JP2007052153A - Diffraction element, optical pickup and optical disk device - Google Patents

Diffraction element, optical pickup and optical disk device Download PDF

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JP2007052153A
JP2007052153A JP2005236265A JP2005236265A JP2007052153A JP 2007052153 A JP2007052153 A JP 2007052153A JP 2005236265 A JP2005236265 A JP 2005236265A JP 2005236265 A JP2005236265 A JP 2005236265A JP 2007052153 A JP2007052153 A JP 2007052153A
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diffraction grating
diffraction
transparent
transparent substrate
protective plate
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Takatoshi Minoda
孝敏 蓑田
Noriaki Seki
則彰 関
Eizo Ono
栄三 小野
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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<P>PROBLEM TO BE SOLVED: To provide a diffraction element capable of suppressing absorption of moisture into material constituting a diffraction grating 2 to such a level as to exert no influence on characteristics of diffraction even when being exposed to environments of high temperature and high humidity. <P>SOLUTION: The diffraction element 1 comprising a transparent substrate 3 and the diffraction grating 2 formed on the surface of the transparent substrate 3 is provided with: the transparent substrate 3 in which prescribed transparent protruded members 4 constituting the diffraction grating 2 are disposed on the surface thereof; a transparent protective plate 6; a transparent packed member 5 which is packed between unevenness constituted by the transparent substrate 3 and the protruded member 4, and the transparent protective plate 6; and a sealing member 8 which binds the transparent substrate 3 to the transparent protective plate 6 and annularly surrounds the outside of the packed member 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は回折素子とその回折素子を搭載した光ピックアップおよび光ディスク装置に関するものである。   The present invention relates to a diffractive element, an optical pickup equipped with the diffractive element, and an optical disc apparatus.

従来、回折素子は、複数の浅く細い溝を透明な基板の表面に形成した回折格子を備えた構成としてきた。このような構成の回折素子に光を透過させると、溝の底部の凹の部分と基板の表面の凸の部分との光路差によって光の干渉が発生した。光の干渉を防ぐために回折格子の表面を平坦にした回折素子が提案された。図14(a)は回折格子の表面を平坦にした従来の例の回折素子の正面図、(b)は(a)のA−A断面の平面図である。   Conventionally, a diffraction element has a configuration including a diffraction grating in which a plurality of shallow thin grooves are formed on the surface of a transparent substrate. When light is transmitted through the diffractive element having such a configuration, light interference occurs due to an optical path difference between the concave portion at the bottom of the groove and the convex portion on the surface of the substrate. In order to prevent light interference, a diffraction element having a flat diffraction grating surface has been proposed. 14A is a front view of a conventional diffraction element in which the surface of the diffraction grating is flattened, and FIG. 14B is a plan view of the AA cross section of FIG.

透明基板101は光学ガラス、光学プラスチック等の基板である。通常表面、裏面とも平坦になるように磨かれる。凹凸部材102は所定の波長域に光吸収を有する有機物105を含む透明な樹脂である。凹凸部材102にはレジスト材料等がある。有機物105は所定の波長域に光吸収を有する。このうち、可視光領域に光吸収を有し、分子レベルで凹凸部材102に溶解するものを染料、可視光領域に光吸収を有し、粒子状態で凹凸部材102内に分散するものを顔料という。充填部材103は有機物105を含まない透明な樹脂であり、凹凸部材102の凹凸を充填するものである。充填部材103にはフォトポリマ等がある。透明保護板104は光学ガラスや光学プラスチック等の基板であり、充填部材103および凹凸部材102を保護するだけでなく、充填部材103と凹凸部材102を合わせた部材の厚さを一定にする役割も担う。すなわち回折格子106は透明基板101と透明保護板104の間に挟まれた、所定の波長域に光吸収を有する有機物105を含む透明な樹脂である凹凸部材102と凹凸部材102の凹凸を充填する充填部材103とを備えた構成である。回折格子106は透明基板101側も透明保護板104側も表面が平坦であり、その厚さである充填部材103と凹凸部材102を合わせた厚さは一定である。回折素子107は透明基板101上に表面が平坦な回折格子106を備えており、本従来例では回折格子106は透明基板101と透明保護板104とに挟まれる。   The transparent substrate 101 is a substrate such as optical glass or optical plastic. It is usually polished so that both the front and back surfaces are flat. The concavo-convex member 102 is a transparent resin containing an organic substance 105 having light absorption in a predetermined wavelength range. The uneven member 102 includes a resist material. The organic substance 105 has light absorption in a predetermined wavelength range. Among these, those that absorb light in the visible light region and dissolve in the uneven member 102 at the molecular level are dyes, and those that absorb light in the visible light region and are dispersed in the uneven member 102 in the particle state are called pigments. . The filling member 103 is a transparent resin that does not contain the organic substance 105, and fills the unevenness of the uneven member 102. The filling member 103 includes a photopolymer or the like. The transparent protective plate 104 is a substrate such as optical glass or optical plastic, and not only protects the filling member 103 and the concavo-convex member 102 but also serves to keep the thickness of the member including the filling member 103 and the concavo-convex member 102 constant. Bear. That is, the diffraction grating 106 fills the unevenness of the uneven member 102 and the uneven member 102 which are sandwiched between the transparent substrate 101 and the transparent protective plate 104 and is a transparent resin containing an organic substance 105 having light absorption in a predetermined wavelength range. It is the structure provided with the filling member 103. The diffraction grating 106 has a flat surface on both the transparent substrate 101 side and the transparent protective plate 104 side, and the combined thickness of the filling member 103 and the concavo-convex member 102 is constant. The diffraction element 107 includes a diffraction grating 106 having a flat surface on a transparent substrate 101, and the diffraction grating 106 is sandwiched between the transparent substrate 101 and the transparent protective plate 104 in this conventional example.

有機物105が持つ光吸収の所定の波長域が回折格子106として使う波長λ1、λ2(λ1<λ2)の波長λ1よりわずかに短い場合、凹凸部材102の波長λ1と波長λ2における屈折率n1(λ1)、n1(λ2)が、有機物105を含まない場合に対して変化する。その変化量は波長λ1の方が波長λ2よりも大きい。凹凸部材102、有機物105、充填部材103の材料をうまく選定することにより、波長λ1において凹凸部材102の屈折率n1(λ1)と充填部材103の屈折率n2(λ1)をほぼ同じにし、波長λ2において凹凸部材102の屈折率n1(λ2)と充填部材103の屈折率n2(λ2)に差をつけることができる。その結果、波長λ1において回折格子106は回折格子として働かないが、波長λ2においては回折格子として働かせ、0次光に加え、±1次光、・・・に分離させることができる。すなわち波長選択回折格子を得ることができる。このような構成の回折素子107については(特許文献1)、(特許文献2)を参照のこと。
特開2002−318306号公報 特開2002−350625号公報
When the predetermined wavelength range of light absorption of the organic material 105 is slightly shorter than the wavelength λ1 of the wavelengths λ1 and λ2 (λ1 <λ2) used as the diffraction grating 106, the refractive index n1 (λ1) of the concavo-convex member 102 at the wavelengths λ1 and λ2 ), N1 (λ2) changes with respect to the case where the organic substance 105 is not included. The amount of change is larger at wavelength λ1 than at wavelength λ2. By properly selecting the materials of the concavo-convex member 102, the organic substance 105, and the filling member 103, the refractive index n1 (λ1) of the concavo-convex member 102 and the refractive index n2 (λ1) of the filling member 103 are substantially the same at the wavelength λ1, and the wavelength λ2 Thus, the refractive index n1 (λ2) of the concavo-convex member 102 and the refractive index n2 (λ2) of the filling member 103 can be made different. As a result, the diffraction grating 106 does not function as a diffraction grating at the wavelength λ1, but can function as a diffraction grating at the wavelength λ2, and can be separated into ± first-order light,. That is, a wavelength selective diffraction grating can be obtained. For the diffraction element 107 having such a configuration, refer to (Patent Document 1) and (Patent Document 2).
JP 2002-318306 A JP 2002-350625 A

ところが、従来の構成の回折素子では高温高湿の環境にさらされると、初期状態に対し、回折の効率が変化することがある。透明基板と透明保護板の隙間から湿気が浸入した結果、回折格子の凹凸部材または充填部材の少なくとも一方が水分を吸収し、その屈折率が変化したためである。   However, when the diffractive element having the conventional configuration is exposed to a high temperature and high humidity environment, the diffraction efficiency may change from the initial state. This is because, as a result of moisture entering from the gap between the transparent substrate and the transparent protective plate, at least one of the concavo-convex member or the filling member of the diffraction grating absorbs moisture and its refractive index changes.

本発明は、従来の課題を解決し、高温高湿の環境にさらされても回折の特性に影響を及ぼさないレベルに回折格子を構成する材料の水分の吸収を抑制できる回折素子、光ピックアップおよび光ディスク装置を提供することを目的とする。   The present invention solves the conventional problems, and can provide a diffraction element, an optical pickup, and an optical pickup that can suppress the absorption of moisture in a material constituting the diffraction grating to a level that does not affect the diffraction characteristics even when exposed to a high-temperature and high-humidity environment. An object is to provide an optical disk device.

本発明は、透明基板と、前記透明基板の表面に形成された回折格子とを備えた回折素子において、前記回折格子を構成する所定の透明な凸部材が表面に配置された前記透明基板と、透明保護板と、前記透明基板と前記凸部材とで構成される凹凸と前記透明保護板との間に充填されて前記回折格子を構成する透明な充填部材と、前記透明基板と前記透明保護板とをつないで前記充填部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子とした。   The present invention is a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, the transparent substrate on which a predetermined transparent convex member constituting the diffraction grating is disposed, A transparent filling member that is filled between the transparent protective plate, an unevenness constituted by the transparent substrate and the convex member, and the transparent protective plate to constitute the diffraction grating, and the transparent substrate and the transparent protective plate And a sealing member that annularly surrounds the outer side of the filling member.

回折格子を構成する凸部材と充填部材とが透明基板と透明保護板と封止部材とに囲まれるため外部から遮断される。したがって、凸部材と充填部材が空気中の水分を吸収する量を極小に抑制することができる。   Since the convex member and the filling member constituting the diffraction grating are surrounded by the transparent substrate, the transparent protective plate, and the sealing member, they are blocked from the outside. Therefore, it is possible to minimize the amount that the convex member and the filling member absorb moisture in the air.

本発明の回折素子は回折格子を構成する材料が空気中の水分を吸収する量を回折の特性に影響を及ぼさないレベルに抑制できる結果、高温高湿の環境にさらされても回折の特性が安定している。   The diffraction element of the present invention can suppress the amount of moisture in the air that the material constituting the diffraction grating absorbs to a level that does not affect the diffraction characteristics, so that the diffraction characteristics can be maintained even when exposed to high-temperature and high-humidity environments. stable.

本発明の第1の発明は、透明基板と、透明基板の表面に形成された回折格子とを備えた回折素子において、回折格子を構成する所定の透明な凸部材が表面に配置された透明基板と、透明保護板と、透明基板と凸部材とで構成される凹凸と透明保護板との間に充填されて回折格子を構成する透明な充填部材と、透明基板と透明保護板とをつないで充填部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子である。   According to a first aspect of the present invention, there is provided a diffractive element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, wherein the predetermined transparent convex member constituting the diffraction grating is disposed on the surface. And connecting the transparent substrate and the transparent protective plate between the transparent protective plate, the transparent substrate and the transparent protective plate filled with the convex and concave portions constituted by the convex member and the transparent protective plate constituting the diffraction grating. And a sealing member that annularly surrounds the outer side of the filling member.

回折格子を構成する凸部材と充填部材とが透明基板と透明保護板と封止部材とに囲まれるため外部から遮断される。したがって、凸部材と充填部材が空気中の水分を吸収する量を極小に抑制することができる。回折格子を構成する材料が空気中の水分を吸収する量を回折の特性に影響を及ぼさないレベルに抑制できる結果、高温高湿の環境にさらされても回折の特性が安定している。   Since the convex member and the filling member constituting the diffraction grating are surrounded by the transparent substrate, the transparent protective plate, and the sealing member, they are blocked from the outside. Therefore, it is possible to minimize the amount that the convex member and the filling member absorb moisture in the air. As a result of suppressing the amount of the moisture constituting the diffraction grating that absorbs moisture in the air to a level that does not affect the diffraction characteristics, the diffraction characteristics are stable even when exposed to high-temperature and high-humidity environments.

第2の発明は、第1の発明において、封止部材の吸水率が充填部材の吸水率以下であることを特徴とする回折素子である。   A second invention is the diffraction element according to the first invention, wherein the water absorption rate of the sealing member is not more than the water absorption rate of the filling member.

充填部材の選択の範囲が広がる。   The range of selection of the filling member is expanded.

第3の発明は、第1の発明において、所定の波長域に光吸収を持つ有機物を凸部材または充填部材のいずれか一方に含むことを特徴とする回折素子である。   A third invention is the diffraction element according to the first invention, wherein an organic substance having light absorption in a predetermined wavelength region is included in either the convex member or the filling member.

波長選択回折格子を有する回折素子とすることができる。   A diffraction element having a wavelength selective diffraction grating can be obtained.

第4の発明は、透明基板と、透明基板の表面に形成された回折格子とを備えた回折素子において、回折格子を構成する2つの屈折率を有する透明な回折格子部材と、回折格子部材の表面側に配置される透明保護板と、透明基板と透明保護板とをつないで回折格子部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子である。   A fourth invention is a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, a transparent diffraction grating member having two refractive indexes constituting the diffraction grating, and a diffraction grating member A diffraction element comprising: a transparent protective plate disposed on the front surface side; and a sealing member that connects the transparent substrate and the transparent protective plate and surrounds the outside of the diffraction grating member in an annular shape.

物理的に凹凸形状を作らなくても良いので、製造が容易である。また、透明保護板により回折格子が保護される。   Manufacture is easy because it is not necessary to physically create the uneven shape. Further, the diffraction grating is protected by the transparent protective plate.

第5の発明は、第4の発明において、封止部材の吸水率が回折格子部材の吸水率以下であることを特徴とする回折素子である。   A fifth invention is the diffraction element according to the fourth invention, wherein the water absorption rate of the sealing member is equal to or lower than the water absorption rate of the diffraction grating member.

回折格子部材の選択の範囲が広がる。   The range of selection of the diffraction grating member is expanded.

第6の発明は、第4の発明において、所定の波長域に光吸収を持つ有機物を回折格子部材に含み、一方の屈折率の領域の有機物は光吸収を少なくとも一部失ったことを特徴とする回折素子である。   A sixth invention is characterized in that, in the fourth invention, the diffraction grating member includes an organic substance having light absorption in a predetermined wavelength range, and the organic substance in one refractive index region has lost at least part of light absorption. Diffraction element.

