JP2007137627A - Substrate carrying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily remove an endless belt by releasing regulation in either one or both of width and height directions, facilitate belt replacement by eliminating labor to adjust a carrying reference face, prevent decline in the strength of the endless belt, and suppress cost required for the belt. <P>SOLUTION: This substrate carrying device 1 is provided with the endless belt 3 for carrying a substrate P and with a guide rail 10 regulating the endless belt 3 in the width direction and having a guide groove 20 for guiding traveling of the endless belt 3. The guide rail 10 is provided with a first rail 12 having at least part of the guide groove 20 and with a second rail 16 having an upper regulating part 18 for pressing the endless belt 3. The first and second rails 12, 16 are separably connected to each other, and regulation in either one or both of the width and height directions of the endless belt 3 is released by removing one rail 12 from the other rail 16. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a substrate transport apparatus that transports a substrate with an endless belt, and relates to a technique for easily exchanging the endless belt.

  For example, electronic component mounting lines such as an electronic component mounting device, a solder printing device, and an electronic component visual inspection device are equipped with a substrate transport device that places a printed circuit board on an endless belt and transports it in a predetermined transport direction. ing.

  As shown in FIG. 7, in the substrate transport apparatus 100, the endless belt 101 is wound around two pulleys (not shown) provided at both ends in the longitudinal direction of the frame 102. At the center of the lower surface of the endless belt 101, a protrusion 101a is provided along the longitudinal direction of the belt 101 at equal intervals to form a protrusion row. The endless belt 101 runs on the upper surface of a guide member 103 formed integrally with the frame 102. A guide groove 103a is provided on the upper surface of the guide member 103 along the longitudinal direction. The protrusion 101a is inserted to guide the travel of the endless belt 101, and the endless belt 101 is horizontally oriented (belt width direction). It is regulated. In addition, a pressing member 104 is detachably provided on the frame 102, and the upper surface of the endless belt 101 is pressed to regulate the endless belt 101 in the vertical direction (belt height direction).

  In this substrate transport apparatus 100, the endless belt 101 is sandwiched between the guide member 103 and the pressing member 104 and is regulated in the vertical direction, and the protrusion 101a is fitted in the guide groove 103a and regulated in the horizontal direction. Therefore, in order to replace the endless belt 101, it is necessary to remove the pressing member 104 and then remove the protrusion 101a from the guide groove 103a. Therefore, the belt replacement work is complicated. Further, the inner side surface of the pressing member 104 forms a conveyance reference surface that matches the width of the printed circuit board P to be conveyed, and the reference surface must be adjusted again by removing the pressing member 104 when replacing the belt. However, it took time and effort to make the adjustment.

Therefore, in the substrate transfer device disclosed in Patent Document 1 below, the protrusion row provided on the lower surface of the endless belt is partially removed, and the removal portion is used as a leading portion for removing the endless belt from the guide groove. The belt can be replaced while the presser member is attached. In this case, the endless belt is first loosened by first positioning the removal portion at one end of the guide member and loosening the tension bolt of the pulley. Next, the removal portion is bent in the horizontal plane, and the protrusion row of the portion protruding from the end portion of the guide member is displaced inward of the guide member. The endless belt can be removed from the guide member by moving the remaining projection row to the other end along the side surface of the guide member with the displaced projection row as a leading portion and detaching the entire projection row from the guide groove. .
JP-A-10-242690

  However, in the substrate transport apparatus disclosed in Patent Document 1, the endless belt can be removed from the guide member while the pressing member is mounted, and the belt is relatively easy to adjust because there is no need to adjust the transport reference plane. Although the replacement is possible, the operation of positioning the removal portion from which the protrusion of the endless belt is removed at one end portion of the guide member is still troublesome, and if the removal portion is on the other end side of the frame, The endless belt must be routed by the length. Further, since the endless belt is provided with the removal portion, the strength is lowered and there is a risk of causing the belt to break. Furthermore, since the cost for providing the removal part is separately required, the endless belt itself is expensive.

  Therefore, the present invention has been made in view of the above situation, and guide belts are guided by separating guide rails at the time of belt replacement and releasing one or both of the width direction and the height direction of the endless belt. The belt can be easily removed from the rail, and the belt replacement is further facilitated by eliminating the trouble of adjusting the conveyance reference plane.In addition, it is not necessary to process an endless belt. It is an object of the present invention to provide a substrate transfer apparatus that can be obtained at low cost by suppressing the cost for the processing.

