JP2007093673A - Device and method for inspecting electro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for inspecting an electro-optical device which requires only a few installation space, in which a reflection mirror is omitted from a light source and a screen and which can automatically detect display defects (such as point defects, line defects, stain and uneven defects). <P>SOLUTION: An inspection device 1 of the electro-optical device for projecting an inspection image displayed on an electro-optical panel 100 on a projection surface has an inspection optical system 5 which constitutes an inspection optical path for projecting an inspection light beam on the projection surface 17 in the vertical direction by transmitting or reflecting the inspection light beam on the horizontally placed electro-optical panel 100, a photographic camera 6 which images luminance distribution on the projection surface 17 when the electro-optical panel 100 is driven by a predetermined inspection pattern, an air blow 61 which blows away a foreign matter attached to the lens surface of the photographic camera 6 and a suction part 62 which sucks the foreign matter which is blown away. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection apparatus and an inspection method for an electro-optical device, and more particularly to an inspection device and an inspection method for automatically inspecting the display quality of an electro-optical device used in a light valve such as a projection display device.

  In general, a liquid crystal panel has a display defect (a point defect, a line defect, a spot defect, etc.) due to a defective switching element such as a thin film transistor (hereinafter referred to as TFT) or a foreign substance mixed into a liquid crystal layer in a manufacturing process. ) Occurrence status is checked.

  As an inspection apparatus for performing this type of inspection, for example, Patent Document 1 by the present applicant includes a lamp that irradiates a liquid crystal panel with inspection light, and a projection optical system that projects the transmitted light of the liquid crystal panel onto a screen. A technique is disclosed in which a luminance distribution on a screen when a liquid crystal panel is driven with a predetermined inspection pattern is imaged with a CCD camera, and a point defect or the like on the liquid crystal panel is automatically detected from the imaging result.

  In general, inspection of point defects or the like is also performed in parallel by visual inspection of an operator. As an inspection device for a liquid crystal panel by visual observation, the liquid crystal panel is driven with a predetermined inspection pattern, and the inspection image is displayed. 2. Description of the Related Art Conventionally, inspection apparatuses that project onto a screen are widely known.

Further, for example, in Patent Document 2 by the present applicant, a projection lens that constitutes an inspection optical system for projecting an inspection image displayed on a liquid crystal panel is provided with a lens moving mechanism unit for inspection light at the time of projection of the inspection image. A technique for improving the visibility of point defects and the like by the afterimage effect due to the movement of the projected inspection image by moving the optical axis by using the relative movement is disclosed.
Japanese Patent Laid-Open No. 11-174398 JP 2004-101748 A

  By the way, in the conventional liquid crystal panel inspection apparatus, for example, as shown in FIG. 2 of Patent Document 2, the supply and arrangement of the liquid crystal panel into the inspection apparatus are horizontally placed (arrangement in a horizontal state). In order to project the inspection image in the horizontal direction, a reflection mirror is required and the projection image is projected onto a screen perpendicular to the floor surface (ie, a vertical screen). If the installation space on the floor of the housing with the device is very large, and if dirt is attached to the reflecting mirror that changes the inspection optical path, the visibility of display defects will deteriorate, and There existed problems such as loss of light amount due to the presence and distortion of the projected image. Further, in the inspection apparatus that projects in the horizontal direction, in order to reduce the height in the vertical direction, the projection light from the light source is once projected in the horizontal direction, and the optical path is changed upward by another another reflecting mirror to change the liquid crystal. Since the light is transmitted through the panel, another reflecting mirror is required, and there is a problem in that dirt is attached and light quantity is lost.

  In view of the above problems, the present invention requires less installation space, omits a reflecting mirror from the optical path between the light source and the screen, and can automatically detect display defects (such as point defects, line defects, and spot unevenness defects). An object of the present invention is to provide an inspection device and an inspection method for an optical device.

  An inspection apparatus for an electro-optical device according to the present invention is an inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface, and transmits inspection light through the horizontally placed electro-optical panel. An inspection optical system that configures an inspection optical path to be reflected and projected onto the projection surface in the vertical direction; a photographing camera that captures a luminance distribution on the projection surface when the electro-optical panel is driven with a predetermined inspection pattern; An air blower that blows off foreign matter adhering to the lens surface of the photographing camera and a suction unit that sucks the blown foreign matter are provided.

