JP2007138252A - Inlet door of heat treatment chamber in vacuum carburizing furnace - Google Patents

Inlet door of heat treatment chamber in vacuum carburizing furnace Download PDF

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JP2007138252A
JP2007138252A JP2005333598A JP2005333598A JP2007138252A JP 2007138252 A JP2007138252 A JP 2007138252A JP 2005333598 A JP2005333598 A JP 2005333598A JP 2005333598 A JP2005333598 A JP 2005333598A JP 2007138252 A JP2007138252 A JP 2007138252A
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intermediate plate
door
inlet door
cooling chamber
heat treatment
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Akira Takado
亮 高堂
Yoshiyuki Iwagami
良行 岩上
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Nachi Fujikoshi Corp
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Nachi Fujikoshi Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inlet door of a heat treatment chamber in a vacuum carburizing furnace with a simple and inexpensive structure where only elevating/lowering means for the door is present as a driving means for the door, and the other driving means is not particularly required. <P>SOLUTION: The inlet door of a heat treatment chamber comprises: an intermediate plate 12 in which seal members 9, 9 are arranged at both the sides in such a manner that the opening part 6 at the front face of a cooling chamber 2 as a heat treatment chamber to be charged with a work 5; and two outside inlet door 1a and inside inlet door 1b sandwiching the intermediate plate 12 and arranged so as to be contacted with both the sides of the seal members 9, 9. The outside inlet door 1a and inside inlet door 1b are guided by direct-acting bearings 14, 14, and can be elevated/lowered individually. The intermediate plate 12 has a communication hole 23, and when the outside inlet door 1a and the inside inlet door 1b has descended and come to the state of shielding the inner circumferential space 24 of the intermediate plate is made, the inside of the inner circumferential space 24 of the intermediate plate is exhausted via the communication hole 23 of the intermediate plate 12, and the outside inlet door 1a and the inside inlet door 1b are pressed against the intermediate plate 12 by the atmospheric pressure at the outside of the cooling chamber and the internal pressure of the cooling chamber 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、入口扉と冷却室と加熱室を有し、冷却室と加熱室を中間扉で仕切った真空浸炭炉の熱処理室の入口扉に関する。   The present invention relates to an entrance door of a heat treatment chamber of a vacuum carburizing furnace having an entrance door, a cooling chamber, and a heating chamber, and partitioning the cooling chamber and the heating chamber by an intermediate door.

従来、真空浸炭炉を含め熱処理炉は真空で処理するタイプや冷却時窒素ガス等で雰囲気冷却する真空炉などがある。真空浸炭炉では炉内の空気を排気し真空に近い減圧をするため、炉外と炉内を密封する必要がある。そのためワークの投入口になる入口扉は炉内の空気を排気する際、炉外から炉内に空気が入らないようにするため扉と炉体を密封するための何らかの手段が必要になる。雰囲気冷却する熱処理炉は冷却室の内圧を保持するため冷却室の扉を冷却室に押し付ける手段が必要になる。入口扉と冷却室と加熱室を有し、冷却室と加熱室を中間扉で仕切った真空浸炭炉の熱処理室の入口扉としては、例えば特許文献1、2、3に記載されているものがある。特許文献1では加圧炉の例で扉はかんぬき的なクランプ装置でクランプする方法が記載され、特許文献2では扉の上昇・下降駆動手段に加え扉のクランプ駆動手段として炉外のシリンダーとリンクとで炉内の扉を密封する面に押し付ける構造が記載され、特許文献3では隣接する熱処理炉の隣接開口部の扉を囲むような加圧室を設け、隣接開口部の上下扉を形成する仕切り弁と称する扉を加圧室内に設置し、炉内と加圧室に圧力差を付け炉内を密封するものが記載されている。
公開実用昭63-32299号公報 実用新案公報第2556214 号公報 特公平8-26394 号公報
Conventionally, heat treatment furnaces including a vacuum carburizing furnace include a vacuum processing type and a vacuum furnace that cools the atmosphere with nitrogen gas during cooling. In a vacuum carburizing furnace, it is necessary to seal the outside of the furnace and the inside of the furnace in order to exhaust the air in the furnace and reduce the pressure close to vacuum. For this reason, when the air in the furnace is exhausted, the entrance door that becomes the work entry port needs some means for sealing the door and the furnace body so that the air does not enter the furnace from outside the furnace. In order to maintain the internal pressure of the cooling chamber, a heat treatment furnace that cools the atmosphere requires means for pressing the cooling chamber door against the cooling chamber. As an entrance door of a heat treatment chamber of a vacuum carburizing furnace having an entrance door, a cooling chamber, and a heating chamber, and partitioning the cooling chamber and the heating chamber by an intermediate door, for example, those described in Patent Documents 1, 2, and 3 is there. Patent Document 1 describes an example of a pressure furnace and describes a method in which a door is clamped by a simple clamping device, and Patent Document 2 links a cylinder outside the furnace as a door clamp driving means in addition to a door raising / lowering driving means. The structure for pressing the door in the furnace against the surface to be sealed is described, and in Patent Document 3, a pressurizing chamber is provided so as to surround the door of the adjacent opening of the adjacent heat treatment furnace, and the upper and lower doors of the adjacent opening are formed. A door called a gate valve is installed in the pressurizing chamber, and a pressure difference is applied between the inside of the furnace and the pressurizing chamber to seal the inside of the furnace.
Public Utility Sho 63-32299 Utility Model Gazette No. 2556214 Japanese Patent Publication No. 8-26394

