JP2006337202A - Probe pin - Google Patents

Probe pin Download PDF

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JP2006337202A
JP2006337202A JP2005162993A JP2005162993A JP2006337202A JP 2006337202 A JP2006337202 A JP 2006337202A JP 2005162993 A JP2005162993 A JP 2005162993A JP 2005162993 A JP2005162993 A JP 2005162993A JP 2006337202 A JP2006337202 A JP 2006337202A
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contact head
probe pin
shaft portion
contact
cutting
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Nobushi Suzuki
悦四 鈴木
Tetsuo Takeyama
哲夫 武山
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Act One KK
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Act One KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a long-lifetime probe pin, provided with both workability and wear resistance capable of appropriately reconciling the conflicting needs for the workability of the probe pin and the wear resistance of a contact head. <P>SOLUTION: In the probe pin having both a shaft part 5 and the contact head 6 to be pressed into contact with one end of the shaft part 5 in the axial direction, a rod material is cut to form the shaft part 5, and the contact head 6 is electrocast. The probe pin is provided with a structure where the axial face of the cut shaft part 5 is butted against and jointed to the electrocast contact head 6 in the axial direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明はBGA形ICのボール形電極、ICウエハの電極、液晶パネル等のディスプレイパネルの電極等との加圧接触に用いられるプローブピンに関する。   The present invention relates to a probe pin used for pressure contact with a ball-shaped electrode of a BGA type IC, an electrode of an IC wafer, an electrode of a display panel such as a liquid crystal panel.

従来よりこの種接触子として金属板より打ち抜き加工した、所謂打ち抜き加工形コンタクトと、図1に示すスリーブピン形コンタクトが既知である。   Conventionally, a so-called stamped contact that has been punched from a metal plate as this type of contact and a sleeve pin contact shown in FIG. 1 are known.

図1Aと図2に示すように、上記スリーブピン形コンタクトはスリーブ1の両端にプローブピン2の基端を進退可に挿入し、両プローブピン2の基端間にスリーブ1内に内挿したコイルバネ3を介在し弾持した構造を有する。   As shown in FIG. 1A and FIG. 2, the sleeve pin type contact is inserted into the sleeve 1 between the proximal ends of the probe pins 2 by inserting the proximal ends of the probe pins 2 to both ends of the sleeve 1 so as to be able to advance and retract. It has a structure in which a coil spring 3 is interposed and held.

図1Bに示すように、上記スリーブピン形コンタクトは両プローブピン2が上記コイルバネ3を圧縮しつつ収縮し、該コイルバネ3の弾発力で伸長することにより、例えば一方のプローブピン2の接触ヘッド6を上記BGA形ICのボール形電極4等に加圧接触せしめると共に、他方のプローブピン2の接触ヘッド6を配線基板の電極7に加圧接触せしめる構成を有している。   As shown in FIG. 1B, in the sleeve pin type contact, both probe pins 2 contract while compressing the coil spring 3, and are expanded by the elastic force of the coil spring 3, for example, the contact head of one probe pin 2 6 is brought into pressure contact with the ball-shaped electrode 4 of the BGA type IC and the like, and the contact head 6 of the other probe pin 2 is brought into pressure contact with the electrode 7 of the wiring board.

上記プローブピン2は軸部5と、該軸部5の一端に形成した接触ヘッド6を有し、該接触ヘッド6の端部には複数の尖鋭端8を環状に配するか、軸線上に突出する単数の尖鋭端8を設け、前者においては複数の尖鋭端8で画成された凹所9内に、例えばボール形電極4の下部球面を受容して各尖鋭端8の内面を加圧接触し、後者においては尖鋭端8を電極7に突き立てるように加圧接触している。   The probe pin 2 has a shaft portion 5 and a contact head 6 formed at one end of the shaft portion 5, and a plurality of sharp ends 8 are arranged annularly at the end portion of the contact head 6 or on the axis line. A single sharp tip 8 is provided. In the former case, for example, a lower spherical surface of the ball-shaped electrode 4 is received in a recess 9 defined by a plurality of sharp tips 8, and the inner surface of each sharp tip 8 is pressurized. In the latter case, pressure contact is made so that the sharp end 8 protrudes from the electrode 7.

