JP2007121389A - Color filter for liquid crystal display device and manufacturing method therefor, and liquid crystal display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color filter for a liquid crystal display device, the color filter having protrusions Mv and enhanced transmittance and capable of being manufactured without increasing manufacturing steps even when the protrusions have heights different from each other, to provide a manufacturing method therefor and a liquid crystal display device. <P>SOLUTION: A transparent layer 46 comprises the protrusions and a flat part 45 which are formed by subjecting a transparent photosensitive resin layer provided on color pixels 42 to exposure treatment via a density distribution mask PM1 and development treatment and parts of a transparent conductive film 43 above the protrusions are removed by photo etching applied to a transparent conductive film provided on the entire upper surface of the transparent layer. The transparent layer has ≥90% transmittance in the all range of 400 to 700 nm wavelength. The protrusions have 0.01 to 5.0 μm heights. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a color filter for a liquid crystal display device, and more particularly to a color filter for a liquid crystal display device having improved transmittance in a color filter having alignment control protrusions formed thereon and a method for manufacturing the same.

FIG. 4 is a plan view schematically showing an example of a color filter used in the liquid crystal display device. FIG. 5 is a cross-sectional view taken along the line XX ′ of the color filter shown in FIG.
As shown in FIGS. 4 and 5, the color filter (4) used in the liquid crystal display device has a black matrix (41), a colored pixel (42), and a transparent conductive film (43) on a glass substrate (40). Are formed sequentially.
4 and 5 schematically show a color filter, and 12 colored pixels (42) are represented. In an actual color filter, for example, several hundreds are displayed on a 17-inch diagonal screen. A large number of colored pixels of about μm are arranged.

As a method for manufacturing a color filter having the above structure used in many liquid crystal display devices, a black matrix is first formed on a glass substrate to form a black matrix substrate, and then the black matrix on the black matrix substrate is used. A method is widely used in which a colored pixel is formed by aligning with the pattern, and a transparent conductive film is aligned and formed.
The black matrix (41) is a matrix having light shielding properties, the colored pixels (42) have, for example, red, green, and blue filter functions, and the transparent conductive film (43) is transparent. Provided as a simple electrode.

The black matrix (41) is composed of a matrix portion (41A) between the colored pixels (42) and a frame portion (41B) surrounding the peripheral portion of the region (display portion) where the colored pixels (42) are formed. Yes.
The black matrix determines the position of the colored pixels of the color filter, makes the size uniform, and shields unwanted light when used in a display device, making the image of the display device uniform and uniform. In addition, it has a function of making an image with improved contrast.

For the production of this black matrix substrate, a metal or a metal compound such as chromium (Cr) or chromium oxide (CrO _x ) as a black matrix material is formed into a thin film on a glass substrate (40). An etching resist pattern is formed on the formed thin film using, for example, a positive photoresist, and then an exposed portion of the formed metal thin film is etched and an etching resist pattern is stripped, and Cr, CrO _A method has been adopted in which a black matrix (41) made of a metal thin film such as _X is formed.
Alternatively, the black matrix (41) is formed on the glass substrate (40) by photolithography using a black photosensitive resin for forming a black matrix.

In addition, the colored pixels (42) are formed by providing a coating film on the black matrix substrate using, for example, a negative photoresist in which a pigment or other pigment is dispersed, and exposing and developing the coating film. A method of forming colored pixels is used.
The transparent conductive film (43) is formed on the black matrix substrate on which the colored pixels are formed by, for example, forming a transparent conductive film by sputtering using ITO (Indium Tin Oxide). .

The color filter (4) shown in FIGS. 4 and 5 has a basic function as a color filter used in a liquid crystal display device. By incorporating such color filters, the liquid crystal display device realizes full color display, and its application range has expanded dramatically, creating many products using liquid crystal display devices such as liquid crystal color TVs and notebook PCs. It was done.
With the development and practical use of various liquid crystal display devices, the following various functions have been added to the color filters used in the liquid crystal display devices in addition to the above basic functions.

