JP2007093495A - Imaging device and optical apparatus measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging device capable of detecting mounting displacement and gradient and performing accurate positioning; and also to provide an optical apparatus measuring device used for mounting and positioning the imaging device. <P>SOLUTION: Four detecting pixels PD1-PD4 are disposed around an imaging area 12 of the imaging device 11, each detecting pixel is constituted by four light-receiving elements A1-D1, ... A4-D4 that are vertically and horizontally symmetrical with respect to the center, each detecting pixel is irradiated with a laser beam whose beam diameter is proportional to the distance, and based on the output value of each light-receiving element of each detecting pixel, mounting displacements Δx, Δy and Δz and gradients Δθ, Δϕ and Δψ in the vertical, horizontal, and optical axis directions of the imaging device with respect to the mounting position can be detected. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an image sensor and an optical instrument measuring apparatus used for mounting position adjustment of the image sensor.

  An image sensor such as a CCD or CMOS sensor that records an image by photoelectrically converting subject light is incorporated in a main body of a camera or the like. In order to accurately capture a subject image, the center of the imaging area of the imaging device and the optical axis of the imaging lens must match, and the light receiving surface of the imaging device must be orthogonal to the optical axis. For this reason, the image pickup device is mounted with high precision alignment during mounting and assembly on an image pickup apparatus such as a camera.

For example, in the method of adjusting the relative position between the imaging element and the imaging lens shown in FIG. 5A of Japanese Patent Application Laid-Open No. 2004-12960, as shown in FIG. 11, the optical axis A of the imaging lens and the light reception of the imaging element 101 Arranged so that the planes are orthogonal to each other, the light incident on the imaging lens from the light source is at least three positions around the imaging area 102 of the imaging element 101 and equidistant from the center O of the imaging area 102 (see FIG. The light receiving sensors S1 to S4 arranged in (4 in the illustrated example) receive light, and based on the output from the light receiving sensor, measure the positions of the image pickup lens and the image pickup device 101, and based on the measurement data, The relative position of the imaging lens is adjusted. According to this method, the relative position measurement in the vertical direction, the horizontal direction, and the optical axis direction can be accurately performed without using a complicated measurement jig.
Japanese Patent Laid-Open No. 2004-12960

  However, the technique disclosed in the above publication is based on the premise that the optical axis of the imaging lens and the light receiving surface of the imaging device are orthogonal to each other, and the inclination Δθ of the optical axis direction θ of the surface orthogonal to the optical axis. , Measurement of the inclination Δφ in the vertical direction φ of the surface orthogonal to the optical axis, and the inclination Δψ in the horizontal direction ψ of the surface orthogonal to the optical axis (hereinafter, these inclinations are simply expressed as inclinations Δθ, Δφ, Δψ) There was a problem that could not be done.

  The present invention has been made to solve the above-described problems in the conventional relative position measurement method for an image sensor, and enables an image sensor capable of highly accurate mounting alignment around an axis with respect to a mounting apparatus, and the image sensor. It is an object of the present invention to provide an optical instrument measuring apparatus used for mounting position adjustment.

  In order to solve the above-described problem, the invention according to claim 1 is arranged at positions separated from each other in at least one of the imaging area and the second direction substantially orthogonal to the first direction or the first direction. In addition, the imaging device is configured to include a plurality of detection pixels whose light-receiving surfaces are two-dimensionally divided.

  According to a second aspect of the present invention, the light-receiving surface is disposed at a position separated in at least one direction of the imaging imaging area and the first direction or the second direction substantially orthogonal to the first direction. A holding unit that holds an optical device to be measured on which an imaging device having a plurality of detection pixels divided in two dimensions is mounted, and the irradiation area of each detection pixel of the imaging device varies depending on the distance A first calculation that calculates an error amount in a predetermined axial direction of the imaging element with respect to the optical device under measurement based on a light source that irradiates a light beam and a light output from each divided light receiving surface of each detection pixel A second arithmetic circuit for calculating a rotation amount of the imaging device around the predetermined axial direction with respect to the optical device under measurement based on a calculation amount relating to each detection pixel between the circuit and different detection pixels; With optical equipment It constitutes a constant device.

