JP2007011025A - Method and device for manufacturing liquid crystal display element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a liquid crystal display element by which lamination of substrates under reduced pressure atmosphere is facilitated, and positioning of the substrates is conducted accurately and surely. <P>SOLUTION: Inside a decompression chamber 22, first and second sheet bodies 17, 20 which have been rolled up into a roll shapes are transferred to a position for lamination. A liquid crystal substance is supplied to a gap between the sheet body substrates by a liquid crystal substance supplying means 27b. The first and second substrates are relatively positioned, based on the result detected by a detection means 31, and the substrates are laminated to each other by a bonding means 28. The laminated substrate is recovered by a recovering means 30. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a manufacturing method and a manufacturing apparatus for a liquid crystal display element used in an image display device or the like.

  FIG. 12 is a simplified view showing a conventional method for manufacturing a liquid crystal display element. In the method for manufacturing a liquid crystal display element shown in FIG. 12, a liquid crystal substance is supplied between substrates and the substrates are bonded to each other. A flexible substrate is used as a substrate of a liquid crystal display element. Compared with the case where a glass substrate is used as the substrate of the liquid crystal display element, the flexible substrate can achieve a reduction in weight and cost of the liquid crystal display device and can be used even in a curved state. Therefore, the expansion of the application range of the liquid crystal display device can be achieved.

  In the prior art of FIG. 12, the first substrate is wound in a roll shape and held by the first roller 1. The first substrate wound in a roll shape is drawn out and attached to the resin substrate on which the color filter is formed by the color filter forming means 2. An electrode is formed by the first substrate electrode forming means 3 and an alignment film is formed by the first substrate alignment film forming means 4. When the alignment film is formed on the substrate, the alignment film is baked and hardened by the first heating furnace 5. Further, spacers are dispersed on the first substrate by the spacer forming means 6. Thereafter, the sealant is supplied. A liquid crystal substance is supplied by the liquid crystal supply means 7.

  The second substrate is wound in a roll shape and is held by the second roller 8. The second substrate wound in a roll shape is drawn out, electrodes are formed on the second substrate by the second substrate electrode forming means 9, and an alignment film is formed by the second substrate alignment film forming means 10. When the alignment film is formed on the substrate, the alignment film is baked and hardened by the second heating furnace 11.

  The first and second substrates on which the electrodes and the alignment film are formed are bonded by the bonding means 12, and the sealing agent supplied to the substrate by the third heating furnace 13 is cured and the first and second substrates are cured. Substrate bonding is completed. Further, a liquid crystal display element is formed by the cutting means 14.

  As another manufacturing method of a liquid crystal display element, there is a method of injecting a liquid crystal material into a gap formed between the substrates after bonding the substrates, but it takes time to inject the liquid crystal material between the substrates, and batch processing is also used. Since it is produced, there are problems such as a high possibility that many defective products are generated at one time. Therefore, as in the prior art shown in FIG. 12, the above problem can be solved by supplying a liquid crystal substance to the substrate and bonding the substrates together. In addition, the liquid crystal display element can be continuously formed from the formation of the electrode and the color filter to the bonding of the substrates while the substrate wound on the roll is pulled out, so that the manufacturing cost can be reduced.

JP 2004-258673 A

  The conventional method shown in FIG. 12 has a configuration in which a liquid crystal display element is formed by continuously performing from the formation of electrodes and color filters to the bonding of substrates. The supply of the liquid crystal substance to the substrate needs to be performed in a reduced pressure atmosphere for deaeration between the substrates. However, in the conventional technique shown in FIG. 12, only the liquid crystal supply process cannot be performed in a reduced pressure atmosphere. . Moreover, it is considered that it is practically difficult to carry out all the steps in a reduced-pressure atmosphere, leading to an increase in the size of the apparatus and an increase in manufacturing costs.

  In addition, the conventional technique shown in FIG. 12 is not configured to adjust the positional deviation between the substrates when the first substrate and the second substrate are bonded together, and thus the defect due to the positional deviation of the substrates cannot be eliminated.

  An object of the present invention is to provide a method and an apparatus for manufacturing a liquid crystal display element that can facilitate the bonding of substrates in a reduced-pressure atmosphere and can accurately and reliably align the substrates.

The present invention rolls a first sheet body including a first substrate and a transport film to which the first substrate is detachably attached, into a roll shape,
Winding the second sheet body including the second substrate into a roll,
The first and second sheet bodies are pulled out from the roll and conveyed to a bonding position, and a liquid crystal substance is supplied and bonded between the first and second substrates.
A method for producing a liquid crystal display element, wherein the first substrate is peeled from the transport film and collected together with the second substrate.

  According to the present invention, in the method for manufacturing a liquid crystal display element, a liquid crystal substance is supplied between the substrates and then the substrates are bonded together to form the liquid crystal display element. The first sheet body including the first substrate and the second sheet body including the second substrate are wound in a roll shape. The first and second sheet bodies are pulled out from the roll, and the first and second sheets of the first and second sheet bodies are conveyed to the bonding position. A liquid crystal material is supplied between the conveyed substrates to bond the first and second substrates. The bonded first and second substrates are recovered by peeling the transport film of the first sheet from the bonded first and second substrates. Thus, the substrate wound in a roll shape is pulled out from the sheet body, and a liquid crystal substance is supplied between the substrates to be bonded and collected, whereby a substrate of a liquid crystal display element can be continuously formed.

In the present invention, alignment marks are formed on the first and second substrates, respectively.
The first and second substrates are relatively aligned and bonded using the alignment mark.

  According to the present invention, the first and second substrates are relatively aligned using the alignment marks formed on the first and second substrates, and the substrates are bonded together. For example, the alignment between the substrates can be easily and accurately performed by relatively aligning the first and second substrates so that alignment marks formed on the first and second substrates overlap each other. Thus, the positional deviation between the first and second substrates can be adjusted, and the liquid crystal substance can be supplied to the accurately aligned substrates and the substrates can be bonded together to form a liquid crystal display element.

  According to the present invention, the first and second substrates are aligned by displacing at least one of the first conveying unit that conveys the first sheet member and the second conveying unit that conveys the second sheet member. It is characterized by.

  According to the present invention, at least one of the first and second transfer means is displaced to align the first and second substrates. Thus, the positional deviation between the first and second substrates can be adjusted, and the liquid crystal substance can be supplied to the accurately aligned substrates and the substrates can be bonded together to form a liquid crystal display element.

Moreover, this invention hold | maintains the 1st roll around which the 1st sheet body containing the 1st board | substrate and the conveyance film on which the 1st board | substrate is stuck so that peeling is possible, The 1st sheet body from the 1st roll First conveying means for pulling out and conveying to the bonding position;
A second conveying means for holding a second roll around which the second sheet body including the second substrate is wound, pulling out the second sheet body from the second roll and conveying it to the bonding position;
Liquid crystal substance supply means for supplying a liquid crystal substance between the first and second substrates at the bonding position;
Proximity / separation driving means for driving the first and second conveying means so that the first and second sheet bodies are relatively close to and separate from each other;
A laminating means for laminating the first and second substrates in a state where the first and second substrates are close to each other;
The liquid crystal display element manufacturing apparatus includes a recovery unit that peels the first substrate from the transport film and recovers the first substrate together with the second substrate.

