGS. In addition, the same reference numerals are given to components performing the same function in the drawings.
The inspection stage 100 according to the present invention uses a probe unit to perform disconnection inspection and hue inspection of each data line and gate line of an inspection object (hereinafter referred to as a liquid crystal display panel), and visual inspection using a microscope or the like. It is an apparatus that illuminates a liquid crystal display panel from a liquid crystal display panel inspection equipment to a light source.

本発明は、導光板１３０と拡散板１３２の吸着現象を防止し、拡散板１３２の熱変形で
拡散板１３２の上面に置かれた偏光板１３４がワークテーブル１１０の上面に突出されることを防止するためのものである。これを達成するために本発明の検査ステージ１００は、導光板１３０の高低を調節する高低調節部材１４０を有することにその特徴がある。 The present invention prevents the light guide plate 130 and the diffusion plate 132 from adsorbing, and prevents the polarizing plate 134 placed on the upper surface of the diffusion plate 132 from projecting to the upper surface of the work table 110 due to thermal deformation of the diffusion plate 132. Is to do. In order to achieve this, the inspection stage 100 of the present invention is characterized by having a height adjustment member 140 that adjusts the height of the light guide plate 130.

図１は、本発明の実施例による検査ステージを示す。図２は、本発明の実施例による検査ステージの平面図である。図３は、本発明の実施例による検査ステージの断面図である。   FIG. 1 shows an inspection stage according to an embodiment of the present invention. FIG. 2 is a plan view of an inspection stage according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of an inspection stage according to an embodiment of the present invention.

図１乃至図３を参照しながら具体的に説明すると、検査ステージ１００は、液晶表示パネル１０を解除可能に真空吸着するワークテーブル１１０、このワークテーブル１１０に置かれた液晶表示パネル１０の後方で照明するように点灯されるランプ１２２を有するバックライトユニット１２０、バックライトユニット１２０の光を液晶表示パネル１０に提供するための導光板１３０と拡散板１３２と偏光板１３４等の光学板そして導光板１３０の高低を調節する高低調節部材１４０を含む。図面には図示していないが、検査ステージ１００はワークテーブル１１０をＸ方向及びＹ方向そしてＺ方向に移動させ、かつＺ軸線の周りに角度を有して回転される整合ユニットを含むことができる。   Specifically, referring to FIGS. 1 to 3, the inspection stage 100 includes a work table 110 that vacuum-sucks the liquid crystal display panel 10 so that the liquid crystal display panel 10 can be released, and a rear side of the liquid crystal display panel 10 placed on the work table 110. Backlight unit 120 having lamp 122 that is lit to illuminate, light guide plate 130 for providing light of backlight unit 120 to liquid crystal display panel 10, optical plate such as diffusion plate 132, polarizing plate 134, and light guide plate A height adjustment member 140 for adjusting the height of 130 is included. Although not shown in the drawings, the inspection stage 100 can include an alignment unit that moves the work table 110 in the X, Y, and Z directions and is rotated at an angle about the Z axis. .

ワークテーブル１１０は、４つの側面１１２ａによって内部空間１１２が提供され、上面には四角形の開口部１１４を有し、この開口部１１４は、フランジ部１１６によって取り囲まれる。ワークテーブル１１０のフランジ部１１６の上面には、液晶表示パネル１０が置かれ、底面には導光板１３０を支持するためのステップボルト１９０が締結されるねじホール１１７が提供される。又、フランジ部１１６の底面には、ウレタンからなる弾性部材１１８が設けられる。この弾性部材１１８は、導光板１３０の上面１３１ａを弾力的に支持することになる。   The work table 110 is provided with an internal space 112 by four side surfaces 112 a and has a rectangular opening 114 on the upper surface, and the opening 114 is surrounded by a flange portion 116. The liquid crystal display panel 10 is placed on the top surface of the flange portion 116 of the work table 110, and a screw hole 117 to which a step bolt 190 for supporting the light guide plate 130 is fastened is provided on the bottom surface. Further, an elastic member 118 made of urethane is provided on the bottom surface of the flange portion 116. The elastic member 118 elastically supports the upper surface 131a of the light guide plate 130.