  According to a third aspect of the present invention, in the optical instrument measuring apparatus according to the second aspect, the detection pixels are arranged in the first and second directions, respectively, and the detection pixels have four light receiving elements arranged in a square. The first arithmetic circuit obtains the sum of the optical outputs of the two light receiving elements in two rows arranged in the second direction, and receives each light in the two rows in the second direction. Calculating the first error amount in the first direction from the difference between the sums of the light outputs of the elements, and obtaining the sum of the light outputs of the two light receiving elements in two rows arranged in the first direction; The second error amount in the second direction is calculated from the difference between the sums of the light outputs of the two light receiving elements in the two rows in the first direction, and the light outputs of the four light receiving elements constituting each detection pixel are calculated. The light of the optical device orthogonal to the first and second directions from the difference between the sum of the values and a predetermined value It is characterized in that for calculating a third error amount in the direction.

  According to a fourth aspect of the present invention, in the optical instrument measuring apparatus according to the third aspect, the second arithmetic circuit includes a difference in the second error amount between the detection pixels located apart in the first direction. Or, based on the difference in the first error amount between the detection pixels located apart in the second direction, the inclination Δθ around the optical axis direction is calculated and located away in the second direction. On the basis of the difference in the third error amount between the detection pixels, an inclination Δφ around the axial direction in the first direction is calculated, and the first difference between the detection pixels located apart in the first direction is calculated. On the basis of the difference between the three error amounts, an inclination Δψ around the axial direction related to the second direction is calculated.

  According to a fifth aspect of the present invention, the imaging area and the first direction or the second direction substantially orthogonal to the first direction are arranged at positions separated in at least one direction, and the light receiving surface thereof is arranged. A holding unit that holds an optical device to be measured on which an image sensor having a plurality of detection pixels divided in two dimensions is mounted, a light source device that irradiates each detection pixel of the image sensor with a parallel light beam, and each detection Based on the light output from each divided light receiving surface of the pixel, a first arithmetic circuit that calculates an error amount in a predetermined axial direction of the imaging element for the optical device under measurement, and between different detection pixels, An optical instrument measuring apparatus is provided that includes a second arithmetic circuit that calculates the amount of rotation of the imaging device around the predetermined axial direction with respect to the optical instrument under measurement based on the amount of calculation related to each detection pixel. Is.

  According to a sixth aspect of the present invention, the imaging area and the first direction or the second direction substantially orthogonal to the first direction are respectively arranged at positions separated in at least one direction, and the light receiving surface thereof is A holding unit that holds an optical device to be measured, which includes an imaging element having a plurality of detection pixels divided in two dimensions, and a photographing lens that forms a subject image in the imaging area of the imaging element; and the photographing lens A light source device that emits a parallel light beam to each detection pixel of the image sensor, and the image sensor in the predetermined axial direction based on the light output from each divided light receiving surface of each detection pixel A first arithmetic circuit that calculates an error amount with the photographic lens, and a calculation amount relating to each detection pixel between different detection pixels, and the imaging element and the photographic lens around the predetermined axis direction Rotation amount And it constitutes an optical apparatus measuring device and a second arithmetic circuit for calculating.

  According to a seventh aspect of the present invention, in the optical instrument measuring apparatus according to any one of the second to sixth aspects, the light source device includes a light source that generates a light beam to be irradiated for each detection pixel of the imaging element. It is characterized by that.

  According to an eighth aspect of the present invention, in the optical instrument measuring apparatus according to any one of the second to sixth aspects, the light source device includes a light source that generates a light beam, and detection of the imaging element in which the light beam is selected. And moving means for moving the light source to a position where the pixel is irradiated.

