JP2007022898A - Active type gas supplying apparatus of carbon nanotube synthesis system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an active type gas supplying apparatus of a carbon nanotube synthesis system. <P>SOLUTION: The active type gas supplying apparatus of a carbon nanotube synthesis system comprising: a reaction chamber 20 for synthesizing a carbon nanotube via an internal reaction furnace; and a heater 30 providing a reaction temperature required for the synthesis of a carbon nanotube to the reaction chamber 20 is composed of: a gas reservoir 70 for reserving a reaction gas or the like required for the synthesis reaction of a carbon nanotube and exhausting the same under fixed oil pressure; a gas mixer 50 for mixing the reaction gas or the like exhausted from the gas reservoir 70 and controlling the amount and concentration of the reaction gas to be required; a gas decomposer 60 for cracking the mixed reaction gas delivered from the gas mixture 50 at high temperature; and gas feeding and exhausting parts 51, 52, 53 for feeding the reaction gas decomposed in the gas decomposer 60 into the reaction chamber, and also, exhausting the gas in which the reaction is finished. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an active gas supply device for a carbon nanotube synthesizer, and more particularly, to supply a reaction chamber in which carbon nanotubes are synthesized by decomposing carbon gas necessary for carbon nanotube synthesis with a high-temperature gas decomposer. By making the decomposition of the carbonized gas and the reaction of the decomposed carbon gas and the catalyst separately, the reaction temperature and the reaction gas can be stably operated in the reaction furnace, and the mass production of carbon nanotubes is enabled. The present invention relates to an active gas supply device for a carbon nanotube synthesizer capable of realizing the process.

  At present, as a technical method for producing a carbon nanotube, an electric discharge method, a laser vapor deposition method, a thermal chemical vapor deposition method, and the like are representative, and some other methods other than these are possible (Patent Documents). 1 and Patent Document 2).

Among these, a typical reaction gas operation method for synthesizing a thermal chemical vapor deposition carbon nanotube will be briefly described below.
The carbon nanotube synthesis method by the thermal chemical vapor deposition method is a method in which carbon nanotubes are spontaneously generated while flowing a carbon component gas in a high-temperature reactor, and high heat of 600 to 1000 ° C. is used together with a catalyst.

  The existing thermal chemical vapor deposition synthesizer uses an almost straight tube in the reactor and supplies carbonized gas into the reactor without decomposing it. Since the decomposition and reaction of the carbonized gas takes place simultaneously, there are many problems regarding the adjustment of the gas inside the reactor.

  Problems related to gas operation in such an existing thermal chemical vapor deposition method include the problem of uneven flow rate variation of the reaction gas caused by supplying the reaction gas containing carbon into the linear reactor, There are various problems such as the growth temperature of carbon nanotubes and the problem of adjusting the flow rate of the reaction gas required for growth, the problem of adjusting the decomposition amount of the carbon-containing reaction gas based on the temperature, and the problem of adjusting the concentration of the reaction gas inside the reactor. Can be mentioned. Therefore, in the method of supplying the existing reaction gas directly to the reaction furnace, there are many problems in order to stably grow the carbon nanotubes.

In addition, the existing thermal chemical vapor deposition apparatus as described above has a very long time from when the temperature of the heater for supplying heat is raised to when it is lowered, and the productivity of carbon nanotubes per unit time is low. It has the disadvantages that it is difficult to synthesize carbon nanotubes in large quantities due to the difficulty of continuously supplying the catalyst into the reactor, and also the stable temperature and reaction required for the reaction. Since there are many problems related to gas regulation, there are many problems in application to actual production.
JP 2004-18309 A JP 2003-277029 A

  The present invention has been devised in order to solve such problems. The object of the present invention is to supply carbon dioxide gas necessary for carbon nanotube synthesis to a reaction chamber in which carbon nanotube synthesis is performed at a high temperature. By decomposing and supplying with a gas decomposer, the decomposition of the carbonized gas and the reaction of the decomposed carbon gas and the catalyst can proceed separately, allowing stable operation of the reaction temperature and reaction gas in the reactor In addition, an active gas supply device for a carbon nanotube synthesizer that can realize a mass production process of carbon nanotubes is provided.

