JP2007126727A - Contamination-preventing device for vacuum deposition - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten a working hour for cleaning a vapor deposition chamber, and to show a sufficient cleaning effect. <P>SOLUTION: This contamination preventing device is placed in a vapor deposition chamber 1 for accommodating a substrate on which a vapor deposition material vaporized from an evaporation source is vapor-deposited, and comprises: a paying-out section 13 for paying out a contamination-preventing sheet 15 in a roll form; a deposition surface 16 made of the paid-off contamination preventing sheet 15; and a sheet-winding section 14 for winding the waste contamination preventing sheet 15 on which a vapor deposition material has deposited on the deposition surface 16, into a roll form. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  In the vapor deposition chamber of a vacuum vapor deposition facility in which a vapor deposition material such as organic EL is heated and vaporized to deposit on a substrate or the like, an extra vapor deposition material directed in a direction other than a member to be deposited (substrate or the like) is attached to the interior wall surface. The present invention relates to a deposition apparatus for vacuum deposition for cleaning an adhesion preventing member that prevents adhesion to a jig or the like to prevent contamination due to re-vaporization or peeling.

  Conventionally, in a vacuum deposition chamber (deposition chamber), excess deposition material adhering to a wall surface or jig other than the substrate is separated into particles (also referred to as dust or contamination) that float in the deposition chamber. Careful cleaning of the film is necessary because it may cause an obstacle to the film and reduce the degree of vacuum. In order to perform this cleaning quickly, conventionally, it has been widely practiced to arrange a deposition plate in the deposition chamber and replace the deposition plate after each of a plurality of deposition processes.

As another deposition apparatus, for example, the one proposed in Patent Document 1 has a plate-shaped deposition shield for adhering excess deposition material around a substrate disposed in the upper center of the deposition chamber. By heating the deposition shield with a heating wire in the state where the substrate is not disposed for each one or a plurality of vapor deposition processes, excess vapor deposition material is vaporized and cleaned, and is collected by suction with a vacuum pump. . In addition, the surface of the deposition shield is heated by irradiating a laser beam in the vapor deposition chamber, and the adhering excessive vapor deposition material is vaporized and cleaned.
JP 2003-313654 A

  However, in the case of using a vapor deposition material that easily peels off from the adhesion surface, such as organic EL, in the case of replacing the previous deposition plate, if the thickness of the adhered material exceeds the limit, peeling occurs and particles are generated, resulting in long-term operation. In this case, there is a possibility that the particles may cause trouble, and it is necessary to frequently replace the adhesion prevention plate. This replacement of the deposition plate takes time, and many deposition plates must be prepared, leading to a decrease in time efficiency of the entire vapor deposition process and an increase in cost.

  Further, in the subsequent deposition apparatus, although it is sucked by the vacuum pump, there is a possibility that excess vapor deposition material re-vaporized from the entire members in the film forming chamber may be reattached to other members in the film forming chamber. The cleaning effect cannot be obtained.

  An object of the present invention is to solve the above-mentioned problems and to provide a deposition apparatus for vacuum vapor deposition that can shorten the working time for cleaning and obtain a sufficient cleaning effect.

  The invention described in claim 1 is a deposition apparatus for vacuum deposition which is disposed in a deposition chamber having a deposition target for depositing a deposition material vaporized from an evaporation source and has an attachment surface to which an excess deposition material is attached. The roll-out deposition sheet is fed out, the adhesion surface formed by the fed-out adhesion sheet, and the used adhesion sheet to which the vapor deposition material is adhered are wound up from the adhesion surface in a roll shape. A sheet winding unit is provided.

  The invention according to claim 2 is the heating member according to claim 1, wherein the deposited material is liquefied or vaporized by heating the used deposition preventive sheet wound in a roll shape on the sheet winding portion. And a heat recovery device having a capture member that captures the vapor deposition material released from the deposition sheet.

  The invention according to claim 3 is the deposit removing member for removing the vapor deposition material attached to the used deposition-preventing sheet before being wound in a roll shape on the sheet winding portion in the invention according to claim 1 or 2, A dustproof cover that covers at least the deposit removing member is provided.

