JP2007119655A - Through-hole-forming adhesive sheet and method for producing the same - Google Patents

Through-hole-forming adhesive sheet and method for producing the same Download PDF

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JP2007119655A
JP2007119655A JP2005315720A JP2005315720A JP2007119655A JP 2007119655 A JP2007119655 A JP 2007119655A JP 2005315720 A JP2005315720 A JP 2005315720A JP 2005315720 A JP2005315720 A JP 2005315720A JP 2007119655 A JP2007119655 A JP 2007119655A
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hole
adhesive sheet
wedge
holes
sensitive adhesive
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JP4804876B2 (en
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Kiichiro Kato
揮一郎 加藤
Kazuhisa Tsuda
和央 津田
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Lintec Corp
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Lintec Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for producing a through-hole-forming adhesive sheet in which productivity can be improved and to provide the through-hole-forming adhesive sheet having high productivity. <P>SOLUTION: In the method for producing a through-hole-forming adhesive sheet 1 in which through-holes 2 are formed into a bilayer sheet 1P' composed of a substrate 11 and an adhesive layer 12 by irradiating the bilayer sheet 1P' with laser beam by using a laser processing apparatus equipped with a galvano-unit 33 scanning the laser beam in a prescribed range at a prescribed interval, laser beam is repeatedly scanned by the galvano-unit 33 in a direction perpendicular to the conveying direction while conveying the bilayer sheet 1P' and the formed through holes 2 are arranged in continuous wedge-like shape. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、空気溜まりやブリスターを防止または除去することのできる貫通孔を有する粘着シートおよびその製造方法に関するものである。   The present invention relates to a pressure-sensitive adhesive sheet having a through-hole that can prevent or remove air pockets and blisters, and a method for producing the same.

粘着シートを手作業で被着体に貼付する際に、被着体と粘着面との間に空気溜まりができ、粘着シートの外観を損ねてしまうことがある。このような空気溜まりは、特に粘着シートの面積が大きい場合に発生し易い。   When the pressure-sensitive adhesive sheet is manually attached to the adherend, air can be trapped between the adherend and the pressure-sensitive adhesive surface, which may impair the appearance of the pressure-sensitive adhesive sheet. Such air pockets are likely to occur particularly when the area of the adhesive sheet is large.

また、アクリル樹脂、ABS樹脂、ポリスチレン樹脂、ポリカーボネート樹脂等の樹脂材料は、加熱により、または加熱によらなくても、ガスを発生することがあるが、このような樹脂材料からなる被着体に粘着シートを貼付した場合には、被着体から発生するガスによって粘着シートにブリスター(ふくれ)が生じることとなる。   In addition, resin materials such as acrylic resin, ABS resin, polystyrene resin, and polycarbonate resin may generate gas either by heating or not by heating. When an adhesive sheet is affixed, blisters (bulges) are generated in the adhesive sheet by the gas generated from the adherend.

上記のような問題を解決するために、特許文献1には、孔径が0.1〜300μmの貫通孔を30〜50,000個/100cmの孔密度で形成した粘着シートが提案されている。かかる貫通孔形成粘着シートによれば、粘着面側の空気やガスを貫通孔から粘着シート表面側に抜くことにより、粘着シートの空気溜まりまたはブリスターを防止することが可能である。 In order to solve the above problems, Patent Document 1 proposes a pressure-sensitive adhesive sheet in which through holes having a hole diameter of 0.1 to 300 μm are formed at a hole density of 30 to 50,000 holes / 100 cm 2 . . According to such a through-hole-formed pressure-sensitive adhesive sheet, it is possible to prevent air accumulation or blistering of the pressure-sensitive adhesive sheet by drawing air or gas on the pressure-sensitive adhesive side from the through-hole to the pressure-sensitive adhesive sheet surface side.

上記貫通孔形成粘着シートにおける貫通孔の形成には、レーザ穴開け加工が利用される場合がある。レーザ穴開け加工装置としては、例えば、走査装置としてのガルバノユニットおよびfθレンズを有するレーザ光照射装置を備えたものが用いられる。   Laser drilling may be used to form the through holes in the through hole forming pressure-sensitive adhesive sheet. As the laser drilling apparatus, for example, an apparatus provided with a galvano unit as a scanning apparatus and a laser beam irradiation apparatus having an fθ lens is used.

上記レーザ穴開け加工装置を使用して穴開け加工を行うには、粘着シートを搬送しながら、ガルバノユニットによりレーザ光を粘着シートの幅方向(搬送方向と直交する方向)に走査し、fθレンズを介してレーザ光を粘着シートに照射する。
国際公開第2004/061031号パンフレット
In order to perform drilling using the above laser drilling apparatus, while conveying the adhesive sheet, the galvano unit scans the laser beam in the width direction of the adhesive sheet (direction perpendicular to the conveying direction), and the fθ lens. The adhesive sheet is irradiated with a laser beam through.
International Publication No. 2004/061031 Pamphlet

従来は、上記レーザ穴開け加工によって貫通孔を格子状に配列させていたが、ガルバノユニットの走査速度に限界があることから、粘着シートの搬送速度を速くすることができなかった。したがって、貫通孔形成粘着シートの生産性は必ずしも高くはなかった。   Conventionally, the through holes are arranged in a lattice pattern by the laser drilling process, but the transport speed of the pressure-sensitive adhesive sheet cannot be increased because the scanning speed of the galvano unit is limited. Therefore, the productivity of the through-hole forming pressure-sensitive adhesive sheet is not necessarily high.

本発明は、このような実情に鑑みてなされたものであり、生産性を向上させることのできる貫通孔形成粘着シートの製造方法および生産性の高い貫通孔形成粘着シートを提供することを目的とする。   This invention is made in view of such a situation, and it aims at providing the through-hole formation adhesive sheet which can improve productivity, and the through-hole formation adhesive sheet with high productivity. To do.

