JP2007011188A - Electro-optical device and method for manufacturing the same, and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve moisture resistance in an electro-optical device, such as a liquid crystal device, while retaining a large area of effective pixel area. <P>SOLUTION: The electro-optical device is equipped with: a pair of first and second substrates with an electro-optical material interposed in between; a sealing material to stick the first and the second substrates to each other, in a sealing region along a periphery of a display region; and an alignment layer composed of an inorganic material and formed on the display region of at least one substrate out of the first and the second substrates. The alignment layer is also formed on a partial region which is at least a portion of a peripheral region surrounding the seal region on at least one substrate, and a section of the alignment layer, formed on the partial region, is at least partly subjected to water-repellent treatment. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electro-optical device such as a liquid crystal display device, a manufacturing method thereof, and a technical field of electronic equipment.

  A liquid crystal display device as an example of an electro-optical device includes a pair of substrates, and both the substrates are bonded together via a frame-shaped sealing material made of, for example, a photo-curing material, and the liquid crystal is interposed between the substrates. Is enclosed. Here, in order to improve the long-term reliability of the liquid crystal device, it is necessary to improve the function of preventing moisture from entering the liquid crystal display unit from the outside, that is, the moisture resistance of the liquid crystal display unit. Various proposals have been made regarding techniques for improving the moisture resistance of the liquid crystal display unit. For example, Patent Document 1 proposes a technique of providing a partition wall inside a seal frame to secure a gap between both substrates and prevent moisture from entering. Patent Document 2 proposes a technique for increasing the cross-sectional area of a sealing material by forming a double seal structure to prevent moisture from entering.

JP-A-11-133446 JP 2004-333986 A

  However, the techniques disclosed in Patent Documents 1 and 2 have a technical problem that the area of the effective pixel area is reduced because the partition wall or the double seal structure is formed.

  The present invention has been made in view of, for example, the above-described problems. An electro-optical device capable of improving moisture resistance while maintaining a large effective pixel area, a manufacturing method thereof, and such an electro-optical device. An object is to provide an electronic device including the device.

  In order to solve the above-described problems, the electro-optical device according to the present invention includes a pair of first and second substrates that sandwich the electro-optical material, and the first and second substrates in a sealing region along the periphery of the display region. And an alignment film made of an inorganic material formed in the display region on at least one of the first and second substrates, the alignment film being the at least one substrate It is also formed in a partial region that forms at least a part of the surrounding region surrounding the seal region above, and a portion formed in the partial region of the alignment film is at least partially subjected to water repellent treatment. Yes.

  According to the electro-optical device of the present invention, the pair of first and second substrates are alternately bonded by the sealing material in the seal region along the periphery of the display region such as the image display region. In addition, for example, a liquid crystal as an electro-optical material is sandwiched between the second substrate. In a state where the electro-optical device is not driven, the electro-optical material takes a predetermined alignment state between the pair of first and second substrates due to the surface shape effect in the alignment film made of an inorganic material, that is, the inorganic alignment film. When the electro-optical device is driven, a voltage corresponding to an image signal is applied to the electro-optical material for each pixel arranged in the display region, thereby changing the orientation state of the electro-optical material, for example, from a light source. Modulate light. The light modulated by the electro-optical material is emitted as display light, whereby image display is performed.

  The inorganic alignment film is typically formed, for example, by oblique deposition or ion beam sputtering using silica (SiO 2) or the like as a PVD (Physical Vapor Deposition) method. Here, on the first substrate surface, as a base of the inorganic alignment film, for example, a laminated structure in which wirings and driving elements for driving the pixel electrodes are formed is formed, and the pixel is formed on the uppermost layer of the laminated structure. The electrodes are formed in islands or stripes in a predetermined pattern for each pixel. Alternatively, on the second substrate surface, a light-shielding film for defining an opening region for each pixel is formed, and a laminated structure in which counter electrodes that face a plurality of pixel electrodes are arranged in the uppermost layer. You may make it form.

  More specifically, the inorganic alignment film is formed by bringing the vapor flow of the inorganic material into contact with the outermost surface of the laminated structure and depositing the inorganic material on the laminated structure. The inorganic material deposited on the substrate is deposited by arranging the columnar structures of the inorganic material so as to form a predetermined angle with respect to the substrate surface. When the inorganic alignment film has a columnar structure as described above, when the first and second substrates are bonded to each other with the sealing material, a minute amount is formed between the first or second substrate and the sealing material. Gaps are likely to occur. Furthermore, the inorganic alignment film typically has a functional group that easily binds to moisture such as a silanol group (—Si—OH), that is, a hydrophilic group on the surface. Therefore, if no countermeasures are taken, the inorganic material itself deteriorates due to water molecules penetrating into the display area from minute gaps caused by the columnar structure, or when hydrophilic groups and water are combined. I'm feeling sorry.