Next, means for solving the above problems will be described with reference to the drawings corresponding to the embodiments.
In the substrate transfer apparatus 1 according to the first aspect of the present invention, the endless belt 3 (40) for transferring the substrate P and the lower surface side of the endless belt 3 (40) are fitted, and the endless belt 3 (40) is moved in the width direction. In the substrate transfer apparatus 1 including a guide rail 10 (30, 41) provided with a guide groove 20 (44) for regulating and guiding the travel of the endless belt 3 (40),
The guide rail 10 (30, 41) has an upper restriction that presses the upper surface of the first rail 12 (31, 42) provided with at least a part of the guide groove 20 (44) and the endless belt 3 (40). A second rail 16 (32, 43) provided with a portion 18;
The first rail 12 (31, 42) and the second rail 16 (32, 43) have a predetermined transport reference surface 21b in which one of the rails 16 (31, 43) is matched to the width of the substrate P. It is fixed as a reference side for setting the position, the other rail 12 (32, 42) is detachably connected to the one rail 16 (31, 43), and the other rail 12 (32, 42) is connected. By removing from the one rail 16 (31, 43), the regulation of either or both of the endless belt 3 (40) in the width direction and the height direction is released.

In the substrate transfer apparatus 1 according to claim 2, a protrusion 3 a fitted into the guide groove 20 is provided along the longitudinal direction of the endless belt 3 at the center of the lower surface of the endless belt 3.
The first rail 12 (31) is provided with a notch 13 along the longitudinal direction at one end of the upper surface on which the endless belt 3 is placed.
The second rail 16 (32) is provided with a lateral groove 17 into which the endless belt 3 is inserted from the width direction to form the upper restricting portion 18,
When the first rail 12 (31) and the second rail 16 (32) are connected, the notch 13 of the first rail 12 (31) and the inner side surface 21a of the second rail 16 (32). Is characterized in that the guide groove 20 is formed.

  The substrate transfer apparatus 1 according to claim 3 is provided on the one rail 16 (31, 43) which is the reference side among the first rail 12 (31, 42) and the second rail 16 (32, 43). Is provided with positioning means 19 (33) for determining the connecting position of the other rail 12 (31, 42) connected to the one rail 16 (31, 43) to a fixed position. .

  According to the substrate transfer apparatus of the present invention, the guide rail is configured to be separable into the first rail and the second rail, and the width of the endless belt can be obtained by removing the other from one of the first rail and the second rail. Either or both of the direction and the height direction are released. As a result, the endless belt can be easily detached from the guide rail. That is, the belt can be easily replaced. In particular, when the guide groove provided in the guide rail is formed by the connection of the first rail and the second rail, the inner side surface of the second rail serving as a transport reference surface in accordance with the width of the substrate to be transported Since the restriction in the width direction of the endless belt is released without moving the belt, it is possible to save the trouble of adjusting the conveyance reference surface again when replacing the belt. Therefore, belt replacement is further facilitated.

  Further, since it is not necessary to provide a conventional removal portion or the like on the endless belt, it is possible to prevent the belt strength from being lowered and to reduce the cost for the processing.

  Furthermore, the conventional removal portion provided on the endless belt is a part of the bottom surface of the endless belt that is partially removed along the belt longitudinal direction, and this removal portion is unnecessary. As a result, belt running is stabilized, and belt meandering and the like can be prevented.

  Of the first rail and the second rail, one of the rails on the reference side that fixes the transport reference plane set in accordance with the width of the substrate to be transported to a predetermined position is the majority of the frame of the transport device. Does not move. Therefore, the positioning means is provided on the rail serving as the reference side, so that the other rail can be always attached to the correct position with respect to the reference side. That is, the endless belt can be correctly attached, and stable belt traveling is possible.

Embodiments of the present invention will be specifically described below with reference to the drawings.
FIG. 1 is a plan view showing the entire configuration of a substrate transfer apparatus according to the present invention, and FIG. 2 is a front view showing the substrate transfer apparatus.

  The board conveying device according to the present invention is installed in an electronic component mounting line such as an electronic component mounting apparatus, a solder printing apparatus, and an electronic component appearance inspection apparatus, and mainly conveys a printed board or the like in a predetermined conveyance direction. is there. As shown in FIG. 1, this board | substrate conveyance apparatus 1 is comprised by a pair of belt conveyors 2 and 2 which oppose. Further, an endless belt 3 made of an elastomer such as urethane rubber is used for the transport belt. Furthermore, a substantially rectangular protrusion 3a is provided at the center of the bottom surface of the endless belt 3 along the longitudinal direction of the belt 3 at equal intervals (see FIG. 3). Since electronic parts are mounted on both sides of the printed board P to be conveyed, both ends of the printed board P are placed on the endless belt 3 and conveyed.