上記目的を達成するために、第1に本発明は、レーザ光を所定の範囲にて所定の間隔で走査する走査装置を備えたレーザ加工装置を使用し、少なくとも基材と粘着剤層とを備えた粘着シートに対しレーザ光を照射して、前記粘着シートに貫通孔を形成する貫通孔形成粘着シートの製造方法であって、前記粘着シートと前記走査装置とを相対的に移動させながら、前記移動方向と直交する方向に前記走査装置によってレーザ光を往復走査し、前記貫通孔の配列を連続的なくさび状にすることを特徴とする貫通孔形成粘着シートの製造方法を提供する(請求項1)。   In order to achieve the above object, first, the present invention uses a laser processing apparatus including a scanning device that scans laser light at a predetermined range within a predetermined range, and at least a base material and an adhesive layer are provided. Irradiating a laser beam to the pressure-sensitive adhesive sheet provided, a through-hole forming pressure-sensitive adhesive sheet manufacturing method for forming a through-hole in the pressure-sensitive adhesive sheet, while relatively moving the pressure-sensitive adhesive sheet and the scanning device, Provided is a method for producing a through-hole-formed pressure-sensitive adhesive sheet, wherein a laser beam is reciprocally scanned by the scanning device in a direction perpendicular to the moving direction, and the array of through-holes is continuously wedged. Item 1).

なお、本明細書において、「シート」にはフィルムおよびテープの概念、「フィルム」にはシートおよびテープの概念が含まれるものとする。また、本発明における「走査装置」としては、例えば、ガルバノミラー、ポリゴンミラー等を備えたユニット(スキャナ)などが挙げられる。また、「前記粘着シートと前記走査装置とを相対的に移動」には、走査装置を固定して粘着シートを移動させる場合と、粘着シートを固定して走査装置を移動させる場合と、粘着シートおよび走査装置を互いに反対方向に移動させる場合とが含まれる。   In this specification, “sheet” includes the concept of film and tape, and “film” includes the concept of sheet and tape. In addition, examples of the “scanning device” in the present invention include a unit (scanner) including a galvanometer mirror, a polygon mirror, and the like. In addition, “relatively moving the pressure-sensitive adhesive sheet and the scanning device” includes a case where the scanning device is fixed and the pressure-sensitive adhesive sheet is moved, a case where the pressure-sensitive adhesive sheet is fixed and the scanning device is moved, and a pressure-sensitive adhesive sheet. And a case where the scanning device is moved in directions opposite to each other.

上記発明(請求項1)によれば、貫通孔を格子状に配列する場合と比較して、粘着シートと走査装置との相対移動速度を高く設定することができるため、レーザ穴開け加工の加工速度を向上させ、貫通孔形成粘着シートの生産性を高めることができる。   According to the above invention (invention 1), since the relative movement speed between the adhesive sheet and the scanning device can be set higher than in the case where the through holes are arranged in a grid pattern, the laser drilling process is performed. Speed can be improved and productivity of a through-hole formation adhesive sheet can be improved.

上記発明(請求項1)においては、前記貫通孔のくさび状の配列におけるくさびの対称線に対する、前記貫通孔の配列の角度をθとしたときに、0<tanθ≦1となるようにレーザ加工を行うことが好ましい(請求項2)。   In the above invention (invention 1), laser processing is performed such that 0 <tan θ ≦ 1 when θ is an angle of the array of the through holes with respect to the wedge symmetry line in the wedge-shaped array of the through holes. (Claim 2).

上記発明(請求項1,2)において、前記走査装置は複数設けられており、前記複数の走査装置によって並列する複数の貫通孔群を形成するとともに、隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が、他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に、貫通孔同士が重ならずに入り込むようにレーザ加工を行うことが好ましい(請求項3)。   In the above inventions (inventions 1 and 2), a plurality of the scanning devices are provided, and a plurality of through-hole groups arranged in parallel are formed by the plurality of scanning devices, and one through-hole group in an adjacent through-hole group is formed. It is preferable to perform laser processing so that the narrow gap side of the arrangement of the wedge-shaped through-holes enters the wide gap side of the arrangement of the wedge-shaped through-holes of the other through-hole group without overlapping each other. (Claim 3).

上記発明(請求項3)によれば、くさび状の貫通孔の配列の広間隔部分における貫通孔の孔密度を向上させ、得られる貫通孔形成粘着シートにおける貫通孔の孔密度をエア抜け性に優れた範囲内に制御し易くすることができる。   According to the above invention (invention 3), the hole density of the through holes in the wide interval portion of the array of the wedge-shaped through holes is improved, and the hole density of the through holes in the obtained through hole forming pressure-sensitive adhesive sheet is made to be air bleed. Control within an excellent range can be facilitated.

上記発明(請求項3)においては、隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に入り込む幅の、前記他方の貫通孔群のくさび状の貫通孔の配列の幅に対する比をPとしたときに、0<P≦0.7となるようにレーザ加工を行うことが好ましい(請求項4)。   In the above invention (invention 3), in the adjacent through hole group, the narrow interval side of the arrangement of the wedge-shaped through holes of one through hole group is the wide interval side of the arrangement of the wedge-shaped through holes of the other through hole group. Laser processing is preferably performed so that 0 <P ≦ 0.7, where P is a ratio of the width of entering to the width of the array of wedge-shaped through-holes of the other through-hole group. Item 4).

上記発明(請求項1〜4)においては、前記貫通孔の孔密度が30〜50,000個/100cmとなるようにレーザ加工を行うことが好ましい(請求項5)。 In the above invention (claim 1), the pore density of the through holes is preferably performed with a laser processing so that 30~50,000 pieces / 100 cm 2 (Claim 5).

第2に本発明は、基材と粘着剤層とを備え、一方の面から他方の面に貫通する貫通孔が複数形成されている貫通孔形成粘着シートであって、前記複数の貫通孔は、平面視において連続的なくさび状に配列されていることを特徴とする貫通孔形成粘着シートを提供する(請求項6)。   2ndly, this invention is a through-hole formation adhesive sheet provided with the base material and the adhesive layer, and the through-hole formation adhesive sheet in which multiple through-holes penetrated from one surface to the other surface are formed, A through-hole-forming pressure-sensitive adhesive sheet characterized by being arranged in a wedge shape in a plan view is provided (claim 6).

上記発明(請求項6)に係る貫通孔形成粘着シートは、例えば、速い速度で粘着シートを搬送しながら、その搬送方向と直交する方向に走査装置によってレーザ光を往復走査することにより製造することができるため、貫通孔が格子状に配列された貫通孔形成粘着シートと比較して、生産性が高い。   The through-hole-formed pressure-sensitive adhesive sheet according to the above invention (invention 6) is manufactured, for example, by reciprocally scanning laser light in a direction orthogonal to the conveyance direction while conveying the pressure-sensitive adhesive sheet at a high speed. Therefore, productivity is high compared with the through-hole formation adhesive sheet in which the through-hole was arranged in the shape of a lattice.