  In particular, in the electro-optical device of the present invention, the inorganic alignment film is also formed in at least a part of the peripheral region surrounding the seal region, or preferably in the partial region over the entire periphery. The inorganic alignment film is formed, for example, up to the edge of the substrate or over the entire surface of the substrate, and the partial region occupies the vicinity of the edge of the electro-optical device. Further, the inorganic alignment film formed in the partial region is subjected to water repellent treatment at least partially or preferably entirely.

  The water repellent treatment is performed by, for example, bonding a substrate with a water repellent compound such as a silane compound (SiH4) having a perfluoroalkyl group, that is, a water repellent compound, to the inorganic alignment film. This is done by forming a water repellent film. As described above, the inorganic alignment film has a hydrophilic group such as a silanol group, for example. Since such a hydrophilic group has high reactivity, for example, a water-repellent compound such as a silane compound can be easily reacted and fixed to the hydrophilic group as a reaction site. In addition, when the inorganic alignment film has a columnar structure as described above, the water-repellent compound enters the columnar structure, so that the reaction is more easily fixed. The film thickness of the inorganic alignment film is, for example, several tens nm, and the film thickness of the water repellent film formed on the surface after the water repellent treatment is, for example, several nm. By forming such a water repellent film in at least a part of the peripheral region surrounding the seal region or preferably in a partial region over the entire circumference, for example, a display region from a minute gap caused by the columnar structure of the inorganic alignment film Intrusion of moisture, that is, water molecules into the inside can be prevented, and the moisture resistance of the electro-optical device can be improved. Incidentally, the moisture resistance can be further improved by forming the water repellent film so as to be in contact with the seal region.

  Further, such a water-repellent film is formed on one or preferably both of the first and second substrates regardless of the display area. In other words, since the water-repellent film is formed in the partial area described above, it is not necessary to change the size of the display area.

  As described above, according to the electro-optical device of the present invention, it is possible to improve moisture resistance while maintaining a large display area.

  In one aspect of the electro-optical device of the present invention, the inorganic material has a silanol group.

  According to this aspect, the inorganic material and a water-repellent compound such as a silane compound (SiH 4) can be easily and reliably reacted and fixed using the silanol group as a reaction site. Therefore, the moisture resistance of the electro-optical device can be easily and reliably increased.

  In another aspect of the electro-optical device of the present invention, the alignment film is formed by oblique deposition.

  According to this aspect, the inorganic alignment film is deposited by arranging the columnar structures of the inorganic material so as to form a predetermined angle with respect to the substrate surface, for example, by obliquely depositing silica (SiO 2) or the like. Is formed. Therefore, the inorganic material and the water repellent compound can be easily reacted and fixed, and the water repellent treatment can be easily performed. Furthermore, the function as the alignment film is not impaired.

  In another aspect of the electro-optical device of the invention, the alignment film is formed by anisotropic sputtering.

According to this aspect, the inorganic alignment film is formed by depositing an inorganic material by, for example, anisotropic sputtering of silica (SiO 2) or the like. Therefore, the inorganic material and the water repellent compound can be easily reacted and fixed, and the water repellent treatment can be easily performed. Furthermore, the function as the alignment film is not impaired.

  In another aspect of the electro-optical device of the present invention, the alignment film is formed by a coating method.

  According to this aspect, the inorganic alignment film is formed by depositing an inorganic material, for example, by applying silica (SiO 2) or the like. Therefore, the inorganic material and the water repellent compound can be easily reacted and fixed, and the water repellent treatment can be easily performed. Furthermore, the function as the alignment film is not impaired.

  In another aspect of the electro-optical device of the present invention, the water repellent treatment includes a step of reactively fixing the inorganic material and the silane compound.

  According to this aspect, for example, a step of reacting and fixing an inorganic material having a silanol group (Si-OH) and a silane (SiH4) compound having a water repellency such as a perfluoroalkyl group (CnF2n + 1) is included. Since the silane compound easily reacts with, for example, a silanol group, it easily reacts and fixes with an inorganic material. Therefore, a water repellent film can be formed easily and reliably.

  In another aspect of the electro-optical device of the invention, the water repellent treatment includes a step of reacting and fixing the inorganic material and alcohol.

  According to this aspect, for example, a step of reacting and fixing an inorganic material having a silanol group (Si—OH) and an alcohol having a water repellency such as a perfluoroalkyl group (CnF2n + 1) is included. Alcohols, for example, easily undergo dehydration or condensation reaction with silanol groups, and thus easily react with and adhere to inorganic materials. Therefore, a water repellent film can be formed easily and reliably.

