JP2007031263A - Glass substrate for flat panel display device - Google Patents

Glass substrate for flat panel display device Download PDF

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JP2007031263A
JP2007031263A JP2006119833A JP2006119833A JP2007031263A JP 2007031263 A JP2007031263 A JP 2007031263A JP 2006119833 A JP2006119833 A JP 2006119833A JP 2006119833 A JP2006119833 A JP 2006119833A JP 2007031263 A JP2007031263 A JP 2007031263A
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glass
glass substrate
display device
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panel display
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JP4958062B2 (en
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Ken Choju
研 長壽
Hironori Takase
寛典 高瀬
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Nippon Electric Glass Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/11Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
    • C03C3/112Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/078Glass compositions containing silica with 40% to 90% silica, by weight containing an oxide of a divalent metal, e.g. an oxide of zinc
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • C03C3/087Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/095Glass compositions containing silica with 40% to 90% silica, by weight containing rare earths
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/097Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate for a flat panel display device in which the high temperature viscosity of glass can be reduced without lowering the strain point of the glass. <P>SOLUTION: The glass substrate for a flat panel display device is composed of SiO<SB>2</SB>-RO(RO: alkaline-earth metal oxide)-R<SB>2</SB>O(alkali metal oxide) based glass, comprises, by mass, 0 to <2.5% Al<SB>2</SB>O<SB>3</SB>and >1 to 7% ZrO<SB>2</SB>, and satisfies Al<SB>2</SB>O<SB>3</SB>/ZrO<SB>2</SB><1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、フラットパネルディスプレイ装置、特にプラズマディスプレイ装置に適したガラス基板に関するものである。   The present invention relates to a glass substrate suitable for a flat panel display device, particularly a plasma display device.

プラズマディスプレイ装置は、次のようにして作製される。まず、前面ガラス基板表面にITO膜やネサ膜等からなる透明電極を成膜し、その上に誘電体材料を塗布して500〜600℃程度の温度で焼成し誘電体層を形成する。また、Al、Ag、Ni等からなる電極が形成された背面ガラス基板に、背面誘電体材料を塗布して500〜600℃程度の温度で焼成して誘電体層を形成し、その上に隔壁材料を塗布して500〜600℃程度の温度で焼成して隔壁を形成することにより回路を形成する。その後、前面ガラス基板と背面ガラス基板を対向させて電極等の位置合わせを行って、周囲を500〜600℃程度の温度でフリットシールすることにより作製される。   The plasma display device is manufactured as follows. First, a transparent electrode made of an ITO film, a nesa film or the like is formed on the surface of the front glass substrate, a dielectric material is applied thereon, and baked at a temperature of about 500 to 600 ° C. to form a dielectric layer. Further, a back dielectric material is applied to a back glass substrate on which an electrode made of Al, Ag, Ni, or the like is formed, and is baked at a temperature of about 500 to 600 ° C. to form a dielectric layer, on which a partition wall is formed. A circuit is formed by applying a material and baking it at a temperature of about 500 to 600 ° C. to form a partition. Thereafter, the front glass substrate and the rear glass substrate are opposed to each other to align the electrodes and the like, and the periphery is frit-sealed at a temperature of about 500 to 600 ° C.

一般に上記のガラス基板は、熱膨張係数が約84×10-7/℃のソーダ石灰ガラスや高歪点ガラス(歪点が570℃以上のガラス)からなり、フロート法、ロールアウト法等によって1.8〜3.0mmの肉厚に成形されたものが使用されている。また、絶縁ペースト、リブペースト、フリットシールといった周辺材料の熱膨張係数もソーダ石灰ガラスに合わせて、70〜90×10-7/℃の範囲に調整されたものが使用されている。 In general, the glass substrate is made of soda-lime glass having a thermal expansion coefficient of about 84 × 10 −7 / ° C. or high strain point glass (glass having a strain point of 570 ° C. or higher). Those molded to a thickness of 8 to 3.0 mm are used. In addition, the thermal expansion coefficient of peripheral materials such as insulating paste, rib paste, and frit seal is adjusted to the range of 70 to 90 × 10 −7 / ° C. according to soda lime glass.

