JP2007046123A - Multi-chamber heat treatment apparatus and temperature control method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for preparing a wide space for an object to be treated in a heating chamber and a cooling chamber, and precisely controlling cooling treatment by measuring a temperature of the object to be treated in real time. <P>SOLUTION: In a multi-chamber heat treatment apparatus having at least a heating chamber for heat-treating the object to be treated and a cooling chamber for cooling the object which has been heat-treated in the heating chamber, this multi-chamber heat treatment apparatus comprises: a temperature sensor for detecting the temperature of the object in the cooling chamber and outputting a temperature signal that indicates the detected temperature; a cooling control unit which is arranged outside the heating chamber and the cooling chamber, and controls the cooling treatment on the basis of the temperature of the object in the cooling chamber, which is indicated by the temperature signal that has been input by the temperature sensor; and an interconnect line for connecting the temperature sensor to the cooling control unit. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a multi-chamber heat treatment apparatus and a temperature control method.

Conventionally, in a multi-chamber heat treatment apparatus including a heating chamber that heat-treats a processing object and a cooling chamber that cools a processing object heat-treated in the heating chamber, the processing object includes a heating chamber and a cooling chamber. Therefore, when measuring the temperature of the object to be processed, a temperature sensor is attached to the object to be processed, and the object to be processed is transported together with a data recorder that stores the temperature detection result by the temperature sensor. It was. That is, a data recorder exists in the heating chamber and the cooling chamber together with the object to be processed. Since such a data recorder is heat-treated together with the object to be processed, it is accommodated in a case excellent in heat resistance and heat insulation. Then, the data recorder is taken out from the cooling chamber after completion of the cooling process of the object to be processed, and the temperature measurement result stored in the data recorder is taken out. When the processing object moves in the heat treatment apparatus as described above, the temperature of the processing object in the heating chamber and the cooling chamber is measured by the above-described temperature measurement method (see, for example, Patent Document 1).
JP 9-280968 A

  However, according to the above prior art, since the storage case of the data recorder needs to ensure heat resistance and heat insulation, it becomes so large as to occupy a considerable space in the heating chamber and the cooling chamber, When the outer shape is large, there is a problem that a very large heating chamber and cooling chamber are required.

  Further, the temperature measurement result of the processing object is obtained by a data recorder taken out from the cooling chamber after completion of the cooling process, and the temperature of the processing object is grasped only after the fact. For this reason, there exists a problem that the temperature of the processing object cannot be grasped in real time while performing the heat treatment. Therefore, in order to ensure the quality of the object to be treated, although the cooling process after the heat treatment is important, the temperature of the object to be treated cannot be measured in real time in the past. Could not do.

  The present invention has been made in view of the problems described above, and ensures a wide space for disposing the processing object in the heating chamber and the cooling chamber, and accurately controls cooling by measuring the temperature of the processing object in real time. The purpose is to do.

  In order to achieve the above object, in the present invention, as a first solving means related to a multi-chamber heat treatment apparatus, a heating chamber for heat-treating an object to be treated, and a treatment object heat-treated in the heating chamber are cooled. A multi-chamber heat treatment apparatus comprising at least a cooling chamber to be processed, the temperature sensor detecting the temperature of the object to be processed in the cooling chamber and outputting a temperature detection signal indicating the temperature, the heating chamber and the cooling chamber A cooling control unit that is disposed outside the chamber and that controls the cooling process based on the temperature of the object to be processed in the cooling chamber indicated by the temperature detection signal input from the temperature sensor, the temperature sensor, and the cooling control A means of providing a connection line for connecting the units is employed.

   Further, in the present invention, as a second solving means related to the multi-chamber heat treatment apparatus, in the first solving means, a cooling gas supply unit that supplies a cooling gas to the cooling chamber at a predetermined pressure (cooling gas pressure). A cooling air volume adjusting unit that adjusts the air volume (cooling air volume) of the cooling gas in the cooling chamber; and a cooling air direction adjusting unit that adjusts the blowing direction (cooling air direction) of the cooling gas to the processing object in the cooling chamber; The cooling control unit controls the cooling gas pressure, the cooling air volume, and the cooling air direction step by step so that the temperature of the processing object in the cooling chamber reaches a predetermined target temperature within a predetermined setting time. The cooling process is controlled by outputting a control signal to the cooling gas supply unit, the cooling air amount adjusting unit, and the cooling air direction adjusting unit.