而して上記プローブピン2は従来、棒材に切削加工を施して一体に製造している。従って上記軸部5と接触ヘッド6とは同じ材質の金属から成る一体無垢の構造を有する。   Thus, the probe pin 2 is conventionally manufactured as a single body by cutting a bar. Therefore, the shaft portion 5 and the contact head 6 have a solid structure made of the same metal material.

一般には上記棒材として、切削加工性の観点からベリリウム銅やリン青銅が用いられており、従って軸部5と接触ヘッド6とがベリリウム銅から成る一体無垢の構造か、両者5,6がリン青銅から成る一体無垢の構造を有する。   In general, beryllium copper or phosphor bronze is used as the bar material from the viewpoint of machinability. Therefore, the shaft portion 5 and the contact head 6 are made of a single solid structure made of beryllium copper, or both 5, 6 are phosphorous. It has a solid structure made of bronze.

然るにベリリウム銅やリン青銅は通電性は良好ではあるが、耐摩耗性に欠け、上記プローブピン2端部の接触ヘッド6を電極4,7に繰り返し加圧接触するスリーブピン形コンタクトにおいては、接触ヘッド6が早期に摩耗し、耐用寿命が短く、多数のスリーブピン形コンタクトを植装したコネクタから同コンタクトを頻繁に抜去し植装する交換作業が必要となり、そのためにIC等の検査作業を中断せねばならず、多大なメンテナンス費用の負担と検査作業効率の悪化を招いている。   However, beryllium copper and phosphor bronze have good electrical conductivity, but lack wear resistance, and in the case of sleeve pin type contacts in which the contact head 6 at the end of the probe pin 2 is repeatedly brought into pressure contact with the electrodes 4 and 7, contact is not possible. The head 6 wears out early, has a short service life, requires frequent replacement of the sleeve pin-type contact from the connector in which the sleeve 6 is implanted, and the inspection work for the IC is interrupted. This has resulted in a large maintenance cost and deterioration of inspection work efficiency.

又上記プローブピン2を切削加工する方法ではプローブピン2の微細化に追随できず、例えば0.1ミリ以下のプローブピンになると、切削困難、とりわけ接触ヘッド6の尖鋭端8の切削加工が著しく困難になる。   Further, the above-described method of cutting the probe pin 2 cannot follow the miniaturization of the probe pin 2 and, for example, if the probe pin is 0.1 mm or less, cutting is difficult, especially the sharp end 8 of the contact head 6 is remarkably cut. It becomes difficult.

他方耐摩耗性を向上するためにニッケルやタングステンの棒材を材料として用いた場合には、切削加工が殆ど不可能であり、非現実的である。   On the other hand, when nickel or tungsten rods are used as a material to improve wear resistance, cutting is almost impossible and unrealistic.

本発明は上記プローブピンの加工性と接触ヘッドの耐摩耗性の相矛盾する課題を適切に解決する、加工性と耐摩耗性を兼備する長寿命のプローブピンを提供することを目的としている。   It is an object of the present invention to provide a long-life probe pin having both workability and wear resistance, which appropriately solves the conflicting problems between the workability of the probe pin and the wear resistance of the contact head.

本発明に係るプローブピンは、棒材に切削加工を施して上記プローブピンの軸部を形成し、他方電鋳により接触ヘッドを成形し、上記切削加工軸部の軸端面を該電鋳成形接触ヘッドに軸線方向において突き合わせ接合し、一体複合構造としたものである。   In the probe pin according to the present invention, a rod is cut to form a shaft portion of the probe pin, while a contact head is formed by electroforming, and the shaft end surface of the cutting shaft portion is formed into the electroformed contact. The head is butt-joined in the axial direction to form an integral composite structure.

又は上記軸部を棒材に鍛造加工を施して形成し、他方上記と同様、接触ヘッドを電鋳により成形し、上記鍛造加工軸部の軸端面を該電鋳成形接触ヘッドに軸線方向において突き合わせ接合し、一体複合構造としたものである。   Alternatively, the shaft portion is formed by forging a bar, and the contact head is formed by electroforming as in the above, and the shaft end surface of the forged shaft portion is butted against the electroformed contact head in the axial direction. These are joined to form an integral composite structure.

