JP2006337196A - Multiaxial acceleration detector - Google Patents

Multiaxial acceleration detector Download PDF

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JP2006337196A
JP2006337196A JP2005162791A JP2005162791A JP2006337196A JP 2006337196 A JP2006337196 A JP 2006337196A JP 2005162791 A JP2005162791 A JP 2005162791A JP 2005162791 A JP2005162791 A JP 2005162791A JP 2006337196 A JP2006337196 A JP 2006337196A
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acceleration
sensor
axis
housing
acceleration detection
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Noritomo Oki
紀知 大木
Yasuhiko Hara
靖彦 原
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KYB Corp
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Kayaba Industry Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multiaxial acceleration detector capable of being easily fixed to an acceleration detection object. <P>SOLUTION: The multiaxial acceleration detector 1 comprises: the housing 10 to be fixed to a truck (acceleration detection object); the pair of each sensor substrate 20 and 29 to be housed in the housing 10; and the acceleration sensor chips 2-5. The housing 10 includes: the fixing reference surface 11 to be fixed with the supporting member (acceleration detection object) of the vehicle side; and the sensor fixing surface 13 and 19 for seating the respective sensor substrates 20 and 29. Each surface extending parallel to the sensor substrate fixing surfaces 13 and 19 is named as a virtual sensitive axis setting surface, each of acceleration sensor chips 2-5 is mounted on each substrate 20 or 29 so that a plurality of sensitive axes of which are not parallel in each virtual sensitivity axis surface and tilting to the setting reference surface 11. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、加速度検出対象物に設置されて、その加速度を検出する多軸加速度検出装置に関するものである。   The present invention relates to a multi-axis acceleration detection device that is installed on an acceleration detection object and detects the acceleration.

従来の加速度センサとしては、例えば、加速度検出対象物の動きに合わせて揺れようとする振り子と、この振り子の位置を検出する検出装置とを備え、この検出装置により検出される振り子の位置を電磁コイルへの通電により発生する力で動かないようにフィードバック制御するものがある。そして、このとき振り子に働く力が振り子に加わる加速度(すなわち加速度検出対象物の加速度)と等しいことに着目して、加速度検出対象物の加速度を電磁コイルに流れる電流値として検出する。   As a conventional acceleration sensor, for example, a pendulum that swings in accordance with the motion of an acceleration detection target and a detection device that detects the position of the pendulum are provided, and the position of the pendulum detected by the detection device is electromagnetically detected. Some have feedback control so that they do not move with the force generated by energizing the coil. At this time, paying attention to the fact that the force acting on the pendulum is equal to the acceleration applied to the pendulum (that is, the acceleration of the acceleration detection object), the acceleration of the acceleration detection object is detected as a current value flowing through the electromagnetic coil.

従来、特許文献1に開示された加速度検出装置は、所定の感度軸方向について加速度を検出する一対の加速度センサを備え、これらの各加速度センサの感度軸が鉛直平面内で互いに平行とならないように水平軸方向に対して傾斜している。これにより、加速度検出対象物に生じる加速度に応じて一対の加速度センサから検出信号がそれぞれ出力される。   Conventionally, the acceleration detection device disclosed in Patent Document 1 includes a pair of acceleration sensors that detect acceleration in a predetermined sensitivity axis direction, and the sensitivity axes of these acceleration sensors are not parallel to each other in a vertical plane. It is inclined with respect to the horizontal axis direction. Thereby, a detection signal is output from each of the pair of acceleration sensors according to the acceleration generated in the acceleration detection object.

コントローラは、各加速度センサから出力される検出信号に基づいて検出すべき所定の方向の加速度を演算し、加速度検出が行われる。   The controller calculates acceleration in a predetermined direction to be detected based on the detection signal output from each acceleration sensor, and acceleration detection is performed.