   In the present invention, as the third solution means related to the multi-chamber heat treatment apparatus, in the second solution means, the cooling control unit can reach the target temperature within the set time and the set time. In the case where the control conditions relating to the cooling gas pressure, the cooling air volume, and the cooling air direction are stored as control setting information for each type of the processing object and the same processing object is cooled, the same control setting information is used. The cooling process is controlled based on the above.

   On the other hand, in the present invention, as a first solving means related to the temperature control method, a multi-chamber heat treatment including at least a heating chamber that heat-treats a processing object and a cooling chamber that cools a heat-treated object to be treated. A method for controlling the temperature of an object to be processed during a cooling process in an apparatus, wherein a process in a cooling chamber is performed by a temperature sensor connected to a temperature measuring unit arranged outside the heating chamber and the cooling chamber via a predetermined connection line. A means of detecting the temperature of the object and controlling the cooling process based on the temperature is adopted.

Further, in the present invention, as a second solving means related to the temperature control method, in the first solving means, the cooling chamber has a predetermined pressure (cooling gas pressure), an air volume (cooling air volume), and The cooling gas pressure is supplied stepwise so that the temperature of the processing object in the cooling chamber is supplied in a blowing direction (cooling air direction) and reaches a predetermined target temperature within a predetermined set time. The cooling process is controlled by controlling a cooling air amount and a cooling air direction.

Further, in the present invention, as a third solution means related to the temperature control method, in the second solution means, the set time, the cooling gas pressure and the cooling air volume that can reach the target temperature within the set time. And the control conditions related to the cooling air direction are stored as control setting information for each type of the processing object, and when cooling the same processing object, the cooling process is controlled based on the same control setting information. It is characterized by performing.

  According to the present invention, the temperature of the processing object in the heating chamber and the cooling chamber is adjusted in real time by connecting the temperature sensor for detecting the temperature of the processing object and the cooling control unit disposed outside via the connection line. It becomes possible to measure with. Moreover, since the cooling control unit controls the cooling process based on the temperature of the processing object measured in real time in this way, it can perform accurate cooling control and ensure the quality of the processing object. It is. Further, since the temperature of the processing object is measured in real time, there is no need to mount a data recorder as in the conventional case, and it is possible to secure a wide space for arranging the processing object in the heating chamber and the cooling chamber. .

  Hereinafter, an embodiment of a multi-chamber heat treatment apparatus according to the present invention will be described with reference to the drawings. 1 and 2 are schematic views of the overall configuration of a multi-chamber heat treatment apparatus 1 according to the present embodiment. FIG. 1 is a longitudinal sectional view, and FIG. 2 is a transverse sectional view. As shown in FIGS. 1 and 2, the multi-chamber heat treatment apparatus 1 is a multi-chamber heat treatment apparatus including a cooling chamber 2 for cooling the processing object X and a heating chamber 3 for heating the processing object X. In addition, an intermediate chamber 4 is provided between the cooling chamber 2 and the heating chamber 3.

  The cooling chamber 2 is set in a substantially cylindrical shape, and the posture is set so that the central axis of the cylindrical shape is horizontal. A clutch-type door 5 that horizontally moves in the axial direction of the cooling chamber 2 is installed on one side of the cooling chamber 2 (right side in FIGS. 1 and 2), and on the other side (left side in FIGS. 1 and 2). A clamp-type vacuum shield door 6 that opens and closes is installed. The inner space of the multi-chamber heat treatment apparatus 1 is in a sealed state that is shut off from the outside with the door 5 closed. A substantially rectangular parallelepiped air passage chamber 7 that is long in the central axis direction of the cooling chamber 2 is installed inside the cooling chamber 2, and the flow path of the cooling gas in the cooling chamber 2 is above and below the air passage chamber 7. Gas flow guide plates 8a and 8b for adjusting the direction are respectively installed. Further, the inside of the cooling chamber 2 outside the air passage chamber 7 is divided into upper and lower portions by a partition plate (not shown).

  The side portion 7a on one side (right side in FIG. 1) of the air passage chamber 7 corresponding to the longitudinal direction of the air passage chamber 7 is opened, and the side portion 7b on the other side (left side in FIG. 1) is the vacuum shield door 6. And is detachable from the main body 7c of the air passage chamber 7. As shown in FIG. 2, a reel portion 40 for winding the connection wire 30 is disposed on the side of the furnace chamber 7 inside the cooling chamber 2, and the reel portion 40 is oriented in the vertical direction. The connection wire 30 can be wound up by rotating around the rotation axis. A pulley 50 is disposed between the side surface portion 7 a of the wind furnace chamber 7 and the door 5, and the connection line 30 extends from the reel portion 40 to the inside of the wind furnace chamber 7 through the pulley 50. Yes.