For example, orientation division function. In conventional liquid crystal display devices, in order to uniformly align the liquid crystal molecules, polyimide is applied in advance on the transparent conductive film provided on both substrates sandwiching the liquid crystal, and the surface is uniformly rubbed. Process it.
However, in TN type liquid crystal, it is difficult in principle to obtain a wide viewing angle, the contrast is lowered, and the display quality is deteriorated. There was a problem that the viewing angle with good contrast was narrow.

  As a technique for solving such a problem, an alignment-divided vertical alignment type liquid crystal display device having a wide viewing angle by controlling the alignment direction of liquid crystal molecules in one pixel to be a plurality of directions instead of one direction ( MVA (Multi-domain Vertical Alignment) -LCD has been developed.

  FIG. 7 is an explanatory view schematically showing a cross section of such an MVA-LCD. As shown in FIG. 7, the MVA-LCD (80) includes a TFT substrate (20) provided with alignment control protrusions (22a) and (22b) via liquid crystal molecules (21), and an alignment control protrusion (23). However, the alignment control protrusions (22a) and (22b) and the alignment control protrusion (23) are provided at different positions in one pixel.

  As shown by the white arrow in FIG. 7, in the state at the time of voltage application, the liquid crystal molecules between the alignment control protrusions (22a) to the alignment control protrusions (23) in the pixel are inclined obliquely to the left in the drawing. The liquid crystal molecules between the control protrusion (23) and the alignment control protrusion (22b) are inclined obliquely to the right. That is, the alignment of the liquid crystal molecules is controlled by providing protrusions instead of the rubbing treatment.

FIGS. 8A and 8B are an enlarged plan view and a cross-sectional view illustrating an example of a color filter used in the MVA-LCD. In this example, the alignment control protrusion (83) is bent 90 ° within one pixel, and the inclination directions of the liquid crystal molecules are four directions within one pixel.
FIGS. 9A and 9B are a plan view and a cross-sectional view showing an enlarged view of one pixel of another example. As shown in FIGS. 9A and 9B, another example is a color filter (9) in which an orientation control protrusion (93) having a circular planar shape is formed.
In a liquid crystal display device using such a color filter, the tilt directions of liquid crystal molecules are multidirectional within one pixel.

Moreover, as a function added accompanying the said basic function, for example, a spacer function. In a conventional liquid crystal display device, transparent spherical particles (beads) of glass or synthetic resin called spacers are dispersed to form a gap between substrates.
Since these spacers are transparent particles, if a spacer is included with the liquid crystal in the pixel, light will leak through the spacer during black display, and the substrate in which the liquid crystal material is enclosed Due to the presence of the spacers between them, the alignment of the liquid crystal molecules in the vicinity of the spacers is disturbed, and light leakage occurs at this part, and the contrast is lowered and the display quality is adversely affected.

As a technique for solving such a problem, a method of forming a photo spacer (protrusion) having a spacer function at a position of a black matrix between pixels by using a photosensitive resin and by a photolithography method has been developed.
FIG. 6 is a partial cross-sectional view of such a color filter for a liquid crystal display device. As shown in FIG. 6, in the color filter (7) for the liquid crystal display device, a black matrix (41), a colored pixel (42), and a transparent conductive film (43) are sequentially formed on a glass substrate (40). A photospacer (44) as a protrusion having a spacer function is formed on the transparent conductive film (43) above the black matrix (41). In the liquid crystal display device using such a color filter (7) for the liquid crystal display device, the photo spacer (44) is formed at a position avoiding the inside of the pixel, and thus the contrast is improved.

The cross-sectional shape of the alignment control protrusion (83) having a planar shape in a stripe shape along the line AA is, for example, a triangle or a kamaboko shape, its width (W2) is about 9 to 12 μm, and its height (H2) is It is about 0.8 to 1.4 μm. In addition, the width (W3) and height (H3) of the orientation control protrusion (93) having a circular planar shape are substantially the same as those of the stripe-like orientation control protrusion (83). These are formed using a transparent photosensitive resin.
In addition, the height of the photo spacer (44) is about 2 μm to 5 μm which is a gap between substrates, and the shape thereof is a rectangular shape with rounded corners with a horizontal section of diagonal length (12 × 12 μm) to (40 × 40 μm), Lozenges are often used.