一対の加速度センサは水平軸に対してそれぞれ所定の傾斜角度をもって配置され、加速度検出対象物の静止時においても、重力加速度に基づく出力をするので、コントローラはこの出力の値を、正常時に出力されるべき値と比較することにより、静止時においても加速度センサの故障検知が行われる。
特開平11−211751号公報
The pair of acceleration sensors is arranged with a predetermined inclination angle with respect to the horizontal axis, and outputs based on the gravitational acceleration even when the acceleration detection object is stationary, so the controller outputs the value of this output when normal. By comparing with the value to be detected, failure detection of the acceleration sensor is performed even at rest.
Japanese Patent Application Laid-Open No. 11-211751

しかしながら、このような従来の加速度検出装置にあっては、例えば車両に設置して車両の横揺れを検出する場合、各加速度センサの感度軸を所定位置に配置することが難しいという問題点があった。   However, such a conventional acceleration detection device has a problem that, for example, when installed in a vehicle to detect rolling of the vehicle, it is difficult to place the sensitivity axes of the acceleration sensors at predetermined positions. It was.

本発明は上記の問題点に鑑みてなされたものであり、加速度検出対象物に対して容易に設置できる多軸加速度検出装置を提供することを目的とする。   The present invention has been made in view of the above problems, and an object thereof is to provide a multi-axis acceleration detection device that can be easily installed on an acceleration detection object.

本発明の多軸加速度検出装置は、加速度検出対象物に取り付けられる筐体と、この筐体に収められる複数のセンサ基板と、所定の感度軸方向について加速度を検出する複数の加速度センサチップとを備え、筐体に加速度検出対象物に固定される設置基準面と、この設置基準面に直交して各センサ基板を着座させる複数のセンサ基板取付面とをそれぞれ形成し、各センサ基板取付面と平行に延びる平面をそれぞれ仮想感度軸設定面とし、各加速度センサチップを複数の感度軸が各仮想感度軸設定面において互いに平行とならないようにかつ設置基準面に対して傾斜するように各センサ基板にそれぞれ介装したことを特徴とするものとした。   A multi-axis acceleration detection device according to the present invention includes a housing attached to an acceleration detection object, a plurality of sensor substrates housed in the housing, and a plurality of acceleration sensor chips that detect acceleration in a predetermined sensitivity axis direction. Each of the sensor board mounting surface and a plurality of sensor board mounting surfaces on which the respective sensor boards are seated perpendicularly to the installation reference plane. Each of the sensor substrates has a plane extending in parallel as a virtual sensitivity axis setting surface, and each acceleration sensor chip is tilted with respect to the installation reference plane so that a plurality of sensitivity axes are not parallel to each other on each virtual sensitivity axis setting surface. It was characterized by having been interposed respectively.

本発明によると、多軸加速度検出装置は筐体をその設置基準面が水平になるように加速度検出対象物に取り付けることにより、各加速度センサチップの感度軸が鉛直平面内で水平軸に対して所定角度で傾斜するように配置されるため、筐体の取り付け作業を容易に行うことができる。   According to the present invention, the multi-axis acceleration detecting device is attached to the acceleration detection target so that its installation reference plane is horizontal, so that the sensitivity axis of each acceleration sensor chip is in the vertical plane with respect to the horizontal axis. Since it arrange | positions so that it may incline at a predetermined angle, the attachment operation | work of a housing | casing can be performed easily.

加速度検出装置は加速度センサチップの感度軸が水平軸に対してそれぞれ所定の傾斜角度をもって配置されることにより、加速度検出対象物の静止時においても重力加速度に基づく出力をするので、この出力の値を正常時に出力されるべき値と比較することにより、静止時においても加速度センサの故障検知が行われる。   Since the acceleration detection device is arranged with the sensitivity axis of the acceleration sensor chip at a predetermined inclination angle with respect to the horizontal axis, the acceleration detection device outputs based on the gravitational acceleration even when the acceleration detection target is stationary. Is compared with a value that should be output during normal operation, so that the acceleration sensor can be detected even when stationary.

筐体を一つのセンサ基板取付面が例えば車両に対して左右方向に延びるように配置することにより、多軸加速度検出装置は車両に生じる左右方向の加速度を検出し、この検出信号に応じて車両の横揺れを抑える制御を行うことができる。そして、筐体を別のセンサ基板取付面が例えば車両に対して前後方向に延びるように配置することにより、多軸加速度検出装置は台車に生じる前後方向の加速度を検出し、車両の各種制御を行うことができる。   By arranging the housing so that one sensor board mounting surface extends in the left-right direction with respect to the vehicle, for example, the multi-axis acceleration detecting device detects the left-right acceleration generated in the vehicle, and the vehicle is detected according to the detection signal. It is possible to perform control to suppress the rolling of the. Then, by arranging the housing so that another sensor board mounting surface extends in the front-rear direction with respect to the vehicle, for example, the multi-axis acceleration detection device detects the acceleration in the front-rear direction generated in the carriage, and performs various controls of the vehicle. It can be carried out.