上記発明(請求項6)において、前記貫通孔のくさび状の配列におけるくさびの対称線に対する、前記貫通孔の配列の角度をθとしたときに、0<tanθ≦1となっていることが好ましい(請求項7)。   In the above invention (invention 6), it is preferable that 0 <tan θ ≦ 1 when θ is an angle of the arrangement of the through holes with respect to the wedge symmetry line in the wedge-shaped arrangement of the through holes. (Claim 7).

上記発明(請求項6,7)において、前記連続的なくさび状に配列されている貫通孔群は、複数並列して粘着シートに形成されており、隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側は、他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に、貫通孔同士が重ならずに入り込んでいることが好ましい(請求項8)。   In the above inventions (inventions 6 and 7), the plurality of through-hole groups arranged in a continuous wedge shape are formed in the adhesive sheet in parallel, and one through-hole group in the adjacent through-hole group It is preferable that the narrow interval side of the array of wedge-shaped through-holes penetrates into the wide interval side of the array of wedge-shaped through-holes of the other through-hole group without overlapping each other. 8).

上記発明(請求項8)に係る貫通孔形成粘着シートは、くさび状の貫通孔の配列の広間隔部分における貫通孔の孔密度が高くなっているため、エア抜け性に優れたものになり易い。   The through-hole-forming pressure-sensitive adhesive sheet according to the above invention (invention 8) is likely to be excellent in air bleedability because the hole density of the through-holes in the wide interval portion of the wedge-shaped through-hole arrangement is high. .

上記発明(請求項8)においては、隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に入り込む幅の、前記他方の貫通孔群のくさび状の貫通孔の配列の幅に対する比をPとしたときに、0<P≦0.7となっていることが好ましい(請求項9)。   In the above invention (invention 8), the narrow interval side of the wedge-shaped through-hole arrangement of one through-hole group in the adjacent through-hole group is the wide interval side of the arrangement of the wedge-shaped through-holes of the other through-hole group It is preferable that 0 <P ≦ 0.7, where P is a ratio of the width of entering to the width of the array of wedge-shaped through-holes in the other through-hole group.

上記発明(請求項6〜9)においては、前記貫通孔の孔密度が30〜50,000個/100cmであることが好ましい(請求項10)。 In the above invention (Invention 6-9), it is preferred pore density of the through hole is 30~50,000 pieces / 100 cm 2 (claim 10).

本発明によれば、貫通孔形成粘着シートの生産性を向上させることができる。また、本発明によれば、生産性の高い貫通孔形成粘着シートを提供することができる。   According to the present invention, the productivity of the through-hole forming pressure-sensitive adhesive sheet can be improved. Moreover, according to this invention, a highly productive through-hole formation adhesive sheet can be provided.

以下、本発明の実施形態について説明する。
図1は、本発明の一実施形態で使用するレーザ穴開け加工装置の概略側面図であり、図2は、同レーザ穴開け加工装置におけるガルバノユニットの設置位置を示す平面図であり、図3は、同レーザ穴開け加工装置の概略正面図であり、図4は、本発明の一実施形態に係る貫通孔形成粘着シートにおける貫通孔の配列例であり、図5は、同貫通孔形成粘着シートの断面図である。
Hereinafter, embodiments of the present invention will be described.
FIG. 1 is a schematic side view of a laser drilling apparatus used in an embodiment of the present invention, and FIG. 2 is a plan view showing an installation position of a galvano unit in the laser drilling apparatus. FIG. 4 is a schematic front view of the laser drilling apparatus, FIG. 4 is an example of the arrangement of through holes in the through hole forming adhesive sheet according to one embodiment of the present invention, and FIG. 5 is the through hole forming adhesive. It is sectional drawing of a sheet | seat.

ここで、図1〜図5中、符号1Pは、基材11、粘着剤層12および剥離材13を積層してなる粘着シート(貫通孔形成前の粘着シート)を示し、符号1P’は、粘着シート1Pから剥離材13を剥離した、基材11および粘着剤層12からなる二層シートを示し、符号1’は、貫通孔2が形成された基材11および粘着剤層12からなる貫通孔形成二層シートを示し、符号1は、貫通孔形成二層シート1’に剥離材13を積層した、貫通孔2が形成された基材11および粘着剤層12と剥離材13とからなる貫通孔形成粘着シートを示す。   Here, in FIGS. 1-5, 1P shows the adhesive sheet (adhesive sheet before through-hole formation) formed by laminating | stacking the base material 11, the adhesive layer 12, and the peeling material 13, and code | symbol 1P ' 2 shows a two-layer sheet composed of a base material 11 and a pressure-sensitive adhesive layer 12 from which the release material 13 has been peeled off from the pressure-sensitive adhesive sheet 1P. A hole-forming two-layer sheet is shown, and reference numeral 1 is composed of a base material 11 on which a through-hole 2 is formed, a pressure-sensitive adhesive layer 12 and a peeling material 13, in which a peeling material 13 is laminated on a through-hole forming double-layer sheet 1 ′ A through-hole formation adhesive sheet is shown.

なお、基材11および粘着剤層12の材料は、レーザ加工によって貫通孔2が形成され得る材料であれば特に限定されるものではない。   In addition, the material of the base material 11 and the pressure-sensitive adhesive layer 12 is not particularly limited as long as the through-hole 2 can be formed by laser processing.

図1および図2に示すように、本実施形態で使用するレーザ穴開け加工装置は、長尺の粘着シート1Pが巻かれているロールR1と、貫通孔形成粘着シート1を巻き取るロールR2と、粘着シート1Pから剥離材13を剥離する分離ロールR3と、貫通孔形成二層シート1’に剥離材13を貼り付ける貼付ロールR4と、分離ロールR3にて剥離した剥離材13を巻き取るロールR5と、貫通孔形成二層シート1’に積層するための剥離材13が巻かれているロールR6と、ロールR1およびロールR2との間に設置されたレーザ光照射装置3とを備えている。   As shown in FIGS. 1 and 2, the laser drilling apparatus used in the present embodiment includes a roll R1 around which a long adhesive sheet 1P is wound, and a roll R2 around which the through-hole-forming adhesive sheet 1 is wound. , Separation roll R3 for peeling the release material 13 from the adhesive sheet 1P, a sticking roll R4 for attaching the release material 13 to the through-hole forming two-layer sheet 1 ′, and a roll for winding the release material 13 peeled by the separation roll R3 R5, a roll R6 around which a release material 13 for laminating on the through-hole forming two-layer sheet 1 ′ is wound, and a laser beam irradiation device 3 installed between the roll R1 and the roll R2. .