  As shown in FIG. 3, the connection line 30 is connected to one end of a temperature sensor 31 that detects the temperature of the processing object X and outputs a temperature detection signal indicating the temperature, and the temperature measurement unit 32 is connected to the other end. It is connected to the. The temperature measurement unit 32 also has a function as a data recorder that measures the temperature of the processing object X based on the temperature detection signal acquired by the temperature sensor 31 and stores the temperature detection result. The connection line 30 includes a signal line 33, a fastening line 34, and a hose portion 35. In the present embodiment, a thermocouple is used as the temperature sensor 31, and the signal line 33 is constituted by a pair (two types) of conductive wires. Specifically, as the signal line 33, for example, chromel-alumel, chromel-constant, iron-constant, copper-constant, nicrosyl-nisyl, platinum-rhodium (10%)-platinum, platinum-rhodium (13%)-platinum , Platinum / rhodium (30%)-platinum / rhodium (6%), chromel / gold / iron, iridium / iridium / rhodium (49%), tungsten / rhenium (5%) / tungsten / rhenium (26%), nickel -Nickel / molybdenum (18%), palladium / platinum / gold-gold / palladium is used.

  The hose portion 35 has the signal line 33 inserted therethrough and is formed of a flexible material such as resin. A signal line 33 extends from one end portion of the hose portion 35. By inserting the signal line 33 into the hose portion 35, the signal line 33 can be prevented from being damaged. The fastening line 34 is disposed outside the hose portion 35, and one end thereof is fastened to the tray 10 for transporting the processing object X. The fastening line 34 is set longer than the signal line 33 and the hose part 35, and thereby the hose part 35 connected to a plurality of intermediate portions of the fastening line 34 is supported in a slightly loose state. As described above, since the hose portion 35 is supported in a slightly loose state, even if tension is applied to the connecting wire 30 due to the driving of the reel portion 40 or the movement of the tray 10, the inside of the hose portion 35. It is possible to prevent the tension from being applied to the signal line 33 inserted through the. Such a fastening line 34 can be formed of graphite. In addition, as described above, the fastening line 34 is fixed to the tray 10, whereby the temperature sensor 31 connected to one end of the signal line 33 is fixed to the tray 10.

  The temperature measuring unit 32 is disposed outside the cooling chamber 2. A through terminal (not shown) is inserted in the wall portion of the cooling chamber 2 in a state in which the inside and outside of the cooling chamber 2 are secured, and the temperature of the signal line 33 and the temperature of the connection line 30 is passed through the through terminal. A measurement unit 32 is connected.

  As described above, the temperature sensor 31 that acquires the temperature detection signal indicating the temperature of the processing object X is fixed to the tray 10, and the temperature measurement unit that measures the temperature of the processing object X based on the temperature detection signal of the temperature sensor 31. By arranging 32 outside the cooling chamber 2, there is no need to place a data recorder in the heating chamber 3 and the cooling chamber 2 as in the conventional multi-chamber heat treatment apparatus. Therefore, according to the multi-chamber heat treatment apparatus 1 in the present embodiment, it is possible to ensure a wide arrangement space for the processing object X. In addition, since the temperature detection signal of the processing object X is input from the temperature sensor 31 to the temperature measurement unit 32 in real time, the temperature of the processing object X can be measured in real time. The temperature measurement unit 32 outputs the temperature measurement result of the processing object X to the cooling control unit 60 as a temperature signal.

  Returning to FIG. 1, lattice-shaped rectifying plates 9 a and 9 b that rectify and pass the cooling gas are formed on the upper wall portion and the lower wall portion of the air passage chamber 7, respectively. In addition, a transfer table 11 for transferring the tray 10 on which the processing object X is placed in the axial direction of the cooling chamber 2 is installed inside the air channel chamber 7, and the transfer table 11 has a plurality of free rollers. 12 is rotatably provided in the transfer direction of the tray 10. Further, the tray 10 is formed, for example, in a lattice shape so that the cooling gas can pass therethrough.