例えば、液晶表示パネル１０は、エッジ部分（アクティブ領域とＴＦＴ外郭との間の部分）がワークテーブル１１０フランジ部１１６の上面に形成されている真空スロット（図示せず）を通じて真空吸着されるか、又はワークテーブル１１０のフランジ部１１６に設けられるクランプ（図示せず）で固定されることができ、このような固定方式は、液晶表示パネル検査設備で通常的に使用される常用化された方式でその部分についての説明は省略する。   For example, the liquid crystal display panel 10 has an edge portion (a portion between the active region and the TFT outline) vacuum-sucked through a vacuum slot (not shown) formed on the upper surface of the work table 110 flange portion 116, or Alternatively, it can be fixed by a clamp (not shown) provided on the flange portion 116 of the work table 110, and such a fixing method is a commonly used method commonly used in a liquid crystal display panel inspection facility. A description of this part is omitted.

導光板１３０は、バックライトユニット１２０のランプ１２２から出た光を液晶表示パネル１０方向に送る透明なアクリルからなる。導光板１３０は、バックライトユニット１２０のランプ１２２から発生した光が入射する光入射面（底面に該当）１３１ａと、入射した光が出射する光出射面（上面）１３１ｂとを有する。導光板１３０は、拡散板１３２とランプ１２２との間においてワークテーブル１１０のフランジ部１１６の底面に多数のステップボルト１９０によって固定支持される。このために、導光板１３０は、ねじホール１１７と対応されるエッジにステップボルト１９０が挿入される貫通孔１３１ｃが形成される。   The light guide plate 130 is made of transparent acrylic that transmits light emitted from the lamp 122 of the backlight unit 120 toward the liquid crystal display panel 10. The light guide plate 130 has a light incident surface (corresponding to the bottom surface) 131a on which light generated from the lamp 122 of the backlight unit 120 is incident, and a light emitting surface (upper surface) 131b from which the incident light is emitted. The light guide plate 130 is fixedly supported by a number of step bolts 190 on the bottom surface of the flange portion 116 of the work table 110 between the diffusion plate 132 and the lamp 122. For this, the light guide plate 130 is formed with a through hole 131c into which the step bolt 190 is inserted at an edge corresponding to the screw hole 117.

図３に示すように、ステップボルト１９０は、フランジ部１１６のねじホール１１７に結合されるねじ部１９２と、ねじ部１９２から連続的に連結されねじ部１９２より大きい直径を有して、導光板１３０の貫通孔１３１ｃに位置される円筒部１９４と、円筒部１９４の直径より大きい直径を有するヘッド部１９６とを含む。ステップボルト１９０は、導光板１３０の貫通孔１３１ｃを通じてフランジ部１１６のねじホール１１７に結合され、導光板１３０は、ステップボルト１９０及びカム１４２によってフランジ部１１６に支持される。導光板１３０は、垂直方向に所定の間隔だけ自由に流動可能に支持される。   As shown in FIG. 3, the step bolt 190 includes a screw part 192 coupled to the screw hole 117 of the flange part 116, a continuous connection from the screw part 192, and a larger diameter than the screw part 192. 130 includes a cylindrical portion 194 positioned in the through-hole 131c of 130, and a head portion 196 having a diameter larger than the diameter of the cylindrical portion 194. The step bolt 190 is coupled to the screw hole 117 of the flange portion 116 through the through hole 131 c of the light guide plate 130, and the light guide plate 130 is supported on the flange portion 116 by the step bolt 190 and the cam 142. The light guide plate 130 is supported so as to be freely flowable at a predetermined interval in the vertical direction.