レーザ光照射装置3は、レーザ光を発振するレーザ発振器31と、レーザ発振器31からのレーザ光を2つに分岐する第1ハーフミラー32aと、第1ハーフミラー32aからのレーザ光をさらに2つに分岐する2つの第2ハーフミラー32bと、第2ハーフミラー32bからのレーザ光をさらに2つに分岐する4つの第3ハーフミラー32cと、各第3ハーフミラー32cからのレーザ光を走査する8つのガルバノユニット33(X方向に走査するガルバノミラーおよびY方向に走査するガルバノミラーを備えている)と、各ガルバノユニット33からのレーザ光を二層シート1P’に対して照射する8つのfθレンズ34と、レーザ光が照射される二層シート1P’の下側にて二層シート1P’を支持する2本のロール状の支持体35と、2本のロール状の支持体35の前後および間に設けられた吸引搬送装置(サクションベルト)36とを備えている。   The laser light irradiation device 3 includes a laser oscillator 31 that oscillates laser light, a first half mirror 32a that divides the laser light from the laser oscillator 31 into two, and two more laser lights from the first half mirror 32a. Two second half mirrors 32b branching into two, four third half mirrors 32c branching the laser light from the second half mirror 32b into two, and laser light from each third half mirror 32c are scanned. Eight galvano units 33 (including a galvano mirror that scans in the X direction and a galvano mirror that scans in the Y direction), and eight fθ that irradiate the two-layer sheet 1P ′ with the laser light from each galvano unit 33 A lens 34, and two roll-shaped supports 35 that support the two-layer sheet 1P ′ below the two-layer sheet 1P ′ irradiated with the laser light; Suction conveying device provided in the front and rear and between the two roll-like support 35 of and a (suction belt) 36.

図2に示すように、8つのガルバノユニット33(33a〜33h)は、4つずつ2列に並んでおり、各列の4つのガルバノユニット33(33a,33c,33e,33g/33b,33d,33f,33h)は、二層シート1P’の幅方向に直列的に並んでいる。これら8つのガルバノユニット33が、33a〜33hの順で、二層シート1P’の幅方向所定の間隔で走査し得るように(図3参照)、一方の列のガルバノユニット33a,33c,33e,33gと、他方の列のガルバノユニット33b,33d,33f,33hとは、互いに二層シート1P’の幅方向にずれるようにして並んでいる。   As shown in FIG. 2, the eight galvano units 33 (33a to 33h) are arranged in two rows of four, and the four galvano units 33 (33a, 33c, 33e, 33g / 33b, 33d, 33f, 33h) are arranged in series in the width direction of the two-layer sheet 1P ′. These eight galvano units 33 can be scanned in the order of 33a to 33h at predetermined intervals in the width direction of the double-layer sheet 1P ′ (see FIG. 3), so that the galvano units 33a, 33c, 33e, 33g and the galvano units 33b, 33d, 33f, and 33h in the other row are arranged so as to be shifted from each other in the width direction of the double-layer sheet 1P ′.

レーザ発振器31の種類は特に限定されるものではなく、例えば、炭酸ガス(CO)レーザ、TEA−COレーザ、YAGレーザ、UV−YAGレーザ、エキシマレーザ、半導体レーザ、YVOレーザ、YLFレーザ、フェムト秒レーザ等のいずれであってもよい。 The type of the laser oscillator 31 is not particularly limited, and for example, a carbon dioxide (CO 2 ) laser, a TEA-CO 2 laser, a YAG laser, a UV-YAG laser, an excimer laser, a semiconductor laser, a YVO 4 laser, and a YLF laser. Any of femtosecond lasers and the like may be used.

上記レーザ穴開け加工装置によるレーザ穴開け加工は、次のようにして行われる。
ロールR1から繰り出された粘着シート1Pは、分離ロールR3にて剥離材13が剥離され、二層シート1P’となる。二層シート1P’は、粘着剤層12を上側、基材11を下側にして、レーザ光照射装置3の設置位置に向かって所定の速度で搬送される。
Laser drilling by the laser drilling apparatus is performed as follows.
The pressure-sensitive adhesive sheet 1P fed out from the roll R1 is peeled off from the release material 13 by the separation roll R3 to become a two-layer sheet 1P ′. The two-layer sheet 1P ′ is conveyed at a predetermined speed toward the installation position of the laser beam irradiation device 3 with the adhesive layer 12 on the upper side and the base material 11 on the lower side.

二層シート1P’は、レーザ光照射装置3において、吸引搬送装置36により下方に吸引されて、ロール状の支持体35の上部外周面に密着しながら搬送される。   The two-layer sheet 1 </ b> P ′ is sucked downward by the suction / conveyance device 36 in the laser light irradiation device 3, and conveyed while being in close contact with the upper outer peripheral surface of the roll-shaped support 35.

レーザ光照射装置3における8つのガルバノユニット33は、それぞれ二層シート1P’の幅方向に所定の間隔でレーザ光を往復走査し、移動している二層シート1P’のロール状の支持体35への密着部分に対してfθレンズ34を介してレーザ光を照射する。このレーザ光照射によって、二層シート1P’には、粘着剤層12および基材11を貫通する貫通孔2が複数形成され、貫通孔形成二層シート1’となる(図5参照)。   The eight galvano units 33 in the laser beam irradiation device 3 reciprocately scan the laser beam at predetermined intervals in the width direction of the two-layer sheet 1P ′, respectively, and roll-like supports 35 of the moving two-layer sheet 1P ′. A laser beam is irradiated through the fθ lens 34 to the close contact portion. By this laser light irradiation, a plurality of through-holes 2 penetrating the pressure-sensitive adhesive layer 12 and the base material 11 are formed in the two-layer sheet 1P ′ to form a through-hole-formed two-layer sheet 1 ′ (see FIG. 5).