  The door 5 is formed in a hollow shape, and a heat exchanger 15, a cooling fan 16, and dampers 17a and 17b are provided therein. The heat exchanger 15 cools the cooling gas by exchanging heat between water and the cooling gas, and is disposed inside the heat exchanger storage chamber 18 disposed in the door 5. The cooling fan 16 is for adjusting the air volume of the cooling gas that has passed through the gas passage port 19a from the inside of the heat exchanger 15, and is between the heat exchanger 15 and the inner peripheral surface of the door 5, that is, cooling. It arrange | positions so that it may space apart in the horizontal direction from the side surface of the process target object X mounted in the chamber 2. As shown in FIG. The cooling fan 16 is driven by a cooling fan motor 20 installed so as to protrude from the door 5. The cooling fan motor 20 is rotationally driven based on a motor drive signal input from the cooling fan inverter 61 shown in FIG. The dampers 17a and 17b determine the blowing direction (cooling air direction) of the cooling gas to the processing object X under the control of the cooling control unit 60, and a plurality of dampers 17a and 17b are formed above the heat exchanger storage chamber 18. The gas passage ports 19a, 19b, 19c, and 19d are selectively closed. The interior of the door 5 outside the heat exchanger storage chamber 18 is divided into upper and lower portions by a partition plate (not shown).

  On the other hand, the heating chamber 3 is formed in a substantially cylindrical shape with a water-cooled double wall, water is interposed between the inner wall and the outer wall, and is disposed to face the cooling chamber 2. Further, in the inside of the transfer rod storage chamber 21 connected to the heating chamber 3, the processing object X is transferred by transferring the tray 10 on which the processing object X is placed in the multi-chamber heat treatment apparatus 1. A conveying rod 22 is installed for conveying the.

  Inside the heating chamber 3, a heating container 23 having a substantially rectangular shape is installed. A heat insulating door 24 (heating chamber door) that opens and closes up and down is installed on one side (the side facing the cooling chamber 2) of the heating container 23, and the other side is for a transport rod that serves as an entrance and exit of the transport rod 22. A door 25 is installed. The transport rod door 25 is opened and closed in the vertical direction by an elevating mechanism 26 installed so as to protrude from the outer wall of the heating chamber 3. Inside the heating container 23, a transfer table 28 having a plurality of free rollers 27 for transferring the tray 10 on which the processing object X is placed in the axial direction of the heating chamber 3 is installed. It is arranged on the extension line of the transfer table 11 installed in the air channel chamber 7. The transport bar door 25, the transfer table 28, and the tray 10 are heat-insulated similarly to the heat-insulating door 24. In addition, a plurality of heaters 29 for heating the processing object X are installed in the heating container 23 above and below the processing object X so that the entire processing object X is evenly heated.

  On the other hand, the intermediate chamber 4 is set in a hollow, substantially rectangular shape, and is disposed between the cooling chamber 2 and the heating chamber 3. In the upper part, an elevating mechanism 55a composed of a hoist or the like for elevating and lowering the vacuum shield door 6 and a heat insulating door elevating part 55b for elevating the heat insulating door 24 are installed. Further, as shown in FIG. 2, a decompression device 57 is installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. The decompression device 57 is for evacuating the inside of the cooling chamber 2 and the heating chamber 3, and is connected to the cooling chamber 2 and the heating chamber 3, respectively. A cooling gas supply device 56 is also installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. The cooling gas supply device 56 supplies the cooling gas into the cooling chamber 2 at a predetermined pressure based on the cooling gas control signal input from the cooling control unit 60. In addition, since cooling gas may be supplied to the heating chamber 3 and the intermediate chamber 4 which are outside the cooling chamber 2 during the maintenance work of the multi-chamber heat treatment apparatus 1, the cooling gas supply device 56 has an intermediate position as shown in the figure. It is also connected to the chamber 4.

  The cooling control unit 60 controls the cooling process in the cooling chamber 2 on the basis of the temperature signal input from the temperature measuring unit 32, that is, the temperature of the processing object X, and the cooling gas supply device performs a predetermined cooling control process. A cooling gas control signal for controlling the cooling fan 56, a cooling air volume control signal for controlling the cooling fan inverter 61, a cooling air direction control signal for controlling the dampers 17a and 17b, and the cooling gas control signal are cooled. It outputs to the gas supply device 56, outputs a cooling air volume control signal to the cooling fan inverter 61, and outputs a cooling air direction control signal to the dampers 17a and 17b. The details of the cooling control process in the cooling control unit 60 will be described later. The cooling fan inverter 61 outputs a motor drive signal that defines the rotational speed of the cooling fan 16 to the cooling fan motor 20 based on the cooling fan air volume control signal input from the cooling controller 60.

