JP2006337641A5

JP2006337641A5 -

Info

Publication number: JP2006337641A5
Application number: JP2005161167A
Authority: JP
Filing date: 2005-06-01
Publication date: 2008-05-22
Anticipated expiration: 2025-06-01

Claims

A prism manufacturing method for manufacturing a prism in which a dielectric multilayer film is formed at a predetermined angle,
Polishing both sides of a large substrate, which is a flat substrate, and a small substrate having the same width and thickness as the large substrate and having a depth dimension shorter than the large substrate, the large substrate and the small substrate A flat plate double-side polishing process that produces flatness and parallelism on both sides
Dielectric multilayer film in which a dielectric multilayer film is formed on any two surfaces of the large substrate and the small substrate polished in the flat plate double-side polishing step to form a film formation surface and a non-film formation surface A film forming process;
A step of alternately bonding the large substrate and the small substrate so that the film-forming surface and the non-film-forming surface are bonded to each other so as to be stepped with a predetermined interval in the width direction And a substrate bonding step of obtaining a laminated glass body by laminating so that both ends in the depth direction of the large substrate are exposed as reference surfaces;
A laminated glass body cutting step of obtaining a plurality of multiple glass bodies by cutting the laminated glass body at a distance equal to or longer than the diagonal length of the prism in a direction parallel to the stepwise inclination,
Among the multiple glass bodies, the two cut surfaces cut in the laminated glass body cutting step are double-side polished, and the multiple glass body double-side polishing step for obtaining the flatness and parallelism of the two cut surfaces;
Multiple glass pieces obtained by cutting the multiple glass bodies at intervals equal to or longer than one side of the prism in a direction perpendicular to the surface polished in the multiple glass body double-side polishing step. Body cutting process,
A first strip glass body polishing step for polishing a cut surface cut in the multiple glass body cutting step with reference to the reference surfaces formed at both ends of the strip glass body;
Based on the surface polished in the first strip glass body polishing step, a second strip glass body polishing step of polishing the surface opposite to this surface;
The strip glass body polished in the first strip glass body polishing step and the second strip glass body polishing step , the polished surface polished in the multiple glass body double-side polishing step, or the first strip A glass strip polishing step and a strip glass strip cutting step for obtaining a plurality of prisms by cutting at equal intervals in a direction perpendicular to the polishing surface polished in the second strip strip polishing step. Manufacturing method of prism.

2. The method of manufacturing a prism according to claim 1, wherein, in the substrate bonding step, the large substrate and the small substrate are shifted by a thickness of the substrate in the width direction so that the stepwise inclination angle is 45 degrees. .

In the first strip glass body polishing step, both ends of the strip glass body are attached to a jig having a vertical surface having a height equal to the length of one side of the prism and a slope having an angle of 45 ° with the vertical surface. The method for manufacturing a prism according to claim 1, wherein the prism glass body is supported and the cut surface cut in the multiple glass body cutting step is polished to the height of the vertical surface.

In the prism manufacturing method, after the multiple glass body double-side polishing step, an antireflection film is formed on the two polished surfaces polished in the multiple glass body polishing double-side step,
2. The prism according to claim 1, wherein after the second strip glass body polishing step, the antireflection film is formed on the polished surfaces polished in the first and second strip glass body polishing steps. Manufacturing method.

A prism manufacturing method for manufacturing a prism in which a dielectric multilayer film is formed at a predetermined angle,
Polishing both sides of a large substrate, which is a flat substrate, and a small substrate having the same width and thickness as the large substrate and having a depth dimension shorter than the large substrate, the large substrate and the small substrate A flat plate double-side polishing process that produces flatness and parallelism on both sides
Dielectric multilayer film in which a dielectric multilayer film is formed on any two surfaces of the large substrate and the small substrate polished in the flat plate double-side polishing step to form a film formation surface and a non-film formation surface A film forming process;
A step of alternately bonding the large substrate and the small substrate so that the film-forming surface and the non-film-forming surface are bonded to each other so as to be stepped with a predetermined interval in the width direction And a substrate bonding step of obtaining a laminated glass body by laminating so that both ends in the depth direction of the large substrate are exposed as reference surfaces;
A laminated glass body cutting step of obtaining a plurality of multiple glass bodies by cutting the laminated glass body at a distance equal to or longer than the diagonal length of the prism in a direction parallel to the stepwise inclination,
Among the multiple glass bodies, the two cut surfaces cut in the laminated glass body cutting step are double-side polished, and the multiple glass body double-side polishing step for obtaining the flatness and parallelism of the two cut surfaces;
Multiple glass pieces obtained by cutting the multiple glass bodies at intervals equal to or longer than one side of the prism in a direction perpendicular to the surface polished in the multiple glass body double-side polishing step. Body cutting process,
A first strip glass body polishing step for polishing a cut surface cut in the multiple glass body cutting step with reference to the reference surfaces formed at both ends of the strip glass body;
A second strip glass body polishing step for polishing a surface that has not been polished in the first strip glass body polishing step on the basis of the reference surface ;
The strip glass body polished in the first strip glass body polishing step and the second strip glass body polishing step , the polished surface polished in the multiple glass body double-side polishing step, or the first strip A glass strip polishing step and a strip glass strip cutting step for obtaining a plurality of prisms by cutting at equal intervals in a direction perpendicular to the polishing surface polished in the second strip strip polishing step. Manufacturing method of prism.