  According to such an apparatus of the present invention, since the air blow and suction unit is provided in the vicinity of the lens surface of the photographing camera, when the projection direction that is directed upward is directed toward the ceiling, the foreign matter is placed on the lens surface of the photographing camera. Can be prevented and erroneous determination can be prevented. Accordingly, the inspection accuracy is improved. A display defect (such as a point defect, a line defect, or a spot defect) on the electro-optical panel can be automatically detected from the imaging result of the imaging camera, and an automatic inspection apparatus with a small installation area can be realized.

  An inspection apparatus for an electro-optical device according to the present invention is an inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface, and transmits inspection light through the horizontally placed electro-optical panel. An inspection optical system that constitutes an inspection optical path that is reflected and projected onto the projection surface in the vertical direction and a part of the inspection optical system are configured, and the transmitted light or reflected light of the electro-optical panel is projected onto the projection surface A projection lens, an air blow for blowing off foreign matter adhering to the lens surface of the projection lens, and a suction unit for sucking the blown foreign matter.

  According to such an apparatus of the present invention, since the air blow and suction unit is provided in the vicinity of the lens surface of the projection lens, when the projection direction is directed to the ceiling direction, foreign matter is present on the lens surface of the projection lens that is directed upward. Can be prevented and erroneous determination can be prevented. Accordingly, the inspection accuracy is improved. A display defect (such as a point defect, a line defect, or a spot defect) on the electro-optical panel can be automatically detected from the imaging result of the imaging camera, and an automatic inspection apparatus with a small installation area can be realized.

  An inspection apparatus for an electro-optical device according to the present invention is an inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface, and transmits inspection light through the horizontally placed electro-optical panel. An inspection optical system that constitutes an inspection optical path that reflects and projects the projection surface in the vertical direction, an air blow that blows off foreign matter adhering to the surface of the projection surface, and a suction unit that sucks the blown foreign matter It is characterized by having.

  According to such an apparatus according to the present invention, since the air blower and the suction unit are provided in the vicinity of the surface of the projection surface, foreign matters adhere to the surface of the projection surface that is directed upward when the projection direction is directed to the floor direction. Can be prevented, and erroneous determination can be prevented. Accordingly, the inspection accuracy is improved. A display defect (such as a point defect, a line defect, or a spot defect) on the electro-optical panel can be automatically detected from the imaging result of the imaging camera, and an automatic inspection apparatus with a small installation area can be realized.

  The present invention further includes a light source that emits the inspection light that is transmitted or reflected by the electro-optical panel, the light source having an optical axis in the vertical direction.

  According to such an apparatus, since there is no reflection mirror that reflects the light from the light source and changes the optical path, adhesion of the reflection mirror and loss of light amount are eliminated, thereby improving the visibility of display defects and increasing the light amount. Therefore, more accurate inspection can be performed.

  The present invention is characterized by further comprising static electricity removing means for removing static electricity in a portion near the air blow and suction portion and to which the foreign matter adheres.

  According to such an apparatus, it is possible to prevent the surface of the part to which the foreign matter adheres (the part that receives or projects the inspection image) from being charged with static electricity, thereby making it difficult to attach the foreign matter such as dust. Inspection can be performed.

  An inspection apparatus for an electro-optical device according to the present invention is an inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface, and transmits inspection light through the horizontally placed electro-optical panel. An inspection optical system that constitutes an inspection optical path that is reflected and projected onto the projection surface in the vertical direction, and a light source that emits the inspection light that is transmitted or reflected by the electro-optical panel, the optical axis of which is the vertical direction And a light source.

  According to such an apparatus according to the present invention, it is possible to reduce the projection space taken in the horizontal direction by projecting the display image in the ceiling direction or the floor direction, and to reduce the size of the inspection apparatus when arranged on the floor surface. Can be achieved. By eliminating the reflection mirror that reflects the light from the light source and changes the optical path, it is possible to improve the visibility of display defects and increase the amount of light by eliminating dirt and light loss from the reflection mirror. Inspection can be performed.

In the present invention, the projection surface is a screen.
In the present invention, the screen is disposed on a ceiling or a floor surface.

  An inspection method for an electro-optical device according to the present invention is an inspection method for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface, and transmits or transmits inspection light to the horizontally placed electro-optical panel. The step of reflecting and projecting onto the projection plane in the vertical direction, and the lens surface of a photographing camera that captures the luminance distribution of the inspection pattern on the projection plane, or the lens of the projection lens constituting a part of the inspection optical system Removing foreign matter adhering to the surface or the surface of the projection surface by using an air blower and a suction unit.

  According to such a method of the present invention, since the air blower and the suction part are provided in the vicinity of the lens surface of the photographing camera, when the projection direction is directed toward the ceiling, the foreign matter is placed on the lens surface of the photographing camera that is directed upward. Can be prevented and erroneous determination can be prevented. Inspection accuracy is improved.