    Next, the operation of the multi-chamber heat treatment apparatus 1 configured as described above will be described.

    First, the processing object X placed on the tray 10 in the state where the door 5 is separated from the cooling chamber 2 is placed on the transfer table 11 inside the air passage chamber 7. Here, the temperature sensor 31 is fixed at a predetermined position with respect to the processing object X by fastening the fastening line 34 of the connection line 30 extending from the reel portion 40 to the tray 10. Thereafter, the door 5 is brought into contact with the cooling chamber 2 and the cooling chamber 2 is sealed. The cooling chamber 2, the heating chamber 3, and the intermediate chamber 4 are evacuated by driving the decompression device 57. Subsequently, the lifting / lowering mechanism 26, the lifting / lowering mechanism 55a, and the heat-insulating door lifting / lowering portion 55b are driven to open the transport bar door 25, the vacuum shield door 6, and the heat-insulating door 24.

    Here, the processing object X is transferred from the transfer table 11 inside the air passage chamber 7 onto the transfer table 28 inside the heating container 23 by pulling the tray 10 engaged with the tip of the transfer rod 22. The At this time, the fastening line 34 fastened to the tray 10 is pulled out from the reel unit 40 along with the transfer of the tray 10. Along with this, the signal line 33 and the hose portion 35 are also pulled out from the reel portion 40. Then, the elevating mechanism 26 and the heat insulating door elevating part 55b are driven again, and the conveying bar door 25 and the heat insulating door 24 are closed. Here, the tension is applied to the fastening line 34 by the transfer of the tray 10, but since the signal line 33 is loosened with respect to the fastening line 34 as described above, the tension is applied to the signal line 33. It is possible to prevent the signal line 33 from being disconnected. At this time, the elevating mechanism 55a is not driven, and the vacuum shield door 6 is kept open. Further, the heat insulating door 24 is closed in a state where the connecting wire 30 is bitten. Further, as described above, the signal wire 33 extends from the end portion of the hose portion 35, and when the heat insulating door 24 bites the connection wire 30, the hose portion 35 is positioned outside the heating container 23. ing.

    In this state, the processing object X is heated by the heater 25. At this time, the temperature sensor 31 outputs a temperature detection signal indicating the temperature of the processing object X to the temperature measurement unit 32 via the signal line 33. Then, the temperature measuring unit 32 measures the temperature of the processing object X based on the temperature detection signal input from the temperature sensor 31. Therefore, according to the multi-chamber heat treatment apparatus 1, the temperature of the processing object X during the heat treatment can be measured in real time. Thereafter, when the heating of the processing object X is completed, the transfer rod door 25 and the heat insulating door 24 are opened, and the processing object X is transferred again to the transfer table 11 inside the air passage chamber 7 by the transfer rod 22. At this time, the connecting wire 30 is wound by the reel unit 40 as the tray 10 is transferred. Thereby, since the tension is always applied to the fastening line 34 of the connection line 30, it is possible to prevent the connection line 30 from being caught by a member in the multi-chamber heat treatment apparatus 1. When the processing object X is transferred to the transfer table 11 of the air passage chamber 7, the vacuum shield door 6 is sealed.

    Subsequently, the cooling gas is supplied into the cooling chamber 2 by the cooling gas supply device 56, and this cooling gas is circulated through the cooling chamber 2 by the cooling fan 16, whereby the processing object X is cooled. Here, the direction in which the cooling gas flows is changed by changing the gas passage ports 19a to 19d that are closed every predetermined time by the dampers 17a and 17b, whereby the cooling gas is sprayed on the entire processing object X, The processing object X is uniformly cooled. And while the processing target object X is cooled in this way, the temperature sensor 31 outputs a temperature detection signal indicating the temperature of the processing target object X to the temperature measuring unit 32 via the signal line 33 to measure the temperature. The unit 32 measures the temperature of the processing object X based on the temperature detection signal, and outputs a temperature signal indicating the temperature obtained from the measurement result to the cooling control unit 60. Therefore, according to the multi-chamber heat treatment apparatus 1, the temperature of the processing object X during the cooling process can be measured in real time. Below, the cooling control in the cooling chamber 2, ie, the temperature control method of the process target object X, is demonstrated.

