JP2007024706A - Nanotube probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nanotube probe, constituted so as to be capable of easily and accurately performing the scanning of the sidewalls and bases of the surface plane and uneven part of a sample, and capable of accurately operating the bottom corner part of the uneven part of the plane of the sample. <P>SOLUTION: A long axial projected part 3 is provided to a cantilever part 2 and a flat surface 3a is formed to the side part of the leading end part of the projected part 3 with nanotubes 4a and 4b, arranged on the side part flat surface 3a so that the leading ends thereof are protruded in a direction of inclination with respect to the axial direction of the projected part 3. The base end parts of the nanotubes 4a and 4b are fixed to the side part flat surface 3a by coating or welding, and the leading ends of the nanotubes 4a and 4b are used as probes. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a nanotube probe capable of scanning a side wall portion of an uneven portion present on a surface of a sample.

  FIG. 20 is a website http: // www. team-nanotec. de / flared_cd. It is a schematic perspective view of the state which is scanning the surface of a sample and the recessed part which exists in this surface with the flare chip | tip of the prior art described in htm (nonpatent literature 1). Referring to FIG. 20, the flare chip 101 has protrusions 102 and 103 that protrude in a curved manner on both the left and right sides at the lower end, and the lower end surface 104 is formed in a curved shape. When scanning the surface of the sample C, the plane H on the left side of the sample C is scanned with the curved lower end surface 104. Further, the left side wall S of the concave portion U of the sample C is scanned with the curved left protrusion 102, and the bottom surface T of the concave portion U is scanned with the curved lower end surface 104. Further, the right side wall V of the recess U is scanned by the curved right protrusion 103, and the right plane J is scanned by the curved lower end surface 104.

  However, since the left and right protrusions 102 and 103 of the flare chip 101 are curved, there is a problem that the left side wall S and the right side wall V of the concave portion U of the sample C cannot be scanned clearly. Further, since the lower end surface 104 of the flare chip 101 is formed in a curved shape, there is a problem that the left and right planes H and J of the sample C and the bottom surface T of the recess U cannot be scanned clearly. In addition, since the left and right protrusions 102 and 103 and the lower end surface 104 are gently continuous, there is a problem in that both bottom corners K and K of the recess U become blind spots and cannot be scanned.

  In order to solve this problem, a flare chip 101A shown in FIG. 21 is developed, and it is conceivable to scan the plane of the surface of the sample C and the left and right side walls and bottom surface of the recess. That is, the left and right protrusions 102A and 103A of the flare chip 101A are formed to have an acute angle, and the lower end surface 104A is formed to be a flat surface. These left and right projections 102A and 103A can scan the left and right side walls of the concave portion of the sample surface clearly. However, since the lower end surface 104A is flat, there is a problem that an error increases when the plane of the sample is scanned. In addition, since the left and right protrusions 102A and 103A are formed so as to open outward from the lower end surface 104A, there is a problem in that both bottom corners of the concave portion of the sample become blind spots and cannot be scanned. In addition, it is difficult to manufacture the left and right protrusions 102A and 103A with an acute angle.

  22, FIG. 23, and FIG. 24 show the prior art tilt scanning method described in the lecture preliminary collection of the 52nd Applied Physics Related Conference in 2005 (Non-Patent Document 2). FIG. 22 is an explanatory view showing a state in which the protruding portion of the cantilever is scanned in a direction perpendicular to the surface of the sample. As shown in FIG. 22, when the surface of the sample C is scanned with the tip of the tip with the protruding portion 202 of the cantilever 201 perpendicular to the sample C, the plane H on the left side of the sample C, the bottom surface T of the recess U, and the right side Can be scanned vertically. FIG. 23 is an explanatory view showing a state in which tilting scanning is performed with the protrusion of the cantilever obliquely leftward with respect to the sample. As shown in FIG. 23, when the protruding portion 202 of the cantilever 201 is tilted to the left with respect to the surface of the sample C and tilted and scanned with the tip of the tip, the left-side plane H of the sample C and the left-side wall S of the recess U The right plane J can be scanned in an inclined manner. FIG. 24 is an explanatory diagram showing a state in which the cantilever protruding portion is inclined and tilted to the right with respect to the sample. As shown in FIG. 24, when the protruding portion 202 of the cantilever 201 is tilted to the right with respect to the surface of the sample C and tilted and scanned with the tip of the tip, the left side plane H of the sample C and the right side wall V of the recess U The right plane J can be scanned in an inclined manner.