しかしながら、特許文献1のものでは、扉の周囲にクランプ装置を多数個所設け、それぞれ手動又は駆動装置でクランプする必要があり、クランプ装置のコストがかかり、かつ手動でクランプすると時間がかかり、駆動装置でクランプするとより高額となった。特許文献2のものでは、扉の上昇・下降駆動手段に加え扉のクランプ駆動手段が必要であり扉を押し付けるための炉外のシリンダーとトグルクランプやカムといったものも必要になり、極めて高額となりかつ多くのスペースを要する。特許文献3のものでは、扉の上昇・下降駆動手段のほか加圧室が必要であり、扉の大きさにもよるが加圧室には窒素等の不活性ガスが必要になり、極めて高額となりかつ多くのスペースを要する。特許文献1、2、3は、いずれも扉の上昇・下降駆動手段に加え別の諸々の装置が必要で、クランプ装置のコストがかかるなどの課題があった。   However, in the thing of patent document 1, it is necessary to provide many clamping devices around the door, and it is necessary to clamp each manually or with a driving device, and the cost of the clamping device is high. It was more expensive to clamp with. The thing of patent document 2 requires the door clamp drive means in addition to the door ascending / descending drive means, and also requires a cylinder outside the furnace for pressing the door, a toggle clamp, a cam, etc. Requires a lot of space. In Patent Document 3, a pressurizing chamber is required in addition to the door ascending / descending drive means. Depending on the size of the door, an inert gas such as nitrogen is necessary in the pressurizing chamber, which is extremely expensive. And requires a lot of space. In Patent Documents 1, 2, and 3, all the devices are required in addition to the door ascending / descending driving means, and the cost of the clamping device is high.

本発明の課題は、扉の駆動手段としては、扉の上昇・下降駆動手段だけで、それ以外の駆動手段は特に必要がない、シンプルかつ安価な構造の、真空浸炭炉の熱処理室の入口扉を提供することにある。   The subject of the present invention is that the door drive means is only the door up / down drive means, and no other drive means is required, and the entrance door of the heat treatment chamber of the vacuum carburizing furnace has a simple and inexpensive structure. Is to provide.