  In another aspect of the electro-optical device of the present invention, the water repellent treatment includes a step of reactively fixing the inorganic material and fatty acids.

  According to this aspect, for example, a step of reacting and fixing an inorganic material having a silanol group (Si—OH) and a fatty acid having a water repellency such as a perfluoroalkyl group (CnF2n + 1) is included. Fatty acids, for example, are easily dehydrated or condensed with a silanol group, and thus are easily reactive and fixed with an inorganic material. Therefore, a water repellent film can be formed easily and reliably.

  In order to solve the above problems, an electronic apparatus according to the present invention includes the above-described electro-optical device according to the present invention (including various aspects thereof).

  Since the electronic apparatus of the present invention includes the above-described electro-optical device of the present invention, a projection display device, a television, a mobile phone, an electronic notebook, a word processor, a view capable of performing high-quality image display. Various electronic devices such as a finder type or a monitor direct-view type video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized.

  According to another aspect of the invention, there is provided an electro-optical device manufacturing method for manufacturing an electro-optical device including a pair of first and second substrates that sandwich an electro-optical material. An alignment film forming step of forming an alignment film made of an inorganic material in a display region on at least one of the first and second substrates, and a sealing material in a seal region along the periphery of the display region, A bonding step of bonding the first and second substrates, and the alignment film forming step also includes forming the alignment film on a partial region forming at least a part of a surrounding region surrounding the seal region on the at least one substrate. And a water repellent treatment step of at least partially performing a water repellent treatment on a portion of the alignment film formed in the partial region.

  According to the method for manufacturing an electro-optical device of the present invention, the above-described electro-optical device of the present invention can be manufactured. In particular, the portion formed in the partial region of the inorganic alignment film is at least partially subjected to water repellent treatment, so that an electro-optical device having high moisture resistance is manufactured while maintaining a large area of the display region. can do.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, a driving circuit built-in type TFT active matrix driving type liquid crystal device, which is an example of the electro-optical device of the present invention, is taken as an example.

  First, the overall configuration of the electro-optical device according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view of the TFT array substrate as viewed from the counter substrate side together with the components formed thereon, and FIG. 2 is a cross-sectional view taken along the line H-H ′ of FIG. 1. In each of the drawings referred to below, the scale of each layer and each member is different in order to make each layer and each member recognizable on the drawing.

  1 and 2, in the electro-optical device of the present embodiment, the TFT array substrate 10 as an example of the “first substrate” according to the present invention and the counter substrate 20 as an example of the “second substrate” according to the present invention. Are arranged opposite to each other. A liquid crystal layer 50 is sealed between the TFT array substrate 10 and the counter substrate 20, and the TFT array substrate 10 and the counter substrate 20 are surrounded by an image display region 10a corresponding to a region where a plurality of pixels are provided. They are bonded to each other by a sealing material 52 provided in the sealing area located.

  The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or an ultraviolet / heat combination type curable resin for bonding the two substrates, and is applied to the TFT array substrate 10 in the manufacturing process, and then irradiated with ultraviolet rays. And cured by heating or the like. In the sealing material 52, a gap material 56 such as glass fiber or glass beads for dispersing the gap (gap) between the TFT array substrate 10 and the counter substrate 20 to a predetermined value is dispersed. FIG. 2 shows a configuration in which substantially spherical glass beads are mixed in the sealing material 52 as the gap material 56. Note that the gap material 56 may be arranged in the image display region 10a or a peripheral region located around the image display region 10a in addition to or instead of the material mixed in the seal material 52.

  In FIG. 1, a light-shielding frame light-shielding film 53 that defines the frame area of the image display region 10a is provided on the counter substrate 20 side in parallel with the inside of the seal region where the sealing material 52 is disposed. However, part or all of the frame light shielding film 53 may be provided as a built-in light shielding film on the TFT array substrate 10 side.

  A data line driving circuit 101 and an external circuit connection terminal 102 are provided along one side of the TFT array substrate 10 in a region located outside the sealing region in which the sealing material 52 is disposed in the peripheral region. The sampling circuit 7 is provided so as to be covered with the frame light shielding film 53 on the inner side of the seal region along the one side. Further, the scanning line driving circuit 104 is provided so as to be covered with the frame light-shielding film 53 inside the seal region along two sides adjacent to the one side.

  On the TFT array substrate 10, vertical conduction terminals 106 for connecting the two substrates with the vertical conduction material 107 are arranged in regions facing the four corner portions of the counter substrate 20. Thus, electrical conduction can be established between the TFT array substrate 10 and the counter substrate 20.