本実施形態において、上記レーザ光照射によって得られる貫通孔形成二層シート1’の貫通孔2は、8つのガルバノユニット33に対応して、シート幅方向に並列した8つの貫通孔群20を構成し、各貫通孔群20にて連続的なくさび状に配列されている。図4に、貫通孔形成二層シート1’の一部として、ガルバノユニット33aによって形成される貫通孔群20a、ガルバノユニット33bによって形成される貫通孔群20b、ガルバノユニット33cによって形成される貫通孔群20cを示す。   In the present embodiment, the through-hole 2 of the through-hole forming double-layer sheet 1 ′ obtained by the laser beam irradiation constitutes eight through-hole groups 20 arranged in parallel in the sheet width direction corresponding to the eight galvano units 33. In each through-hole group 20, they are arranged in a continuous wedge shape. In FIG. 4, as a part of the through-hole forming double-layer sheet 1 ′, a through-hole group 20a formed by the galvano unit 33a, a through-hole group 20b formed by the galvano unit 33b, and a through-hole formed by the galvano unit 33c Group 20c is shown.

上記のように貫通孔2を連続的なくさび状に配列するには、二層シート1P’を搬送しながら、ガルバノユニット33によってレーザ光を二層シート1P’の幅方向に往復走査すればよいが、貫通孔2を格子状に配列する場合と比較して、二層シート1P’の搬送速度を高く設定することができる。そのため、レーザ穴開け加工の加工速度を向上させ、貫通孔形成粘着シート1の生産性を高めることができる。なお、ガルバノユニット33は、二層シート1P’の幅方向だけでなく、二層シート1P’の長さ方向(搬送方向)にレーザ光が傾くように走査してもよい。   In order to arrange the through holes 2 in a continuous wedge shape as described above, a laser beam may be reciprocated in the width direction of the two-layer sheet 1P ′ by the galvano unit 33 while conveying the two-layer sheet 1P ′. However, compared with the case where the through-holes 2 are arranged in a lattice pattern, the conveyance speed of the two-layer sheet 1P ′ can be set high. Therefore, the processing speed of the laser drilling process can be improved, and the productivity of the through hole forming pressure-sensitive adhesive sheet 1 can be increased. The galvano unit 33 may scan so that the laser beam is tilted not only in the width direction of the double-layer sheet 1P 'but also in the length direction (conveyance direction) of the double-layer sheet 1P'.

ここで、貫通孔2のくさび状の配列(くさび21)を構成する貫通孔2の配列22(直線状)の傾斜の程度であるが、くさび21の対称線S(本実施形態では二層シート1P’の搬送方向に直交する線)に対する、貫通孔2の配列22の角度をθとしたときに、0<tanθ≦1とすることが好ましく、特に0<tanθ≦0.5とすることが好ましい。tanθが0よりも大きいことにより、二層シート1P’の搬送速度を速くして、貫通孔形成粘着シート1の生産性を高めることができる。一方、tanθが1を超えると、くさび21を構成する貫通孔2の配列22の傾斜の程度が大きくなり過ぎ、貫通孔2の孔密度をエア抜け性に優れた範囲内に制御し難くなるおそれがある。   Here, although it is a grade of the inclination of the array 22 (linear shape) of the through-hole 2 which comprises the wedge-shaped array (wedge 21) of the through-hole 2, the symmetrical line S of the wedge 21 (in this embodiment, double-layer sheet) 0 <tan θ ≦ 1, particularly 0 <tan θ ≦ 0.5, where θ is the angle of the array 22 of the through holes 2 with respect to a line perpendicular to the conveying direction of 1P ′. preferable. When tan θ is larger than 0, the conveyance speed of the two-layer sheet 1P ′ can be increased and the productivity of the through-hole forming pressure-sensitive adhesive sheet 1 can be increased. On the other hand, if tan θ exceeds 1, the degree of inclination of the array 22 of the through-holes 2 constituting the wedge 21 becomes too large, and the hole density of the through-holes 2 may be difficult to control within a range excellent in air bleedability. There is.

なお、本実施形態では、くさび21の狭間隔側の先端部は所定の間隙を有するが、この間隙はなくてもよい。すなわち、くさび21の先端部は尖っていてもよい。   In the present embodiment, the tip of the wedge 21 on the narrow interval side has a predetermined gap, but this gap may not be present. That is, the tip of the wedge 21 may be sharp.

図4に示すように、隣接する貫通孔群20(図4では、貫通孔群20aと貫通孔群20b、貫通孔群20bと貫通孔群20c)における一方の貫通孔群20のくさび状の貫通孔2の配列(くさび21)の狭間隔側は、他方の貫通孔群20のくさび状の貫通孔2の配列(くさび21)の広間隔側に、貫通孔2同士が重ならずに入り込んでいる。このように隣接する一方のくさび21を他方のくさび21に入り込ませることにより、くさび21の広間隔部分における貫通孔2の孔密度を向上させ、貫通孔2の孔密度をエア抜け性に優れた範囲内に制御し易くすることができる。   As shown in FIG. 4, the wedge-shaped penetration of one through-hole group 20 in the adjacent through-hole group 20 (in FIG. 4, through-hole group 20a and through-hole group 20b, through-hole group 20b and through-hole group 20c). The narrow gap side of the arrangement of the holes 2 (wedge 21) is inserted into the wide gap side of the arrangement of the wedge-shaped through holes 2 (wedge 21) of the other through hole group 20 without overlapping each other. Yes. In this way, by making one adjacent wedge 21 enter the other wedge 21, the hole density of the through hole 2 in the wide interval portion of the wedge 21 is improved, and the hole density of the through hole 2 is excellent in air bleedability. It can be easily controlled within the range.

上記のような貫通孔2の配列は、二層シート1P’の搬送速度、ガルバノユニット33の走査タイミング、および2本のロール状の支持体35の間隔の調整によって形成することができる。   The arrangement of the through holes 2 as described above can be formed by adjusting the conveyance speed of the two-layer sheet 1 </ b> P ′, the scanning timing of the galvano unit 33, and the interval between the two roll-shaped supports 35.