Embodiments of the invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is a schematic configuration diagram of an inspection apparatus for an electro-optical device according to a first embodiment of the present invention.
In FIG. 1, reference numeral 1 denotes a liquid crystal panel inspection apparatus. Here, in the present embodiment, a modularized liquid crystal panel, that is, the liquid crystal panel 100 to which a flexible printed circuit board (hereinafter referred to as FPC) 100-1 is attached and housed in a case together with dustproof glass (not shown) and the like. An example of an inspection apparatus for inspecting display defects (point defects, line defects, spot unevenness defects, etc.) will be described.

  The inspection apparatus 1 includes an inspection optical system 5 that constitutes an inspection optical path for transmitting an inspection image through the liquid crystal panel 100 in the vertical direction and directly projecting the inspection image onto the screen 17 through an optical member such as the projection lens 18, and the liquid crystal panel 100. CCD camera 6 that is a photographic camera having a viewing angle for imaging the luminance distribution on the screen 17 when driven with a predetermined inspection pattern, a stage 7 that holds the liquid crystal panel 100 horizontally on the inspection optical path, and an inspection A probe unit 8 as a signal transmission means for transmitting an inspection signal for displaying a predetermined inspection image on the liquid crystal panel 100 held on the optical path, and an arbitrary filter means are selectively inserted and held on the inspection optical path. The temperature adjustment of the liquid crystal panel 100 by heating or cooling the filter insertion / removal mechanism section 9 and the liquid crystal panel 100 held on the inspection optical path. A temperature adjusting device 10 to be performed; a screen 17 which is a projection surface arranged on the upper portion of the housing 2 so that the position thereof can be adjusted up and down; an air blow 61 for blowing off foreign matter adhering to the lens surface of the CCD camera 6 with air; A suction unit 62 that sucks the blown-off foreign matter together with air, an air blow 81 that blows off the foreign matter adhering to the lens surface of the projection lens 18 with air, and a suction unit 82 that sucks the blown-off foreign matter together with air, Is included in the housing 2 to constitute a main part. Further, the housing 2 is provided with an ionizer (which will be described later with reference to FIGS. 2 and 3) as static electricity removing means for removing static electricity from the lens surface of the CCD camera 6 and the lens surface of the projection lens 18. Also good.

The inspection optical system 5 is an inspection having characteristics equivalent to those of an actual machine on which a lamp 15 that is a light source that emits inspection light such as white light upward in the vertical direction and a liquid crystal panel 100 to be inspected are mounted below the housing 2. The optical design unit 16 for generating light and the inspection light emitted from the lamp 15 through the optical design unit 16 pass through the liquid crystal panel 100 held horizontally on the stage 7 as it is in the vertical direction and pass through the liquid crystal panel 100 as it is. And a projection lens 18 as an optical member that is interposed on the vertical inspection optical path and adjusts the focal length of the inspection light so as to project onto the upper screen 17, and is emitted from the lamp 15. The inspection light passes through the optical design unit 16 through the liquid crystal panel 100 in the vertical direction, is projected by the projection lens 18, and is projected on the screen 17 arranged on the upper portion of the housing 2 in the vertical direction without changing the direction. It has become.

  The optical design unit 16 is designed to correspond to an optical system for a projector, and includes a first multi-lens 50, an ND (neutral density) filter 51 as a light amount adjustment filter for adjusting the light amount of inspection light, and ultraviolet rays. Filter 52, second multi-lens 53, PBS (Polarized Beam Splitter) unit 54, condenser lens (condensing lens) 55, and color that transmits inspection light in a predetermined wavelength region such as green, red, and blue And a filter 56.

The housing 2 has, for example, a width W = 80 cm and a height H = 2 m, and has a configuration in which inspection light is projected in the horizontal direction as in the past (width W = 2 m, height H = 1 m). In comparison, the height in the vertical direction is increased, but the installation space on the floor is very small.
The stage 7 is constituted by a rectangular plate-like member that is horizontally supported in the housing 2 via a stage operation mechanism unit 25 (described later), and the liquid crystal panel 100 to be inspected is mounted on the upper surface of the stage 7. A recess 20 is provided for placement.

The liquid crystal panel 100 may have various sizes ranging from 0.5 to 1.4 inches, for example, and the screen 17 has a size of about 35 inches, for example.
Further, the projection lens 18 can also be replaced, and the projection lens 18 having a different focal length can be used according to the size of the liquid crystal panel 100.