凹凸を作製することなく、屈折率が異なる領域を作ることができるので製造が容易であるとともに安価に製造することができる。   Regions having different refractive indexes can be made without producing irregularities, so that production is easy and inexpensive.

第7の発明は、透明基板と、透明基板の表面に形成された回折格子とを備えた回折素子において、回折格子を構成する2つの屈折率を有する透明な回折格子部材と、回折格子部材を覆う透明な封止部材と、を備えたことを特徴とする回折素子である。   According to a seventh aspect of the present invention, in a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, a transparent diffraction grating member having two refractive indexes constituting the diffraction grating, and a diffraction grating member And a transparent sealing member that covers the diffraction element.

回折格子自体の表面が平坦であり、透明保護板を不要とすることができるため、その分製造コストを抑制できる。   Since the surface of the diffraction grating itself is flat and a transparent protective plate can be dispensed with, the manufacturing cost can be reduced accordingly.

第8の発明は、第7の発明において、封止部材の吸水率が回折格子部材の吸水率以下であることを特徴とする回折素子である。   An eighth invention is the diffraction element according to the seventh invention, wherein the water absorption rate of the sealing member is not more than the water absorption rate of the diffraction grating member.

回折格子部材の選択の範囲が広がる。   The range of selection of the diffraction grating member is expanded.

第9の発明は、第7の発明において、所定の波長域に光吸収を持つ有機物を回折格子部材に含み、一方の屈折率の領域の有機物は光吸収を少なくとも一部失ったことを特徴とする回折素子である。   A ninth invention is characterized in that, in the seventh invention, the diffraction grating member includes an organic substance having light absorption in a predetermined wavelength region, and the organic substance in one refractive index region has lost at least part of light absorption. Diffraction element.

凹凸を作製することなく、屈折率が異なる領域を作ることができるので製造が容易であるとともに安価に製造することができる。   Regions having different refractive indexes can be made without producing irregularities, so that production is easy and inexpensive.

第10の発明は、透明基板と、透明基板の表面に形成された回折格子とを備えた回折素子において、回折格子を構成する所定の凹凸が表面に形成された透明基板と、透明保護板と、透明基板の凹凸と透明保護板との間に充填されて回折格子を構成する透明な充填部材と、透明基板と透明保護板とをつないで充填部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子である。   According to a tenth aspect of the present invention, in a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, a transparent substrate having predetermined irregularities forming the diffraction grating formed on the surface, a transparent protective plate, A transparent filling member that is filled between the unevenness of the transparent substrate and the transparent protective plate to form a diffraction grating, and a sealing member that connects the transparent substrate and the transparent protective plate and surrounds the outer side of the filling member in an annular shape, A diffractive element comprising:

透明基板自身で凹凸形状を形成するのでとり安定した凹凸形状とすることができる。また、単一の波長に対して最適な回折格子を設計できる。   Since the concavo-convex shape is formed by the transparent substrate itself, a stable concavo-convex shape can be obtained. In addition, an optimum diffraction grating can be designed for a single wavelength.

第11の発明は、第10の発明において、封止部材の吸水率が充填部材の吸水率以下であることを特徴とする回折素子である。   An eleventh invention is the diffraction element according to the tenth invention, wherein the water absorption rate of the sealing member is equal to or lower than the water absorption rate of the filling member.

充填部材の選択の範囲が広がる。   The range of selection of the filling member is expanded.

第12の発明は、第1の発明、第4の発明、第7の発明、第10の発明のうちのいずれか1つの発明の回折素子を備えたことを特徴とする光ピックアップである。   A twelfth invention is an optical pickup comprising the diffraction element according to any one of the first invention, the fourth invention, the seventh invention, and the tenth invention.

搭載する回折素子は回折格子を構成する材料が空気中の水分を吸収する量を回折の特性に影響を及ぼさないレベルに水分の吸収を抑制できる結果、高温高湿の環境にさらされても回折の特性が安定している。そのため、本発明の光ピックアップも光ディスクに対する情報の記録や再生の特性が変化しにくく、安定している。   The installed diffractive element can suppress the absorption of moisture to a level that does not affect the diffraction characteristics of the material that constitutes the diffraction grating so that it can diffract even when exposed to high temperature and high humidity environments. The characteristics are stable. For this reason, the optical pickup of the present invention is also stable because the characteristics of information recording and reproduction with respect to the optical disk are hardly changed.

第13の発明は、第12の発明の光ピックアップを備えたことを特徴とする光ディスク装置である。   A thirteenth aspect of the invention is an optical disc apparatus comprising the optical pickup of the twelfth aspect of the invention.

搭載する光ピックアップの光ディスクに対する情報の記録や再生の特性が変化しにくい。そのため、本発明の光ディスク装置も光ディスクに対する情報の記録や再生の特性が変化しにくく、安定している。   Characteristics of information recording and reproduction with respect to the optical disk of the optical pickup to be mounted are not easily changed. For this reason, the optical disk apparatus of the present invention is also stable because the characteristics of information recording and reproduction with respect to the optical disk hardly change.

(実施の形態1)
本実施の形態1について、図面を参照しながら説明する。図1(a)は実施の形態1の回折素子の正面図、(b)は(a)のA−A断面の平面図である。
(Embodiment 1)
The first embodiment will be described with reference to the drawings. FIG. 1A is a front view of the diffraction element according to the first embodiment, and FIG. 1B is a plan view of the AA cross section of FIG.

透明基板3は光学ガラス、光学プラスチック等の基板である。本発明において透明とは回折素子が使用される波長域の光がほぼ透過するという意味である。透明基板3は通常表面、裏面とも平坦になるように磨かれる。透明基板3は円柱や直方体の形状であるが、設計により楕円柱、角丸四角柱、C面取りやR面取りした形状等のその他の形状としても良い。   The transparent substrate 3 is a substrate such as optical glass or optical plastic. In the present invention, the term “transparent” means that light in the wavelength region in which the diffraction element is used is substantially transmitted. The transparent substrate 3 is usually polished so that both the front surface and the back surface are flat. The transparent substrate 3 has a cylindrical shape or a rectangular parallelepiped shape, but may have other shapes such as an elliptical column, a rounded rectangular column, a C chamfered shape, or a R chamfered shape by design.

凸部材4は所定の波長域に光吸収を有する有機物7を含む透明な樹脂である。凸部材4にはEpo−Tek310、320、330等のエポキシ系の熱硬化型接着剤、OG114等のアクリル系紫外線硬化型接着剤、PIMEL7640等の感光性ポリイミド、AZ6130等のレジスト等がある。   The convex member 4 is a transparent resin containing an organic substance 7 having light absorption in a predetermined wavelength range. The convex member 4 includes an epoxy-based thermosetting adhesive such as Epo-Teks 310, 320, and 330, an acrylic ultraviolet curable adhesive such as OG114, a photosensitive polyimide such as PIMEL7640, and a resist such as AZ6130.

有機物7は所定の波長域に光吸収を有する。このうち、可視光領域に光吸収を有し、分子レベルで凸部材4に溶解するものを染料、可視光領域に光吸収を有し、粒子状態で凸部材4内に分散しているものを顔料という。有機物7には可視光領域以外に光吸収を有するものも含む。有機物7が持つ光吸収の所定の波長域が回折格子2として使う波長λ1、λ2(λ1<λ2)の波長λ1よりわずかに短い場合、凸部材4の波長λ1と波長λ2における屈折率n1(λ1)、n1(λ2)が、有機物7を含まない場合に対して変化する。その変化量は波長λ1の方が波長λ2よりも大きい。凸部材4、有機物7、充填部材5の材料をうまく選定することにより、波長λ1において凸部材4の屈折率n1(λ1)と充填部材5の屈折率n2(λ1)をほぼ同じにし、波長λ2において凸部材4の屈折率n1(λ2)と充填部材5の屈折率n2(λ2)に差をつけることができる。その結果、波長λ1において回折格子2は回折格子として働かず、0次光のみを通過させるが、波長λ2においては回折格子として働かせ、0次光に加え、±1次光、・・・に分離させることができる。すなわち波長選択回折格子を得ることができる。   The organic substance 7 has light absorption in a predetermined wavelength range. Among these, those having light absorption in the visible light region and dissolved in the convex member 4 at the molecular level are dyes, those having light absorption in the visible light region and dispersed in the convex member 4 in the particle state It is called a pigment. The organic matter 7 includes those having light absorption outside the visible light region. When the predetermined wavelength range of light absorption of the organic material 7 is slightly shorter than the wavelength λ1 of the wavelengths λ1, λ2 (λ1 <λ2) used as the diffraction grating 2, the refractive index n1 (λ1 of the convex member 4 at the wavelengths λ1 and λ2 ), N1 (λ2) changes with respect to the case where the organic substance 7 is not included. The amount of change is larger at wavelength λ1 than at wavelength λ2. By properly selecting the materials of the convex member 4, the organic substance 7, and the filling member 5, the refractive index n1 (λ1) of the convex member 4 and the refractive index n2 (λ1) of the filling member 5 are made substantially the same at the wavelength λ1, and the wavelength λ2 Thus, the refractive index n1 (λ2) of the convex member 4 and the refractive index n2 (λ2) of the filling member 5 can be made different. As a result, the diffraction grating 2 does not function as a diffraction grating at the wavelength λ1 and allows only the 0th-order light to pass therethrough, but at the wavelength λ2, it functions as a diffraction grating and separates into ± first-order light,. Can be made. That is, a wavelength selective diffraction grating can be obtained.

したがって有機物7は回折素子が使われる波長域に合わせて選定される。使用する波長をλ1、λ2(λ1<λ2)とすると、有機物7として波長λ1より短い波長域に光吸収を持ち波長λ1が約650nmの場合として赤色102号や赤色2号等を用いることができる。また波長λ1より短い波長域に光吸収を持ちλ1が約405nmの場合として銅クロロフィリンナトリウム等でも良い。さらには波長λ2より長い波長域に光吸収を持ち波長λ2が約780nmの場合として株式会社林原生物化学研究所製のNK−4432、NK−4489、NK−2911等としても良い。以上は分子レベルで凸部材4に溶解するものであるが、ピグメントレッド254やピグメントレッド177等の顔料としても良い。なお、有機物7は、所定の波長域に光吸収を持たせるために、複数種類の有機物を混ぜたものとしても構わない。凸部材4は染料や顔料を含んだ場合、着色して見えるが、波長λ1およびλ2の光は透過するので透明である。   Therefore, the organic substance 7 is selected according to the wavelength range in which the diffraction element is used. Assuming that the wavelengths to be used are λ1 and λ2 (λ1 <λ2), the organic matter 7 has light absorption in a wavelength region shorter than the wavelength λ1 and the wavelength λ1 is about 650 nm. . Further, copper chlorophyllin sodium or the like may be used in the case where the light absorption is in a wavelength region shorter than the wavelength λ1 and λ1 is about 405 nm. Furthermore, it is good also as NK-4432, NK-4489, NK-2911, etc. by Hayashibara Biochemical Laboratories Co., Ltd. as a case where it has optical absorption in a wavelength range longer than wavelength λ2 and wavelength λ2 is about 780 nm. The above is dissolved in the convex member 4 at the molecular level, but pigments such as pigment red 254 and pigment red 177 may be used. The organic substance 7 may be a mixture of a plurality of types of organic substances in order to provide light absorption in a predetermined wavelength range. The convex member 4 appears colored when it contains a dye or pigment, but is transparent because it transmits light of wavelengths λ1 and λ2.

充填部材5は有機物7を含まない透明な樹脂であり、凸部材4によって形成された凸部と透明基板3の表面である凹部からなる凹凸を充填するものである。充填部材5にはEpo−Tek310、320、330等のエポキシ系の熱硬化型接着剤、OG114等のアクリル系紫外線硬化型接着剤、PIMEL7640等の感光性ポリイミド、AZ6130等のレジスト等がある。   The filling member 5 is a transparent resin that does not contain the organic substance 7, and fills the unevenness formed by the convex portion formed by the convex member 4 and the concave portion that is the surface of the transparent substrate 3. Examples of the filling member 5 include epoxy thermosetting adhesives such as Epo-Teks 310, 320, and 330, acrylic ultraviolet curing adhesives such as OG114, photosensitive polyimide such as PIMEL7640, and resists such as AZ6130.

透明保護板6は光学ガラスや光学プラスチック等の基板であり、充填部材5および凸部材4を保護するだけでなく、充填部材5と凸部材4を合わせた部材の厚さを一定にする役割も担う。すなわち回折格子2は透明基板3と透明保護板6の間に挟まれた、所定の波長域に光吸収を有する有機物7を含む透明な樹脂である凸部材4と凸部材4の凹凸を充填する充填部材5とを備えた構成である。回折格子2は透明基板3側も透明保護板6側も表面が平坦であり、その厚さである充填部材5と凸部材4を合わせた厚さは一定である。回折素子1は透明基板3上に表面が平坦な回折格子2を備えており、本実施の形態1では回折格子2は透明基板3と透明保護板6とに挟まれる。   The transparent protective plate 6 is a substrate such as optical glass or optical plastic, and not only protects the filling member 5 and the convex member 4, but also serves to keep the thickness of the combined member of the filling member 5 and the convex member 4 constant. Bear. That is, the diffraction grating 2 fills the convex and concave portions of the convex member 4 and the convex member 4 which are sandwiched between the transparent substrate 3 and the transparent protective plate 6 and are a transparent resin containing an organic substance 7 having light absorption in a predetermined wavelength range. The filling member 5 is provided. The diffraction grating 2 has a flat surface on both the transparent substrate 3 side and the transparent protective plate 6 side, and the combined thickness of the filling member 5 and the convex member 4 is constant. The diffraction element 1 includes a diffraction grating 2 having a flat surface on a transparent substrate 3, and the diffraction grating 2 is sandwiched between the transparent substrate 3 and the transparent protective plate 6 in the first embodiment.