以下、本発明の実施の形態を添付図面に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

図1の(a),(b)に示すように、多軸加速度検出装置1は鉄道車両の台車(加速度検出対象物)に取り付けられ、台車の左右方向と前後方向の加速度をそれぞれ検出するものである。   As shown in FIGS. 1 (a) and 1 (b), the multi-axis acceleration detecting device 1 is attached to a bogie (acceleration detection object) of a railway vehicle and detects accelerations in the left-right direction and the front-back direction of the bogie. It is.

多軸加速度検出装置1は、台車に取り付けられる筐体10と、この筐体10に収められる一対のセンサ基板20,29と、この各センサ基板20,29に介装される二対の加速度センサチップ2〜5と、同じく各センサ基板20,29に接続され筐体10の外側へと延びるケーブル30とを備え、加速度センサチップ2〜4の検出信号が各センサ基板20,29とケーブル30を介して図示しないコントローラに出力されるようになっている。   The multi-axis acceleration detection apparatus 1 includes a housing 10 attached to a carriage, a pair of sensor substrates 20 and 29 housed in the housing 10, and two pairs of acceleration sensors interposed between the sensor substrates 20 and 29. Chips 2 to 5 and a cable 30 that is also connected to the sensor substrates 20 and 29 and extends to the outside of the housing 10, and detection signals of the acceleration sensor chips 2 to 4 connect the sensor substrates 20 and 29 and the cable 30. Via a controller (not shown).

筐体10は、台車の支持部材(加速度検出対象物)に固定される設置基準面11と、左右に突出する対のフランジ部15と、各フランジ部15に形成されたボルト穴16とを有する。筐体10は各ボルト穴16を挿通する図示しない3本のボルトを介して台車の支持部材に締結される。   The housing 10 includes an installation reference surface 11 fixed to a support member (acceleration detection target) of the carriage, a pair of flange portions 15 protruding left and right, and bolt holes 16 formed in each flange portion 15. . The housing 10 is fastened to the support member of the carriage via three bolts (not shown) that pass through the respective bolt holes 16.

筐体10は、この設置基準面11に開口して各センサ基板20,29等が収められる収装室12と、センサ基板20を着座させる左右対のセンサ基板取付面13と、センサ基板29を着座させる前後対のセンサ基板取付面19と、ケーブル30を挿通させる穴14とを有する。   The housing 10 includes an accommodation chamber 12 that opens to the installation reference plane 11 and accommodates the sensor boards 20 and 29, a pair of left and right sensor board mounting surfaces 13 on which the sensor board 20 is seated, and a sensor board 29. It has a pair of front and rear sensor board mounting surfaces 19 to be seated and a hole 14 through which the cable 30 is inserted.

図2に示すように、一方のセンサ基板20は矩形の平板状に形成される。センサ基板20はその左右の端部21,22が各センサ基板取付面13に着座し、その左右の下端部23,24が2本のネジ9を介して筐体10に締結される。左右の下端部23,24には穴25がそれぞれ形成され、各穴25にネジ9が挿通する。他方のセンサ基板29はこのセンサ基板20と同一構造とする。   As shown in FIG. 2, one sensor substrate 20 is formed in a rectangular flat plate shape. The sensor substrate 20 has left and right end portions 21 and 22 seated on each sensor substrate mounting surface 13, and left and right lower end portions 23 and 24 are fastened to the housing 10 via two screws 9. Holes 25 are respectively formed in the left and right lower end portions 23 and 24, and screws 9 are inserted into the respective holes 25. The other sensor substrate 29 has the same structure as the sensor substrate 20.