  In addition, even when the size of the chamber and reactor is increased to increase the productivity of carbon nanotubes per unit time, it is stable in response to changes in reaction conditions based on changes in the size of the chamber and reactor. Another object of the present invention is to provide an active gas supply device for a carbon nanotube synthesizer that can operate a reactive gas.

  In order to achieve the above object, an invention according to claim 1 is an active gas supply device for a carbon nanotube synthesizer, comprising a reaction chamber for synthesizing carbon nanotubes via an internal reactor, In a gas supply apparatus applied to a carbon nanotube synthesizer including a heater for providing a reaction temperature necessary for carbon nanotube synthesis to the reaction chamber, a reaction gas necessary for the carbon nanotube synthesis reaction in the reaction chamber, etc. Gas storage for storing and discharging at a constant hydraulic pressure, and gas mixing for adjusting the amount and concentration of the reaction gas required by mixing the reaction gas discharged from the gas storage , A gas decomposer for decomposing the mixed reaction gas delivered from the gas mixer at a high temperature, and the reaction gas decomposed by the gas decomposer into the reaction chamber Providing an active gas supply apparatus characterized by comprising a gas supply and discharge unit for discharging the gas reaction is complete as well as feeding.

  According to a second aspect of the present invention, there is provided an active gas supply apparatus for a carbon nanotube synthesizer according to the first aspect, wherein the gas decomposer is provided in the reaction chamber in order to maintain a sufficient activation temperature of the decomposed carbon gas. Coiled tube that is installed in the vicinity and is wound in a coil shape so as to have a wide heat volume, and is supplied with a mixed carbonized gas containing a carbon source supplied from the gas mixer and transferred. And a heating element that is formed so as to surround the coil tube as a whole and applies high-temperature heat necessary for carbon gas decomposition of carbonized gas in the coil tube, and maintains the temperature of the heating element to the outside. The gist is to include a heat insulating member that prevents heat release.

  According to a third aspect of the present invention, in the active gas supply device of the carbon nanotube synthesizer according to the second aspect, the coil tube is bent in a U-shape in order to induce a natural gas flow. The gist is that it is formed.

  The invention according to claim 4 is an active gas supply device for a carbon nanotube synthesizer, and a reaction chamber for synthesizing carbon nanotubes via an internal reaction furnace, and synthesis of carbon nanotubes into the reaction chamber. In a gas supply device applied to a carbon nanotube synthesizer, including a heater for providing a necessary reaction temperature, the reaction gas necessary for the carbon nanotube synthesis reaction in the reaction chamber is stored and the oil pressure is kept constant. A gas reservoir for discharging the gas, a gas mixer for adjusting the amount and concentration of the reaction gas required by mixing the reaction gas discharged from the gas reservoir, and a wide heat capacity. The reaction chamber is formed into a coil that is wound around in a coil shape so as to have a reaction gas mixed from the gas mixer, and is directly connected to the heater. A gas decomposition tube that decomposes with the heat supplied and supplies the decomposed reaction gas into the reaction chamber, a gas discharge unit for discharging the gas that has been reacted in the reaction chamber, An active gas supply device is provided.

  As discussed above, the active gas supply device of the carbon nanotube synthesizer according to the present invention is different from the conventional method in which the carbonized gas is directly supplied to the reaction chamber and the carbonized gas is decomposed by the heater heat. The carbonization gas required for the synthesis of the gas is decomposed with a high-temperature gas decomposer and supplied to the reaction furnace in the reaction chamber, and the carbon gas concentration in the chamber is adjusted and supplied to thereby decompose the carbonized gas. The reaction between the decomposed carbon gas and the catalyst proceeds separately. Therefore, since the heating heater can be carried out by supplying only the reaction temperature to each chamber, the reaction between the catalyst and the carbon gas occurs smoothly in the chamber, and the carbon nanotubes are formed under the catalyst in a short time. There is an effect that it can be synthesized in large quantities.