封止部材8は透明基板3および透明保護板6と合わせて回折格子2の周囲を囲み、回折格子2を構成する材料が周囲の空気に対して非露出となるようにするものである。したがって封止部材8の吸水率は小さい方が好ましい。特に充填部材5の吸水率以下の材料とすることが望ましい。しかし封止部材8の材料は充填部材5と同じものでも構わない。したがって、Epo−Tek310、320、330等のエポキシ系の熱硬化型接着剤、OG114等のアクリル系紫外線硬化型接着剤、PIMEL7640等の感光性ポリイミド、AZ6130等のレジスト等が用いられる。例えば、光学的な特性から上記の材料の中から充填部材5としてある材料を選択したらその充填部材5の吸水率以下の吸水率の材料から封止部材8を選択すると良い。そうすることで充填部材5の吸水率を考慮する必要がなくなるため、充填部材5の選択の範囲が広がる。さらに封止部材8の吸水率が凸部材4の吸水率以下であるようにすればさらに好ましい。これは凸部材4が充填部材5に覆われているとはいえ回折格子2を構成しているためであり、より確実に屈折率の変化を抑制できる。ここで吸水率は100℃の純水中に2時間放置した前後の質量変化率である。   The sealing member 8 surrounds the periphery of the diffraction grating 2 together with the transparent substrate 3 and the transparent protective plate 6 so that the material constituting the diffraction grating 2 is not exposed to the surrounding air. Accordingly, the water absorption rate of the sealing member 8 is preferably small. In particular, it is desirable to use a material having a water absorption rate lower than that of the filling member 5. However, the material of the sealing member 8 may be the same as that of the filling member 5. Therefore, epoxy thermosetting adhesives such as Epo-Teks 310, 320, and 330, acrylic ultraviolet curing adhesives such as OG114, photosensitive polyimides such as PIMEL7640, resists such as AZ6130, and the like are used. For example, when a material as the filling member 5 is selected from the above materials from the optical characteristics, the sealing member 8 may be selected from a material having a water absorption rate equal to or lower than the water absorption rate of the filling member 5. By doing so, it is not necessary to consider the water absorption rate of the filling member 5, so the range of selection of the filling member 5 is expanded. Furthermore, it is more preferable that the water absorption rate of the sealing member 8 is equal to or lower than the water absorption rate of the convex member 4. This is because the diffraction grating 2 is formed even though the convex member 4 is covered with the filling member 5, and the change in the refractive index can be more reliably suppressed. Here, the water absorption is the mass change rate before and after being left in pure water at 100 ° C. for 2 hours.

なお、封止部材8は波長λ1の光も波長λ2の光も入射しない場所なので上記のような透明な材料である必要はない。   Since the sealing member 8 is a place where neither the light with the wavelength λ1 nor the light with the wavelength λ2 is incident, the sealing member 8 need not be a transparent material as described above.

次に製造方法について説明する。まず有機物7を含んだ凸部材4をスピンコート法等で透明基板3に所定の均一な厚さで塗布する。次に加熱保持して、硬化する。次に凸部材4に所定の凸形状パターンを形成する。凸形状パターンの作製方法として、例えば、凸部材4としてレジストを塗布し、所定のパターンとなるようにマスクパターンを介して紫外線を照射し、現像後、ドライエッチングを行う方法がある。あるいは、凸部材4として感光性材料を使い、所定の均一な厚さに塗布し、所定のパターンとなるようにマスクパターンを介して紫外線を照射し、現像を行っても良い。この凸部材4による凸形状の高さが回折格子2の深さとなる。次に充填部材5を凸部材4による凸形状と凸形状の間に充填するように塗布する。この際充填部材5が不必要な箇所まで塗布されないように塗布する量と位置を制御する。また、封止部材8を同様に量と位置を制御して塗布する。このような充填部材5や封止部材8の塗布にはスクリーン印刷法等がある。透明保護板6をその上に重ね合わせて全体を加熱保持する。充填部材5および封止部材8は透明基板3、凸部材4、透明保護板6を強く接着する。最後に所定の寸法に切断し、完成とする。   Next, a manufacturing method will be described. First, the convex member 4 containing the organic substance 7 is applied to the transparent substrate 3 with a predetermined uniform thickness by spin coating or the like. Next, it is heated and held and cured. Next, a predetermined convex pattern is formed on the convex member 4. As a method for producing the convex pattern, for example, there is a method in which a resist is applied as the convex member 4, ultraviolet rays are irradiated through a mask pattern so as to form a predetermined pattern, and dry etching is performed after development. Alternatively, a photosensitive material may be used as the convex member 4, applied to a predetermined uniform thickness, and developed by irradiating ultraviolet rays through a mask pattern so as to form a predetermined pattern. The height of the convex shape by the convex member 4 is the depth of the diffraction grating 2. Next, the filling member 5 is applied so as to fill between the convex shape by the convex member 4. At this time, the amount and position of application are controlled so that the filling member 5 is not applied to unnecessary portions. Similarly, the sealing member 8 is applied by controlling the amount and position. Examples of the application of the filling member 5 and the sealing member 8 include a screen printing method. The transparent protective plate 6 is superposed on it and the whole is heated and held. The filling member 5 and the sealing member 8 strongly bond the transparent substrate 3, the convex member 4, and the transparent protective plate 6. Finally, it is cut to a predetermined dimension and completed.

また、封止部材8の硬化前の粘度が低い場合、次のような製造方法とすることもできる。凸部材4による所定の凸形状を透明基板3の表面に形成した後、充填部材5のみを塗布し、透明保護板6をその上に重ね合わせて、全体を加熱保持する。次に透明基板3と透明保護板6の隙間から毛細管現象を利用して、常圧あるいは減圧下で封止部材8を全周に渡って注入し、全体を加熱保持して硬化する。その後、所定の寸法に切断して完成とする。   Moreover, when the viscosity before hardening of the sealing member 8 is low, it can also be set as the following manufacturing methods. After a predetermined convex shape by the convex member 4 is formed on the surface of the transparent substrate 3, only the filling member 5 is applied, the transparent protective plate 6 is overlaid thereon, and the whole is heated and held. Next, using the capillary phenomenon from the gap between the transparent substrate 3 and the transparent protective plate 6, the sealing member 8 is injected over the entire circumference under normal pressure or reduced pressure, and the whole is heated and held to be cured. Then, it cuts into a predetermined dimension and is completed.

なお、一般的に染料を始めとする分子レベルで凸部材4に溶解する有機物7は紫外線により構造が一部破壊されて所定の光吸収の性質を失いやすい。そのため、紫外線照射、現像した際、紫外線が当たらない部分が残るような凸部材4を用いることで、所定の光吸収の性質を残した有機物7を含む凸部材4を形成することができる。   In general, the organic substance 7 dissolved in the convex member 4 at a molecular level including a dye tends to lose a predetermined light absorption property because a part of the structure is destroyed by ultraviolet rays. Therefore, the convex member 4 containing the organic substance 7 having a predetermined light absorption property can be formed by using the convex member 4 that leaves a portion that is not exposed to ultraviolet rays when irradiated and developed with ultraviolet rays.

なお、図1において充填部材5と封止部材8との間には間隔があるように記載しているが、間隔を設ける必要はない。充填部材5の外側全体に封止部材8が接しても良いし、充填部材5と封止部材8とは接しなくても良い。ただし充填部材5と封止部材8の材料が混合することは好ましくない。充填部材5の屈折率を含めた光学的な特性に封止部材8が悪影響を及ぼす可能性があるからである。   In FIG. 1, the filling member 5 and the sealing member 8 are described so as to have a gap, but it is not necessary to provide a gap. The sealing member 8 may be in contact with the entire outside of the filling member 5, or the filling member 5 and the sealing member 8 may not be in contact with each other. However, it is not preferable that the materials of the filling member 5 and the sealing member 8 are mixed. This is because the sealing member 8 may adversely affect the optical characteristics including the refractive index of the filling member 5.

また、封止部材8は回折格子2の外側を全周に渡って覆う必要がある。わずかでも隙間があれば、そこから周りの空気とともに水分が回折格子2まで浸入し充填部材5または凸部材4の少なくとも一方の屈折率が変化する恐れがあるためである。   Further, the sealing member 8 needs to cover the entire outer periphery of the diffraction grating 2. This is because, if there is even a slight gap, moisture may enter the diffraction grating 2 together with the surrounding air from there to change the refractive index of at least one of the filling member 5 or the convex member 4.

なお、本実施の形態1において凸部材4が有機物7を含んだ。しかし、それに限るものではなく、充填部材5が有機物7を含んでも良い。また、凸部材4も充填部材5も有機物7を含まなくても良い。充填部材5が有機物7を含む場合、凸部材4にマスクパターンを介して紫外線を照射しても、有機物7を含んでいないので、光吸収の性質を失うことがない。そのため凸部材4や有機物7の材料の選択の幅が広がる。また有機物7を含む充填部材5はそもそも紫外線を使用しないで硬化するため、不都合は生じない。一方、凸部材4も充填部材5も有機物7を含まない場合、凸部材4の屈折率n1と充填部材の屈折率n2に差を設けることで少なくとも単波長の回折素子1として機能させることができる。そのため回折素子設計の自由度が大きい。また、有機物7をそもそも含まないので紫外線照射による有機物7の構造の一部破壊による所定の光吸収の性質の劣化の心配をする必要がない。   In the first embodiment, the convex member 4 includes the organic matter 7. However, the present invention is not limited to this, and the filling member 5 may include the organic material 7. Further, neither the convex member 4 nor the filling member 5 may contain the organic matter 7. When the filling member 5 includes the organic substance 7, even if the convex member 4 is irradiated with ultraviolet rays through the mask pattern, the organic substance 7 is not included, so that the light absorption property is not lost. Therefore, the range of selection of the material of the convex member 4 and the organic substance 7 is expanded. Moreover, since the filling member 5 containing the organic substance 7 is cured without using ultraviolet rays, there is no inconvenience. On the other hand, when neither the convex member 4 nor the filling member 5 contains the organic matter 7, it can function as the diffraction element 1 having at least a single wavelength by providing a difference between the refractive index n1 of the convex member 4 and the refractive index n2 of the filling member. . Therefore, the degree of freedom in designing the diffraction element is great. Further, since the organic matter 7 is not included in the first place, there is no need to worry about deterioration of a predetermined light absorption property due to partial destruction of the structure of the organic matter 7 due to ultraviolet irradiation.

なお、回折格子2の平面形状は略四角形であるように示しているが、それに限るものではなく、円形状、楕円形状、多角形状等でも良い。また回折格子2の凸部材4の1つ1つが縞状に並んでいるように配置したが、それに限るものではなく、設計により配置、形状を変えることができる。また、凸部材4の段差は1段で直角に切れているが、階段状に切れても良いし、斜面状に切れても良い。   In addition, although the planar shape of the diffraction grating 2 is shown to be a substantially square shape, it is not limited thereto, and may be a circular shape, an elliptical shape, a polygonal shape, or the like. Moreover, although it arrange | positioned so that each of the convex member 4 of the diffraction grating 2 may be located in a stripe form, it is not restricted to it and arrangement | positioning and a shape can be changed by design. Moreover, although the level | step difference of the convex member 4 has cut | disconnected at right angle at 1 step | paragraph, it may cut | disconnect in step shape and may cut in the shape of a slope.

以上のように本実施の形態1の回折素子1は回折格子2を構成する凸部材4および充填部材5が透明基板1、透明保護板6、封止部材8に囲まれ、周囲の空気には触れていない。そのため回折の特性に影響を及ぼさないレベルに回折格子2を構成する充填部材5や凸部材4の水分の吸収を抑制できる。   As described above, in the diffraction element 1 according to the first embodiment, the convex member 4 and the filling member 5 constituting the diffraction grating 2 are surrounded by the transparent substrate 1, the transparent protective plate 6, and the sealing member 8, and the surrounding air Not touching. Therefore, the absorption of moisture in the filling member 5 and the convex member 4 constituting the diffraction grating 2 can be suppressed to a level that does not affect the diffraction characteristics.

(実施の形態2)
実施の形態2について図面を参照しながら説明する。図2(a)は本実施の形態2の回折素子の正面図、(b)は(a)のA−A断面の平面図である。本実施の形態2の回折素子1は実施の形態1の回折素子1とは封止部材の設け方が異なる。すなわち本実施の形態2の回折素子1は実施の形態1と同じ透明基板3、透明保護板6、凸部材4、充填部材5、有機物7で構成した回折素子1の透明基板3と透明保護板6に渡してその外周部に環状に封止部材8を設ける構成としたものである。
(Embodiment 2)
The second embodiment will be described with reference to the drawings. 2A is a front view of the diffraction element according to the second embodiment, and FIG. 2B is a plan view of the AA cross section of FIG. The diffraction element 1 according to the second embodiment is different from the diffraction element 1 according to the first embodiment in providing a sealing member. That is, the diffraction element 1 of the second embodiment is the same as the first embodiment, the transparent substrate 3, the transparent protective plate 6, the convex member 4, the filling member 5, and the organic substance 7. 6, the sealing member 8 is provided in a ring shape on the outer periphery thereof.

したがって透明基板3、透明保護板6、凸部材4、充填部材5、有機物7は実施の形態1と同じであり、その説明を援用する。封止部材8は実施の形態1と同じで良いが、本実施の形態2では硬化前の粘度が高い場合により好適である。   Therefore, the transparent substrate 3, the transparent protective plate 6, the convex member 4, the filling member 5, and the organic substance 7 are the same as those in the first embodiment, and the description thereof is cited. The sealing member 8 may be the same as in the first embodiment, but in the second embodiment, it is more preferable when the viscosity before curing is high.

次に製造方法について説明する。まず実施の形態1と同様にして透明基板3と透明保護板6との間に凸部材4、充填部材5、有機物7で構成される回折格子2を形成する。その際、封止部材8は用いない。次に所定の寸法に切断する。最後に封止部材8を透明基板3と透明保護板6との隙間に渡してその外周部に環状に塗布し、硬化して完成とする。   Next, a manufacturing method will be described. First, the diffraction grating 2 composed of the convex member 4, the filling member 5, and the organic substance 7 is formed between the transparent substrate 3 and the transparent protective plate 6 in the same manner as in the first embodiment. At that time, the sealing member 8 is not used. Next, it is cut into predetermined dimensions. Finally, the sealing member 8 is passed over the gap between the transparent substrate 3 and the transparent protective plate 6 and applied to the outer periphery of the sealing member 8 in a ring shape and cured to complete.

封止部材8を塗布する際、透明基板3と透明保護板6の隙間は完全に封止しなければならない。わずかでも隙間があればそこから周りの空気とともに水分が回折格子2まで浸入し充填部材5または凸部材4の少なくとも一方の屈折率が変化する恐れがあるためである。これは実施の形態1においても同じである。逆に透明基板3と透明保護板6の隙間の内部に封止部材8が入り込むのは構わない。   When the sealing member 8 is applied, the gap between the transparent substrate 3 and the transparent protective plate 6 must be completely sealed. This is because if there is even a slight gap, moisture may enter the diffraction grating 2 together with the surrounding air from there and the refractive index of at least one of the filling member 5 or the convex member 4 may change. The same applies to the first embodiment. Conversely, the sealing member 8 may enter the gap between the transparent substrate 3 and the transparent protective plate 6.