  According to the present invention, in the apparatus for manufacturing a liquid crystal display element, the liquid crystal substance can be supplied between the substrates and the substrates can be bonded together to bond the substrates of the liquid crystal display elements. The first and second sheet members are conveyed to the bonding position by the first conveying unit and the second conveying unit, and the liquid crystal material is supplied between the substrates by the liquid crystal material supplying unit. The first and second conveying means are driven to be displaced by the first driving means, so that the first and second sheet bodies approach and separate. The substrate to which the liquid crystal substance is supplied is bonded by the bonding means in the state where the first and second sheet bodies are close to each other and the first and second substrates are close to each other, and the substrate bonded by the recovery means Is recovered. Therefore, a substrate of a liquid crystal display element can be continuously formed by drawing a substrate wound in a roll shape from a sheet body, supplying a liquid crystal substance between the substrates, laminating and collecting the substrates.

The present invention also provides a detecting means for detecting alignment marks formed on the first and second substrates,
And alignment means for aligning the first and second substrates based on the detection result of the alignment mark.

  According to the present invention, the alignment marks formed on the first and second substrates can be detected by the detection means, and the alignment means aligns the first and second substrates based on the detection result of the detection means. Can do. For example, the alignment marks formed on the first and second substrates are detected by the detecting means. Based on the detection result, the alignment means relatively aligns the first and second substrates so that the detected alignment marks overlap. This makes it possible to easily and accurately align the substrates. Accordingly, the positional deviation between the first and second substrates can be adjusted, and the liquid crystal substance can be supplied to the accurately aligned substrates and bonded together to form a liquid crystal display element.

According to the present invention, the alignment means includes an alignment driving means for relatively displacing the first and second transport means in a direction different from the transport direction of the first and second substrates at the bonding position;
And a control means for controlling the alignment driving means so as to align the first and second substrates based on the detection result by the detection means.

  According to the present invention, the first and second transport means are relatively displaced by the alignment driving means in a direction different from the transport direction of the first and second substrates at the bonding position. The control means controls to displace the alignment driving means based on the detection result by the detection means. Here, the conveyance direction refers to a direction in which the sheet body is drawn from the roll and conveyed to the bonding position. Based on the detection result by the detection means, the control means displaces the alignment driving means, and the first and second transport means are relatively displaced, and the first and second substrates can be aligned. Thus, the positional deviation between the first and second substrates can be adjusted, and the liquid crystal substance can be supplied to the accurately aligned substrates and the substrates can be bonded together to form a liquid crystal display element.

  According to the present invention, the sheet body wound in the form of a roll is drawn out from the roll, and the liquid crystal substance is supplied between the substrates of the sheet body that has been drawn out to the bonding position. In particular, a substrate for a liquid crystal display element can be formed. Accordingly, the process for supplying and bonding the liquid crystal substance between the substrates can be made independent, and the room for bonding the substrates can be reduced in size. Therefore, the chamber can be easily decompressed, and the substrate of the liquid crystal display element can be formed by supplying and bonding the liquid crystal substance to the substrate under reduced pressure.

  Further, according to the present invention, alignment between the substrates can be easily and accurately performed using the alignment marks formed on the first and second substrates. Accordingly, it is possible to suppress a defect due to the positional deviation of the substrate of the liquid crystal display element.

  According to the invention, it is possible to align the first and second substrates by displacing at least one of the first and second transfer means. Accordingly, the first and second substrates can be aligned with a simple configuration. Accordingly, the liquid crystal display element can be formed by adjusting the positional deviation between the first and second substrates and accurately aligning them, supplying a liquid crystal substance to the substrates, and bonding the substrates together.

  Further, according to the present invention, the sheet body wound in the form of a roll is drawn from the roll, and the liquid crystal substance is supplied between the substrates of the sheet body drawn to the bonding position, bonded, and recovered, The substrate of the liquid crystal display element can be formed continuously. Accordingly, the process for supplying and bonding the liquid crystal substance between the substrates can be made independent, and the room for bonding the substrates can be reduced in size. Therefore, the chamber can be easily decompressed, and the substrate of the liquid crystal display element can be formed by supplying and bonding the liquid crystal substance to the substrate under reduced pressure.

  According to the present invention, the alignment unit can align the first and second substrates based on the detection result of the detection unit. Therefore, it is possible to easily and accurately adjust the misalignment between the first and second substrates, and to supply the liquid crystal substance to the accurately aligned substrates and bond the substrates together to form a liquid crystal display element. it can.

  According to the invention, the control means displaces the alignment driving means based on the detection result by the detection means, the first and second transport means are relatively displaced, and the positions of the first and second substrates are changed. Can be combined. Thus, the positional deviation between the first and second substrates can be adjusted, and the liquid crystal substance can be supplied to the accurately aligned substrates and the substrates can be bonded together to form a liquid crystal display element.

  FIG. 1 is a flowchart showing a method for manufacturing a liquid crystal display element according to an embodiment of the present invention. The manufacturing method of a liquid crystal display element is obtained by winding a first sheet body including a first substrate and a transport film to which the first substrate is detachably attached in a roll shape, and the second substrate and the second substrate are peeled off. The 2nd sheet body containing the conveyance film stuck on possible is wound in roll shape, and it starts in the state which has arrange | positioned the 1st and 2nd sheet body in the pressure-reduced atmosphere. Operations from step s1 to step s11 described later are performed under a reduced pressure atmosphere.

  In step s1, the first and second sheet bodies are pulled out from the roll, and the first and second substrates are conveyed to the bonding position. The first sheet member is conveyed by the first conveying unit, and the second sheet member is conveyed by the second conveying unit. The state in which the first and second substrates are conveyed to the bonding position is defined as an initial state. When it is conveyed to the bonding position, the process proceeds to step s2.

  In step s2, a sealing material is supplied between the first and second substrates, and further a liquid crystal material is supplied. For example, a sealing material and a liquid crystal substance are supplied to the surface of the second substrate that faces the first substrate. When the sealing material and the liquid crystal material are supplied, the process proceeds to step s3.

  In step s3, the conveying means is displaced so that the first and second sheet bodies are relatively close to each other. Specifically, when the first transport unit approaches the second transport unit, the first sheet member approaches the second sheet member. At this time, the first transport means is displaced so as to approach the sealing material and the liquid crystal substance supplied to the second substrate to a position where the first substrate does not contact. When the first and second sheet bodies are close to each other, the process proceeds to step s4.

  In step s4, the first and second substrates are aligned. In the state where the first and second sheet bodies are relatively close to each other in step s4, the alignment marks of the first and second substrates are matched using the alignment marks formed on the first and second substrates. In other words, the first and second transport means are relatively displaced so as to overlap. In this case, the first and second substrates are aligned with an accuracy in a range of ± 5 to 10 μm, for example. When the conveying means is displaced so that the alignment marks formed on the first and second substrates overlap, the process proceeds to step s5.

  In step s5, the conveying means is displaced so that the first and second sheet bodies are closer to each other. Specifically, when the first transport unit approaches the second transport unit, the first sheet member approaches the second sheet member. At this time, the first transport means is displaced so as to approach the sealing material and the liquid crystal substance supplied to the second substrate to a position where the first substrate contacts. When the first conveying means is displaced so that the first substrate comes into contact with the sealing agent and the liquid crystal substance supplied to the second substrate, and the first and second sheet bodies are further brought closer, the process proceeds to step s6.