  In FIG. 2, on the TFT array substrate 10, a laminated structure in which wiring such as a pixel switching TFT (Thin Film Transistor) as a driving element, a scanning line, and a data line is formed. Although the detailed structure of this laminated structure is not shown in FIG. 2, a pixel electrode 9a made of a transparent material such as ITO (Indium Tin Oxide) is provided on the uppermost layer of this laminated structure for each pixel. It is formed in an island shape with the pattern. An alignment film 16 made of an inorganic material such as silica (SiO 2) is provided on the pixel electrode 9a.

  On the other hand, a light shielding film 23 is formed on the surface of the counter substrate 20 facing the TFT array substrate 10. For example, the light shielding film 23 is formed in a lattice shape when viewed in plan on the facing surface of the facing substrate 20. In the counter substrate 20, a non-opening region is defined by the light shielding film 23, and a region partitioned by the light shielding film 23 is an opening region. The light shielding film 23 may be formed in a stripe shape, and the non-opening region may be defined by the light shielding film 23 and various components such as data lines provided on the TFT array substrate 10 side.

  A counter electrode 21 made of a transparent material such as ITO is formed on the light shielding film 23 so as to face the plurality of pixel electrodes 9a. Further, in order to perform color display in the image display region 10a on the light shielding film 23, a color filter (not shown in FIG. 2) may be formed in a region including a part of the opening region and the non-opening region. Good.

  On the opposing surface of the opposing substrate 20, an alignment film 22 made of an inorganic material such as silica (SiO2) is formed on the laminated structure in which these various components are built. The counter electrode 21 is disposed on the uppermost layer of the stacked structure on the counter substrate 20, and an alignment film 22 is formed on the counter electrode 21.

  An alignment film may be formed on one of the opposing surfaces of the TFT array substrate 10 and the counter substrate 20. Further, an organic alignment film obtained by rubbing one of the alignment film 16 on the TFT array substrate 10 side and the alignment film 22 on the counter substrate 20 side on an organic film formed of an organic material such as polyimide is used. You may make it form. However, the inorganic alignment film has a characteristic that it is excellent in light resistance as compared with the organic alignment film. Therefore, in order to extend the lifetime of the electro-optical device, it is preferable to use an inorganic alignment film.

  The liquid crystal layer 50 is made of, for example, a liquid crystal obtained by mixing one or several types of nematic liquid crystals, and has a predetermined alignment state between the pair of alignment films 16 and 22 in a state where an electric field from the pixel electrode 9a is not applied. Take.

  As will be described in detail later, the alignment film 16 extends from the image display region 10a and the image display region 10a on the TFT array substrate 10 and is continuous with the peripheral region surrounding the seal region and the seal region in the peripheral region. Is formed. On the counter substrate 20, an alignment film 22 is formed on the entire surface of the substrate. And the part formed in the area | region surrounding a sealing area | region among the alignment films 16 is made water-repellent treatment.

  In addition to the data line driving circuit 101, the scanning line driving circuit 104, and the like, the image signal on the image signal line is sampled and supplied to the data line on the TFT array substrate 10 shown in FIGS. Sampling circuit, precharge circuit for supplying a precharge signal of a predetermined voltage level to a plurality of data lines in advance of an image signal, for inspecting the quality, defects, etc. of the electro-optical device during production or at the time of shipment An inspection circuit or the like may be formed.

  Here, FIG. 3 schematically shows the configuration of the cross section corresponding to FIG. 2, in particular, the alignment of the liquid crystal by the alignment film 16 formed on the TFT array substrate 10.

  In FIG. 3, a laminated structure 90 in which various components such as TFTs are formed is formed on the substrate surface of the TFT array substrate 10 facing the liquid crystal layer 50, and a pixel is formed on the uppermost layer of the laminated structure 90. An electrode 9a is formed for each pixel. Then, the columnar structures 16a made of inorganic material are arranged on the pixel electrode 9a at a predetermined angle with respect to the substrate surface of the TFT array substrate 10, so that the inorganic material is deposited and the alignment film 16 is formed. ing. The alignment film 16 formed in this way can regulate the alignment state of the liquid crystal molecules 50a by the surface shape effect. The liquid crystal alignment by the alignment film 16 described with reference to FIG. 3 is the same for the alignment film 22 formed on the counter substrate 20.

  Next, the circuit configuration and operation of the electro-optical device configured as described above will be described with reference to FIG. FIG. 4 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix that forms the image display area of the electro-optical device.

  In FIG. 4, each of the plurality of pixels formed in a matrix that forms the image display region 10 a of the electro-optical device according to the present embodiment includes a pixel electrode 9 a and a TFT 30 for switching control of the pixel electrode 9 a. The data line 6 a formed and supplied with an image signal is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. Good.