  Further, since the gas decomposer is configured outside the reaction chamber, only the temperature necessary for the growth of the carbon nanotubes can be stably supplied to the reaction chamber, and thus the gas storage device and the gas decomposer can be supplied. Since the carbon gas of an appropriate concentration necessary for the growth of carbon nanotubes is regulated and supplied into the chamber and the reactor, stable gas operation is possible, and based on this, various types of carbon gas can be used. An apparatus for synthesizing a large amount of carbon nanotubes can be designed and manufactured, and carbon nanotubes (NWCNT, DWCNT, SWCNT) having various structures can be stably produced.

  In addition, the problem of carbon gas supply based on the growth rate of carbon nanotubes per hour in the reactor, which is the most problematic during the synthesis of carbon nanotubes, and the reactor temperature based on the reaction temperature of the reactor and the decomposition amount of carbon gas In addition, there is an effect that a problem relating to the adjustment of the concentration of carbon gas necessary for growth in the furnace and a problem relating to the adjustment of the decomposition amount based on the temperature can be easily adjusted using a high-temperature gas decomposer outside the chamber.

  Furthermore, without installing a separate gas decomposer, the carbonized gas delivered from the gas mixer is directly supplied through a gas decomposition tube surrounding the reaction chamber, and passes through the gas decomposition tube through a heater. By comprising so that carbonized gas is decomposed | disassembled, it has the effect that the decomposition | disassembly of natural carbonized gas can be induced | guided | derived without providing a separate gas decomposer.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 shows an active gas supply apparatus of a carbon nanotube synthesizer to which the present invention is applied.
A carbon nanotube synthesizer to which the present invention is applied includes a plurality of reaction chambers 20 for independently performing separate detailed steps in the synthesis for the synthesis of carbon nanotubes, and moves around the reaction chambers 20. A heater 30 for providing a temperature necessary for the synthesis reaction in the reaction chamber 20 and a drive motor 40 for driving the heater 30 to move in a section where the reaction chamber 20 and the like are disposed. And consist of The heater moves to match the reaction temperature interval and the like according to each reaction stage in each reaction chamber, which are different reaction stages. Thereby, an appropriate reaction temperature can be continuously provided for each chamber, and a large amount of carbon nanotubes can be synthesized. That is, it is a continuous mass carbon nanotube synthesizer.

  More specifically, the continuous large-scale carbon nanotube synthesizer according to the present invention can stably operate a catalyst in an Ar atmosphere in a temperature range of 200 to 700 ° C. for stable operation of a reaction gas based on temperature. A preheating step for melting, a reaction step for synthesizing a catalyst and a carbon nanotube by supplying carbon dioxide such as methane gas, acetylene gas, ethylene gas at a temperature range of 800 to 1000 ° C. at 10 to 1000 sccm, and the reaction is completed After that, a cooling step of rapidly lowering the temperature from the Ar atmosphere at a temperature of 700 to 200 ° C. can be performed, and the low temperature region, the reaction region, and the cooling of the heater 30 moved by the drive motor 40 for each step. Regions can be placed on each reaction chamber 20 to provide the heat necessary for the process in each reaction chamber 20. .

The configuration of the above-described continuous mass carbon nanotube synthesizer will be briefly described below.
A plurality of reaction chambers 20 are installed on a ceramic plate 10 as a basic plate, and a catalyst and a gas are in contact with each other in each reaction furnace, and various processes for producing carbon nanotubes are independently performed. Is possible.

  The heater 30 has a low temperature region in charge of the preheating process, a reaction region in charge of the reaction process, and a cooling region in charge of the cooling process so that various temperatures can be supplied to the reaction chamber 20 for each synthesis stage. Are independently formed, the temperature of the entire carbon nanotube synthesis process can be stabilized.

  The drive motor 40 is connected to the heater 30 that provides an appropriate reaction temperature to the plurality of reaction chambers 20, and the temperature range of the heater 30 is changed for each synthesis by moving the heater 30 at regular time intervals. Allowing proper positioning in the reaction chamber 20 of the process.