本発明によれば、プローブピンの軸部を切削加工性又は鍛造成形性の良好な例えば黄銅、リン青銅、ベリリウム銅等から成る棒材を用いて容易に製造できると共に、接触ヘッドを耐摩耗性に富むニッケルやタングステンを用いて容易に電鋳成形でき、両者を突き合わせ接合することによって加工性と耐摩耗性の両要求に応えるプローブピン乃至スリーブピン形コンタクトを提供できるものである。   According to the present invention, the shaft portion of the probe pin can be easily manufactured using a bar material made of, for example, brass, phosphor bronze, beryllium copper, etc. having good machinability or forgeability, and the contact head has wear resistance. Therefore, it is possible to provide a probe pin or sleeve pin type contact which can be easily electroformed using nickel and tungsten which are rich in metal, and meet both requirements of workability and wear resistance by butt-joining them.

よって従来のプローブピンにおける短寿命の問題と、メンテナンス作業と費用の問題を抜本的に解決することができるものである。   Therefore, the problem of short life and the problem of maintenance work and cost in the conventional probe pin can be drastically solved.

以下本発明を実施するための最良の形態を図3乃至図9に基づき説明する。尚図1、図2に示した従来のプローブピン2と同一部位は同一符号を以って表す。   The best mode for carrying out the present invention will be described with reference to FIGS. The same parts as those of the conventional probe pin 2 shown in FIGS. 1 and 2 are denoted by the same reference numerals.

前記のように、プローブピン2は軸部5と、軸部5の一端部に連設した接触ヘッド6を有し、接触ヘッド6の端部には相手側電極に応じた接触形状を付与する。   As described above, the probe pin 2 has the shaft portion 5 and the contact head 6 connected to one end portion of the shaft portion 5, and the end portion of the contact head 6 is given a contact shape corresponding to the counterpart electrode. .

例えば前記の如く、接触ヘッド6の端部には複数の尖鋭端8を環状に配するか、軸線上に突出する単数の尖鋭端8を設け、前者においては複数の尖鋭端8で画成された凹所9内に、例えばボール形電極4の下部球面を受容して各尖鋭端8の内面に加圧接触する構造にし、後者においては尖鋭端8を電極7に突き立てるように加圧接触する構造にする。   For example, as described above, a plurality of sharp ends 8 are arranged annularly at the end of the contact head 6 or a single sharp end 8 protruding on the axis is provided, and the former is defined by a plurality of sharp ends 8. For example, the lower spherical surface of the ball-shaped electrode 4 is received in the recess 9 and is in pressure contact with the inner surface of each sharp tip 8. In the latter, the pressure contact is made so that the sharp tip 8 is pushed against the electrode 7. Make the structure.

上記軸部5は棒材に切削加工を施して形成する。図3に基づきこの切削加工法の具体例について説明する。図3Aに示すように、黄銅、ベリリウム銅、リン青銅から成る棒材10を用意し、図3Bに示すように、該棒材10の端部に既知のバイトによる切削加工を施してプローブピン2に必要な外形を付与し、図3Cに示すように、棒材10との連結部において切断し、図6に示す所要形状の軸部5を得る。   The shaft portion 5 is formed by cutting a bar. A specific example of this cutting method will be described with reference to FIG. As shown in FIG. 3A, a bar 10 made of brass, beryllium copper, and phosphor bronze is prepared. As shown in FIG. 3B, the end of the bar 10 is cut with a known bite to obtain a probe pin 2. 3A to 3C, and cut at the connecting portion with the bar 10 to obtain the shaft portion 5 having the required shape shown in FIG.

上記作業を繰り返し、小径軸部11の端部に大径軸部12を有する軸部5を量産する。この軸部5は小径軸部11の端面13に切断面(粗面)を有し、その周面は平滑面である。   The above operation is repeated to mass-produce the shaft portion 5 having the large-diameter shaft portion 12 at the end of the small-diameter shaft portion 11. The shaft portion 5 has a cut surface (rough surface) on the end surface 13 of the small-diameter shaft portion 11, and the peripheral surface thereof is a smooth surface.