  According to the first aspect of the present invention, the detection pixel formed on the image pickup device and having the light receiving surface divided in two dimensions is irradiated with a light beam, so that the output from the detection pixel causes the image pickup device in the vertical direction and the horizontal direction. It is possible to realize an imaging device capable of measuring the amount of error in the direction and optical axis direction (mounting position deviation) and the amount of rotation around the axis. According to the second aspect of the present invention, the detection pixel formed on the image sensor is irradiated with light whose irradiation area expands or narrows depending on the distance, so that the output from the detection pixel can generate a predetermined value of the image sensor. It is possible to realize an optical instrument measuring apparatus that can measure an error amount in the axial direction (vertical direction, horizontal direction, optical axis direction) and rotation amounts (tilts) Δθ, Δφ, Δψ around a predetermined axial direction. According to the invention of claim 3, it is possible to measure the error amount of the image sensor in the vertical direction, the horizontal direction, and the optical axis direction with high accuracy. According to the invention of claim 4, it is possible to measure the rotation amounts (inclinations) Δθ, Δφ, Δψ around the axial direction of the imaging device in the vertical direction, horizontal direction, and optical axis direction with high accuracy. . According to the invention of claim 5, by irradiating the detection pixel formed on the image sensor with a parallel light beam, the error amount and the light in the vertical direction and the horizontal direction of the image sensor are determined by the output from the detection pixel. It is possible to measure the amount of rotation (tilt) Δθ in the axial direction. According to the invention of claim 6, detection is performed by irradiating the detection pixel formed on the image sensor with laser light that passes through the center of the imaging lens and whose irradiation position moves from the detection pixel center depending on the distance. Measurement of relative vertical, horizontal, and optical axis direction error amounts and rotation amounts (tilts) Δθ, Δφ, and Δψ in the axial direction in each direction based on the output from the pixel. It can be carried out. According to the seventh aspect of the present invention, the light source device can irradiate a plurality of light beams at a time, so that the measurement time can be shortened. Moreover, according to the invention which concerns on Claim 8, the measurement of the error amount and rotation amount with few light sources is attained.

  Next, the best mode for carrying out the present invention will be described.

Example 1
First, an embodiment of an image sensor according to the present invention will be described as a first embodiment with reference to the drawings. FIG. 1 is a plan view showing the configuration of the image sensor according to the present embodiment. This embodiment corresponds to the embodiment of the invention according to claim 1, and the first direction in claim 1 corresponds to the horizontal direction, and the second direction corresponds to the vertical direction. As shown in FIG. 1, in the image sensor 11 according to this embodiment, four detection pixels PD1 to PD4 are provided around an imaging area 12 used for imaging. Each of these detection pixels PD1 to PD4 is symmetric with respect to the center of each of the detection pixels PD1 to PD4 in the substantially vertical direction and the substantially horizontal direction and has four light receiving elements A1 to D1,..., A4 to D4. Each of the detection pixels PD1 to PD4 is arranged at positions separated from each other, in the illustrated example, at four corners.

  As shown in FIG. 2, the image sensor 11 configured in this manner is irradiated with laser light 22 having a beam diameter proportional to the irradiation distance from the laser light source 21 to each of the detection pixels PD1 to PD4. Thereby, each light receiving element A1 to D1,..., A4 to D4 of each detection pixel PD1 to PD4 outputs a signal corresponding to the amount of received light. Mounting position deviation measurement is performed based on the output values of the light receiving elements A1 to D1,..., A4 to D4 of the detection pixels PD1 to PD4.

  For example, a photodiode is used as the light receiving element constituting each of the detection pixels PD1 to PD4. The output value is detected by measuring the voltage and current of the circuit to which the photodiode (light receiving element) is connected. Of course, a phototransistor or the like may be used as the light receiving element instead of the photodiode. Although FIG. 2 shows the beam diameter of the laser beam 22 used for measurement expanding in proportion to the distance, the laser beam 22 whose beam diameter is narrowed in proportion to the distance may be used.