  In this case, the recess 20 has a shape that substantially conforms to the external shape of the liquid crystal panel 100, and further includes a positioning member such as a pin (not shown) in the main part, thereby positioning the placed liquid crystal panel 100 at a predetermined position. In such a state, it is held horizontally. The stage 7 can be used by exchanging the one having the concave portion 20 corresponding to the size of the liquid crystal panel 100, or placing various sizes of liquid crystal panels in the concave portion 20 of a predetermined size using an adapter. Also good.

The stage 7 has an opening 21 for guiding inspection light to a display unit (not shown) of the liquid crystal panel 100 placed in the recess 20.
Further, a flange portion 23 for detachably mounting the stage 7 to the stage operation mechanism portion 25 is provided at the base portion of the stage 7.

The stage operation mechanism unit 25 includes an air cylinder 26 that is fixed horizontally in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 26 so that the piston rod 27 of the air cylinder 26 can be expanded and contracted horizontally in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become.
A stage mounting portion 28 is fixed to the tip of the piston rod 27, and the stage 7 is detachably fastened to the stage mounting portion 28 via the flange portion 23.

  In this case, as indicated by a solid line in FIG. 1, when the piston rod 27 is in the contracted position, the stage 7 is inserted between the optical design unit 16 and the projection lens 18 to inspect the display unit of the liquid crystal panel 100. On the other hand, as indicated by a two-dot chain line in FIG. 1, the specifications of each part are set so that the display part of the liquid crystal panel 100 is retracted from the inspection optical path when the piston rod 27 is in the extended position. Yes. As shown in the figure, when the piston rod 27 is extended before the start of inspection or after the end of inspection, the stage 7 pushes open the opening / closing window 29 provided in the housing 2, so that the liquid crystal panel 100 is mounted on the housing 2. It is exposed to the outside and can be replaced or removed.

The probe unit 8 is supported in the housing 2 via a probe operation mechanism unit 33 (described later), and corresponds to each electrode terminal (not shown) arranged on the FPC 100-1 of the liquid crystal panel 100. Thus, a plurality of probes 30 that can be electrically connected are provided.
The probe unit 8 transmits a predetermined drive signal generated by the panel drive device 32 to the liquid crystal panel 100 when each probe 30 is electrically connected to each electrode terminal on the FPC 100-1. It has become.

  The probe operation mechanism unit 33 includes an air cylinder 34 that is vertically fixed in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 34 so that the piston rod 35 of the air cylinder 34 expands and contracts vertically in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become.

  Further, a probe unit mounting portion 36 is fixed to the tip of the piston rod 35, and the probe unit 8 is fastened and fixed to the probe unit mounting portion 36 so as to be detachable.

  In this case, the probe unit 8 is opposed to each electrode terminal on the FPC 100-1 of the liquid crystal panel 100 in which each probe 30 is held on the inspection optical path, and the piston rod 35 is in the extended position (lowering position). Each probe 30 is electrically connected to each electrode terminal on the FPC 100-1 (see FIG. 1), and each electrode terminal on the FPC 100-1 is connected to each electrode terminal when the piston rod 35 is in the contracted position (upward position). Specifications of each part are set so that the probe 30 is separated (not shown).

  The filter insertion / removal mechanism unit 9 is, for example, for selectively inserting and holding an arbitrary filter means 40 on the inspection optical path that coincides with the vertical optical axis of the projection lens 18 and is parallel to the inspection optical path. The shaft portion 41 is erected in the housing 2, and a plurality of (four in this embodiment) trays 42 are rotatably supported on the shaft portion 41.

  A concave portion 43 for mounting and holding the filter means 40 is provided on the upper surface of each tray 42, and inspection light is sent to the filter means 40 placed in each concave portion 43 at the bottom of each concave portion 43. An opening 44 for guiding is provided.

  The filter insertion / removal mechanism unit 9 normally holds each tray 42 at a retracted position from the inspection optical path, and a predetermined tray 42 is selected by an operator or the like and a predetermined rotation angle is set from the retracted position. Thus, the filter means 40 held on the tray is exposed to the inspection optical path.

  In this embodiment, each tray 42 has a filter means 40, for example, a viewing angle compensation filter as a contrast enhancement filter for enhancing the contrast of inspection light after passing through the liquid crystal panel 100, and green (G), blue (B ), Red (R), etc., a color filter that transmits inspection light in a predetermined wavelength region, an ND (Neutral Density) filter as a light amount adjustment filter, and the like are mounted. Here, it is desirable that each filter means 40 has optical characteristics equivalent to various filters of a liquid crystal device that actually mounts the liquid crystal panel 100 to be inspected.

