JP2007128969A - Housing and its assembly method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a housing where a back panel can be vertically fixed to a main frame, and a connector of a housing back can be smoothly connected to a connector of a storage. <P>SOLUTION: The housing is provided with a main frame, a front panel, the back panel, a connector portion, an intermediate panel, and an assembly error adjuster. One face of the main frame constitutes a base of the package. The front panel is installed on one face of the main frame. The back panel is vertically arranged on one face of the main frame and is opposite to the front panel. The connector is arranged on an outer side of the housing of the back panel, and an outer connection terminal can be inserted or pulled out in a direction vertical to the outer face of the housing. The intermediate panel can fix a control substrate which is electrically connected to the connector, and it is fixed to the front panel or the back panel. The assembly error adjuster adjusts a fitting position of the intermediate panel in a cross direction of the housing, and couples the front panel or the back panel with the intermediate panel. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a housing containing a control circuit for driving a motor and the like and an assembling method thereof.

  Conventionally, a plurality of stage drive linear motors are used for a wafer stage and a reticle stage of a semiconductor exposure apparatus, and each linear motor requires a separate amplifier device incorporating a control circuit. For this reason, when a plurality of amplifier devices are arranged in the vicinity of the semiconductor exposure apparatus, the amplifier devices are often housed and arranged in a rack (see Patent Document 1).

Particularly in recent years, a storage system for an amplifier device in which the casing of the amplifier device and the shape of the storage part of the rack are standardized has been studied. In this storage system, when the amplifier device is stored, the connector arranged on the rear surface of the housing and the connector existing in the storage unit are connected to each other to complete the wiring. Therefore, in the above storage system, it is required that the storage direction of the amplifier device and the insertion / extraction direction of the connector coincide with each other with high accuracy.
JP-A-6-69675

By the way, in the case of the above-described amplifier device case, it is often more convenient in manufacturing to divide the main frame constituting the bottom surface of the case from the front panel and the back panel.
However, when the casing has the above-described parts configuration, the back panel may be tilted with respect to the main frame at the time of assembling the casing due to variations in dimensional accuracy of each component. In this case, even if the connector is mounted vertically on the rear panel, the inclination of the rear panel causes a mismatch between the housing direction of the amplifier device and the connector insertion / removal direction, and the connector on the rear surface of the housing and the connector on the housing portion do not match. This will interfere with the connection.

Especially in the case where the intermediate panel for assembling the control board is fixed to the main frame, front panel, and rear panel, the dimensional error of each part is adjusted at the connection part between the intermediate panel and the rear panel in order to mount the rear panel properly. There was a high need to do so, and countermeasures were desired.
The present invention is to solve the above-mentioned problems of the prior art, and its purpose is to fix the back panel vertically to the main frame, and to smoothly connect the connector on the back of the housing and the connector on the housing. It is to provide a housing that can be used.

  The housing according to the first invention includes a main frame, a front panel, a back panel, a connector portion, an intermediate panel, and an assembly error adjustment portion. One surface of the main frame constitutes the bottom surface of the housing. The front panel is erected with respect to one surface of the main frame. The rear panel is erected perpendicular to one surface of the main frame and faces the front panel. The connector portion is disposed on the outer surface side of the rear panel, and an external connection terminal can be inserted and removed in a direction perpendicular to the outer surface of the housing. The intermediate panel can fix the control board electrically connected to the connector portion, and is fixed to either the front panel or the rear panel. The assembly error adjustment unit can adjust the attachment position of the intermediate panel in the front-rear direction of the casing, and connects the other of the front panel or the rear panel and the intermediate panel.

  In a second aspect based on the first aspect, the assembly error adjusting portion has a first fixing portion that is fixed to either the front panel or the rear panel, and a first opening through which the screw member can be inserted. And a second fixing part that can be fixed to the intermediate panel. The intermediate panel has a second opening through which the screw member is inserted. Either the first opening or the second opening is a long hole extending in the front-rear direction of the casing, and the intermediate panel and the assembly error adjusting unit are formed by a screw member inserted through the first opening and the second opening. Is fixed.