  At this time, the gas supply and discharge units 51, 52, and 53 supply the reaction gas in which a plurality of gases are stably mixed to each reaction chamber 20 and discharge the exhaust gas. At the time of gas supply, the reaction gas is delivered to the gas diffusion port 21 installed in the lower part of the chamber 20 via the gas supplier 51, and the delivered reaction gas is located under the reaction chamber 20. Diffused from. At the end of the reaction, the reaction gas is exhausted through the gas exhaust ports 22 provided at the lower and upper portions in the reaction chamber 20, and the gas exhausted by the gas exhauster 52 is exhausted to the outside. The The gas discharged in this way is burned by the exhaust gas combustor 53 and released into the atmosphere.

  Regarding the above-mentioned continuous mass carbon nanotube synthesizer, the “carbon nanotubes” filed in the Republic of Korea on May 26, 2005 by the applicant of the present application and filed a patent application in the United States and Japan claiming priority based thereon. Further detailed description will be omitted here.

  However, as a matter of course, the active gas supply apparatus of the present invention can be applied not only to the continuous mass carbon nanotube synthesizer having the plurality of reaction chambers but also to an existing thermal chemical vapor deposition apparatus. I want to state that. In the following description, a preferred embodiment of the active gas supply apparatus of the present invention will be described by taking a continuous large-scale carbon nanotube synthesizer having a plurality of reaction chambers as an example. However, the active gas supply apparatus of the present invention is the only example. Those skilled in the art will appreciate that the application is not limited to

  The active gas supply apparatus of the present invention includes a reservoir 70 for storing gas to be supplied to a plurality of reaction chambers 20, and a gas mixer 50 for appropriately mixing gases sent from the gas reservoir 70. The gas decomposer 60 for decomposing the reaction gas mixed in the gas mixer 50 at a high temperature, the reaction gas decomposed in the gas decomposer 60 being supplied into the chamber, and the reaction finished The gas supply and discharge units 51, 52, and 53 for discharging the gas.

  The gas reservoir 70 is a gas reservoir for storing a gas required for the reaction supplied from a gas cylinder, and makes the pressure of the gas supplied to the reaction chamber 20 constant, and at a constant pressure via the gas pipe. Distribute gas.

  In such a gas reservoir 70, carbonized gas or Ar gas containing carbon such as methane gas, acetyl gas, and ethylene gas necessary for the synthesis of carbon nanotubes in the reaction chamber 20 is stored.

  When one gas pipe connected to a gas cylinder is used, the gas pipes that enter a plurality of chambers must be further branched from one gas pipe into a plurality of gas pipes. When gas is supplied simultaneously to a plurality of chambers, a difference in oil pressure of the gas inevitably occurs. That is, even if the gas pipe is set so that a constant flow rate is sent to the reaction chamber, a difference in flow rate occurs based on the difference in hydraulic pressure.

  Therefore, when a gas is supplied to a plurality of chambers at the same time, a gas reservoir for storing a sufficient amount of gas so that a constant hydraulic pressure and flow rate can always be maintained is required. 70 controls not only the stable supply of gas but also the amount of gas flowing even when the gas flows simultaneously through a plurality of gas pipes, and a constant oil pressure is maintained in the gas pipes. It will be.

  Here, the gas pipe for gas outflow of the gas reservoir 70 is provided with a stop valve 71 capable of shutting off the gas supply to the reaction chamber 20, and controls the supply and shutoff of the gas to each reaction chamber 20. Make it possible.

  Further, the gas pipe for gas outflow of the gas reservoir 70 is provided with a floor meter 72 for controlling the flow rate of the outflowed gas so that a constant flow rate of gas is supplied to the reaction chamber 20. Can be controlled.

  The gas mixer 50 mixes the reaction gas flowing in from the gas reservoir 70 to adjust the amount and concentration of the necessary reaction gas, and flows the reaction gas to the gas decomposer 60 side so that the reaction gas flows into the reaction chamber 20. Deliver.