ここで、隣接する一方のくさび21が他方のくさび21に入り込む量であるが、隣接する一方のくさび21の狭間隔側が他方のくさび21の広間隔側に入り込む幅Wの、他方のくさび21の幅Wに対する比をPとしたときに、0<P≦0.7であることが好ましく、特に0<P≦0.4であることが好ましい。Pが0よりも大きいことにより、貫通孔2の孔密度を向上させることができる。一方、Pが0.7を超えると、ガルバノユニット33による走査幅が大きくなり過ぎて、レーザ穴開け加工の加工効率が低下したり、貫通孔2の形状が崩れたりするおそれがある。 Here, one of the wedge 21 adjacent an amount entering the other of the wedge 21, the width W 2 of the narrow gap side of one of the wedge 21 adjacent enters the wide pitch side of the other of the wedge 21, the other wedge 21 the ratio of the width W 1 when the P, 0 <is preferably P ≦ 0.7, is especially preferred 0 <P ≦ 0.4. When P is larger than 0, the hole density of the through holes 2 can be improved. On the other hand, if P exceeds 0.7, the scanning width by the galvano unit 33 becomes too large, and there is a possibility that the processing efficiency of the laser drilling process is lowered or the shape of the through hole 2 is broken.

貫通孔形成粘着シート1における貫通孔2の孔密度は、30〜50,000個/100cmであることが好ましく、特に100〜10,000個/100cmであることが好ましい。貫通孔2の孔密度が30個/100cm未満であると、空気またはガスが抜け難く、貫通孔2の孔密度が50,000個/100cmを超えると、粘着シート1の機械的強度が低下するおそれがある。 The hole density of the through holes 2 in the through hole forming pressure-sensitive adhesive sheet 1 is preferably 30 to 50,000 / 100 cm 2 , and particularly preferably 100 to 10,000 / 100 cm 2 . If the hole density of the through holes 2 is less than 30/100 cm 2 , air or gas is difficult to escape, and if the hole density of the through holes 2 exceeds 50,000 / 100 cm 2 , the mechanical strength of the pressure-sensitive adhesive sheet 1 is increased. May decrease.

貫通孔2の基材11および粘着剤層12における孔径は0.1〜300μmであることが好ましく、特に0.1〜150μmであることが好ましい。貫通孔2の孔径が0.1μm未満であると、貫通孔2から空気またはガスが抜け難く、貫通孔2の孔径が300μmを超えると、貫通孔2が目立つようになる。   It is preferable that the hole diameter in the base material 11 and the adhesive layer 12 of the through-hole 2 is 0.1-300 micrometers, and it is especially preferable that it is 0.1-150 micrometers. When the hole diameter of the through hole 2 is less than 0.1 μm, it is difficult for air or gas to escape from the through hole 2, and when the hole diameter of the through hole 2 exceeds 300 μm, the through hole 2 becomes conspicuous.

貫通孔2の孔径は、粘着シート1の厚さ方向に一定であってもよいし、粘着シート1の厚さ方向に変化していてもよいが、貫通孔2の孔径が粘着シート1の厚さ方向に変化する場合は、粘着剤層12の粘着面から基材11表面にかけて漸次小さくなるのが好ましい。このように貫通孔2の孔径が変化することにより、基材11表面にて貫通孔2がより目立ち難くなり、粘着シート1の外観を良好に保つことができる。   The hole diameter of the through-hole 2 may be constant in the thickness direction of the pressure-sensitive adhesive sheet 1 or may vary in the thickness direction of the pressure-sensitive adhesive sheet 1, but the hole diameter of the through-hole 2 is the thickness of the pressure-sensitive adhesive sheet 1. When changing in the vertical direction, it is preferable that the thickness gradually decreases from the pressure-sensitive adhesive surface of the pressure-sensitive adhesive layer 12 to the surface of the base material 11. Thus, when the hole diameter of the through-hole 2 changes, the through-hole 2 becomes less conspicuous on the surface of the base material 11, and the external appearance of the adhesive sheet 1 can be kept favorable.

レーザ加工によって貫通孔2を形成する場合、貫通孔2には先細りのテーパがつくことが多いため、上記形状の貫通孔2は、本実施形態のように、粘着剤層12の粘着面側からレーザ光を照射することにより形成することができる。   When the through-hole 2 is formed by laser processing, the through-hole 2 often has a tapered taper. Therefore, the through-hole 2 having the above shape is formed from the adhesive surface side of the adhesive layer 12 as in the present embodiment. It can be formed by irradiation with laser light.

上記のようにして貫通孔2が形成された貫通孔形成二層シート1’には、ロールR6から繰り出された剥離材13が貼付ロールR4にて貼り付けられ、図5に示すように基材11、粘着剤層12および剥離材13の積層体となった貫通孔形成粘着シート1は、ロールR2に巻き取られる。   The release material 13 fed from the roll R6 is attached to the through-hole forming two-layer sheet 1 ′ in which the through-holes 2 are formed as described above by the application roll R4. As shown in FIG. 11, the through-hole forming pressure-sensitive adhesive sheet 1 that is a laminate of the pressure-sensitive adhesive layer 12 and the release material 13 is wound around a roll R2.

なお、本実施形態では、剥離材13を粘着剤層12から剥離してレーザ光照射をしているが、その理由は次の通りである。   In the present embodiment, the release material 13 is peeled from the pressure-sensitive adhesive layer 12 and irradiated with laser light. The reason is as follows.

剥離材13を粘着剤層12に積層した状態で剥離材側からレーザ光を照射した場合、剥離材13の材質によっては、剥離材13の貫通孔2開口部周縁に形成されるドロスが、粘着剤層12の貫通孔2開口部を拡げてしまうことがあり、この場合、粘着シート1に形成される貫通孔2の孔径や孔密度の精度が低くなってしまう。また、粘着剤層12の貫通孔2開口部が拡がると、貫通孔2の内部空間が大きくなり、粘着シート1を被着体に貼付した後に、貫通孔2中の空気や貫通孔2中に入った水等が粘着シート1の表面に何らかの影響を与えるおそれがある。   When the release material 13 is laminated on the pressure-sensitive adhesive layer 12 and irradiated with laser light from the release material side, depending on the material of the release material 13, the dross formed at the periphery of the opening of the through hole 2 of the release material 13 may adhere. The opening part of the through-hole 2 of the agent layer 12 may be expanded, and in this case, the accuracy of the hole diameter and hole density of the through-hole 2 formed in the pressure-sensitive adhesive sheet 1 is lowered. Moreover, if the opening part of the through-hole 2 of the adhesive layer 12 spreads, the internal space of the through-hole 2 will become large, and after sticking the adhesive sheet 1 to a to-be-adhered body, in the air in the through-hole 2, or in the through-hole 2 There is a possibility that the water or the like entered may have some influence on the surface of the pressure-sensitive adhesive sheet 1.