As functions added to the color filter (4) shown in FIG. 4, in addition to the orientation dividing function and spacer function, a high reliability function, a combined transmission / reflection function, a spectral characteristic adjustment function, an optical path difference adjustment function, For example, light scattering function. Among these functions, one function or a plurality of functions are added to the color filter (4) shown in FIG. 4 based on the use and specification of the color filter.
Therefore, for example, when manufacturing a color filter having a specification in which an orientation dividing function and a spacer function are added to the color filter (4) shown in FIG. 4, after producing the color filter (4) shown in FIG. Then, the alignment control protrusion (93) shown in FIG. 9 is formed, and then the photo spacer (44) shown in FIG. 6 is formed.
That is, two steps of forming the alignment control protrusion and forming the photospacer are added to manufacture a color filter having a desired specification.

  However, in the color filter provided with the alignment control protrusion (83) shown in FIG. 8 or the alignment control protrusion (93) shown in FIG. 9, the alignment control protrusion is provided in the pixel. The light transmittance decreases according to the total area of the protrusions. That is, in the liquid crystal display device using the color filter provided with the alignment control protrusion, the luminance (transmittance) is reduced accordingly.

For example, a novolac photosensitive resin, which is a positive photosensitive resin, is widely used for forming the alignment control protrusion, but the alignment control protrusion formed using the novolac photosensitive resin is colored. This coloring is about 70% at a thickness of 1 μm of the photocured resin layer in terms of transmittance.
Therefore, in order to further improve the luminance (transmittance) of the liquid crystal display device, the transmittance of the alignment control protrusion is required to be as high as possible.

Japanese Patent Application Laid-Open No. 2000-267079 discloses a technique of providing an alignment control protrusion higher than the alignment control protrusion provided on the red and green colored pixels as the alignment control protrusion provided on the blue colored pixel. ing.
This is because the alignment control protrusion provided on the blue colored pixel is made higher than the others in order to reduce the coloration at the time of white display due to the difference in transmittance of each color pixel due to the birefringence wavelength dispersion of the liquid crystal material. This compensates for a decrease in transmittance in blue colored pixels.
When two kinds of alignment control protrusions having different heights are provided on the color filter, the process of forming the alignment control protrusions is two steps.
JP 2000-267079 A JP 2005-3854 A Japanese Patent Laid-Open No. 11-344700 JP 2001-512266 A JP 2002-236371 A

The present invention has been made in order to solve the above-described problem. In a color filter for a liquid crystal display device in which an alignment control protrusion is provided in a pixel, the transmittance is improved, and the color filter has a high level on a colored pixel. An object of the present invention is to provide a color filter for a liquid crystal display device that can be manufactured without increasing the number of steps for forming alignment control protrusions, even if the color filter has different alignment control protrusions. .
It is another object of the present invention to provide a method for producing a color filter for a liquid crystal display device and a liquid crystal display device having improved luminance (transmittance) using the color filter for a liquid crystal display device.

The present invention provides a color filter for a liquid crystal display device in which a black matrix, a colored pixel, a transparent layer, and a transparent conductive film are sequentially formed on a transparent substrate.
1) The transparent layer is composed of projections and flat portions formed by exposure and development processing through a density distribution mask to a transparent photosensitive resin layer provided on a colored pixel,
2) The color filter for a liquid crystal display device, wherein the transparent conductive film has a portion on the protrusion removed by photoetching the transparent conductive film provided on the entire upper surface of the transparent layer.

  The present invention also provides the color filter for a liquid crystal display device according to the above invention, wherein the transmittance of the transparent layer is 90% or more in the entire wavelength range of 400 nm to 700 nm. is there.

  The present invention also provides the color filter for a liquid crystal display device according to the above invention, wherein the height of the protrusion is 0.10 μm to 5.0 μm.