  Further, the gate electrode 3a is electrically connected to the gate of the TFT 30, and the scanning signals G1, G2,..., Gm are pulse-sequentially applied in this order to the scanning line 11a and the gate electrode 3a at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,..., Sn supplied from the data line 6a is obtained by closing the switch of the TFT 30 as a switching element for a certain period. Write at a predetermined timing.

  Image signals S1, S2,..., Sn written in a liquid crystal as an example of an electro-optical material via the pixel electrode 9a are held for a certain period with the counter electrode 21 formed on the counter substrate 20. The The liquid crystal modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light is reduced according to the voltage applied in units of each pixel, and in the normally black mode, the light is incident according to the voltage applied in units of each pixel. The light transmittance is increased, and light having a contrast corresponding to the image signal is emitted from the electro-optical device as a whole.

  In order to prevent the image signal held here from leaking, a storage capacitor 70 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 9 a and the counter electrode 21. The storage capacitor 70 is provided side by side along the scanning line 11a, and includes a capacitor electrode 300 including a fixed potential side capacitor electrode and fixed at a constant potential.

  Next, the water repellent process in the electro-optical device of this embodiment will be described with reference to FIGS. FIG. 5 is a schematic view showing a region where the water repellent film is formed. FIG. 6 is a schematic view corresponding to the B-B ′ cross-sectional view of FIG. 1 showing a region where a water repellent film is formed. FIG. 7 is a schematic view showing an alignment film having a silanol group. FIG. 8 is a schematic diagram for explaining reaction fixation between the alignment film and the water repellent compound. In FIG. 6, for the sake of simplicity of explanation, the laminated structure 90 in which various components such as TFTs and the pixel electrode 9a formed for each pixel are omitted.

  As shown in FIGS. 5 and 6, in this embodiment, the alignment film 16 extends from the image display region 10 a and the image display region 10 a in the entire region 100 a on the TFT array substrate 10 and seal region 52 a. And a partial region 80a that forms a part of the surrounding region surrounding the seal region 52a. That is, the alignment film 16 is formed up to the edge of the TFT array substrate 10. The alignment film 16 may be formed on the entire surface of the TFT array substrate 10.

  In the present embodiment, the portion of the alignment film 16 formed in the partial region 80a is subjected to water repellent treatment, and a water repellent film 81 is formed on the surface of the portion. The water repellent treatment is preferably performed on the entire portion of the alignment film 16 formed in the partial region 80a, but may be performed partially. Conversely, the alignment film 16 is subjected to such a water repellent treatment for the portion formed in the image display region 10a in order not to hinder the function of regulating the alignment state of the liquid crystal layer 50. Desirably not. However, if the function is not hindered, or if it can be performed before the substrate bonding step in the manufacturing process, the portion of the alignment film 16 formed in the image display region 10a is also repellent. Water treatment may be performed.

  In the water repellent treatment, the TFT array substrate 10 and the counter substrate 20 are bonded together, and then a silane (SiH4) compound having a water-repellent perfluoroalkyl group (—CnF2n + 1) is reacted and fixed to the alignment film 16 to align the alignment film. This is done by forming a water repellent film 81 on the surface of 16.

  As shown in FIG. 7, the alignment film 16 is made of an inorganic material such as silica (Si02), and has a silanol group 162 on the surface thereof. Since the silanol group 162 is a hydrophilic group and has high reactivity, a silane compound having a perfluoroalkyl group can be easily reacted and fixed. Further, since the alignment film 16 has a columnar structure as described above with reference to FIG. 3, the silane compound having a perfluoroalkyl group can easily enter the columnar structure 16a, and can be more easily reacted and fixed.

  As shown in FIG. 8, the water repellent film 81 is made of a perfluoroalkyl group (R1 in FIG. 8) that is reactively fixed to the silanol group 162 of the alignment film 16. The alignment film 16 has a thickness of, for example, several tens of nm, and the water repellent film 81 has a thickness of, for example, several nm.

  The water repellent treatment may be performed by reacting and fixing an alcohol or a fatty acid having a perfluoroalkyl group, for example, having water repellency to the alignment film 16. In this case, alcohols and fatty acids are easily dehydrated or condensed with the silanol group 162, and are easily reactively fixed to the alignment film 16, so that a water repellent film can be formed easily and reliably. Further, the alignment film 16 may be formed by anisotropic sputtering or a coating method such as an inkjet method. Also in this case, the water repellent compound can be easily reacted and fixed to the alignment film 16.