尚、高歪点ガラスの方がソーダ石灰ガラスよりも歪点や体積電気抵抗率が高いため、熱処理工程において、ガラス基板の熱変形や熱収縮が小さく、前面ガラス基板と背面ガラス基板を対向させる際、精度良く電極等の位置合わせが行える。しかも、ガラス中のアルカリ成分の移動度が小さく、ガラス中のアルカリ成分とITO膜やネサ膜等の薄膜電極との反応が小さく、電極材料の電気抵抗値の安定化が図れる。これらの理由から、現在では、ソーダ石灰ガラスよりも、高歪点ガラスがガラス基板として広く用いられるようになってきている。(特許文献1)
ところが、前記したソーダ石灰ガラスや高歪点ガラスからなるガラス基板は、ガラスの熱膨張係数が約84×10-7/℃と大きいため、500〜600℃の温度で熱処理した後、急冷すると熱応力に起因する割れが生じる。そのため、熱処理工程の冷却速度が制限され、工程の所要時間が長くなり、生産性を低下させていた。従って、生産性向上のため、急冷しても割れ難い耐熱衝撃性に優れたガラス基板が望まれている。
The high strain point glass has a higher strain point and volume resistivity than soda lime glass, so that the thermal deformation and thermal shrinkage of the glass substrate are small in the heat treatment process, and the front glass substrate and the back glass substrate are opposed to each other. At this time, the electrodes can be accurately aligned. In addition, the mobility of the alkali component in the glass is small, the reaction between the alkali component in the glass and the thin film electrode such as the ITO film or Nesa film is small, and the electrical resistance value of the electrode material can be stabilized. For these reasons, high strain point glass is now widely used as a glass substrate rather than soda-lime glass. (Patent Document 1)
However, since the glass substrate made of soda-lime glass or high strain point glass has a large thermal expansion coefficient of about 84 × 10 −7 / ° C., heat treatment occurs at a temperature of 500 to 600 ° C. and then rapidly cools. Cracks due to stress occur. For this reason, the cooling rate of the heat treatment process is limited, the time required for the process becomes long, and the productivity is lowered. Therefore, in order to improve productivity, a glass substrate excellent in thermal shock resistance that is difficult to break even when rapidly cooled is desired.

そこで、誘電体、隔壁、フリット等の周辺材料との整合性が採れる範囲で、ガラスの熱膨張係数を小さくしたガラス基板が提案されている。(特許文献2、3)
特開平8−290938号公報 特開平2002−193635号公報 特開平2004−277222号公報
Therefore, a glass substrate has been proposed in which the thermal expansion coefficient of the glass is reduced within a range in which consistency with peripheral materials such as a dielectric, a partition, and a frit can be obtained. (Patent Documents 2 and 3)
JP-A-8-290938 Japanese Patent Laid-Open No. 2002-193635 JP-A-2004-277222

しかしながら、特許文献2で開示されているガラスは、ガラスの高温粘度が高いため、ガラスの溶融温度や成形温度を高くしなければならなくなり、ガラスの溶融や成形が困難である。特に、フロート成形の場合、ガラスの高温粘度が高いと、溶融ガラスを板状に成形するためのフロートバスの温度を高くしなければならず、フロートバスからのスズの揮発量が増加し、ガラス表面に悪影響を及ぼすことになる。   However, since the glass disclosed in Patent Document 2 has a high high-temperature viscosity of the glass, it is necessary to increase the glass melting temperature and molding temperature, and it is difficult to melt and mold the glass. In particular, in the case of float forming, if the high-temperature viscosity of the glass is high, the temperature of the float bath for forming the molten glass into a plate shape must be increased, and the volatilization amount of tin from the float bath increases. It will adversely affect the surface.

また、特許文献3で開示されている組成系では、ガラスの溶融、成形を容易にするために、ガラスの高温粘度を低くしようとすると、ガラスの歪点も低下するため、ディスプレイ装置を製造する際の熱工程で、ガラス基板が変形したり収縮するという問題がある。   Further, in the composition system disclosed in Patent Document 3, when the high temperature viscosity of the glass is lowered to facilitate the melting and forming of the glass, the strain point of the glass is also lowered, and thus the display device is manufactured. There is a problem that the glass substrate is deformed or contracts in the heating process.

本発明の目的は、ガラスの歪点を下げることなく、ガラスの高温粘度を低下することができるフラットパネルディスプレイ装置用ガラス基板を提供することである。   The objective of this invention is providing the glass substrate for flat panel display apparatuses which can reduce the high temperature viscosity of glass, without reducing the strain point of glass.

本発明のフラットパネルディスプレイ装置用ガラス基板は、SiO2−RO(RO:アルカリ土類金属酸化物)−R2O(アルカリ金属酸化物)系ガラスであって、質量百分率で、Al23 0〜2.5%未満、ZrO2 1超〜7%、Al23/ZrO2<1であることを特徴とする。 The glass substrate for a flat panel display device of the present invention is SiO 2 —RO (RO: alkaline earth metal oxide) —R 2 O (alkali metal oxide) -based glass, and is expressed as a percentage by mass, and Al 2 O 3. It is characterized by being less than 0 to 2.5%, more than ZrO 2 to 7%, and Al 2 O 3 / ZrO 2 <1.

本発明のガラス基板は、ガラスの高温粘度が低く、溶融性や成形性に優れ、しかも、高い歪点を有している。また、ガラス組成を特定の範囲にすれば、更に、熱膨張係数を60〜80×10-7/℃に調整することができ、周辺材料との整合性が取れる熱膨張係数と優れた耐熱衝撃性を有することができる。そのため、フラットパネルディスプレイ装置、特に、プラズマディスプレイ装置のガラス基板として好適である。 The glass substrate of the present invention has a low high-temperature viscosity of glass, is excellent in meltability and formability, and has a high strain point. Further, if the glass composition is in a specific range, the thermal expansion coefficient can be further adjusted to 60 to 80 × 10 −7 / ° C., and the thermal expansion coefficient and excellent thermal shock resistance that can be consistent with the surrounding materials can be obtained. Can have sex. Therefore, it is suitable as a glass substrate for flat panel display devices, particularly plasma display devices.