筐体10は各センサ基板取付面13,19が設置基準面11に対して直交する。各センサ基板20,29がその左右の端部21,22を各センサ基板取付面13,19に着座させて取り付けられることにより、各センサ基板20,29が設置基準面11に対して直交方向に延びるように配置される。   In the housing 10, the sensor board mounting surfaces 13 and 19 are orthogonal to the installation reference surface 11. Each sensor board 20, 29 is attached with its left and right end portions 21, 22 seated on each sensor board attachment surface 13, 19, so that each sensor board 20, 29 is orthogonal to the installation reference plane 11. It is arranged to extend.

各センサ基板取付面13,19は互いに直交する。筐体10はセンサ基板取付面13が車両の左右方向に延び、センサ基板取付面19が車両の前後方向に延びるように配置される。   The sensor board mounting surfaces 13 and 19 are orthogonal to each other. The housing 10 is arranged such that the sensor board mounting surface 13 extends in the left-right direction of the vehicle and the sensor board mounting surface 19 extends in the front-rear direction of the vehicle.

加速度センサチップ2〜5は、そのチップ本体6と、このチップ本体6から延びる複数の端子7とを有する。各端子7が各センサ基板20,29の回路に半田付けされる。   The acceleration sensor chips 2 to 5 have a chip body 6 and a plurality of terminals 7 extending from the chip body 6. Each terminal 7 is soldered to the circuit of each sensor board 20, 29.

各センサ基板20,29の各穴26にケーブル30の各導線31が差し込まれ、各導線31が各センサ基板20,29の回路に半田付けされる。   Each conducting wire 31 of the cable 30 is inserted into each hole 26 of each sensor substrate 20, 29, and each conducting wire 31 is soldered to the circuit of each sensor substrate 20, 29.

各センサ基板20,29の両面にはシリコーンが塗布された絶縁層27が設けられる。この絶縁層27は加速度センサチップ2,3及び各導線31の接続部を完全に覆うように設けられ、熱衝撃による応力緩和がはかられる。   An insulating layer 27 coated with silicone is provided on both surfaces of each sensor substrate 20, 29. The insulating layer 27 is provided so as to completely cover the connection portions of the acceleration sensor chips 2 and 3 and the respective conductive wires 31 and can relieve stress due to thermal shock.

筐体10の設置基準面11に開口した収装室12には、エポキシ樹脂と硬化剤を混合したものを充填し固化させた樹脂部17が設けられる。この樹脂部17は筐体10に対して各センサ基板20,29及び加速度センサチップ2〜5を固定するとともに、これらの防水がはかられる。   The housing chamber 12 opened in the installation reference plane 11 of the housing 10 is provided with a resin portion 17 filled and solidified with a mixture of an epoxy resin and a curing agent. The resin portion 17 fixes the sensor substrates 20 and 29 and the acceleration sensor chips 2 to 5 to the housing 10 and waterproofs them.

チップ本体6は直方体の外形を持ち、各センサ基板20,29に対して平行に取り付けられることにより、チップ本体6が各センサ基板取付面13,19と平行に配置され、設置基準面11に対して直交方向に延びるように配置される。   The chip body 6 has a rectangular parallelepiped shape and is mounted in parallel to the sensor substrates 20 and 29, so that the chip body 6 is arranged in parallel to the sensor substrate mounting surfaces 13 and 19, with respect to the installation reference surface 11. So as to extend in the orthogonal direction.

各加速度センサチップ2〜5は、その感度軸方向の動きに合わせて揺れようとする振り子と、この振り子に働く力に応じた出力を発生する素子と、この素子を駆動して加速度検出信号を出力する回路とを有するものである。   Each of the acceleration sensor chips 2 to 5 includes a pendulum that tries to swing in accordance with the movement in the sensitivity axis direction, an element that generates an output corresponding to the force acting on the pendulum, and an acceleration detection signal by driving the element. And a circuit for outputting.

各加速度センサチップ2,3の各感度軸は、図3の(a)に白抜き矢印で示すように、チップ本体6の中央部を起点とし、直方体の外形を持つチップ本体6の側部6aと直交し、側部6bと平行となる方向に配置されている。   As shown by white arrows in FIG. 3A, the sensitivity axes of the acceleration sensor chips 2 and 3 start from the center of the chip body 6 and have side portions 6a of the chip body 6 having a rectangular parallelepiped shape. Is arranged in a direction that is orthogonal to and parallel to the side portion 6b.