In a third aspect based on the first or second aspect, a cooling mechanism having a heat pipe is placed in the vicinity of the rear panel on the main frame. And the attachment position of the connector in a back panel is set above the cooling mechanism.
According to a fourth aspect of the present invention, there is provided a method for assembling the casing according to any one of the first to third aspects, wherein an assembly reference jig for defining a relative distance between the front panel and the rear panel is attached to the main frame. A step of temporarily assembling the front panel and the rear panel, a step of fixing the front panel and the rear panel to the main frame in a state where one surface of the main frame and the rear panel are vertical, and either the front panel or the rear panel And fixing the intermediate panel in the assembly error adjusting unit and fixing the intermediate panel, and fixing either the front panel or the back panel and the intermediate panel.

  In the case of the present invention, the rear panel can be fixed vertically to the main frame by adjusting the mounting position of the intermediate panel by the assembly error adjusting section.

Hereinafter, the housing | casing in embodiment of this invention is demonstrated based on drawing.
The housing of the present embodiment relates to an amplifier device 11 for driving a stage driving linear motor of a semiconductor exposure apparatus. The amplifier device 11 is operated together with a rack 13 having a storage chamber 12 (see FIG. 5).
Here, the storage chamber 12 of the rack 13 is in communication with the outside through an opening. The shape of the opening corresponds to the front shape of the amplifier device 11, and an internal space corresponding to the outer shape of the amplifier device 11 is formed inside the storage chamber 12. Therefore, the amplifier device 11 can be inserted into the storage chamber 12 from the opening. The amplifier device 11 is inserted into the storage chamber 12 from the back side.

  A rack-side connector 14 is disposed on the back side inner wall of the storage chamber 12. Each terminal of the rack-side connector 14 is connected to a host computer, a linear motor, and an external power source (illustration of the host computer, linear motor, and external power source is omitted). And the control circuit arrange | positioned in the amplifier apparatus 11 is connected to a linear motor and a host computer via the rack side connector 14, respectively.

  FIG. 1 is a perspective view showing an outline of a housing of an amplifier device 11 in the present embodiment. 2 is a plan view of the housing with the cover removed, and FIG. 3 is a cross-sectional view taken along the line AA of FIG. The amplifier device 11 of the present embodiment includes a housing, a main control board 31 and an electronic device unit 32. The casing of the amplifier device 11 includes a main frame 21, a front panel 22, a back panel 23, an intermediate panel 24, and a cover 25. In addition, said each part (21-25) which comprises a housing | casing is formed by bending metal thin plates, such as a thin steel plate or aluminum, for example.

  The main frame 21 is a plate-like member having a rectangular shape as a whole, and constitutes the bottom surface of the casing after the casing is assembled. On the main frame 21, an intermediate panel 24 is erected, and a main control board 31 and an electronic device unit 32 are arranged. Further, each peripheral edge of the main frame 21 is folded back toward the inside of the housing. A front panel 22 is attached to the main frame 21 on the front side of the housing. A back panel 23 is attached to the main frame 21 on the back side of the housing. In addition, the screw hole is opened in the attachment position of each member in the main frame 21, respectively.

The front panel 22 is a plate-like member that is attached perpendicularly to the bottom surface portion of the main frame 21 and constitutes the front of the housing after the housing is assembled. The front panel 22 is formed with a vent for allowing air to flow into the housing (illustration of the vent of the front panel 22 is omitted).
Further, the upper surface side and the side surface side of the front panel 22 are folded back toward the inside of the housing. A screw insertion hole is opened on the bottom side of the front panel 22. The position of this insertion hole corresponds to the position of the screw hole of the main frame 21. Further, two screw holes 22a for fixing the cover are formed on the left and right sides of the front panel 22 on the side surface side.