又他例として、上記軸部5を鍛造加工によって成形する。図4に基づき該軸部5の鍛造加工法の具体例について説明する。図4Aに示すように、軸部成形型14の成形腔部15内に所要の寸法に切断した短小棒材10を挿入してノックアウトピン16に支持し、成形腔部15から突出する棒材10の端面にパンチ17により鍛圧を加えることにより、棒材10を成形腔部15内面形状に順応するように塑性変形せしめ、よって図6に示す小径軸部11の端部に大径軸部12を有する軸部5を量産する。   As another example, the shaft portion 5 is formed by forging. A specific example of the forging method for the shaft portion 5 will be described with reference to FIG. As shown in FIG. 4A, the short bar 10 cut to a required size is inserted into the molding cavity 15 of the shaft mold 14 and supported by the knockout pin 16, and the bar 10 protruding from the molding cavity 15. 6 is plastically deformed so as to conform to the shape of the inner surface of the forming cavity 15 by applying forging pressure to the end surface of the small-diameter shaft portion 11 shown in FIG. Mass production of the shaft portion 5 is carried out.

この軸部5の端面は長尺の棒材を切断して短小の棒材10を形成した時の切断面に鍛圧を加えた面であり、従って小径軸部11の端面13は粗面を形成している。   The end surface of the shaft portion 5 is a surface obtained by applying forging pressure to the cut surface when a long rod member is cut to form a short rod member 10, and therefore the end surface 13 of the small diameter shaft portion 11 forms a rough surface. is doing.

他方電鋳により接触ヘッド6を成形する。図5に基づきこの電鋳成形法の具体例について説明する。図5Aに示すように、表面に該表面で開放された多数の接触ヘッド成形用凹所18を有する型板19を用意する。   On the other hand, the contact head 6 is formed by electroforming. A specific example of this electroforming method will be described with reference to FIG. As shown in FIG. 5A, a template 19 having a number of contact head molding recesses 18 opened on the surface is prepared.

次に図5Bに示すように、型板19の表面に感光性レジスト層20を塗布又はラミネートにより形成し、該感光性レジスト層20に露光現像を施して上記接触ヘッド成形用凹所18に対応する成形用開口21を形成する。   Next, as shown in FIG. 5B, a photosensitive resist layer 20 is formed on the surface of the template 19 by coating or laminating, and the photosensitive resist layer 20 is exposed and developed to correspond to the contact head molding recess 18. The molding opening 21 to be formed is formed.

次に図5Cに示すように、上記接触ヘッド成形用凹所18内と成形用開口21内において、電鋳による接触ヘッド6の成形を行う。この電鋳による接触ヘッド6の成形金属としてニッケル又はタングステンを用いる。   Next, as shown in FIG. 5C, the contact head 6 is formed by electroforming in the contact head forming recess 18 and the forming opening 21. Nickel or tungsten is used as the forming metal of the contact head 6 by electroforming.

上記電鋳成形接触ヘッド6は、接触ヘッド成形用凹所18内を電鋳金属で満たすと共に成形用開口21を満たし、接触ヘッド成形用凹所18にて前記尖鋭端8を成形すると同時に、成形用開口21内において接合部22を成形する。   The electroforming contact head 6 fills the contact head forming recess 18 with electroformed metal and fills the forming opening 21, and simultaneously forms the sharp end 8 in the contact head forming recess 18. The joint portion 22 is formed in the opening 21 for use.

次に図5Dに示すように、上記レジスト層20を除去する。このレジスト層20の除去によって接触ヘッド成形用凹所18の開口面から接合部22が突出した状態を形成する。図7は上記電鋳成形された接触ヘッド6の斜視図を示す。   Next, as shown in FIG. 5D, the resist layer 20 is removed. The removal of the resist layer 20 forms a state in which the joint portion 22 protrudes from the opening surface of the contact head molding recess 18. FIG. 7 is a perspective view of the electroformed contact head 6.