本発明のフラットパネルディスプレイ装置用ガラス基板は、ガラスの熱膨張係数を容易に小さくできるSiO2−RO(RO:アルカリ土類金属酸化物)−R2O(アルカリ金属酸化物)系ガラスにおいて、ガラスの高温粘度を上昇させる成分であるAl23を2.5質量%未満に抑え、ガラスの歪点を上昇させる成分であるZrO2を1質量%超含有させ、しかも、ZrO2の含有量がAl23の含有量よりも多くなるようにしている。このようにすることで、ガラスの歪点を下げることなく、ガラスの高温粘度を低下することができ、ガラスの溶融、成形が容易となる。 The glass substrate for a flat panel display device of the present invention is a SiO 2 -RO (RO: alkaline earth metal oxide) -R 2 O (alkali metal oxide) glass that can easily reduce the thermal expansion coefficient of glass. Al 2 O 3 , which increases the high temperature viscosity of the glass, is suppressed to less than 2.5% by mass, ZrO 2 which is a component which increases the strain point of the glass is included more than 1% by mass, and the content of ZrO 2 The amount is set to be larger than the content of Al 2 O 3 . By doing in this way, the high temperature viscosity of glass can be reduced without lowering the strain point of glass, and melting and shaping of glass become easy.

また、本発明のガラス基板において、ガラスの熱膨張係数を60×10-7/℃以上に設定すれば、周辺材料の熱膨張係数との整合性を取ることができる。また、上限値を、80×10-7/℃に設定すれば、熱応力に起因する割れを抑えることができる。ガラスの熱膨張係数の好ましい範囲は65〜75×10-7/℃であり、より好ましくは67〜73×10-7/℃である。尚、本発明において、ガラスの熱膨張係数が80×10-7/℃以上(従来と同等)であってもよいことは言うまでもない。 Further, in the glass substrate of the present invention, if the thermal expansion coefficient of the glass is set to 60 × 10 −7 / ° C. or higher, consistency with the thermal expansion coefficient of the surrounding material can be obtained. Moreover, if the upper limit value is set to 80 × 10 −7 / ° C., cracks due to thermal stress can be suppressed. The preferable range of the thermal expansion coefficient of the glass is 65 to 75 × 10 −7 / ° C., and more preferably 67 to 73 × 10 −7 / ° C. In the present invention, it goes without saying that the thermal expansion coefficient of the glass may be 80 × 10 −7 / ° C. or more (equivalent to the conventional one).

また、本発明のガラス基板において、ディスプレイ装置を製造する際の熱工程におけるガラス基板の熱変形や熱収縮の発生を抑えるために、ガラスの歪点を580℃以上にすることが好ましい。より好ましくは585℃以上であり、更に好ましくは595℃以上である。   Moreover, in the glass substrate of the present invention, it is preferable to set the strain point of the glass to 580 ° C. or higher in order to suppress the occurrence of thermal deformation and thermal shrinkage of the glass substrate in the thermal process when manufacturing the display device. More preferably, it is 585 degreeC or more, More preferably, it is 595 degreeC or more.

また、溶融ガラスを板状に成形する際、成形装置に負担を掛けずに成形するために、104dPa・sの粘度に相当するガラス融液の温度を1200℃以下にすることが好ましい。より好ましくは1180℃以下であり、更に好ましくは1170℃以下である。 Further, when the molten glass is formed into a plate shape, the glass melt temperature corresponding to a viscosity of 10 4 dPa · s is preferably set to 1200 ° C. or lower in order to form the molten glass without imposing a burden on the forming apparatus. More preferably, it is 1180 degrees C or less, More preferably, it is 1170 degrees C or less.

更に、ガラスの溶融を良好に行うためには、102.5dPa・sの粘度におけるガラス融液の温度は低い方が好ましく、1500℃以下であることが望ましい。 Furthermore, in order to melt the glass satisfactorily, the temperature of the glass melt at a viscosity of 10 2.5 dPa · s is preferably lower, and is preferably 1500 ° C. or lower.

また、大型のガラス基板を安価に大量に生産するためには、優れた成形性を有する必要があり、液相温度は低く、また、液相粘度は高い方が好ましい。尚、液相温度は1180℃以下であることが望ましく、また、液相粘度は、103.8dPa・s以上であることが望ましい。 Moreover, in order to produce a large glass substrate in large quantities at a low cost, it is necessary to have excellent moldability, and it is preferable that the liquidus temperature is low and the liquidus viscosity is high. The liquidus temperature is preferably 1180 ° C. or lower, and the liquidus viscosity is preferably 10 3.8 dPa · s or higher.