拡散板１３２は、導光板１３０を通じて出る光を拡散させて液晶表示パネル１０に提供
するためのもので、導光板１３０の光出射面１３１ｂに載置される。そして、多数方向の光が一方向に透過されるようにする偏光板１３４は、拡散板１３２の上面に載置される。 The diffusion plate 132 is for diffusing the light emitted through the light guide plate 130 and providing the diffused light to the liquid crystal display panel 10, and is placed on the light emitting surface 131 b of the light guide plate 130. A polarizing plate 134 that allows light in multiple directions to be transmitted in one direction is placed on the upper surface of the diffusion plate 132.

このように、検査ステージ１００でランプ１２２の光は、導光板１３０、拡散板１３２、及び偏光板１３４を通過して液晶表示パネル１０に提供される。偏光板１３４は、必要によって省略されるか、又は他の光学板に代替されることができる。本実施例では、光の伝達手段として拡散板１３２と偏光板１３４の以外に拡散シート、プリズムシート等が多層に積層された構造が提供されることができる。   As described above, the light of the lamp 122 in the inspection stage 100 passes through the light guide plate 130, the diffusion plate 132, and the polarizing plate 134 and is provided to the liquid crystal display panel 10. The polarizing plate 134 may be omitted if necessary, or may be replaced with another optical plate. In this embodiment, a structure in which a diffusion sheet, a prism sheet, and the like are laminated in multiple layers in addition to the diffusion plate 132 and the polarizing plate 134 can be provided as light transmission means.

本発明で一番重要な構成要素である高低調節部材１４０は、導光板１３０の高低を調節するためのもので、カム１４２が設けられたカム軸１４４とカム軸１４４を回転させるための駆動部１４６を含む。カム軸１４４は、導光板１３０の両側エッジに水平に横切ってワークテーブル１１０の側面に回転可能に設けられ、カム軸１４４には導光板１３０の光入射面１３１ａと接するカム１４２が設けられる。カム軸１４４を回転させるための駆動部１４６はハンドル１４７からなり、このハンドル１４７はワークテーブル１１０の外郭でカム軸１４４の一端と連結される。   The height adjustment member 140, which is the most important component in the present invention, is for adjusting the height of the light guide plate 130, and is provided with a cam shaft 144 provided with a cam 142 and a drive unit for rotating the cam shaft 144. 146. The cam shaft 144 is horizontally provided on both side edges of the light guide plate 130 so as to be rotatable on the side surface of the work table 110, and the cam shaft 144 is provided with a cam 142 that contacts the light incident surface 131 a of the light guide plate 130. The drive unit 146 for rotating the cam shaft 144 includes a handle 147, and the handle 147 is connected to one end of the cam shaft 144 on the outer periphery of the work table 110.

例えば、高低調節部材１４０は、図４、図５のように、ワークテーブル１１０の４つの側面に設けられる。この場合、導光板の４箇所で高低調節が可能なので、導光板の平面傾きを調節することができる。   For example, the height adjustment member 140 is provided on four side surfaces of the work table 110 as shown in FIGS. In this case, since the height can be adjusted at four locations on the light guide plate, the plane inclination of the light guide plate can be adjusted.

図４及び図５に図示された検査ステージは、４つの高低調節部材１４０が設けられた他の例を示す。４つの高低調節部材が設けられたワークテーブル１１０は、導光板１３０を含む光学板の平面傾きを高低調節部材１４０が設けられた４箇所を通じて調節することができる。即ち、２つの高低調節部材１４０が設けられたワークテーブル１１０の場合、左右傾き（平面傾き）のみ調節することができる反面、４つの高低調節部材１４０が設けられたワークテーブル１１０では、前後左右傾きを調節することができる。ここで、高低調節部材１４０は、短い長さのカム１４２とカム軸１４４を使用することが好ましい。   The inspection stage illustrated in FIGS. 4 and 5 shows another example in which four height adjustment members 140 are provided. The work table 110 provided with the four height adjustment members can adjust the plane inclination of the optical plate including the light guide plate 130 through four places where the height adjustment members 140 are provided. That is, in the case of the work table 110 provided with the two height adjustment members 140, only the horizontal inclination (planar inclination) can be adjusted, whereas in the work table 110 provided with the four height adjustment members 140, the front / rear left / right inclination is provided. Can be adjusted. Here, the height adjustment member 140 preferably uses a short-length cam 142 and a cam shaft 144.

