JP2007019192A - 荷電ビームレンズ、及び荷電ビーム露光装置 - Google Patents

荷電ビームレンズ、及び荷電ビーム露光装置 Download PDF

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Publication number
JP2007019192A
JP2007019192A JP2005198091A JP2005198091A JP2007019192A JP 2007019192 A JP2007019192 A JP 2007019192A JP 2005198091 A JP2005198091 A JP 2005198091A JP 2005198091 A JP2005198091 A JP 2005198091A JP 2007019192 A JP2007019192 A JP 2007019192A
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JP
Japan
Prior art keywords
charged beam
exposure
lens
charged
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005198091A
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English (en)
Japanese (ja)
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JP2007019192A5 (enrdf_load_stackoverflow
Inventor
Kenichi Osanaga
兼一 長永
Haruto Ono
治人 小野
Osamu Kamimura
理 上村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Canon Inc
Hitachi High Tech Corp
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Application filed by Hitachi High Technologies Corp, Canon Inc, Hitachi High Tech Corp filed Critical Hitachi High Technologies Corp
Priority to JP2005198091A priority Critical patent/JP2007019192A/ja
Publication of JP2007019192A publication Critical patent/JP2007019192A/ja
Publication of JP2007019192A5 publication Critical patent/JP2007019192A5/ja
Pending legal-status Critical Current

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JP2005198091A 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置 Pending JP2007019192A (ja)

Priority Applications (1)

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JP2005198091A JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

Applications Claiming Priority (1)

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JP2005198091A JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

Publications (2)

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JP2007019192A true JP2007019192A (ja) 2007-01-25
JP2007019192A5 JP2007019192A5 (enrdf_load_stackoverflow) 2008-08-28

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ID=37756096

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JP2005198091A Pending JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

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JP (1) JP2007019192A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011513905A (ja) * 2008-02-26 2011-04-28 マッパー・リソグラフィー・アイピー・ビー．ブイ． 投影レンズ構成体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001075946A1 (fr) * 2000-04-04 2001-10-11 Advantest Corporation Appareil d'exposition a faisceau multiple comprenant un objectif electronique a axes multiples, objectif electronique a axes multiples pour mettre au point le faisceau electronique multiple, et procede de production d'un appareil a semi-conducteur
WO2004055856A2 (en) * 2002-12-17 2004-07-01 Ict, Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
JP2005057110A (ja) * 2003-08-06 2005-03-03 Canon Inc マルチ荷電ビームレンズおよびそれを用いた荷電ビーム露光装置
WO2005024881A2 (en) * 2003-09-05 2005-03-17 Carl Zeiss Smt Ag Particle-optical systems, components and arrangements

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001075946A1 (fr) * 2000-04-04 2001-10-11 Advantest Corporation Appareil d'exposition a faisceau multiple comprenant un objectif electronique a axes multiples, objectif electronique a axes multiples pour mettre au point le faisceau electronique multiple, et procede de production d'un appareil a semi-conducteur
WO2004055856A2 (en) * 2002-12-17 2004-07-01 Ict, Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
JP2005057110A (ja) * 2003-08-06 2005-03-03 Canon Inc マルチ荷電ビームレンズおよびそれを用いた荷電ビーム露光装置
WO2005024881A2 (en) * 2003-09-05 2005-03-17 Carl Zeiss Smt Ag Particle-optical systems, components and arrangements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011513905A (ja) * 2008-02-26 2011-04-28 マッパー・リソグラフィー・アイピー・ビー．ブイ． 投影レンズ構成体

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