尚、本発明のフラットパネルディスプレイ装置用ガラス基板に使用可能な具体的組成は、質量百分率で、SiO2 55〜74%、Al23 0〜2.5%未満、MgO 1〜15%、CaO 0〜8%、SrO 1〜15%、BaO 0〜5%、MgO+CaO+SrO+BaO 15〜27%、ZnO 0〜5%、Li2O 0〜5%、Na2O 0〜8%、K2O 2〜12%、ZrO2 1超〜7%、Al23/ZrO2<1となるような範囲内で適宜選択すればよい。この範囲であれば、ガラスの歪点が580℃以上、104dPa・sの粘度に相当するガラス融液の温度が1200℃以下であり、且つ、熱膨張係数が60〜80×10-7/℃のガラスが得やすくなる。 In addition, the specific composition which can be used for the glass substrate for flat panel display devices of the present invention is, by mass percentage, SiO 2 55 to 74%, Al 2 O 3 0 to less than 2.5%, MgO 1 to 15%, CaO 0~8%, SrO 1~15%, BaO 0~5%, MgO + CaO + SrO + BaO 15~27%, 0~5% ZnO, Li 2 O 0~5%, Na 2 O 0~8%, K 2 O 2 to 12%, ZrO 2 1 super ~7%, Al 2 O 3 / ZrO 2 < may suitably be selected within a range such that 1. Within this range, the glass melt temperature corresponding to a viscosity of 580 ° C. or higher and a viscosity of 10 4 dPa · s is 1200 ° C. or lower, and the thermal expansion coefficient is 60 to 80 × 10 −7. It becomes easier to obtain glass at / ° C.

本発明のフラットパネルディスプレイ装置用ガラス基板において、ガラスの組成を上記のように限定した理由は、次のとおりである。   In the glass substrate for a flat panel display device of the present invention, the reason for limiting the glass composition as described above is as follows.

SiO2は、ガラスのネットワークフォーマーを形成する成分である。その含有量は55〜74%、好ましくは56〜70%、より好ましくは58〜70%である。SiO2の含有量が多くなると、ガラスの高温粘度が高くなり、溶融、成形が難しくなったり、熱膨張係数が小さくなりすぎて周辺材料との整合性が取り難くなる。一方、含有量が少なくなると、熱膨張係数が大きくなりガラスの耐熱衝撃性が低下したり、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、ガラス基板に割れが発生したり、熱変形や熱収縮が起こりやすくなる。 SiO 2 is a component that forms a glass network former. Its content is 55-74%, preferably 56-70%, more preferably 58-70%. When the content of SiO 2 increases, the high temperature viscosity of the glass increases, and melting and molding become difficult, and the coefficient of thermal expansion becomes too small to make it compatible with the surrounding materials. On the other hand, when the content decreases, the thermal expansion coefficient increases and the thermal shock resistance of the glass tends to decrease or the strain point of the glass tends to decrease, and the glass substrate is cracked in the thermal process when manufacturing the display device. Or heat deformation or shrinkage is likely to occur.

Al23は、ガラスの歪点を高くする成分である。その含有量は0〜2.5%未満、好ましくは0〜1.5%、より好ましくは0〜1%未満である。Al23の含有量が多くなると、ガラスの高温粘度が著しく高くなり、溶融、成形が難しくなったり、熱膨張係数が小さくなり周辺材料との整合性が取り難くなる。 Al 2 O 3 is a component that increases the strain point of glass. Its content is 0-2.5%, preferably 0-1.5%, more preferably 0-1%. When the content of Al 2 O 3 is increased, the high-temperature viscosity of the glass is remarkably increased, so that melting and molding become difficult, and the thermal expansion coefficient becomes small, making it difficult to achieve consistency with surrounding materials.

MgOは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は1〜15%、好ましくは6.5〜11%、より好ましくは7.5〜11%である。MgOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。一方、含有量が少なくなると、ガラスの高温粘度が上昇し、溶融、成形が難しくなる。   MgO is a component that lowers the high-temperature viscosity of glass and improves meltability and formability. Its content is 1 to 15%, preferably 6.5 to 11%, more preferably 7.5 to 11%. If the content of MgO is increased, the glass tends to be devitrified and it becomes difficult to mold. On the other hand, when the content decreases, the high-temperature viscosity of the glass increases, and melting and molding become difficult.

CaOは、MgOと同様に、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜8%、好ましくは0〜5%、より好ましくは1〜3.5%である。CaOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。   CaO, like MgO, is a component that lowers the high-temperature viscosity of glass and improves meltability and formability. Its content is 0-8%, preferably 0-5%, more preferably 1-3.5%. If the content of CaO is increased, the glass tends to be devitrified and it becomes difficult to mold.

SrOは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は1〜15%、好ましくは7〜13%、より好ましくは7.5〜13%である。SrOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。一方、含有量が少なくなると、ガラスの高温粘度が上昇し、溶融、成形が難しくなる。   SrO is a component that lowers the high-temperature viscosity of the glass and improves meltability and formability. Its content is 1 to 15%, preferably 7 to 13%, more preferably 7.5 to 13%. When the content of SrO increases, the glass tends to be devitrified and it becomes difficult to mold. On the other hand, when the content decreases, the high-temperature viscosity of the glass increases, and melting and molding become difficult.

