JP2006341322A - Method for processing inorganic material nanostructure and processing device therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To process an inorganic material nanostructure to artificially produce pores or defects in a large amount in a short time and to significantly promote an industrial usage of the material. <P>SOLUTION: A solution 3 in which an inorganic material nanostructure 2 having a ring arrangement structure is housed or fluidized in a narrow space, at least one face forming the space is vibrated at a high frequency against another opposing face, and cavitation bubbles 100 produced by the vibration collapse to generate shock waves, which produce fine pores 102 in the inorganic material nanostructure 2 or fracture the inorganic material nanostructure. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for processing an inorganic material nanostructure that uses a shock wave generated when a cavitation bubble collapses to open a fine hole in the inorganic material nanostructure or break the inorganic material nanostructure. Relates to the device.

In recent years, a processing method has been developed in which pores are made in inorganic material nanostructures. For example, in a solvent body in which carbon nanotubes are dispersed, ultrasonic irradiation intensity of 250 to 350 W / cm ^{2 is} applied for several hours. Thus, it has been proposed to impart either pores or defects to the surface of the carbon nanotube (see Patent Document 1).

  According to this proposal, it becomes possible to cut carbon nanotubes and the like, and freely move ions, atoms, molecules and the like into and out of the carbon nanotubes.

However, in the case of this prior art, the method depends only on the irradiation intensity (acoustic intensity) of ultrasonic waves.
JP 2003-205499 A

  In the above-described conventional technology, since the method depends only on the irradiation intensity (acoustic intensity) of ultrasonic waves, it is not always possible to perform processing with high energy, and before the pores are opened in the inorganic material nanostructure. It has a long time and a small number of holes can be formed.

  Actually, in order to use at an industrial level, fine pores are opened in the inorganic material nanostructure, or in order to break the inorganic material nanostructure, pores or defects are formed in the inorganic material nanostructure. Means to artificially produce a large amount in a short time are required.

  The present invention has been made in view of such circumstances, and it is possible to artificially process a large number of pores or defects in an inorganic material nanostructure in a short time, greatly promoting industrial use. An object of the present invention is to provide a processing method and a processing apparatus for an inorganic material nanostructure that can be processed.

  According to the inventor's investigation, a vibrating body that vibrates at high frequency in a solution in which inorganic material nanostructures are dispersed and a reflector that reflects the vibration of the mixed liquid by the vibrating body are arranged, and a narrow space is formed between them. When the vibrating body is made to oppose a high frequency with a space, an extremely high cavitation effect is given to the solution in which the inorganic material nanostructure is dispersed, and a large number of pores or defects are formed in the inorganic material nanostructure, It has been found that micropores are opened or broken in a short time.

  That is, when a solution in which an inorganic material nanostructure is dispersed is introduced into a narrow space between the vibrator and the reflector, and the vibrator is operated in a direction away from the reflector, the vibrator and the reflector A field that instantaneously becomes negative pressure is formed in this narrow space, and bubbles, that is, cavitation bubbles are generated in the solution by the negative pressure.

  Next, when the vibrator is operated in a direction approaching the reflector by high-frequency vibration, a high-pressure field is instantaneously formed, and the cavitation bubbles are collapsed by the high pressure. When the cavitation bubble collapses, a high-pressure shock wave (shock wave generated when the bubble collapses) is generated. This shock wave acts as a breaking energy on the inorganic material nanostructure in the solution, and when the cavitation bubble collapses, the inorganic material nanostructure opens a fine hole or breaks the inorganic material nanostructure outward The destruction energy is generated.

Thus, a large impact pressure is generated when the cavitation bubbles collapse, and the generated impact pressure reaches several hundred MPa depending on conditions. When this generated pressure is converted into acoustic irradiation intensity, it corresponds to several hundred thousand W / cm ² .

  The shock wave is reflected between the vibrating body and the reflector, becomes a shock wave reflection wave, and repeatedly acts as a shock wave on the inorganic material nanostructure again. This makes it possible to instantaneously cut the carbon nanotubes or open the pores.

  In particular, when a vibrating body is vibrated in an ultrasonic region of 500 Hz or more, a large number of micropores are opened in the inorganic material nanostructure due to the synergistic effect of impact pressure due to cavitation and ultrasonic vibration, and the inorganic material nanostructure. The cutting action is performed. In this case, it is desirable that the narrow spacing between the opposing surfaces of the space between the vibrating body and the reflector is 10 mm or less.