  In step s6, as in step s4, using the alignment marks formed on the first and second substrates, the first and second alignment marks on the first and second substrates are matched, in other words, overlapped. The conveying means is relatively displaced. In step s6, since the distance between the first substrate and the second substrate is smaller than in the case of step s5, precise alignment can be performed, and the alignment accuracy of the first and second substrates is, for example, ± Alignment is performed with an accuracy in the range of 1 to 2 μm. When the conveying means is displaced so that the alignment marks formed on the first and second substrates overlap each other and precise alignment is performed, the process proceeds to step s7.

  In step s7, the first substrate and the second substrate are bonded. For example, the first and second substrates are bonded by irradiating ultraviolet rays by a bonding means such as an ultraviolet irradiation device and curing the sealing agent supplied to the second substrate. When the first and second substrates are bonded, the process proceeds to step s8.

  In step s8, the first and second substrates bonded in step s7 are recovered by the recovery means. Specifically, the transport film that is peelably attached to the first substrate 15 and the transport film that is peelably attached to the second substrate are peeled from the first and second substrates, and the first And the second substrate is recovered. When the first and second substrates are collected, the process proceeds to step s9.

  In step s9, the first and second transport means return to the state before being displaced in steps s3 to s6. In other words, the first and second transport means return to the initial position where the first and second substrates are transported to the bonding position in step s2. When returning to the initial state, the process proceeds to step s10. In step s10, it is determined whether or not a next substrate exists. If the next substrate exists, the process proceeds to step s1. If the next substrate does not exist, the process proceeds to step s11, and the manufacturing method of the substrate of the liquid crystal display element ends.

  Note that a plurality of columnar protrusions are formed on the surface of the first and second substrates in contact with one of the liquid crystal substances in order to form a gap between the substrates when the substrates are bonded. In addition, electrodes, a color filter, an alignment film, an alignment mark, and the like are formed on the first and second substrates.

  FIG. 2 is a front view showing a liquid crystal display element manufacturing apparatus 21 capable of realizing the liquid crystal display element manufacturing method shown in FIG. The liquid crystal display element manufacturing device 21 is a device that transports substrates to a bonding position and bonds substrates after supplying a liquid crystal substance between the substrates. The liquid crystal display element manufacturing apparatus 21 includes a chamber 22, a first transport unit 23, a second transport unit 24, a first drive unit 25, a second drive unit 26, a sealant supply unit 27a, and a liquid crystal substance. It has the supply means 27b, the bonding means 28, the holding means 29, the collection | recovery means 30, the detection means 31, and the control means 32.

  The chamber 22 has a space in which the first transfer unit 23, the second transfer unit 24, and the like are provided, and is a sealable room. The chamber 22 is depressurized by a vacuum pump or the like, and is in a reduced pressure atmosphere.

  The 1st conveyance means 23 hold | maintains the 1st roll 17a by which the 1st sheet | seat body 17 containing the 1st board | substrate 15 and the 1st conveyance film 16 on which the 1st board | substrate 15 is peeled is attached is wound. Then, the first sheet body 17 is pulled out and conveyed from the first roll 17a.

  The first transport unit 23 includes a first transport holding roller 41, a first feed roller 42, a second feed roller 43, a first transport take-up roller 44, and a first transport frame 45. The first transport holding roller 41, the first feed roller 42, the second feed roller 43, and the first transport take-up roller 44 are fixed to the first transport frame 45.

  Description will be made assuming that the first to third directions orthogonal to each other are the X direction, the Y direction, and the Z direction. In the present embodiment, specifically, the first and second directions are horizontal directions, and the third direction is a vertical direction. In the Y direction, one of the second directions from the right side to the left side on the paper surface of FIG. 2 is defined as the Y1 direction, and the other second direction from the left side to the right side of the paper surface of FIG. Further, regarding the Z direction, the upper direction in the third direction is defined as the Z1 direction, and the lower direction in the third direction is defined as the Z2 direction. Further, in the X direction, one of the first directions is the X1 direction, and the other of the second directions is the X2 direction.

  The axis of each of the first transport holding roller 41, the first feed roller 42, the second feed roller 43, and the first transport take-up roller 44 extends in the X direction, which is the first direction, and is the second direction perpendicular to the X direction. The first transport holding roller 41, the first feed roller 42, the second feed roller 43, and the first transport take-up roller 44 are fixed to the first transport frame 45 in this order with a gap in the Y direction. In other words, the first transport holding roller 41, the first feed roller 42, the second feed roller 43, and the first transport take-up roller 44 are provided in order in the Y1 direction.

  The axes of the first transport holding roller 41 and the first transport take-up roller 44 are located at substantially the same height. The axes of the first feed roller 42 and the second feed roller 43 are located at substantially the same height. The axes of the first feed roller 42 and the second feed roller 43 are located between and below the first transport holding roller 41 and the first transport take-up roller 44.

  The first roll 17 a is held by the first conveyance holding roller 41. The first sheet member 17 is pulled out from the upper side of the first conveyance holding roller 41, wound around the lower side of the first feed roller 42, wound around the lower side of the second feed roller 43, and the first conveyance roll. It is wound from above the take-up roller 44. Along the conveyance path to the first conveyance holding roller 41, the first feed roller 42, the second feed roller 43, and the first conveyance take-up roller 44 by rotating a motor or the like provided on the first conveyance take-up roller 44. Thus, the first sheet body 17 is conveyed. Here, the direction along the transport path is referred to as the transport direction.

  In the state where the first sheet body 17 is first wound around the first conveyance holding roller 41, the first feed roller 42, the second feed roller 43, and the first conveyance take-up roller 44 along the conveyance path, at least the first sheet body 17 is firstly wound. The first substrate 15 is not attached to the first sheet body 17 between the conveyance holding roller 41 and the second feed roller 43.

  The 2nd conveyance means 24 hold | maintains the 2nd roll 20a by which the 2nd sheet | seat body 20 containing the 2nd board | substrate 18 and the 2nd conveyance film 19 on which the 2nd board | substrate 18 is peeled is attached is wound. The second sheet body 20 is pulled out and conveyed from the second roll 20a. The second transport unit 24 is disposed below the first transport unit 23 and is provided to face the first transport unit 23.

  The second transport unit 24 includes a second transport holding roller 46, a third feed roller 47, a fourth feed roller 48, a second transport take-up roller 49, and a second transport frame 50. The second transport holding roller 46, the third feed roller 47, the fourth feed roller 48, and the second transport take-up roller 49 are fixed to the second transport frame 50.

  The axis of each of the second transport holding roller 46, the third feed roller 47, the fourth feed roller 48, and the second transport take-up roller 49 extends in the X direction, which is the first direction, and is the second direction perpendicular to the X direction. The second transport holding roller 46, the third feed roller 47, the fourth feed roller 48, and the second transport take-up roller 49 are fixed to the second transport frame 50 in this order with an interval in the Y direction. In other words, the second transport holding roller 46, the third feed roller 47, the fourth feed roller 48, and the second transport take-up roller 49 are provided in order in the Y1 direction.

  The axes of the second conveyance holding roller 46 and the second conveyance take-up roller 49 are located at substantially the same height. The axes of the third feed roller 47 and the fourth feed roller 48 are located at substantially the same height. The axes of the third feed roller 47 and the fourth feed roller 48 are positioned between and above the second transport holding roller 46 and the second transport take-up roller 49.

