JP2006349442A - Lighting system for inspecting solid state imaging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lighting system for inspection radiating many kinds of illumination light. <P>SOLUTION: The lighting system 2 for inspecting a CCD image sensor 20 comprises: a light source optical system 3 for emitting the illumination light; a plurality of kinds of optical parts for changing the characteristic of the illumination light; an optical part holder 4 for mounting the plurality of kinds of optical parts; a hand 5 for gripping the optical parts, and a robot 6 for positioning this hand 5. When a wide angle lens 22 is used as an optical part, the wide angle lens 22 is positioned in the Z axis direction, and the focus is adjusted. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a solid-state image sensor inspection illumination device that irradiates a solid-state image sensor with illumination light for inspection for characteristics and quality inspection of the solid-state image sensor.

  Solid-state imaging devices such as CCD image sensors are widely used. However, in order to obtain better image quality, higher performance is required. In developing and manufacturing a high-performance CCD image sensor, inspection for examining its characteristics and quality is important. In general, such inspection is performed by generating illumination light for inspection by an inspection illumination device and irradiating the CCD image sensor, and examining the response of the CCD image sensor at this time. The inspection illumination device generates illumination light for inspection having characteristics corresponding to the inspection item by transmitting the illumination light emitted from the light source to various optical components.

  For example, in the inspection illumination device described in Patent Document 1, a plurality of optical paths in which filters having different light transmittances are inserted are set between a light source and a CCD image sensor. It is comprised so that any one may be selected. One inspection illumination device can perform inspection with different amounts of illumination light to be irradiated.

In the inspection illumination device described in Patent Document 2, either an inspection chart or an adapter arranged on the downstream side of the inspection chart is selected on the optical path between the light source and the CCD image sensor. And is configured to be inserted. The adapter is provided with a diffusion plate. When the CCD image sensor is inspected in the state of a wafer, both an inspection performed by projecting an inspection chart and an inspection performed by uniformly illuminating a plurality of CCD image sensors can be performed.
JP-A-10-31778 JP 2003-156406 A

  However, each of the inspection illumination devices described in the above patent documents can generate only two types of illumination light, and the number of inspection items is limited. If it is going to generate | occur | produce many types of illumination light with the structure of patent document 1, the optical path which can be selected must be increased and an apparatus will enlarge. In addition, when trying to generate many types of illumination light with the configuration of Patent Document 2, the optical path length becomes long because a large number of optical components are arranged along the optical path, and the apparatus is also enlarged.

  In addition, along with the demand for higher performance of CCD image sensors, inspection accuracy is also required at a high level. For this reason, in inspection illumination devices, the positioning accuracy of optical components inserted in the optical path is at a high level. It has come to be required. In particular, the positioning of the optical component is required not only on a plane orthogonal to the optical path but also in a direction parallel to the optical path. For example, in order to investigate the influence of shading, the illumination angle of illumination light may be changed using a wide-angle lens or a telephoto lens as an optical component. In this case, focus adjustment of each lens, that is, parallel to the optical path Positioning in a different direction is required.

  An object of the present invention is to provide a small solid-state imaging device inspection illumination device capable of irradiating a wide variety of high-quality illumination light.

  The present invention relates to an illumination apparatus for inspecting a solid-state image sensor that irradiates a solid-state image sensor with illumination light for inspection, a plurality of types of optical components that transmit illumination light from a light source and change characteristics of the illumination light, and the plurality An optical component holder for holding a kind of optical component, a hand for selecting and holding any one optical component from the optical component holder, and displacing the hand, and selecting the selected optical component for the light source and the solid-state imaging device And a hand displacement mechanism for positioning on the optical path between the two.

  The hand displacement mechanism is configured to displace the hand in three axial directions orthogonal to each other, and one of the three axes extends in a direction perpendicular to the inspection surface of the solid-state imaging device. Preferably it is.

  The plurality of types of optical components include a wide-angle lens and a telephoto lens. When these lenses are selected, each lens is moved in the vertical direction by the hand and the hand displacement mechanism to focus. Adjustment is preferably performed.

  According to the solid-state imaging device inspection illumination device of the present invention, a plurality of types of optical components that transmit illumination light from a light source to change the characteristics of the illumination light, and an optical component holder that holds the plurality of types of optical components, , A hand for selecting and holding any one optical component from the optical component holder, and a hand displacement for displacing the hand and positioning the selected optical component on the optical path between the light source and the solid-state imaging device Because it is equipped with a mechanism, it is possible to select one from a plurality of types of optical components according to the inspection, and to position the selected optical components at a precise position with high accuracy. Light can be applied to the solid-state imaging device. Further, a plurality of types of optical components are arranged in the optical component holder, and the optical components corresponding to the inspection are taken out and used, and the apparatus can be miniaturized.