このため本発明は、入口扉と冷却室と加熱室を有し、冷却室と加熱室を中間扉で仕切った真空浸炭炉の熱処理室の入口扉において、ワークが入る熱処理室である前記冷却室の前面の開口部を閉じるように冷却室炉体に固定されかつ前記開口部周縁に対応する位置にシール部材を両面に配置した中間板と、前記中間板を鋏みかつ前記シール部材の両面に接触可能に配置された2枚の外側入口扉及び内側入口扉と、を有し、前記外側入口扉及び内側入口扉は前記中間板両面に配置された直動軸受によりガイドされ、かつ前記外側入口扉及び内側入口扉はそれぞれ前記冷却室に支持された独立した駆動手段により個別に上昇・下降可能にされ、
前記中間板は中間板外周縁から中間板内周縁に連通し開口する連通穴を有し、
前記外側入口扉及び内側入口扉が下降し前記中間板内周空間を遮蔽する状態になったとき、前記中間板の連通穴を介して前記中間板内周空間内を排気し、前記冷却室外の大気圧と前記冷却室の内圧で前記外側入口扉及び内側入口扉を前記中間板に押し付けるようにしたことを特徴とする真空浸炭炉の熱処理室の入口扉を提供することによって上述した課題を解決した。
For this reason, the present invention has an inlet door, a cooling chamber and a heating chamber, and the cooling chamber which is a heat treatment chamber into which a workpiece enters in an inlet door of a heat treatment chamber of a vacuum carburizing furnace in which the cooling chamber and the heating chamber are partitioned by an intermediate door. An intermediate plate that is fixed to the cooling chamber furnace body so as to close the opening on the front surface and that has sealing members disposed on both sides at positions corresponding to the periphery of the opening, and sandwiches the intermediate plate and contacts both surfaces of the sealing member Two outer entrance doors and an inner entrance door arranged in a possible manner, the outer entrance door and the inner entrance door being guided by linear motion bearings arranged on both sides of the intermediate plate, and the outer entrance door And the inner entrance door can be individually raised and lowered by independent driving means supported by the cooling chamber,
The intermediate plate has a communication hole that opens from the outer peripheral edge of the intermediate plate to the inner peripheral edge of the intermediate plate,
When the outer inlet door and the inner inlet door are lowered to shield the intermediate plate inner space, the intermediate plate inner space is exhausted through the communication hole of the intermediate plate, and the outside of the cooling chamber Solving the above-mentioned problems by providing an inlet door of a heat treatment chamber of a vacuum carburizing furnace, wherein the outer inlet door and the inner inlet door are pressed against the intermediate plate by atmospheric pressure and the internal pressure of the cooling chamber. did.

本発明では、ワークが入る熱処理室である前記冷却室の前面の開口部を閉じるように冷却室炉体に固定されかつ前記開口部周縁に対応する位置にシール部材を両面に配置した中間板と、前記中間板を鋏みかつ前記シール部材の両面に接触可能に配置された2枚の外側入口扉及び内側入口扉と、を有し、前記外側入口扉及び内側入口扉は前記中間板両面に配置された直動軸受によりガイドされ、かつ前記外側入口扉及び内側入口扉はそれぞれ前記冷却室に支持された独立した駆動手段により個別に上昇・下降可能にされ、
前記中間板は中間板外周縁から中間板内周縁に連通し開口する連通穴を有し、
前記外側入口扉及び内側入口扉が下降し前記中間板内周空間を遮蔽する状態になったとき、前記中間板の連通穴を介して前記中間板内周空間内を排気し、前記冷却室外の大気圧と前記冷却室の内圧で前記外側入口扉及び内側入口扉を前記中間板に押し付けるようにしたので、扉の駆動手段としては扉の上昇・下降駆動手段だけで、それ以外の駆動手段は特に必要がないシンプルかつ安価な構造の、真空浸炭炉の熱処理室の入口扉を提供するものとなった。
In the present invention, an intermediate plate that is fixed to the cooling chamber furnace body so as to close the opening on the front surface of the cooling chamber, which is a heat treatment chamber into which a workpiece enters, and has sealing members disposed on both sides at positions corresponding to the periphery of the opening. Two outer entrance doors and an inner entrance door disposed so as to sandwich the intermediate plate and be in contact with both surfaces of the sealing member, and the outer entrance door and the inner entrance door are disposed on both surfaces of the intermediate plate. Each of the outer entrance door and the inner entrance door is individually raised and lowered by independent driving means supported by the cooling chamber.
The intermediate plate has a communication hole that opens from the outer peripheral edge of the intermediate plate to the inner peripheral edge of the intermediate plate,
When the outer inlet door and the inner inlet door are lowered to shield the intermediate plate inner space, the intermediate plate inner space is exhausted through the communication hole of the intermediate plate, and the outside of the cooling chamber Since the outer inlet door and the inner inlet door are pressed against the intermediate plate by the atmospheric pressure and the internal pressure of the cooling chamber, the door drive means is only the door up / down drive means, and the other drive means are A simple and inexpensive structure that is not particularly necessary is provided for the entrance door of the heat treatment chamber of the vacuum carburizing furnace.

好ましくは、前記直動軸受は前記直動軸受の取付具により前記中間板両面に対して隙間をもって配置され、前記直動軸受の取付具に内蔵に内蔵したスプリングにより、前記中間板内周空間内を排気しないときは、前記中間板両面よりわずかに浮上るようにされ、外側入口扉及び内側入口扉の昇降時に、中間板両面に配置したシール部材との擦れをなくすものとなった。   Preferably, the linear motion bearing is disposed with a gap with respect to both surfaces of the intermediate plate by the mounting member of the linear motion bearing, and in the inner peripheral space of the intermediate plate by a spring built in the mounting member of the linear motion bearing. When the air is not exhausted, it is slightly lifted from both surfaces of the intermediate plate, and eliminates rubbing with the seal members disposed on both surfaces of the intermediate plate when the outer entrance door and the inner entrance door are raised and lowered.