  A second conveyance holding roller 46 is provided below the first conveyance holding roller 41, a third feeding roller 47 is provided below the first feeding roller 42, and the second feeding roller 43 The fourth feed roller 48 is provided below and the second transport take-up roller 49 is provided vertically below the first transport take-up roller 44.

  The second roll 20 a is held by the second conveyance holding roller 46. The second sheet member 20 is pulled out from the lower side of the second conveyance holding roller 46, wound around the upper side of the third feed roller 47, wound around the upper side of the fourth feed roller 48, and The roller 49 is wound from the lower side. Along the conveyance path to the second conveyance holding roller 46, the third feeding roller 47, the fourth feeding roller 48, and the second conveyance winding roller 49 by rotating a motor or the like provided on the second conveyance winding roller 49. Thus, the second sheet body 20 is conveyed.

  In the state in which the second sheet body 20 is wound around the second transport holding roller 46, the third feed roller 47, the fourth feed roller 48, and the second transport take-up roller 49 first along the transport path, at least the second sheet body 20 is The second substrate 18 is not adhered to the second sheet body 20 between the conveyance holding roller 46 and the fourth feed roller 48.

  The bonding position indicates between the first and second feed rollers 42 and 43 and between the third and fourth feed rollers 47 and 48. The first sheet body 17 is pulled out from the first roll 17a, the first substrate 15 is conveyed to the bonding position, and the second sheet body 20 is pulled out from the second roll 20a, and the second substrate is moved to the bonding position. When 18 is conveyed, a sealing agent and a liquid crystal substance are supplied between the 1st and 2nd board | substrates 15 and 18 conveyed to the bonding position, and a board | substrate is bonded together.

  The first driving means 25 drives the first conveying means 23 to move in the direction approaching and separating from the second conveying means 24. In other words, the first transport unit 23 is displaced in the Z direction, which is the third direction. The first drive unit 25 drives the first transport unit 23 to rotate in the horizontal direction. The first driving means 25 is provided outside the upper surface of the chamber 22. A chamber through hole 51 is formed on the upper surface of the chamber 22, and the first driving means 25 is fixed to the first transfer frame 45 provided in the chamber 22 from the outside of the chamber 22 through the chamber through hole 51. The As a result, the drive of the first drive means 25 is transmitted to the first transport frame 45, and the first transport means 23 is displaced.

  The second driving unit 26 drives the second conveying unit 24 to be displaced in the X direction that is the first direction. The second driving means 26 is provided in contact with the bottom surface of the chamber 22 vertically below, and the second transport frame 50 is mounted on the second driving means 26. The second driving means 26 may be realized by a motor and a ball screw, for example, or may be realized by a linear motor. The second driving means 26 is mounted on a rail fixed to the bottom surface of the chamber 22 with a wheel provided at a lower part of the second transport frame 50 facing the second driving means 26, and is secondly operated by an actuator or the like. The conveying means 24 may be displaced in the X direction.

  The encapsulant supply means 27a supplies the encapsulant to the second substrate 18 in a closed loop shape, and the liquid crystal substance supply means 27b supplies the liquid crystal substance in the region surrounded by the encapsulant of the second substrate 18. To do. The sealing agent is, for example, a mixture of an ultraviolet curable resin and a thermosetting resin. The sealant supply means 27a and the liquid crystal substance supply means 27b are realized by, for example, a dispenser, and the sealant and the liquid crystal substance are supplied to the second substrate 18 by the dispenser. When the first and second substrates 15 and 18 are conveyed to the bonding position, the sealing agent and the liquid crystal substance are supplied to the second substrate 18 by the sealing agent supply means 27a and the liquid crystal substance supply means 27b. Here, the form in which the sealant is supplied immediately before the liquid crystal substance is supplied is taken, but a form in which a second substrate on which the sealant is applied in advance may be used. However, in that case, it is necessary to devise such as winding through a spacer so that the sealing agent does not come into contact with the substrate even when it is wound.

  The bonding means 28 bonds the first substrate 15 and the second substrate 18 supplied with the sealing agent and the liquid crystal substance. For example, when ultraviolet light is irradiated by the bonding means 28, the sealant is cured and the first and second substrates 15 and 18 are bonded. The laminating means 28 is disposed between the first feeding roller 42 and the second feeding roller 43 and vertically above the first sheet body 17 with the first sheet body 17 being conveyed to the laminating position. The first carrier frame 45 is fixed.

  Further, the bonding means 28 is displaced in the Z direction. By displacing in the Z direction, the first and second substrates 15 and 18 conveyed to the bonding position are sandwiched together with the holding means 29 described later, and the gap generated between the substrates is eliminated. , 18 can be pasted together.

  The holding means 29 holds the second sheet body 20 conveyed to the bonding position. The holding unit 29 is realized by, for example, an electrostatic chuck, and the second sheet body is held by the electrostatic chuck when a voltage is applied to the electrostatic chuck. By causing the holding means 29 to hold the second sheet body, it is possible to prevent a positional shift when the first and second substrates 15 and 18 are aligned. The holding means 29 is arranged between the third and fourth feed rollers 47 and 48 and in a state where the second sheet body 20 is conveyed to the bonding position, and is disposed vertically below the second sheet body 20. 2 It is fixed to the conveyance frame 50.

  The holding means 29 detects the pressure applied to the substrate when the laminating means 28 is displaced in the Z2 direction, which is lower in the third direction. When the laminating means 28 is displaced vertically downward, the first and second substrates 15 and 18 are sandwiched between the laminating means 28 and the holding means 29 and added to the substrate by the holding means 29. The detected pressure is detected. Based on the detection result of the holding means 29, the vertical downward displacement of the bonding means 28 is controlled. The pressure applied to the substrate sandwiched between the bonding unit 28 and the holding unit 29 is not limited to the configuration detected by the holding unit 29, and may be a configuration detected by the bonding unit 28.

  The recovery means 30 peels the transport films that are respectively bonded to the first and second substrates 15 and 18 bonded by the bonding means 28 from the first and second substrates 15 and 18, and is bonded first. The first and second substrates 15 and 18 are collected. The collection unit 30 includes a substrate transport unit 56 that transports a substrate peeled from the transport film, and a storage unit 57 that stores a substrate transported by the substrate transport unit 56. The guide 55 is a member for guiding the substrate peeled from the transport film to the substrate transport unit 56, and the guide 55 is disposed on the second transport take-up roller 49 side so as to be adjacent to the fourth feed roller 48. Provided. A substrate transport unit 56 is provided adjacent to the guide 55 and parallel to the Y direction. One end of the substrate transport unit 56 is connected to the guide 55, and the other end is connected to the storage unit 57. The collection means 30 is fixed to the second transport frame 50.

