JP2006518534A - 走査型電子顕微鏡のためのサンプルエンクロージャと、その使用法 - Google Patents
走査型電子顕微鏡のためのサンプルエンクロージャと、その使用法 Download PDFInfo
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- JP2006518534A JP2006518534A JP2005515862A JP2005515862A JP2006518534A JP 2006518534 A JP2006518534 A JP 2006518534A JP 2005515862 A JP2005515862 A JP 2005515862A JP 2005515862 A JP2005515862 A JP 2005515862A JP 2006518534 A JP2006518534 A JP 2006518534A
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Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44880803P | 2003-02-20 | 2003-02-20 | |
| PCT/IL2003/000454 WO2003104846A2 (en) | 2002-06-05 | 2003-06-01 | A sample enclosure for a scanning electron microscope and methods of use thereof |
| PCT/IL2003/000457 WO2003104848A2 (en) | 2002-06-05 | 2003-06-01 | Methods for sem inspection of fluid containing samples |
| PCT/IL2003/001054 WO2004075209A1 (en) | 2003-02-20 | 2003-12-10 | A sample enclosure for a scanning electron microscope and methods of use thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006518534A true JP2006518534A (ja) | 2006-08-10 |
| JP2006518534A5 JP2006518534A5 (enExample) | 2006-09-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005515862A Pending JP2006518534A (ja) | 2003-02-20 | 2003-12-10 | 走査型電子顕微鏡のためのサンプルエンクロージャと、その使用法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006518534A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008016249A (ja) * | 2006-07-04 | 2008-01-24 | Jeol Ltd | 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム |
| JP2008210765A (ja) * | 2007-01-31 | 2008-09-11 | Jeol Ltd | 試料保持体、試料検査装置及び試料検査方法、並びに試料保持体の製造方法 |
| JP2018137231A (ja) * | 2018-03-23 | 2018-08-30 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材 |
| JPWO2021256412A1 (enExample) * | 2020-06-16 | 2021-12-23 | ||
| US12265041B2 (en) | 2019-10-10 | 2025-04-01 | Hitachi High-Tech Corporation | Thin film damage detection function and charged particle beam device |
-
2003
- 2003-12-10 JP JP2005515862A patent/JP2006518534A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008016249A (ja) * | 2006-07-04 | 2008-01-24 | Jeol Ltd | 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム |
| JP2008210765A (ja) * | 2007-01-31 | 2008-09-11 | Jeol Ltd | 試料保持体、試料検査装置及び試料検査方法、並びに試料保持体の製造方法 |
| JP2018137231A (ja) * | 2018-03-23 | 2018-08-30 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材 |
| US12265041B2 (en) | 2019-10-10 | 2025-04-01 | Hitachi High-Tech Corporation | Thin film damage detection function and charged particle beam device |
| JPWO2021256412A1 (enExample) * | 2020-06-16 | 2021-12-23 | ||
| JP7142404B2 (ja) | 2020-06-16 | 2022-09-27 | 学校法人中部大学 | 走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ |
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