JP2006521566A - 装置の清浄度を証明するための方法およびシステム - Google Patents

装置の清浄度を証明するための方法およびシステム Download PDF

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Publication number
JP2006521566A
JP2006521566A JP2006509352A JP2006509352A JP2006521566A JP 2006521566 A JP2006521566 A JP 2006521566A JP 2006509352 A JP2006509352 A JP 2006509352A JP 2006509352 A JP2006509352 A JP 2006509352A JP 2006521566 A JP2006521566 A JP 2006521566A
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signal strength
test signal
sample
range
target
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Japanese (ja)
Inventor
デボノ，リーノー，フランシス
キャロル，ジョン，ジェイ．
サンダー，ロバート，ブルース
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スミス ディテクション インコーポレーテッド
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Priority claimed from US10/402,525 external-priority patent/US6924477B2/en
Application filed by スミス ディテクション インコーポレーテッド filed Critical スミス ディテクション インコーポレーテッド
Publication of JP2006521566A publication Critical patent/JP2006521566A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2006509352A 2003-03-28 2004-03-26 装置の清浄度を証明するための方法およびシステム Pending JP2006521566A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/402,525 US6924477B2 (en) 2003-03-28 2003-03-28 Method and system for establishing the cleanliness of a device
PCT/US2004/009325 WO2004088278A2 (en) 2003-03-28 2004-03-26 Method and system for establishing the cleanliness of a device

Publications (1)

Publication Number Publication Date
JP2006521566A true JP2006521566A (ja) 2006-09-21

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JP2006509352A Pending JP2006521566A (ja) 2003-03-28 2004-03-26 装置の清浄度を証明するための方法およびシステム

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EP (1) EP1609168A4 (de)
JP (1) JP2006521566A (de)

Also Published As

Publication number Publication date
EP1609168A4 (de) 2007-07-25
EP1609168A2 (de) 2005-12-28

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