  As described above, since the water-repellent film 81 is formed in the partial region 81a which is a part of the peripheral region surrounding the seal region 52a, for example, the alignment film 16 and the sealing material resulting from the columnar structure of the alignment film 16 Intrusion of moisture, that is, water molecules, into the image display area 10a from a minute gap with the nozzle 52 can be prevented. Furthermore, it is possible to prevent the alignment film 16 from being deteriorated due to the bonding of the silanol group which is a hydrophilic group of the alignment film 16 and water. Therefore, the moisture resistance of the electro-optical device can be improved. In the present embodiment, since the water repellent film 81 is formed in contact with the seal region 52a, that is, in contact with the seal material 52, the moisture resistance of the electro-optical device can be improved more reliably.

  Furthermore, since the water repellent film 81 is formed in the partial area 80a of the TFT array substrate 10, it is not necessary to reduce or change the size of the image display area 10a in order to improve the moisture resistance of the electro-optical device. For example, the width of the partial region 80a, that is, the distance from the outer ring of the seal region 52a to the edge of the TFT array substrate 10 as viewed in plan is as long as the effect of improving the moisture resistance by the water repellent treatment is somewhat exhibited. It may be narrow. Therefore, it is possible to prevent a situation in which the TFT array substrate 10 becomes unnecessarily large with respect to the image display region 10a due to the presence of the partial region 80a.

(Second Embodiment)
Next, an electro-optical device according to a second embodiment will be described with reference to FIG. FIG. 9 is a schematic diagram having the same concept as FIG. 6 in the second embodiment. In FIG. 9, the same reference numerals are given to the same components as the components according to the first embodiment shown in FIGS. 1 to 8, and description thereof will be omitted as appropriate.

  As shown in FIG. 9, in the electro-optical device of the second embodiment, the lengths of one side (side along the left and right in FIG. 1) of the TFT array substrate 10 and the counter substrate 20 are almost the same. The alignment film 16 extends from the image display area 10a and the image display area 10a in the entire area 100a on the TFT array substrate 10 described above with reference to FIG. 5 as in the electro-optical device of the first embodiment. The seal region 52a and a partial region 80a forming a part of the surrounding region surrounding the seal region 52a are also formed. That is, the alignment film 16 is formed up to the edge of the TFT array substrate 10. A portion of the alignment film 16 formed in the partial region 80a is subjected to water repellent treatment, and a water repellent film 81 is formed on the surface of the portion.

  Particularly in the present embodiment, the alignment film 22 formed on the counter substrate 20 also extends from the image display region 10a and the image display region 10a described above with reference to FIG. Thus, it is also formed in a region corresponding to the seal region 52a and a partial region 80a forming a part of the surrounding region surrounding the seal region 52a. That is, the alignment film 22 is formed up to the edge of the counter substrate 20. A portion of the alignment film 22 formed in a region corresponding to the partial region 80a is subjected to water repellent treatment, and a water repellent film 82 is formed on the surface of the portion.

  Therefore, in addition to improving the moisture resistance of the electro-optical device by the water repellent film 81, the water repellent film 82 is formed in a region corresponding to the partial region 81a that is a part of the peripheral region surrounding the seal region 52a. For example, moisture, that is, water molecules, can be prevented from entering the image display region 10a from a minute gap between the alignment film 22 and the sealing material 52 due to the columnar structure of the alignment film 22, thereby further improving the moisture resistance of the electro-optical device. Can be improved.

  Further, even when the sizes of the TFT array substrate 10 and the counter substrate 20 are almost or completely the same, the partial region 80a is secured by, for example, slightly reducing the seal region 52a along the periphery thereof. If the water repellent treatment is performed as in the embodiment, the moisture resistance of the electro-optical device can be improved with little or no effect on the size of the image display area 10a.

(Production method)
Next, a method for manufacturing the above-described electro-optical device will be described with reference to FIG. FIG. 10 is a flowchart for explaining each step of the manufacturing process of the electro-optical device according to the first and second embodiments.

  First, in FIG. 10, the data line 6a, the scanning line 11a, the TFT 30, and the like are formed on the TFT array substrate 10 by, for example, film formation by vapor deposition or sputtering, patterning by etching or photography, heat treatment, or the like. A pixel electrode 9a is formed from ITO, for example, by sputtering on the uppermost layer of the laminated structure 90 (see FIG. 3) (step S1).

  Subsequently, an alignment film 16 is formed on the surface of the TFT array substrate 10 on which the pixel electrodes 9a are formed by performing, for example, an oblique deposition method on the TFT array substrate 10 in the alignment film formation step ( Step S2). The alignment film 16 may be formed by anisotropic sputtering or a coating method such as an inkjet method. At this time, the vapor flow of the inorganic material such as silica (SiO 2) generated from the vapor deposition source comes into contact with the outermost surface of the laminated structure 90 on the substrate surface of the TFT array substrate 10. Material is deposited. Then, the inorganic material columnar structures 16a deposited on the substrate surface are arranged at a predetermined angle with respect to the substrate surface, whereby the inorganic material is deposited on the substrate surface.

