JP2007021579A5 - - Google Patents

Claims (9)

A laser beam vibration device for irradiating while oscillating a laser beam when a laser processing nozzle is relatively moved along a processing line on a workpiece surface,
A moving speed detecting means for detecting only the moving direction of the laser processing nozzle relative to the workpiece or the moving direction and speed (moving speed) is provided, and only the moving direction or according to the moving speed is provided. A scanning laser beam vibration device that vibrates the laser beam at a predetermined angle with respect to the processing line. A laser processing head comprising a mirror for condensing and irradiating a workpiece with a laser beam and vibrating the laser beam;
A moving speed detecting means for detecting only the moving direction or the moving direction and speed (moving speed) of the laser processing nozzle when the laser processing nozzle moves along the processing line;
The mirror drive control means for oscillating a laser beam at a predetermined angle, a predetermined frequency, and a predetermined amplitude with respect to the processing line based on the detected value of the moving direction or the moving speed. Scanning laser beam vibration device. The laser processing head includes a mirror driving unit having a movable mirror that vibrates a laser beam on the workpiece surface, and a laser processing nozzle.
The moving speed detecting means includes a moving amount detecting unit that detects a moving amount of the laser processing nozzle on the processing line, and a moving speed calculating unit that obtains the moving direction and speed of the laser processing nozzle based on the moving amount. Composed,
The mirror drive control means generates a vibration signal for oscillating a laser beam at a predetermined angle, a predetermined frequency, and a predetermined amplitude with respect to the processing line based on the detected values of the moving direction and speed. 3. The scanning laser beam vibration device according to claim 2, comprising a signal generation unit and a mirror drive control unit that vibrates and irradiates a laser beam by vibrating the movable mirror based on the vibration signal. The scanning laser beam according to claim 3, wherein the movement amount detection unit includes a light source, an image pickup device that obtains an image of a workpiece surface, and an image processing unit that calculates a movement amount from the image. Vibration device. 4. The scanning laser beam oscillation according to claim 3, wherein the movement amount detection unit is configured by one or a combination of a laser light source and PSD, a laser distance meter, or a CCD distance meter. apparatus. 4. The scanning laser beam vibration device according to claim 1, wherein the moving speed detection means includes an acceleration sensor and / or a gyroscope. 4. The scanning laser beam vibration device according to claim 1, wherein the moving speed detection means includes a rotary encoder. A laser beam processing apparatus for irradiating while oscillating a laser beam along a processing line on a workpiece surface,
In addition to the scanning laser beam vibration device according to one of claims 1 to 7, a laser processing head for condensing and irradiating a laser beam onto a workpiece is scanned along a preset processing line. A beam vibration laser beam processing apparatus comprising laser beam copying means for performing laser processing. A laser beam processing apparatus for irradiating a workpiece surface while vibrating a laser beam, in addition to the scanning laser beam vibration apparatus according to one of claims 1 to 7, A beam vibration laser beam processing apparatus comprising: a laser processing head for condensing and irradiating a workpiece along a processing line on the workpiece, which is manually or in real-time directed.