  According to a fourth aspect of the present invention, there is provided a vacuum deposition method comprising: a deposition surface that is disposed in a deposition chamber that includes an evaporation source and a member to be deposited on which the deposition material vaporized from the evaporation source is deposited; An anti-adhesion device, wherein the forward path side of an endless anti-adhesive sheet movement path wound between guide rolls arranged at a predetermined interval is the adhering surface and the return path side is a recovery surface, Provided on the collection surface side are a sheet drive roll that circulates the deposition sheet, a deposit removal member that removes the vapor deposition material adhering to the surface of the deposition sheet, and a dust cover that covers at least the deposit removal member. Is.

  According to the first aspect of the present invention, a new deposition sheet is fed from the sheet feeding portion to the adhesion surface for each single or plural deposition processes, and the used surface of the adhesion surface to which excess vapor deposition material is adhered is used. By simply winding the adherent sheet around the sheet take-up portion, it is possible to remove the excessive vapor deposition from the adhesion surface and perform cleaning in a short time, and to obtain a sufficient cleaning effect.

  According to the second aspect of the present invention, the used deposition preventing sheet wound up in a roll shape is heated by the heat recovery device, and the adhering surplus vapor deposition material is vaporized or liquefied and captured, thereby being re-vaporized. And contamination due to generation of particles can be prevented. In addition, since the heat recovery device vaporizes or liquefies only from the roll-shaped deposition sheet, it is possible to capture surplus vapor deposition material easily and efficiently compared to heating the entire vapor deposition chamber as in the past. Further, reattachment to members in the vapor deposition chamber can be prevented.

  According to the invention of claim 3, the deposit removal member removes the excess vapor deposition material adhering to the surface of the deposition sheet and collects the vapor deposition material, thereby causing contamination due to re-vaporization of the surplus vapor deposition material. Can be prevented. If necessary, the trapped vapor deposition material can be reused.

  According to the invention described in claim 4, an endless dustproof sheet is used, and the excess vapor deposition material adhering to the used deposition-proof sheet is removed and adhered on the collection surface side by the deposit removing member in the dustproof cover. Since it is circulated and moved to the surface side, a sufficient cleaning effect can be obtained in a short time and a long time operation can be accommodated.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Embodiment 1]
As shown in FIG. 1, in a vapor deposition chamber 1 that has a suction port 1a connected to a vacuum pump (not shown) and can be kept in a vacuum state, vaporization is performed by heating and evaporating a vapor deposition material by a heating means at the bottom. A source 2 (or a discharge port connected to the evaporation source 2) is arranged, and a substrate holder 4 for holding a substrate (deposition member) 3 is provided on the upper portion. Further, the deposition chamber 1 is provided with an opening 6 that can be opened and closed by an opening / closing device 5 having a vacuum seal structure in order to take in and out the substrate 3. Although not shown, a vapor deposition mask is disposed on the vapor deposition surface side of the substrate 3, and a film thickness sensor, a shutter device, and the like are disposed in the vicinity of the substrate 3.

  Further, in the vapor deposition chamber 1, an adhesion surface that is formed in an appropriate shape in consideration of the radiation heat to the substrate 3 and the vapor deposition mask, the position with respect to the film thickness sensor, and the like and adheres an excessive vapor deposition material in a direction other than the substrate 3. A plurality of deposition preventive devices 11 having 16 are respectively installed at appropriate positions. For example, as shown in FIG. 2, a pair of left and right deposition-preventing devices 11, 11 inclining from the bottom to the top inward, and a pair of front and rear deposition-preventing devices 11 arranged in front and rear of the deposition preventing device 11. , 11 in total, and four of the anti-adhesion devices 11 have the same structure. Of course, it is not limited to the shape, arrangement, and inclination posture shown in FIG. 2, for example, all of the deposition apparatus are placed in an upright posture so as to surround the substrate 3 and the discharge port of the evaporation source 2 along the four sides of the substrate 3. You can also

  As shown in FIGS. 3 to 5, the deposition preventing device 11 is provided on a rectangular frame-like support frame 12 fixed to the side wall 1 b of the vapor deposition chamber 1 via attachment legs 12 a, and on the left and right sides of the support frame 12. A sheet take-up section 13 provided on the other side and a sheet take-up section 14 provided on the other side. The front surface of the landing sheet 15 is configured as an attachment surface 16 to which an excessive vapor deposition material is attached.