  In particular, as shown in FIG. 5, the alignment film 16 extends from the image display region 10a and the image display region 10a in the entire surface region 100a on the TFT array substrate 10 to form a seal region 52a and a seal region 52a. It is also formed in a partial region 80a that forms part of the surrounding region. That is, the alignment film 16 is formed up to the edge of the TFT array substrate 10. The alignment film 16 may be formed on the entire surface of the TFT array substrate 10.

  In FIG. 10, the light shielding film 23 and the counter electrode 21 are formed on the counter substrate 20 by, for example, film formation by vapor deposition, sputtering, or the like in parallel with or before or after the manufacturing process related to the TFT array substrate 10 in steps S1 and S2. A laminated structure in which etc. are formed is formed (step S3), and subsequently, the alignment film 22 is formed by the alignment film forming process (step S4), as in step 2. At this time, the alignment film 22 extends from the image display region 10a and the image display region 10a in the entire region on the counter substrate 20, and forms a part of the seal region 52a and a peripheral region surrounding the seal region 52a. Also formed.

  Thereafter, in the bonding process, the TFT array substrate 10 and the counter substrate 20 are separated from the side on which the alignment film 16 is formed on the TFT array substrate 10 and the side on which the alignment film 22 is formed on the counter substrate 20 with the sealing material 52. (Step S5).

  Subsequently, liquid crystal is injected between the TFT array substrate 10 and the counter substrate 20 in the TFT array substrate 10 and the counter substrate 20 that are bonded to each other (step S6).

  Next, the water repellent treatment is performed on the portion of the alignment films 16 and 22 formed in the partial region 80a by the water repellent treatment step (step 7). At this time, in the water repellent treatment, a water repellent compound such as a silane compound having a perfluoroalkyl group (SiH 4) having water repellency is reactively fixed to the alignment films 16 and 22 to repel the surfaces of the alignment films 16 and 22. This is done by forming a water film. Here, in particular, the alignment films 16 and 22 have silanol groups 162 on their respective surfaces. Since the silanol group 162 is a hydrophilic group and has high reactivity, it can be easily reacted and fixed with a silane compound having a perfluoroalkyl group. That is, the water-repellent compound can be easily reactively fixed to the alignment films 16 and 22 using the silanol group 162 as a reaction site.

  Further, the alignment films 16 and 22 have a columnar structure as shown in FIG. 3, and the water repellent compound easily enters the columnar structure 16a. The film thickness of the alignment films 16 and 22 is, for example, several tens of nm, and the film thickness of the water-repellent films 81 and 82 formed on the surface after the water-repellent treatment is, for example, several nm.

  As described above, according to the method of manufacturing the electro-optical device of this embodiment, the electro-optical devices of the first and second embodiments described above can be manufactured. Here, in particular, the portion formed in the partial region 80a of the alignment films 16 and 22 is at least partially subjected to water repellency treatment, so that the area of the image display region 10a is kept large and the moisture resistance is high. An electro-optical device can be manufactured.

(Electronics)
Next, the case where the liquid crystal device which is the above-described electro-optical device is applied to various electronic devices will be described.

  First, a projector using this liquid crystal device as a light valve will be described. FIG. 10 is a plan view showing a configuration example of the projector. As shown in FIG. 10, a projector 1100 includes a lamp unit 1102 made of a white light source such as a halogen lamp. The projection light emitted from the lamp unit 1102 is separated into three primary colors of RGB by four mirrors 1106 and two dichroic mirrors 1108 arranged in the light guide 1104, and serves as a light valve corresponding to each primary color. The light enters the liquid crystal panels 1110R, 1110B, and 1110G.

  The configurations of the liquid crystal panels 1110R, 1110B, and 1110G are the same as those of the liquid crystal device described above, and are driven by R, G, and B primary color signals supplied from the image signal processing circuit. The light modulated by these liquid crystal panels enters the dichroic prism 1112 from three directions. In this dichroic prism 1112, R and B light is refracted at 90 degrees, while G light travels straight. Accordingly, as a result of the synthesis of the images of the respective colors, a color image is projected onto the screen or the like via the projection lens 1114.

  Here, paying attention to the display images by the liquid crystal panels 1110R, 1110B, and 1110G, the display image by the liquid crystal panel 1110G needs to be horizontally reversed with respect to the display images by the liquid crystal panels 1110R, 1110B.

  Note that since light corresponding to the primary colors R, G, and B is incident on the liquid crystal panels 1110R, 1110B, and 1110G by the dichroic mirror 1108, it is not necessary to provide a color filter.