  However, with this conventional tilt scanning method, it is difficult to orient the cantilever 201 obliquely with respect to the Z-axis direction, and a difficult operation is required. In addition, in order to scan the planes H and J of the surface of the sample C, the bottom surface T of the recess U, the left side wall S of the recess U, and the right side wall V of the recess U, vertical scanning and tilt scanning in two directions are not performed. I didn't. Furthermore, since the scan results in these three directions must be combined by a computer, there is a problem that the combining operation by the computer is troublesome. In addition, as shown in FIG. 22, when the aspect ratio AR = W / D indicating the depth of the concave portion U increases, the cantilever 201 is scanned when the projection 202 of the cantilever 201 is tilted and scanned in the tilted scanning. The protruding portion 202 abuts on the upper end portion of the recessed portion U. Therefore, the probe at the tip of the protruding portion 202 of the cantilever 201 does not reach the lowermost portions of the left side wall S and the right side wall V of the recess U, and there is a problem that tilt scanning is impossible.

A multidirectional sensing probe has been developed that improves image accuracy and allows surface measurements in a single scan. FIG. 25 is a schematic perspective view showing a scanning method using a multi-directional sensing probe of the prior art disclosed by US Patent Publication No. 2004/0134265 (Patent Document 1). Referring to FIG. 25, five nanotubes 324 are grown on the left and right front and rear side surfaces and the bottom surface of the projecting portion 344 made of a square pillar so as to project and grow in the X-axis direction, the Y-axis direction, and the Z-axis direction by chemical vapor deposition. Is provided. The X-axis direction nanotubes 324 projecting from the left and right side surfaces scan the left and right side walls of the concavo-convex portion of the sample 354, and the Y-axis direction nanotubes 324 projecting from the front and rear side surfaces scan the front and rear side walls of the concavo-convex portion of the sample 354. can do. Further, the surface of the sample 354 and the plane of the concavo-convex portion can be scanned with the nanotubes 324 projecting from the bottom surface in the Z-axis direction.
Homepage http: // www. team-nanotec. de / flared_cd. htm Proceedings of the 52nd Applied Physics Related Conference in 2005 US Patent Publication No. 2004/0134265

  In the conventional scanning method using a multidirectional sensing probe shown in FIG. 25, five nanotubes 324 are manufactured by a chemical vapor deposition method. For this reason, since a minute hole for embedding a catalyst has to be excavated on the front, back, left and right side surfaces and the bottom surface of the projecting portion 344, there is a problem that a difficult technique is required. Further, there is a problem that it is difficult to embed this catalyst in the minute holes.

  Furthermore, there are cases where a plurality of nanotubes grow from the holes, and in this case, there is a problem that a troublesome work of cutting unnecessary nanotubes into one is required. In addition, since a total of five nanotubes 324 are grown on the front, rear, left, and right side surfaces and the bottom surface of the protruding portion 344, the bottom corner portion of the uneven portion of the sample 354 becomes a blind spot, and there is a problem that the bottom corner portion cannot be scanned. It was.

  The present invention has been made in view of the above-described conventional problems, and the first invention has an object of easily and accurately scanning the plane of the surface of the sample and the side walls and the bottom of the uneven portion. To do. It is another object of the present invention to accurately scan the bottom corner of the concavo-convex portion on the plane of the sample without causing a blind spot. Another object of the second invention is to provide a nanotube probe that can easily and accurately scan the side wall of the uneven portion on the surface of the sample, and can also accurately scan the bottom corner portion of the uneven portion on the surface of the sample. To do.

  The present invention has been proposed in order to solve the above-described problems. In the first embodiment of the present invention, a long-axis-shaped protruding portion is provided in the cantilever portion, and the side portion of the tip portion of the protruding portion is provided. The nanotube is arranged so that the tip protrudes in an obliquely inclined direction with respect to the axial direction of the protruding portion, the base end portion of the nanotube is fixed to the side portion by coating or fusion, and the tip of the nanotube is probed As a nanotube probe.

  According to a second aspect of the present invention, in the first aspect, the nanotube is formed in a straight line, and is fixed so that the axial direction of the nanotube is an acute angle with respect to the axial direction of the protrusion. It is a nanotube probe.

  According to a third aspect of the present invention, in the first aspect, the nanotube is formed in a curved shape, and is fixed so that the axial direction of the tip of the nanotube is an acute angle with respect to the axial direction of the protrusion. Is a nanotube probe.

  According to a fourth aspect of the present invention, there is provided a nanotube probe according to the second or third aspect, wherein one of the nanotubes is fixed to a side portion of the protruding portion.

  According to a fifth aspect of the present invention, in the second or third aspect, two of the nanotubes are fixed to the side of the protruding portion, and the tip portions of the two nanotubes are inclined in the opposite directions and spread out. It is a nanotube probe fixed so that it may become a shape.

  A sixth aspect of the present invention is the nanotube probe according to any one of the third to fifth aspects, wherein the nanotube is bent by irradiating an electron beam.

  According to a seventh aspect of the present invention, a long-axis-shaped protrusion is provided in the cantilever part, and the base end of the nanotube is fixed to the tip of the protrusion by coating or fusion, and the tip of the nanotube protrudes from the protrusion This is a nanotube probe protruding to the side of the part.