  The rear panel 23 is a plate-like member whose overall shape corresponds to that of the front panel, and constitutes the rear surface of the casing after the casing is assembled. Similarly to the front panel 22, the back panel 23 is also attached perpendicularly to the bottom surface portion of the main frame 21 and is disposed to face the front panel 22. A ventilation port 23b for exhausting air in the housing is formed in a part of the rear panel 23, and a blower fan 33 is attached to the ventilation port 23b.

  The upper surface side and the side surface side of the back panel 23 are folded back toward the inside of the housing. A screw insertion hole is opened on the bottom side of the back panel 23. The position of this insertion hole corresponds to the position of the screw hole of the main frame 21. Further, two screw holes 23a for fixing the cover are formed on the left and right sides of the back side of the back panel 23, respectively. The positions of the screw holes 23a for fixing the cover on the rear panel correspond to the positions of the screw holes 22a on the front panel. And the screw holes 22a and 23a of the front panel 22 and the back panel 23 function also as an attaching part of the below-mentioned assembly reference | standard jig | tool 26. FIG.

Further, a housing-side connector 27 having a male-female relationship with the rack-side connector 14 is attached to the housing outer surface of the back panel 23. The housing side connector 27 is arranged so that the direction in which the rack side connector 14 is inserted and removed is perpendicular to the rear panel 23.
On the other hand, a connecting piece 28 for attaching the intermediate panel 24 is fixed to the inner surface of the housing of the back panel 23. The overall shape of the connecting piece 28 is L-shaped, and the first surface and the second surface are vertically continuous. The first surface of the connecting piece 28 is a fixed portion that is screwed to the back panel 23. On the other hand, the second surface of the connecting piece 28 is arranged such that the tip protrudes toward the inside of the housing. The second surface of the connecting piece 28 constitutes a mounting surface of the intermediate panel 24 and serves as a fixing portion with the intermediate panel 24. The second surface of the connecting piece 28 is disposed horizontally with respect to the side surface of the housing. In addition, two long holes 28 a extending in the front-rear direction of the housing are opened in parallel on the second surface of the connecting piece 28.

  The intermediate panel 24 is arranged vertically in the front-rear direction of the housing, and the main control board 31 is assembled on one surface thereof. The front side and the bottom side of the intermediate panel 24 are folded. Screw holes for fixing the front panel 22 and the main frame 21 are opened in the folded portions. In addition, two screw holes are opened at positions corresponding to the elongated holes 28 a of the connecting piece 28 on the housing rear side of the intermediate panel 24.

The cover 25 is a member that covers the upper surface and the side surface of the housing, and configures the upper surface and the side surface of the housing after the assembly of the housing. The cover 25 is formed in a U-shape when viewed from the front side of the casing, and is fixed to the front panel 22 and the rear panel 23 by screwing on both sides of the casing.
The main control board 31 fixed to the housing and the electronic device unit 32 shown in FIG. 4 constitute a driver unit that supplies a drive current to the linear motor and an amplifier unit that controls the amplification factor of the drive current. The main control board 31 and the electronic device unit 32 are electrically connected to each terminal of the housing side connector 27 by wiring (not shown).

  The electronic device unit 32 shown in FIG. 4 includes a cooling mechanism having a heat pipe 34 and a radiator 35. The cooling mechanism of the electronic device unit is disposed in the vicinity of the blower fan 33 in consideration of heat exhausted outside the casing (see FIG. 4). Here, when the weight of the heat pipe 34 is taken into consideration, the center of gravity of the cooling mechanism is lowered when the cooling mechanism is arranged on the lower side of the housing, and the amplifier device 11 is easily stabilized. On the other hand, a housing side connector 27 is also arranged on the rear panel 23. Since wiring such as the main control board 31 is connected to the housing-side connector 27, the wiring work at the time of assembly becomes easier if it is arranged on the cooling mechanism. Therefore, in this embodiment, the attachment position of the housing side connector 27 on the back panel 23 is set above the positions of the ventilation port 23 b and the blower fan 33.