  The temperature adjusting device 10 adjusts the temperature of the liquid crystal panel 100 by blowing warm air or cold air to the liquid crystal panel 100 held on the inspection optical path. The blower device 45 and drive control of the blower device 45 are performed. It has a control unit (not shown) for performing and a temperature sensor (not shown) embedded in the stage 7 in the vicinity of the liquid crystal panel 100. The control unit is provided with a control panel (not shown) for performing temperature setting and the like, and the control unit determines the amount of hot air or cold air blown from the blower device 45 based on the detected temperature from the temperature sensor and its temperature. As a result, the liquid crystal panel 100 is controlled to a desired set temperature.

  As for the air blow 61 and the suction unit 62 for blowing and sucking foreign matter adhering to the lens surface of the CCD camera 6 with air, air is supplied from the factory air supply mechanism (not shown) to the inside of the housing 2 by a tube (not shown). It is introduced into the air blow 61 and led out to a factory air suction mechanism (not shown) outside the housing 2 through a tube (not shown) connected to the suction part 62. Similarly, with respect to the air blow 81 and the suction unit 82 for blowing off and sucking foreign matter adhering to the lens surface of the projection lens 18, air is supplied from the factory air supply mechanism (not shown) to the inside of the housing 2 by a tube (not shown). The air blow 81 is led to a suction mechanism (not shown) outside the housing 2 through a tube (not shown) connected to the suction part 82. As the cleaning air used, nitrogen N2 may be used in addition to air.

FIGS. 2 and 3 show an ionizer that removes static electricity from a portion (for example, the lens surface) that is near the air blow and suction portions and that wants to avoid the adhering of foreign matters.
FIG. 2 shows an ionizer disposed near the lens surface of the CCD camera 6. This ionizer has at least one or more discharge needles 70 arranged on the front surface and a high voltage power source, and applies an AC voltage to the discharge needles 70 to perform corona discharge to generate (+) and (-) ions. An ionizer main body 71 that is electrically connected to the ionizer main body 71, and a controller 72 that can control the generation of (+) and (-) ions and the strength of these ions.

  FIG. 3 shows an ionizer disposed near the lens surface of the projection lens 18. This ionizer has at least one or more discharge needles 90 arranged on the front surface and a high voltage power source, and applies an AC voltage to the discharge needles 90 to perform corona discharge to generate (+) and (-) ions. An ionizer main body 91 that is electrically connected to the ionizer main body 91, and a controller 92 that can control the generation of (+) and (−) ions and the strength of these ions.

  By using an ionizer as shown in FIGS. 2 and 3, ion air can be sent to the surface of each lens and its vicinity to eliminate static electricity. By preventing charging of the lens surface of the CCD camera 6 and the lens surface of the projection lens 18 due to static electricity, adhesion of foreign matters such as dust can be prevented.

Next, the operation and effect of the inspection apparatus 1 configured as described above will be described.
First, the operator moves the stage 7 to the retracted position from the inspection optical path by operating the air cylinder 26 via a pneumatic control device (not shown). In this state, the liquid crystal panel 100 to be inspected is positioned and placed on the recess 20 of the stage 7.

  Thereafter, the operator operates the air cylinder 26 via the pneumatic control device to move the stage 7 to the insertion position between the optical design unit 16 and the projection lens 18. Thereby, the display unit of the liquid crystal panel 100 placed on the stage 7 is held at a predetermined position on the inspection optical path.

Thereafter, the operator lowers the probe unit 8 by operating the air cylinder 34 via the pneumatic control device, and the probes 30 of the probe unit 8 are arranged on the FPC 100-1 of the liquid crystal panel 100. Make electrical connections to the terminals.
Thereafter, the operator operates the panel drive device 32 and applies a predetermined drive signal to the liquid crystal panel 100. As a result, a predetermined inspection image is projected on the screen 17 at the top of the housing 2.

  Thereafter, the luminance distribution on the screen 17 when the liquid crystal panel 100 is driven with a predetermined inspection pattern is picked up by the CCD camera 6, and display defects (point defects, line defects, spot unevenness defects, etc.) on the liquid crystal panel 100 are picked up from the picked-up results. ) Is automatically detected. This automatic detection technique is disclosed in Japanese Patent Laid-Open No. 11-174398, which is a prior art by the present applicant.