本発明を実施するための最良の形態の一例を図1乃至図5を参照して説明する。図1は本発明の実施形態の真空浸炭炉の入口扉、熱処理室である冷却室、加熱室及び中間扉の概略側面断面図、図2は図1のA−A線に沿った概略平面断面図、図3(a)は図1の左側面図で、熱処理室である冷却室及び入口扉の正面図、図4(a)は図3の要部部分拡大断面、(b)は(a)のC方向からみた右側面図で、外側入口扉及び内側入口扉の上昇・下降駆動手段、及び、中間板、開口部及び連通穴の詳細を示し、図5(a)は(a)のはB−B線付近の直動軸受の取付具の部分拡大断面、(b)は(a)のB−B線(図4(a)のB−B線に同じ)に沿った部分拡大断面、(c)は(b)状態から直動軸受の取付具に内蔵に内蔵したスプリングにより外側入口扉及び内側入口扉が中間板両面からわずかのすきまをもって浮上っている状態を示す。   An example of the best mode for carrying out the present invention will be described with reference to FIGS. FIG. 1 is a schematic side cross-sectional view of an inlet door of a vacuum carburizing furnace according to an embodiment of the present invention, a cooling chamber as a heat treatment chamber, a heating chamber, and an intermediate door, and FIG. 2 is a schematic plan cross-sectional view taken along line AA of FIG. 3A is a left side view of FIG. 1, a front view of a cooling chamber and an entrance door as a heat treatment chamber, FIG. 4A is an enlarged cross-sectional view of a main part of FIG. 3, and FIG. FIG. 5A is a right side view of the outer entrance door and the inner entrance door, and shows details of the drive mechanism for raising and lowering the outer entrance door and the inner entrance door, and the intermediate plate, the opening, and the communication hole. FIG. Is a partially enlarged cross section of the fixture of the linear motion bearing in the vicinity of the BB line, (b) is a partially enlarged cross section along the BB line in (a) (same as the BB line in FIG. 4A). (C) is a state in which the outer entrance door and the inner entrance door are lifted from both sides of the intermediate plate with a slight clearance by the spring built in the linear bearing fixture from the state (b). Indicate the that state.