Next, the assembly process of the amplifier device 11 of this embodiment will be described in order.
(1) First, screws (29 a) are inserted from the bottom surface side of the main frame 21 to fix the intermediate panel 24 to the main frame 21. For fixing the intermediate panel 24, a Sarabis 29a is used so as not to form a protrusion on the bottom surface of the casing. Next, the main control board 31 is assembled to the intermediate panel 24 and the electronic device unit 32 is fixed on the main frame 21.

(2) Second, the front panel 22 and the back panel 23 are temporarily assembled to the main frame 21. At this time, the housing side connector 27 and the connecting piece 28 are attached to the back panel 23 in advance before temporary assembly. Next, a pair of assembly reference jigs 26 are attached to both side surfaces of the front panel 22 and the back panel 23 with screws 29, respectively.
Here, the assembly reference jig 26 is a rod-like member having a length substantially equal to the length of the main frame 21. At both ends of the assembly reference jig 26, insertion holes 26a are opened for screwing the panels 22 and 23, respectively. For this reason, the relative distance between the front panel 22 and the back panel 23 is maintained during temporary assembly by attaching the pair of assembly reference jigs 26.

(3) Thirdly, either the front panel 22 or the back panel 23 is adjusted vertically with the bottom surface of the main frame 21 as a reference. The front panel 22 and the back panel 23 are connected with a pair of assembly reference jigs 26 while maintaining a relative distance. Therefore, when one panel is adjusted perpendicularly to the main frame 21, the other panel is adjusted in the same manner. Will be.
(4) Fourth, after the adjustment in (3) above, the front panel 22 and the back panel 23 are screwed to the main frame 21, and the folded portion of the intermediate panel 24 and the front panel 22 are screwed. Then, screws 29 are respectively inserted into the two long holes 28a of the connecting piece 28, and the connecting piece 28 is moved in the front-rear direction of the casing so that the rear panel 23 is kept perpendicular to the main frame 21 and connected to the intermediate panel 24. The piece 28 and the back panel 23 and the connecting piece 28 are fixed by screwing. As the screwing position of the connecting piece 28 is allowed to slide in the longitudinal direction of the housing by the long hole 28a, the connecting portion between the intermediate panel 24 and the connecting piece 28 can absorb the dimensional error of each member. Further, since the intermediate panel 24 and the connecting piece 28 are fixed by the two screws 29, the intermediate panel 24 is not fixed in a state where the intermediate panel 24 bites the elongated hole 28a of the connecting piece 28.

  (5) Fifth, after the rear panel 23 is fixed to the main frame 21, the main control board 31, the electronic device unit 32, and the housing side connector 27 are connected to each other. Then, the pair of assembly reference jigs 26 are removed from the front panel 22 and the back panel 23. Thereafter, the cover 28 is attached to the housing and screwed. Thus, the assembly of the amplifier device 11 is completed.

Hereinafter, the operation and effect of the amplifier device of this embodiment will be described.
In the present embodiment, since the screwing position between the intermediate panel 24 and the connecting piece 28 can be adjusted by the long hole 28a, the back panel 23 is attached vertically to the main frame 21 even when the dimensional accuracy of each component varies greatly. be able to. Therefore, in this embodiment, the storage direction of the amplifier device 11 and the connector insertion / extraction direction coincide with each other, so that the connection between the connectors is not hindered during rack storage.

Moreover, in the assembly of the housing of the present embodiment, the front panel 22 and the back panel 23 can be positioned very easily by using a pair of assembly reference jigs 26.
Furthermore, in this embodiment, since the cooling mechanism provided with the heat pipe 34 is arrange | positioned in the ventilation fan 33 vicinity of the back panel 23, the cooling efficiency of the electronic circuit in a housing | casing can be improved more. Moreover, in this embodiment, since the attachment position of the housing | casing side connector 27 in the back panel 23 is set above the ventilation fan 33 of the back panel 23, the wiring operation | work at the time of an assembly becomes easy.

Note that the more the casing-side connector 27 is arranged on the upper side, the greater the galling in the connector insertion / extraction direction due to the inclination of the rear panel 23. Therefore, in the configuration of the amplifier device 11 according to the present embodiment, the adjustment of the screwing position with the connecting piece 28 described above has a particularly great effect.
(Supplementary items of the embodiment)
As mentioned above, although this invention has been demonstrated by said embodiment, the technical scope of this invention is not limited to the said embodiment, For example, the following forms may be sufficient.