以上のように、本実施の形態2の回折素子1は実施の形態1の回折素子1と同様に回折格子2を構成する凸部材4および充填部材5が透明基板1、透明保護板6、封止部材8に囲まれ、周囲の空気には触れていない。そのため回折の特性に影響を及ぼさないレベルに回折格子2を構成する充填部材5や凸部材4の水分の吸収を抑制できる。   As described above, the diffractive element 1 of the second embodiment is similar to the diffractive element 1 of the first embodiment in that the convex member 4 and the filling member 5 constituting the diffraction grating 2 are the transparent substrate 1, the transparent protective plate 6, the sealing member. Surrounded by the stop member 8, the surrounding air is not touched. Therefore, the absorption of moisture in the filling member 5 and the convex member 4 constituting the diffraction grating 2 can be suppressed to a level that does not affect the diffraction characteristics.

(実施の形態3)
実施の形態3について図面を参照しながら説明する。図3(a)は本実施の形態3の回折素子の1形状の正面図、(b)は(a)のA−A断面の平面図である。また図4(a)は本実施の形態3の回折素子の他の形状の正面図、(b)は(a)のA−A断面の平面図である。
本実施の形態3は透明基板3の表面の回折格子部分を凹凸とした回折素子であり、実施の形態1、2で説明した封止部材8が設けられた構成である。
(Embodiment 3)
The third embodiment will be described with reference to the drawings. FIG. 3A is a front view of one shape of the diffraction element according to the third embodiment, and FIG. 3B is a plan view of the AA cross section of FIG. FIG. 4A is a front view of another shape of the diffraction element according to the third embodiment, and FIG. 4B is a plan view of the AA cross section of FIG.
The third embodiment is a diffractive element in which the diffraction grating portion on the surface of the transparent substrate 3 is uneven, and has the configuration in which the sealing member 8 described in the first and second embodiments is provided.

透明基板3は実施の形態1で説明した透明基板3と同じであるが、さらに表面に凹凸9を形成している。図3、図4では凹凸9は凹形状であるが、凸形状としても凹凸形状としても良い。凹凸9は例えば、透明基板3の表面を所定の形状にエッチングすることで作製することができる。また、金型にあらかじめ所定の形状と凹凸が逆の形状を形成しておき、そこに透明基板3の原料を供給して転写させることで作製することもできる。   The transparent substrate 3 is the same as the transparent substrate 3 described in the first embodiment, but further has irregularities 9 formed on the surface. 3 and 4, the unevenness 9 is a concave shape, but may be a convex shape or an uneven shape. The unevenness 9 can be produced, for example, by etching the surface of the transparent substrate 3 into a predetermined shape. Moreover, it can also be produced by forming a shape having a predetermined shape and a concavity and convexity in advance on a mold and supplying the raw material of the transparent substrate 3 therefor to transfer it.

充填部材5、透明保護板6は実施の形態1と同じでありその説明を援用する。回折格子2としての働きを確保するため、使用する波長において透明基板3の屈折率と充填部材5の屈折率とが異なるようにする。   The filling member 5 and the transparent protective plate 6 are the same as those in the first embodiment, and the description thereof is incorporated. In order to ensure the function as the diffraction grating 2, the refractive index of the transparent substrate 3 and the refractive index of the filling member 5 are made different at the wavelength to be used.

図3に示す形状の回折素子1の製造方法は以下の通りである。表面に凹凸9を形成した透明基板3の表面に充填部材5を塗布する。その際、凹凸9による凹形状と凹形状の間に充填するように充填部材5を塗布する。また、充填部材5が不必要な箇所まで塗布されないように塗布する量と位置を制御する。また、封止部材8を同様に量と位置を制御して塗布する。このような充填部材5や封止部材8の塗布にはスクリーン印刷法等がある。透明保護板6をその上に重ね合わせて、全体を加熱保持後、所定の寸法に切断して完成とする。充填部材5および封止部材8は透明基板3と透明保護板6を強く接着する。   The manufacturing method of the diffraction element 1 having the shape shown in FIG. 3 is as follows. The filling member 5 is applied to the surface of the transparent substrate 3 having the irregularities 9 formed on the surface. In that case, the filling member 5 is apply | coated so that it may fill between the concave shape by the unevenness | corrugation 9, and a concave shape. Further, the amount and position of application are controlled so that the filling member 5 is not applied to unnecessary portions. Similarly, the sealing member 8 is applied by controlling the amount and position. Examples of the application of the filling member 5 and the sealing member 8 include a screen printing method. The transparent protective plate 6 is overlaid thereon, the whole is heated and held, and then cut into a predetermined dimension to complete. The filling member 5 and the sealing member 8 strongly bond the transparent substrate 3 and the transparent protective plate 6.

また、実施の形態1と同様、封止部材8の硬化前の粘度が低い場合には、次のようにしても良い。すなわち、まず凹凸9を形成した透明基板3の表面に充填部材5のみを塗布し、透明保護板6をその上に重ね合わせて、全体を加熱保持する。次に透明基板3と透明保護板6の隙間から毛細管現象を利用して、常圧あるいは減圧下で封止部材8を全周に渡って注入し、全体を加熱保持して硬化する。その後、所定の寸法に切断して完成とする。   As in the first embodiment, when the viscosity of the sealing member 8 before curing is low, the following may be performed. That is, first, only the filling member 5 is applied to the surface of the transparent substrate 3 on which the unevenness 9 is formed, and the transparent protective plate 6 is overlaid thereon, and the whole is heated and held. Next, using the capillary phenomenon from the gap between the transparent substrate 3 and the transparent protective plate 6, the sealing member 8 is injected over the entire circumference under normal pressure or reduced pressure, and the whole is heated and held to be cured. Then, it cuts into a predetermined dimension and is completed.

図4に示す形状の回折素子1の作製方法は以下の通りである。凹凸9を形成した透明基板3の表面に充填部材5を塗布し、透明保護板6を重ね合わせて、全体を加熱保持する。以降は、実施の形態2で説明したのと同様に、所定の寸法に切断し、封止部材8を透明基板3と透明保護板6との隙間に渡してその外周部に環状に塗布し、硬化して完成とする。   The manufacturing method of the diffraction element 1 having the shape shown in FIG. 4 is as follows. The filling member 5 is applied to the surface of the transparent substrate 3 on which the unevenness 9 is formed, and the transparent protective plate 6 is overlaid, and the whole is heated and held. Thereafter, as described in the second embodiment, it is cut into a predetermined size, and the sealing member 8 is applied to the outer periphery of the transparent substrate 3 and the transparent protective plate 6 in an annular shape, Cure to completion.

使用する波長において回折格子2が少なくとも所定の単一の波長に対する回折格子としての働きをもつように透明基板3の屈折率と充填部材5の屈折率とを異ならせる。また、その際、回折格子2の表面は平坦であるので光路長差により生じる干渉は生じにくい。   The refractive index of the transparent substrate 3 and the refractive index of the filling member 5 are made different so that the diffraction grating 2 functions as a diffraction grating for at least a predetermined single wavelength at the wavelength used. At this time, since the surface of the diffraction grating 2 is flat, interference caused by the optical path length difference is unlikely to occur.

なお、実施の形態1と同様に所定の波長域に光吸収を有する有機物7を充填部材5に含ませ、波長選択回折素子としても良い。その際、透明基板3の波長λ1および波長λ2における屈折率と有機物7を含有した充填部材5の波長λ1および波長λ2における屈折率とが所定の値になるように透明基板3、充填部材5、有機物7を選定しなければならない。   As in the first embodiment, the filling member 5 may include an organic substance 7 that absorbs light in a predetermined wavelength range, and the wavelength selective diffraction element may be used. At that time, the transparent substrate 3, the filling member 5, the refractive index at the wavelength λ 1 and the wavelength λ 2 of the transparent substrate 3 and the refractive index at the wavelength λ 1 and the wavelength λ 2 of the filling member 5 containing the organic substance 7 are set to predetermined values. Organic matter 7 must be selected.

また、光学的な特性から上記の材料の中から充填部材5としてある材料を選択したらその充填部材5の吸水率以下の吸水率の材料から封止部材8を選択すると良い。そうすることで充填部材5の吸水率を考慮する必要がなくなるため、充填部材5の選択の範囲が広がる。   Further, when a material as the filling member 5 is selected from the above materials from the optical characteristics, the sealing member 8 may be selected from a material having a water absorption rate equal to or lower than the water absorption rate of the filling member 5. By doing so, it is not necessary to consider the water absorption rate of the filling member 5, so the range of selection of the filling member 5 is expanded.

以上のように、本実施の形態3の回折素子1も実施の形態1、2の回折素子1と同様に、透明基板3とともに回折格子2を構成する充填部材5が透明基板1、透明保護板6、封止部材8に囲まれ、周囲の空気には触れていない。そのため回折の特性に影響を及ぼさないレベルに回折格子2を構成する充填部材5の水分の吸収を抑制できる。   As described above, the diffractive element 1 according to the third embodiment is similar to the diffractive element 1 according to the first and second embodiments in that the filling member 5 constituting the diffraction grating 2 together with the transparent substrate 3 is the transparent substrate 1 and the transparent protective plate. 6. Surrounded by the sealing member 8, the surrounding air is not touched. Therefore, moisture absorption of the filling member 5 constituting the diffraction grating 2 can be suppressed to a level that does not affect the diffraction characteristics.

(実施の形態4)
実施の形態4について図面を参照しながら説明する。図5(a)は本実施の形態4の回折素子の1形状の正面図、(b)は(a)のA−A断面の平面図である。図6(a)は本実施の形態4の回折素子の他の形状の正面図、(b)は(a)のA−A断面の平面図である。実施の形態4は凹凸を作らない回折格子2を有する回折素子であり、実施の形態1、2で説明した封止部材8が設けられた構成である。
(Embodiment 4)
A fourth embodiment will be described with reference to the drawings. FIG. 5A is a front view of one shape of the diffraction element according to the fourth embodiment, and FIG. 5B is a plan view of the AA cross section of FIG. FIG. 6A is a front view of another shape of the diffraction element according to the fourth embodiment, and FIG. 6B is a plan view of the AA cross section of FIG. The fourth embodiment is a diffractive element having a diffraction grating 2 that does not form irregularities, and is configured to include the sealing member 8 described in the first and second embodiments.

透明基板3、透明保護板6、封止部材8は実施の形態1と同じであり、その説明を援用する。回折格子部材10は所定の波長域に光吸収を有する有機物7を含む樹脂である。回折格子部材10はEpo−Tek310、320、330等のエポキシ系の熱硬化型接着剤、OG114等のアクリル系紫外線硬化型接着剤、PIMEL7640等の感光性ポリイミド、AZ6130等のレジスト等である。有機物7は実施の形態1で説明したものと同じである。しかし後述するように紫外線を選択的に照射し、紫外線が照射された領域12の光吸収の性質を失わせることが必要である。そのため紫外線で構造の一部が破壊されやすい、分子レベルで回折格子部材10に溶解するものの方が、粒子状態で回折格子部材10内に分散しているものよりも望ましい。紫外線が照射された領域12は有機物7の光吸収の性質が失われてしまうため、紫外線が照射された領域12の屈折率と紫外線が非照射の領域11の屈折率とは回折格子2を透過するレーザ光の波長に依存して差が生じる。このため回折素子1は波長選択回折素子とすることができる。   The transparent substrate 3, the transparent protective plate 6, and the sealing member 8 are the same as those in the first embodiment, and the description thereof is cited. The diffraction grating member 10 is a resin containing an organic substance 7 having light absorption in a predetermined wavelength range. The diffraction grating member 10 is an epoxy thermosetting adhesive such as Epo-Tek 310, 320, or 330, an acrylic ultraviolet curable adhesive such as OG114, a photosensitive polyimide such as PIMEL7640, or a resist such as AZ6130. The organic matter 7 is the same as that described in the first embodiment. However, as will be described later, it is necessary to selectively irradiate ultraviolet rays so as to lose the light absorption property of the region 12 irradiated with the ultraviolet rays. For this reason, it is preferable that a part of the structure that is easily destroyed by ultraviolet rays and that is dissolved in the diffraction grating member 10 at a molecular level is more preferable than that which is dispersed in the diffraction grating member 10 in a particle state. Since the region 12 irradiated with ultraviolet rays loses the light absorption property of the organic matter 7, the refractive index of the region 12 irradiated with ultraviolet rays and the refractive index of the region 11 not irradiated with ultraviolet rays are transmitted through the diffraction grating 2. A difference occurs depending on the wavelength of the laser beam. Therefore, the diffraction element 1 can be a wavelength selective diffraction element.

次に図5に示す形状の回折素子1の作製方法について説明する。あらかじめ有機物7を含有させておいた回折格子部材10を透明基板3に塗布する。この際回折格子部材10が不必要な箇所まで塗布されないように塗布する量と位置を制御する。また、封止部材8を同様に量と位置を制御して塗布する。このような回折格子部材10や封止部材8の塗布にはスクリーン印刷法等がある。透明保護板6をその上に重ね合わせて全体を加熱保持する。回折格子部材10および封止部材8は透明基板3、凸部材4、透明保護板6を強く接着する。次に透明基板3の下面側または透明保護板6の上面側から所定のパターンになるようなマスクパターンを介して紫外線を照射する。紫外線が非照射の領域11と紫外線が照射された領域12とのパターンを生成する。紫外線が非照射の領域11は何の影響も受けないが、紫外線が照射された領域12の有機物7は構造の一部が分解されて光吸収の性質を失う。最後に所定の寸法に切断し、完成とする。   Next, a method for manufacturing the diffraction element 1 having the shape shown in FIG. 5 will be described. A diffraction grating member 10 containing an organic substance 7 in advance is applied to the transparent substrate 3. At this time, the amount and position of application are controlled so that the diffraction grating member 10 is not applied to unnecessary portions. Similarly, the sealing member 8 is applied by controlling the amount and position. Examples of the application of the diffraction grating member 10 and the sealing member 8 include a screen printing method. The transparent protective plate 6 is superposed on it and the whole is heated and held. The diffraction grating member 10 and the sealing member 8 strongly bond the transparent substrate 3, the convex member 4, and the transparent protective plate 6. Next, ultraviolet rays are irradiated from the lower surface side of the transparent substrate 3 or the upper surface side of the transparent protective plate 6 through a mask pattern that forms a predetermined pattern. A pattern of the region 11 that is not irradiated with ultraviolet rays and the region 12 that is irradiated with ultraviolet rays is generated. The region 11 that is not irradiated with ultraviolet rays is not affected at all, but the organic matter 7 in the region 12 that is irradiated with ultraviolet rays loses its light-absorbing property because a part of the structure is decomposed. Finally, it is cut to a predetermined dimension and completed.