  When the function of the gas mixer 50 is examined based on the synthesis process of the reaction chamber 20, in the carbon nanotube synthesis process, Ar gas is supplied from the gas reservoir 70 during the preheating process. The Ar gas is delivered to the reaction chamber 20 side where the process is in progress. During the reaction process, a carbonized gas containing carbon such as methane gas, acetylene gas or ethylene gas is supplied from the gas reservoir 70 and mixed with an appropriate amount of Ar gas to mix the gas in an amount suitable for the reaction. And flows out to the gas decomposer 60 side and is transmitted to the reaction chamber 20 side where the process is in progress. In the cooling process, Ar gas is supplied from the gas reservoir 70 and the Ar gas is delivered to the reaction chamber 20 where the process is in progress.

  On the other hand, the gas decomposer 60 mixes in the gas mixer 50 and decomposes the discharged carbonized gas at a high temperature to form carbon gas, and delivers the carbon gas to the reaction chamber 20 via the gas supply unit 51.

  That is, carbonized gas containing carbon such as methane gas, acetylene gas, ethylene gas, etc. is decomposed and supplied to carbon gas at a high temperature in advance by the gas decomposer 60 before being sent to the reaction chamber 20. It is possible to adjust the carbon gas concentration in the reaction chamber 20 outside the chamber. This also allows the reaction chamber 20 to react stably under given conditions without being affected by the amount of carbon dioxide decomposition based on the internal temperature change.

  Therefore, each reaction chamber 20 can be supplied with only the temperature for each carbon nanotube synthesis step, that is, the temperature suitable for the growth of the carbonized nanotubes, regardless of the decomposition amount of the internal carbonized gas based on the temperature.

  In other words, since the carbonized gas having the carbon source is completely decomposed and supplied in the state of carbon gas, the problem of adjusting the flow rate of the carbon gas based on the size of the reaction chamber in the reaction chamber 20, carbon gas and Problems related to the adjustment of the carbon gas concentration required for the growth rate of carbon nanotubes due to the action of the reaction catalyst, adjustment problems related to the supply amount of the appropriate carbon gas required for the reaction, and generated during the decomposition of the carbonized gas in the chamber The problem of adjustment and concentration of the decomposition amount of the carbon gas based on the reaction temperature is all solved by the gas decomposer 60 installed outside the reaction chamber 20.

  A gas decomposer 60 for decomposing the reaction gas at a high temperature outside the chamber and providing it into the chamber, which is different from the conventional system in which the reaction gas is directly supplied to the chamber, is described below with reference to FIG. Will be described in detail.

  Referring to FIG. 2, a gas decomposer 60 that receives the mixed carbonized gas and efficiently decomposes it into carbon gas necessary for the reaction and supplies the carbon gas to the reaction chamber includes a gas drawing unit 61, a gas drawing unit 62, The coil pipe 63, the heating element 64, a refractory agent 65, and a heat insulating wall 66 are configured.

  The gas inlet 61 is configured to receive the supply of carbonized gas supplied from the gas mixer 50, and the gas outlet 62 is configured to release the decomposed carbon gas.

The carbonized gas that has entered through the gas inlet 61 is decomposed at a high temperature while moving through the coil pipe 63 and is released from the gas outlet 62 as carbon gas.
And the heat generating body 64 is formed in the form surrounding the coil tube 63, applies high temperature heat to the coil tube 63, and decomposes the carbonized gas passing through the coil tube 63 at a high temperature.

Here, the refractory agent 65 is provided to maintain the temperature of the heating element 64 well, and the heat insulating wall 66 is provided to prevent the heat inside the gas decomposer 60 from being released to the outside.
Here, the coil pipe 63 is provided as a gas movement guide for connecting both ends of the gas drawing portion 61 and the gas drawing portion 62 and is formed in a coiled state. By adopting such a coil shape, the heat volume of the coil tube 63 can be widened, whereby the carbonized gas can be sufficiently decomposed.

  Further, the coil tube 63 is configured to be bent in a substantially U-shape. By adopting such a U-shaped structure, the gas tube is prevented from being blocked by the decomposed carbon gas, and the decomposed carbon gas Is naturally pressed into the reaction chamber 20 side.