BaOは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜5%、好ましくは0〜4%、より好ましくは0〜2.5%である。BaOの含有量が多くなると、ガラスが失透しやすくなる傾向にあり成形し難くなる。   BaO is a component that lowers the high-temperature viscosity of the glass and improves meltability and moldability. The content is 0 to 5%, preferably 0 to 4%, more preferably 0 to 2.5%. When the content of BaO is increased, the glass tends to be devitrified and it is difficult to mold.

尚、ガラスの失透性を強めることなく、ガラスの高温粘度を低くして、溶融性と成形性を向上させるために、MgO、CaO、SrO及びBaOの合量は15〜27%(より好ましくは16.8〜27%、更に好ましくは18超〜27%)にすることが好ましい。これら成分の合量が多くなると、ガラスが失透しやすくなる。また、これら成分の合量が少なくなると、ガラスの高温粘度が上昇し、溶融、成形が難しくなる。   Incidentally, the total amount of MgO, CaO, SrO and BaO is 15 to 27% (more preferably) in order to reduce the high temperature viscosity of the glass and improve the meltability and formability without increasing the devitrification property of the glass. 16.8 to 27%, more preferably more than 18 to 27%). When the total amount of these components increases, the glass tends to devitrify. Moreover, when the total amount of these components decreases, the high temperature viscosity of the glass increases, and melting and molding become difficult.

ZnOは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。その含有量は0〜5%、好ましくは0〜3%、より好ましくは0〜1%である。ZnOの含有量が多くなると、原料コストが著しく高騰する。   ZnO is a component that lowers the high-temperature viscosity of glass and improves meltability and formability. Its content is 0 to 5%, preferably 0 to 3%, more preferably 0 to 1%. When the content of ZnO increases, the raw material cost increases remarkably.

Li2Oは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。また、ガラスの熱膨張係数を調整する成分でもある。その含有量は0〜5%、好ましくは0〜3%、より好ましくは0〜1%である。Li2Oの含有量が多くなると、ガラスの歪点が著しく低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、熱変形や熱収縮が起こりやすくなる。また、熱膨張係数が大きくなりすぎて、ガラスの耐熱衝撃性が低下したり、周辺材料の熱膨張係数と整合し難くなる。 Li 2 O is a component that lowers the high-temperature viscosity of the glass and improves meltability and formability. It is also a component that adjusts the thermal expansion coefficient of glass. Its content is 0 to 5%, preferably 0 to 3%, more preferably 0 to 1%. When the content of Li 2 O is increased, the strain point of the glass tends to be remarkably lowered, and thermal deformation and thermal contraction are likely to occur in the heat process when manufacturing the display device. Further, the thermal expansion coefficient becomes too large, and the thermal shock resistance of the glass is lowered, or it becomes difficult to match the thermal expansion coefficient of the surrounding material.

Na2Oは、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。また、ガラスの熱膨張係数を調整する成分でもある。その含有量は0〜8%、好ましくは1〜5%、より好ましくは1〜3%である。Na2Oの含有量が多くなると、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、熱変形や熱収縮が起こりやすくなる。また、熱膨張係数が大きくなりすぎて、ガラスの耐熱衝撃性が低下したり、周辺材料の熱膨張係数と整合し難くなる。 Na 2 O is a component that lowers the high-temperature viscosity of the glass and improves the meltability and moldability. It is also a component that adjusts the thermal expansion coefficient of glass. Its content is 0-8%, preferably 1-5%, more preferably 1-3%. When the content of Na 2 O increases, the strain point of the glass tends to decrease, and thermal deformation and thermal shrinkage are likely to occur in the thermal process when manufacturing the display device. Further, the thermal expansion coefficient becomes too large, and the thermal shock resistance of the glass is lowered, or it becomes difficult to match the thermal expansion coefficient of the surrounding material.

2Oは、Na2Oと同様に、ガラスの高温粘度を低下させて溶融性や成形性を高める成分である。また、ガラスの熱膨張係数を調整する成分でもある。その含有量は2〜12%、好ましくは3〜10%、より好ましくは4〜7%である。K2Oの含有量が多くなると、ガラスの歪点が低下する傾向にあり、ディスプレイ装置を製造する際の熱工程で、熱変形や熱収縮が起こりやすくなる。また、熱膨張係数が大きくなりすぎて、ガラスの耐熱衝撃性が低下したり、周辺材料の熱膨張係数と整合し難くなる。一方、含有量が少なくなると、ガラスの高温粘度が上昇し、溶融、成形が難しくなる。また、熱膨張係数が小さくなりすぎて、周辺材料の熱膨張係数と整合し難くなる。 K 2 O, like Na 2 O, is a component that lowers the high-temperature viscosity of the glass and improves the meltability and moldability. It is also a component that adjusts the thermal expansion coefficient of glass. Its content is 2 to 12%, preferably 3 to 10%, more preferably 4 to 7%. When the content of K 2 O increases, the strain point of the glass tends to decrease, and thermal deformation and thermal contraction are likely to occur in the thermal process when manufacturing the display device. Further, the thermal expansion coefficient becomes too large, and the thermal shock resistance of the glass is lowered, or it becomes difficult to match the thermal expansion coefficient of the surrounding material. On the other hand, when the content decreases, the high-temperature viscosity of the glass increases, and melting and molding become difficult. In addition, the thermal expansion coefficient becomes too small, making it difficult to match the thermal expansion coefficient of the surrounding material.