  An eighth aspect of the present invention is a nanotube probe according to the seventh aspect, wherein one nanotube is fixed to the tip of the protruding portion.

  A ninth aspect of the present invention is the nanotube probe according to the seventh aspect, wherein two nanotubes are fixed to the tip of the protruding portion, and the tip portions of the nanotube are fixed to protrude in opposite directions. is there.

  A tenth aspect of the present invention is the nanotube probe according to the seventh aspect, wherein the four nanotubes are fixed to the tip of the protruding portion, and the tip of the nanotube is fixed to protrude in all directions. is there.

  In an eleventh aspect of the present invention, a long-axis-shaped protrusion is provided on the cantilever part, and an axially intermediate part of the nanotube is fixed to the tip of the protrusion by coating or fusion, and the tip part on both sides of the nanotube. Is a nanotube probe protruding to the side of the protruding portion.

  A twelfth aspect of the present invention is the nanotube according to the eleventh aspect, wherein the nanotube is fixed to one end of the protruding portion, and the both end portions of the nanotube protrude toward the opposite side from the protruding portion. It is a probe.

  According to a thirteenth aspect of the present invention, in the eleventh aspect, the nanotubes are fixed so as to cross in a double-cross shape, and both end portions of the two nanotubes protrude in four directions from the protrusions, respectively. It is a nanotube probe.

  According to the 1st form of this invention, the long-axis-shaped protrusion part is provided in the cantilever part. Therefore, it is possible to scan to the lowest part of the concave portion on the sample surface having a large aspect ratio by the nanotube probe fixed to the tip portion of the protruding portion. The tip of the nanotube is fixed to the side of the tip of the protrusion so as to protrude obliquely with respect to the axial direction of the protrusion. Therefore, it is possible to accurately scan the flat surface of the sample surface and the side walls and bottom surface of the concavo-convex portion with the tip at the tip. In addition, accurate scanning can be achieved by the contact of the tip of the nanotube to the bottom corner of the uneven portion on the surface of the sample. Further, since the base end portion of the nanotube is fixed to the side portion of the protruding portion by coating or fusion, the base end portion of the nanotube can be easily and firmly fixed to the side portion of the protruding portion. Furthermore, if a flat surface is formed on the side of the tip of the protruding portion and the base end portion of the nanotube is fixed to the flat surface, this fixing can be performed easily and stably. .

  According to the second embodiment of the present invention, since the nanotubes are formed in a straight line, the straight nanotubes are arranged in an oblique direction, and the base end portion is easily fixed to the side portion of the protruding portion. Thus, the tips of the nanotubes can be inclined so as to open outward. Moreover, since the axial direction of the nanotube is fixed at an acute angle with respect to the axial direction of the protruding portion, the plane of the sample surface and the side wall and bottom surface of the uneven portion can be scanned accurately and continuously. . Furthermore, as this linear nanotube, a normal nanotube can be applied.

  According to the third aspect of the present invention, since the nanotube is formed in a curved shape, the tip can be inclined by simply fixing the base end portion of the nanotube to the side portion of the protruding portion. In addition, the tip of the curved nanotube can be opened outward by simply fixing the proximal end of the nanotube. Furthermore, by making the attachment angle free, the attachment angle can be arbitrarily selected. If a nanotube having a large curvature is used, the tilt angle can be increased, and if a nanotube having a small curvature is used, the tilt angle can be decreased. The inclination angle of the tip can be freely changed according to the curvature. Curved nanotubes are not limited to naturally obtained nanotubes, but straight nanotubes can be curved by electrical means, magnetic means, or other processing means. Further, since the axial direction of the tip of the nanotube is fixed at an acute angle with respect to the axial direction of the protruding portion, the plane of the sample surface and the side walls and bottom surface of the uneven portion can be scanned accurately and continuously. .

  According to the fourth embodiment of the present invention, since one nanotube is fixed to the side of the protruding portion, the sample surface and the side wall and bottom surface of the concavo-convex portion are continuously and accurately scanned with the probe at the tip of the nanotube. it can. In addition, since only one nanotube is fixed to the side of the protruding portion, this fixing operation is easy to perform. Furthermore, single-walled nanotubes and multi-walled nanotubes can be used as the nanotubes. In addition, the elasticity of the nanotube can be freely adjusted by selecting the thickness of the nanotube.

  According to the fifth aspect of the present invention, since the two nanotubes are fixed to the side of the protruding portion, the surface of the sample surface and the side walls on both sides of the uneven portion are The bottom surface can be continuously scanned. In addition, since the tips of the two nanotubes are tilted in opposite directions and fixed so as to be divergent, the side walls on both sides of the uneven portion on the sample surface are scanned accurately with the probe at the tip of the nanotube. be able to. Also, two signals can be extracted simultaneously by two probes with only one scan. All the information on the sample surface can be obtained simply by superimposing these two signals. By changing the inclination angle of the two nanotubes, it is possible to obtain a nanotube fixed at a large or small inclination angle.