これに対し、本実施形態のように、粘着剤層12に対して直接レーザ光を照射すれば、粘着剤層12の貫通孔2開口部が拡がることがなく、孔径や孔密度の精度が高く、内部空間の小さい貫通孔2を形成することができる。また、粘着剤層12に対するレーザ光照射において、剥離材13を介在させないことにより、レーザ光の照射時間を短縮すること、またはレーザの出力エネルギーを小さくすることができる。レーザの出力エネルギーが小さければ、粘着剤層12および基材11に対する熱影響が小さくなり、熱変形等の少ない、形の整った貫通孔2を形成することが可能となる。   On the other hand, if the adhesive layer 12 is directly irradiated with laser light as in the present embodiment, the opening of the through hole 2 of the adhesive layer 12 does not expand, and the accuracy of the hole diameter and the hole density is high. The through hole 2 having a small internal space can be formed. Further, by not interposing the release material 13 in the laser beam irradiation on the adhesive layer 12, the laser beam irradiation time can be shortened or the laser output energy can be reduced. If the output energy of the laser is small, the thermal effect on the pressure-sensitive adhesive layer 12 and the substrate 11 is small, and it is possible to form a well-shaped through-hole 2 with little thermal deformation or the like.

以上のようにしてレーザ穴開け加工を行うことにより、二層シート1P’の搬送速度を速くして貫通孔形成粘着シート1の生産性を向上させることができるとともに、貫通孔2の孔密度を高めてエア抜け性に優れた貫通孔形成粘着シート1を製造することができる。   By performing the laser drilling process as described above, the conveyance speed of the two-layer sheet 1P ′ can be increased to improve the productivity of the through-hole forming pressure-sensitive adhesive sheet 1, and the hole density of the through-holes 2 can be increased. The through-hole-forming pressure-sensitive adhesive sheet 1 that is enhanced and excellent in air bleedability can be produced.

以上説明した実施形態は、本発明の理解を容易にするために記載されたものであって、本発明を限定するために記載されたものではない。したがって、上記実施形態に開示された各要素は、本発明の技術的範囲に属する全ての設計変更や均等物をも含む趣旨である。   The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

例えば、レーザ光照射装置3におけるガルバノユニット33の数は8つでなくてもよいし、ガルバノユニット33は2列になっていなくてもよい。また、剥離材13を粘着剤層12に積層した状態でレーザ光を照射してもよいし、レーザ光の照射は基材11側から行ってもよい。さらに、貼付ロールR4で貼り付ける剥離材13は、分離ロールR3で剥離した剥離材13であってもよい。さらにまた、吸引搬送装置36は搬送用ロールであってもよい。   For example, the number of galvano units 33 in the laser light irradiation device 3 may not be eight, and the galvano units 33 may not be in two rows. In addition, the laser beam may be irradiated with the release material 13 laminated on the pressure-sensitive adhesive layer 12, or the laser beam may be irradiated from the substrate 11 side. Further, the release material 13 to be attached by the sticking roll R4 may be the release material 13 peeled by the separation roll R3. Furthermore, the suction conveyance device 36 may be a conveyance roll.

本発明の貫通孔形成粘着シートは、空気溜まりやブリスターが生じやすい場合に使用する粘着シートとして有用であり、本発明の製造方法は、かかる貫通孔形成粘着シートを高い生産性で製造するのに有用である。   The through-hole-formed pressure-sensitive adhesive sheet of the present invention is useful as a pressure-sensitive adhesive sheet used when air pockets or blisters are likely to occur, and the production method of the present invention can produce such a through-hole-formed pressure-sensitive adhesive sheet with high productivity. Useful.

本発明の一実施形態で使用するレーザ穴開け加工装置の概略側面図である。It is a schematic side view of the laser drilling apparatus used in one embodiment of the present invention. 同レーザ穴開け加工装置におけるガルバノユニットの設置位置を示す平面図である。It is a top view which shows the installation position of the galvano unit in the laser drilling apparatus. 同レーザ穴開け加工装置の概略正面図である。It is a schematic front view of the laser drilling apparatus. 本発明の一実施形態に係る貫通孔形成粘着シートにおける貫通孔の配列例である。It is an example of an arrangement of a penetration hole in a penetration hole formation adhesive sheet concerning one embodiment of the present invention. 同貫通孔形成粘着シートの断面図である。It is sectional drawing of the same through-hole formation adhesive sheet.

符号の説明Explanation of symbols

1P…粘着シート(貫通孔形成前)
1P’…二層シート
1’…貫通孔形成二層シート
1…貫通孔形成粘着シート
11…基材
12…粘着剤層
13…剥離材
2…貫通孔
20…貫通孔群
21…貫通孔のくさび状の配列(くさび)
22…貫通孔の配列
3…レーザ光照射装置
31…レーザ発振器
32a,32b,32c…ハーフミラー
33…ガルバノユニット
34…fθレンズ
35…ロール状の支持体
36…吸引搬送装置(サクションベルト)
1P ... Adhesive sheet (before through-hole formation)
DESCRIPTION OF SYMBOLS 1P '... Double-layer sheet 1' ... Through-hole formation double-layer sheet 1 ... Through-hole formation adhesive sheet 11 ... Base material 12 ... Adhesive layer 13 ... Release material 2 ... Through-hole 20 ... Through-hole group 21 ... Through-hole wedge Array (wedge)
DESCRIPTION OF SYMBOLS 22 ... Through-hole arrangement | sequence 3 ... Laser beam irradiation apparatus 31 ... Laser oscillator 32a, 32b, 32c ... Half mirror 33 ... Galvano unit 34 ... f (theta) lens 35 ... Roll-shaped support body 36 ... Suction conveyance apparatus (suction belt)

Claims (10)