  Here, the overall structure of the coiled tube 63 is illustrated and illustrated in the detailed description of the invention and in the U-shaped form in which a natural gas flow is obtained, but the present invention is The shape is not limited to the U-shape, and can be modified into various shapes.

  In order to protect the coil tube 63 in the gas decomposer 60 from the expansion of the gas caused by the carbonized gas passing through the hot gas decomposer 60, the diameter of the coil tube 63 is larger than that of the gas tube used normally. Those that are 2 to 10 times larger are used. Therefore, the coil tube 63 is made of high-purity aluminum having a large thickness and high strength.

  By such a gas decomposer 60 configured outside the reaction chamber 20, only the temperature required for the growth of carbon nanotubes is stably supplied to the reaction chamber 20, and the gas reservoir 70 and the gas decomposer 60 are The carbon gas having an appropriate concentration necessary for the growth of carbon nanotubes can be adjusted and supplied into the chamber and the reaction furnace, so that stable gas operation is possible, and based on this, various kinds of large quantities It is possible to design and manufacture an apparatus that can synthesize carbon nanotubes.

  In addition, as the size of the chamber and reactor increases, the changes in reaction conditions that occur can be more easily adjusted, allowing the design of chambers and reactors of various sizes, and the gas pressure distribution function Allows the gas to flow through the gas pipe through the gas pipe while being uniformly distributed with a uniform pressure. In addition, since the operation of the gas in the chamber for synthesizing the carbon nanotubes and in the reaction furnace becomes easy, various types of carbon nanotubes can be easily produced according to the production purpose.

  Thus, unlike the conventional method in which the reaction gas is directly supplied to the chamber, the gas decomposer 60 that decomposes the reaction gas at a high temperature outside the chamber and then supplies the reaction gas to the chamber decomposes from the carbonized gas. The carbon gas is preferably installed as close to the inlet of the reaction chamber 20 as possible so that a stable activation temperature can be maintained during the reaction.

Furthermore, it is preferable that the gas mixer 50 and the gas decomposer 60 are installed separately for each reaction chamber 20 and dedicated.
The operation of the active gas supply apparatus having the above-described configuration will be described. Gases necessary for each synthesis stage of the reaction chamber 20 are discharged from the gas reservoir 70 to the gas mixer 50 and mixed in the gas mixer 50. The carbonized gas is decomposed into carbon gas by the high-temperature gas decomposer 60. The decomposed carbon gas is delivered via a gas pipe to a gas diffusion port 21 installed in the lower part of the reaction chamber 20 as shown in the drawing, and the reaction gas delivered by the gas diffusion port 21 is supplied to the reaction chamber. It diffuses from the lower part of 20.

  When the reaction is completed, the reaction gas is exhausted through the gas exhaust ports 22 installed at the lower and upper portions of the reaction chamber 20, and the gas exhauster 52 exhausts the exhausted gas to the outside for combustion. It is made to burn by the vessel 53.

A specific production process using the carbon nanotube production apparatus having such an active gas supply apparatus will be described below.
First, in order to perform the preheating process in the carbon nanotube synthesis process, the gas mixer 50 receives Ar gas from the gas storage unit 60 and prepares Ar gas for the preheating process. Next, Ar gas is supplied to the reaction chamber 20 in the low temperature process via the gas supplier 51, and at that time, Ar gas is supplied from a gas diffusion port 21 disposed below the reaction chamber 20. Thereby, the gas diffuses into the reaction chamber 20 and the inside is filled with an Ar atmosphere.

  At the same time, the heater 30 is driven by the drive motor 40 and the low temperature region of the heater 30 is moved to the reaction chamber 20 under the Ar atmosphere, whereby a temperature of 200 to 700 ° C. is supplied to the reaction chamber 20. Is done.

  Thereby, in the reaction chamber 20, the reaction catalyst is stably dissolved to a temperature suitable for the reaction. At this time, Ar also acts to push air out of the apparatus in order to suppress the reaction of the catalyst with air to the maximum extent, so that the gas exhaust port 22 causes the air in the reaction chamber 20 to flow downward. The air exhausted from above is exhausted, and the exhausted air is discharged from the gas discharger 52 to the outside.