また、実施の形態1と同様、封止部材8の硬化前の粘度が低い場合には、次のようにしても良い。すなわち、まず透明基板3に回折格子部材10を塗布し、透明保護板6をその上に重ね合わせて、全体を加熱保持する。次に透明基板3と透明保護板6の隙間から毛細管現象を利用して、常圧あるいは減圧下で封止部材8を全周に渡って注入し、全体を加熱保持して硬化する。次に透明基板3の下面側または透明保護板6の上面側から所定のパターンになるようなマスクパターンを介して紫外線を照射する。紫外線が非照射の領域11と紫外線が照射された領域12とのパターンを生成する。最後に所定の寸法に切断して完成とする。この場合、封止部材8を注入する前に回折格子部材10に所定のパターンを生成しても良い。   As in the first embodiment, when the viscosity of the sealing member 8 before curing is low, the following may be performed. That is, first, the diffraction grating member 10 is applied to the transparent substrate 3, the transparent protective plate 6 is overlaid thereon, and the whole is heated and held. Next, using the capillary phenomenon from the gap between the transparent substrate 3 and the transparent protective plate 6, the sealing member 8 is injected over the entire circumference under normal pressure or reduced pressure, and the whole is heated and held to be cured. Next, ultraviolet rays are irradiated from the lower surface side of the transparent substrate 3 or the upper surface side of the transparent protective plate 6 through a mask pattern that forms a predetermined pattern. A pattern of the region 11 that is not irradiated with ultraviolet rays and the region 12 that is irradiated with ultraviolet rays is generated. Finally, it is cut into predetermined dimensions to complete. In this case, a predetermined pattern may be generated on the diffraction grating member 10 before the sealing member 8 is injected.

また、図6に示す形状の回折素子1の作製方法は以下の通りである。あらかじめ有機物7を含有させておいた回折格子部材10を透明基板3に塗布する。この際回折格子部材10が不必要な箇所まで塗布されないように塗布する量と位置を制御する。透明保護板6をその上に重ね合わせて全体を加熱保持する。次に所定のパターンになるようなマスクパターンを介して紫外線を照射する。次に所定の寸法に切断し、封止部材8を透明基板3と透明保護板6との隙間に渡してその外周部に環状に塗布し、硬化して完成とする。   A method for producing the diffraction element 1 having the shape shown in FIG. 6 is as follows. A diffraction grating member 10 containing an organic substance 7 in advance is applied to the transparent substrate 3. At this time, the amount and position of application are controlled so that the diffraction grating member 10 is not applied to unnecessary portions. The transparent protective plate 6 is superposed on it and the whole is heated and held. Next, ultraviolet rays are irradiated through a mask pattern that forms a predetermined pattern. Next, it cut | disconnects to a predetermined dimension, the sealing member 8 is passed over the clearance gap between the transparent substrate 3 and the transparent protective board 6, is apply | coated to the outer peripheral part cyclically | annularly, and it hardens | cures and is completed.

本実施の形態4の回折素子1は凹凸形状を作らずに回折格子2を構成するため、簡略な工程で波長選択回折素子を作製できる。   Since the diffraction element 1 according to the fourth embodiment forms the diffraction grating 2 without forming a concavo-convex shape, a wavelength selective diffraction element can be produced by a simple process.

また、光学的な特性から上記の材料の中から回折格子部材10としてある材料を選択したらその回折格子部材10の吸水率以下の吸水率の材料から封止部材8を選択すると良い。そうすることで回折格子部材10の吸水率を考慮する必要がなくなるため、回折格子部材10の選択の範囲が広がる。   Further, when a material as the diffraction grating member 10 is selected from the above materials from the optical characteristics, the sealing member 8 may be selected from a material having a water absorption rate equal to or lower than the water absorption rate of the diffraction grating member 10. By doing so, it becomes unnecessary to consider the water absorption rate of the diffraction grating member 10, so the range of selection of the diffraction grating member 10 is expanded.

以上のように、本実施の形態4の回折素子1も実施の形態1、2の回折素子1と同様に、回折格子2を構成する回折格子部材10が透明基板1、透明保護板6、封止部材8に囲まれ、周囲の空気には触れていない。そのため回折の特性に影響を及ぼさないレベルに回折格子2を構成する回折格子部材10の水分の吸収を抑制できる。   As described above, in the diffraction element 1 of the fourth embodiment, similarly to the diffraction elements 1 of the first and second embodiments, the diffraction grating member 10 constituting the diffraction grating 2 includes the transparent substrate 1, the transparent protective plate 6, and the sealing. Surrounded by the stop member 8, the surrounding air is not touched. Therefore, moisture absorption of the diffraction grating member 10 constituting the diffraction grating 2 can be suppressed to a level that does not affect the diffraction characteristics.

(実施の形態5)
実施の形態5について図面を参照しながら説明する。図7(a)は本実施の形態5の回折素子の1形状の正面図、(b)は(a)のA−A断面の平面図である。図8(a)は本実施の形態5の回折素子の他の形状の正面図、(b)は(a)のA−A断面の平面図である。実施の形態4では凹凸を作らない回折格子2を作製する際、透明保護板6を重ね合わせて全体を加熱したが、本実施の形態5では透明保護板6を重ね合わせないで全体を加熱した場合である。構成材料は実施の形態4と同じである。
(Embodiment 5)
The fifth embodiment will be described with reference to the drawings. FIG. 7A is a front view of one shape of the diffraction element according to the fifth embodiment, and FIG. 7B is a plan view of the AA cross section of FIG. FIG. 8A is a front view of another shape of the diffraction element according to the fifth embodiment, and FIG. 8B is a plan view of the AA cross section of FIG. In the fourth embodiment, the transparent protective plate 6 was overlaid and heated as a whole when producing the diffraction grating 2 with no irregularities. In the fifth embodiment, the whole was heated without overlapping the transparent protective plate 6. Is the case. The constituent materials are the same as those in the fourth embodiment.

次に図7に示す形状の回折素子1の作製方法について説明する。あらかじめ有機物7を含有させておいた回折格子部材10を透明基板3に塗布する。塗布はスピンコート法等で良い。加熱保持して回折格子部材10を硬化させる。次に所定のパターンになるようなマスクパターンを介して紫外線を照射する。紫外線が非照射の領域11は何の影響も受けないが、紫外線が照射された領域12の有機物7は構造の一部が分解されて光吸収の性質を失う。次に不要な部分をエッチング等で除去する。または、回折格子部材10の塗布をスクリーン印刷法等で塗布位置を限定して行う。次に封止部材8を全体に塗布し、透明保護板6を重ね合わせて、全体を加熱保持する。最後に所定の寸法に切断し、完成とする。封止部材8は透明基板3、回折格子部材10、透明保護板6を強く接着する。封止部材8にも光が照射されるため使用する波長の光に対して透明な材料を選択する。   Next, a method for manufacturing the diffraction element 1 having the shape shown in FIG. 7 will be described. A diffraction grating member 10 containing an organic substance 7 in advance is applied to the transparent substrate 3. Application may be by spin coating or the like. The diffraction grating member 10 is cured by heating and holding. Next, ultraviolet rays are irradiated through a mask pattern that forms a predetermined pattern. The region 11 that is not irradiated with ultraviolet rays is not affected at all, but the organic matter 7 in the region 12 that is irradiated with ultraviolet rays loses its light-absorbing property because a part of the structure is decomposed. Next, unnecessary portions are removed by etching or the like. Alternatively, the diffraction grating member 10 is applied by limiting the application position by screen printing or the like. Next, the sealing member 8 is apply | coated to the whole, the transparent protective plate 6 is piled up, and the whole is heat-held. Finally, it is cut to a predetermined dimension and completed. The sealing member 8 strongly bonds the transparent substrate 3, the diffraction grating member 10, and the transparent protective plate 6. Since the sealing member 8 is also irradiated with light, a material transparent to the light having the wavelength to be used is selected.

封止部材8を塗布する際、全体にではなくスクリーン印刷法等で回折格子部材10の周囲に塗布しても良い。その場合の形状は図5と同様となる。   When the sealing member 8 is applied, it may be applied around the diffraction grating member 10 by a screen printing method or the like instead of the whole. The shape in that case is the same as in FIG.

また、図8に示すように透明保護板6を設けずに、封止部材8で回折格子部材10を上面から覆っても良い。この場合、回折格子2を形成後、スピンコート法等の方法で回折格子2の表面を覆うように、回折格子2の部分の表面が平坦になるように、封止部材8を塗布して硬化する。その後、所定の寸法に切断する。   Further, as shown in FIG. 8, the diffraction grating member 10 may be covered from the upper surface by the sealing member 8 without providing the transparent protective plate 6. In this case, after forming the diffraction grating 2, the sealing member 8 is applied and cured so that the surface of the diffraction grating 2 is flat so as to cover the surface of the diffraction grating 2 by a method such as spin coating. To do. Then, it cuts into a predetermined dimension.

このように透明保護板6を重ね合わせないで全体を加熱し、マスクパターンを介して紫外線を照射すると、マスクパターンから回折格子部材10までの距離が小さいため、パターンを明瞭に作ることができる。一方、実施の形態4のように透明保護板6を重ね合わせてから作製するとマスクパターンから回折格子部材10までの距離が大きいためパターンが若干不明瞭になるが、回折格子部材10の硬化と透明保護板6の固定が同時にできるため、工程が簡略になり製造コストを抑えることができる。   Thus, when the whole is heated without overlapping the transparent protective plate 6 and the ultraviolet rays are irradiated through the mask pattern, the pattern can be clearly formed because the distance from the mask pattern to the diffraction grating member 10 is small. On the other hand, when the transparent protective plate 6 is overlaid as in Embodiment 4, the pattern is slightly unclear because the distance from the mask pattern to the diffraction grating member 10 is large, but the diffraction grating member 10 is cured and transparent. Since the protection plate 6 can be fixed at the same time, the process is simplified and the manufacturing cost can be reduced.

また、図8のように透明保護板6を設けない構成にすると、構成も作製方法も簡単になり、製造コストを抑えることができる。逆にその他の構成のように透明保護板6を設けると、若干のコストは上げることになるが、回折格子2を保護する機能を飛躍的に向上できる。   Further, when the transparent protective plate 6 is not provided as shown in FIG. 8, the configuration and the manufacturing method are simplified, and the manufacturing cost can be reduced. On the contrary, when the transparent protective plate 6 is provided as in other configurations, the cost is slightly increased, but the function of protecting the diffraction grating 2 can be dramatically improved.

なお、光学的な特性から上記の材料の中から回折格子部材10としてある材料を選択したらその回折格子部材10の吸水率以下の吸水率の材料から封止部材8を選択すると良い。そうすることで回折格子部材10の吸水率を考慮する必要がなくなるため、回折格子部材10の選択の範囲が広がる。   If a material as the diffraction grating member 10 is selected from the above materials from the optical characteristics, the sealing member 8 may be selected from a material having a water absorption equal to or lower than the water absorption of the diffraction grating member 10. By doing so, it becomes unnecessary to consider the water absorption rate of the diffraction grating member 10, so the range of selection of the diffraction grating member 10 is expanded.

以上のように、本実施の形態5の回折素子1も回折格子2を構成する回折格子部材10が透明基板1、封止部材8、透明保護板6に囲まれ、周囲の空気には触れていない。そのため回折の特性に影響を及ぼさないレベルに回折格子2を構成する回折格子部材10の水分の吸収を抑制できる。   As described above, in the diffraction element 1 according to the fifth embodiment, the diffraction grating member 10 constituting the diffraction grating 2 is surrounded by the transparent substrate 1, the sealing member 8, and the transparent protective plate 6, and does not touch the surrounding air. Absent. Therefore, moisture absorption of the diffraction grating member 10 constituting the diffraction grating 2 can be suppressed to a level that does not affect the diffraction characteristics.

(実施の形態6)
実施の形態6について図面を参照しながら説明する。本実施の形態6は実施の形態1〜実施の形態5で説明した波長選択回折素子を備えた光ピックアップである。図9は本実施の形態6の光ピックアップの光学系の構成図、図10は本実施の形態6の光ピックアップの構成図である。
(Embodiment 6)
A sixth embodiment will be described with reference to the drawings. The sixth embodiment is an optical pickup provided with the wavelength selective diffraction element described in the first to fifth embodiments. FIG. 9 is a configuration diagram of the optical system of the optical pickup according to the sixth embodiment, and FIG. 10 is a configuration diagram of the optical pickup according to the sixth embodiment.

レーザ光源21はDVD用の波長λ1(約650nm)のレーザ光を出射する発光点とCD用の波長λ2(約780nm)のレーザ光を出射する発光点を1つのパッケージ内に搭載した2波長半導体レーザ光源とした。2つの発光点の距離は約110μmと近接している。2波長半導体レーザ光源には2種類ある。1つは2つの発光点を1つの半導体レーザ素子に集積したいわゆるモノリシック型2波長半導体レーザであり、もう1つは1つの発光点を備えた半導体レーザ素子を2つ隣接して備えたいわゆるハイブリッド型2波長半導体レーザである。本実施の形態6におけるレーザ光源21はどちらの種類でも構わない。   The laser light source 21 is a two-wavelength semiconductor in which a light emitting point that emits laser light having a wavelength λ1 (about 650 nm) for DVD and a light emitting point that emits laser light having a wavelength λ2 (about 780 nm) for CD are mounted in one package. A laser light source was used. The distance between the two light emitting points is close to about 110 μm. There are two types of two-wavelength semiconductor laser light sources. One is a so-called monolithic type two-wavelength semiconductor laser in which two light emitting points are integrated in one semiconductor laser element, and the other is a so-called hybrid having two semiconductor laser elements having one light emitting point adjacent to each other. This is a type 2 wavelength semiconductor laser. The laser light source 21 in the sixth embodiment may be either type.