レーザ光を所定の範囲にて所定の間隔で走査する走査装置を備えたレーザ加工装置を使用し、少なくとも基材と粘着剤層とを備えた粘着シートに対しレーザ光を照射して、前記粘着シートに貫通孔を形成する貫通孔形成粘着シートの製造方法であって、
前記粘着シートと前記走査装置とを相対的に移動させながら、前記移動方向と直交する方向に前記走査装置によってレーザ光を往復走査し、前記貫通孔の配列を連続的なくさび状にすることを特徴とする貫通孔形成粘着シートの製造方法。
Using a laser processing apparatus provided with a scanning device that scans laser light at a predetermined interval within a predetermined range, the adhesive sheet having at least a base material and an adhesive layer is irradiated with laser light, and the adhesive A method for producing a through hole forming pressure-sensitive adhesive sheet for forming a through hole in a sheet,
A laser beam is reciprocally scanned by the scanning device in a direction perpendicular to the moving direction while relatively moving the adhesive sheet and the scanning device, and the array of the through holes is continuously wedged. The manufacturing method of the through-hole formation adhesive sheet characterized by the above-mentioned.
前記貫通孔のくさび状の配列におけるくさびの対称線に対する、前記貫通孔の配列の角度をθとしたときに、0<tanθ≦1となるようにレーザ加工を行うことを特徴とする請求項1に記載の貫通孔形成粘着シートの製造方法。   2. The laser processing is performed so that 0 <tan θ ≦ 1 when θ is an angle of the array of the through holes with respect to a wedge symmetry line in the wedge-shaped array of the through holes. The manufacturing method of the through-hole formation adhesive sheet of description. 前記走査装置は複数設けられており、前記複数の走査装置によって並列する複数の貫通孔群を形成するとともに、隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が、他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に、貫通孔同士が重ならずに入り込むようにレーザ加工を行うことを特徴とする請求項1または2に記載の貫通孔形成粘着シートの製造方法。   A plurality of the scanning devices are provided, and a plurality of through-hole groups arranged in parallel by the plurality of scanning devices are formed, and a narrow interval of an array of wedge-shaped through-holes of one through-hole group in adjacent through-hole groups 3. The through-hole according to claim 1, wherein the laser processing is performed so that the through-holes do not overlap each other on the wide interval side of the wedge-shaped through-hole arrangement of the other through-hole group. A method for producing a hole-forming pressure-sensitive adhesive sheet. 隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に入り込む幅の、前記他方の貫通孔群のくさび状の貫通孔の配列の幅に対する比をPとしたときに、0<P≦0.7となるようにレーザ加工を行うことを特徴とする請求項3に記載の貫通孔形成粘着シートの製造方法。   In the adjacent through hole group, the other through hole having a width in which the narrow interval side of the wedge-shaped through hole array of one through hole group enters the wide interval side of the wedge-shaped through hole array of the other through hole group 4. The through-hole forming adhesive according to claim 3, wherein laser processing is performed so that 0 <P ≦ 0.7, where P is the ratio of the wedge-shaped through-holes in the group to the width of the array. Sheet manufacturing method. 前記貫通孔の孔密度が30〜50,000個/100cmとなるようにレーザ加工を行うことを特徴とする請求項1〜4のいずれかに記載の貫通孔形成粘着シートの製造方法。 The method for producing a through-hole-forming pressure-sensitive adhesive sheet according to any one of claims 1 to 4, wherein laser processing is performed so that a hole density of the through-holes is 30 to 50,000 / 100 cm 2 . 基材と粘着剤層とを備え、一方の面から他方の面に貫通する貫通孔が複数形成されている貫通孔形成粘着シートであって、
前記複数の貫通孔は、平面視において連続的なくさび状に配列されていることを特徴とする貫通孔形成粘着シート。
A through-hole forming pressure-sensitive adhesive sheet comprising a base material and a pressure-sensitive adhesive layer, wherein a plurality of through-holes penetrating from one surface to the other surface are formed,
The through-hole-forming pressure-sensitive adhesive sheet, wherein the plurality of through-holes are arranged in a wedge shape in plan view.
前記貫通孔のくさび状の配列におけるくさびの対称線に対する、前記貫通孔の配列の角度をθとしたときに、0<tanθ≦1となっていることを特徴とする請求項6に記載の貫通孔形成粘着シート。   The penetration according to claim 6, wherein 0 <tan θ ≦ 1 when θ is an angle of the arrangement of the through holes with respect to a wedge symmetry line in the wedge-shaped arrangement of the through holes. Hole-forming adhesive sheet. 前記連続的なくさび状に配列されている貫通孔群は、複数並列して粘着シートに形成されており、
隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側は、他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に、貫通孔同士が重ならずに入り込んでいることを特徴とする請求項6または7に記載の貫通孔形成粘着シート。
A plurality of through-hole groups arranged in a continuous wedge shape are formed in an adhesive sheet in parallel,
In the adjacent through hole group, if the narrow interval side of the wedge-shaped through hole array of one through hole group overlaps the wide interval side of the wedge-shaped through hole array of the other through hole group, the through holes overlap each other. The through-hole-forming pressure-sensitive adhesive sheet according to claim 6 or 7, wherein the pressure-sensitive adhesive sheet penetrates into the hole.
隣接する貫通孔群における一方の貫通孔群のくさび状の貫通孔の配列の狭間隔側が他方の貫通孔群のくさび状の貫通孔の配列の広間隔側に入り込む幅の、前記他方の貫通孔群のくさび状の貫通孔の配列の幅に対する比をPとしたときに、0<P≦0.7となっていることを特徴とする請求項8に記載の貫通孔形成粘着シート。   In the adjacent through hole group, the other through hole having a width in which the narrow interval side of the wedge-shaped through hole array of one through hole group enters the wide interval side of the wedge-shaped through hole array of the other through hole group 9. The through-hole-forming pressure-sensitive adhesive sheet according to claim 8, wherein 0 <P ≦ 0.7, where P is a ratio to the width of the array of wedge-shaped through-holes in the group. 前記貫通孔の孔密度が30〜50,000個/100cmであることを特徴とする請求項6〜9のいずれかに記載の貫通孔形成粘着シート。 Through hole forming the pressure-sensitive adhesive sheet according to any one of claims 6 to 9 hole density of the through hole is characterized in that it is a 30~50,000 pieces / 100 cm 2.
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