ここで、センサ基板取付面13と平行に延びる平面を仮想感度軸設定面Cとする。図3の(b)にて、横軸Xはこの仮想感度軸設定面Cにおいて設置基準面11と平行に延び、縦軸Yは同じく仮想感度軸設定面Cにおいて設置基準面11と直交する。   Here, a plane extending in parallel with the sensor substrate mounting surface 13 is defined as a virtual sensitivity axis setting surface C. 3B, the horizontal axis X extends in parallel with the installation reference plane 11 in the virtual sensitivity axis setting plane C, and the vertical axis Y is also orthogonal to the installation reference plane 11 in the virtual sensitivity axis setting plane C.

多軸加速度検出装置1は、加速度センサチップ2,3の各感度軸を仮想感度軸設定面Cにおいて互いに平行とならないように設置基準面11(横軸X)に対して傾斜させる。   The multi-axis acceleration detection apparatus 1 tilts the sensitivity axes of the acceleration sensor chips 2 and 3 with respect to the installation reference plane 11 (horizontal axis X) so as not to be parallel to each other on the virtual sensitivity axis setting plane C.

図3の(b)には、加速度センサチップ2,3の感度軸の方向をベクトルA,Bで示している。加速度センサチップ2,3の感度軸は横軸Xに対して所定の傾斜角度θA、θBを持つ。図1においては、反時計回りを正としているので、θAは正の値、θBは負の値となっている。本実施の形態では、θAは45°、θBは−45°に設定される。   In FIG. 3B, the directions of the sensitivity axes of the acceleration sensor chips 2 and 3 are indicated by vectors A and B, respectively. The sensitivity axes of the acceleration sensor chips 2 and 3 have predetermined inclination angles θA and θB with respect to the horizontal axis X. In FIG. 1, since counterclockwise rotation is positive, θA is a positive value and θB is a negative value. In the present embodiment, θA is set to 45 ° and θB is set to −45 °.

図3の(a)に示すように、加速度センサチップ2,3は設置基準面11と直交方向(縦軸Y方向)についてオフセットされるとともに、設置基準面11と平行方向(横軸X方向)についてオフセットして基板20に介装される。   As shown in FIG. 3A, the acceleration sensor chips 2 and 3 are offset in the direction orthogonal to the installation reference plane 11 (vertical Y direction) and parallel to the installation reference plane 11 (horizontal X direction). And is inserted into the substrate 20 with an offset.

図3の(b)に示すように、加速度センサチップ2,3の感度軸の方向を示すベクトルA,Bはそれぞれの起点が縦軸Y方向についてオフセットされるとともに、横軸X方向についてオフセットされる。   As shown in FIG. 3B, the vectors A and B indicating the directions of the sensitivity axes of the acceleration sensor chips 2 and 3 are offset in the vertical axis Y direction and offset in the horizontal axis X direction. The

加速度センサチップ4,5の各感度軸は、設置基準面11に対して加速度センサチップ2,3と同様の位置関係で傾斜させる。   The sensitivity axes of the acceleration sensor chips 4 and 5 are inclined with respect to the installation reference plane 11 in the same positional relationship as the acceleration sensor chips 2 and 3.

以上のように多軸加速度検出装置1は構成され、次に作用及び効果について説明する。   The multi-axis acceleration detection device 1 is configured as described above, and the operation and effect will be described next.

筐体10を設置基準面11が水平になるように台車の支持部材(加速度検出対象物)に取り付けることにより、各加速度センサチップ2〜5の各感度軸が鉛直平面内において水平軸方向に対して所定角度で傾斜するように配置されるため、多軸加速度検出装置1は筐体10の取り付け作業を容易に行うことができる。   By attaching the casing 10 to a support member (acceleration detection object) of the carriage so that the installation reference plane 11 is horizontal, each sensitivity axis of each acceleration sensor chip 2 to 5 is in the vertical plane with respect to the horizontal axis direction. Therefore, the multi-axis acceleration detection device 1 can easily perform the mounting operation of the housing 10.