  Therefore, detection of point defects and the like can be automatically detected regardless of the skill level of the operator. In addition, since point defects and the like can be automatically detected, fatigue of the operator's eyes can be reduced. Further, when performing a projection inspection of the liquid crystal panel, the installation area of the automatic inspection apparatus can be reduced and the space can be saved by emitting the inspection light in the vertical direction and projecting the projection screen overhead.

  Here, at the time of such an inspection, the operator selectively moves each tray 42 of the filter insertion / removal mechanism unit 9 onto the inspection optical path, and causes each filter means 40 to act on the emitted light from the liquid crystal panel 100. Thus, an inspection image in which the characteristics of the inspection light are arbitrarily controlled can be observed.

  For example, by inserting a viewing angle compensation filter on the inspection optical path, an inspection image with enhanced contrast can be observed, and detection of point defects and the like can be facilitated.

In addition, by inserting a predetermined color filter on the inspection optical path, it is possible to observe an inspection image limited to the wavelength region of each color such as G, B, R, etc., under conditions optimal for each color optical path of the actual machine. Can be inspected.
Further, if the ND filter is inserted into and removed from the inspection optical path, a bright spot inspection of a panel that requires high illuminance and other inspection that does not require high illuminance can be performed without changing the amount of light emitted from the lamp 15. it can.

In addition, the operator can observe the inspection image under a predetermined high temperature condition or low temperature condition by operating the temperature adjustment device 10 and managing the temperature of the liquid crystal panel 100.
Furthermore, since the reflection mirror can be omitted, it is possible to eliminate the light amount loss due to the reflection of the inspection light. Further, since the reflection mirror is eliminated, the trapezoidal distortion of the projected image is eliminated, and an angle of view close to a rectangle can be displayed. As a result, the error component for correcting the trapezoidal image into a rectangular image is reduced, so errors such as defect coordinate values are reduced, and more accurate inspection can be performed.

  Since the screen surface is faced downward, foreign matter will not adhere to at least the surface and erroneous determination will not occur. Furthermore, since it is assumed that a foreign object adheres to the lens surface of the photographing camera or projection lens that is facing upward and erroneous determination is made, a mechanism by an air blow and suction unit is provided to remove the foreign object by blowing it off with air. Further, by providing an ionizer near the lens surface of the photographing camera or projection lens to prevent electrostatic charging, it is possible to further prevent foreign matters such as dust from adhering. Since no foreign matter adheres to the lens surface, there is no defect in the inspection image projected on the surface of the screen 17, and erroneous determination can be prevented.

Note that, as in the present embodiment, the inspection light may be projected in a vertical direction so as to be directed upward from below and projected onto an upper projection surface (screen), or the inspection light may be vertically directed so as to be directed downward from above. It is good also as a structure which projects on the direction and projects on the projection surface (screen) arrange | positioned below.
Further, the upper or lower portion of the housing 2 may be opened, and the ceiling or floor surface may be used as the projection surface. Of course, it is good also as a structure which makes a screen a different body and arrange | positions a screen on a ceiling surface or a floor surface.

[Second Embodiment]
FIG. 4 shows a schematic configuration diagram of a liquid crystal panel inspection apparatus according to the second embodiment of the present invention. In the inspection apparatus 1A of the present embodiment, the lamp 15 that is a light source is disposed on the ceiling side in the housing 2, and the screen 17 that is a projection surface on which the inspection image is projected is disposed on the floor surface side in the housing 2. ing. The inspection light emitted from the lamp 15 as the light source is projected in the vertical direction so as to go from the upper side to the lower side, and is projected onto the screen 17 which is a projection surface arranged below. Since the top-and-bottom relationship is opposite to that of the first embodiment shown in FIG.

  With respect to the stage 7 that holds the liquid crystal panel 100 horizontally on the inspection optical path of the inspection optical system 5, the concave portion 20 on which the liquid crystal panel 100 is placed is formed on the upper side of the stage 7, and the liquid crystal placed on the concave portion 20. An opening 21 for guiding the inspection light from the lamp 15 vertically downward, that is, below the stage 7 is opened at a position corresponding to a display unit (not shown) of the panel 100.

  The inspection light emitted downward from the lamp 15 through the optical design unit 16 through the vertical direction passes through the liquid crystal panel 100 held horizontally on the stage 7 as it is and is projected by the projection lens 18 without changing the direction. It is projected onto a screen 17 at the bottom of the housing 2.

  As for the air blow 81 and the suction part 82 for blowing off and sucking foreign matter adhering to the lens surface of the projection lens 18, air is blown from the factory air supply mechanism (not shown) through the tube (not shown) in the housing 2. A tube (not shown) that is introduced into 81 and connected to the suction part 82 is led out to a factory air suction mechanism (not shown) outside the housing 2.