  According to the sixth aspect of the present invention, since the nanotube can be bent only by irradiating an electron beam, the nanotube can be easily formed in a curved shape. In particular, when the electron beam is irradiated to the defective portion of the nanotube, the nanotube is easily bent, so that the nanotube can be easily formed in a curved shape. Also, nanotubes with large and small curvatures can be obtained simply by changing the irradiation time of the electron beam.

  According to the seventh aspect of the present invention, the proximal end portion of the nanotube can be easily fixed to the distal end of the long-axis-shaped protruding portion. In addition, since this fixing is performed by coating or fusion, the base end of the nanotube can be firmly fixed to the tip of the protruding portion. Furthermore, since the tip of the nanotube protrudes to the side of the protrusion, the side wall of the uneven portion on the sample surface can be accurately scanned with the probe at the tip. Further, since the nanotube is fixed to the tip of the protruding portion, the bottom corner portion of the concavo-convex portion on the sample surface can be accurately scanned with the probe at the tip. Furthermore, by forming a flat bottom surface at the tip of the nanotube, it is easy to fix the base end portion of the nanotube to the flat bottom surface, and a horizontally oriented nanotube can be obtained.

  According to the eighth aspect of the present invention, since one nanotube is fixed to the tip of the protruding portion, the side wall of the uneven portion of the sample can be accurately scanned with the probe at the tip of the nanotube. Further, since only one nanotube is fixed to the tip of the protruding portion, this fixing operation is easy to perform.

  According to the ninth aspect of the present invention, two nanotubes are fixed to the tips of the protrusions, and the tips of the nanotubes are fixed to protrude in opposite directions. The side wall can be accurately scanned with the tip at the tip. In addition, the bottom corner of the uneven portion on the sample surface can be scanned accurately.

  According to the tenth aspect of the present invention, four nanotubes are fixed to the tip of the protrusion so that the tip of the nanotube protrudes in all directions. Therefore, the front and rear, left and right side walls of the concavo-convex portion of the sample surface can be accurately scanned with the tips of the tips of these four nanotubes. In addition, the four corners of the concave and convex portions can be easily and accurately scanned.

  According to the eleventh aspect of the present invention, since the axial intermediate portion of the nanotube is fixed to the tip of the protruding portion, one nanotube can be used as two nanotubes, and the number of nanotubes can be reduced. Can do. Furthermore, since the axial intermediate portion of the nanotube is fixed to the tip of the protrusion by coating or fusion, the nanotube can be firmly fixed to the tip of the protrusion. Further, since the tip portions on both sides of the nanotube protrude to the side of the protruding portion, the side wall of the uneven portion on the sample surface can be scanned accurately. In addition, since the nanotube is fixed to the tip of the protrusion, the bottom corner of the uneven portion on the sample surface can be accurately scanned with the probe at the tip.

  According to the twelfth aspect of the present invention, since one nanotube is fixed to the tip of the protrusion, the nanotube can be easily fixed. In addition, since both tip portions of the nanotubes protrude from the protruding portions toward the opposite sides, the side walls on both sides of the concavo-convex portion of the sample surface can be accurately scanned with the probes at both tip portions. In addition, since the side walls on both sides of the uneven portion on the sample surface can be scanned with one nanotube, the number of nanotubes can be reduced.

  According to the thirteenth aspect of the present invention, the nanotubes are arranged so as to intersect in a double cross shape, and the intersecting portion is fixed to the tip of the protruding portion by coating or fusion. Can be fixed. In addition, since both ends of the two nanotubes protrude in four directions from the protrusions, the front and rear, left and right side walls of the uneven surface of the sample surface can be accurately scanned with the tips of the tips protruding in these four directions. Can do. In addition, the number of nanotubes can be reduced because the two nanotubes can scan the front, back, left and right side walls of the concavo-convex portion of the sample surface. In addition, the bottom corners of the front, back, left, and right sides of the concavo-convex portion can be accurately scanned with the probes protruding in the four directions of the two nanotubes.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a nanotube probe according to the present invention will be described in detail with reference to FIGS.
FIG. 1 is a front view showing a state when a concave portion on the surface of a sample is scanned by the nanotube probe of the first embodiment of the present invention. As shown in FIG. 1, the nanotube probe 1 of the first embodiment is provided with a long-axis-like protruding portion 3 at the tip of the cantilever portion 2, and a flat surface 3 a is formed on the side of the tip of the protruding portion 3. Has been. Two linear nanotubes 4a and 4b are fixed to the side flat surface 3a so as to be inclined in the opposite direction so as to be divergent. The tip of the cantilever portion 2 of the nanotube probe 1 is brought into contact with the recess 5 a of the sample 5. The nanotubes 4a and 4b can be directly fixed to the tip without providing the flat surface 3a on the side of the tip of the protrusion 3.