コントローラは、各加速度センサチップ2,3の出力を基に横軸X方向の水平加速度と縦軸Y方向の鉛直加速度をそれぞれ演算するとともに、各加速度センサチップ4,5の出力を基に前後軸方向の水平加速度と縦軸Y方向の鉛直加速度をそれぞれ演算する
The controller calculates the horizontal acceleration in the horizontal axis X direction and the vertical acceleration in the vertical axis Y direction based on the outputs of the acceleration sensor chips 2 and 3, respectively, and the front and rear axes based on the outputs of the acceleration sensor chips 4 and 5 respectively. The horizontal acceleration in the direction and the vertical acceleration in the Y-axis direction are calculated.

筐体10をセンサ基板取付面13が車両の台車に対して車両左右方向に延びるように配置することにより、各加速度センサチップ2,3の出力を基に台車に生じる左右方向の加速度を検出し、この検出信号に応じて車両の横揺れを抑える制御を行うことができる。   By arranging the housing 10 such that the sensor board mounting surface 13 extends in the vehicle left-right direction with respect to the vehicle carriage, the lateral acceleration generated in the carriage is detected based on the outputs of the acceleration sensor chips 2 and 3. Thus, it is possible to perform control for suppressing the rolling of the vehicle according to the detection signal.

筐体10をセンサ基板取付面19が車両の台車に対して車両前後方向に延びるように配置することにより、各加速度センサチップ4,5の出力を基に台車に生じる前後方向の加速度を検出し、この検出信号に応じて車両の各種制御を行うことができる。   By arranging the housing 10 so that the sensor board mounting surface 19 extends in the vehicle longitudinal direction with respect to the vehicle carriage, the longitudinal acceleration generated in the carriage is detected based on the outputs of the acceleration sensor chips 4 and 5. Various controls of the vehicle can be performed according to the detection signal.

各加速度センサチップ2〜5の感度軸は、仮想感度軸設定面において、横軸Xに対して同一角度45°づつ傾斜しているため、多軸加速度検出装置1の取り付け誤差があったとしても、多軸加速度検出装置1の水平加速度に相当する出力は、鉛直加速度の影響を受けないものとすることができ、検出精度を損なわない。   Since the sensitivity axes of the acceleration sensor chips 2 to 5 are inclined at the same angle of 45 ° with respect to the horizontal axis X on the virtual sensitivity axis setting surface, even if there is an attachment error of the multi-axis acceleration detection device 1 The output corresponding to the horizontal acceleration of the multi-axis acceleration detecting device 1 can be made not to be affected by the vertical acceleration, and the detection accuracy is not impaired.

コントローラは、加速度検出対象物(多軸加速度検出装置1)の静止時において検出される縦軸Y方向の加速度を重力加速度と比較し、多軸加速度検出装置1(各加速度センサチップ2〜5)の故障を検知する。   The controller compares the acceleration in the Y-axis of the vertical axis detected when the acceleration detection object (multi-axis acceleration detection device 1) is stationary with the gravitational acceleration, and multi-axis acceleration detection device 1 (each acceleration sensor chip 2-5). Detects a malfunction.

互いに対となる各加速度センサチップ2,3どうしと各加速度センサチップ4,5どうしは、設置基準面11と直交方向(縦軸Y方向)についてオフセットするとともに、各設置基準面11,19と平行方向についてオフセットして各センサ基板20,29に介装することにより、各センサ基板20,29に占める加速度センサチップ2,3の介装スペースを小さくし、多軸加速度検出装置1の小型化がはかれる。   The acceleration sensor chips 2 and 3 and the acceleration sensor chips 4 and 5 that are paired with each other are offset in the direction orthogonal to the installation reference plane 11 (in the vertical axis Y direction) and parallel to the installation reference planes 11 and 19. By interposing the sensor boards 20 and 29 with the direction being offset, the space for interposing the acceleration sensor chips 2 and 3 occupying the sensor boards 20 and 29 can be reduced, and the multi-axis acceleration detection device 1 can be downsized. Peeled off.