回折素子1は前述の通り波長選択回折素子である。波長λ1のレーザ光は回折素子1を素通りし、波長λ2のレーザ光はトラッキングサーボ信号に用いられる3本の光線に変換される。有機物7は波長λ1よりもわずかに短い波長域に光吸収を有する。波長λ1において凸部材4の屈折率と充填部材5の屈折率または紫外線が非照射の領域11の屈折率と紫外線が照射された領域12の屈折率が略等しくなるようにする。そして、波長λ2において凸部材4の屈折率と充填部材5の屈折率または紫外線が非照射の領域11の屈折率と紫外線が照射された領域12の屈折率が異なるようにする。回折格子2のパターンは2つの領域が縞状に交互に並べられるように形成されている。この平行な配列の向きは3本の光線の集光スポットが光ディスク28の円周の接線方向と所定の微小角で並ぶように決められる。回折格子2のピッチは5〜20μm程度で、回折格子2の深さは約1〜10μm程度である。   The diffraction element 1 is a wavelength selective diffraction element as described above. The laser beam having the wavelength λ1 passes through the diffraction element 1, and the laser beam having the wavelength λ2 is converted into three beams used for the tracking servo signal. The organic substance 7 has light absorption in a wavelength range slightly shorter than the wavelength λ1. At the wavelength λ 1, the refractive index of the convex member 4 and the refractive index of the filling member 5 or the refractive index of the region 11 not irradiated with ultraviolet rays and the refractive index of the region 12 irradiated with ultraviolet rays are made substantially equal. Then, the refractive index of the convex member 4 and the refractive index of the filling member 5 or the refractive index of the non-irradiated region 11 and the refractive index of the region 12 irradiated with ultraviolet rays are made different at the wavelength λ2. The pattern of the diffraction grating 2 is formed so that two regions are alternately arranged in a stripe pattern. The direction of the parallel arrangement is determined so that the condensed spots of the three light beams are aligned with the tangential direction of the circumference of the optical disk 28 at a predetermined minute angle. The pitch of the diffraction grating 2 is about 5 to 20 μm, and the depth of the diffraction grating 2 is about 1 to 10 μm.

集積光学部材22は内部に複数の傾斜面が設けられた光学ガラスで作製され、傾斜面には偏光分離膜、ホログラム等が形成されている。コリメートレンズ23は往路光においてはレーザ光を略平行光にするレンズで、光学ガラスまたは光学プラスチック等で作製されている。ビームスプリッタ24は光学ガラス等で作製されており、表面に偏光分離膜が形成されており、レーザ光を一部のみ透過させ大半は反射させる。立ち上げプリズム25はそれまで光ディスク28の面に略平行な面内にあった光軸を、光ディスク28に対し略垂直に立ち上げるものである。本実施の形態6では立ち上げプリズムとしているが、立ち上げミラーとしても構わない。ホログラム素子26は偏光ホログラム26aと1/4波長板26bで構成されている。偏光ホログラム26aはDVDの波長の光にのみ作用するよう波長選択性のある材料で作製されている。また、1/4波長板26bはDVDとCDの両方の波長に作用するよう屈折率、厚みが設定されている。対物レンズ27は2焦点対物レンズで、波長λ1の光、波長λ2の光に対してそれぞれ焦点を結ぶように構成されている。2焦点対物レンズとしては、集光レンズおよびフレネルレンズまたはホログラムレンズの組み合わせ、DVD用集光レンズにCD再生時に開口制限手段を設ける組み合わせ等を用いることができる。光ディスク28はCD用がCD、CD−ROM、CD−R/RW、DVD用がDVD−ROM、DVD±R/RW、DVD−RAMなどであり、CD用もDVD用も再生専用の媒体を除いて全て記録も再生も可能なものである。また、本実施の形態6ではCD用とDVD用としているが、その組み合わせだけでなく、いわゆる次世代DVDであるBD(ブルーレイ ディスク)やHD DVD(ハイ デフィニション DVD)等との組み合わせでも一般性を失わない。   The integrated optical member 22 is made of optical glass having a plurality of inclined surfaces therein, and a polarization separation film, a hologram, and the like are formed on the inclined surfaces. The collimating lens 23 is a lens that makes laser light substantially parallel light in the forward light, and is made of optical glass or optical plastic. The beam splitter 24 is made of optical glass or the like, and has a polarization separation film formed on the surface thereof. The beam splitter 24 transmits only part of the laser light and reflects most of it. The rising prism 25 raises the optical axis that has been in a plane substantially parallel to the surface of the optical disc 28 until then, substantially perpendicular to the optical disc 28. Although the rising prism is used in the sixth embodiment, it may be a rising mirror. The hologram element 26 includes a polarization hologram 26a and a quarter wavelength plate 26b. The polarization hologram 26a is made of a material having wavelength selectivity so as to act only on light having a wavelength of DVD. The quarter wavelength plate 26b is set to have a refractive index and a thickness so as to act on both wavelengths of DVD and CD. The objective lens 27 is a bifocal objective lens and is configured to focus on the light of wavelength λ1 and the light of wavelength λ2. As the bifocal objective lens, a combination of a condensing lens and a Fresnel lens or a hologram lens, a combination in which a condensing lens for DVD is provided with aperture limiting means during CD reproduction, or the like can be used. The optical disk 28 is a CD, a CD-ROM, a CD-R / RW, a DVD-ROM, a DVD ± R / RW, a DVD-RAM, etc., except for a read-only medium for a CD and a DVD. All can be recorded and played back. In the sixth embodiment, for CD and DVD, not only the combination but also the combination with BD (Blu-ray Disc), HD DVD (High Definition DVD), etc., which are so-called next generation DVDs, is general. I will not lose.

光ディスク28からの反射光を受光して電気信号を発生させる受光センサ29は光ディスク28からの反射光を受光し、RF信号、トラッキングエラー信号、フォーカスエラー信号等を生成する電気信号を出力する受光素子である。受光センサ29はいくつかの受光部に分かれている。CDとDVDとでトラッキングエラー信号が異なる。CDでは回折素子1で分離した3本の光線の全てを使う3ビーム法を用いるのに対し、DVDは中央の1本の光線のみを使う1ビーム法を用いるためである。   A light receiving sensor 29 that receives reflected light from the optical disk 28 and generates an electrical signal receives the reflected light from the optical disk 28 and outputs an electrical signal that generates an RF signal, a tracking error signal, a focus error signal, and the like. It is. The light receiving sensor 29 is divided into several light receiving portions. The tracking error signal differs between CD and DVD. This is because the CD uses the three-beam method that uses all three light beams separated by the diffraction element 1, whereas the DVD uses the one-beam method that uses only one central light beam.

前光モニタ30は光学センサであり、レーザ光源21からのレーザ光の一部の光量を電気信号に変換し、その結果を制御回路(図示せず)を通してレーザ光源21にフィードバックすることで、レーザ光源21の光量を一定に保つ働きをする。   The front light monitor 30 is an optical sensor, converts a part of the laser light from the laser light source 21 into an electrical signal, and feeds back the result to the laser light source 21 through a control circuit (not shown). It works to keep the light quantity of the light source 21 constant.

結合ベース31は回折素子1、集積光学素子22、レーザ光源21、受光センサ29を所定の位置に固定し、キャリッジ32に固定される。結合ベース31を形成する材料は、比較的軽量で高精度なできあがり寸法を実現できる形状加工性、良好な放熱性等を兼ね備えることが求められる。そのためZn、Zn合金、Al、Al合金、Ti、Ti合金などが好適に用いられる。本実施の形態6ではコスト面などを考慮し、Znダイキャストで作製した。キャリッジ32は光ピックアップ20の骨格を成すもので、キャリッジ32に各種光学部品を始めとする光ピックアップ20を構成する部品が直接あるいは他の部品を介して取り付けられる。キャリッジ32はZn合金、Mg合金などの合金材料あるいは硬質樹脂材料などで形成される。   The coupling base 31 fixes the diffraction element 1, the integrated optical element 22, the laser light source 21, and the light receiving sensor 29 at predetermined positions and is fixed to the carriage 32. The material forming the coupling base 31 is required to have a relatively lightweight and highly accurate shape workability capable of realizing a finished dimension, good heat dissipation, and the like. Therefore, Zn, Zn alloy, Al, Al alloy, Ti, Ti alloy and the like are preferably used. In the sixth embodiment, it is manufactured by Zn die casting in consideration of cost and the like. The carriage 32 forms a skeleton of the optical pickup 20, and components constituting the optical pickup 20 including various optical components are attached to the carriage 32 directly or via other components. The carriage 32 is made of an alloy material such as Zn alloy or Mg alloy, or a hard resin material.

コリメートレンズ23、ビームスプリッタ24、立ち上げプリズム25、前光モニタ30は直接または取付部材を介してキャリッジ32に固定される。   The collimating lens 23, the beam splitter 24, the rising prism 25, and the front light monitor 30 are fixed to the carriage 32 directly or via an attachment member.

ホログラム素子26と対物レンズ27はコイルを備えたレンズホルダ34に固定される。レンズホルダ34はサスペンションワイヤ35を介して固定部36に可動状態で支持される。固定部36は磁石を備えたヨーク37に固定される。その際レンズホルダ34はサスペンションワイヤ35以外には触れないようにする。アクチュエータ33は対物レンズ27、コイル、磁石を備える。アクチュエータ33はキャリッジ32に接着剤で固定される。アクチュエータ33は接着剤を介してのみキャリッジ32と接触する。アクチュエータ33はフォーカスサーボ、トラッキングサーボにより光ディスク28の記録面のトラック上に集光スポットが合焦するように対物レンズ27を駆動する。   The hologram element 26 and the objective lens 27 are fixed to a lens holder 34 having a coil. The lens holder 34 is movably supported by the fixed portion 36 via the suspension wire 35. The fixed part 36 is fixed to a yoke 37 provided with a magnet. At this time, the lens holder 34 should not be touched except for the suspension wire 35. The actuator 33 includes an objective lens 27, a coil, and a magnet. The actuator 33 is fixed to the carriage 32 with an adhesive. The actuator 33 contacts the carriage 32 only via the adhesive. The actuator 33 drives the objective lens 27 so that the focused spot is focused on the track on the recording surface of the optical disk 28 by focus servo and tracking servo.

次に光路について説明する。DVD用の波長λ1のレーザ光は回折素子1、集積光学部材22を通過してコリメートレンズ23に入射する。回折素子1において波長λ1の光は上述の通りそのまま透過する。コリメートレンズ23では略平行光に変換されてビームスプリッタ24に入射する。一部の光はビームスプリッタ24を透過し、前光モニタ30に入射する。前光モニタ30に入射した光は電気信号に変換されて波長λ1のレーザ光の光量制御に使われる。ビームスプリッタ24に入射した残りの大半の光は反射して立ち上げプリズム25に入射する。立ち上げプリズム25に入射した光はホログラム素子26、対物レンズ27を通過して光ディスク28の記録面に焦点を結ぶ。   Next, the optical path will be described. The laser beam having the wavelength λ 1 for DVD passes through the diffraction element 1 and the integrated optical member 22 and enters the collimating lens 23. In the diffractive element 1, the light of wavelength λ1 is transmitted as it is as described above. The collimator lens 23 is converted into substantially parallel light and enters the beam splitter 24. Some light passes through the beam splitter 24 and enters the front light monitor 30. The light incident on the front light monitor 30 is converted into an electrical signal and used to control the amount of laser light having the wavelength λ1. Most of the remaining light incident on the beam splitter 24 is reflected and enters the rising prism 25. The light incident on the rising prism 25 passes through the hologram element 26 and the objective lens 27 and is focused on the recording surface of the optical disk 28.

ホログラム素子26を透過する際、偏光ホログラム26aの影響を受けずにそのまま透過するよう光の偏光方向を設定してあり、1/4波長板26bで直線偏光(P偏光)から円偏光に変換される。   When transmitting through the hologram element 26, the polarization direction of the light is set so that it is transmitted as it is without being influenced by the polarization hologram 26a, and is converted from linearly polarized light (P-polarized light) to circularly polarized light by the quarter wavelength plate 26b. The

光ディスク28で反射された光は対物レンズ27、ホログラム素子26、立ち上げプリズム25、ビームスプリッタ24、コリメートレンズ23を通り、集積光学部材22に入射する。ホログラム素子26を再度透過する際、1/4波長板26bで円偏光からP偏光である往きの直線偏光とは垂直な直線偏光、すなわちS偏光に変換される。偏光ホログラム26aによりRF信号、トラッキングエラー信号、フォーカスエラー信号等に対応する信号光成分に分離される。ビームスプリッタ24では全反射する。   The light reflected by the optical disk 28 passes through the objective lens 27, the hologram element 26, the rising prism 25, the beam splitter 24, and the collimator lens 23 and enters the integrated optical member 22. When transmitting again through the hologram element 26, the quarter wavelength plate 26b converts the circularly polarized light to the forward linearly polarized light which is P-polarized light, which is perpendicular to the linearly polarized light, that is, S-polarized light. The polarization hologram 26a separates the signal light component corresponding to the RF signal, tracking error signal, focus error signal, and the like. The beam splitter 24 totally reflects.

集積光学部材22内の傾斜面22aに設けられた偏光分離膜はレーザ光源21から出射されたP偏光のレーザ光は透過し、光ディスク28で反射されてきたS偏光は反射するような偏光分離膜構成を採用している。そのため、集積光学部材22に入射した光は傾斜面22aに設けられた偏光分離膜で反射して受光センサ29に入射する。偏光ホログラム26aで分離され受光センサ29に入射した各信号光成分は受光センサ29で各種電気信号に変換される。   The polarization separation film provided on the inclined surface 22 a in the integrated optical member 22 transmits the P-polarized laser light emitted from the laser light source 21 and reflects the S-polarized light reflected by the optical disk 28. The configuration is adopted. Therefore, the light incident on the integrated optical member 22 is reflected by the polarization separation film provided on the inclined surface 22 a and enters the light receiving sensor 29. Each signal light component separated by the polarization hologram 26 a and entering the light receiving sensor 29 is converted into various electric signals by the light receiving sensor 29.

CD用の波長λ2のレーザ光は回折素子1、集積光学部材22を通過してコリメートレンズ23に入射される。回折素子1において波長λ2の光は上述の通り3本の光線に分離される。コリメートレンズ23で略平行光に変換されてビームスプリッタ24に入射する。一部の光はビームスプリッタ24を透過し、前光モニタ30に入射される。前光モニタ30に入射した光は電気信号に変換されて波長λ2のレーザ光の光量制御に使われる。ビームスプリッタ24に入射した残りの大半の光は反射して立ち上げプリズム25に入射する。立ち上げプリズム25に入射した光はホログラム素子26、対物レンズ27を通過して光ディスク28の記録面に焦点を結ぶ。ホログラム素子26を透過する際、この波長λ2では偏光ホログラム26aの影響を受けないのでそのまま透過し、1/4波長板26bで直線偏光(P偏光)から円偏光に変換される。   The laser beam having the wavelength λ 2 for CD passes through the diffraction element 1 and the integrated optical member 22 and enters the collimating lens 23. In the diffractive element 1, the light of wavelength λ2 is separated into three light beams as described above. The light is converted into substantially parallel light by the collimator lens 23 and enters the beam splitter 24. Part of the light passes through the beam splitter 24 and enters the front light monitor 30. The light incident on the front light monitor 30 is converted into an electric signal and used for controlling the amount of laser light having a wavelength λ2. Most of the remaining light incident on the beam splitter 24 is reflected and enters the rising prism 25. The light incident on the rising prism 25 passes through the hologram element 26 and the objective lens 27 and is focused on the recording surface of the optical disk 28. When transmitting through the hologram element 26, the wavelength λ2 is not affected by the polarization hologram 26a and is transmitted as it is, and is converted from linearly polarized light (P-polarized light) to circularly polarized light by the quarter-wave plate 26b.