  Further, the present invention is the color filter for a liquid crystal display device according to the above invention, wherein the height of the protrusion is different for each protrusion on the colored pixel of each color.

  The present invention is also the color filter for a liquid crystal display device according to the above invention, characterized in that the width of the protrusion is different for each protrusion on the colored pixel of each color.

According to the present invention, in the color filter for a liquid crystal display device according to the present invention, when there are a plurality of the protrusions in the same colored pixel, the plurality of protrusions are alignment control protrusions and photospacers. A color filter for a liquid crystal display device, wherein the heights of the protrusions are different.

  According to the present invention, in the color filter for a liquid crystal display device according to the present invention, when there are a plurality of the protrusions on the same colored pixel, the plurality of protrusions are alignment control protrusions and photospacers, A color filter for a liquid crystal display device, wherein the widths of the protrusions are different.

Further, the present invention relates to a method for producing a color filter for a liquid crystal display device in which a black matrix, a colored pixel, a transparent layer, and a transparent conductive film are sequentially formed on a transparent substrate.
1) A transparent photosensitive resin layer for forming a transparent layer is formed on the transparent substrate on which the black matrix and the colored pixels are formed.
2) The transparent photosensitive resin layer is subjected to exposure and development processing through a density distribution mask in which a pattern corresponding to the protrusions and flat portions constituting the transparent layer is formed to form a transparent layer,
3) A transparent conductive film and a photosensitive resin layer for forming an etching resist are sequentially formed on the entire upper surface of the transparent layer,
4) The photosensitive resin layer on the protrusion was removed by exposing and developing through a photomask on which a pattern for removing the photosensitive resin layer on the protrusion was formed, and the transparent conductive film on the protrusion was exposed. Forming an etching resist,
5) A method for producing a color filter for a liquid crystal display device, wherein the exposed transparent conductive film is removed by etching, and an etching resist is peeled off.

  Moreover, this invention is a liquid crystal display device using the color filter for liquid crystal display devices of any one of Claims 1-7.

  In the present invention, 1) the transparent layer is composed of protrusions and flat portions formed by exposure and development processing through a density distribution mask on the transparent photosensitive resin layer provided on the colored pixels, and 2) the transparent conductive film is The color filter for a liquid crystal display device, in which the portion on the protrusion is removed by photoetching on the transparent conductive film provided on the entire upper surface of the transparent layer, the protrusion is not colored, and its transmittance is improved. In addition, the color filter for a liquid crystal display device does not increase the number of steps for forming the protrusions.

  Moreover, since the transmittance | permeability of a transparent layer is 90% or more in the whole range of wavelength 400nm -700nm, this invention will improve the transmittance | permeability. In addition, since the height of the protrusion is 0.10 μm to 5.0 μm, the present invention is suitable as an alignment control protrusion.

  Further, according to the present invention, a plurality of protrusions can be easily formed by making the density distribution portion of the density distribution mask corresponding to the height or / and width of each protrusion. It is suitable as a color filter that compensates for the difference between the two.

  Further, according to the present invention, when a plurality of protrusions are provided on the same colored pixel, the plurality of protrusions are alignment control protrusions and photo spacers, and the height or / and the plurality of protrusions are different. Thus, the color filter can be formed simultaneously with the alignment control protrusion and the photo spacer.

Hereinafter, embodiments of the present invention will be described in detail.
FIG. 1 is a cross-sectional view of an embodiment of a color filter for a liquid crystal display device according to the present invention. As shown in FIG. 1, this color filter is obtained by adding an alignment division function as an accompanying function to the color filter shown in FIG. 4 having a basic function as a color filter used in a liquid crystal display device. .

A transparent layer (46) and a transparent conductive film are formed on a glass substrate (40) on which a black matrix (41), a red colored pixel (42R), a green colored pixel (42G), and a blue colored pixel (42B) are formed. (43) is formed.
The transparent layer (46) is composed of alignment control protrusions (Mv) and flat portions (45), and the transparent conductive film (43) is not formed on the alignment control protrusions (Mv). The orientation control protrusion (Mv) has a stripe shape or a circular shape shown in FIG. 8, and FIG. 1 shows a cross section thereof. In the present invention, the height of the alignment control protrusion (Mv) indicates the height (H4) from the upper surface of the colored pixel to the upper portion of the alignment control protrusion.