  The hand displacement mechanism is configured to displace the hand in three axial directions orthogonal to each other, and one of the three axes extends in a direction perpendicular to the inspection surface of the solid-state imaging device. Thus, the selected optical component can be positioned with high accuracy in the perpendicular direction. In particular, when a wide-angle lens or a telephoto lens is used as an optical component, focus adjustment of each lens is performed with high accuracy.

  As shown in FIG. 1, a CCD image sensor inspection illumination device (hereinafter referred to as illumination device) 2 includes a light source optical system 3 that emits illumination light, and a plurality of types of optical components that change the characteristics of illumination light (of each optical component). The details will be described later), an optical component holder 4 on which these plural types of optical components are placed, a hand 5 for selecting and gripping any one of the optical components from the optical component holder 4, and positioning the hand 5 And a robot (hand displacement mechanism) 6. In the following description, directions are indicated using an X, Y, Z coordinate system.

  The light source optical system 3 includes a light source 12 that emits illumination light. On the downstream side in the illumination light irradiation direction of the light source 12 (Y-axis minus side), a neutral density filter disc 13, a color filter disc 14, a diffuser plate 15, and a mirror 16 are sequentially arranged. The neutral density filter disc 13 includes a plurality of neutral density filters 13a, 13b, and 13c having different amounts of light reduction along the circumferential direction, and any one neutral density filter is arranged on the optical path by rotation. The color filter disk 14 has a plurality of color filters 14a, 14b, and 14c having different transmission colors along the circumferential direction, and any one color filter is arranged on the optical path by rotation. The neutral density filter and the color filter are switched according to the inspection item. The diffusion plate 15 emits incident illumination light uniformly. The mirror 16 reflects the illumination light emitted from the diffusion plate 15 and advances the illumination light in the negative direction of the Z axis. In addition, the optical path 17 is shown with the dashed-dotted line in the figure.

  Illumination light reflected by the mirror 16 and traveling in the negative direction of the Z axis passes through any one of the plurality of types of optical components and is then applied to the inspection surface 20a of the CCD image sensor 20 to be inspected. The The optical components include a wide-angle lens 22, a telephoto lens 23, an inspection chart 24, and a pattern pin hole 25. The wide-angle lens 22 and the telephoto lens 23 change the illumination angle of illumination light, and are used when inspecting shading or the like. The wide-angle lens 22 has a larger irradiation angle (an angle with respect to a direction perpendicular to the inspection surface 20a). The inspection chart 24 is used when inspecting the resolution. The pattern pin hole 25 has two holes 25a formed on a flat plate. When dust is attached to the CCD image sensor 20, whether the dust is attached on the microlens or on the photosensitive portion. It is used when judging whether it has adhered. The optical parts are not limited to the above four types.

  These optical components are placed on the optical component holder 4 when not in use. Grooves 4a to 4d are formed on the upper surface of the optical component holder 4 so as to correspond to the respective optical components, and each optical component is placed in the grooves 4a to 4d. The above-described inspection chart 24 is provided with four leg portions 24a at the corners, and is easily gripped by the hand 5 described later even when the inspection chart 24 is placed in the groove portion 4c. It has become. The pattern pin hole 25 is also provided with four leg portions 25a at the corners.

  The hand 5 includes a hand body 30 and a grip 31 provided on the hand body 30. The grip 31 can take two states, a closed state in which the grip 31 is closed and the object is gripped, and an open state in which the grip 31 is opened and the object is released. The driving of the grip 31 is controlled by the hand control unit 32, and the hand control unit 32 operates based on an instruction from the system control unit 33.

  The robot 6 positions the hand 5 by displacing the hand 5 in the three axial directions of the X, Y, and Z axes. The robot 6 includes a ball screw 35 extending in the X-axis direction, a motor 36 that rotates the ball screw 35, and a moving block 37 in which a female screw portion that is screwed into the ball screw 35 is formed. The moving block 37 moves in the X-axis direction while maintaining a posture along a guide rail (not shown) as the ball screw 35 rotates.

  The robot 6 has the same configuration as described above, and includes a ball screw 38 extending in the Y-axis direction, a motor 39, and a moving block 40, and also includes a ball screw 41 extending in the Z-axis direction, a motor 42, and a moving block 43. . The moving block 40 moves in the Y-axis direction, and the moving block 43 moves in the Z-axis direction. The motor 39 is fixed to the moving block 37 and the motor 42 is fixed to the moving block 40.