  Secondly, in order to carry out the reaction step in the carbon nanotube synthesis step, the gas mixer 50 is supplied from the gas storage unit 60 with a carbonized gas containing carbon such as methane gas, acetyl gas and ethylene gas, and an appropriate amount of Ar gas. And receive the supply. A mixed carbonized gas obtained by mixing the carbonized gas and Ar gas is discharged to the gas decomposer 60.

  As a result, the gas decomposer 60 decomposes the carbonized gas at a high temperature by passing it through the coil tube 63, and supplies the resulting carbon gas into the reaction chamber 20 that has finished the low temperature process at 10 to 1000 sccm. To do.

  Based on this, the low-temperature Ar gas is replaced by the carbon gas entering from the gas diffusion port 21 and the gas exhaust port 22 in the reaction chamber 20, and the carbon gas is diffused into the chamber.

  At this time, before the carbon gas is supplied, the reaction chamber 20 filled with the low temperature Ar gas is disposed in the high temperature region of the heater 30 by the driving motor 40 to maintain the temperature of 800 to 1000 ° C. It becomes a state. Since the decomposed carbon gas is supplied from the gas decomposer 60 in such a state, the decomposed carbon gas and the catalyst react to synthesize carbon nanotubes.

  Next, in order to perform the cooling process in the carbon nanotube synthesis process, the gas mixer 50 receives the supply of Ar gas from the gas storage unit 60 and prepares Ar gas for the cooling process. Ar gas is supplied to the reaction chamber 20 in the cooling process via the gas supplier 51, and the supply is performed from the gas diffusion port 21 of the reaction chamber 20. The supplied Ar gas is below the reaction chamber 20. Diffused from.

  At the same time, the drive motor 40 drives the heater 30 to move the cooling region of the heater 30 to the reaction chamber 20 after the reaction is completed. Then, using Ar gas into which the residual gas in the reaction chamber 20 is injected, the Ar gas is exhausted through the gas exhaust port 22 and the gas exhauster 52 to cool the nanotubes synthesized in the reaction chamber 20. . Thereby, the carbon nanotubes that have finished the reaction can be stably cooled and removed without being affected by the residual gas containing the carbon component.

  On the other hand, with respect to the above-described active gas supply device for the carbon nanotube synthesizer, a configuration in which the gas decomposer 60 is not included in other embodiments is also possible. That is, another embodiment of the present invention in which the reaction gas is decomposed and supplied to the reaction chamber 20 without installing the gas decomposer 60 that decomposes the reaction gas at a high temperature before being sent to the reaction chamber 20 is shown in FIG. The description will be given with reference.

  Referring to FIG. 3, the carbonized gas sent from the gas mixer 50 is directly supplied to the reaction chamber 20 without providing the gas decomposer 60. In this case, the end of the gas supply unit 51 that is a gas pipe that enters the reaction chamber 20 from the gas mixer 50, that is, a gas drawing site is formed as a gas decomposition pipe 54 wound around the reaction chamber 20. .

  With such a configuration, the gas decomposition tube 54 wound around the reaction chamber 20 is directly supplied with heat from the heater 30 that provides the reaction chamber 20 with a temperature necessary for the reaction, and thus has a high temperature. The carbonized gas passing through the gas decomposition pipe 54 is provided into the reaction chamber 20 in a state of being naturally decomposed into carbon gas by a high temperature.

  Actually, since the decomposition of the carbonized gas containing the carbon source is carried out almost at 1100 ° C. or outside, the high temperature region of the heater 30 that maintains the temperature of the reaction chamber 20 at 800 to 1000 ° C. has a temperature of about 1700 ° C. If provided, the carbonized gas can be sufficiently decomposed into carbon gas.

  As shown in FIG. 3, the gas decomposition tube 54 is formed in a state where the reaction chamber 20 is wound in a coil shape, thereby expanding the heat volume of the gas decomposition tube 54 as a whole. Therefore, the carbonized gas can be sufficiently decomposed.