  FIGS. 3A to 3H are explanatory diagrams illustrating aspects of mounting position shift and inclination of the image sensor 11. That is, in FIG. 3A, the laser light is evenly applied to the four divided light receiving elements of the detection pixel (PD1 in the illustrated example), and there is no mounting position shift, and the image pickup element 11 is arranged at an appropriate position. The aspect which is shown is shown. 3B shows a mode in which the image sensor 11 is displaced in the horizontal direction (Δx movement), and FIG. 3C is a diagram in which the image sensor 11 is displaced in the vertical direction (Δy movement). FIG. 3D shows a mode in which the beam diameter of the laser light is small and the image sensor 11 is displaced in the optical axis direction (Δz movement).

  FIG. 3E shows a mode in which the image sensor 11 is arranged at an appropriate position without mounting position deviation and inclination. FIG. 3F shows a mode in which the laser beam is deviated in any of the four detection pixels, and the imaging element 11 is tilted around the axial direction in the optical axis direction (rotated in the θ direction). . In FIG. 3G, the beam diameter of the laser light irradiated to the detection pixels PD3 and PD4 is smaller than the beam diameter of the laser light irradiated to the detection pixels PD1 and PD2, and the imaging element 11 is in the vertical direction. The aspect which inclines around the axial direction which concerns on (rotation to a (psi) direction) is shown. In FIG. 3H, the beam diameters of the laser beams irradiated to the detection pixels PD1 and PD3 are smaller than the beam diameters of the laser beams irradiated to the detection pixels PD2 and PD4, and the image sensor 11 is in the horizontal direction. The aspect which inclines around the axial direction which concerns on (rotation to (phi) direction) is shown.

  The positional deviations in the vertical direction and the horizontal direction are obtained from the outputs of the light receiving elements A1 to D1,..., A4 to D4 for the detection pixels PD1 to PD4, and the inclinations θ, φ, and ψ are at least two of the detection pixels. It is obtained from the outputs of the light receiving elements A to D of PD1 to PD4. The positional deviation in the optical axis direction is obtained from the difference between the reference output and the sum of the outputs of the detection pixels PD1 to PD4. The arithmetic expressions (1) to (8) are shown below.

Horizontal mounting position deviation Δx (PD _n ):
Δx (PD _n ) = k ₁ {(PD _n A _n + PD _n B _n ) − (PD _n C _n + PD _n D _n )}
・ ・ ・ ・ ・ ・ ・ (1)
Vertical mounting position deviation Δy (PD _n ):
Δy (PD _n ) = k ₂ {(PD _n A _n + PD _n C _n ) − (PD _n B _n + PD _n D _n )}
(2)
Mounting position deviation Δz (PD _n ) in the optical axis direction:
Δz (PD _n ) = P _Z −k ₃ (PD _n sum) (3)
_{PD n sum = PD n A n} + PD n B n + PD n C n + PD n D n ······ (4)
Inclination Δθ in the θ direction: (When using detection pixels separated in the vertical direction)
Δθ = k ₄ {Δx _U (PD _n ) −Δx _D (PD _m )} (5)
(When using detection pixels separated in the horizontal direction)
Δθ = k ₅ {Δy _R (PD _n ) −Δy _L (PD _m )} (6)
Inclination Δφ in φ direction:
(Use detection pixels separated vertically)
Δφ = k ₆ {PD _n sum _U− PD _m sum _D } (7)
ψ direction inclination Δψ:
(Use detection pixels separated horizontally)
Δψ = k ₇ {PD _n sum _R −PD _m sum _L } (8)
n, m: 1, 2, 3, 4
U, D, R, L: top, subscript P _Z represents lower, right, left: receiving element A1~D1 as a reference, ..., the value K ₁ of the sum of the output of A4~D4 ~K _7: laser beam Coefficient determined by the spread angle and the distance between the laser light source 21 and the image sensor

  By each of the above equations, the mounting position shift and inclination of the image sensor 11 can be detected, and the mounting position shift and tilt of the image sensor 11 can be confirmed in the assembly of the camera.