  For example, a metal sheet such as aluminum or a resin sheet such as polytetrafluoroethylene resin is used as the deposition preventing sheet 15, and a sheet that generates very little outgas in a vacuum is used. Then, as shown in FIG. 5, one end of the adhesion-preventing sheet 15 is wound around a feeding shaft cylinder 15a, and the other end is used in a roll set connected to the winding shaft cylinder 15b.

  In the sheet feeding portion 13, a feeding shaft 22, into which a shaft cylinder 15 a for feeding the adhesion-preventing sheet 15 is detachable, is rotatable between holding arms 21, 21 that are respectively mounted on the back surface of the support frame 12. And detachable. Further, a delivery drive shaft 23 penetrating through the insertion hole of the bottom wall 1c of the deposition chamber 1 is connected to the lower end portion of the delivery shaft 22 on the same axis via a universal joint 23a. A provided feeding motor 24 with a reduction gear is connected to the feeding drive shaft 23. Further, the idle-type guide roll 25 is supported by a pair of upper and lower roll brackets 25 a protruding from the support frame 12.

  The sheet take-up unit 14 has a take-up shaft 32 in which a shaft 15b for taking up the anti-adhesion sheet 15 can be freely fitted and removed between holding arms 31 and 31 mounted on the back surface of the support frame 12 in the vertical position. Is rotatably and removable. Further, a winding drive shaft 33 penetrating through the insertion hole of the bottom wall 1c of the vapor deposition chamber 1 is connected to the lower end of the winding shaft 32 on the same axis via a universal joint 33a. A take-up motor 34 with a speed reducer disposed on the outside of the vapor deposition chamber 1 is connected to 33. Further, the idle-type guide roll 35 is supported by a pair of upper and lower roll brackets 35 a protruding from the support frame 12.

  In addition, in order to prevent the excess vapor deposition material from adhering to the feeding side and scattering due to peeling on the winding side, an adhesion cover 26, 26 may be provided to cover the sheet feeding portion 13 and the sheet winding portion 14, respectively.

  When using each of the above-described anti-adhesion devices 11, the shaft cylinders 15a and 15b of the roll set of the anti-adhesion sheet 15 are externally fitted and attached to the feeding shaft 22 and the take-up shaft 32, respectively. The adhesion sheet 15 between 15b is hung around the outer sides of the left and right guide rolls 25 and 35, and the adhering surface 16 is developed on the front side, while the feeding shaft 22 and the winding shaft 32 are mounted on the holding arms 21 and 31, respectively. Then, the adhesion preventing sheet 15 on the adhesion surface 16 is tensioned.

  Then, a predetermined number of vapor deposition processes are performed, and cleaning is performed every time the thickness of the surplus vapor deposition material attached to the adhesion surface 16 of the deposition preventing sheet 15 becomes 1 to 2 μm. That is, the winding motor 34 is driven to drive the feeding motor 24 so that the new deposition sheet 15 is fed from the feeding cylinder 15b of the sheet feeding portion 13 to the adhesion surface 16 and the adhesion surface 16 is used. The anti-adhesion sheet 15 is wound around the winding shaft cylinder 15 b of the sheet winding portion 14. As a result, the surrounding adhesion surface 16 from the evaporation source 2 to the substrate 3 is covered with the new deposition sheet 15 to complete the cleaning. Here, the thickness of the surplus vapor deposition material attached to the deposition sheet 15 is set to 1 to 2 μm. If the thickness exceeds 2 μm, the surplus vapor deposition material adhering at the time of winding is peeled off and scattered. This is because the material cost of the deposition preventing sheet 15 and the recycling cost of the deposition preventing sheet 15 are increased when the thickness is less than 1 μm.