  As shown in FIGS. 1 and 2, the belt conveyor 2 is generally configured by providing pulleys 5 and 5 at both ends in the longitudinal direction of a frame 4 formed long in the transport direction X. A drive motor 6 for driving the pulley 5 is provided at either one of both ends of the frame 4. Further, a drive pulley 7 is connected to the drive motor 6. The drive motor 6 drives the drive pulley 7 and drives the pulley 5 at one end of the frame 4 via the intermediate pulley 8, so that the endless belt 3 travels in the transport direction X.

  From here, the guide rail which comprises the said flame | frame which is the summary of this invention is demonstrated for every embodiment.

First, the first embodiment will be described.
FIG. 3 is a side view showing a first embodiment of the substrate transfer apparatus according to the present invention, and FIGS. 4A and 4B are front views showing the operation of the embodiment when the belt is replaced.

As shown in FIGS. 3 and 4, the guide rail 10 is provided with a guide groove 20 that guides the travel of the endless belt 3 and an upper restricting portion 18 that presses the upper surface of the endless belt 3. The guide rail 10 is substantially constituted by a first rail 12 and a second rail 16, and the first rail 12 and the second rail 16 are detachably connected to each other.
As shown in FIG. 3, the endless belt 3 attached to the guide rail 10 (frame 4) is wound between the pulleys 5 and 5 at both ends as described above. The intermediate pulley 8 interposed between the endless belt 3 and the spring 11 is operatively connected to the endless belt 3 so that a constant tension is applied.

  As shown in FIG. 3, the first rail 12 is formed long along the longitudinal direction (conveying direction X) of the frame 4 and is attached to the inner side surface of the frame 4. In the state where the first rail 12 is attached, both pulleys 5 and 5 at both ends of the frame 4 are exposed to the outside.

  Further, as shown in FIG. 4, a notch 13 is formed along the longitudinal direction X on one end side orthogonal to the longitudinal direction X on the upper surface of the first rail 12, that is, on the outer end side. This notch 13 constitutes a part of a guide groove 20 described later. In the state where the first rail 12 is attached to the second rail 16 described later, a substantially half portion of the endless belt 3 is placed on the upper surface of the first rail 12 and a part of the guide groove 20 is formed. The protrusion 13 a of the endless belt 3 is fitted into the notch 13. The first rail 12 is provided with a plurality of attachment holes 14 at predetermined positions in the longitudinal direction X, and is attached to the inner side surface 21 a of the second rail by tightening bolts 15 and the like from the width direction of the endless belt 3.

  As shown in FIG. 4, the second rail 16 described above constitutes most of the guide rail 10 and serves as a reference-side rail with respect to the first rail 12. In addition, in order to convey the printed circuit board P, the rail used as the reference | standard side is being fixed so that the conveyance reference plane 21b according to the width | variety of this printed circuit board P may be set to a predetermined position. A lateral groove 17 for fitting the endless belt 3 in the belt width direction is provided on the inner side surface 21a of the second rail 16 at the position where the endless belt 3 is attached. The upper surface portion of the lateral groove 17 serves as an upper restricting portion 18 that presses the upper surface of the endless belt 3. Further, the inner side surface above the upper restricting portion 18 forms the above-described transport reference surface 21b. Further, a convex portion 19 is provided along the longitudinal direction X at the lower portion of the inner side surface 21a at the attachment position of the endless belt 3, and protrudes in the belt width direction. The convex portion 19 serves as a positioning means when the first rail 12 is attached to the second rail 16.

  As shown in FIG. 4, when the first rail 12 and the second rail 16 are connected, the guide groove 20 described above is formed by the notch 13 of the first rail 12 and the inner side surface 21a of the second rail 16. Forming. The guide groove 20 is provided along the longitudinal direction X of the guide rail 10.

  Here, the 1st rail 12 and the 2nd rail 16 are regulating the endless belt 3 in the belt width direction by the projection part 3a being inserted in the guide groove 20 in the connection state. Further, the endless belt 3 is regulated in the belt height direction by being sandwiched vertically between the upper regulating portion 18 of the second rail 16 and the upper surface of the first rail 12.