本発明の実施形態の真空浸炭炉の熱処理室の入口扉は、入口扉1と冷却室2と加熱室3を有し、冷却室2と加熱室3を中間扉4で仕切った真空浸炭炉の入口扉1において、ワーク5が入る熱処理室である冷却室2の前面の開口部6を閉じるように冷却室炉体に固定されかつ開口部6周縁に対応する位置にシール部材 9、9(図4(b))を両面に配置した中間板12と、中間板12を鋏みかつシール部材 9,9の両面に接触可能に配置された2枚の外側入口扉1a及び内側入口扉1bと、を有し、外側入口扉1a及び内側入口扉1bは中間板12両面に配置された直動軸受 14、14によりガイドされ、かつそれぞれ冷却室2に支持された独立した駆動手段であるシリンダ 15、16により、シリンダロッド 17、18、リンク装置 19、20を介して、個別に上昇・下降可能にされている。中間板12は中間板外周縁21から中間板内周縁22に連通し開口する連通穴23を有し、外側入口扉1a及び内側入口扉1bが下降し中間板内周空間24を遮蔽する状態になったとき、中間板12の連通穴23を介して中間板内周空間24内を排気し、冷却室外の大気圧と冷却室2内の内圧で外側入口扉1a及び内側入口扉1bを中間板12に押し付けるようにしたものである。即ち冷却室外の大気圧は約100KPa、冷却室2内の内圧は約 80KPaであり、中間板内周空間24内の真空圧は約 1Paまで排気されるので、外側入口扉1aは冷却室外の大気圧により、内側入口扉1bは冷却室2内の内圧により、中間板12に対して極めて強い力で圧着される。内側入口扉1b駆動用のシリンダ16のシリンダロッド18は冷却室2内に突出し、リンク装置20に連結され、中間板12は冷却室2内では上端51と下端52(図4(b))で冷却室2の炉壁50にそれぞれ支持、固定される。   The inlet door of the heat treatment chamber of the vacuum carburizing furnace according to the embodiment of the present invention includes an inlet door 1, a cooling chamber 2, and a heating chamber 3, and the vacuum carburizing furnace in which the cooling chamber 2 and the heating chamber 3 are partitioned by an intermediate door 4. In the entrance door 1, the seal members 9 and 9 are fixed at positions corresponding to the periphery of the opening 6 and fixed to the cooling chamber furnace body so as to close the opening 6 on the front surface of the cooling chamber 2, which is a heat treatment chamber into which the workpiece 5 enters. 4 (b)) is disposed on both sides of the intermediate plate 12, and the two outer entrance doors 1a and 1b are disposed so as to sandwich the intermediate plate 12 and be in contact with both surfaces of the seal members 9 and 9. The outer entrance door 1a and the inner entrance door 1b are guided by linear motion bearings 14 and 14 disposed on both surfaces of the intermediate plate 12 and are cylinders 15 and 16 which are independent driving means supported by the cooling chamber 2, respectively. Thus, the cylinder rods 17 and 18 and the link devices 19 and 20 can be individually raised and lowered. The intermediate plate 12 has a communication hole 23 that opens from the outer peripheral edge 21 of the intermediate plate to the inner peripheral edge 22 of the intermediate plate, and the outer inlet door 1a and the inner inlet door 1b are lowered to shield the inner peripheral space 24 of the intermediate plate. When this happens, the inner space 24 of the intermediate plate 12 is exhausted through the communication hole 23 of the intermediate plate 12, and the outer inlet door 1a and the inner inlet door 1b are connected to the intermediate plate by the atmospheric pressure outside the cooling chamber and the internal pressure inside the cooling chamber 2. It is intended to be pressed against 12. That is, the atmospheric pressure outside the cooling chamber is about 100 KPa, the internal pressure inside the cooling chamber 2 is about 80 KPa, and the vacuum pressure in the inner circumferential space 24 of the intermediate plate is exhausted to about 1 Pa. Due to the atmospheric pressure, the inner entrance door 1 b is pressed against the intermediate plate 12 with an extremely strong force due to the internal pressure in the cooling chamber 2. The cylinder rod 18 of the cylinder 16 for driving the inner entrance door 1b protrudes into the cooling chamber 2 and is connected to the link device 20, and the intermediate plate 12 has an upper end 51 and a lower end 52 (FIG. 4B) in the cooling chamber 2. Each is supported and fixed to the furnace wall 50 of the cooling chamber 2.

冷却室2内には炉内搬送装置27と、ワーク5を油漕29中に浸漬させる昇降装置28がある(図1)。冷却室2と加熱室3の間には加熱室3を真空シールするエンドレスチェーン30駆動により昇降する中間扉4がある。加熱室3内に図示しない断熱枠で支えられた断熱材32が配置され、加熱室後部はフランジ33により外部と遮断され、フランジ33を外して断熱枠で支えられた断熱材32を取り出すことができる。外側入口扉1a及び内側入口扉1bは、図3、4では各4ヶ所直動軸受14でガイドされている。
直動軸受 14、14は直動軸受 14、14の取付具13により中間板12両面に対して隙間 25、25をもって配置され、直動軸受 14、14の取付具13に内蔵したスプリング 26、26により、中間板内周空間24内を排気しないときは、中間板12両面よりわずかに浮上るようにされ、外側入口扉及び内側入口扉の昇降時に、中間板12両面に配置したシール部材 9、9との擦れをなくすものとなった。図5(c)はスプリング 26、26により入口扉が中間板からわずかのすきまをもって浮上っている状態を示す。
In the cooling chamber 2, there are an in-furnace transfer device 27 and an elevating device 28 for immersing the work 5 in an oil tank 29 (FIG. 1). Between the cooling chamber 2 and the heating chamber 3, there is an intermediate door 4 that moves up and down by driving an endless chain 30 that vacuum seals the heating chamber 3. A heat insulating material 32 supported by a heat insulating frame (not shown) is arranged in the heating chamber 3, the rear portion of the heating chamber is blocked from the outside by a flange 33, and the heat insulating material 32 supported by the heat insulating frame can be taken out by removing the flange 33. it can. The outer inlet door 1a and the inner inlet door 1b are guided by four linear motion bearings 14 in FIGS.
The linear motion bearings 14 and 14 are arranged with clearances 25 and 25 on both surfaces of the intermediate plate 12 by the fixtures 13 of the linear motion bearings 14 and 14, and springs 26 and 26 built in the fixture 13 of the linear motion bearings 14 and 14. Thus, when the inside of the intermediate plate inner circumferential space 24 is not exhausted, the seal member 9 is arranged so as to be slightly lifted from both surfaces of the intermediate plate 12 and disposed on both surfaces of the intermediate plate 12 when the outer entrance door and the inner entrance door are raised and lowered. The friction with 9 was eliminated. FIG. 5C shows a state in which the entrance door is lifted from the intermediate plate with a slight clearance by the springs 26 and 26.