According to the first embodiment, the used adhesion preventing sheet 15 to which the excessive vapor deposition material has adhered is wound on the adhesion surface 16 and the new adhesion sheet 15 is fed to the adhesion surface 16 even in a long-time operation. Thus, cleaning can be completed in a short time. Further, by winding the used anti-adhesion sheet 15 by the sheet winding unit 14, it is possible to collect and store the adhering surplus evaporation material without scattering. Furthermore, even after using all the anti-adhesion sheets 15 wound in a roll shape, it is only necessary to replace the roll set of the anti-adhesion sheets 15, and the exchange can be performed in a short time.
[Embodiment 2]
The deposition preventing apparatus 41 is a heating member 42a that is a heating member that heats the used deposition preventing sheet wound in a roll shape on the sheet winding unit 14 and vaporizes or liquefies the excess deposited vapor deposition material; A heat recovery device 42 having upper and lower capturing members 42b and 42c for capturing excess vapor deposition material released from the roll-shaped used deposition preventing sheet 15 is provided. The same members as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  The heater 42a of the heat recovery device 42 is made of, for example, a heating wire, and is provided in the winding shaft 32 of the sheet winding portion 14, and heats the used adhesion-preventing sheet 15 wound around the shaft tube 15b. Then, the deposited deposition material is vaporized or liquefied. The upper capturing member 42b is formed in a dish shape, and is disposed on the upper part of the take-up shaft 32 to attach and capture the vaporized vapor deposition material. The lower capturing member 42 c is formed in a dish shape and is disposed so as to capture the vapor deposition material that flows down to the lower portion of the winding shaft 32. The entire sheet winding unit 14 can be covered with a dustproof cover.

  As a result, during a long period of operation, when the used deposition preventing sheet 15 for a predetermined number of times or a predetermined distance is wound on the winding shaft cylinder 15b, the heater 42a of the heat recovery device 42 is heated. The used deposition preventive sheet 15 that has been wound by power feeding is heated to vaporize or liquefy the deposited vapor deposition material, and is captured by the upper and lower capturing members 42b and 42c, thereby preventing contamination due to re-vaporization or peeling. be able to. Moreover, the surplus vapor deposition material which was not used in the vapor deposition chamber 1 can be collect | recovered effectively, and reuse of vapor deposition material is attained. Here, as compared with the conventional case where the entire vapor deposition chamber or the deposition plate is heated, the generation site of the vapor deposition material that is re-vaporized and liquefied is limited to the roll portion of the sheet winding unit 14. The upper and lower capturing members 42b and 42c can efficiently capture and collect excess vapor deposition material.

  Further, after the vapor deposition material attached by the heat recovery device 42 is recovered by the sheet winding unit 14, this time, the feeding motor 24 of the sheet feeding unit 13 is driven in reverse to wind the deposition sheet 15 around the feeding shaft 22. In the sheet winding unit 14, the winding motor 34 is driven reversely to feed out the deposition sheet 15, and the deposition sheet 15 wound up in a roll shape by the sheet winding unit 14 is again transferred to the sheet feeding unit 13. It is also possible to form the adhering surface 16 by moving it and reuse the recovered adhesion sheet 15.

  Although the upper capturing member 42b is formed in a dish shape and fixedly arranged, as shown in FIG. 7, a capturing device 44 that can replace a plurality of dish-shaped upper capturing members 43 may be provided. This capturing device 44 is provided with a rotating plate 44b through a rotating shaft 44a that penetrates the insertion hole in the top wall of the vapor deposition chamber 1, and a plurality of upper capturing members 43 are attached to the rotating plate 44b in a replaceable manner. The cover body 44c that covers the rotating plate 44b is formed with a capture opening 44d that exposes one upper capture member 43. Therefore, when the upper capture member 43 exposed to the capture opening 44d captures a surplus vapor deposition material by a predetermined amount or more, the revolving device 44e provided outside the vapor deposition chamber 1 is driven to rotate the rotary plate 44b by a predetermined angle, The used upper capturing member 43 is accommodated in the cover body 44c, and a new upper capturing member 43 is exposed in the vapor deposition chamber 1 from the capturing opening 44d. Thereby, it can respond to long-time operation. Of course, the lower capturing member 42c can be similarly configured.