このような構成でなされる高低調節部材１４０は、ハンドル操作又はモーター駆動を通じて導光板１３０の高低を可変させることができる。例えば、導光板１３０と拡散板１３２が静電気によって吸着されても、高低調節部材１４０のハンドル１４７を回すと、導光板１３０の高低が可変されながら、導光板１３０の光出射面１３１ｂに吸着された拡散板１３２が離れて吸着現象による斑も除去される。   The height adjustment member 140 configured as described above can change the height of the light guide plate 130 through a handle operation or a motor drive. For example, even if the light guide plate 130 and the diffusion plate 132 are adsorbed by static electricity, when the handle 147 of the height adjustment member 140 is turned, the height of the light guide plate 130 is varied and adsorbed to the light emitting surface 131b of the light guide plate 130. The diffusion plate 132 is separated and the spots due to the adsorption phenomenon are also removed.

検査ステージ１００で長期間液晶表示パネル１０を検査すれば、拡散板１３２がランプ１２２の熱による熱変形が発生されることができる。拡散板１３２が熱変形されながら、偏光板１３４の平面度（平面傾き）が不均一になり、酷い場合には拡散板１３２の上面に置かれた偏光板１３４が突出されながら、ワークテーブル１１０の上面に載置されている液晶表示パネル１０を押してしまう場合も発生される。特に、偏光板１３４とワークテーブル１１０の上面との間隔が狭い場合には、偏光板１３４がワークテーブル１１０の上面より高く突出されながら、液晶表示パネル１０と接触される場合も発生されることができる。しかし、このような問題は、本発明で開示した高低調節部材１４０によって導光板１３０の高さを低くすることにより改善されることができる。特に、ランプ１２２の熱によって熱変形等で偏光板１３４の平面度誤差が発生した場合、その平面度誤差が発生された部分に対応されるカム軸１４４を回転させて導光板１３０の高さを調節することにより、偏光板１３４の平面度誤差を最小限に調節することができる。そして、偏光板１３４の平面度誤差によって偏光板１３４がワークテーブル１１０の上面から突出される場合にも高低調節部材１４０のカム軸１４４を回転させて導光板１３０の高さを低くすることと解決することができる。   If the liquid crystal display panel 10 is inspected for a long time on the inspection stage 100, the diffusion plate 132 may be thermally deformed by the heat of the lamp 122. While the diffusion plate 132 is thermally deformed, the flatness (plane inclination) of the polarizing plate 134 becomes non-uniform. In severe cases, the polarizing plate 134 placed on the upper surface of the diffusion plate 132 is projected, and the work table 110 In some cases, the liquid crystal display panel 10 placed on the upper surface is pushed. In particular, when the distance between the polarizing plate 134 and the upper surface of the work table 110 is narrow, the polarizing plate 134 may be brought into contact with the liquid crystal display panel 10 while protruding higher than the upper surface of the work table 110. it can. However, such a problem can be improved by reducing the height of the light guide plate 130 by the height adjustment member 140 disclosed in the present invention. In particular, when a flatness error of the polarizing plate 134 occurs due to thermal deformation or the like due to the heat of the lamp 122, the camshaft 144 corresponding to the portion where the flatness error is generated is rotated to increase the height of the light guide plate 130. By adjusting, the flatness error of the polarizing plate 134 can be adjusted to the minimum. Further, even when the polarizing plate 134 protrudes from the upper surface of the work table 110 due to the flatness error of the polarizing plate 134, the cam shaft 144 of the height adjusting member 140 is rotated to reduce the height of the light guide plate 130. can do.