本発明では、ワークが入る熱処理室である前記冷却室の前面の開口部を閉じるように冷却室炉体に固定されかつ前記開口部周縁に対応する位置にシール部材を両面に配置した中間板と、前記開口部周縁に前記シール部材を両面に配置した中間板と、前記中間板を鋏みかつ前記シール部材の両面に接触可能に配置された2枚の外側入口扉及び内側入口扉と、を有し、前記外側入口扉及び内側入口扉は前記中間板両面に配置された直動軸受によりガイドされ、かつ前記外側入口扉及び内側入口扉はそれぞれ前記冷却室に支持された独立した駆動手段により個別に上昇・下降可能にされ、
前記中間板は中間板外周縁から中間板内周縁に連通し開口する連通穴を有し、
前記外側入口扉及び内側入口扉が下降し前記中間板内周空間を遮蔽する状態になったとき、前記中間板の連通穴を介して前記中間板内周空間内を排気し、前記冷却室外の大気圧と前記冷却室の内圧で前記外側入口扉及び内側入口扉を前記中間板に押し付けるようにしたので、扉の駆動手段としては扉の上昇・下降駆動手段だけで、それ以外の駆動手段は特に必要がないシンプルかつ安価な構造の、真空浸炭炉の熱処理室の入口扉を提供するものとなった。
In the present invention, an intermediate plate that is fixed to the cooling chamber furnace body so as to close the opening on the front surface of the cooling chamber, which is a heat treatment chamber into which a workpiece enters, and has sealing members disposed on both sides at positions corresponding to the periphery of the opening. An intermediate plate in which the seal member is disposed on both sides at the periphery of the opening; and two outer entrance doors and an inner entrance door that are disposed so as to sandwich the intermediate plate and be in contact with both surfaces of the seal member. The outer entrance door and the inner entrance door are guided by linear motion bearings disposed on both sides of the intermediate plate, and the outer entrance door and the inner entrance door are individually provided by independent driving means supported by the cooling chamber. Can be raised and lowered,
The intermediate plate has a communication hole that opens from the outer peripheral edge of the intermediate plate to the inner peripheral edge of the intermediate plate,
When the outer inlet door and the inner inlet door are lowered to shield the intermediate plate inner space, the intermediate plate inner space is exhausted through the communication hole of the intermediate plate, and the outside of the cooling chamber Since the outer inlet door and the inner inlet door are pressed against the intermediate plate by the atmospheric pressure and the internal pressure of the cooling chamber, the door drive means is only the door up / down drive means, and the other drive means are A simple and inexpensive structure that is not particularly necessary is provided for the entrance door of the heat treatment chamber of the vacuum carburizing furnace.

好ましくは、前記直動軸受は前記直動軸受の取付具により前記中間板両面に対して隙間をもって配置され、前記直動軸受の取付具に内蔵したスプリングにより、前記中間板内周空間内を排気しないときは、前記中間板両面よりわずかに浮上るようにされ、外側入口扉及び内側入口扉の昇降時に、中間板両面に配置したシール部材との擦れをなくすものとなった。なお本発明の実施形態の真空浸炭炉の入口扉は冷却室の入口扉として記載したが、本発明は真空浸炭炉の搬入室、加熱室を含む他の熱処理室の入口扉にも適用でき、本発明の真空浸炭炉の熱処理室の入口扉は、真空浸炭炉の搬入室、加熱室を含む他の熱処理室の入口扉を含む。   Preferably, the linear motion bearing is disposed with a gap with respect to both surfaces of the intermediate plate by the mounting member of the linear motion bearing, and exhausted in the inner circumferential space of the intermediate plate by a spring built in the mounting device of the linear motion bearing. When not, it was made to float slightly above both surfaces of the intermediate plate, and when the outer entrance door and the inner entrance door were raised and lowered, friction with the sealing members disposed on both surfaces of the intermediate plate was eliminated. In addition, although the inlet door of the vacuum carburizing furnace of the embodiment of the present invention has been described as the inlet door of the cooling chamber, the present invention can also be applied to the inlet door of other heat treatment chambers including the loading chamber of the vacuum carburizing furnace, the heating chamber, The entrance door of the heat treatment chamber of the vacuum carburizing furnace of the present invention includes an entrance door of another heat treatment chamber including a carry-in chamber and a heating chamber of the vacuum carburizing furnace.

