JP2007118171A5 - - Google Patents

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Publication number
JP2007118171A5
JP2007118171A5 JP2006227300A JP2006227300A JP2007118171A5 JP 2007118171 A5 JP2007118171 A5 JP 2007118171A5 JP 2006227300 A JP2006227300 A JP 2006227300A JP 2006227300 A JP2006227300 A JP 2006227300A JP 2007118171 A5 JP2007118171 A5 JP 2007118171A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006227300A
Other languages
Japanese (ja)
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JP2007118171A (en
JP4699312B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006227300A priority Critical patent/JP4699312B2/en
Priority claimed from JP2006227300A external-priority patent/JP4699312B2/en
Priority to TW095133666A priority patent/TW200740576A/en
Priority to KR1020060094919A priority patent/KR100797537B1/en
Publication of JP2007118171A publication Critical patent/JP2007118171A/en
Publication of JP2007118171A5 publication Critical patent/JP2007118171A5/ja
Application granted granted Critical
Publication of JP4699312B2 publication Critical patent/JP4699312B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006227300A 2005-09-30 2006-08-24 Transport device Active JP4699312B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006227300A JP4699312B2 (en) 2005-09-30 2006-08-24 Transport device
TW095133666A TW200740576A (en) 2005-09-30 2006-09-12 Transferring device
KR1020060094919A KR100797537B1 (en) 2005-09-30 2006-09-28 Transfer Apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005285942 2005-09-30
JP2005285942 2005-09-30
JP2006227300A JP4699312B2 (en) 2005-09-30 2006-08-24 Transport device

Publications (3)

Publication Number Publication Date
JP2007118171A JP2007118171A (en) 2007-05-17
JP2007118171A5 true JP2007118171A5 (en) 2009-08-06
JP4699312B2 JP4699312B2 (en) 2011-06-08

Family

ID=38142556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006227300A Active JP4699312B2 (en) 2005-09-30 2006-08-24 Transport device

Country Status (3)

Country Link
JP (1) JP4699312B2 (en)
KR (1) KR100797537B1 (en)
TW (1) TW200740576A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4879833B2 (en) * 2007-07-30 2012-02-22 株式会社ダイヘン Transport device
JP2010158759A (en) * 2008-12-08 2010-07-22 Daihen Corp Work conveying device
JP5324211B2 (en) 2008-12-26 2013-10-23 株式会社ダイヘン Work transfer device
CN102686367B (en) * 2009-12-28 2015-05-20 株式会社爱发科 Drive device and conveyance device
KR101230467B1 (en) 2010-07-29 2013-02-25 주식회사 티이에스 Substrate transfer unit and substrate transfer apparatus including the same
KR101291811B1 (en) * 2011-06-08 2013-07-31 주식회사 나온테크 Hybrid vacuum robot transport apparatus
JP5841382B2 (en) 2011-09-06 2016-01-13 株式会社ダイヘン Work transfer device
CN103084909B (en) * 2011-10-31 2015-11-25 鸿富锦精密工业（深圳）有限公司 Handling device
KR101358004B1 (en) * 2012-06-29 2014-02-04 나승옥 Work convey table apparatus
JP5663638B2 (en) 2012-10-11 2015-02-04 株式会社ティーイーエス Substrate transfer device
TWI623397B (en) * 2016-06-30 2018-05-11 Kawasaki Heavy Ind Ltd Horizontal articulated robot
JP6783459B2 (en) * 2016-10-11 2020-11-11 株式会社レクザム Work transfer robot
KR102571863B1 (en) * 2022-12-27 2023-08-29 (주)네오스테크놀로지스 auto leveling device for a tilting type having multi axis

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539854B2 (en) * 1987-09-30 1996-10-02 三田工業株式会社 Robot fluid transfer mechanism
JPH01118882U (en) * 1988-02-08 1989-08-11
JPH02129314A (en) * 1988-11-08 1990-05-17 Sumitomo Metal Ind Ltd Method for cooling connecting part in vacuum refining vessel
JPH03208334A (en) * 1990-01-10 1991-09-11 Fujitsu Ltd Manufacturing device for semiconductor
JPH0796490A (en) * 1993-09-24 1995-04-11 Yaskawa Electric Corp Swivel structure of industrial robot
JPH1133949A (en) * 1997-07-14 1999-02-09 Fanuc Ltd Industrial robot
JPH11333778A (en) * 1998-05-29 1999-12-07 Daihen Corp Carrying robot device
JP3028129B2 (en) * 1998-09-11 2000-04-04 科学技術振興事業団 Coaxial vacuum heating device
JP2000306849A (en) * 1999-04-23 2000-11-02 Kokusai Electric Co Ltd Treatment apparatus for substrate
JP3263684B2 (en) * 1999-07-26 2002-03-04 株式会社ジェーイーエル Substrate transfer robot
JP4208169B2 (en) * 2000-03-15 2009-01-14 ナブテスコ株式会社 Reducer and robot joint device
JP4187138B2 (en) * 2001-12-18 2008-11-26 東京エレクトロン株式会社 Sealing structure
JP2003251144A (en) * 2002-03-04 2003-09-09 Sumitomo Metal Ind Ltd Gas decomposition apparatus and gas decomposition system

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