本実施例では、カム軸を回転させる駆動部１４６がハンドル１４７として開示されているが、これは一つの例に過ぎない。図６のように、駆動部１４６はカム軸１４４と連結されるモーター１４８と、モーター１４８を制御する制御部１４９で構成されることができる。図６のような場合には、一定量の液晶表示パネル１０を検査した直後に自動的にカム軸１４４を一回回転させるように駆動部１４６を設定することができる。このように定期的に高低調節部材１４０を作動させると、導光板１３０と拡散板１３２が静電気によって吸着されることを予め予防することができる効果を得ることができる。   In this embodiment, the drive unit 146 that rotates the camshaft is disclosed as the handle 147, but this is only an example. As shown in FIG. 6, the driving unit 146 may include a motor 148 connected to the cam shaft 144 and a control unit 149 that controls the motor 148. In the case of FIG. 6, the drive unit 146 can be set so that the cam shaft 144 is automatically rotated once immediately after a certain amount of the liquid crystal display panel 10 is inspected. When the height adjusting member 140 is periodically operated in this manner, it is possible to obtain an effect capable of preventing in advance that the light guide plate 130 and the diffusion plate 132 are adsorbed by static electricity.

一方、本発明は、前記の構成でなされた液晶表示パネル検査装備の検査ステージは多様に変形されることができ、多様な形態を有することができる。しかし、本発明は前記の詳細な説明で言及される特別な形態に限定されず、添付された請求範囲によって定義される本発明の精神と範囲内にある全ての変形物と均等物及び代替物を含むことと理解されなければならない。   Meanwhile, according to the present invention, the inspection stage of the liquid crystal display panel inspection equipment having the above-described configuration can be variously modified and can have various forms. However, the invention is not limited to the specific forms mentioned in the foregoing detailed description, but all variations, equivalents and alternatives within the spirit and scope of the invention as defined by the appended claims. Must be understood to include.

前述したように、本発明の検査ステージは、静電気による導光板と拡散板の吸着現象を防止することができる。本発明の検査ステージは、偏光板がワークテーブル上面に突出されることを防止することができる。本発明の検査ステージは、ワークテーブルに設けられた導光板の高低を調節することができる。   As described above, the inspection stage of the present invention can prevent the adsorption phenomenon of the light guide plate and the diffusion plate due to static electricity. The inspection stage of the present invention can prevent the polarizing plate from protruding on the work table upper surface. The inspection stage of the present invention can adjust the height of the light guide plate provided on the work table.

以上、本発明の実施例によって詳細に説明したが、本発明はこれに限定されず、本発明が属する技術分野において通常の知識を有するものであれば本発明の思想と精神を離れることなく、本発明を修正または変更できる。   As described above, the embodiments of the present invention have been described in detail. However, the present invention is not limited to the embodiments, and as long as it has ordinary knowledge in the technical field to which the present invention belongs, without departing from the spirit and spirit of the present invention, The present invention can be modified or changed.

本発明の実施例による検査ステージの斜視図。The perspective view of the inspection stage by the example of the present invention. 本発明の実施例による検査ステージの平面図。The top view of the inspection stage by the example of the present invention. 本発明の実施例による検査ステージの断面図。Sectional drawing of the test | inspection stage by the Example of this invention. ４つの高低調節部材が設けられた検査ステージの平面図。The top view of the test | inspection stage provided with four height adjustment members. 図４のａ−ａ線における断面図。Sectional drawing in the aa line of FIG. 本発明の変形例による検査ステージの平面図。The top view of the inspection stage by the modification of this invention.