  The first and second substrates 15 and 18 bonded by the bonding means 28 are drawn from the bonding position by the first and second transport means 23 and 24. When the first and second transport films 16 and 19 are taken up by the first and second transport take-up rollers 44 and 49, the first substrate 15 is integrated with the first transport film 16 to form the first transport winding. The second substrate 18 tries to be displaced toward the take-up roller 44, and tends to be displaced toward the second transport take-up roller 49 together with the second transport film 19. However, since the 1st and 2nd board | substrates 15 and 18 are mutually bonded and the rigidity is high by having been bonded, as a result, naturally from the 1st and 2nd conveyance films 16 and 19 It peels and moves straight in the Y1 direction. Specifically, the first transport film 16 of the first sheet body 17 is transported from the second feed roller 43 to the first transport take-up roller 44 by the rotation of the motor of the first transport take-up roller 44. The first transport take-up roller 44 is wound around. The second transport film 19 of the second sheet body 20 is transported from the fourth feed roller 48 to the second transport take-up roller 49 by the rotation of the motor of the first transport take-up roller 44, and the second transport winding roll 44. It is wound around a take-up roller 49. Since the degree of adhesion of the transport films 16 and 19 attached to the first and second substrates 15 and 18 is smaller than the adhesive strength between the first substrate 15 and the second substrate 18, the first and second transport films It is possible to peel the first and second transport films 16 and 19 from the bonded first and second substrates 15 and 18 by winding the rolls 16 and 19, and at the same time, the first bonded first The second substrates 15 and 18 can be sent in the Y1 direction, which is the direction of the collecting means 30. At this time, it is desirable that the first and second transport films 16 and 19 have the same sticking degree. The substrate peeled off from the transport film as described above is sent from the substrate transport unit 56 to the storage unit 57.

  The detection means 31 detects the alignment mark 97 formed on the substrate. Specifically, two coarse alignment marks 97a and two fine alignment marks 97b are formed on the substrate. The coarse alignment mark 97a is provided near the diagonal corner of the rectangular substrate, and the fine alignment mark 97b is provided near the other diagonal corner of the substrate. A chamber box 58 is provided in the chamber 22 vertically below the second transport means 24. The detection means 31 is provided in the chamber box 58 and is provided vertically below the second transport means 24 and between the third and fourth feed rollers 47 and 48. The lower part of the chamber box 58 is open to the atmosphere. In the present embodiment, a CCD camera is used as the detection means 31. Although FIG. 2 is a side view, it is not shown, but four detection means 31 are provided, two of which are detection means 31a for coarse alignment, and the remaining two are detection means 31b for fine alignment. It is.

  The control means 32 controls the first driving means 25 so as to displace the first conveying means 23 in a direction relatively close to and away from the second conveying means 24, and the result detected by the detecting means 31. Based on the above, the first driving means 25 is rotationally displaced and the second driving means 26 is displaced in the X direction so that the first and second substrates 15 and 18 are aligned. The control means 32 controls the pressure applied to the substrate by controlling the bonding means 28 to be displaced in the Z direction.

  FIG. 3 is a sectional view showing a part of the liquid crystal display element manufacturing apparatus 21 by cutting. A first driving means 25 for displacing and driving the first transport means 23 is provided on the upper portion of the chamber 22. The first driving means 25 has a rectangular plate-like driving means frame 61 supported by a support portion at the upper part of the chamber 22. The support portion has a central support portion 68 that supports the longitudinal center portion of the drive means frame 61 and two end support portions 69 that support the longitudinal end portions of the drive means frame 61.

  The central support portion 68 has an angular displacement shaft 64 parallel to the Z direction, and a base 65 that supports the angular displacement shaft 64 about its axis. The base 65 is fixed to the upper portion of the chamber 22, and the angular displacement shaft 64 is fixed to the central portion in the longitudinal direction of the driving means frame 61. The end support portion 69 includes, for example, a spherical rolling element 63 and a holding base 62 that holds the rolling element 63 so as to be freely rollable. Each holding base 62 is fixed to the upper part of the chamber 22, and each rolling element 63 is in contact with both ends in the longitudinal direction of the driving means frame 61 from below. By such a support portion, the drive means frame 61 is supported so as to be angularly displaceable in the angular displacement direction around the angular displacement axis L that coincides with the axis of the angular displacement shaft 64.

  The first driving means 25 has slide displacement driving parts 66 provided at both ends in the longitudinal direction of the driving means frame 61. Each slide displacement drive unit 66 includes an external screw member 72 provided with an axis line arranged in parallel in the Z direction, an internal screw member 73 screwed to the external screw member 72, and a connection fixed to the internal screw member 73. A piece 76; a connecting rod 77 whose one end is fixed to the connecting piece 76; a protective cylinder 71 that covers the outer screw member 72; and a slide displacement drive source 75 such as a motor that rotationally drives the outer screw member 72. Have.

  The outer screw member 72 is supported by the drive means frame 61 so as to be rotatable about its axis, and the protective cylinder 71 is fixed to the drive means frame 61. A locking groove 70 extending in the axial direction is formed in the protective cylinder 71, and the connecting piece 76 is provided so as to pass through the protective cylinder 71 via the locking groove 70. The internal screw member 73 and the connecting piece 76 are prevented from rotating with respect to the rotation.

  The slide displacement drive source 75 is provided on the protective cylinder 71 via the bracket 74, and can rotate the external screw member 72. By rotating the external screw member 72 by the slide displacement drive source 75, the internal screw member 73 can be screwed and screwed in the Z direction with respect to the external screw member 72. The other end portion of the connecting rod 77 is fixed to the first conveying means frame 45, whereby the connecting rod 77 is slid in the Z direction via the connecting piece 76, and the first conveying means 23 is slid in the Z direction. Can be made.

  The connecting rod 77 is provided through the circular drive means frame through hole 80 of the drive means frame 61 and through the chamber through hole 51 at the top of the chamber 22. The drive means frame through hole 80 of the drive means frame 61 is circular, and the connecting rod is gently inserted therethrough. The chamber through-hole 51 in the upper part of the chamber 22 is formed as a long hole extending along an arc centered on the angular displacement axis L of the driving means frame 61. In this way, the connecting rod 77 is provided so that the connecting rod 77 can be displaced in the Z direction, and the angular displacement of the driving means frame 61 and each slide displacement driving portion 66 is not blocked by the chamber 22.

  A bellows-shaped protective cover 78 that covers the connecting rod 77 is provided between the driving means frame 61 and the connecting piece 76 and between the driving means frame 61 and the upper portion of the chamber 22. Further, the upper portion of the chamber 22 and the connecting rod 77 are hermetically sealed by, for example, a flexible cover or sealing material so that the pressure in the chamber can be maintained.

  FIG. 4 is a plan view showing a manufacturing apparatus 21 for a liquid crystal display element. The first drive unit 25 has an angular displacement drive unit 67 that drives and operates one end of the drive unit frame 61 in the longitudinal direction. The angular displacement drive unit 67 includes a base 86 fixed to the upper portion of the chamber, an extension mechanism 90 provided on the base 86, an extension drive source 85 such as a motor provided on the base 86 to drive the extension mechanism 90, and the like. Spring means 89 is provided on the base 86 to apply a spring force to the drive means frame 61.

  The base body 86 is provided at one end in the longitudinal direction of the drive means frame 61 at a position facing from one side in the angular displacement direction around the angular displacement axis L. The expansion / contraction mechanism 90 includes a base 87 fixed to the base 86 and a movable portion 88 that can be extended and retracted with respect to the base 87. The movable portion 88 approaches and separates from the drive means frame 61. In addition, it can be expanded and contracted. The spring means 89 is realized by, for example, a tension coil spring, and has one end connected to the base 86 and the other end connected to one longitudinal end of the drive means frame 61.