  Further, near the outer periphery of the screen 17 at the lower part of the housing 2, an air blow 201 that blows off foreign matter adhering to the surface of the screen 17 and a suction unit 202 that sucks the blown foreign matter are provided on the screen surface. It is arrange | positioned in the position (near both side surfaces of the housing | casing 2). As for the air blow 201 and the suction unit 202, air is introduced into the air blow 201 in the housing 2 by a tube (not shown) from a factory air supply mechanism (not shown) and connected to the suction unit 202 (not shown). ) To a factory air suction mechanism (not shown) outside the housing 2. As the cleaning air used, nitrogen N2 may be used in addition to air.

  FIG. 5 shows an ionizer disposed near the surface of the screen 17. This ionizer has at least one or more discharge needles 210 arranged on the front surface and a high voltage power source, and applies an AC voltage to the discharge needles 210 to perform corona discharge to generate (+) and (−) ions. An ionizer main body 211 and a controller 212 that is electrically connected to the ionizer main body 211 and can control the generation of (+) and (−) ions and the strength of these ions.

  With an ionizer as shown in FIG. 5, ion air can be sent to the vicinity of the screen surface, and at least the screen surface can be neutralized. By preventing electrification of the surface of the screen 17 due to static electricity, it is possible to prevent adhesion of foreign matters such as dust. Since no foreign matter adheres to the screen surface, inspection images taken by the photographic camera 6 do not cause defects and can be prevented from being erroneously determined. Has been.

The ionizer disposed in the vicinity of the lens surface of the projection lens 18 is the same as that shown in FIG.
The operation and effect of the inspection apparatus 1A having the configuration of the second embodiment shown in FIG. 4 is the same as that of the first embodiment shown in FIG.

Here, a TFT active matrix driving type liquid crystal device with a built-in driving circuit, which is an example of an electro-optical device, will be described.
FIG. 6 shows a liquid crystal device. FIG. 7 is a plan view of an element substrate in a liquid crystal panel as viewed from the side of the counter substrate together with each component formed thereon. FIG. FIG.

  6 and 7, in the liquid crystal panel according to the present embodiment, the element substrate 110 on which the TFT is formed and the counter substrate 120 are arranged to face each other.

  A liquid crystal layer 150 is sealed between the element substrate 110 and the counter substrate 120, and the element substrate 110 and the counter substrate 120 are mutually connected by a sealing material 152 provided in a seal region located around the image display region 110a. It is glued to. The sealing material 152 is made of, for example, a thermosetting resin, heat and photo-curing resin, photo-curing resin, UV-curing resin, or the like for bonding the two substrates, and after being applied on the element substrate 110 in the manufacturing process, It is cured by heating, light irradiation, light irradiation, ultraviolet irradiation or the like.

  Vertical conduction members 106 are provided at the four corners of the counter substrate 120, and electrical conduction is established between the vertical conduction terminals provided on the element substrate 110 and the counter electrode 121 provided on the counter substrate 120. .

  6 and 7, a light-shielding frame 153 that defines the image display region 110a is provided on the counter substrate 120 side in parallel with the inside of the seal region where the sealant 152 is disposed. It goes without saying that the frame 153 may be provided on the element substrate 110 side. Of the peripheral area extending around the image display area 110a, the data line driving circuit 101 and the external circuit connection terminal 102 are provided along one side of the element substrate 110 in the outer portion of the seal area where the sealing material 152 is disposed. The scanning line driving circuit 104 is provided along two sides adjacent to the one side. Further, on the remaining side of the element substrate 110, a plurality of wirings 105 are provided for connecting between the scanning line driving circuits 104 provided on both sides of the image display region 110a.

  In FIG. 7, an alignment film is formed on the element substrate 110 on the pixel electrode 119 after the pixel switching TFT, the scanning line, the data line, and the like are formed. On the other hand, on the counter substrate 120, in addition to the counter electrode 121, an alignment film is formed in the uppermost layer portion. The liquid crystal layer 150 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films.

  A sampling circuit (not shown) is provided in a region on the element substrate 110 below the frame 153. The sampling circuit samples the image signal on the image signal line in accordance with the sampling circuit drive signal supplied from the data line drive circuit 101 and supplies it to the data line of each pixel.

  For example, when applied to a reflection type electro-optical panel such as LCOS, the lamp 15 and the optical design unit 16 are suitably disposed between the stage 7 and the screen 17 together with the half mirror and the like. It is also possible to use a device.