  The alignment control protrusion (Mv) and the flat part (45) constituting the transparent layer (46) are formed by exposure and development processing through a density distribution mask to the transparent photosensitive resin layer provided on the colored pixel. It is. Further, the transparent conductive film (43) has a portion on the alignment control protrusion removed by photoetching the transparent conductive film provided on the entire upper surface of the transparent layer (46). The transparent layer (46) is transparent without being colored.

In the present invention, the transmittance of the transparent layer is 90% or more over the entire wavelength range of 400 nm to 700 nm. As a result, the transmittance is improved as compared with the alignment control protrusion using the novolac photosensitive resin.
Examples of the material used for forming the transparent layer include acrylate resins and epoxy-acrylate resins.
The transmittance of the transparent layer formed using the above material is 95% or more in the entire range of wavelengths from 400 nm to 700 nm at a thickness of 5 μm, and is suitable for forming a transparent layer without coloration.

In the present invention, the height of the protrusion is 0.10 μm to 5.0 μm.
When the height of the protrusion is 0.10 μm or less, the effect of controlling the orientation is lost. Moreover, it is difficult to form a coating film having a thickness of 5.0 μm or more.

  10A to 10F are cross-sectional views illustrating an example of a method for manufacturing a color filter for a liquid crystal display device according to the present invention. FIG. 10 is an enlarged view of the vicinity of one pixel. In FIG. 10A, a transparent photosensitive resin layer (60) for forming a transparent layer (46) is provided on a glass substrate (40) on which a black matrix (41) and colored pixels (42) are formed. Represents a stage.

As shown in FIG. 10B, first, the transparent photosensitive resin layer (60) is provided with a concentration distribution mask (PM1) in which a pattern corresponding to the orientation control protrusion and the flat portion forming the transparent layer is formed. The exposure (L1) thus performed is performed to form a transparent layer (46). FIG. 10B shows a state in which the development processing has already been completed and the orientation control protrusion (Mv) and the flat portion (45) are formed.
The pattern corresponding to the alignment control protrusion on the density distribution mask (PM1) is the density distribution portion (NB), and the pattern corresponding to the flat portion is the halftone portion (HT).

Next, as shown in FIGS. 10C to 10D, a transparent conductive film (43) and a photosensitive resin layer (70) for forming an etching resist are sequentially formed on the entire upper surface of the transparent layer (46). Form.
Next, as shown in FIG. 10E, exposure (L2) is performed through a photomask (PM2) on which a pattern for removing the photosensitive resin layer on the alignment control protrusion is formed, thereby performing the alignment control protrusion (Mv). ) The photosensitive resin layer is removed, and an etching resist (70E) in which the transparent conductive film on the alignment control protrusion is exposed is formed. FIG. 10E shows a state in which the development process has already been completed and an etching resist (70E) has been formed.

  Next, as shown in FIG. 10F, the exposed portion of the transparent conductive film is removed by etching, and the etching resist (70E) is removed to obtain a color filter for a liquid crystal display device.

FIG. 11 is an explanatory diagram of an example of a density distribution mask used for forming the transparent layer (46) in the present invention. FIG. 11A is a cross-sectional view of the concentration distribution mask (PM1) shown in FIG. Reference numeral (NB) is a density distribution part which is a pattern corresponding to the formation of the alignment control protrusion (Mv) on the density distribution mask (PM1), and reference numeral (HT) is used to form the flat part (45). It is a halftone part which is a corresponding pattern.
FIG. 11B is an enlarged plan view showing the halftone part (HT), and FIG. 11C is an enlarged plan view showing the density distribution part (NB).