本発明の実施形態の真空浸炭炉の入口扉、熱処理室である冷却室、加熱室及び中間扉の概略側面断面図。The schematic sectional side view of the entrance door of the vacuum carburizing furnace of embodiment of this invention, the cooling chamber which is a heat treatment chamber, a heating chamber, and an intermediate door. 図1のA−A線に沿った概略平面断面図。FIG. 2 is a schematic plan sectional view taken along line AA in FIG. 1. (a)は図1の左側面図で、熱処理室である冷却室及び入口扉の正面図。(A) is a left view of FIG. 1, and is a front view of a cooling chamber and an entrance door which are heat treatment chambers. (a)は図3の要部部分拡大断面、(b)は(a)のB方向からみた右側面図で、外側入口扉及び内側入口扉の上昇・下降駆動手段、及び、中間板、開口部及び連通穴の詳細を示す。3A is an enlarged cross-sectional view of a main part of FIG. 3, and FIG. 3B is a right side view of FIG. 3A as viewed from the B direction. The detail of a part and a communicating hole is shown. (a)は(a)のはB−B線付近の直動軸受の取付具の部分拡大断面、(b)は(a)のB−B線(図4(a)のB−B線に同じ)に沿った部分拡大断面、(c)は(b)状態から直動軸受の取付具に内蔵に内蔵したスプリングにより外側入口扉及び内側入口扉が中間板両面からわずかのすきまをもって浮上っている状態を示す。(A) is a partially enlarged cross-section of a linear bearing fixture near line BB in (a), and (b) is a line BB in (a) (line BB in FIG. 4 (a)). (C) is a partially enlarged cross-section along (same), and the outer entrance door and the inner entrance door are lifted from the both sides of the intermediate plate with a slight clearance by the spring built in the linear bearing fixture from the state (b). Indicates the state.

符号の説明Explanation of symbols

1:入口扉、1a:外側入口扉、1b:内側入口扉、2:冷却室(熱処理室)、3:加熱室
4:中間扉5:ワーク、6:開口部、9:シール部材、12:中間板
13:直動軸受の取付具、14:直動軸受、 15、16:シリンダ(駆動手段)
21:中間板外周縁、22:中間板内周縁、23:連通穴、24:中間板内周空間
1: entrance door, 1a: outside entrance door, 1b: inside entrance door, 2: cooling chamber (heat treatment chamber), 3: heating chamber 4: intermediate door 5: workpiece, 6: opening, 9: seal member, 12: Intermediate plate
13: Linear motion bearing fixture, 14: Linear motion bearing, 15, 16: Cylinder (drive means)
21: outer peripheral edge of the intermediate plate, 22: inner peripheral edge of the intermediate plate, 23: communication hole, 24: inner peripheral space of the intermediate plate

Claims (2)