  The present invention is based on such knowledge, and in the invention according to claim 1, the solution in which the inorganic material nanostructure having a member ring arrangement structure is dispersed is contained or flowed in a narrow space, At least one surface forming a space is vibrated at a high frequency with respect to the other surface opposite to the surface, and fine holes are opened in the inorganic material nanostructure by a shock wave generated when the cavitation bubbles generated by the vibration collapse. Or a processing method of the inorganic material nanostructure, wherein the inorganic material nanostructure is subjected to a treatment for breaking.

  The invention according to claim 2 provides a processing method of an inorganic material nanostructure in which the space between the opposing surfaces having a narrow space is 10 mm or less.

  In the invention which concerns on Claim 3, the processing method of the inorganic material nanostructure of Claim 1 which makes the vibration frequency which generates the said cavitation bubble into a high frequency area | region of 500 Hz or more is provided.

  In the invention according to claim 4, as the inorganic material nanostructure, a conductor or semiconductor such as silicon having a regular member ring arrangement structure and having a dimension of at least one direction in three dimensions in a nanometer region. A method of processing an inorganic material nanostructure to be applied is provided.

  In the invention according to claim 5, as the inorganic material nanostructure, an inorganic material to which a carbon nanotube having a six-membered ring arrangement structure of carbon and having a dimension of at least one direction in three dimensions in a nanometer region is applied. A method for processing a nanostructure is provided.

  In the invention according to claim 6, after opening a fine hole in the inorganic material nanostructure or breaking the inorganic material nanostructure, the inorganic material nanostructure is separated from the solution, and the separation is performed. Provided is a method for processing an inorganic material nanostructure which is subjected to a stabilization treatment for stabilizing the shape of the opening or fractured portion by subjecting the inorganic material nanostructure to heat treatment.

  In the invention according to claim 7, an inorganic material nanostructure to which a tube having a member ring arrangement structure and enclosing atoms or molecules of an inorganic material such as a metal inside is applied as the inorganic material nanostructure. Provide a processing method.

  In the invention according to claim 8, a processing container having a narrow space for containing or flowing a solution in which the inorganic material nanostructure having a member ring arrangement structure is dispersed, and at least forming the narrow space in the processing container. High-frequency vibration means that vibrates at least one of the one surface and the other surface opposite to the other surface toward the other, the high-frequency vibration means when the cavitation bubbles generated by the vibration collapse A processing apparatus for an inorganic material nanostructure, characterized in that, by a shock wave, a fine hole is opened in the inorganic material nanostructure or vibration energy is generated to break the inorganic material nanostructure. I will provide a.

  In the invention which concerns on Claim 9, the space | interval of one surface which forms the said narrow space where the high frequency vibration is provided in the said processing container, and the other surface facing this is set to 10 mm or less. An apparatus for processing an inorganic material nanostructure is provided.

  In the invention which concerns on Claim 10, the vibration frequency which generates the said cavitation bubble provides the processing apparatus of the inorganic material nanostructure set to the high frequency area | region of 500 Hz or more.

  According to an eleventh aspect of the present invention, the high-frequency vibration generator provides a processing apparatus for an inorganic material nanostructure having a vibrating portion made of a giant magnetostrictive material or a piezoelectric ceramic material as means for generating the cavitation bubbles. To do.

  According to the present invention, fine cavitation bubbles and shock waves generated by the collapse of the cavitation bubbles can be continuously generated by vibrating the vibrating body at a high frequency in a solution in which a narrow space portion is formed. It is possible to stably generate a high-density shock wave space.

  When a solution in which inorganic material nanotubes are mixed and diffused is supplied to the shock wave space, the shock waves generated in the space repeatedly act on the surface of the inorganic material nanotubes, thereby cutting the inorganic material nanotubes or forming openings.

  Inorganic material nanotubes are materials with high tensile strength, so they cannot be ruptured by normal force, but by repeatedly acting shock waves of several hundred MPa, breakage or opening can be formed, and nanotubes break in a short time. Alternatively, the opening can be formed, and the opening process, which previously took several hours, can be shortened to a few seconds, and nanotubes of inorganic material can be processed in a large amount in a short time and at low cost. Practical usability can be greatly improved.

  DESCRIPTION OF EMBODIMENTS Hereinafter, an embodiment of an inorganic material nanostructure processing method and a processing apparatus according to the present invention will be described with reference to the drawings.