FIG. 4 shows the relationship between the beam diameter of the laser light and the total PD _n sum of the light outputs of the photodiodes (light receiving elements) constituting the detection pixels. The vertical axis represents the total value PD _n sum of the optical outputs shown in equation (4). The horizontal axis represents the beam diameter determined by the distance between the detection pixels PD1 to PD4 and the laser light source 21. The change in PD _n sum is divided into region 1 and region 2 as shown in FIG. A third region exists between the region 1 and the region 2, but may be included in the region 2. In region 2, PD _n sum varies according to k ₈ / r ² . Here, k ₈ is a coefficient determined by the spread angle of the laser light, the distance between the laser light source 21 and the imaging element, and the detection pixel area, and r is the radius of the laser beam. When an image sensor is placed in this area 2, the inclinations Δφ and Δψ are obtained. In the region 1, the slopes Δφ and Δψ can be obtained similarly.

  FIG. 5 shows a configuration of an optical instrument measuring apparatus according to the present invention at the time of mounting alignment measurement. In this optical instrument measuring apparatus, the holding part 45 of the camera body 31 and the light source device 25 are firmly fixed to the base 35 so that the relative positional relationship does not shift. The holding portion 45 is provided with a guide for placing the camera body 31 so that the positional relationship between the camera body 31 and the light source device 25 is always kept constant. In FIG. 5, reference numeral 24 denotes a light source driver for driving the laser light source 21.

  A signal generated by irradiating the detection pixels PD <b> 1 to PD <b> 4 of the image sensor 11 with the laser light 22 is taken out from the output terminal 44 of the camera body 31, and is connected to the first arithmetic circuit 41 and the first through the signal line 43. It is input to an arithmetic circuit unit 40 having two arithmetic circuits 42. Here, the first arithmetic circuit 41 performs the calculations of the above formulas (1) to (4), while the second arithmetic circuit 42 performs the calculations of the formulas (5) to (8). It is. The result calculated by the arithmetic circuit unit 40 is input to the CPU 50, and the CPU 50 obtains measurement results (mounting position deviation and inclination of the image sensor 11) in a state synchronized with the light source device 25.

(Example 2)
FIG. 6 is a schematic view showing Example 2 of the optical instrument measuring apparatus according to the present invention. The configuration of the image sensor to be measured and the measurement operation principle are the same as those shown in the first embodiment. In the optical apparatus measuring apparatus according to the second embodiment, the detection pixels PD1 to PD4 of the image sensor 11 are irradiated with the laser beam 22a whose beam diameter is substantially constant regardless of the irradiation distance, and the horizontal and vertical mounting positions The deviation and the inclination Δθ in the θ direction can be measured. In this case, the arithmetic expressions for obtaining the mounting position deviation and the inclination Δθ in the θ direction can be obtained by the above arithmetic expressions (1), (2), (5), and (6). The configuration of the optical instrument measuring apparatus other than the laser beam with a constant beam diameter is the same as that of the first embodiment.

(Example 3)
FIG. 7 is a schematic view showing Example 3 of the optical instrument measuring apparatus according to the present invention. The configuration of the image sensor to be measured and the measurement operation principle are the same as those in the first and second embodiments. In the optical apparatus measuring apparatus according to the third embodiment, a camera body 31 is provided by attaching a lens barrel 32 provided with an imaging lens 34 to a camera body 31 on which the imaging element 11 is mounted. The detection pixels PD1 to PD4 of the image pickup device 11 are irradiated with the laser light 22b that has passed through the image pickup device 11, and the relative positional deviation and inclination between the image pickup device 11 and the image pickup lens 34 can be measured. In this case, the positional deviation and the inclination can be obtained by the calculations according to the above formulas (1) to (8).