  FIG. 2 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the first embodiment, (2A) is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating; ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (2A), the two nanotubes 4a and 4b are fixed to the side flat surface 3a at the distal end portion of the protruding portion 3 by coating the base end portions thereof. Or as shown to (2B), the base end part of the two nanotubes 4a and 4b is being fixed to the side part flat surface 3a of the front-end | tip part of the protrusion part 3 by melt | fusion.

  FIG. 3 is an explanatory diagram illustrating a state in which the surface of the sample and the side wall and bottom surface of the recess are scanned with the nanotube probe of the first embodiment. As shown in FIG. 3, the concave portion 5a of the sample 5 is formed by the left and right nanotubes 4a and 4b whose base end portions are fixed to the side flat surface 3a by moving the long-axis-shaped protruding portion 3 from the left side to the right side. Scan the containing surface. That is, the left and right nanotubes 4a and 4b scan the left plane 5b of the surface of the sample 5, the left wall 5c, the bottom 5d, the right wall 5e, and the right plane 5f of the recess 5a.

  In the tip of the left nanotube 4a, as shown by the solid line in the figure, the left side plane 5b of the surface of the sample 5, the left side wall 5c of the recess 5a, the left corner of the bottom surface 5d, the position near the right corner and the right side plane 5f. Can be scanned. Furthermore, the bottom corner of the left side wall 5c of the recess 5a can also be scanned accurately. In the tip of the right nanotube 4b, as shown by the dotted line in the figure, the right corner, the right wall 5e, and the right side from the position near the left corner of the left side plane 5b of the surface of the sample 5 and the bottom surface 5d of the recess 5a. The plane 5f can be scanned. Also, the bottom corner of the right side wall 5e can be scanned accurately. Therefore, all the surfaces including the concave portion 5a of the sample 5 can be scanned with these two nanotubes 4a and 4b.

  FIG. 4 is an explanatory view showing a state in which the surface of the sample, the side wall and the upper surface of the projection are scanned with the nanotube probe of the first embodiment. As shown in FIG. 4, the protrusion 5g of the sample 5 is included by the left and right nanotubes 4a and 4b whose base ends are fixed to the side flat surface 3a by moving the long-axis-shaped protrusion 3 from the left side to the right side. Scan the surface. In the tip of the left nanotube 4a, as shown by the solid line in the figure, up to the position near the corner of the projection 5g on the left plane 5h of the surface of the sample 5, the upper surface 5i, the right wall 5j, and the right plane of the projection 5g. 5k can be scanned. Further, the bottom corner of the right side wall 5j can be scanned accurately. In the tip of the right nanotube 4b, the left side plane 5h of the surface of the sample 5, the left side wall 5m of the convex part 5g, the upper surface 5i, and the right side part from the position near the corner of the convex part 5g on the right side plane 5k are scanned. can do. Further, the bottom corner of the left side wall 5m can be scanned accurately.

  FIG. 5 is a front view of the nanotube probe of the second embodiment. As shown in FIG. 5, in the nanotube probe 1 of the second embodiment, two curved nanotubes 4 c and 4 d are fixed to the side flat surface 3 a at the tip of the long-axis-shaped protrusion 3. These nanotubes 4 c and 4 d are fixed so that the axial direction of the tip is an acute angle with respect to the axial direction of the protruding portion 3. Further, the two nanotubes 4c and 4d are fixed to the side flat surface 3a of the protruding portion 3 so as to be inclined in the opposite direction so as to be divergent. It is also possible to directly fix the two nanotubes 4 c and 4 d to the side of the protrusion 3 without forming the side flat surface 3 a at the tip of the protrusion 3.

  FIG. 6 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the second embodiment, and FIG. 6A is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (6A), the base ends of the two curved nanotubes 4c and 4d are fixed to the side flat surface 3a at the tip of the protrusion 3 by coating. Alternatively, as shown in (6B), the base ends of the two curved nanotubes 4c and 4d are fixed to the side flat surface 3a at the tip of the protrusion 3 by fusion.

  FIG. 7 shows a state in which the nanotube is bent by an electron beam, (7A) is an explanatory view of a state in which the nanotube is irradiated with an electron beam, and (7B) is an enlarged front view of the state in which the nanotube is bent. As shown in (7A), an electron beam is irradiated to a portion of the linear nanotubes 4c and 4d, particularly where the defect 4e is present. As shown in (7B), at this time, the nanotubes 4c and 4d are bent to form curved nanotubes 4c and 4d. The procedure of scanning the surface plane of the sample 5 (see FIGS. 3 and 4) and the left and right side walls and the bottom surface of the concavo-convex portion by the curved nanotubes 4c and 4d is the first described with reference to FIGS. Since it is the same as that of the embodiment, the description thereof is omitted.