As shown in FIGS. 11B and 11C, dots of uniform size arranged in a checkered pattern are formed in the halftone portion (HT) of the density distribution mask (PM1). In the density distribution part (NB), dots that are arranged in a checkered pattern but are large and small are formed. These dots are made of a thin film that shields ultraviolet rays, for example, a chromium film.
FIG. 11D is a plan view showing a further enlarged portion of the halftone portion (HT) shown in FIG. 11B, and FIG. 11E is a cross-sectional view taken along line XX. It is.
As shown in FIGS. 11D and 11E, this halftone portion (HT) is a dot line-and-space composed of a dot line (L) that blocks light and a space (S) that transmits light. It is a pattern.

The density distribution mask (PM1) in the present invention is a photomask in which the line and space pattern of dots of the halftone portion (HT) on the photomask is less than the resolution of the system of the photolithography method to be used.
The system of the photolithography method refers to the entire process such as an optical system, a photomask, a photoresist, and a development process when forming a pattern, and the resolution of the pattern to be obtained is determined by the resolution of this system.

  FIG. 12 is an enlarged view of the cross section of the halftone portion (HT) shown in FIG. 11 (e), which is transmitted through the space (S) (transparent portion (opening portion)) of the halftone portion (HT). Is a schematic representation of the intensity distribution of the light on the photoresist. As shown in FIG. 12A, if the pitch (Pw) and the line width (Lw) of the dot line and space pattern are sufficiently large, the light transmitted through the opening forms an image on the photomask. . However, as shown in FIG. 12B, for example, when the line width (Lw) becomes narrower, the images cannot be separated by diffraction by light from adjacent openings. Eventually, the light transmitted through the opening is averaged into a uniform intensity distribution.

  That is, in the present invention, the line and space pattern of the halftone portion (HT) on the photomask is formed as a line and space image by setting the dot line and space pattern to be less than the resolution of the photolithography system. Instead of functioning as a pattern to be generated, it functions as a halftone portion having a uniform optical density.

The effective optical density as a halftone portion is expressed as a ratio of lines and spaces to a unit area. In addition, the line and space line (L) has a density that blocks light (for example, OD> 2.5 or more), the space (S) transmits light, and the density is substantially zero. Therefore, a halftone part having an effective optical density arbitrarily by adjusting the proportion of the line (
A semi-light-shielding portion) can be obtained with high accuracy.

In addition, the density distribution portion (NB) shown in FIG. 11 (c) has three sizes of dot sizes for the sake of explanation. Actually, however, the longitudinal sectional shape of the orientation control protrusion (Mv) is shown. The size is a multi-stage dot having fine steps or a continuous dot having no steps.
Under the condition that the halftone portion (HT) shown in FIG. 11B functions as a halftone portion having a uniform optical density, the density distribution portion (NB) is a longitudinal sectional shape of the alignment control protrusion (Mv). It functions as a density distribution portion having a continuous gradient of optical density corresponding to the formation of.

The density distribution mask used for forming the transparent layer (46) in the present invention is not limited to the above-mentioned dot line and space pattern. As for the halftone portion (HT) of the density distribution mask, for example, a chromium film that shields ultraviolet rays and is uniformly formed on a transparent substrate with a thickness corresponding to a desired optical density can be used. Alternatively, a metal oxide film that attenuates ultraviolet rays and is formed uniformly on the transparent substrate with a thickness corresponding to the desired optical density can be used.
However, with respect to the formation of the density distribution part (NB) of the density distribution mask, the method using the dot line and space pattern forms a density distribution part having a desired gradient optical density as compared with the above two methods. Easy to do.

FIG. 2 is a cross-sectional view illustrating an example of a color filter for a liquid crystal display device according to a fourth aspect. As shown in FIG. 2, this color filter has a transparent layer (46) and a transparent conductive film (43) on a glass substrate (40) on which a black matrix (41) and colored pixels (42R, G, B) are formed. ) Is formed.
The alignment control protrusion (Mv) is provided on each color pixel of the red color pixel (42R), the green color pixel (42G), and the blue color pixel (42B). Alignment control protrusion (Mv-R) on the red colored pixel (42R), Alignment control protrusion (Mv-G) on the green colored pixel (42G), Alignment control protrusion (Mv) on the blue colored pixel (42B) -B) is an example in which each height is different (H5 ≠ H6 ≠ H7).