  The detection pixels PD1 to PD4 of the image sensor 11 can detect a positional shift in the horizontal direction, the vertical direction, and the optical axis direction at each position. Therefore, when measuring only the positional deviation in the horizontal direction, vertical direction, and optical axis direction, as shown in FIGS. 3A to 3D, only one of the detection pixels PD1 to PD4 is used. It can be carried out. The configuration of the optical instrument measuring apparatus of this example is the same as that shown in Example 1 and Example 2 except for the above configuration shown in FIG.

Example 4
Example 4 of the optical instrument measuring apparatus according to the present invention will be described. This embodiment relates to the arrangement configuration of the laser light source 21. FIG. As for the arrangement of the laser light sources 21, a plurality (four in the illustrated example) may be arranged on the same plane as shown in FIG. 8, or one laser light source 21 is used as shown in FIG. You may comprise so that it may move on. When a plurality of laser light sources 21 are used, the entire configuration of the optical instrument measuring apparatus is as shown in FIG. 5, and a plurality of light beams can be irradiated at one time, so that the measurement time can be shortened. It becomes.

  When the single laser light source 21 is used to move on the same plane, the entire configuration of the optical instrument measuring apparatus is as shown in FIG. 10, for example, and measurement with a small number of light sources is possible. In this case, the light source device 25 is fixed to the movable stage 46, and the position of the laser light source 21 is moved by the movable stage 46. The CPU 50 controls the movable stage 46, the light source driver 24, and the arithmetic circuit unit 40, and a measurement result in a synchronized state is obtained based on the control of the CPU 50. In each of the above embodiments, the laser beam is used as the light beam. However, the light beam may be a light beam such as a light emitting diode.

It is a top view which shows the structure of the Example of the image pick-up element based on this invention. It is a figure which shows the measurement aspects, such as mounting position shift of the image pick-up element shown in FIG. It is explanatory drawing which shows the mounting position shift and inclination aspect of the image pick-up element shown in FIG. FIG. 2 is a diagram showing a relationship between a beam diameter of laser light in the image pickup device shown in FIG. 1 and a total PD _n sum of light outputs of light receiving elements constituting a detection element. It is a figure which shows the structure of Example 1 of the optical instrument measuring apparatus which concerns on this invention. It is a figure which shows schematic structure of the principal part of Example 2 of the optical equipment measuring apparatus which concerns on this invention. It is a figure which shows schematic structure of the principal part of Example 3 of the optical equipment measuring apparatus which concerns on this invention. It is the schematic which shows the arrangement configuration of the laser light source in Example 4 of the optical equipment measuring apparatus based on this invention. It is the schematic which shows the other arrangement configuration of the laser light source in Example 4 of the optical equipment measuring apparatus based on this invention. It is a figure which shows the structure of the optical instrument measuring device at the time of using the arrangement configuration of the light source shown in FIG. It is a top view which shows the structural example of the image pick-up element for the conventional relative position shift measurement.

Explanation of symbols

11 Image sensor
12 Imaging area
21 Laser light source
22 Laser light
24 Light source driver
25 Light source device
30 cameras
31 Camera body
32 Lens barrel
34 Imaging lens
35 base
40 Arithmetic circuit
41 First arithmetic circuit
42 Second arithmetic circuit
43 Signal line
44 Output terminal
45 Holding part
46 Movable stage
50 CPU
PD1,..., PD4 detection pixels A1 to D1,.