筐体10に設置基準面11に開口して各センサ基板20,29が収められる収装室12を形成し、この収装室12に樹脂を充填して固化させた樹脂部17を形成することにより、この樹脂部17を介して筐体10に対して各センサ基板20,29及び加速度センサチップ2〜5が固定されるとともに、これらの防水がはかられる。   A housing chamber 12 is formed in the housing 10 so as to open to the installation reference plane 11 and accommodate the sensor substrates 20 and 29, and a resin portion 17 filled with resin and solidified in the housing chamber 12 is formed. As a result, the sensor substrates 20 and 29 and the acceleration sensor chips 2 to 5 are fixed to the housing 10 via the resin portion 17, and waterproofing of the sensor substrates 20 and 29 is achieved.

次に図4に示す他の実施形態を説明する。なお、前記実施形態と同一構成部には同一符号を付す。   Next, another embodiment shown in FIG. 4 will be described. In addition, the same code | symbol is attached | subjected to the same structure part as the said embodiment.

センサ基板20に2軸検出タイプの加速度センサチップ8を介装する。この加速度センサチップ8は互いに直交する2つの感度軸を有する。一方の感度軸は、図4に白抜き矢印で示すように、チップ本体6の中央部を起点とし、直方体の外形を持つチップ本体6の一方の側部6aと平行に延びる。他方の感度軸は、図4に白抜き矢印で示すように、チップ本体6の中央部を起点とし、チップ本体6の他方の側部6bと平行なものとがある。   A two-axis detection type acceleration sensor chip 8 is interposed on the sensor substrate 20. The acceleration sensor chip 8 has two sensitivity axes that are orthogonal to each other. One sensitivity axis starts from the center of the chip body 6 and extends parallel to one side 6a of the chip body 6 having a rectangular parallelepiped shape, as indicated by the white arrow in FIG. The other sensitivity axis may be parallel to the other side 6b of the chip body 6 starting from the center of the chip body 6 as indicated by the white arrow in FIG.

加速度センサチップ8はこれら各感度軸を仮想感度軸設定面Cにおいて横軸Xに対して同一角度45°づつ傾斜させるようにセンサ基板20に介装される。   The acceleration sensor chip 8 is interposed on the sensor substrate 20 so that these sensitivity axes are inclined at the same angle of 45 ° with respect to the horizontal axis X on the virtual sensitivity axis setting plane C.

この場合も、筐体10を設置基準面11が水平になるように台車の支持部材(加速度検出対象物)に取り付けることにより、加速度センサチップ8の感度軸が鉛直平面内において水平軸方向に対して所定角度で傾斜するように配置されるため、多軸加速度検出装置1は筐体10の取り付け作業を容易に行うことができる。   Also in this case, the sensitivity axis of the acceleration sensor chip 8 is in the vertical plane with respect to the horizontal axis direction by attaching the housing 10 to the carriage support member (acceleration detection object) so that the installation reference plane 11 is horizontal. Therefore, the multi-axis acceleration detection device 1 can easily perform the mounting operation of the housing 10.

本発明は上記の実施の形態に限定されずに、その技術的な思想の範囲内において種々の変更がなしうることは明白である。   The present invention is not limited to the above-described embodiment, and it is obvious that various modifications can be made within the scope of the technical idea.

本発明の多軸加速度検出装置は、車両や建築物の揺れを検出するものや、他の機械等に利用できる。   The multi-axis acceleration detection device of the present invention can be used for a device that detects a shake of a vehicle or a building, another machine, or the like.

本発明の実施の形態を示し、(a)は多軸加速度検出装置の断面図、(b)は多軸加速度検出装置を下方から見た平面図。1 shows an embodiment of the present invention, (a) is a cross-sectional view of a multi-axis acceleration detection device, (b) is a plan view of the multi-axis acceleration detection device as viewed from below. 同じくセンサ基板と加速度センサチップ等を示し、(a)はその側面図、(b)はその正面図。Similarly, a sensor board, an acceleration sensor chip, etc. are shown, (a) is the side view, and (b) is the front view. 同じく(a)はセンサ基板と加速度センサチップ等を示す側面図、(b)は仮想感度軸設定面Cにおける感度軸の方向ベクトルを示す図。Similarly, (a) is a side view showing a sensor substrate, an acceleration sensor chip, and the like, and (b) is a diagram showing a direction vector of a sensitivity axis on a virtual sensitivity axis setting plane C. 他の実施の形態を示すセンサ基板と加速度センサチップの側面図。The side view of the sensor board | substrate and acceleration sensor chip which show other embodiment.