  The end of the coil-shaped gas decomposition tube 54 is connected to the upper part of the reaction chamber 20, and the decomposed carbon gas is supplied to the reaction chamber 20. At the time of gas supply on the chamber, a specimen of an appropriate size is installed in the reaction chamber 20 so that the gas supplied through the gas decomposition tube 54 is evenly diffused into the chamber. You can also

  As described above, the present invention can be variously replaced, modified and changed without departing from the technical idea of the present invention by those who have ordinary knowledge in the technical field to which the present invention belongs. Therefore, the present invention is not limited to the above-described embodiments and attached drawings.

It is the schematic which shows the active type gas supply apparatus of the carbon nanotube synthesizer to which this invention was applied. The gas decomposer applied to this invention is shown. The gas decomposition pipe | tube applied to this invention is shown.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Ceramic plate, 20 ... Reaction chamber, 21 ... Gas diffusion port, 22 ... Gas exhaust port, 30 ... Heating heater, 40 ... Drive motor, 50 ... Gas mixer, 51 ... Gas supply device, 52 ... Gas discharge device, 53 ... exhaust gas combustor, 54 ... gas decomposition tube, 60 ... gas decomposition device, 61 ... gas inlet, 62 ... gas outlet, 63 ... coil tube, 64 ... heating element, 65 ... refractory agent, 66 ... heat barrier 70 ... Gas reservoir, 71 ... Stop valve, 72 ... Floor meter.

Claims (4)

An active applied to a carbon nanotube synthesizer comprising: a reaction chamber for synthesizing carbon nanotubes via an internal reactor; and a heater for providing the reaction chamber with a reaction temperature necessary for carbon nanotube synthesis. In the mold gas supply device,
A gas reservoir for storing a reaction gas necessary for the carbon nanotube synthesis reaction in the reaction chamber and discharging it at a constant hydraulic pressure;
A gas mixer for mixing the reaction gas discharged from the gas reservoir to adjust the amount and concentration of the required reaction gas;
A gas decomposer for cracking the mixed reaction gas delivered from the gas mixer at a high temperature;
A gas supply and discharge unit for supplying the reaction gas decomposed by the gas decomposer into the reaction chamber and discharging the gas that has been reacted;
An active gas supply device for a carbon nanotube synthesizer, comprising: The gas decomposer is installed close to the reaction chamber to maintain a sufficient activation temperature of the decomposed carbon gas, and is wound in a coil shape so as to have a large heat volume, from the gas mixer. A coiled tube for receiving and transferring a mixed carbonized gas containing a supplied carbon source;
A heating element that is formed so as to entirely surround the coiled tube, and applies high-temperature heat necessary for carbon gas decomposition of carbonized gas in the coiled tube;
2. The active gas supply device for a carbon nanotube synthesizer according to claim 1, further comprising: a heat insulating member that maintains a temperature of the heating element and prevents heat release to the outside.   3. The active gas supply device of a carbon nanotube synthesizer according to claim 2, wherein the coiled tube is formed to be bent in a U shape in order to induce a natural gas flow. A carbon nanotube synthesizer comprising: a reaction chamber for synthesizing carbon nanotubes via an internal reaction furnace; and a heating heater for providing a reaction temperature necessary for synthesizing carbon nanotubes to the reaction chamber. In the applied gas supply device,
A gas storage organ for storing the reaction gas necessary for the carbon nanochamber synthesis reaction in the reaction chamber and discharging it at a constant hydraulic pressure;
A gas mixer for adjusting the amount and concentration of the reaction gas required by mixing the reaction gas discharged from the gas reservoir;
The reaction chamber is formed in a gas pipe that is wound around the reaction chamber in a coil shape so as to have a large heat volume, and is supplied directly from the heater upon receiving the reaction gas mixed from the gas mixer A gas decomposition tube that decomposes with heat and supplies the decomposed reaction gas into the reaction chamber;
An active gas supply device for a carbon nanotube synthesizer, comprising: a gas discharge unit for discharging a gas that has been reacted in the reaction chamber.

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