  The drive means frame 61 is configured to elastically contact the movable portion 88 of the expansion / contraction mechanism 90 by the spring force of the spring means 89. By extending the expansion / contraction mechanism 90 by the expansion / contraction drive source 85, the drive means frame 61 can be angularly displaced in one direction of angular displacement, in other words, in the direction of the arrow C1, against the spring force of the spring means 89, By retracting the expansion / contraction mechanism 90 by the expansion / contraction drive source 85, the drive unit frame 61 can be angularly displaced in the other direction, in other words, in the direction of the arrow C2 by the spring force of the spring unit 89. The expansion / contraction mechanism 90 is realized by, for example, a configuration using a combination of a rack and a pinion, or a configuration using a combination of an external screw member and an internal screw member.

  As shown in FIG. 3, the laminating unit 28 is provided with a laminating drive source 81 such as a motor and a laminating screw member 82 in order to displace the laminating unit 28 in the Z direction, for example. The bonding screw member 82 is realized by combining, for example, an outer screw member and an inner screw member. The laminating drive source 81 displaces the laminating means 28 in the Z direction by screwing the inner screw member in and out of the outer screw member in the Z direction. When the laminating means 28 is displaced in the Z2 direction, the first substrate 15 and the second substrate 18 are sandwiched between the laminating means 28 and the holding means 29, and a gap is generated between the first and second substrates 15 and 18. Can be eliminated.

  FIG. 5 is a diagram showing the supply of the sealing agent and the liquid crystal substance between the substrates by the sealing agent supply means 27a and the liquid crystal substance supply means 27b provided in the liquid crystal display element manufacturing apparatus 21. FIG. The first sheet body 17 including the first substrate 15 and the first transport film 16 is transported to the bonding position by the first transport means 23. The second sheet body 20 including the second substrate 18 and the second transport film 19 is transported to the bonding position by the second transport means 24. First, as shown in FIG. 5A, the sealant is supplied to the second substrate 18 conveyed to the bonding position so as to surround the periphery of the pixel region. Subsequently, as shown in FIG. 5B, the liquid crystal material is supplied into the region surrounded by the sealant by the liquid crystal material supply means 27b. The liquid crystal substance supply means 27b moves while supplying the liquid crystal substance in the Y1 direction, for example. When the supply of the liquid crystal substance is completed, the sealant supply means 27a and the liquid crystal substance supply means 27b are withdrawn from between the first and second feed rollers 42 and 43 to a position where they do not interfere with the conveying means and the sheet body at the time of bonding. .

  FIG. 6 is an enlarged plan view showing the holding means 29, the detecting means 31, and the vicinity thereof provided in the liquid crystal display element manufacturing apparatus 21 in a state where the first conveying means 23 is close to the second conveying means 24. . Four upper surface through-holes 91 are formed on the upper surface, which is vertically above the chamber box 58, formed from the inside of the chamber box 58 to the substrate. Two of the upper surface through holes 91 are the upper surface through holes 91a for rough alignment, and the remaining two are the upper surface through holes 91b for fine alignment. It is fixed by.

  The holding means 29 has four holding through holes 95 formed facing the substrate. Of the upper surface through holes 95, two are upper surface through holes 95a for rough alignment, the remaining two are upper surface through holes 95b for fine alignment, and a glass plate 96 is fitted in the holding through holes 95. . The upper surface through hole 91 and the holding through hole 95 are formed so that the central axis of the upper surface through hole 91 and the central axis of the previous holding through hole 95 overlap. As a result, the detection means 31 provided in the chamber box 58 has four alignments respectively formed on the first and second substrates 15 and 18 from the four upper surface through holes 91 and the four holding through holes 95. The mark 97 is read.

  FIG. 7 is a diagram schematically showing a state in which the substrate on which the alignment mark 97 is formed is pulled out to the bonding position, and the alignment mark 97 is detected by the detection means 31 through the holding through hole 95. is there. The first and second substrates 15 and 18 are positioned so that the alignment marks 97 formed on the first and second substrates 15 and 18 are detected from the holding through-holes 95. 23, 24.

  The detecting means 31 reads four alignment marks 97 formed on the first and second substrates 15 and 18 from the four upper surface through holes 91 and the four holding through holes 95, respectively. Based on the detection result detected by the detection unit 31, the first transfer unit 23 and the second transfer unit 24 are relatively displaced so that the alignment marks 97 formed on the first and second substrates 15 and 18 overlap. Thus, the first and second substrates 15 and 18 are aligned.

  In the present embodiment, the alignment mark 97 formed on the substrate has a cross shape, but the shape of the alignment mark 97 is not limited to the cross shape. The alignment mark 97 formed on the first substrate 15 and the alignment mark 97 formed on the second substrate 18 do not necessarily have the same shape, and the detection means 31 detects each alignment mark 97. As long as the alignment mark 97 can be aligned, there is no particular limitation.

  Further, in the present embodiment, by using a translucent substrate as the substrate, the alignment mark 97 formed on the first and second substrates 15 and 18 conveyed to the bonding position is placed below the second conveying means 24. Detection is possible from the side through the upper surface through hole 91 and the holding through hole 95.

  FIG. 8 is a diagram showing a simplified process of bonding substrates by the liquid crystal display element manufacturing apparatus 21. In FIGS. 8B to 8F, the first driving means 25 provided on the upper surface of the chamber is omitted. In FIG. 8A, the first sheet body 17 wound in a roll shape is held by the first conveyance holding roller 41, and the first conveyance winding is performed via the first and second feed rollers 42 and 43. The roller 44 is pulled out. Further, the second sheet body 20 wound in a roll shape is held by the second conveyance holding roller 46 and pulled out to the second conveyance take-up roller 49 via the third and fourth feed rollers 47 and 48. .

  In the initial state in which the first sheet body is pulled out to the first transport take-up roller 44 and the second sheet body is pulled out to the second transport take-up roller 49, at least the first transport holding roller 41 to the second feed It is assumed that the substrate is not attached to the first and second sheet bodies 17 and 20 positioned between the rollers 43 and between the second conveyance holding roller 46 and the fourth feed roller 48. When the first and second sheet bodies 17 and 20 are pulled out, the inside of the chamber 22 is depressurized by a vacuum pump. When the inside of the chamber 22 is depressurized, the first and second sheet members 17 and 20 are further pulled out by the first and second transfer means 23 and 24, and the first and second substrates 15 and 18 are bonded to the bonding position. It is conveyed to. FIG. 8A corresponds to the process shown in step s0 and step s1 in FIG.

  In FIG. 8B, the sealing material is supplied to the second substrate 18 transported to the bonding position by the sealing agent supply means 27a, and the liquid crystal substance is further supplied by the liquid crystal substance supply means 27b. FIG. 8B corresponds to the process shown in step s2 of FIG.

  In FIG. 8C, the first transport unit 23 is close to the second transport unit 24. Specifically, the first driving unit 25 is arranged so that the first transport unit 23 comes close to the second transport unit 24 until the first substrate 15 does not come into contact with the sealing material and the liquid crystal substance supplied to the second substrate 18. The slide displacement drive unit 66 is driven to be displaced. When the first transport unit 23 comes close to the second transport unit 24, the first and the second detected by the rough alignment detecting unit 31a from the upper surface through hole 91a for rough alignment and the holding through hole 95a for rough alignment. The coarse alignment marks 97a formed on the two substrates 15 and 18 are detected. Based on the detection result, the control unit 32 displaces the angular displacement driving unit 67 and the second driving unit 26 of the first driving unit 25 so that the coarse alignment marks 97a overlap, thereby causing the first and second substrates to be displaced. Align 15 and 18. FIG. 8C corresponds to the process shown in steps s3 and s4 in FIG.