  Next, a procedure for removing the endless belt from the guide rail from the substrate transfer apparatus according to the first embodiment will be described with reference to FIG.

First, as shown in FIG. 4A, in order to separate the guide rail 10 that regulates the endless belt 3 in the belt width direction and the belt height direction into the first rail 12 and the second rail 16, The bolt 15 that connects and fixes the rail 12 and the second rail 16 is loosened. Thereby, each regulation of the endless belt 3 is relaxed.
Next, as shown in FIG. 4B, by removing the first rail 12 from the second rail 16, the regulation of the belt width direction and the belt height direction of the endless belt 3 is released at once. In particular, the endless belt 3 can be easily detached from the guide rail 10 by releasing the restriction of the endless belt 3 in which the protrusion 3 a has been fitted in the guide groove 20 until now. At this time, even if the first rail 12 is not completely removed from the second rail 16, the endless belt 3 can be removed by separating the first rail 12 from the second rail 16 to some extent.

  In addition, the procedure for attaching the endless belt 3 to the guide rail 10 only needs to be performed in reverse from the above-described removal procedure. At this time, the adjustment of the conveyance reference surface that has been performed at the time of belt replacement so far is performed again because the position of the second rail 16 does not move and the conveyance reference surface 21b formed by the inner side surface of the second rail 16 does not shift. do not have to.

  According to the first embodiment, the guide rail 10 is configured to be separable into the first rail 12 and the second rail 16, and the guide rail 10 is separated from the second rail 16 which is a reference side rail fixed at a predetermined position. By removing one rail 12, the regulation of the endless belt 3 in the belt width direction and the belt height direction is released. As a result, the guide groove 20 is divided and the protruding portion 3a of the endless belt 3 escapes, and the endless belt 3 can be easily detached from the guide rail 10. Further, since the position of the second rail 16 does not move, the conveyance reference surface 21b is not displaced, and it is possible to save the trouble of adjusting the conveyance reference surface 21b again when the endless belt 3 is attached.

  In addition, since the second rail 16 serving as the reference side does not move, the first rail 12 is connected to the second rail 16 by providing a convex portion 19 as a positioning means on the inner side surface 21 a of the second rail 16. It is always attached to the correct position.

Next, a second embodiment will be described.
FIGS. 5A and 5B are front views showing the operation of the second embodiment of the substrate transfer apparatus according to the present invention during belt replacement.
Note that, in the second embodiment described below, the same reference numerals are given to the same or identical portions as those in the first embodiment described above, and the description thereof is omitted.

  As shown in FIG. 5, the guide rail 30 is generally configured by a first rail 31 and a second rail 32, and the first rail 31 and the second rail 32 are detachably connected to each other.

  As shown in FIG. 5, the first rail 31 constitutes most of the guide rail 30 and serves as a reference-side rail with respect to the second rail 32 described later. The rail on the reference side is fixed so that the transport reference surface 21b corresponding to the width of the printed circuit board P is set at a predetermined position in order to transport the printed circuit board P.

  As shown in FIG. 5, the second rail 32 described above is attached to the outer side surface of the frame 4 (first rail 31).

  Further, as shown in FIG. 5, a stage portion 33 is provided on the outer side surface of the first rail 31, and when the second rail 32 is attached, the stage portion 33 guides the lower surface of the second rail 32. The positioning means is used to correctly attach the second rail 32 to the first rail 31. Furthermore, by properly attaching the second rail 32 in this way, the above-described transport reference surface 21b formed by the inner side surface 21 above the second rail 32 can always be set at a predetermined position.

  Next, a procedure for removing the endless belt from the guide rail from the substrate transfer apparatus according to the second embodiment will be described with reference to FIG.

First, as shown in FIG. 5A, in order to separate the guide rail 10 that regulates the endless belt 3 in the belt width direction and the belt height direction into the first rail 31 and the second rail 32, the first rail 31 and the second rail 32 are separated. The bolt 15 that connects and fixes the rail 31 and the second rail 32 is loosened. Thereby, each regulation of the endless belt 3 is relaxed.
Next, as shown in FIG. 5B, by removing the second rail 32 from the first rail 31, the regulation of the belt width direction and the belt height direction of the endless belt 3 is released at a time. In particular, the endless belt 3 can be easily detached from the guide rail 30 by releasing the restriction of the endless belt 3 in which the protrusion 3 a has been fitted in the guide groove 20 until now. At this time, even if the second rail 32 is not completely removed from the first rail 31, the endless belt 3 can be removed by separating the second rail 32 from the first rail 31 to some extent.