ZrO2は、ガラスの高温粘度を高めることなくガラスの歪点を著しく高める成分である。その含有量は1超〜7%、好ましくは1超〜5%、より好ましくは1超〜3%である。ZrO2の含有量が多くなると、失透ブツが発生する傾向にあり、成形が難しくなる。一方、含有量が少なくなると、ガラスの歪点を高める効果が得難くなる。 ZrO 2 is a component that remarkably increases the strain point of the glass without increasing the high temperature viscosity of the glass. The content is more than 1 to 7%, preferably more than 1 to 5%, more preferably more than 1 to 3%. If the content of ZrO 2 increases, devitrification will tend to occur and molding becomes difficult. On the other hand, when the content decreases, it becomes difficult to obtain the effect of increasing the strain point of the glass.

尚、ガラスの高温粘度を低くしてガラスの溶融、成形を容易にするためにAl23の含有量を2.5%未満(特に、1%未満)にした組成系において、ガラスの歪点を高めるには、Al23/ZrO2の値を1未満にすることが重要であり、好ましくは0.95以下、より好ましくは0.90以下にすることが好ましい。 In the composition system in which the content of Al 2 O 3 is less than 2.5% (particularly less than 1%) in order to lower the high temperature viscosity of the glass and facilitate melting and forming of the glass, In order to increase the point, it is important to make the value of Al 2 O 3 / ZrO 2 less than 1, preferably 0.95 or less, more preferably 0.90 or less.

尚、本発明において、上記成分以外にも、例えば、紫外線着色を防止するためにTiO2を5%まで、耐クラック性を向上させるためにP25を4%まで、液相温度を低下させて成形性を向上させるためにY23、La23、Nb23を各3%まで、着色剤としてFe23、CoO、NiO、Cr23、Nd23を各2%まで、清澄剤としてAs23、Sb23、SnO2、SO3、C、F、Cl等を合量で1%まで添加することが可能である。但し、フロート法で成形する場合、As23、Sb23はフロートバス中で還元されて金属異物となるため、導入は避けるべきである。 In the present invention, in addition to the above components, for example, TiO 2 is reduced to 5% to prevent ultraviolet coloring, and P 2 O 5 is decreased to 4% to improve crack resistance. In order to improve the moldability, Y 2 O 3 , La 2 O 3 and Nb 2 O 3 are added up to 3% each, and Fe 2 O 3 , CoO, NiO, Cr 2 O 3 and Nd 2 O 3 are used as colorants. It is possible to add As 2 O 3 , Sb 2 O 3 , SnO 2 , SO 3 , C, F, Cl, etc. as a clarifier up to 1% in total. However, when forming by the float process, As 2 O 3 and Sb 2 O 3 are reduced in the float bath to become metal foreign matter, so introduction should be avoided.

次に、本発明のフラットパネルディスプレイ装置用ガラス基板を製造する方法を説明する。   Next, a method for producing a glass substrate for a flat panel display device of the present invention will be described.

まず、上記のガラス組成範囲となるようにガラス原料を調合する。続いて、調合したガラス原料を連続溶融炉に投入して加熱溶融し、脱泡した後、成形装置に供給して板状に成形し徐冷することでガラス基板を得ることができる。   First, a glass raw material is prepared so that it may become said glass composition range. Subsequently, the prepared glass raw material is put into a continuous melting furnace, heated and melted, defoamed, then supplied to a forming apparatus, formed into a plate shape, and slowly cooled to obtain a glass substrate.

尚、ガラス基板の成形方法としては、フロート法、スロットダウンドロー法、オーバーフローダウンドロー法、リドロー法等の様々な成形方法があるが、フロート法で板状に成形することが好ましい。その理由は、比較的安価に大型のガラス基板を得やすいためである。   As a method for forming the glass substrate, there are various forming methods such as a float method, a slot down draw method, an overflow down draw method, and a redraw method, but it is preferable to form the glass substrate into a plate shape by the float method. The reason is that it is easy to obtain a large glass substrate at a relatively low cost.

以下、本発明のフラットパネルディスプレイ装置用ガラス基板を実施例に基づいて詳細に説明する。   Hereinafter, the glass substrate for flat panel display devices of the present invention will be described in detail based on examples.

表1〜4は、本発明の実施例(試料No.1〜20)及び比較例(試料No.21〜24)を示すものである。尚、試料No.24は、市販されているプラズマディスプレイ装置用の高歪点ガラスである。   Tables 1 to 4 show examples (samples Nos. 1 to 20) and comparative examples (samples Nos. 21 to 24) of the present invention. Sample No. Reference numeral 24 denotes a commercially available high strain point glass for a plasma display device.

Figure 2007031263
Figure 2007031263

Figure 2007031263
Figure 2007031263

Figure 2007031263
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表中の各試料は、次のようにして作製した。   Each sample in the table was prepared as follows.