  FIG. 8 is a front view of the nanotube probe of the third embodiment. As shown in FIG. 8, in the nanotube probe 1 of the third embodiment, the base end portion of one linear nanotube 4a is fixed to the side flat surface 3a at the distal end portion of the long-axis-shaped protruding portion 3. ing. The tip of the nanotube 4 a is fixed so that the axial direction thereof is an acute angle with respect to the axial direction of the protruding portion 3. The nanotube probe 1 according to the third embodiment can scan the plane of the surface of the sample 5 (see FIGS. 3 and 4) and the side walls and bottom surface of the uneven portion. In addition, it is also possible to fix the nanotube 4a directly to the side of the protrusion 3 without providing the flat surface 3a on the side of the tip of the protrusion 3.

  FIG. 9 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the third embodiment, and FIG. 9A is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (9A), one linear nanotube 4a has its base end fixed to the side flat surface 3a of the tip of the protrusion 3 by coating. Alternatively, as shown in (9B), one linear nanotube 4a has its base end fixed to the side flat surface 3a of the tip of the protrusion 3 by fusion.

  FIG. 10 is a front view of the nanotube probe of the fourth embodiment. As shown in FIG. 10, in the nanotube probe 1 of the fourth embodiment, a single curved nanotube 4 c is fixed to the side flat surface 3 a at the tip of the long-axis-shaped protruding portion 3. The axial direction of the nanotube 4c is fixed so as to have an acute angle with respect to the axial direction of the protruding portion 3. Note that the nanotube 4c can be directly fixed to the side of the tip of the protrusion 3 without providing the flat surface 3a on the side of the tip of the protrusion 3.

  FIG. 11 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the fourth embodiment, and (11A) is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (11A), the curved nanotube 4c is fixed to the side flat surface 3a at the tip of the protrusion 3 by coating. Or as shown to (11B), the curvilinear nanotube 4c is being fixed to the side part flat surface 3a of the front-end | tip part of the protrusion part 3 by fusion | fusion. In the nanotube probe 1, the plane of the surface of the sample 5 and the side wall of the concavo-convex portion can be scanned with the tip of the nanotube 4c.

  FIG. 12 is a front view of the nanotube probe of the fifth embodiment. As shown in FIG. 12, the nanotube probe 1 of the fifth embodiment is provided with a bottom surface 3b facing the sample plane at the time of measurement at the tip of the long-axis-shaped protruding portion 3. Two nanotubes 4g and 4g are arranged in a cross shape on the bottom surface 3b, the intersecting portion is fixed to the bottom surface 3b of the projecting portion 3, and both ends project from the projecting portion 3 in four directions. Yes. It is also possible to directly fix the two nanotubes 4g and 4g to the tip of the protrusion without providing the bottom surface 3b at the tip of the protrusion 3.

  FIG. 13 shows a state where the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the fifth embodiment, and FIG. 13A is a partially enlarged front view of the state where the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (13A), the intersecting portion of the two nanotubes 4g and 4g intersecting in a cross shape is fixed to the bottom surface 3b of the protruding portion 3 by coating. Or as shown to (13B), the cross | intersection part of the two nanotubes 4g and 4g which cross | intersected the cross shape is being fixed to the bottom face 3b of the protrusion part 3 by fusion | fusion.

  FIG. 14 is a partial perspective view showing a state in which the left and right and front and rear side walls of the convex portion on the sample surface are scanned with the nanotube probe of the fifth embodiment. As shown in FIG. 14, when scanning is performed using the nanotube probe 1 of the fifth embodiment, the four side walls 5n, 5p, 5q, and 5r of the convex portion 5g of the sample 5 can be scanned. That is, the front and rear left and right side walls 5n, 5p, 5q, and 5r of the convex portion 5g of the sample 5 can be scanned with the tip tips of the nanotubes 4g and 4g protruding in all directions. In addition, since the nanotubes 4g and 4g are fixed to the bottom surface 3b of the protruding portion 3, it is possible to accurately scan the corners at the lower ends of the front and rear side walls 5n, 5p, 5q, and 5r of the convex portion 5g of the sample 5. it can.

  FIG. 15 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the sixth embodiment, and (15A) is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (15A), in the nanotube probe 1 of the sixth embodiment, one nanotube 4g is fixed to the bottom surface 3b of the protruding portion 3 by coating. Further, as shown in (15B), one nanotube 4g is fixed by fusion. In the nanotube probe 1, both ends of the nanotube 4g protrude from the protrusion 3 toward the opposite side. Therefore, the side walls on both sides of the uneven portion on the surface of the sample 5 can be scanned with both ends of the nanotube 4g. The nanotube 4g can be directly fixed to the tip of the protrusion 3 without providing the bottom surface 3b at the tip of the protrusion 3.