[Embodiment 3]
As shown in FIG. 8, the deposition preventing apparatus 51 is a scraping plate (sediment removing member) that scrapes off excess vapor deposition material adhered to the deposition sheet 15 at the entrance of the deposition sheet 15. ) 52 and a dust-proof cover 53 are provided. The same members as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  In the sheet winding unit 14, a turning roll 54 that guides the deposition preventing sheet 15 is disposed between the guide roll 35 and the winding shaft 32 via a roll bracket 54 a, and the turning roll 54 and the winding shaft 32 are A scraping plate 52 that scrapes off the excessive vapor deposition material by pressing the tip portion against the surface of the deposition sheet 15 so as to bend the deposition sheet 15 is disposed via an attachment member 52a disposed in the vertical position. Has been. The sheet winding unit 14 is detachably provided with a dustproof cover 53 in which a sheet introduction port 53 a is formed on the upstream side of the turning roll 54. The dust cover 53 may cover only the periphery of the scraping plate 52.

  In the dust cover 53, an electrostatic dust collector 55 that collects surplus vapor deposition material such as particles peeled off from the deposition sheet 15 is disposed. The surplus vapor deposition material collected by the dust collector 55 may be processed and reused.

  According to the third embodiment, when the deposition sheet 15 is moved and the deposition sheet 15 on the adhesion surface 16 is replaced every single or a plurality of deposition processes, the scraping plate 52 is used in the dust protection cover 53. Since the vapor deposition material adhering to the deposition sheet 15 is scraped off and collected by the electrostatic dust collector 55, contamination of the deposition chamber due to re-vaporization and peeling from the spent deposition sheet 15 wound up in a roll shape is prevented. In addition, it is possible to efficiently perform the vapor deposition operation by reusing the collected vapor deposition material.

Further, in the sheet winding unit 14, after the excess vapor deposition material adhering to the deposition sheet 15 is scraped off by the scraping plate 52 and the adhering vapor deposition material is collected, the feeding motor 24 of the sheet feeding unit 13 is rotated in reverse. The sheet 15 is driven to wind the anti-corrosion sheet 15 around the feeding shaft 22, and the sheet take-up unit 14 follows this to reversely drive the take-up motor 34 to feed the anti-adhesion sheet 15 and roll it around the sheet take-up part 14. The wound adhesion preventing sheet 15 can be moved again to the sheet feeding portion 13 to form the adhesion surface 16 and the collected adhesion preventing sheet 15 can be reused.
[Embodiment 4]
In the deposition apparatus 11 according to the first to third embodiments, the roll-shaped deposition sheet 15 is used. However, the deposition apparatus 61 according to the fourth embodiment circulates and moves the endless deposition sheet 62. This will be described with reference to FIG. The same members as those in the third embodiment are denoted by the same reference numerals and description thereof is omitted.

  In this adhesion preventing device 61, an endless adhesion preventing sheet 62 is wound between the left and right guide rolls 25, 35 provided on the support frame 12, and the adhesion surface 16 is disposed on the front side between the left and right guide rolls 25, 35. And a collection surface 70 is formed on the back side.

  On the collection surface 70 side, turning rolls 54 and 63 for guiding the anti-adhesion sheet 62 via roll brackets 54a and 63a are arranged on the left and right sides, respectively, and a scraping plate (attachment) is placed between the turning rolls 54 and 63. A sheet circulation drive unit 64 having a removal member 52 is provided. The sheet circulation drive unit 64 includes a sheet drive roll 65 that is rotationally driven by a circulation motor (not shown), a pressure roll 66 that is in contact with the sheet drive roll 65 with the deposition sheet 62 interposed therebetween, and an inlet of the sheet drive roll 65. A scraping plate 52 disposed on the side is provided, and the pressure-resistant roll 66 sandwiches the anti-adhesion sheet 62 between the sheet driving roll 65 and transmits the driving force. Further, the dust cover 67 is disposed so as to cover the entire collection surface 70, and an electrostatic dust collector 55 is provided in the dust cover 67. The dust cover 67 may cover only the periphery of the scraping plate 52.

  In the above configuration, the driving roll 65 is driven to rotate and the deposition sheet 62 is circulated and moved in the direction of the arrow between the adhesion surface 16 and the collection surface 70 every single or plural deposition processes. In the dust cover 67, the vapor deposition material adhering to the surface of the deposition preventing sheet 62 is scraped off by the scraping plate 52 of the sheet circulation driving unit 64 and collected by the electrostatic dust collector 55.