入口扉と冷却室と加熱室を有し、冷却室と加熱室を中間扉で仕切った真空浸炭炉の熱処理室の入口扉において、ワークが入る熱処理室である前記冷却室の前面の開口部を閉じるように冷却室炉体に固定されかつ前記開口部周縁に対応する位置にシール部材を両面に配置した中間板と、前記中間板を鋏みかつ前記シール部材の両面に接触可能に配置された2枚の外側入口扉及び内側入口扉と、を有し、前記外側入口扉及び内側入口扉は前記中間板両面に配置された直動軸受によりガイドされ、かつ前記外側入口扉及び内側入口扉はそれぞれ前記冷却室に支持された独立した駆動手段により個別に上昇・下降可能にされ、
前記中間板は中間板外周縁から中間板内周縁に連通し開口する連通穴を有し、
前記外側入口扉及び内側入口扉が下降し前記中間板内周空間を遮蔽する状態になったとき、前記中間板の連通穴を介して前記中間板内周空間内を排気し、前記冷却室外の大気圧と前記冷却室の内圧で前記外側入口扉及び内側入口扉を前記中間板に押し付けるようにしたことを特徴とする真空浸炭炉の熱処理室の入口扉。
An entrance door of a heat treatment chamber of a vacuum carburizing furnace that has an entrance door, a cooling chamber, and a heating chamber, and the cooling chamber and the heating chamber are partitioned by an intermediate door. An intermediate plate which is fixed to the cooling chamber furnace body so as to be closed and has a sealing member disposed on both sides at a position corresponding to the periphery of the opening, and 2 which is disposed so as to be able to sandwich the intermediate plate and to be in contact with both surfaces of the sealing member A plurality of outer entrance doors and inner entrance doors, the outer entrance doors and the inner entrance doors being guided by linear motion bearings disposed on both sides of the intermediate plate, and the outer entrance doors and the inner entrance doors, respectively. It can be raised and lowered individually by independent driving means supported in the cooling chamber,
The intermediate plate has a communication hole that opens from the outer peripheral edge of the intermediate plate to the inner peripheral edge of the intermediate plate,
When the outer inlet door and the inner inlet door are lowered to shield the intermediate plate inner space, the intermediate plate inner space is exhausted through the communication hole of the intermediate plate, and the outside of the cooling chamber An inlet door of a heat treatment chamber of a vacuum carburizing furnace, wherein the outer inlet door and the inner inlet door are pressed against the intermediate plate by an atmospheric pressure and an internal pressure of the cooling chamber.
前記直動軸受は前記直動軸受の取付具により前記中間板両面に対して隙間をもって配置され、前記直動軸受の取付具に内蔵したスプリングにより、前記中間板内周空間内を排気しないときは、前記中間板両面よりわずかに浮上るようにされたことを特徴とする請求項1記載の真空浸炭炉の熱処理室の入口扉。   When the linear motion bearing is disposed with a gap with respect to both surfaces of the intermediate plate by the fixture of the linear motion bearing, and the inside of the inner peripheral space of the intermediate plate is not exhausted by a spring built in the fixture of the linear motion bearing. The entrance door of the heat treatment chamber of the vacuum carburizing furnace according to claim 1, wherein the entrance door is slightly lifted from both surfaces of the intermediate plate.
JP2005333598A 2005-11-18 2005-11-18 Inlet door of heat treatment chamber in vacuum carburizing furnace Pending JP2007138252A (en)

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Publication number Priority date Publication date Assignee Title
CN103334678A (en) * 2013-07-01 2013-10-02 核工业理化工程研究院 Pneumatic cabin door seal structure for vacuum room
CN108571265A (en) * 2018-06-15 2018-09-25 江苏港星方能超声洗净科技有限公司 Vacuum chamber seals pneumatic door
CN113492242A (en) * 2020-03-20 2021-10-12 上海朗仕电子设备有限公司 Water-cooled vacuum sealing door system

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JPH08193217A (en) * 1995-01-17 1996-07-30 Daido Steel Co Ltd Gas and oil cooling type vacuum furnace
JP2000146453A (en) * 1998-11-16 2000-05-26 Daido Steel Co Ltd Door device in heat treatment furnace
JP2001141368A (en) * 1999-11-12 2001-05-25 Shimazu Mectem Inc Continuously treating apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08193217A (en) * 1995-01-17 1996-07-30 Daido Steel Co Ltd Gas and oil cooling type vacuum furnace
JP2000146453A (en) * 1998-11-16 2000-05-26 Daido Steel Co Ltd Door device in heat treatment furnace
JP2001141368A (en) * 1999-11-12 2001-05-25 Shimazu Mectem Inc Continuously treating apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103334678A (en) * 2013-07-01 2013-10-02 核工业理化工程研究院 Pneumatic cabin door seal structure for vacuum room
CN103334678B (en) * 2013-07-01 2015-11-25 核工业理化工程研究院 For the pneumatic cabin door seal structure of vacuum chamber
CN108571265A (en) * 2018-06-15 2018-09-25 江苏港星方能超声洗净科技有限公司 Vacuum chamber seals pneumatic door
CN108571265B (en) * 2018-06-15 2024-02-20 江苏港星方能超声洗净科技有限公司 Vacuum chamber sealing pneumatic door
CN113492242A (en) * 2020-03-20 2021-10-12 上海朗仕电子设备有限公司 Water-cooled vacuum sealing door system

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