まず、表の組成となるようにガラス原料を調合し、白金ポットを用いて1450〜1600℃で4時間溶融した。その後、溶融ガラスをカーボン板の上に流し出して板状に成形し、徐冷後、板厚が2.8mmになるように両面研磨して、得られた板ガラスを200mm角の大きさに切断加工することで試料ガラスを作製した。   First, the glass raw material was prepared so that it might become the composition of a table | surface, and it melted at 1450-1600 degreeC for 4 hours using the platinum pot. Thereafter, the molten glass is poured onto a carbon plate, formed into a plate shape, slowly cooled, then polished on both sides so that the plate thickness becomes 2.8 mm, and the obtained plate glass is cut into a size of 200 mm square. Sample glass was produced by processing.

このようして得られた各試料について、ガラスの粘度(歪点、徐冷点、軟化点、104、103及び102.5dPa・sの粘度に相当するガラス融液の温度)、液相温度、液相粘度及び熱膨張係数を測定した。その結果を表に示す。 For each sample thus obtained, the viscosity of the glass (temperature of the glass melt corresponding to the viscosity of strain point, annealing point, softening point, 10 4 , 10 3 and 10 2.5 dPa · s), liquid phase Temperature, liquid phase viscosity and coefficient of thermal expansion were measured. The results are shown in the table.

表から明らかなように、実施例である試料No.1〜20の各試料は、歪点が600℃以上であり、熱処理工程におけるガラス基板の熱変形や熱収縮を抑えることができる。また、104dPa・sの粘度に相当するガラス融液の温度が1194℃以下、102.5dPa・sの粘度に相当するガラス融液の温度が1485℃以下と低く、成形装置に負担を掛けることなく成形でき、しかも、良好に溶融することができる。また、液相温度が1180℃以下、液相粘度が103.8dPa・s以上であり、成形性にも優れ、大型のガラス基板を安価に大量に生産することができる。更に、熱膨張係数が67〜70×10-7/℃であり、耐熱衝撃性に優れ、周辺材料と良好に整合する熱膨張係数を有していた。 As can be seen from the table, the sample No. Each of the samples 1 to 20 has a strain point of 600 ° C. or higher, and can suppress thermal deformation and thermal shrinkage of the glass substrate in the heat treatment step. Further, the temperature of the glass melt corresponding to the viscosity of 10 4 dPa · s is 1194 ° C. or lower, and the temperature of the glass melt corresponding to the viscosity of 10 2.5 dPa · s is as low as 1485 ° C. or lower, which places a burden on the molding apparatus. And can be melted satisfactorily. Further, the liquidus temperature is 1180 ° C. or lower, the liquidus viscosity is 10 3.8 dPa · s or more, the moldability is excellent, and a large-sized glass substrate can be produced in large quantities at a low cost. Furthermore, it had a thermal expansion coefficient of 67 to 70 × 10 −7 / ° C., excellent thermal shock resistance, and a thermal expansion coefficient that matched well with the surrounding materials.

これに対して、比較例である試料No.21は、104dPa・sの粘度に相当するガラス融液の温度が1100℃と低いものの、歪点も570℃と低かった。また、試料No.22及び23は、歪点が599℃以上と高いものの、104dPa・sの粘度に相当するガラス融液の温度も1201℃以上と高かった。 On the other hand, sample No. which is a comparative example. No. 21, although the temperature of the glass melt corresponding to a viscosity of 10 4 dPa · s was as low as 1100 ° C., the strain point was also as low as 570 ° C. Sample No. Although 22 and 23 had a high strain point of 599 ° C. or higher, the temperature of the glass melt corresponding to a viscosity of 10 4 dPa · s was as high as 1201 ° C. or higher.

尚、歪点及び徐冷点については、ASTM C336−71に基づいて測定した。また、軟化点については、ASTM C338−93に基づいて測定した。尚、歪点が高い程、ディスプレイ装置を製造する際の熱工程におけるガラス基板の熱変形や熱収縮を抑えることができる。   In addition, about the strain point and the annealing point, it measured based on ASTMC336-71. The softening point was measured based on ASTM C338-93. In addition, the higher the strain point, the more the thermal deformation and thermal shrinkage of the glass substrate in the thermal process when manufacturing the display device can be suppressed.

また、ガラスの粘度が104、103及び102.5dPa・sに相当するガラス融液の温度は、白金球引き上げ法により測定した。尚、104dPa・sに相当するガラス融液の温度は、ガラスを板状に成形する際の目安になり、この温度が低い方が成形装置に負担を掛けずに成形できる。また、102.5dPa・sに相当するガラス融液の温度は、ガラスを溶融する際の目安になり、この温度が低い方が溶融を良好に行える。 The temperature of the glass melt corresponding to the glass viscosity of 10 4 , 10 3, and 10 2.5 dPa · s was measured by a platinum ball pulling method. Note that the temperature of the glass melt corresponding to 10 4 dPa · s is a guideline when the glass is formed into a plate shape, and a lower temperature can be formed without placing a burden on the forming apparatus. Further, the temperature of the glass melt corresponding to 10 2.5 dPa · s is a guide for melting the glass, and the lower the temperature, the better the melting.