  In order to ensure the quality of the processing object X, it is important to control the temperature of the processing object X during cooling. For example, when the purpose is to reduce the cooling distortion of the processing object X during the cooling process, a temperature difference occurs between a part that is easy to cool and a part that is difficult to cool on the high temperature side, so it is necessary to minimize the cooling rate. is there. In addition, optimum cooling control is required depending on the type of the processing object X (steel type or the like).

  Therefore, for example, a processing object X that requires cooling control as shown in FIG. 4 is assumed. FIG. 4 shows that the temperature of the processing object X is cooled within a time t1 from the temperature T0 (initial temperature) after the heat treatment to the first target temperature T1, and the time from the first target temperature T1 to the second target temperature T2 It shows that it is necessary to cool within time t2, cool within the time t3 from the second target temperature T2 to the third target temperature T3, and cool within the time t4 from the third target temperature T3 to the fourth target temperature T4. Yes. Hereinafter, such a diagram is referred to as a cooling gradient profile. That is, the optimum cooling gradient profile is determined as known depending on the type of the processing object X and the purpose of the cooling process.

  Therefore, it is necessary to investigate the control conditions that enable the cooling control according to the cooling gradient profile. That is, a sample of the processing object X having the cooling gradient profile shown in FIG. 4 is prepared, and the sample is actually put into the multi-chamber heat treatment apparatus 1 to perform the heat treatment and the cooling treatment. investigate. Specifically, first, a control condition for cooling the sample temperature from the initial temperature T0 to the first target temperature T1 within the time t1 is investigated. In this embodiment, three control parameters relating to cooling control are used: cooling air volume, cooling gas pressure, and cooling air direction (cooling gas blowing direction). The amount of cooling air is controlled by the number of rotations of the cooling fan 16, that is, the number of rotations of the cooling fan motor 20. The cooling gas pressure is controlled by the cooling gas supply device 56, and the cooling air direction is controlled by opening and closing operations of the dampers 17a and 17b, and the cooling gas is sprayed alternately upward, downward, or vertically on the sample. Is.

  Then, by manually operating the cooling control unit 60, the control conditions for cooling the sample temperature from the initial temperature T0 to the first target temperature T1 within the time t1 are determined while appropriately adjusting these control parameters. To do. Assuming that the control conditions thus determined, that is, the control parameter values are the cooling air volume D1, the cooling gas pressure G1, and the cooling air direction K1, as shown in FIG. 5, as control setting information corresponding to the first target temperature T1, The cooling air amount D1, the cooling gas pressure G1, the cooling air direction K1, and the set time t1 are set (stored) in the cooling control unit 60. Similarly, when the cooling air volume D2, the cooling gas pressure G2, and the cooling air direction K2 are determined as control parameters for cooling from the first target temperature T1 to the second target temperature T2 within the time t2, the second target temperature T2 is set. As the corresponding control setting information, the cooling air volume D2, the cooling gas pressure G2, the cooling air direction K2, and the set time t2 are set in the cooling controller 60. This is repeated up to the fourth target temperature T4. The data table shown in FIG. 5 obtained as described above relates to the processing object X used as a sample, and the data table for the other processing object X can also be set by the procedure described above. is there. Note that manual adjustment of control parameters and setting of control setting information are performed on a touch panel provided in the cooling control unit 60.

  This completes the control condition survey using the sample. Now, the operation of the cooling control unit 60 that controls the cooling process based on the control setting information obtained in the control condition investigation will be described with reference to the flowchart of FIG.

  First, when the processing object X (same as the above sample) is conveyed to the cooling chamber 2 after the heat treatment, the cooling control unit 60 sets control variable n = 1 (step S1). Subsequently, the cooling control unit 60 reads out the control setting information of the cooling mode n, that is, the cooling mode 1 (step S2). Here, the cooling mode 1 is a mode in which cooling control is performed using control setting information corresponding to the first target temperature T1 shown in FIG. Accordingly, in step S2, control setting information corresponding to the first target temperature T1 is read.

  Then, the cooling control unit 60 performs timer setting (T = t1) using the setting time t1 of the control setting information in the cooling mode 1 (step S3). Further, the cooling control unit 60 extracts the cooling air volume D1 from the control setting information, and defines the rotation speed of the cooling fan 16 that generates the cooling air volume indicated by the cooling air volume D1, that is, the rotation speed of the cooling fan motor 20. The cooling air volume control signal is output to the cooling fan inverter 61, and the cooling fan inverter 61 outputs a motor drive signal for rotating the cooling fan 16 to the cooling fan motor 20 based on the cooling air volume control signal (step S4). As a result, the cooling fan 16 rotates at a predetermined rotational speed, and the cooling air volume is adjusted (step S5).