(1) The casing of the present invention can also be applied to a casing having a configuration in which an intermediate panel is disposed horizontally in parallel with the main frame and the intermediate panel is fixed to the front panel and the rear panel.
(2) The casing of the above embodiment may be configured to attach a cover to the casing without removing the assembly reference jig.
(3) In this invention, you may make it perform the screwing of a connection piece and an intermediate | middle panel with two screws arrange | positioned in the front-back direction of a housing | casing. In this case, even if the connecting piece has one long hole, the same effect as in the above embodiment can be obtained. Alternatively, a long hole may be formed on the intermediate panel side, and a screw hole may be formed in the connecting piece.

  (4) Moreover, the assembly error adjustment part of this invention is not limited to the structure which adjusts a screwing position with a long hole. For example, a configuration in which cylinders having different diameters are respectively fixed to the intermediate panel and the back panel and the two cylinders are combined in a nested manner to adjust the position may be used. Moreover, in the said embodiment, the 1st surface and the 2nd surface may have a T-shaped shape as for the connection piece. In this T-shaped connecting piece, the T-shaped flat part may be a fixing part of the front panel or the back panel, and the opposite part of the flat part may be a fixing part of the intermediate panel.

The perspective view which shows the outline | summary of the housing | casing of the amplifier apparatus in this embodiment. Top view of the housing with the cover removed AA sectional view of FIG. Diagram showing the positional relationship between the cooling mechanism and connectors near the back panel The perspective view which shows the amplifier apparatus and rack of this embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Amplifier apparatus, 14 ... Rack side connector, 21 ... Main frame, 22 ... Front panel, 23 ... Rear panel, 24 ... Intermediate panel, 26 ... Assembly reference jig, 27 ... Housing side connector, 28 ... Connection piece, 28a ... Long hole 29 ... Screw 32 ... Electronic device unit 34 ... Heat pipe 35 ... Radiator

Claims (4)

A main frame, one side of which forms the bottom of the housing;
A front panel standing on one side of the main frame;
A rear panel that is erected perpendicular to one surface of the main frame and that faces the front panel;
A connector part that is disposed on the outer surface side of the rear panel and from which an external connection terminal can be inserted and removed in a direction perpendicular to the outer surface of the housing;
A control board that is electrically connected to the connector portion can be fixed, and an intermediate panel fixed to either the front panel or the back panel;
The mounting position of the intermediate panel is adjustable in the front-rear direction of the housing, and an assembly error adjusting unit that connects the other of the front panel or the back panel and the intermediate panel;
A housing comprising: The assembly error adjusting portion has a first fixing portion fixed to one of the front panel and the rear panel, and a first opening through which a screw member can be inserted, and can be fixed to the intermediate panel. A second fixing part,
The intermediate panel has a second opening through which the screw member is inserted,
Either the first opening or the second opening is an elongated hole extending in the front-rear direction of the housing, and the intermediate panel and the intermediate panel by the screw member that passes through the first opening and the second opening. The casing according to claim 1, wherein the assembly error adjusting unit is fixed. On the main frame, a cooling mechanism having a heat pipe is placed in the vicinity of the back panel,
The housing according to claim 1, wherein a mounting position of the connector on the back panel is set above the cooling mechanism. A method for assembling a housing according to any one of claims 1 to 3,
A step of temporarily assembling the front panel and the back panel on the main frame, with an assembly reference jig defining a relative distance between the front panel and the back panel attached thereto;
Fixing the front panel and the back panel to the main frame in a state where one surface of the main frame and the back panel are vertical;
Fixing the intermediate panel to either the front panel or the back panel;
Adjusting and fixing the mounting position of the intermediate panel in the assembly error adjustment unit, and fixing either the front panel or the back panel and the intermediate panel;
A method for assembling the casing, comprising:

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