  The hand body 30 of the hand 5 described above is fixed to the moving block 43. Driving of each motor 36, 39, 42 is controlled by a robot control unit 43, and the robot control unit 43 operates based on an instruction from the system control unit 33.

  The robot controller 43 is connected to a memory 44 in which the position information of each optical component on the optical component holder 4 and the position information of the CCD image sensor 20 to be inspected are recorded. Each information. In addition, the structure which calculates the positional information on each optical component etc. based on the image data acquired with the visual sensor may be sufficient.

  An operation unit 45 is connected to the system control unit 33, and the operator can perform various settings such as selection of an inspection item by operating the operation unit 45.

  Hereinafter, the operation of the above configuration will be described. The operator operates the operation unit 45 to select an inspection item. The selected inspection item information is sent to the system control unit 33, and each unit of the illumination device 2 is controlled by the system control unit 33.

  A case where the operator selects an item to be inspected for shading will be described below. When inspecting shading, a wide-angle lens 22 and a telephoto lens 23 are used as optical components. In the light source optical system 3, the neutral density filter disc 13 and the color filter disc 14 rotate, and the neutral density filter and the color filter corresponding to the shading inspection are set.

  Further, the robot 6 is driven to move the hand 5 and the hand 5 opens and closes, and the hand 5 grips the wide-angle lens 22 placed in the groove 4 a of the optical component holder 4. The hand 5 moves to a position where the optical axis of the wide-angle lens 22 coincides with the center of the optical path 17 while holding the wide-angle lens 22. Thereby, the wide-angle lens 22 is positioned on the XY plane. Thereafter, the hand 5 moves in the Z-axis direction, the wide-angle lens 22 is positioned in the Z-axis direction, and the focus is adjusted.

  When the wide-angle lens 22 is positioned in the triaxial direction, illumination light is emitted from the light source 12. The illumination light passes through each filter and the diffusion plate 15, and then passes through the wide-angle lens 22 and is irradiated onto the inspection surface 20 a of the CCD image sensor 20 in a state where the irradiation angle is changed. Then, the response of the CCD image sensor 20 at this time is examined.

  After the inspection using the wide-angle lens 22 is completed, the inspection using the telephoto lens 23 is performed in the same procedure. Thereby, the inspection of the shading of the CCD image sensor 20 is completed.

  When the CCD image sensor 20 that has finished the shading inspection is subjected to another inspection, for example, a resolution inspection or an inspection for identifying the location where dust is attached, the hand 5 holds another optical component, The inspection is performed in the same procedure as above.

  When a plurality of CCD image sensors to be inspected are arranged, after inspecting a plurality of CCD image sensors using predetermined optical parts, the optical parts are replaced, and a plurality of CCD image sensors are again used. The procedure may be such that an inspection is performed on the above.

  In the above-described embodiment, the solid-state imaging device is a CCD image sensor, but may be another device such as a CMOS image sensor.

  In the above embodiment, the robot is an orthogonal coordinate system robot in which three axes are orthogonally combined with each other. However, for example, a three-degree-of-freedom multi-joint robot in which a plurality of arms are connected may be used. In the above-described embodiment, the robot has a configuration with three degrees of freedom. However, when the positioning in the Z-axis direction is not important, a configuration with two degrees of freedom may be used.

  In the above embodiment, the hand is configured to grip the optical component, but may be configured to hold the optical component by magnetic force, for example.

It is explanatory drawing which shows the outline of the illuminating device for CCD image sensor test | inspection.

Explanation of symbols

2 CCD image sensor inspection illumination device 4 Optical component holder 5 Hand 6 Robot 20 CCD image sensor 32 Hand control unit 33 System control unit 43 Robot control unit

Claims (3)

In the solid-state image sensor inspection illumination device that irradiates the solid-state image sensor with illumination light for inspection,
Multiple types of optical components that change the characteristics of the illumination light by transmitting the illumination light from the light source,
An optical component holder for holding the plurality of types of optical components;
A hand that selects and holds any one optical component from the optical component holder;
An illumination device for inspecting a solid-state image sensor, comprising: a hand displacement mechanism for displacing the hand and positioning a selected optical component on an optical path between the light source and the solid-state image sensor.   The hand displacement mechanism is configured to displace the hand in three axial directions orthogonal to each other, and one of the three axes extends in a direction perpendicular to the inspection surface of the solid-state imaging device. The illumination device for testing a solid-state imaging device according to claim 1. The plurality of types of optical components include a wide-angle lens and a telephoto lens. When these lenses are selected, each lens is moved in the vertical direction by the hand and the hand displacement mechanism to focus. The solid-state imaging device inspection illumination device according to claim 2, wherein adjustment is performed.

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