  When three kinds of alignment control protrusions having different heights are formed on the same color filter, the density distribution portion (NB) of the density distribution mask is made to correspond to the height of each alignment control protrusion. By using the concentration distribution portion, three types of alignment control protrusions can be easily obtained in one step.

Therefore, according to the present invention, for example, the step of forming the alignment control protrusions when providing two kinds of alignment control protrusions having different heights in the color filter in Japanese Patent Laid-Open No. 2000-267079 is not two steps. One step is sufficient.
That is, the alignment control protrusion provided on the blue colored pixel can be easily made higher than the others to compensate for the decrease in the transmittance of the blue colored pixel, resulting in the birefringence wavelength dispersion of the liquid crystal material. This is effective in reducing the coloring at the time of white display due to the difference in transmittance of each color pixel.

  Further, the present invention is characterized in that the width of the protrusion formed on the colored pixel is different for each colored pixel. When a plurality of types of projections having different widths are formed, the density distribution portion (NB) of the density distribution mask can be easily obtained by making the density distribution portion corresponding to the width of each projection in the same manner as described above. Can do.

FIG. 3 is a cross-sectional view illustrating an example of a color filter for a liquid crystal display device according to a sixth aspect. As shown in FIG. 3, this color filter has a transparent layer (46) and a transparent conductive film (43) on a glass substrate (40) on which a black matrix (41) and colored pixels (42) are formed.
) Is formed.
Two protrusions are provided on the same colored pixel (42), the first protrusion is an alignment control protrusion (Mv), the second protrusion is a photospacer (Ps), and the heights are different. This is an example (H8 ≠ H9).

  When a plurality of types of protrusions having different heights are formed on the same colored pixel, the density distribution portion (NB) of the density distribution mask is aligned with each orientation in the same manner as the invention according to the fourth aspect. It can be easily manufactured by using a concentration distribution portion corresponding to the height of the control protrusion.

  In addition, the present invention is characterized in that when a plurality of protrusions are provided in the same colored pixel, the plurality of protrusions are alignment control protrusions and photo spacers, and the widths of the plurality of protrusions are different. In this case as well, the density distribution portion (NB) of the concentration distribution mask can be easily obtained by making it a density distribution portion corresponding to the width of each protrusion as described above. For example, the first projection orientation control projection (Mv) and the second projection photospacer (Ps) have different widths.

  As described above, as an incidental thing in the present invention, as the concentration distribution mask, the first concentration distribution portion (not shown) corresponding to the formation of the alignment control protrusion (Mv), and the photo spacer shown in FIG. By using a concentration distribution mask provided with a second concentration distribution portion (not shown) corresponding to the formation of (44), it is possible to simultaneously form the alignment control protrusion and the photo spacer in one step.

It is sectional drawing of one Example of the color filter for liquid crystal display devices by this invention. It is sectional drawing explaining an example of the color filter for liquid crystal display devices concerning Claim 4. It is sectional drawing explaining an example of the color filter for liquid crystal display devices concerning Claim 6. It is the top view which showed typically an example of the color filter used for a liquid crystal display device. FIG. 5 is a cross-sectional view taken along line X-X ′ of the color filter illustrated in FIG. 4. It is a fragmentary sectional view of the color filter for liquid crystal display devices in which the photo spacer was formed. It is explanatory drawing of the principle of MVA-LCD. (A) is a top view which expands and shows one pixel of an example of the color filter used for MVA-LCD. FIG. 4B is an enlarged cross-sectional view illustrating one pixel of an example of a color filter used in an MVA-LCD. (A) is a top view which expands and shows one pixel of another example. (B) is sectional drawing which expands and shows one pixel of another example. (A)-(f) is sectional drawing which shows an example of the manufacturing method of the color filter for liquid crystal display devices by this invention. (A) is sectional drawing of an example of a density distribution mask. (B) is an enlarged plan view showing a halftone portion. (C) is an enlarged plan view showing a density distribution portion. (D) is a top view which expands and shows a part of halftone part shown in (b) further. (E) is sectional drawing in the XX line. FIG. 11 is an enlarged view of the cross-section of the halftone portion shown in FIG. 11D, and schematically shows the light intensity distribution on the photoresist.