  In FIG. 8D, the first transport unit 23 is further brought close to the second transport unit 24 for precise alignment. Specifically, the first driving unit 25 is arranged so that the first transport unit 23 is brought close to the second transport unit 24 until the first substrate 15 comes into contact with the sealing material and the liquid crystal substance supplied to the second substrate 18. The slide displacement drive unit 66 is driven to be displaced. When the first transport unit 23 comes close to the second transport unit 24 so that the first substrate 15 comes into contact with the liquid crystal substance supplied to the second substrate 18, the fine alignment detection means 31 b allows the fine alignment upper surface transparent surface to pass through. A fine alignment mark 97b formed on the first and second substrates 15 and 18 detected from the hole 91b and the holding hole 95b for fine alignment is detected.

  Based on the detection result, the control unit 32 displaces the first and second substrates by displacing the angular displacement driving unit 67 and the second driving unit 26 of the first driving unit 25 so that the fine alignment marks 97b overlap each other. Align 15 and 18. When the alignment is performed, the first and second substrates 15 and 18 are bonded by the bonding means 28 by, for example, irradiating the first and second substrates 15 and 18 with ultraviolet rays and curing the sealant. Combined. FIG. 8D corresponds to the process shown in steps s5 to s7 in FIG.

  8E and 8F, the transport film bonded to the first and second substrates 15 and 18 is peeled off from the bonded substrates by the peeling portion 55 of the collecting means 30, and the substrate is transported. The substrate is stored in the storage unit 57 by the unit 56. The transport film peeled off from the first and second substrates 15 and 18 is wound around the first transport take-up roller 44 and the second transport take-up roller 49. FIGS. 8E and 8F correspond to the process shown in step s8 in FIG.

  When the substrate is stored in the storage unit 57, the first and second transporting units 23, 24 displaced in FIGS. 8C and 8D return to the initial state before the displacement. 2 The driving means 26 is driven to move back to the state shown in FIG. The storage unit 57 is lowered by one board in order to store the next board.

  FIG. 9 is a diagram schematically illustrating a sheet body manufacturing apparatus 100 that forms a sheet body held by the first transport holding roller 41 and the second transport holding roller 46 and winds the sheet body in a roll shape. FIG. 10 is an enlarged view showing a cutting process by the cutting means 103 provided in the sheet body manufacturing apparatus 100. The sheet body manufacturing apparatus 100 forms a sheet body by attaching a substrate to a transport film, and winds the sheet body in a roll shape. The sheet body manufacturing apparatus 100 includes a sheet body conveying unit 101, a sheet body laminating unit 102, a cutting unit 103, a cleaning unit 104, an air injection unit 105, a heating unit 106, a cooling unit 107, and a winding unit. Means 108.

  The sheet body conveying means 101 includes a substrate holding unit 110 that holds a substrate wound in a roll shape, a conveyance film holding unit 111 that holds a conveyance film wound in a roll shape, and a roll shape. And a plurality of transport rollers 112 for transporting the transported substrate and the transport film. The substrate wound in a roll shape is subjected to processing such as an electrode, an alignment film, a color filter, and an alignment mark 97.

  The base material of the substrate is mainly a resin material, and as the material, polycarbonate, polyethylene terephthalate, polyethylene naphthalate, polyethylene sulfide, polyimide, etc. can be considered, but in this embodiment, the material is particularly limited. is not. Moreover, the peelable sticking agent is apply | coated to the conveyance film wound by roll shape.

  The transport film and the substrate are preferably made of the same material and have the same width and thickness. This is because by making the elasticity of the substrate and the transport film the same, it is difficult for the substrate to peel off from the transport film after bonding. In addition, since the transparent film of the same material is used for the transport film and the substrate, the alignment mark 97 formed on the substrate can be easily detected by the detection means 31 in the method for manufacturing the liquid crystal display element. Moreover, it is hard to produce a malfunction in the bonding means 28 for curing the sealant.

  The substrate wound in the roll shape is held by the substrate holding unit 110, and the transport film wound in the roll shape is held by the transport film holding unit 111. The substrate and the transport film drawn by the sheet body transport unit 101 are bonded by the sheet body bonding unit 102. The sheet body on which the substrate and the transport film are bonded by the sheet body bonding means 102 is conveyed by the conveyance roll of the sheet body conveying means 101, and is fixed by the cutting means 103 provided downstream from the sheet body bonding means 102. It is cut at intervals.

  In the cutting by the cutting means 103, as shown in FIG. 10, only the sheet substrate is cut at regular intervals, and the transport film is not cut. Further, since the sheet holding unit 113 is provided in the cutting means 103 and the sheet is held, it is possible to prevent the sheet from being displaced during cutting. When the cutting is completed, the sheet body holding unit 113 releases the holding of the sheet body. The cutting means 103 is realized by, for example, a dicing machine.

  The sheet body from which only the substrate has been cut is transported by the sheet body transporting means 101, and the foreign matter adhering to the sheet body during the cutting process is removed by the cleaning means 104 provided on the downstream side of the cutting means 103. In the cleaning means 104, for example, the foreign matter is washed away and removed by spraying pure water onto the sheet body.

  The cleaned sheet body is transported by the sheet body transporting means 101, and clean air is sprayed onto the sheet body by the air ejecting means 105 provided on the downstream side of the cleaning means 104, and water droplets adhering to the sheet body are removed. Is done. The sheet body on which the clean air has been ejected is transported by the sheet body transporting means 101, and is removed by the heating means 106 provided on the downstream side of the air ejecting means 105 in the cleaning process and the moisture absorbed in the sheet body is removed. Is done.

  The sheet body from which the moisture has been removed is transported by the sheet body transporting means 101, and the heated sheet body is cooled by the cooling means 107 provided on the downstream side of the heating means 106. The cooled sheet body is wound into a roll shape by the winding means 108. In order to prevent the substrate from peeling off from the transport sheet during storage, it is desirable to wind up the sheet body so that the side on which the substrate is attached faces the center of the roll. By winding the sheet body, the sheet body is formed, and the manufacturing process of the sheet body wound in a roll shape is completed.

  Moreover, although the process sequence of cut | disconnecting the board | substrate of a sheet | seat body was taken here after bonding a board | substrate and a conveyance film, finally the sheet | seat body of the state by which the board | substrate was continuously affixed on the conveyance film is obtained. In this case, the process order is not particularly limited. For example, after the substrate is cut and washed, the process order in which the cut and washed substrate and the transport film are bonded may be taken. The substrate used in this embodiment is a strip-shaped flexible material substrate in which liquid crystal panel substrates are continuously formed at equal intervals for each panel.

  FIG. 11 is a front view showing a liquid crystal display element manufacturing apparatus 120 according to another embodiment of the present invention. In FIG. 11, parts similar to those of the liquid crystal display element manufacturing apparatus 21 of the embodiment shown in FIGS. 1 to 10 are denoted by the same reference numerals, and description thereof is omitted. In the embodiment shown in FIGS. 1 to 10, the second sheet member 20 including the second substrate 18 and the second conveyance film 19 is held by the second conveyance unit 24, but the implementation shown in FIG. 11 is performed. In the other form, only the 2nd board | substrate 18 is formed continuously and the 2nd sheet | seat body 20b is wound by roll shape.