光ディスク28で反射された光は対物レンズ27、ホログラム素子26、立ち上げプリズム25、ビームスプリッタ24、コリメートレンズ23を通り、集積光学部材22に入射する。ホログラム素子26を再度透過する際、1/4波長板26bで円偏光からP偏光である往きの直線偏光とは垂直な直線偏光、すなわちS偏光に変換される。そしてこの波長λ2では偏光ホログラム26aの影響を受けないため偏光ホログラム26aをそのまま透過する。ビームスプリッタ24では全反射する。   The light reflected by the optical disk 28 passes through the objective lens 27, the hologram element 26, the rising prism 25, the beam splitter 24, and the collimator lens 23 and enters the integrated optical member 22. When transmitting again through the hologram element 26, the quarter wavelength plate 26b converts the circularly polarized light to the forward linearly polarized light which is P-polarized light, which is perpendicular to the linearly polarized light, that is, S-polarized light. Since the wavelength λ2 is not affected by the polarization hologram 26a, it passes through the polarization hologram 26a as it is. The beam splitter 24 totally reflects.

集積光学部材22内の傾斜面22bに設けられた偏光分離膜はレーザ光源21から出射された光を透過し、光ディスク28で反射されてきた波長λ2のレーザ光を反射し、波長λ1のレーザ光を透過するような膜構成を採用している。そのため集積光学部材22に入射した光は傾斜面22bに設けられた偏光分離膜で反射され、傾斜面22cに設けられたホログラムに入射し、RF信号、トラッキングエラー信号、フォーカスエラー信号等に対応する信号光成分に分離される。その分離された光はそれぞれ受光センサ29に入射し、各種電気信号に変換される。   The polarization separation film provided on the inclined surface 22b in the integrated optical member 22 transmits the light emitted from the laser light source 21, reflects the laser light having the wavelength λ2 reflected by the optical disk 28, and laser light having the wavelength λ1. A film configuration that transmits the light is adopted. Therefore, the light incident on the integrated optical member 22 is reflected by the polarization separation film provided on the inclined surface 22b, is incident on the hologram provided on the inclined surface 22c, and corresponds to an RF signal, a tracking error signal, a focus error signal, and the like. Separated into signal light components. The separated light enters the light receiving sensor 29 and is converted into various electric signals.

本実施の形態6において回折素子1は波長選択性を有し、DVD用の波長λ1のレーザ光を素通りさせ、CD用の波長λ2のレーザ光のみをトラッキングサーボに使用する3本の光線に分離する。また、吸水率が5%を超える回折格子2を構成する材料は空気に対して非露出であるため、回折素子1は回折の特性が安定している。したがって、この回折素子1を搭載した光ピックアップ20はトラッキングサーボが安定し、安定した記録や再生の特性が得られる。   In the sixth embodiment, the diffractive element 1 has wavelength selectivity, allows laser light of wavelength λ1 for DVD to pass through, and separates only laser light of wavelength λ2 for CD into three light beams used for tracking servo. To do. Moreover, since the material constituting the diffraction grating 2 having a water absorption rate exceeding 5% is not exposed to air, the diffraction element 1 has stable diffraction characteristics. Therefore, the optical pickup 20 equipped with the diffraction element 1 has a stable tracking servo and stable recording and reproduction characteristics.

(実施の形態7)
本実施の形態7について図面を参照しながら説明する。本実施の形態7は実施の形態3で説明した単波長用の回折素子を備えた光ピックアップである。図11は本実施の形態7の光ピックアップの光学系の構成図である。レーザ光源21aはDVD用の波長λ1(約650nm)のレーザ光を出射する。レーザ光源21bはCD用の波長λ2(約780nm)のレーザ光を出射する。
(Embodiment 7)
The seventh embodiment will be described with reference to the drawings. The seventh embodiment is an optical pickup provided with the single-wavelength diffraction element described in the third embodiment. FIG. 11 is a configuration diagram of an optical system of the optical pickup according to the seventh embodiment. The laser light source 21a emits laser light having a wavelength λ1 (about 650 nm) for DVD. The laser light source 21b emits laser light having a wavelength λ2 (about 780 nm) for CD.

回折素子1は波長λ2のレーザ光のみを通過させるため、有機物7を含有させて波長選択性の機能を持たせる必要はない。そのため本実施の形態7の回折素子1は波長λ2のレーザ光に対して最適の回折の特性を持たせることができる。吸水率が5%を超える回折格子2を構成する材料は空気に対し非露出であるため、回折素子1は回折の特性が安定している。波長λ2のレーザ光はトラッキングサーボ信号に用いられる3本の光線に分離される。回折格子2のパターンは透明基板3の領域と充填部材5の領域の2つの領域が縞状に交互に並べられるように形成されている。この平行な配列の向きは3本の光線の集光スポットが光ディスク28の円周の接線方向と所定の微小角で並ぶように決められる。回折格子2のピッチは5〜20μm程度で、回折格子2の深さは約1〜10μm程度である。   Since the diffractive element 1 allows only the laser beam having the wavelength λ2 to pass therethrough, it is not necessary to include the organic substance 7 and to have a wavelength selective function. Therefore, the diffraction element 1 according to the seventh embodiment can have optimum diffraction characteristics with respect to the laser light having the wavelength λ2. Since the material constituting the diffraction grating 2 having a water absorption rate exceeding 5% is not exposed to air, the diffraction element 1 has stable diffraction characteristics. The laser light having the wavelength λ2 is separated into three light beams used for the tracking servo signal. The pattern of the diffraction grating 2 is formed so that the two regions of the transparent substrate 3 and the filling member 5 are alternately arranged in a stripe pattern. The direction of the parallel arrangement is determined so that the condensed spots of the three light beams are aligned with the tangential direction of the circumference of the optical disk 28 at a predetermined minute angle. The pitch of the diffraction grating 2 is about 5 to 20 μm, and the depth of the diffraction grating 2 is about 1 to 10 μm.

集積光学部材22はレーザ光源21aから出射された波長λ1のレーザ光に対する機能が不要な以外は実施の形態6の集積光学部材22と同じ機能、構成であり、その説明を援用する。反射鏡38は波長λ1のレーザ光の進行方向を光ディスク28の方向に変換する。反射鏡38は表面に全反射膜を有する。コリメートレンズ23aはレーザ光源21aから出射された発散光のレーザ光を略平行光に変換する。コリメートレンズ23bはレーザ光源21bから出射された発散光のレーザ光を略平行光に変換する。コリメートレンズ23a、23bは光学ガラス、光学プラスチックで作製される。   The integrated optical member 22 has the same function and configuration as the integrated optical member 22 of Embodiment 6 except that the function for the laser beam having the wavelength λ1 emitted from the laser light source 21a is unnecessary, and the description thereof is incorporated. The reflecting mirror 38 converts the traveling direction of the laser light having the wavelength λ1 into the direction of the optical disk 28. The reflecting mirror 38 has a total reflection film on the surface. The collimating lens 23a converts the divergent laser light emitted from the laser light source 21a into substantially parallel light. The collimating lens 23b converts the diverging laser beam emitted from the laser light source 21b into substantially parallel light. The collimating lenses 23a and 23b are made of optical glass or optical plastic.

ビームスプリッタ24は内部に波長選択偏光分離膜を備えた斜面を有する。波長選択偏光分離膜はレーザ光源21aから出射された波長λ1のレーザ光の大半を透過させ、一部を反射させる。また、レーザ光源21bから出射された波長λ2のレーザ光の大半を反射させ、一部を透過させる。さらに光ディスク28の記録面で反射した波長λ1および波長λ2のレーザ光をほぼ全反射させる。   The beam splitter 24 has an inclined surface with a wavelength selective polarization separation film inside. The wavelength selective polarization separation film transmits most of the laser light having the wavelength λ1 emitted from the laser light source 21a and reflects a part thereof. Further, most of the laser light having the wavelength λ2 emitted from the laser light source 21b is reflected and partially transmitted. Further, the laser light having the wavelengths λ1 and λ2 reflected by the recording surface of the optical disk 28 is substantially totally reflected.

立ち上げプリズム25、ホログラム素子26、対物レンズ27、光ディスク28、受光センサ29、前光モニタ30は実施の形態6と同じであり、その説明を援用する。結合ベース31は実施の形態6の結合ベース31が搭載するレーザ光源21の替わりにレーザ光源21bをする。実施の形態6のキャリッジ32の分に加え、本実施の形態7のキャリッジ32はレーザ光源21a、反射鏡38、コリメートレンズ23aをも直接または取付部材を介して固定する。アクチュエータ33は実施の形態6と同じであり、その説明を援用する。   The rising prism 25, the hologram element 26, the objective lens 27, the optical disk 28, the light receiving sensor 29, and the front light monitor 30 are the same as those in the sixth embodiment, and the description thereof is cited. The coupling base 31 uses a laser light source 21b instead of the laser light source 21 mounted on the coupling base 31 of the sixth embodiment. In addition to the carriage 32 of the sixth embodiment, the carriage 32 of the seventh embodiment also fixes the laser light source 21a, the reflecting mirror 38, and the collimating lens 23a directly or via an attachment member. The actuator 33 is the same as that of the sixth embodiment, and the description thereof is cited.

光路について、波長λ2のレーザ光に関しては実施の形態6と同じであり、その説明を援用する。レーザ光源21aから出射された波長λ1のレーザ光は反射鏡38にて反射され、コリメートレンズ23aに入射する。コリメートレンズ23aで略平行光に変換され、ビームスプリッタ24に入射する。ビームスプリッタ24で反射されたレーザ光は前光モニタ30に入射し、レーザ光源21aの出力の制御に用いられる。ビームスプリッタ24を透過した大半のレーザ光は立ち上げプリズム25に入射する。波長λ1のレーザ光の光路もこれ以降は実施の形態6と同じであり、その説明を援用する。   Regarding the optical path, the laser light having the wavelength λ2 is the same as that of the sixth embodiment, and the description thereof is cited. The laser light having the wavelength λ1 emitted from the laser light source 21a is reflected by the reflecting mirror 38 and enters the collimating lens 23a. The light is converted into substantially parallel light by the collimator lens 23 a and enters the beam splitter 24. The laser light reflected by the beam splitter 24 enters the front light monitor 30 and is used for controlling the output of the laser light source 21a. Most of the laser light transmitted through the beam splitter 24 enters the rising prism 25. Since the optical path of the laser beam having the wavelength λ1 is the same as that in the sixth embodiment, the description thereof is cited.

以上のように本実施の形態7の光ピックアップ20は回折素子1の回折の特性が安定しているため、トラッキングサーボが安定する。その結果記録や再生の特性が安定する。   As described above, since the optical pickup 20 of the seventh embodiment has stable diffraction characteristics of the diffraction element 1, the tracking servo is stable. As a result, recording and playback characteristics are stabilized.

(実施の形態8)
実施の形態8について図面を参照しながら説明する。実施の形態8は実施の形態6または実施の形態7の光ピックアップを備えた光ディスク装置である。図12は本実施の形態8の光ピックアップモジュールの構成図、図13は本実施の形態8の光ディスク装置の構成図である。
(Embodiment 8)
An eighth embodiment will be described with reference to the drawings. The eighth embodiment is an optical disk device provided with the optical pickup of the sixth or seventh embodiment. FIG. 12 is a block diagram of an optical pickup module according to the eighth embodiment, and FIG. 13 is a block diagram of an optical disk device according to the eighth embodiment.

光ディスク装置50のうち、光ディスク28や光ピックアップ20を駆動する駆動機構を光ピックアップモジュール40という。ベース41は光ピックアップモジュール40の骨組みを成すもので、このベース41に直接的、間接的に各構成部品を固定する。   Of the optical disk device 50, a drive mechanism that drives the optical disk 28 and the optical pickup 20 is referred to as an optical pickup module 40. The base 41 forms a framework of the optical pickup module 40, and each component is fixed directly or indirectly to the base 41.

光ディスク28を載置するターンテーブルを備えたスピンドルモータ42はベース41に固定される。スピンドルモータ42は光ディスク28を回転させる回転駆動力を生成する。   A spindle motor 42 having a turntable on which the optical disk 28 is placed is fixed to the base 41. The spindle motor 42 generates a rotational driving force that rotates the optical disk 28.

フィードモータ43はベース41に固定される。フィードモータ43は光ピックアップ20が光ディスク28の内周と外周の間を移動するために必要な回転駆動力を生成する。フィードモータ43としてステッピングモータ、DCモータなどが使用される。スクリューシャフト44はらせん状に溝が掘られており、直接または数段のギアを介してフィードモータ43に接続される。本実施の形態8では直接フィードモータ43と接続される。ガイドシャフト45、46はそれぞれ両端で支持部材を介してベース41に固定される。ガイドシャフト45、46は光ピックアップ20を移動自在に支持する。光ピックアップ20はスクリューシャフト44の溝と噛み合うガイド歯を有するラックを備える。ラックがスクリューシャフト44に伝達されたフィードモータ43の回転駆動力を直線駆動力に変換するために光ピックアップ20は光ディスク28の内周と外周の間を移動することができる。   The feed motor 43 is fixed to the base 41. The feed motor 43 generates a rotational driving force necessary for the optical pickup 20 to move between the inner periphery and the outer periphery of the optical disk 28. A stepping motor, a DC motor, or the like is used as the feed motor 43. The screw shaft 44 has a groove formed in a spiral shape, and is connected to the feed motor 43 directly or through several stages of gears. In the eighth embodiment, it is directly connected to the feed motor 43. The guide shafts 45 and 46 are fixed to the base 41 via support members at both ends. The guide shafts 45 and 46 support the optical pickup 20 so as to be movable. The optical pickup 20 includes a rack having guide teeth that mesh with the grooves of the screw shaft 44. The optical pickup 20 can move between the inner periphery and the outer periphery of the optical disk 28 so that the rack converts the rotational driving force of the feed motor 43 transmitted to the screw shaft 44 into a linear driving force.