  In the above embodiment, the case where the electro-optical device is applied to a liquid crystal device such as a liquid crystal panel has been described. However, the present invention is not limited to this, and the electroluminescence device, in particular, an organic electroluminescence device, an inorganic electroluminescence device. Etc., plasma display devices, devices using electron-emitting devices (Field Emission Display and Surface-Conduction Electron-Emitter Display), LED (Light Emitting Diode) display devices, electrophoretic display devices, thin cathode ray tubes, liquid crystal shutters, etc. The present invention can be applied to inspection apparatuses for various electro-optical devices such as a small television and a device using a digital micromirror device (DMD).

1 is a schematic configuration diagram of an inspection apparatus for an electro-optical device according to a first embodiment of the present invention. The block diagram which shows an example of the static eliminating device in the imaging | photography camera of embodiment of FIG. The block diagram which shows an example of the static eliminating device in the projection lens of embodiment of FIG. FIG. 6 is a schematic configuration diagram of an inspection apparatus for an electro-optical device according to a second embodiment of the present invention. The block diagram which shows an example of the static eliminating device in the screen of embodiment of FIG. The top view which showed the liquid crystal device and looked at the element board | substrate in a liquid crystal panel from the counter substrate side with each component formed on it. H-H 'sectional drawing of FIG.

Explanation of symbols

1, 1A ... Liquid crystal panel inspection device (electro-optical device inspection device)
2 ... Case 5 ... Inspection optical system 6 ... CCD camera (photographing camera)
7 ... Stage 15 ... Lamp (light source)
17 ... Screen (projection surface)
18 ... Projection lens 61, 81, 201 ... Air blow 62, 82, 202 ... Suction part 70, 90, 210 ... Discharge needle 71, 91, 211 ... Main body of ionizer 100 ... Liquid crystal panel (electro-optical panel)

Claims (9)

An inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface,
An inspection optical system that constitutes an inspection optical path that transmits or reflects inspection light to the horizontally placed electro-optical panel and projects it onto the projection surface in the vertical direction;
A photographing camera that images a luminance distribution on the projection plane when the electro-optical panel is driven with a predetermined inspection pattern;
An air blow that blows off foreign matter adhering to the lens surface of the photographing camera, and a suction unit that sucks the blown foreign matter;
An inspection apparatus for an electro-optical device, comprising: An inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface,
An inspection optical system that constitutes an inspection optical path that transmits or reflects inspection light to the horizontally placed electro-optical panel and projects it onto the projection surface in the vertical direction;
A part of the inspection optical system, a projection lens for projecting the transmitted light or reflected light of the electro-optical panel on the projection surface;
An air blow that blows off foreign matter adhering to the lens surface of the projection lens, and a suction unit that sucks the blown foreign matter;
An inspection apparatus for an electro-optical device, comprising: An inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface,
An inspection optical system that constitutes an inspection optical path that transmits or reflects inspection light to the horizontally placed electro-optical panel and projects it onto the projection surface in the vertical direction;
An air blow for blowing off foreign matter adhering to the surface of the projection surface, and a suction unit for sucking the blown foreign matter;
An inspection apparatus for an electro-optical device, comprising: A light source that emits the inspection light that is transmitted or reflected through the electro-optical panel, the light axis of which is the vertical direction;
The electro-optical device inspection apparatus according to claim 1, further comprising: Static electricity removing means for removing static electricity in the vicinity of the air blow and suction part to which the foreign matter adheres,
5. The electro-optical device inspection apparatus according to claim 1, further comprising: An inspection apparatus for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface,
An inspection optical system that constitutes an inspection optical path that transmits or reflects inspection light to the horizontally placed electro-optical panel and projects it onto the projection surface in the vertical direction;
A light source that emits the inspection light that is transmitted or reflected by the electro-optical panel, the light axis of which is the vertical direction; and
An inspection apparatus for an electro-optical device, comprising:   The electro-optical device inspection apparatus according to claim 1, wherein the projection surface is a screen.   The electro-optical device inspection apparatus according to claim 7, wherein the screen is disposed on a ceiling or a floor surface. An inspection method for an electro-optical device that projects an inspection image displayed on an electro-optical panel onto a projection surface,
Projecting or reflecting inspection light to the electro-optical panel placed horizontally and projecting it onto the projection surface in the vertical direction;
Foreign matter adhering to the lens surface of a photographing camera that images the luminance distribution of the inspection pattern on the projection surface, the lens surface of a projection lens that forms part of the inspection optical system, or the surface of the projection surface Removing using an air blow and suction part;
An inspection method for an electro-optical device, comprising:

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