液相温度については、次の要領で行った。まず、各試料をそれぞれ300〜500μmの大きさに粉砕、混合し、これを白金製のボートに入れて900〜1300℃の温度勾配炉に移して24時間保持し、温度勾配炉より白金製のボートを取り出した。その後、白金製のボートからガラスを取り出した。このようにして得られたサンプルを偏光顕微鏡で観察し、結晶の析出点を測定した。また、液相粘度は、上記方法で測定した粘度から粘度曲線を作成し、その粘度曲線から、液相温度に相当する粘度を求めた。尚、液相温度が低く、また、液相粘度が高い方が、成形性に優れ、大型のガラス基板を安価に大量に生産することができる。   The liquidus temperature was measured as follows. First, each sample is pulverized and mixed to a size of 300 to 500 μm, put into a platinum boat, transferred to a temperature gradient furnace at 900 to 1300 ° C. and held for 24 hours. I took out the boat. Thereafter, the glass was taken out from the platinum boat. The sample thus obtained was observed with a polarizing microscope, and the crystal precipitation point was measured. Moreover, the liquid phase viscosity created the viscosity curve from the viscosity measured by the said method, and calculated | required the viscosity corresponded to liquid phase temperature from the viscosity curve. In addition, the one where liquid phase temperature is low and liquid phase viscosity is high is excellent in a moldability, and can produce a large sized glass substrate in large quantities at low cost.

熱膨張係数については、直径5.0mm、長さ20mmの円柱状の試料を作製し、ディラトメーターで30〜380℃における平均熱膨張係数を測定した。   Regarding the thermal expansion coefficient, a cylindrical sample having a diameter of 5.0 mm and a length of 20 mm was prepared, and the average thermal expansion coefficient at 30 to 380 ° C. was measured with a dilatometer.

本発明のフラットパネルディスプレイ装置用ガラス基板は、プラズマディスプレイ装置用途に限られるものではなく、例えば、電界放射型ディスプレイ、エレクトロルミネッセンスディスプレイ用途に用いることも可能である。   The glass substrate for a flat panel display device of the present invention is not limited to the plasma display device application, and can be used for, for example, a field emission display and an electroluminescence display.

Claims (6)

SiO2−RO(RO:アルカリ土類金属酸化物)−R2O(アルカリ金属酸化物)系ガラスであって、質量百分率で、Al23 0〜2.5%未満、ZrO2 1超〜7%、Al23/ZrO2<1であることを特徴とするフラットパネルディスプレイ装置用ガラス基板。 SiO 2 —RO (RO: alkaline earth metal oxide) —R 2 O (alkali metal oxide) glass, which is in percentage by mass, Al 2 O 3 0 to less than 2.5%, more than ZrO 2 A glass substrate for a flat panel display device, which is ˜7%, Al 2 O 3 / ZrO 2 <1. 質量百分率で、SiO2 55〜74%、Al23 0〜2.5%未満、MgO 1〜15%、CaO 0〜8%、SrO 1〜15%、BaO 0〜5%、MgO+CaO+SrO+BaO 15〜27%、ZnO 0〜5%、Li2O 0〜5%、Na2O 0〜8%、K2O 2〜12%、ZrO2 1超〜7%、Al23/ZrO2<1であることを特徴とする請求項1に記載のフラットパネルディスプレイ装置用ガラス基板。 By mass percentage, SiO 2 55~74%, Al less than 2 O 3 0~2.5%, 1~15% MgO, CaO 0~8%, SrO 1~15%, BaO 0~5%, MgO + CaO + SrO + BaO 15~ 27%, 0~5% ZnO, Li 2 O 0~5%, Na 2 O 0~8%, K 2 O 2~12%, ZrO 2 1 super ~7%, Al 2 O 3 / ZrO 2 <1 The glass substrate for a flat panel display device according to claim 1, wherein 30〜380℃における熱膨張係数が60〜80×10-7/℃であることを特徴とする請求項1または2に記載のフラットパネルディスプレイ装置用ガラス基板。 The glass substrate for a flat panel display device according to claim 1 or 2, wherein a coefficient of thermal expansion at 30 to 380 ° C is 60 to 80 × 10 -7 / ° C. 歪点が580℃以上であることを特徴とする請求項1〜3の何れかに記載のフラットパネルディスプレイ装置用ガラス基板。   The glass substrate for a flat panel display device according to any one of claims 1 to 3, wherein the strain point is 580 ° C or higher. 104dPa・sの粘度に相当するガラス融液の温度が1180℃以下であることを特徴とする請求項1〜4の何れかに記載のフラットパネルディスプレイ装置用ガラス基板。 The glass substrate for a flat panel display device according to any one of claims 1 to 4, wherein the temperature of the glass melt corresponding to a viscosity of 10 4 dPa · s is 1180 ° C or lower. プラズマディスプレイ装置用ガラス基板として用いることを特徴とする請求項1〜5のいずれかに記載のフラットパネルディスプレイ装置用ガラス基板。   It uses as a glass substrate for plasma display apparatuses, The glass substrate for flat panel display apparatuses in any one of Claims 1-5 characterized by the above-mentioned.
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