  FIG. 16 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the seventh embodiment, and FIG. 16A is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (16A), in the nanotube probe 1 of the seventh embodiment, the base end portions of the four nanotubes 4h are fixed to the bottom surface 3b of the long-axis-shaped protruding portion 3 by coating. The tips of the four nanotubes 4h protrude from the protruding portion 3 in four directions. Further, as shown in (16B), the base end portions of the four nanotubes 4h are fixed to the bottom surface 3b of the long-axis-shaped protruding portion 3 by fusion. In the nanotube probe 1 of the seventh embodiment, the front, back, left and right side walls of the uneven portion on the surface of the sample 5 can be scanned by the four nanotubes 4h. Note that the nanotube 4 h can be directly fixed to the tip of the protrusion without providing the bottom surface 3 b at the tip of the protrusion 3.

  FIG. 17 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the eighth embodiment, and FIG. 17A is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown in (17A), in the nanotube probe 1 of the eighth embodiment, the base ends of the two nanotubes 4h are fixed to the bottom surface 3b of the long-axis-shaped protruding portion 3 by coating. The tips of these two nanotubes 4h protrude in opposite directions. Moreover, as shown to (17B), the base end part of the two nanotubes 4h is being fixed to the bottom face 3b of the long-axis-shaped protrusion part 3 by melt | fusion. In the nanotube probe 1 of the eighth embodiment, the side walls on both sides of the uneven portion on the surface of the sample 5 can be scanned by the two nanotubes 4h. Note that the two nanotubes 4 h can be directly fixed to the tip of the protrusion 3 without providing the bottom surface 3 b at the tip of the protrusion 3.

  FIG. 18 is a front view of the nanotube probe of the ninth embodiment. In the nanotube probe 1 of the ninth embodiment, a single nanotube 4h is fixed to the bottom surface 3b of the projecting portion 3, and the base end thereof projects to the side of the projecting portion. Note that the nanotube 4 h can be directly fixed to the tip of the protrusion 3 without providing the bottom surface 3 b at the tip of the protrusion 3.

  FIG. 19 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the ninth embodiment, and FIG. 19A is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. As shown to (19A), the base end part of the single nanotube 4h is being fixed to the bottom face 3b of the protrusion part 3 by coating. As shown in (19B), the base end portion of one nanotube 4h is fixed to the bottom surface 3b of the protruding portion 3 by fusion. In the nanotube probe 1 of the ninth embodiment, the side wall of the uneven portion on the surface of the sample 5 can be scanned. Note that the nanotube 4 h can be directly fixed to the tip of the protrusion 3 without providing the bottom surface 3 b at the tip of the protrusion 3.

  The present invention is not limited to the above-described embodiments and modifications, and includes various modifications and design changes within the technical scope without departing from the technical idea of the present invention. Needless to say.

  The nanotube probe according to the present invention is used in an AFM (Atomic Force Microscope) or the like, and is mainly used when scanning the plane of a sample surface or the side wall and bottom surface of an uneven portion by an optical lever AFM system.