[First Embodiment (FIGS. 1 to 3)]
The inorganic material nanostructure processing apparatus of the present embodiment basically includes a processing container having a narrow space for containing or flowing a solution in which an inorganic material nanostructure having a member ring arrangement structure is dispersed, and the inside of the processing container. There is provided high-frequency vibration means for high-frequency vibration of at least one of at least one surface forming the narrow space and the other surface opposed thereto toward the other.

  The high-frequency vibration means generates vibration energy that opens a fine hole in the inorganic material nanostructure or breaks the inorganic material nanostructure by a shock wave generated when the cavitation bubbles generated by the high-frequency vibration collapse. It is set.

  Using this apparatus, in the method for processing an inorganic material nanostructure of the present embodiment, a solution in which an inorganic material nanostructure having a member ring arrangement structure is dispersed is contained or flowed in a narrow space, and the space is formed. At least one surface to be formed is vibrated at a high frequency relative to the other surface opposite to the surface, and fine holes are opened in the inorganic material nanostructure by a shock wave generated when the cavitation bubbles generated by the vibration collapse, or A process of breaking the inorganic material nanostructure is performed.

  In the following embodiments, as a specific example of the inorganic material nanostructure, a carbon nanotube having a six-membered ring arrangement structure of carbon and having a dimension of at least one direction in three dimensions in a nanometer is applied. Will be described.

  FIG. 1 is a configuration diagram showing a partial section of an inorganic material nanostructure processing apparatus, and FIG. 2 is an explanatory diagram showing a cavitation action. FIG. 3 is an explanatory diagram showing the opening and breaking action of micropores in a carbon nanotube that is an inorganic material nanostructure.

  As shown in FIG. 1, the inorganic material nanostructure processing apparatus 1 according to this embodiment includes a raw material mixing tank 4 that stores a carbon nanotube 2 having a six-membered ring arrangement structure and an acidic solution 3, for example. The raw material mixing tank 4 is provided with a stirring device 5, and the carbon nanotubes 2 and the solution 3 in the raw material mixing tank 4 are mixed by the stirring device 5. As a result, a mixed liquid 6 in which the carbon nanotubes 2 are uniformly dispersed in the solution 3 is accommodated in the raw material mixing tank 4.

  A mixed liquid supply pipe 7 is connected to the raw material mixing tank 4, and a mixed liquid supply pump 8 and a flow rate adjusting valve 9 are provided in the mixed liquid supply pipe 7. The mixed liquid supply pipe 7 is connected to a processing container 10 for cavitation treatment, and the mixed liquid 6 is continuously supplied to the processing container 10 from the mixed liquid supply pipe 7 at a predetermined flow rate.

  The processing container 10 is configured as, for example, a vertical cylindrical sealed container, and a vibration body 11 that vibrates at a high frequency in the vertical direction is horizontally disposed at a central position in the vicinity of the bottom in the processing container 10. Further, a horizontal reflector 12 facing the vibrating body 11 is provided on the inner surface side of the bottom wall portion of the processing container 10. Note that the arrangement of the vibrating body 11 and the reflector 12 is an example, and may be, for example, an arrangement in which the vibrating body 11 and the reflecting body 12 face each other in a horizontal direction or an inclined direction. Further, in the illustrated example, one pair of the vibrating body 11 and the reflector 12 is disposed in the processing container 10, but a plurality of pairs may be disposed.

  A small-diameter mixed liquid inlet (nozzle) 13 penetrating the bottom wall and the reflector 12 is formed at the center of the bottom wall of the processing container 10, and the mixed liquid supply pipe 7 is connected to the mixed liquid inlet. ing. As a result, the mixed liquid supplied from the raw material mixing tank 4 through the mixed liquid supply pipe 7 flows upward from the bottom wall of the processing vessel and the mixed liquid inlet 13 of the reflector, and is reflected from the lower surface of the vibrating body 11. It is accommodated in a narrow space between the upper surface of the body 12 and flows toward the outer peripheral side of the vibrating body 11 and the reflector 12.

  Further, a liquid discharge port 14 is opened on the side wall of the processing container 10, and a liquid discharge pipe 15 having a flow rate adjusting valve 16 is connected to the liquid discharge port 14, and the mixed liquid after the processing is collected, for example, in a lower position It is discharged to the tank 17.