Explanation of symbols

4, 7, 8, 9 ... color filter 20 ... TFT substrate 21 ... liquid crystal molecules 22a, 22b, 23, 83, 93, Mv ... (orientation control) projections 40, 50 ... transparent Substrate (glass substrate)
41 ... Black matrix 42 ... Colored pixel 42R ... Red colored pixel 42G ... Green colored pixel 42B ... Blue colored pixel 43 ... Transparent conductive film 44, Ps ... Photo Spacer 45 ... Flat part 46 ... Transparent layer 60 ... Transparent photosensitive resin layer 70 ... Photosensitive resin layer 70E ... Etching resist 80 ... MVA-LCD
H2 ... Height of the stripe-shaped alignment control protrusion H3 ... Height of the circular alignment control protrusion H4 to H9 ... (Alignment control) Height of the protrusion L1, L2 ... Exposure light PM1. Concentration distribution mask PM2 ... Photomask HT ... Halftone part NB ... Concentration distribution part W2 ... Width W3 of stripe-shaped alignment control protrusions ... Width W5 to W9 of circular alignment control protrusions ... (Orientation control) Projection width

Claims (9)

In a color filter for a liquid crystal display device in which a black matrix, a colored pixel, a transparent layer, and a transparent conductive film are sequentially formed on a transparent substrate,
1) The transparent layer is composed of projections and flat portions formed by exposure and development processing through a density distribution mask to a transparent photosensitive resin layer provided on a colored pixel,
2) The color filter for a liquid crystal display device, wherein the transparent conductive film has a portion on the protrusion removed by photoetching the transparent conductive film provided on the entire upper surface of the transparent layer.   The color filter for a liquid crystal display device according to claim 1, wherein the transmittance of the transparent layer is 90% or more in the entire range of wavelengths from 400 nm to 700 nm.   The color filter for a liquid crystal display device according to claim 1, wherein the height of the protrusion is 0.10 μm to 5.0 μm.   4. The color filter for a liquid crystal display device according to claim 1, wherein the height of the protrusion is different for each protrusion on the colored pixel of each color.   5. The color filter for a liquid crystal display device according to claim 1, wherein the width of the protrusion is different for each protrusion on a colored pixel of each color.   The plurality of protrusions are alignment control protrusions and photo spacers when there are a plurality of protrusions on the same colored pixel, and the heights of the plurality of protrusions are different. The color filter for a liquid crystal display device according to 3, 4, or 5.   The plurality of protrusions are alignment control protrusions and photo spacers when there are a plurality of protrusions on the same colored pixel, and the widths of the plurality of protrusions are different. The color filter for a liquid crystal display device according to 4, 5, or 6. In the method for producing a color filter for a liquid crystal display device in which a black matrix, a colored pixel, a transparent layer, and a transparent conductive film are sequentially formed on a transparent substrate,
1) A transparent photosensitive resin layer for forming a transparent layer is formed on the transparent substrate on which the black matrix and the colored pixels are formed.
2) The transparent photosensitive resin layer is subjected to exposure and development processing through a density distribution mask in which a pattern corresponding to the protrusions and flat portions constituting the transparent layer is formed to form a transparent layer,
3) A transparent conductive film and a photosensitive resin layer for forming an etching resist are sequentially formed on the entire upper surface of the transparent layer,
4) The photosensitive resin layer on the protrusion was removed by exposing and developing through a photomask on which a pattern for removing the photosensitive resin layer on the protrusion was formed, and the transparent conductive film on the protrusion was exposed. Forming an etching resist,
5) A method for producing a color filter for a liquid crystal display device, wherein the exposed portion of the transparent conductive film is removed by etching, and an etching resist is peeled off.   A liquid crystal display device using the color filter for a liquid crystal display device according to claim 1.

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