It is a front view which shows a state when scanning the recessed part of the surface of a sample with the nanotube probe of 1st Embodiment of this invention. The state which fixes a nanotube to the tip part of the projection part of a cantilever part in a nanotube probe of a 1st embodiment is shown, (2A) is a partial expansion front view of the state where a nanotube was fixed to a projection part by coating, (2B) is a nanotube It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. It is explanatory drawing which shows the state which scans the surface plane of a sample, the side wall of a recessed part, and a bottom face with the nanotube probe of 1st Embodiment. It is explanatory drawing which shows the state which scans the surface of the surface of a sample, the side wall of a convex part, and an upper surface with the nanotube probe of 1st Embodiment. It is a front view of the nanotube probe of a 2nd embodiment. The state which fixes a nanotube to the front-end | tip part of the protrusion part of the cantilever part in the nanotube probe of 2nd Embodiment is shown, (6A) is the partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (6B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. The state in which the nanotube is bent by the electron beam is shown, (7A) is an explanatory view of the state in which the nanotube is irradiated with the electron beam, and (7B) is an enlarged front view of the state in which the nanotube is bent. It is a front view of the nanotube probe of a 3rd embodiment. The state which fixes a nanotube to the front-end | tip part of the protrusion part of the cantilever part in the nanotube probe of 3rd Embodiment is shown, (9A) is a partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (9B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. It is a front view of the nanotube probe of a 4th embodiment. FIG. 11 shows a state in which the nanotube is fixed to the tip of the protruding portion of the cantilever portion in the nanotube probe of the fourth embodiment, and (11A) is a partially enlarged front view of the state in which the nanotube is fixed to the protruding portion by coating. ) Is a partially enlarged front view of a state in which the nanotube is fixed to the protruding portion by fusion. It is a front view of the nanotube probe of a 5th embodiment. The nanotube probe of 5th Embodiment shows the state which fixes a nanotube to the front-end | tip part of the protrusion part of a cantilever part, (13A) is a partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (13B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. It is a fragmentary perspective view which shows the state which scans the side wall before and behind the left and right of the convex part of a sample surface with the nanotube probe of 5th Embodiment. The nanotube probe of 6th Embodiment shows the state which fixes a nanotube to the front-end | tip part of the protrusion part of a cantilever part, (15A) is a partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (15B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. The nanotube probe of 7th Embodiment shows the state which fixes a nanotube to the front-end | tip part of the protrusion part of a cantilever part, (16A) is a partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (16B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. The nanotube probe of 8th Embodiment shows the state which fixes a nanotube to the front-end | tip part of the protrusion part of a cantilever part, (17A) is a partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (17B) is a nanotube. It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. It is a front view of the nanotube probe of a 9th embodiment. The nanotube probe of 9th Embodiment shows the state which fixes a nanotube to the front-end | tip part of the protrusion part of a cantilever part, (19A) is the partial expanded front view of the state which fixed the nanotube to the protrusion part by coating, (19B) is a nanotube It is the elements on larger scale of the state which fixed to the protrusion part by melt | fusion. It is a schematic perspective view of the state which is scanning the surface of a sample and the recessed part which exists in this surface with the conventional flare chip | tip. It is a front view of the flare chip which improved FIG. It is explanatory drawing which shows the state which scans with the conventional cantilever perpendicularly | vertically with respect to the surface of a sample. It is explanatory drawing which shows the state which carries out the inclination scan by making the conventional cantilever into the left diagonal direction with respect to the sample. It is explanatory drawing which shows the state which carries out the inclination scanning by making the conventional cantilever into the right diagonal direction with respect to the sample. It is a schematic perspective view which shows the scanning method by the conventional multidirectional sensing probe.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Nanotube probe 2 Cantilever part 3 Long-axis-like protrusion part 3a Side part flat surface 3b Bottom face 4a Linear nanotube 4b Linear nanotube 4c Curved nanotube 4d Curved nanotube 4e Defect 4g Nanotube 4h Nanotube 5 Sample 5a Recessed part 5b left side plane 5c left side wall 5d bottom surface 5e right side wall 5f right side plane 5h left side plane 5g convex portion 5i top surface 5j right side wall 5k right side plane 5m left side wall 5n side wall 5p side wall 5q side wall 5r side wall

Claims (13)

  The cantilever portion is provided with a long-axis-like protrusion, and a nanotube is disposed on the side of the tip of the protrusion so that the tip protrudes obliquely with respect to the axial direction of the protrusion. A nanotube probe characterized in that a base end portion is fixed to the side portion by coating or fusion, and the tip end of the nanotube is used as a probe.   The nanotube probe according to claim 1, wherein the nanotube is formed in a straight line and is fixed so that an axial direction of the nanotube is an acute angle with respect to an axial direction of the protruding portion.   The nanotube probe according to claim 1, wherein the nanotube is formed in a curved shape, and is fixed so that an axial direction of a tip of the nanotube is an acute angle with respect to an axial direction of the protruding portion.   The nanotube probe according to claim 2 or 3, wherein one nanotube is fixed to a side portion of the protruding portion.   4. The nanotube according to claim 2, wherein two nanotubes are fixed to a side portion of the protruding portion, and tip portions of the two nanotubes are fixed so as to be inclined in an opposite direction so as to be divergent. probe.   The nanotube probe according to claim 3, wherein the nanotube is bent by irradiation with an electron beam.   The cantilever part is provided with a long-axis-like protrusion, the base end of the nanotube is fixed to the tip of the protrusion by coating or fusion, and the tip of the nanotube protrudes to the side of the protrusion. A nanotube probe characterized by that.   The nanotube probe according to claim 7, wherein one nanotube is fixed to the tip of the protruding portion.   The nanotube probe according to claim 7, wherein two nanotubes are fixed to the tip of the protruding portion, and the tip portions of the nanotube are fixed to protrude in opposite directions.   The nanotube probe according to claim 7, wherein four nanotubes are fixed to the tip of the protruding portion, and the nanotube tip is fixed so as to protrude in all directions.   The cantilever part is provided with a long-axis-like protrusion, the axial middle part of the nanotube is fixed to the tip of the protrusion by coating or fusion, and the tip part on both sides of the nanotube protrudes to the side of the protrusion. A nanotube probe characterized by comprising:   The nanotube probe according to claim 11, wherein one nanotube is fixed to the tip of the protruding portion, and both tip portions of the nanotube protrude from the protruding portion toward opposite sides.   The nanotube probe according to claim 11, wherein the nanotubes are fixed so as to cross in a double cross shape, and both end portions of the two nanotubes protrude from the protruding portions in four directions.

Images