  Next, the configuration of the vibrating body 11 and the reflector 1 will be described in detail. As shown in FIG. 1, the vibrating body 11 is configured as a thick plate-shaped piece having a certain thickness. A central portion of the vibrating body 11 is connected to a lower end of a vertical vibration shaft 18 penetrating from above through the upper wall of the processing vessel 10, and an upper end of the vibration shaft 18 is connected to a high frequency vibration generator 19. Yes.

  The high-frequency vibration generator 19 includes a high-frequency coil 20 and a vibrator 21 disposed at the center position of the high-frequency coil 20 in a case, and is stationary above the processing vessel 10 via an arm 22. The unit 23 is fixedly installed. The vibrator 21 is made of, for example, a piezoelectric element or a giant magnetostrictive material. Note that the vibrating body 11, the vibration shaft 18, and the vibrator 21 may be formed as an integral structure with the same material.

  The high frequency coil 20 is connected to a high frequency power supply device 24 via a power cable 25 and is supplied with high frequency power. The high-frequency power supply device 24 converts the frequency of power from a basic power supply such as a commercial power supply (not shown) to generate a high-frequency current.

  The high frequency current generated by the high frequency power supply device 24 is applied to the high frequency coil 20 to vibrate the vibrator 21 in the vertical direction (arrow a direction) at high frequency. Then, the vibration of the vibrator 21 is transmitted to the vibrating body 11 via the vibrating shaft 18 and the vibrating body 11 vibrates at high frequency. The high-frequency vibration region of the vibrator 21 and hence the vibrating body 11 is set to, for example, a high-frequency region (500 Hz) or higher.

  The vibrating body 11 and the reflector 12 are opposed to each other through a narrow space, and a gap δ which is a facing distance is set and held in a gap of 0.1 mm or more and 10 mm or less, for example, several mm.

  The vibrating body 11 and the reflecting body 12 are made of a material having high hardness, for example, a hard material such as ceramics or cemented carbide, or the like, or a part constituting at least the opposing surfaces. Thereby, the vibrating body 11 and the reflector 12 are configured to have a high strength enough to withstand shock waves generated when the cavitation bubbles collapse, and not to be eroded. In addition, when only the facing part of the vibrating body 11 and the reflector 12 is to have high hardness, the surface of the base material such as various metals is subjected to surface treatment by hard plating of ceramics or super high alloy. be able to.

As the ceramic, for example, alumina (Al ₂ O ₃ ), aluminum nitride (AlN), silicon carbide (SiC), zirconia (ZyO ₂ ), and the like are applied.

  Further, as the cemented carbide, for example, tungsten carbide (WC), tungsten carbide-cobalt alloy (WC-Co, WC-TiC-Co, WC-TiC-TaC-Co, etc.), stellite, etc. are applied. .

  Next, the operation will be described.

  First, the carbon nanotubes 2 and the solution 3 are supplied to the raw material mixing tank 4 and sufficiently mixed by the stirring device 5 to obtain a mixed solution 6 in a state where the carbon nanotubes 2 are uniformly dispersed in the solution 3.

  The liquid mixture 6 is continuously supplied from the liquid mixture supply pipe 7 to the processing container 10 by driving the liquid mixture supply pump 8. In this case, a predetermined amount of the carbon nanotubes 2 and the solution 3 required for the cavitation process are set by operating the mixed liquid flow rate adjusting valve 9.

  The supplied mixed liquid 6 is opened through a small-diameter mixed liquid inlet 13 that opens in the bottom wall of the processing vessel 10 and the central portion of the reflector 12, and the carbon nanotube 2 and the mixed liquid 3 are mixed. The liquid 6 flows from the raw material mixing tank 4 to the lower surface of the vibrating body 11 via the mixed liquid supply pipe 7. Thereby, the lower surface of the vibrating body 11 will be in the state immersed in the liquid mixture 6 in which the carbon nanotube 2 was mixed.

  In this state, when the high-frequency vibration generator 19 is activated and the vibrating body 11 is vibrated at a high frequency in the mixed liquid 6, fine cavitation is formed in a narrow space between the lower surface of the vibrating body 11 and the upper surface of the reflector 12. A cavitation generating unit 26 in which bubbles are generated at a high density is formed.

  In the cavitation generating unit 26, as will be described later, generation and collapse of cavitation bubbles are repeated, and the carbon nanotubes 2 in the mixed liquid 6 are cut or fine openings are formed by shock waves generated when the cavitation bubbles collapse. Is done.

  The carbon nanotubes 2 are discharged to the collection tank 17 through the liquid discharge pipe 15 as the mixed liquid 6 although they are cut by the shock wave generated when the cavitation bubbles collapse or the fine holes are formed.