次に図5Eに示すように、電鋳成形接触ヘッド6が型板19の同ヘッド成形用凹所18に型込めされた状態で、前記した切削加工軸部5又は鍛造成形軸部5の軸端面、即ち小径軸部11の軸端面13を、上記電鋳成形接触ヘッド6の端面、即ち接合部22の端面に軸線方向において突き合わせ接合し、一体複合構造とする。   Next, as shown in FIG. 5E, in the state where the electroformed contact head 6 is inserted into the head forming recess 18 of the template 19, the axis of the cutting shaft 5 or the forged shaft 5 described above is used. The end surface, that is, the shaft end surface 13 of the small-diameter shaft portion 11 is abutted and joined in the axial direction to the end surface of the electroformed contact head 6, that is, the end surface of the joint portion 22 to form an integral composite structure.

上記突き合わせ接合部を型板19から脱型することによって、図8、図9に示す、切削加工軸部5又は鍛造成形軸部5と電鋳成形接触ヘッド6の一体複合構造から成るプローブピン2を得る。   By removing the butt joint portion from the mold plate 19, the probe pin 2 having an integral composite structure of the cutting shaft portion 5 or the forged shaft portion 5 and the electroformed contact head 6 shown in FIGS. Get.

一例として図5C,D,Eに示すように、上記電鋳成形接触ヘッド6の接合部22を軸部5、即ち小径軸部11より大径に電鋳成形する。これによって小径軸部11を大径の接合部22に対する多少の芯ズレを許容して、適切な接合が果たせる。   As an example, as shown in FIGS. 5C, D, and E, the joint portion 22 of the electroformed contact head 6 is electroformed to a larger diameter than the shaft portion 5, that is, the small diameter shaft portion 11. As a result, the small-diameter shaft portion 11 is allowed to have a slight misalignment with respect to the large-diameter joint portion 22 and can be appropriately joined.

上記接合手段としては、例えば図5Eに示すように、上記切削加工軸部5の端面又は電鋳成形接触ヘッド6の端面に接合メッキ層23を施し、加熱により突き合わせ接合する。   As the joining means, for example, as shown in FIG. 5E, a joining plating layer 23 is applied to the end face of the cutting shaft portion 5 or the end face of the electroformed contact head 6, and butt joining is performed by heating.

又は上記メッキを施さずに、上記電鋳成形接触ヘッド6の端面と切削加工軸部5の端面とを突き合わせて超音波接合、摩擦圧接、通電加熱圧接等により一体複合構造とする。   Alternatively, the end face of the electroformed contact head 6 and the end face of the cutting shaft portion 5 are brought into contact with each other without applying the plating, thereby forming an integrated composite structure by ultrasonic welding, friction welding, electric heating heating welding, or the like.

Aは既知のプローブピンを用いたスリーブピン形コンタクトの断面図、Bは該スリーブピン形コンタクトの接触状態を示す断面図。A is a sectional view of a sleeve pin type contact using a known probe pin, and B is a sectional view showing a contact state of the sleeve pin type contact. 上記全体が同一金属から成る切削加工プローブピンの斜視図。The perspective view of the cutting probe pin which the said whole consists of the same metal. A,B,C,は本発明に係るプローブピンを構成する軸部の切削加工工程を示す側面図。A, B, C is a side view showing a cutting process of a shaft portion constituting the probe pin according to the present invention. A,Bは本発明に係るプローブピンを構成する軸部の鍛造成形工程を示す断面図。A and B are sectional views showing a forging process of a shaft portion constituting the probe pin according to the present invention. A,B,C,D,Eは本発明に係るプローブピンを構成する電鋳成形接触ヘッドの成形工程を示す断面図。A, B, C, D, and E are sectional views showing the molding process of the electroformed contact head constituting the probe pin according to the present invention. 切削加工軸部又は鍛造成形軸部の斜視図。The perspective view of a cutting process shaft part or a forge molding shaft part. 電鋳成形接触ヘッドの斜視図。The perspective view of an electroforming shaping | molding contact head. 切削加工軸部又は鍛造成形軸部と電鋳成形接触ヘッドの突き合わせ接合により得られたプローブピンの斜視図。The perspective view of the probe pin obtained by the butt | joining joining of the cutting shaft part or a forge shaping | molding shaft part, and an electroforming shaping | molding contact head. 図8のプローブピンの側面図。The side view of the probe pin of FIG.