  In addition, the procedure for attaching the endless belt 3 to the guide rail 30 only needs to be performed in reverse from the above-described removal procedure.

  According to the second embodiment, the guide rail 30 is configured to be separable into a first rail 31 and a second rail 32, and the first rail 31 is a reference-side rail fixed at a predetermined position. By removing the two rails 32, the restriction of the endless belt 3 in the belt width direction and the belt height direction is released. As a result, the guide groove 20 is divided and the protruding portion 3a of the endless belt 3 escapes, and the endless belt 3 can be easily detached from the guide rail 30. Further, the first rail 31 is fixed, and the second rail 32 is attached to the first rail 32 via the stage portion 33, so that the transport reference surface 21 b formed by the inner side surface 21 of the second rail 32 is formed. The predetermined position can always be set. As a result, similarly to the effect of the first embodiment, it is possible to save the trouble of adjusting the conveyance reference surface 21b again when the endless belt 3 is attached.

  Further, since the first rail 31 serving as the reference side does not move, the stage portion 33 is provided as a positioning means on the outer side surface of the first rail 31, so that the second rail 32 is relative to the first rail 31. The same effect as that of the first embodiment can be obtained in that it is always attached at the correct position.

Next, a third embodiment will be described.
FIGS. 6A and 6B are front views showing the operation at the time of belt replacement in the third embodiment of the substrate transfer apparatus according to the present invention.
Note that in the third embodiment described below, the same reference numerals are given to the same or identical portions as those in the first and second embodiments described above, and the description thereof is omitted.

  As shown in FIG. 6, a protrusion 40 a having a width equal to the belt width is provided on the lower surface of the endless belt 40. The protrusions 40 a are arranged at equal intervals along the longitudinal direction of the belt 40.

  As shown in FIG. 6, the guide rail 41 is provided with a guide groove 44 that guides the travel of the endless belt 40 and an upper restricting portion 18. The guide rail 41 is substantially constituted by a first rail 42 and a second rail 43, and the first rail 42 and the second rail 43 are connected so as to be separable.

  As shown in FIG. 6, the first rail 42 is attached to the inner side surface of the frame 4 (second rail 43).

  A guide groove 44 is provided along the longitudinal direction X on the upper surface of the first rail 42. A protrusion 40 a of the endless belt 40 is fitted into the guide groove 44.

  As shown in FIG. 6, the inner side surface 21 a of the second rail 43 is provided with a fitting portion 45 into which the first rail 42 can be fitted from the belt width direction. Further, a convex portion 19 as a positioning means is provided at the lower portion of the fitting portion 45.

  Here, the protrusion 40 a is inserted into the guide groove 44 of the first rail 42 to restrict the endless belt 40 in the belt width direction, and the upper restriction portion 18 of the second rail 43 and the upper surface of the first rail 42 It is regulated in the belt height direction by sandwiching it up and down.

  Further, although not shown, the second rail 43 constitutes most of the guide rail 41 and serves as a reference side rail with respect to the first rail 42. The rail on the reference side is fixed so that the transport reference surface 21b corresponding to the width of the printed circuit board P is set at a predetermined position in order to transport the printed circuit board P. In addition, the inner side surface above the upper restricting portion 18 forms the transport reference surface 21b.

  Next, a procedure for removing the endless belt from the guide rail from the substrate transfer apparatus according to the third embodiment will be described with reference to FIG.

First, as shown in FIG. 6A, in order to separate the guide rail 41 that regulates the endless belt 40 in the belt width direction and the belt height direction into the second rail 43 and the first rail 42, The bolt 15 that connects and fixes the first rail 42 and the second rail 43 is loosened. Thereby, the restriction in the height direction of the endless belt 40 is relaxed.
Next, as shown in FIG. 6 (b), the first rail 42 is removed from the second rail 43 to release the restriction of the endless belt 40 in the belt height direction. Thereafter, by separating the first rail 42 from the fitting portion 45 of the second rail 43, the protrusion 40 a can be escaped upward from the guide groove 44. Thereby, the endless belt 40 can be easily detached from the guide rail 41.

  In addition, the procedure for attaching the endless belt 40 to the guide rail 41 is only required to perform the above-described removal procedure in reverse. At this time, similarly to the above-described first embodiment, it is not necessary to adjust the conveyance reference surface 21b again at the time of belt replacement.