  FIG. 2 is an operation explanatory view showing the processing mechanism of the carbon nanotube by the shock wave of the cavitation bubble by the vibrating body 11. With reference to FIG. 2, the action of the shock wave in the cavitation generating portion will be described in more detail.

  As shown in FIG. 2, the carbon nanotubes 2 in the mixed liquid 6 ejected between the vibrating body 11 and the reflector 12 operate so that the vibrating body 11 faces upward (vibration direction “a”; the direction away from the reflector 12). Then, a field that instantaneously becomes negative pressure is formed between the vibrating body 11 and the reflector 12, and bubbles, that is, cavitation bubbles 100 are generated in the liquid mixture 6 by the negative pressure. In particular, the vibrating body 11 and the reflecting body 12 are opposed to the reflecting body 12 with a narrow gap δ between them, and the vibrating body 11 is instantaneously moved upward in a state where the gap δ maintains a minute space of 10 mm or less. Then, the space on the lower surface side of the vibrating body 11 instantaneously becomes negative pressure, a pressure field equal to or lower than the saturated vapor pressure of the solution 3 is formed, and fine bubbles 100 called cavitation bubbles are generated.

  A large number of the cavitation bubbles 100 are generated in the mixed liquid 6, and when the vibrating body 11 operates downward at the next moment due to the high frequency vibration, a high pressure field is formed contrary to the above, and the generated cavitation bubbles 100 are generated. Is destroyed by high pressure. When the cavitation bubble 100 collapses, a high-pressure shock wave reaching several hundred MPa (shock wave generated during bubble collapse: arrow f) is generated. The shock wave f acts on the carbon nanotube 2 as processing energy. In particular, when the cavitation bubbles 100 generated in the mixed liquid 6 are collapsed, outward breaking energy is generated. As a result, the shock wave f is reflected between the vibrating body 11 and the reflector 12 with respect to the carbon nanotube, and further becomes a shock reflected wave (hereinafter simply referred to as “reflected wave”: arrow g), and again the carbon nanotube 2 It acts repeatedly as a shock wave.

  The shock wave f generated at this time is diffused and attenuated as the distance increases, so that it hardly acts as a shock wave on the other side of several tens of millimeters, but the gap δ is several millimeters to several millimeters. When the value is 100 microns, the shock wave f generated by the collapse of the cavitation bubble 100 interacts with the other cavitation bubbles 100 to generate a reflected wave g, part of which is generated between the surfaces of the vibrator 11 and the reflector 12. Repeat the reflection.

  As described above, when the vibrating body 11 vibrates at a high frequency in the mixed liquid, the formation and collapse of the fine cavitation bubbles 100 are repeated by the ultrahigh-speed reciprocation of the vibrating body 11 with respect to the carbon nanotube 2. A large impact pressure is generated when the cavitation bubble 100 is collapsed, and the generated impact pressure reaches several hundred MPa depending on conditions. The impact pressure reaching several hundred MPa can be clearly observed in the present embodiment in which high-frequency vibration is set.

  FIG. 3 is a schematic diagram showing a state in which fine holes are opened and broken in the carbon nanotube 2 having a six-membered ring arrangement structure. The diameter d of the carbon nanotube 2 shown in FIG. 3 is, for example, 10 to 50 nm.

  As shown in FIG. 3, in the cavitation generating unit 26, the shock wave f generated when the cavitation bubble 100 collapses and the reflected wave g of the generated shock wave f act on the carbon nanotube 2.

  That is, when the vibrating body 11 is vibrated in a high frequency region of 500 Hz or more, the shock wave f generated by the collapse of the cavitation bubble 100 that acts on the member ring arrangement molecules and atoms in the carbon nanotube 2 and is generated in the cavitation generation region, Due to the interaction of the reflected wave g generated by the reflection of the shock wave f, a large number of fine holes 102 are opened in the carbon nanotube 2 and a process such as breaking is performed (broken part 101).

  In particular, when the cavitation bubble 100 is generated in a narrow space with high density, the cavitation bubble 100 itself also acts as a reflector of the shock wave f, so that a state in which the shock wave f is confined in the narrow space is formed. When the mixed liquid 6 in which the carbon nanotube 2 is mixed is disposed in the space where the shock wave f is confined, the shock wave f and the reflected wave g continuously act on the surface of the carbon nanotube 2, The nanotube 2 is broken and a fine hole 102 is formed in the side surface of the tube.