符号の説明Explanation of symbols

1…スリーブ、2…プローブピン、3…コイルバネ、4…電極、5…軸部、6…接触ヘッド、7…電極、8…尖鋭端、9…凹所、10…棒材、11…小径軸部、12…大径軸部、13…小径軸部の端面、14…軸部成形型、15…成形腔部、16…ノックアウトピン、17…パンチ、18…接触ヘッド成形用凹所、19…型板、20…感光性レジスト層、21…成形用開口、22…接合部、23…接合メッキ層   DESCRIPTION OF SYMBOLS 1 ... Sleeve, 2 ... Probe pin, 3 ... Coil spring, 4 ... Electrode, 5 ... Shaft part, 6 ... Contact head, 7 ... Electrode, 8 ... Sharp end, 9 ... Recess, 10 ... Bar material, 11 ... Small diameter shaft , 12 ... Large diameter shaft part, 13 ... End face of small diameter shaft part, 14 ... Shaft part mold, 15 ... Molding cavity part, 16 ... Knockout pin, 17 ... Punch, 18 ... Recess for contact head molding, 19 ... Template: 20 ... Photosensitive resist layer, 21 ... Molding opening, 22 ... Joint part, 23 ... Joint plating layer

Claims (2)

軸部と該軸部の一端に軸線方向において加圧接触する接触ヘッドを有するプローブピンにおいて、棒材に切削加工を施して形成した上記軸部を用意すると共に、電鋳により成形した接触ヘッドを用意し、上記切削加工軸部の軸端面を上記電鋳成形接触ヘッドに軸線方向において突き合わせ接合した構造を有することを特徴とするプローブピン。 In a probe pin having a shaft portion and a contact head that is in pressure contact with one end of the shaft portion in the axial direction, the shaft portion formed by cutting a bar is prepared, and a contact head formed by electroforming is prepared. A probe pin prepared and having a structure in which the shaft end surface of the cutting shaft portion is butted and joined to the electroforming contact head in the axial direction. 軸部と該軸部の一端に軸線方向において加圧接触する接触ヘッドを有するプローブピンにおいて、棒材に鍛造加工を施して形成した上記軸部を用意すると共に、電鋳により成形した接触ヘッドを用意し、上記鍛造加工軸部の軸端面を上記電鋳成形接触ヘッドに軸線方向において突き合わせ接合した構造を有することを特徴とするプローブピン。 In a probe pin having a shaft portion and a contact head that is in pressure contact with one end of the shaft portion in the axial direction, the shaft portion formed by forging a bar is prepared, and a contact head formed by electroforming is prepared. A probe pin prepared and having a structure in which a shaft end surface of the forged shaft portion is butted and joined to the electroforming contact head in the axial direction.
JP2005162993A 2005-06-02 2005-06-02 Probe pin Pending JP2006337202A (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161855A1 (en) * 2010-06-23 2011-12-29 山一電機株式会社 Contact head, probe pin with the contact head, and electrical connection device using the probe pin
WO2017069136A1 (en) * 2015-10-20 2017-04-27 日本電子材料株式会社 Three-dimensional structural body manufacturing method, mold used in same, and electric contact

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161855A1 (en) * 2010-06-23 2011-12-29 山一電機株式会社 Contact head, probe pin with the contact head, and electrical connection device using the probe pin
JP4941853B2 (en) * 2010-06-23 2012-05-30 山一電機株式会社 Contact head, probe pin provided with the same, and electrical connection device using the probe pin
US8591267B2 (en) 2010-06-23 2013-11-26 Yamaichi Electronics Co., Ltd. Contact head, probe pin including the same, and electrical connector using the probe pin
WO2017069136A1 (en) * 2015-10-20 2017-04-27 日本電子材料株式会社 Three-dimensional structural body manufacturing method, mold used in same, and electric contact

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