Claims (8)

  A plurality of imaging areas and a first direction or a second direction that is substantially orthogonal to the first direction are disposed at positions separated from each other in at least one direction, and the light receiving surface is divided in two dimensions. An image sensor having detection pixels.   A plurality of imaging areas and a first direction or a second direction that is substantially orthogonal to the first direction are disposed at positions separated from each other in at least one direction, and the light receiving surface is divided in two dimensions. A holding unit that holds an optical device to be measured on which an imaging element having a detection pixel is mounted; a light source device that irradiates each detection pixel of the imaging element with a light flux having a different irradiation area depending on a distance; and Based on the light output from each divided light-receiving surface of the detection pixel, a first arithmetic circuit that calculates an error amount in the predetermined axial direction of the imaging element for the optical device under measurement, and between different detection pixels An optical instrument measuring apparatus comprising: a second arithmetic circuit that calculates the amount of rotation of the imaging device around the predetermined axial direction with respect to the optical instrument to be measured based on an arithmetic amount relating to each detection pixel.   The detection pixels are arranged in the first and second directions, respectively, and each detection pixel is configured by four light receiving elements arranged in a square, and the first arithmetic circuit includes the second arithmetic circuit. The sum of the optical outputs of the two light receiving elements in the two rows arranged in the direction is obtained, and the first in the first direction is determined from the difference in the sum of the optical outputs of the light receiving elements in the two rows in the second direction. Is calculated, the sum of the light outputs of the two light receiving elements in two rows arranged in the first direction is obtained, and the sum of the light output of each light receiving element in the two rows in the first direction is calculated. The second error amount in the second direction is calculated from the difference between the first and second directions from the difference between the total light output of the four light receiving elements constituting each detection pixel and a predetermined value. The third error amount in the optical axis direction of the optical apparatus orthogonal to each other is calculated. Optics measuring device according.   The second arithmetic circuit includes the difference in the second error amount between the detection pixels located apart in the first direction or the second difference between the detection pixels located apart in the second direction. The inclination Δθ around the optical axis direction is calculated based on the difference in the error amount of 1, and the first error amount is calculated based on the difference in the third error amount between the detection pixels located apart in the second direction. An inclination Δφ around the axial direction according to the direction of the first direction is calculated, and based on the difference between the third error amounts between the detection pixels located away from the first direction, around the axial direction according to the second direction The optical instrument measuring apparatus according to claim 3, wherein an inclination Δψ of the optical device is calculated.   A plurality of imaging areas and a first direction or a second direction that is substantially orthogonal to the first direction are disposed at positions separated from each other in at least one direction, and the light receiving surface is divided in two dimensions. From a divided light receiving surface of each detection pixel, a holding unit that holds an optical device to be measured in which an imaging device having a detection pixel is mounted, a light source device that irradiates each detection pixel of the imaging device with a parallel light beam, A first arithmetic circuit for calculating an error amount in a predetermined axial direction of the imaging device with respect to the optical device to be measured, and a calculation amount relating to each detection pixel between different detection pixels based on the optical output of And a second arithmetic circuit that calculates a rotation amount of the imaging device around the predetermined axial direction with respect to the optical device under measurement.   A plurality of imaging areas and a first direction or a second direction that is substantially orthogonal to the first direction are disposed at positions separated from each other in at least one direction, and the light receiving surface is divided in two dimensions. A holding unit that holds an optical device to be measured that includes an imaging element having a detection pixel, and a photographing lens that forms a subject image in the imaging area of the imaging element, and the imaging element via the photographing lens. Based on the light source device that emits a parallel light flux for each detection pixel and the light output from each divided light receiving surface of each detection pixel, the amount of error between the imaging element and the photographing lens in a predetermined axial direction is calculated. And a second calculation unit that calculates a rotation amount of the imaging element and the photographing lens around the predetermined axis direction based on a calculation amount relating to each detection pixel between the first detection circuit and the different detection pixels. Arithmetic times Optics measuring device with and.   The optical apparatus measuring apparatus according to claim 2, wherein the light source device includes a light source that generates a light beam to be irradiated for each detection pixel of the imaging element.   The said light source device has a light source which produces | generates a light beam, and a moving means to move the said light source to the position where the said light beam is irradiated to the detection pixel of the selected said image pick-up element. The optical instrument measuring device according to any one of 6.

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