  The diameter of the hole 102 is, for example, several to several tens of nm, and can be changed depending on the relationship between the cavitation processing time and the energy intensity of cavitation. For example, even when the processing strength is small, if the processing time is lengthened, the number of fracture portions 101 and holes 102 can be increased, and the diameter of the holes 102 can be increased.

  As described above, according to the present embodiment, the carbon nanotube 2 can be broken or formed in a short time, and the conventional opening process, which required several hours, can be shortened to several seconds. The nanotubes 2 can be processed in a large amount in a short time and at a low cost, and it is possible to greatly promote industrial practical utility.

[Second Embodiment (FIG. 4)]
In the present embodiment, the carbon nanotube 2 is separated from the solution 3 after the fine holes 102 are opened in the carbon nanotube 2 or the carbon nanotube 2 is broken according to the first embodiment, and the separated carbon nanotube 2 is separated. An inorganic material nanostructure processing method and a processing apparatus for performing a stabilization process for stabilizing the shape of the opening or the fractured part by performing a heat treatment or the like will be described.

  FIG. 4 is a block diagram showing a nanostructure processing apparatus.

  As shown in FIG. 4, in this embodiment, a supply pipe 31 for supplying processed nanotubes is provided in the processing container 10, and a supply pump 32 is provided in the supply pipe 31. At the tip of the feed pipe 31, a nanotube separation device 33 is provided. This nanotube separation device 33 is a swirling flow type solid-liquid separation device utilizing the specific gravity difference between the solution 3 and the nanotube 2.

  A mixed liquid return pipe 34 and a nanotube feed pipe 35 are connected to the nanotube separator 33. The mixed liquid return pipe 34 is provided with a mixed liquid return pump 36, and the mixed liquid return pipe 34 is connected to the raw material mixing tank 4. The mixed liquid separated from the nanotubes by the nanotube separation device 33 is returned again to the raw material mixing tank 4 by the mixed liquid return pump 36 and reused.

  On the other hand, a nanotube processing tank 37 is connected to the nanotube feed pipe 35. The nanotube processing tank 37 is supplied with the concentrated nanotubes on the outer periphery of the nanotube separator 33. The nanotube treatment tank 37 is alternately supplied with a neutralization solution 38 for the acidic solution in which the nanotubes 2 are dispersed and a nanotube washing solution 39 for washing the nanotubes 2, and a process of repeating neutralization and washing is performed. It is configured to be performed.

  Then, after the nanotube 2 is brought into a predetermined clean state by the nanotube cleaning liquid 39, it is fed to the vacuum processing tank 41 by the cut nanotube feeding pipe 40.

  The vacuum processing tank 41 is provided with a vacuum blower 43, and ions that have entered the surface or inside of the nanotube 2 in the vacuum space in the vacuum processing tank 41 in which the supplied nanotube 2 is formed by the vacuum blower 43. Etc. are forcibly removed.

  A nanotube extraction tube 44 is connected to the vacuum processing tank 41, and the nanotube 2 a in which a predetermined clean state is ensured is supplied to the nanotube storage tank 45 and stored therein.

  The nanotube storage tank 45 is provided with a supply pipe 46, a supply pump 47, and a flow rate adjusting valve 48 so that the nanotube 2a cleaned in the nanotube storage tank 45 is supplied. A heat treatment furnace 49 is connected to the supply pipe 46.

  The heat treatment furnace 49 includes a heater 50 and has a function of heat-treating the supplied nanotube 2a in a high-temperature oxygen atmosphere at about 800 ° C. for a predetermined time. The heater 50 is connected to a power source (not shown) via a heating wiring 51. In the heat treatment furnace 49, the nanotube 2a is heat-treated for a certain period of time, so that the fractured portion 101 of the nanotube 2a or the opened hole 102 is prevented from being closed again in the six-membered ring lattice state.

  Further, the heat treatment furnace 49 is provided with a nanotube discharge pipe 52 and a discharge valve 53 so that the heat-treated nanotube 2 c can be supplied to the tank 54.

  The heat-treated nanotubes 2c that have been heat-treated are stored in the tank 54, cooled, and then used for other purposes described later.

  Next, the operation of the present embodiment having the above configuration will be described.

  First, the carbon nanotube 2 cut by the shock wave generated when the cavitation bubble 100 described in the first embodiment collapses or the fine hole 102 is opened is fed to the nanotube separation device 33 by the feed pump 32. .