  Further, the cooling control unit 60 extracts a cooling gas pressure G1 from the control setting information, and supplies a cooling gas control signal that supplies the cooling gas to the cooling chamber 2 at the cooling gas pressure indicated by the cooling gas pressure G1. The cooling gas supply device 56 outputs the cooling gas to the cooling chamber 2 based on the cooling gas control signal (step S6). Thereby, adjustment of a cooling gas pressure is performed (step S7).

  On the other hand, the cooling control unit 60 extracts the cooling air direction K1 from the control setting information, and outputs a cooling air direction control signal to the dampers 17a and 17b so as to blow the cooling gas to the processing object X in the cooling air direction indicated by the cooling air direction K1. Then, the dampers 17a and 17b perform an opening / closing operation based on the cooling air direction control signal (step S8). Thereby, the blowing direction of the cooling gas is adjusted (step S9).

  Then, the cooling control unit 60 determines whether or not the timer (T = t1) has been counted up (step S10). If it is determined “NO” in step S10, the cooling control unit 60 repeats the processes in steps S4 to S9. On the other hand, if “YES” is determined in step S10, the cooling control unit 60 adds 1 to the control variable n (step S11), and the cooling mode n (here, cooling) corresponding to the control variable n after the addition. It is determined whether or not control setting information relating to mode 2) exists (step S12). If “YES” is determined in step S12, that is, if control setting information related to the cooling mode 2 exists, the cooling control unit 60 proceeds to the process of step S2 and uses the control setting information of the cooling mode 2 as a basis. Cooling control is performed. On the other hand, if “NO” is determined in step S12, that is, if there is no control setting information regarding the cooling mode 2, the cooling control unit 60 ends the cooling control, and the processing object X is carried out to the outside. Is done. In step S10, the end of the cooling mode n is determined by counting up the timer. However, the cooling mode is not detected by the timer but by detecting whether the temperature of the processing object X has reached the target temperature. The end of n may be determined.

  As described above, as long as the control setting information exists, the cooling control unit 60 performs the cooling control to realize the cooling gradient profile by repeating the processes of steps S2 to S12.

As described above, according to the present embodiment, a signal indicating the temperature of the processing object X is acquired by the temperature sensor 31 connected to one end of the connection line 33 extending from the cooling chamber 2. For this reason, based on the temperature detection signal detected in the temperature sensor 31, the temperature of the processing object X can be measured by the temperature measurement part 32 arranged outside, like a conventional multi-chamber heat treatment apparatus. There is no need to place a data recorder in the heating chamber 3 and the cooling chamber 2. Further, by electrically connecting the temperature sensor 31 and the temperature measurement unit 32 via the connection line 33, the temperature detection signal detected by the temperature sensor 31 is input to the temperature measurement unit 32 in real time.
Therefore, it is possible to secure a wide space for arranging the processing object X in the cooling chamber 2 and the heating chamber 3 and measure the temperature of the processing object X arranged in the cooling chamber 2 and the heating chamber 2 in real time. Become. In addition, by controlling the cooling process based on the temperature of the processing object X measured in real time in this way, accurate cooling control can be performed, and the quality of the processing object X can be ensured. .

   In addition, this invention is not limited to the said embodiment, For example, the following modifications can be considered.

 (1) In the said embodiment, when heat-processing the process target object X, the vacuum shield door 6 was made into the open state. However, the present invention is not limited to this, and the vacuum shield door 6 may be in a half-open state during the heat treatment of the processing object X. Thereby, it becomes possible to suppress the temperature rise in the cooling chamber 2 due to radiant heat during the heat treatment of the processing object X.

 (2) Further, for example, a buffer portion made of heat-resistant rubber or the like may be disposed in the middle of the connection wire 30 being bitten by the heat insulating door 24. By disposing such a buffer portion, disconnection of the connecting wire 30 can be prevented, and the heating container 23 during the heat treatment can be more sealed, so that radiant heat to the outside of the heating container 23 in the heat treatment can be reduced. It becomes possible to deter.

(3) Moreover, in the said embodiment, although the target temperature setting of the cooling gradient profile was set to four, it is not restricted to this, You may change the setting number according to a cooling gradient profile.