  According to the third embodiment, the guide rail 41 is configured to be separable into a first rail 42 and a second rail 43, and the guide rail 41 is separated from the second rail 43, which is a reference side rail fixed at a predetermined position. The restriction in the height direction of the endless belt 40 is released by removing the one rail 42. As a result, the protruding portion can be escaped upward from the guide groove 44, and the endless belt 40 can be easily detached from the guide rail 41. Further, as in the first embodiment, the position of the second rail 43 does not move, so that the conveyance reference surface 21b is not displaced, and the trouble of adjusting the conveyance reference surface 21b again when attaching the endless belt 40 is eliminated. It can be omitted.

  Further, since the second rail 43 serving as the reference side does not move, the first rail 42 is changed to the second rail 43 by providing the convex portion 19 as the positioning means on the inner side surface 21 a of the second rail 43. On the other hand, it is possible to obtain the same effect as that of the first and second embodiments in which it is always attached at the correct position.

  In the first to third embodiments described above, the protrusions 3a and 40a are provided on the lower surface of the endless belts 3 and 40. In the first and second embodiments, the protrusions are cross-sectionally convex. Although the shape is rectangular in cross section, the present invention is not limited to this, and for example, a belt having an L cross section or a concave cross section may be used as the conveyance belt. In the first to third embodiments, the protrusions 3a and 40a are arranged at regular intervals along the longitudinal direction of the endless belts 3 and 40. You may comprise. Further, it may be a flat endless belt provided with no protrusions 3a, 40a.

It is a top view which shows the whole structure of the board | substrate conveyance apparatus by this invention. It is a front view which shows the board | substrate conveyance apparatus. It is a side view which shows 1st Embodiment of the board | substrate conveyance apparatus. (A) It is a front view which shows the operation | movement at the time of belt replacement | exchange of 1st Embodiment. (B) It is a front view which shows the operation | movement at the time of belt replacement | exchange of 1st Embodiment. (A) It is a front view which shows the operation | movement at the time of belt replacement | exchange of 2nd Embodiment. (B) It is a front view which shows the operation | movement at the time of belt replacement | exchange of 2nd Embodiment. (A) It is a partial enlarged front view which shows the operation | movement at the time of belt replacement | exchange of 3rd Embodiment. (B) It is a partial enlarged front view which shows the operation | movement at the time of belt replacement | exchange of 3rd Embodiment. It is a partial expansion perspective view which shows the conventional board | substrate conveyance apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board | substrate conveyance apparatus 3,40 ... Endless belt 3a, 40a ... Projection part 10, 41 ... Guide rail 12, 31, 42 ... 1st rail 13 ... Notch 16, 32, 43 ... 2nd rail 17 ... Cross groove 19 33 ... convex part, stage part (positioning means)
20, 44 ... Guide groove 21a ... Inner side surface of second rail 21b ... Inner side surface of second rail (conveyance reference surface)
P ... Printed circuit board (board)

Claims (3)

A guide provided with an endless belt (3) for transporting the substrate (P) and a guide groove (20) for fitting the lower surface side of the endless belt to restrict the endless belt in the width direction and guiding the travel of the endless belt. In a substrate transfer device (1) comprising a rail (10),
The guide rail has a first rail (12) provided with at least a part of the guide groove and a second rail (16) provided with an upper restricting portion (18) for pressing the upper surface of the endless belt. And
The first rail and the second rail are fixed as a reference side for setting one of the rails to a predetermined position on the transport reference surface (21b) that matches the width of the substrate, The other rail is detachably connected, and the other rail is removed from the one rail so that the restriction of either or both of the width direction and the height direction of the endless belt is released. Substrate transfer device. At the center of the bottom surface of the endless belt (3), a protrusion (3a) fitted into the guide groove (20) is provided along the longitudinal direction of the endless belt,
The first rail (12) is provided with a notch (13) along the longitudinal direction on one end side of the upper surface on which the endless belt is placed.
The second rail (16) is provided with a lateral groove (17) into which the endless belt is inserted from the width direction to form the upper restricting portion (18),
When the first rail and the second rail are connected, the notch of the first rail and the inner side surface (21a) of the second rail form the guide groove (20). The substrate transfer apparatus according to claim 1.   Positioning of the first rail (12) and the second rail (16) that determines the connection position of the other rail connected to the one rail as a fixed position on the one rail that is the reference side. 3. A substrate transfer apparatus according to claim 1, further comprising means (19).

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