符号の説明Explanation of symbols

1 多軸加速度検出装置
2〜5 加速度センサチップ
8 加速度センサチップ
10 筐体
11 設置基準面
12 収装室
13,19 センサ基板取付面
17 樹脂部
20,29 センサ基板
DESCRIPTION OF SYMBOLS 1 Multi-axis acceleration detection apparatus 2-5 Acceleration sensor chip 8 Acceleration sensor chip 10 Housing | casing 11 Installation reference plane 12 Storage chamber 13, 19 Sensor substrate mounting surface 17 Resin part 20, 29 Sensor substrate

Claims (5)

加速度検出対象物に取り付けられる筐体と、この筐体に収められる複数のセンサ基板と、所定の感度軸方向について加速度を検出する複数の加速度センサチップとを備え、前記筐体に加速度検出対象物に固定される設置基準面と、この設置基準面に直交して前記各センサ基板を着座させる複数のセンサ基板取付面とをそれぞれ形成し、この各センサ基板取付面と平行に延びる各平面をそれぞれ仮想感度軸設定面とし、この各仮想感度軸設定面において前記加速度センサチップを複数の感度軸が互いに平行とならないようにかつ前記設置基準面に対して傾斜するように前記各センサ基板にそれぞれ介装したことを特徴とする多軸加速度検出装置。   A housing attached to the acceleration detection object; a plurality of sensor boards housed in the housing; and a plurality of acceleration sensor chips that detect acceleration in a predetermined sensitivity axis direction; the acceleration detection object in the housing And a plurality of sensor board mounting surfaces for seating each sensor board perpendicular to the installation reference plane, and each plane extending in parallel with each sensor board mounting surface. A virtual sensitivity axis setting surface is provided, and the acceleration sensor chip is interposed on each sensor substrate so that a plurality of sensitivity axes are not parallel to each other and are inclined with respect to the installation reference surface on each virtual sensitivity axis setting surface. A multi-axis acceleration detection device characterized by wearing. 対の前記仮想感度軸設定面を互いに直交させたことを特徴とする請求項1に記載の多軸加速度検出装置。   The multi-axis acceleration detecting device according to claim 1, wherein the virtual sensitivity axis setting surfaces of a pair are orthogonal to each other. 前記加速度センサチップの各感度軸を前記設置基準面に対して角度45°づつ傾斜させたことを特徴とする請求項1または2に記載の多軸加速度検出装置。   3. The multi-axis acceleration detecting device according to claim 1, wherein each sensitivity axis of the acceleration sensor chip is inclined at an angle of 45 ° with respect to the installation reference plane. 互いに異なる感度軸を有する一対の加速度センサチップを備え、この各加速度センサチップを前記設置基準面と直交方向についてオフセットするとともに、前記設置基準面と平行方向についてオフセットして前記センサ基板に介装したことを特徴とする請求項1から3のいずれか一つに記載の多軸加速度検出装置。   A pair of acceleration sensor chips having different sensitivity axes is provided, and each acceleration sensor chip is offset in a direction orthogonal to the installation reference plane, and is offset in a direction parallel to the installation reference plane and interposed in the sensor substrate. The multi-axis acceleration detection device according to claim 1, wherein the multi-axis acceleration detection device is a multi-axis acceleration detection device. 前記筐体に前記設置基準面に開口して前記センサ基板が収められる収装室を形成し、この収装室に樹脂を充填して固化させた樹脂部を形成したことを特徴とする請求項1から4のいずれか一つに記載の多軸加速度検出装置。   The housing is formed with an accommodation chamber in which the sensor substrate is accommodated by opening in the installation reference plane, and a resin portion filled with resin and solidified in the accommodation chamber is formed. The multi-axis acceleration detection device according to any one of 1 to 4.
JP2005162791A 2005-06-02 2005-06-02 Multiaxial acceleration detector Pending JP2006337196A (en)

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