(4) In the above embodiment, the temperature of the processing object X is detected using one temperature sensor 31, but the temperature is not limited to this, and the temperatures of the processing object X are measured using a plurality of temperature sensors 31. It is also possible to detect and determine the average value of the temperatures at the plurality of locations as the temperature of the processing object X.

(5) In the above embodiment, the control setting information is examined in advance using a sample, and the cooling control is performed based on the control setting information. However, the present invention is not limited to this. The temperature control unit 60 may be provided with a function of adjusting the control parameters independently to perform the cooling control so as to satisfy the gradient profile.

It is the longitudinal cross-sectional view which showed schematic structure of the multi-chamber type heat processing apparatus 1 which concerns on one Embodiment of this invention. It is the cross-sectional view which showed schematic structure of the multi-chamber type heat processing apparatus 1 which concerns on one Embodiment of this invention. 2 is a schematic configuration diagram of a connection line 30. FIG. It is explanatory drawing of a cooling gradient profile. It is explanatory drawing of control setting information. FIG. 6 is a flowchart showing a temperature (cooling) control operation of the cooling control unit 60.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Multi-chamber type heat processing apparatus, 2 ... Cooling chamber, 3 ... Heating chamber, 10 ... Tray, 30 ... Connection line, 31 ... Temperature sensor, 32 ... Temperature measuring part, 33 ... Signal line, 34 ... Fastening line, 35 ... Hose part, 40 ... reel part, 16 ... cooling fan, 20 ... cooling fan motor, 56 ... cooling gas supply device, 60 ... cooling control part, 61 ... cooling fan inverter, X ... processing object

Claims (6)

A multi-chamber heat treatment apparatus comprising at least a heating chamber that heat-treats a processing object and a cooling chamber that cools a processing object that has been heat-treated in the heating chamber,
A temperature sensor that detects a temperature of the processing object in the cooling chamber and outputs a temperature detection signal indicating the temperature;
A cooling control unit that is disposed outside the heating chamber and the cooling chamber and controls the cooling process based on the temperature of the processing object in the cooling chamber indicated by the temperature detection signal input from the temperature sensor;
A multi-chamber heat treatment apparatus, comprising: a connection line connecting the temperature sensor and the cooling control unit. A cooling gas supply unit that supplies a cooling gas to the cooling chamber at a predetermined pressure (cooling gas pressure);
A cooling air volume adjusting unit that adjusts an air volume (cooling air volume) of the cooling gas in the cooling chamber;
A cooling air direction adjusting unit that adjusts the blowing direction (cooling air direction) of the cooling gas to the processing object in the cooling chamber,
The cooling control unit controls the cooling gas pressure, the cooling air amount, and the cooling air direction in a stepwise manner so that the temperature of the processing object in the cooling chamber reaches a predetermined target temperature within a predetermined set time. The multi-chamber heat treatment apparatus according to claim 1, wherein the cooling process is controlled by outputting the cooling gas to the cooling gas supply unit, the cooling air amount adjusting unit, and the cooling air direction adjusting unit.  The cooling control unit sets, as control setting information, the set time and the control conditions relating to the cooling gas pressure, the cooling air volume, and the cooling air direction that can reach the target temperature within the set time for each type of processing object. 3. The multi-chamber heat treatment apparatus according to claim 2, wherein the cooling process is controlled based on the same control setting information when storing and cooling the same object to be processed. A temperature control method for a processing object during cooling processing in a multi-chamber heat treatment apparatus comprising at least a heating chamber for heat-processing the processing object and a cooling chamber for cooling the heat-treated object to be processed,
The temperature of the object to be processed in the cooling chamber is detected by a temperature sensor connected via a predetermined connection line with a temperature measuring unit arranged outside the heating chamber and the cooling chamber, and the cooling processing is performed based on the temperature. A temperature control method characterized by controlling. Cooling gas is supplied to the cooling chamber in a predetermined pressure (cooling gas pressure), an air volume (cooling air volume), and a blowing direction (cooling air direction) with respect to the processing object,
The cooling process is controlled by controlling the cooling gas pressure, the cooling air amount, and the cooling air direction in stages so that the temperature of the processing object in the cooling chamber reaches a predetermined target temperature within a predetermined set time. The temperature control method according to claim 4, wherein: The set time and the control conditions related to the cooling gas pressure, the cooling air volume, and the cooling air direction that can reach the target temperature within the set time are stored as control setting information for each type of processing object, and the same processing 6. The temperature control method according to claim 5, wherein when the object is cooled, the cooling process is controlled based on the same control setting information.

Images