  In the other form shown by FIG. 11, the 1st sheet | seat body 17 containing the 1st board | substrate 15 and the 1st conveyance film 16 on which the 1st board | substrate 15 is peeled and stuck to the 1st conveyance holding roller 41 is shown. The first roll 17a around which is wound is held. The second conveying and holding roller 46 is configured to hold a second roll 20c around which a second sheet body 20b formed only by the second substrate 18 is wound.

Accordingly, similarly to the liquid crystal display element manufacturing apparatus 21 shown in FIG.
The first sheet body 17 is pulled out from the second roll 20b, the second sheet body 20c is pulled out from the second roll 20b, and conveyed to the bonding position. The liquid crystal substance supply means 27 supplies the liquid crystal substance between the substrates conveyed to the bonding position. Based on the detection result detected by the detection means 31, the first and second drive means 25, 26 are relatively displaced and aligned by the first and second drive means 25, 26.

  When the substrates are aligned, the first and second substrates 15 and 18 are bonded by the bonding means 28. The first transport film 16 of the first sheet body 17 is peeled off from the bonded first and second substrates 15 and 18 and wound around the first transport take-up roller 44. Further, the bonded first and second substrates 15 and 18 are wound around the second conveyance take-up roller 49 and collected.

  In the liquid crystal display element manufacturing apparatus 120 shown in FIG. 11, the first and third substrates bonded to the second transport take-up roller 49 are held, so the liquid crystal display element manufacturing apparatus 21 shown in FIG. It plays the role of the recovery means 30 of the above. The first and second substrates 15 and 18 wound in a roll shape around the second conveying take-up roller 49 can be cut and washed to obtain a substrate for a liquid crystal display element.

  According to the present embodiment, the sheet body wound in a roll shape is pulled out from the roll, and the liquid crystal substance is supplied between the substrates of the sheet body drawn out to the bonding position to be bonded and recovered. The substrate of the liquid crystal display element can be continuously formed. Thus, the process of supplying and bonding the liquid crystal substance between the substrates is made independent, and the room for bonding the substrates, in other words, the chamber 22 can be miniaturized. Accordingly, the substrate of the liquid crystal display element can be formed by supplying and bonding the liquid crystal substance to the substrate while the chamber 22 is decompressed.

  Further, based on the detection result of the detection means 31, the slide displacement drive means 66 and the second drive means 26 of the first drive means 25 relatively displace the first and second transport means 23, 24, and the first The second substrates 15 and 18 can be aligned. Therefore, it is possible to easily and accurately adjust the positional deviation between the first and second substrates 15 and 18, and the liquid crystal material is supplied to the accurately aligned substrate by the liquid crystal material supply means 27, and the bonding means 28 is used. The substrates can be bonded together to form a liquid crystal display element.

It is a flowchart which shows the manufacturing method of the liquid crystal display element which is one Embodiment of this invention. It is a front view which shows the manufacturing apparatus 21 of the liquid crystal display element which can implement | achieve the manufacturing method of the liquid crystal display element shown by FIG. It is sectional drawing which cut | disconnects and shows a part of manufacturing apparatus 21 of a liquid crystal display element. It is a top view which shows the manufacturing apparatus 21 of a liquid crystal display element. It is a figure which simplifies and shows supply of the sealing agent and liquid crystal substance between board | substrates by the sealing agent supply means 27a and the liquid crystal substance supply means 27b provided in the manufacturing apparatus 21 of a liquid crystal display element. FIG. 6 is an enlarged plan view showing a holding unit 29, a detection unit 31 and the vicinity thereof provided in the liquid crystal display element manufacturing apparatus 21 in a state where the first transport unit 23 is close to the second transport unit 24. FIG. 6 is a diagram schematically showing a state in which a substrate on which an alignment mark 97 is formed is pulled out to a bonding position, and the alignment mark 97 is detected by a detecting means 31 through a holding through hole 95. It is a figure which simplifies and shows the process of bonding a board | substrate by the manufacturing apparatus 21 of a liquid crystal display element. It is a figure which simplifies and shows the sheet | seat manufacturing apparatus 100 which forms the sheet body hold | maintained at the 1st conveyance holding roller 41 and the 2nd conveyance holding roller 46, and winds it in roll shape. It is an enlarged view showing a cutting process by a cutting means 103 provided in the sheet body manufacturing apparatus 100. It is a front view which shows the manufacturing apparatus 120 of the liquid crystal display element which shows the other form of this Embodiment. It is the figure which simplifies and shows the manufacturing method of the liquid crystal display element of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 15 1st board | substrate 16 1st conveyance film 17 1st sheet | seat body 17a 1st roll 18 2nd board | substrate 19 2nd conveyance film 20 2nd sheet | seat body 20a 2nd roll 21 Manufacturing apparatus of a liquid crystal display element 22 Chamber 23 1st conveyance means 24 Second transport means 25 First drive means 26 Second drive means 27a Seal supply means 27b Liquid crystal substance supply means 28 Bonding means 29 Holding means 30 Collection means 31 Detection means 32 Control means 41 First transport holding roller 42 First Feed roller 43 Second feed roller 44 First transport take-up roller 45 First transport frame 46 Second transport holding roller 47 Third feed roller 48 Fourth feed roller 49 Second transport take-up roller 50 Second transport frame 55 Peeling part 56 Substrate transport section 57 Storage section

Claims (6)

A first sheet body including a first substrate and a transport film on which the first substrate is detachably attached is wound in a roll shape,
Winding the second sheet body including the second substrate into a roll,
The first and second sheet bodies are pulled out from the roll and conveyed to a bonding position, and a liquid crystal substance is supplied and bonded between the first and second substrates.
A method for producing a liquid crystal display element, wherein the first substrate is peeled off from the transport film and collected together with the second substrate. An alignment mark is formed on each of the first and second substrates,
2. The method of manufacturing a liquid crystal display element according to claim 1, wherein the first and second substrates are relatively aligned and bonded using the alignment mark. The first and second substrates are aligned by displacing at least one of the first transport unit that transports the first sheet member and the second transport unit that transports the second sheet member. Item 3. A method for producing a liquid crystal display element according to Item 1 or 2. Holds a first roll around which a first sheet body including a first substrate and a transport film to which the first substrate is detachably attached is wound, and draws and bonds the first sheet body from the first roll. First conveying means for conveying to a position;
A second conveying means for holding a second roll around which the second sheet body including the second substrate is wound, pulling out the second sheet body from the second roll and conveying it to the bonding position;
Liquid crystal substance supply means for supplying a liquid crystal substance between the first and second substrates at the bonding position;
Proximity / separation driving means for driving the first and second conveying means so that the first and second sheet bodies are relatively close to and separate from each other;
A laminating means for laminating the first and second substrates in a state where the first and second substrates are close to each other;
An apparatus for manufacturing a liquid crystal display element, comprising: recovery means for separating the first substrate from the transport film and recovering the first substrate together with the second substrate. Detecting means for detecting alignment marks formed on the first and second substrates;
5. The apparatus for manufacturing a liquid crystal display element according to claim 4, further comprising alignment means for aligning the first and second substrates based on the detection result of the alignment mark. The alignment unit includes an alignment driving unit that relatively displaces the first and second transfer units in a direction different from the transfer direction of the first and second substrates at the bonding position;
6. The apparatus for manufacturing a liquid crystal display element according to claim 5, further comprising control means for controlling the alignment driving means so as to align the first and second substrates based on a detection result by the detection means.

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