符号の説明Explanation of symbols

１１０ ワークテーブル
１２０ バックライトユニット
１３０ 導光板
１３２ 拡散板
１４０ 高低調節部材 110 Work table 120 Backlight unit 130 Light guide plate 132 Diffusion plate 140 Height adjustment member

Claims (10)

液晶表示パネル検査装備の検査ステージにおいて、
上面に検査のための液晶表示パネルが載置されるワークテーブルと、
前記ワークテーブルの底面に配置されるバックライトユニットと、
前記ワークテーブルは少なくとも１つの光学板を有することと、
前記光学板の高低を調節するための高低調節部材と、を含むことを特徴とする検査ステージ。 In the inspection stage of the liquid crystal display panel inspection equipment,
A work table on which a liquid crystal display panel for inspection is placed;
A backlight unit disposed on the bottom surface of the work table;
The work table has at least one optical plate;
An inspection stage comprising: a height adjusting member for adjusting the height of the optical plate. 前記高低調節部材は、
前記光学板の底面に水平に設けられるカム軸と、
前記光学板の底面と接するように前記カム軸に装着され前記光学板の高低を可変させるカムと、を含むことを特徴とする請求項１記載の検査ステージ。 The height adjustment member is
A cam shaft provided horizontally on the bottom surface of the optical plate;
The inspection stage according to claim 1, further comprising: a cam mounted on the cam shaft so as to be in contact with a bottom surface of the optical plate and capable of changing a height of the optical plate. 前記高低調節部材は、
前記カム軸を回転させるためのハンドルを更に含むことを特徴とする請求項２記載の検査ステージ。 The height adjustment member is
The inspection stage according to claim 2, further comprising a handle for rotating the cam shaft. 前記高低調節部材は、
前記カム軸を回転させるための駆動部を更に含むことを特徴とする請求項２記載の検査ステージ。 The height adjustment member is
The inspection stage according to claim 2, further comprising a drive unit for rotating the cam shaft. 前記駆動部は、モーターと前記モーターを制御する制御部とを含むことを特徴とする請求項４記載の検査ステージ。   The inspection stage according to claim 4, wherein the driving unit includes a motor and a control unit that controls the motor. 前記ワークテーブルは、
前記光学板より小さいサイズの開口部と、前記開口部を包囲し、かつ上面には液晶表示パネルが設けられるとともに、底面には前記光学板のエッジが位置されるフランジ部を有し、
前記フランジ部の底面には前記光学板の上面エッジに対して弾性的に接触される弾性部材を含むことを特徴とする請求項２記載の検査ステージ。 The work table is:
An opening having a size smaller than the optical plate; and a liquid crystal display panel that surrounds the opening and is provided with a flange portion on the bottom surface where the edge of the optical plate is positioned;
The inspection stage according to claim 2, wherein the bottom surface of the flange portion includes an elastic member that is elastically contacted with an upper surface edge of the optical plate. 前記高低調節部材のカム軸は、前記光学板の底面を横切って配置されることを特徴とする請求項４記載の検査ステージ。   5. The inspection stage according to claim 4, wherein the cam shaft of the height adjustment member is disposed across the bottom surface of the optical plate. 前記光学板は、前記ワークテーブルに設けられる導光板と、前記導光板の上部面から所定間隔だけ離隔するように前記ワークテーブルに設けられる拡散板又は偏光板を含むことを特徴とする請求項１記載の検査ステージ。   The optical plate includes a light guide plate provided on the work table, and a diffusion plate or a polarizing plate provided on the work table so as to be separated from the upper surface of the light guide plate by a predetermined distance. The inspection stage described. 前記光学板は、前記ワークテーブルに設けられる導光板と、前記導光板の上部面に位置される拡散板又は偏光板を含むことを特徴とする請求項１記載の検査ステージ。   The inspection stage according to claim 1, wherein the optical plate includes a light guide plate provided on the work table and a diffusion plate or a polarizing plate positioned on an upper surface of the light guide plate. 前記高低調節部材は、前記光学板の４つのエッジにそれぞれ設けられて、光学板の傾きを調節することを特徴とする請求項１記載の検査ステージ。   The inspection stage according to claim 1, wherein the height adjustment member is provided at each of four edges of the optical plate to adjust the inclination of the optical plate.
JP2006290974A 2005-11-18 2006-10-26 Inspection stage for liquid crystal display panel inspecting equipment Pending JP2007140506A (en)

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