  Next, an example in which the liquid crystal device is applied to a mobile personal computer will be described. FIG. 11 is a perspective view showing the configuration of the personal computer. In FIG. 11, the computer 1200 includes a main body 1204 provided with a keyboard 1202 and a liquid crystal display unit 1206. The liquid crystal display unit 1206 is configured by adding a backlight to the back surface of the liquid crystal device 1005 described above.

  Further, an example in which the liquid crystal device is applied to a mobile phone will be described. FIG. 12 is a perspective view showing the configuration of this mobile phone. In FIG. 12, a mobile phone 1300 includes a reflective liquid crystal device 1005 together with a plurality of operation buttons 1302. In the reflective liquid crystal device 1005, a front light is provided on the front surface thereof as necessary.

  In addition to the electronic devices described with reference to FIGS. 10 to 12, a liquid crystal television, a viewfinder type, a monitor direct view type video tape recorder, a car navigation device, a pager, an electronic notebook, a calculator, a word processor, a work Examples include a station, a videophone, a POS terminal, a device equipped with a touch panel, and the like. Needless to say, the present invention can be applied to these various electronic devices.

  The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or concept of the invention that can be read from the claims and the entire specification. The manufacturing method of the electro-optical device and the electronic apparatus including the electro-optical device are also included in the technical scope of the present invention.

It is a top view which shows the whole structure of the liquid crystal device which concerns on 1st Embodiment. It is sectional drawing of H-H 'of FIG. It is a schematic diagram for demonstrating the orientation of the liquid crystal by an orientation film. It is an equivalent circuit diagram of various elements and wiring in a plurality of pixels. It is a schematic diagram which shows the area | region in which a water repellent film is formed. It is a schematic diagram equivalent to the B-B 'cross section of FIG. 1 which shows the area | region in which a water repellent film is formed. It is a schematic diagram which shows the alignment film which has a silanol group. It is a schematic diagram for demonstrating the reaction fixation of an alignment film and a water repellent compound. It is a schematic diagram with the same meaning as FIG. 6 in 2nd Embodiment. 5 is a flowchart for explaining each step of a manufacturing process of the electro-optical device according to the first and second embodiments. It is a top view which shows the structure of the projector which is an example of the electronic device to which the electro-optical apparatus is applied. 1 is a perspective view showing a configuration of a personal computer as an example of an electronic apparatus to which an electro-optical device is applied. It is a perspective view which shows the structure of the mobile telephone which is an example of the electronic device to which the electro-optical apparatus is applied.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... TFT array substrate, 10a ... Image display area, 16, 22 ... Alignment film, 20 ... Opposite substrate, 50 ... Liquid crystal layer, 52 ... Sealing material, 52a ... Seal area, 80a ... Partial area, 81, 82 ... Water repellent film

Claims (10)

A pair of first and second substrates sandwiching the electro-optic material;
A sealing material for bonding the first and second substrates to each other in a sealing region along the periphery of the display region;
An alignment film made of an inorganic material formed in the display region on at least one of the first and second substrates,
The alignment film is also formed in a partial region forming at least a part of a peripheral region surrounding the seal region on the at least one substrate,
An electro-optical device, wherein a portion formed in the partial region of the alignment film is at least partially subjected to water repellent treatment.   The electro-optical device according to claim 1, wherein the inorganic material has a silanol group.   The electro-optical device according to claim 1, wherein the alignment film is formed by oblique deposition.   The electro-optical device according to claim 1, wherein the alignment film is formed by anisotropic sputtering.   The electro-optical device according to claim 1, wherein the alignment film is formed by a coating method.   The electro-optical device according to claim 1, wherein the water repellent treatment includes a step of reacting and fixing the inorganic material and the silane compound.   The electro-optical device according to claim 1, wherein the water repellent treatment includes a step of reacting and fixing the inorganic material and alcohol.   The electro-optical device according to claim 1, wherein the water repellent treatment includes a step of reactively fixing the inorganic material and fatty acids.   An electronic apparatus comprising the electro-optical device according to claim 1. An electro-optical device manufacturing method for manufacturing an electro-optical device including a pair of first and second substrates that sandwich an electro-optical material,
An alignment film forming step of forming an alignment film made of an inorganic material in a display region on at least one of the first and second substrates;
A bonding step of bonding the first and second substrates together with a sealing material in a sealing region along the periphery of the display region;
The alignment film forming step forms the alignment film on a partial region that forms at least a part of a peripheral region surrounding the seal region on the at least one substrate;
A method of manufacturing an electro-optical device, comprising: a water repellent treatment step of performing at least partial water repellent treatment on a portion of the alignment film formed in the partial region.

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