光ピックアップ20は実施の形態6または実施の形態7で説明したものである。光ピックアップ20は光ディスク28に対し情報の記録または再生の少なくとも一方を行い、そのためにレーザ光を光ディスク28に向けて出射する。光ピックアップ20から出射されるレーザ光が光ディスク28に対し直角に入射するように、支持部材を構成する調整機構でガイドシャフト45、46の傾きを調整する。   The optical pickup 20 has been described in the sixth embodiment or the seventh embodiment. The optical pickup 20 performs at least one of recording and reproduction of information with respect to the optical disk 28 and emits laser light toward the optical disk 28 for that purpose. The inclination of the guide shafts 45 and 46 is adjusted by an adjusting mechanism that constitutes a support member so that the laser light emitted from the optical pickup 20 is incident on the optical disk 28 at a right angle.

上部筐体51aと下部筐体51bを組み合わせてネジなどを用いて互いに固定して筐体51とする。トレイ52は筐体51に出没自在に設けられる。トレイ52はカバー53を取り付けた光ピックアップモジュール40を下面側から配置する。カバー53は開口を有し、光ピックアップ20の対物レンズ27を含む一部とスピンドルモータ42のターンテーブルを露出させる。本実施の形態8の場合、フィードモータ43も露出させる。ベゼル54をトレイ52の前端面に設け、トレイ52が筐体51内に収納された時に、トレイ52の出没口を塞ぐようにする。   The upper casing 51a and the lower casing 51b are combined and fixed to each other using screws or the like to form the casing 51. The tray 52 is provided in the casing 51 so as to be able to appear and disappear. In the tray 52, the optical pickup module 40 to which the cover 53 is attached is arranged from the lower surface side. The cover 53 has an opening to expose a part including the objective lens 27 of the optical pickup 20 and the turntable of the spindle motor 42. In the case of the eighth embodiment, the feed motor 43 is also exposed. A bezel 54 is provided on the front end surface of the tray 52 so that when the tray 52 is stored in the housing 51, the entrance and exit of the tray 52 is closed.

ベゼル54にはイジェクトスイッチ55が設けられ、イジェクトスイッチ55を押すことで、筐体51とトレイ52との係合が解除され、トレイ52は筐体51に対し出没が可能な状態となる。レール56はそれぞれトレイ52の両側部および筐体51の双方に摺動自在に取り付けられる。   The bezel 54 is provided with an eject switch 55. When the eject switch 55 is pressed, the engagement between the housing 51 and the tray 52 is released, and the tray 52 can be brought into and out of the housing 51. The rails 56 are slidably attached to both sides of the tray 52 and the casing 51, respectively.

筐体51の内部やトレイ52の内部には図示していない回路基板があり、信号処理系のICや電源回路などが搭載されている。図示していない外部コネクタ57はコンピュータ等の電子機器に設けられた電源/信号ラインと接続される。そして、外部コネクタ57を介して光ディスク装置50内に電力を供給したり、外部からの電気信号を光ディスク装置50内に導いたり、あるいは光ディスク装置50で生成された電気信号を外部の電子機器などに送出したりする。   There is a circuit board (not shown) inside the casing 51 and inside the tray 52, and a signal processing system IC, a power supply circuit, and the like are mounted. An external connector 57 (not shown) is connected to a power / signal line provided in an electronic device such as a computer. Then, power is supplied into the optical disc device 50 via the external connector 57, an electric signal from the outside is guided into the optical disc device 50, or an electric signal generated by the optical disc device 50 is supplied to an external electronic device or the like. Or send it out.

このように本実施の形態8の光ディスク装置50は実施の形態6または実施の形態7で説明した光ピックアップ20を備えている。実施の形態6または実施の形態7の光ピックアップ20はトラッキングサーボが安定しており、そのため記録や再生の特性が安定している。したがって、本実施の形態8の光ディスク装置50は安定したトラッキングサーボにより安定した記録および再生をすることができる。   As described above, the optical disc apparatus 50 according to the eighth embodiment includes the optical pickup 20 described in the sixth embodiment or the seventh embodiment. In the optical pickup 20 of the sixth embodiment or the seventh embodiment, the tracking servo is stable, and therefore the recording and reproduction characteristics are stable. Therefore, the optical disc apparatus 50 according to the eighth embodiment can perform stable recording and reproduction with stable tracking servo.

以上のように本発明の回折素子は回折格子2を構成する材料が空気中の水分を吸収する量を回折の特性に影響を及ぼさないレベルに水分の吸収を抑制できる結果、高温高湿の環境にさらされても回折の特性が安定している。したがって、本発明の回折素子は光ピックアップや光ピックアップを搭載した光ディスク装置に有用である。   As described above, the diffraction element of the present invention can suppress the absorption of moisture to a level that does not affect the diffraction characteristics of the material constituting the diffraction grating 2 so as to absorb moisture in the air. The diffraction characteristics are stable even when exposed to. Therefore, the diffractive element of the present invention is useful for an optical pickup and an optical disc apparatus equipped with the optical pickup.

(a)本実施の形態1の回折素子の正面図、(b)(a)のA−A断面の平面図(A) Front view of diffraction element of Embodiment 1, (b) Plan view of AA cross section of (a) (a)本実施の形態2の回折素子の正面図、(b)(a)のA−A断面の平面図(A) Front view of diffraction element of Embodiment 2, (b) Plan view of AA cross section of (a) (a)本実施の形態3の回折素子の1形状の正面図、(b)(a)のA−A断面の平面図(A) Front view of one shape of diffraction element of Embodiment 3, (b) Plan view of AA cross section of (a) (a)本実施の形態3の回折素子の他の形状の正面図、(b)(a)のA−A断面の平面図(A) The front view of the other shape of the diffraction element of this Embodiment 3, (b) The top view of the AA cross section of (a). (a)本実施の形態4の回折素子の1形状の正面図、(b)(a)のA−A断面の平面図(A) Front view of one shape of diffraction element of Embodiment 4, (b) Plan view of AA cross section of (a) (a)本実施の形態4の回折素子の他の形状の正面図、(b)(a)のA−A断面の平面図(A) The front view of the other shape of the diffraction element of this Embodiment 4, (b) The top view of the AA cross section of (a). (a)本実施の形態5の回折素子の1形状の正面図、(b)(a)のA−A断面の平面図(A) Front view of one shape of diffraction element of Embodiment 5, (b) Plan view of AA cross section of (a) (a)本実施の形態5の回折素子の他の形状の正面図、(b)(a)のA−A断面の平面図(A) The front view of the other shape of the diffraction element of this Embodiment 5, (b) The top view of the AA cross section of (a). 本実施の形態6の光ピックアップの光学系の構成図Configuration diagram of optical system of optical pickup of Embodiment 6 本実施の形態6の光ピックアップの構成図Configuration diagram of optical pickup of Embodiment 6 本実施の形態7の光ピックアップの光学系の構成図Configuration diagram of optical system of optical pickup of Embodiment 7 本実施の形態8の光ピックアップモジュールの構成図Configuration diagram of optical pickup module according to Embodiment 8 本実施の形態8の光ディスク装置の構成図Configuration diagram of optical disk apparatus according to Embodiment 8 (a)回折格子の表面を平坦にした従来の例の回折素子の正面図、(b)(a)のA−A断面の平面図(A) Front view of a diffraction element of a conventional example in which the surface of the diffraction grating is flattened, (b) Plan view of the AA section of (a)

符号の説明Explanation of symbols

1 回折素子
2 回折格子
3 透明基板
4 凸部材
5 充填部材
6 透明保護板
7 有機物
8 封止部材
9 凹凸
10 回折格子部材
11 紫外線が非照射の領域
12 紫外線が照射された領域
20 光ピックアップ
21 レーザ光源
22 集積光学部材
23 コリメートレンズ
24 ビームスプリッタ
25 立ち上げプリズム
26 ホログラム素子
26a 偏光ホログラム
26b 1/4波長板
27 対物レンズ
28 光ディスク
29 受光センサ
30 前光モニタ
31 結合ベース
32 キャリッジ
33 アクチュエータ
34 レンズホルダ
35 サスペンションワイヤ
36 固定部
37 ヨーク
38 反射鏡
40 光ピックアップモジュール
41 ベース
42 スピンドルモータ
43 フィードモータ
44 スクリューシャフト
45、46 ガイドシャフト
51 筐体
51a 上部筐体
51b 下部筐体
52 トレイ
53 カバー
54 ベゼル
55 イジェクトボタン
56 レール
57 外部コネクタ
DESCRIPTION OF SYMBOLS 1 Diffraction element 2 Diffraction grating 3 Transparent substrate 4 Convex member 5 Filling member 6 Transparent protective plate 7 Organic substance 8 Sealing member 9 Concavity and convexity 10 Diffraction grating member 11 Area | region where ultraviolet rays were not irradiated 12 Area | region irradiated with ultraviolet rays 20 Optical pick-up 21 Laser Light source 22 Integrated optical member 23 Collimator lens 24 Beam splitter 25 Rising prism 26 Hologram element 26a Polarization hologram 26b 1/4 wavelength plate 27 Objective lens 28 Optical disk 29 Light receiving sensor 30 Front light monitor 31 Coupling base 32 Carriage 33 Actuator 34 Lens holder 35 Suspension wire 36 Fixed portion 37 Yoke 38 Reflector 40 Optical pickup module 41 Base 42 Spindle motor 43 Feed motor 44 Screw shaft 45, 46 Guide shaft 51 Housing Body 51a Upper housing 51b Lower housing 52 Tray 53 Cover 54 Bezel 55 Eject button 56 Rail 57 External connector

Claims (13)

透明基板と、前記透明基板の表面に形成された回折格子とを備えた回折素子において、前記回折格子を構成する所定の透明な凸部材が表面に配置された前記透明基板と、透明保護板と、前記透明基板と前記凸部材とで構成される凹凸と前記透明保護板との間に充填されて前記回折格子を構成する透明な充填部材と、前記透明基板と前記透明保護板とをつないで前記充填部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子。 In a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, the transparent substrate on which a predetermined transparent convex member constituting the diffraction grating is disposed, and a transparent protective plate The transparent substrate and the transparent protective plate are connected between the transparent substrate and the transparent protective plate, and the transparent filling member that is filled between the transparent protective plate and the concave and convex portions formed of the transparent substrate and the convex member. And a sealing member that annularly surrounds the outside of the filling member. 前記封止部材の吸水率が前記充填部材の吸水率以下であることを特徴とする請求項1に記載の回折素子。 The diffraction element according to claim 1, wherein a water absorption rate of the sealing member is equal to or less than a water absorption rate of the filling member. 所定の波長域に光吸収を持つ有機物を前記凸部材または前記充填部材のいずれか一方に含むことを特徴とする請求項1に記載の回折素子。 2. The diffraction element according to claim 1, wherein an organic substance having light absorption in a predetermined wavelength region is included in one of the convex member and the filling member. 透明基板と、前記透明基板の表面に形成された回折格子とを備えた回折素子において、前記回折格子を構成する2つの屈折率を有する透明な回折格子部材と、前記回折格子部材の表面側に配置される透明保護板と、前記透明基板と前記透明保護板とをつないで前記回折格子部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子。 In a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, a transparent diffraction grating member having two refractive indexes constituting the diffraction grating, and a surface side of the diffraction grating member A diffraction element, comprising: a transparent protective plate disposed; and a sealing member that connects the transparent substrate and the transparent protective plate and surrounds the diffraction grating member in an annular shape. 前記封止部材の吸水率が前記回折格子部材の吸水率以下であることを特徴とする請求項4に記載の回折素子。 The diffraction element according to claim 4, wherein a water absorption rate of the sealing member is equal to or less than a water absorption rate of the diffraction grating member. 所定の波長域に光吸収を持つ有機物を前記回折格子部材に含み、一方の前記屈折率の領域の前記有機物は前記光吸収を少なくとも一部失ったことを特徴とする請求項4に記載の回折素子。 The diffraction according to claim 4, wherein the diffraction grating member includes an organic substance having light absorption in a predetermined wavelength region, and the organic substance in one of the refractive index regions has lost at least part of the light absorption. element. 透明基板と、前記透明基板の表面に形成された回折格子とを備えた回折素子において、前記回折格子を構成する2つの屈折率を有する透明な回折格子部材と、前記回折格子部材を覆う透明な封止部材と、を備えたことを特徴とする回折素子。 In a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, a transparent diffraction grating member having two refractive indexes constituting the diffraction grating, and a transparent covering the diffraction grating member A diffraction element comprising: a sealing member. 前記封止部材の吸水率が前記回折格子部材の吸水率以下であることを特徴とする請求項7に記載の回折素子。 The diffraction element according to claim 7, wherein a water absorption rate of the sealing member is equal to or less than a water absorption rate of the diffraction grating member. 所定の波長域に光吸収を持つ有機物を前記回折格子部材に含み、一方の前記屈折率の領域の前記有機物は前記光吸収を少なくとも一部失ったことを特徴とする請求項7に記載の回折素子。 8. The diffraction according to claim 7, wherein the diffraction grating member includes an organic substance having light absorption in a predetermined wavelength range, and the organic substance in one of the refractive index regions has lost at least part of the light absorption. element. 透明基板と、前記透明基板の表面に形成された回折格子とを備えた回折素子において、前記回折格子を構成する所定の凹凸が表面に形成された前記透明基板と、透明保護板と、前記透明基板の凹凸と前記透明保護板との間に充填されて前記回折格子を構成する透明な充填部材と、前記透明基板と前記透明保護板とをつないで前記充填部材の外側を環状に囲む封止部材と、を備えたことを特徴とする回折素子。 In a diffraction element comprising a transparent substrate and a diffraction grating formed on the surface of the transparent substrate, the transparent substrate on the surface of which predetermined unevenness constituting the diffraction grating is formed, a transparent protective plate, and the transparent A transparent filling member that is filled between the unevenness of the substrate and the transparent protective plate to constitute the diffraction grating, and a seal that surrounds the outside of the filling member in an annular shape by connecting the transparent substrate and the transparent protective plate And a diffraction element. 前記封止部材の吸水率が前記充填部材の吸水率以下であることを特徴とする請求項10に記載の回折素子。 The diffraction element according to claim 10, wherein a water absorption rate of the sealing member is equal to or less than a water absorption rate of the filling member. 請求項1、請求項4、請求項7、請求項10のうちのいずれか1項に記載の回折素子を備えたことを特徴とする光ピックアップ。 An optical pickup comprising the diffraction element according to any one of claims 1, 4, 7, and 10. 請求項12に記載の光ピックアップを備えたことを特徴とする光ディスク装置。 An optical disc apparatus comprising the optical pickup according to claim 12.
JP2005236265A 2005-08-17 2005-08-17 Diffraction element, optical pickup and optical disk device Pending JP2007052153A (en)

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