  In the nanotube separator 33, solid-liquid separation is performed by a swirling flow using the specific gravity difference between the solution 3 and the nanotube 2, and the nanotube 2 concentrated on the outer peripheral portion is sent to the nanotube processing tank 37 via the nanotube feed pipe 35. Be paid.

  The solution 3 separated from the nanotubes in the nanotube separator 33 is returned again to the raw material mixing tank 4 by the mixed liquid return pump 36 and reused.

  In the nanotube processing tank 37, the neutralizing solution 38 and the nanotube cleaning solution 39 of the nanotube solution are alternately supplied, and neutralization and cleaning are repeated.

  When the nanotube 2 is in a predetermined clean state, it is fed to the vacuum processing tank 41 by the cut nanotube feed pipe 40. In the vacuum space formed by the vacuum blower 43 provided in the vacuum processing tank 41, the supplied nanotubes 2 are forcibly removed of ions entering the surface and inside of the nanotubes 2.

  The nanotube 2 in which a predetermined clean state is ensured is stored in the nanotube storage tank 45 through the nanotube take-out pipe 44.

  The treated nanotubes 2 a stored in the nanotube storage tank 45 are fed to the heat treatment furnace 49 by the pump 47. In the heat treatment furnace 49, heat treatment is performed for a certain period of time in a high-temperature oxygen atmosphere of about 800 ° C. by the heater 50 in order to prevent the breakage or opening of the broken or opened nanotube from being closed again in a six-membered ring lattice state. And the re-occlusion of the cut portion 101 of the nanotube 2a or the opening portion of the fine hole 102 is prevented.

  The heat-treated nanotubes 2c that have been heat-treated are stored in the tank 54, cooled, and then used for other purposes.

[Third Embodiment]
In the above embodiment, the carbon nanotube 2 is applied as the inorganic material nanostructure. However, in this embodiment, various inorganic material nanostructures can be applied.

  For example, as the inorganic material nanostructure, a conductor or semiconductor such as silicon having a regular member ring arrangement structure and having a dimension of at least one direction in three dimensions in a nanometer can be used.

  Further, as the inorganic material nanostructure, a carbon nanotube having a six-membered ring arrangement structure of carbon and having a dimension in at least one direction in three dimensions in a nanometer can be applied.

  Furthermore, it is also possible to apply an inorganic material nanostructure that applies carbon nanotubes or other tubes having a member ring arrangement structure that includes atoms or molecules of an inorganic material such as metal inside. .

[Other Embodiments]
In the present embodiment, the utilization form after cooling will be described with respect to the heat-treated nanotube 2c heat-treated in the second embodiment.

  First, the heat-treated nanotube 2c can be used as an electrode material of a lithium ion battery, for example. In this case, a storage battery that repeatedly charges and discharges by storing charges by allowing lithium ions to be occluded from the opening of the fractured nanotube 2c and discharging the charges in the opposite direction. Can be used as

  Thus, by reversibly encapsulating lithium ions in the nanotube 2c, a large amount of lithium ions can be stored and released, and a small and large capacity storage battery can be manufactured and provided.

  The heat-treated nanotube 2c can also be used as a chemical catalyst, for example. The molecules or atoms of the substance to be extracted from the solution are prepared in advance as nanotubes of a size that can be encapsulated, and the heat-treated nanotubes 2c are administered to the solution to be extracted by the above processing method. The substance to be extracted is encapsulated in the tube from the opening, the encapsulated tube is separated from the solution, and the substance to be extracted from the separated tube is extracted using a solvent or the like at the atomic or molecular level. It becomes possible to easily extract a uniform substance.

  Furthermore, the heat-treated nanotube 2c can be used as an extraction means for extracting specific cells, for example, in the bio field. Nanotubes having a size capable of enclosing cell molecules to be extracted from various culture solutions are prepared in advance, and the heat-treated nanotubes 2c are administered to the culture solution to be extracted by the above processing method. A specific cell to be extracted from a broken or opened portion is encapsulated in a tube, the encapsulated tube is separated from the solution, and the specific cell extracted from the separated tube is extracted using a solvent or the like. It becomes possible to easily extract specific cells uniformly arranged at a level.

  According to the above embodiment, practical utility in industry can be greatly improved.