  Therefore, the deposition sheet 62 is circulated and moved between the adhesion surface 16 and the collection surface 70, and the sheet circulation drive unit 64 scrapes off the excessive vapor deposition material adhered to the surface of the deposition sheet 62 by the scraping plate 52. Then, the anti-adhesion sheet 62 of this clean portion is circulated and moved to the adhesion surface 16. As a result, the time required for cleaning can be shortened, and long-time operation can be accommodated. Moreover, the length of the adhesion-preventing sheet 62 to be used can be reduced and the material cost can be reduced. Further, excess vapor deposition material collected by the electrostatic dust collector 55 or the like may be reused.

  In the third and fourth embodiments, the scraper-type scraping plate 52 is used as the deposit removing member, but a brush-type scraper 52 may be used.

It is a center longitudinal cross-sectional view of the vapor deposition chamber which shows Embodiment 1 of the deposition apparatus for vacuum vapor deposition which concerns on this invention. It is a schematic perspective view which shows arrangement | positioning of the said adhesion prevention apparatus. It is a back side perspective view showing the adhesion prevention device. It is a top view of the deposition preventing apparatus. It is a disassembled perspective view of the deposition preventing apparatus. It is a center longitudinal cross-sectional view of the vapor deposition chamber which shows Embodiment 2 of the deposition apparatus for vacuum vapor deposition which concerns on this invention. It is side surface sectional drawing which shows the upper capture apparatus of the said Embodiment 2. FIG. Embodiment 3 of the deposition apparatus for vacuum vapor deposition which concerns on this invention is shown, and it is a notch top view of the deposition apparatus. Embodiment 4 of the deposition apparatus for vacuum evaporation which concerns on this invention is shown, and it is a notch top view of the deposition apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Deposition chamber 2 Evaporation source 3 Substrate 11,41,51,61 Coating apparatus 15,62 Coating sheet 12 Support frame 13 Sheet feeding part 14 Sheet winding part 15a Shaft cylinder 15b Rolling axis cylinder 16 Adhering surface 22 Feeding shaft 24 Feeding motor 25 Guide roll 32 Winding shaft 34 Winding motor 35 Guide roll 42 Heat recovery device 42b Upper capturing member 42c Lower capturing member 44 Capturing device 52 Scraping plate 53 Dust-proof cover 54 Turning roller 55 Electrostatic Type dust collector 63 diverting roll 64 sheet circulation driving section 65 sheet driving roll 66 pressure roll 67 dustproof cover 70 collection surface

Claims (4)

A deposition apparatus for vacuum deposition, which is disposed in a deposition chamber having a deposition target for depositing a deposition material vaporized from an evaporation source, and deposits an excess deposition material,
A sheet feeding portion for feeding out a roll-shaped deposition preventing sheet, an adhesion surface formed by the fed deposition-proof sheet, and a sheet winding for winding the used deposition-resistant sheet to which the vapor deposition material is adhered on the adhesion surface in a roll shape A deposition apparatus for vacuum deposition with a take-up section. A heating member that liquefies or vaporizes the deposited material adhered to the sheet winding unit by heating the used deposition sheet wound in a roll, and a capturing member that captures the deposited material released from the deposition sheet The deposition apparatus for vacuum deposition according to claim 1, further comprising: a heat recovery apparatus having: The deposit take-off member for removing the vapor deposition material adhering to the used adhesion-preventing sheet before being wound in a roll shape and a dust-proof cover that covers at least the deposit remover are provided in the sheet winding unit. 2. The deposition apparatus for vacuum deposition according to 2. A deposition apparatus for vacuum deposition, which is disposed in a deposition chamber including a deposition target member for depositing a deposition material vaporized from an evaporation source, and has an attachment surface to which an excess deposition material is attached;
The forward path side of the endless adhesion-sheet moving path wound between guide rolls arranged at a predetermined interval is the adhering surface and the return path side is a recovery surface,
Provided on the recovery surface side are a sheet driving roll for circulating and moving the deposition sheet, a deposit removing member that removes the vapor deposition material adhering to the surface of the deposition sheet, and a dust cover that covers at least the deposit removing member. Vacuum deposition protection equipment.

Images