The block diagram which shows 1st Embodiment of the inorganic material nanostructure processing apparatus which concerns on this invention. Action explanatory drawing which shows the cavitation action of the said 1st Embodiment. Action | operation explanatory drawing which shows the processing state of the carbon nanotube by the said 1st Embodiment. The block diagram which shows 1st Embodiment of the inorganic material nanostructure processing apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inorganic material nanostructure processing apparatus 2 Carbon nanotube 3 Solution 4 Raw material mixing tank 5 Stirrer 6 Mixture 7 Mixture supply pipe 8 Mixture supply pump 9 Flow control valve 10 Processing vessel 11 Vibrator 12 Reflector 13 Mixture Inlet (nozzle)
14 Liquid discharge port 15 Liquid discharge pipe 16 Flow rate adjusting valve 17 Collection tank 18 Vibration shaft 19 High-frequency vibration generator 20 High-frequency coil 21 Vibrator 22 Arm 23 Stationary portion 24 High-frequency power supply 25 Power cable 31 Feed pipe 32 Feed pump 33 Nanotube separator 34 Mixed liquid return pipe 35 Nanotube feed pipe 36 Mixed liquid return pump 37 Nanotube processing tank 38 Neutralizing liquid 39 Nanotube cleaning liquid 40 Cutting nanotube feed pipe 41 Vacuum processing tank 43 Vacuum blower 44 Nanotube take-out pipe 45 Nanotube storage tank 46 Feeding pipe 47 Feeding pump 48 Flow rate adjusting valve 49 Heat treatment furnace 50 Heater 51 Heating wire 52 Nanotube discharge pipe 53 Discharge valve 54 Tank 100 Cavitation bubble 102 Hole 101 Breaking part

Claims (11)

A solution in which an inorganic material nanostructure having a member ring arrangement structure is dispersed is accommodated or flowed in a narrow space, and at least one surface forming the space is vibrated at a high frequency with respect to another surface facing the solution. Inorganic material characterized in that a fine hole is opened in the inorganic material nanostructure or the inorganic material nanostructure is broken by a shock wave generated when the cavitation bubbles generated by the vibration collapse Nanostructure processing method. The method for processing an inorganic material nanostructure according to claim 1, wherein an interval between the opposing surfaces having a narrow space is set to 10 mm or less. The method for processing an inorganic material nanostructure according to claim 1, wherein a vibration frequency for generating the cavitation bubbles is in a high frequency region of 500 Hz or more. The inorganic material according to claim 1, wherein a conductor or semiconductor such as silicon having a regular member ring arrangement structure and having a dimension in at least one direction in three dimensions in a nanometer region is applied as the inorganic material nanostructure. Processing method of material nanostructure. The inorganic material nanostructure according to claim 1, wherein the inorganic material nanostructure is a carbon nanotube having a six-membered ring arrangement structure of carbon and having a dimension of at least one direction in three dimensions in a nanometer region. Processing method. After opening a fine hole in the inorganic material nanostructure or breaking the inorganic material nanostructure, the inorganic material nanostructure is separated from the solution, and the separated inorganic material nanostructure is heated. The method for processing an inorganic material nanostructure according to claim 1, wherein a stabilization treatment is performed to stabilize the shape of the opening or the fractured portion. The method for processing an inorganic material nanostructure according to claim 1, wherein the inorganic material nanostructure is a tube having a member ring arrangement structure and encapsulating atoms or molecules of an inorganic material such as a metal inside. A processing container having a narrow space for containing or flowing a solution in which an inorganic material nanostructure having a member ring arrangement structure is dispersed, and at least one surface forming the narrow space in the processing container is opposed to the processing container. High-frequency vibration means for high-frequency vibration of at least one of the other surfaces toward the other, the high-frequency vibration means, the inorganic material nanostructure by the shock wave when the cavitation bubbles generated by the vibration collapses An apparatus for processing an inorganic material nanostructure, characterized in that a fine hole is opened in the body or vibration energy is generated to break the inorganic material nanostructure. The inorganic material nanostructure according to claim 8, wherein an interval between one surface forming the narrow space to which high-frequency vibration is applied in the processing container and another surface facing the surface is set to 10 mm or less. Structure processing equipment. The processing apparatus for an inorganic material nanostructure according to claim 8, wherein a vibration frequency for generating the cavitation bubbles is set in a high frequency region of 500 Hz or more. The said high frequency vibration generator is a processing apparatus of the inorganic material nanostructure of Claim 8 which has a vibration part comprised by the giant magnetostrictive material or the piezoelectric ceramic material as a means to generate | occur | produce the said cavitation bubble.

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