JP2006327896A - Method for heat-treating optical fiber preform - Google Patents

Method for heat-treating optical fiber preform Download PDF

Info

Publication number
JP2006327896A
JP2006327896A JP2005155855A JP2005155855A JP2006327896A JP 2006327896 A JP2006327896 A JP 2006327896A JP 2005155855 A JP2005155855 A JP 2005155855A JP 2005155855 A JP2005155855 A JP 2005155855A JP 2006327896 A JP2006327896 A JP 2006327896A
Authority
JP
Japan
Prior art keywords
glass rod
optical fiber
fiber preform
base material
sintering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005155855A
Other languages
Japanese (ja)
Other versions
JP4398404B2 (en
Inventor
Hiroshi Machida
浩史 町田
Hiroyuki Koide
弘行 小出
Koji Sato
光司 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2005155855A priority Critical patent/JP4398404B2/en
Publication of JP2006327896A publication Critical patent/JP2006327896A/en
Application granted granted Critical
Publication of JP4398404B2 publication Critical patent/JP4398404B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01486Means for supporting, rotating or translating the preforms being formed, e.g. lathes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for heat-treating an optical fiber preform where a glass rod connected to the preform can be reutilized in its sintering or drawing step and thus a production cost can be reduced furthermore. <P>SOLUTION: When the optical fiber preform is connected to a glass rod 12 and hung in a heat-treating device with a hanging jig in its sintering or drawing step, the glass rod 12 whose outside diameter is D2 is inserted into a pipe 13 whose inside diameter is D1 and which constitutes the hanging jig. The clearance (D1-D2) between the pipe 13 and the glass rod 12 satisfies the equation: 1.0&le;[(D1-D2)/D2]&times;100&le;5.0. A flexible shock absorbing material 20 whose main raw material is carbon and whose carbon content is 97% or more is favorably inserted into at least a part of the clearance 19 between the pipe 13 and the glass rod 12. <P>COPYRIGHT: (C)2007,JPO&amp;INPIT

Description

本発明は、光ファイバ用多孔質母材の焼結工程及び光ファイバ用ガラス母材の延伸工程において、生産コストをより低減させる光ファイバ用母材の加熱処理方法に関する。   The present invention relates to a heat treatment method for an optical fiber preform that further reduces production costs in the step of sintering the optical fiber porous preform and the step of stretching the optical fiber glass preform.

近年、需要の減少とともに光ファイバ母材の製造工程では、生産コストの削減が求められている。生産コストを削減するには多種多様な方法が考えられるが、その一つとして、石英製ガラス棒の使用量の削減が挙げられる。
具体的に説明すると、光ファイバ母材の製造工程では、さまざまな用途に石英製ガラス棒が使用されている。例えば、VAD工程の堆積初期に使用される種棒、OVD工程におけるコアを有するターゲット材の両端にダミー棒(非有効部部分)として接続されるガラス棒、火炎研磨工程において母材の両端に把持・支持部分として接続されるガラス棒などがある。
In recent years, with the decrease in demand, in the manufacturing process of optical fiber preforms, reduction of production cost has been demanded. Various methods can be considered to reduce the production cost, and one of them is to reduce the amount of quartz glass rods used.
More specifically, quartz glass rods are used for various purposes in the optical fiber preform manufacturing process. For example, seed rods used at the beginning of deposition in the VAD process, glass rods connected as dummy bars (ineffective portions) at both ends of the target material having a core in the OVD process, and gripping at both ends of the base material in the flame polishing process -There are glass rods connected as support parts.

上記用途に利用されたガラス棒は、以前は、その都度廃棄処分されていたが、昨今の生産コスト低減の要求にともない、可能な限り繰り返し使用することで、生産コストに占める石英製ガラス棒の割合を低下させることが求められている。
しかし、現状では、OVD工程において使用されるコアを有するターゲット材の両端に接続されるガラス棒は、以下に示すような理由から、複数回の使用が困難となっている。すなわち、OVD工程で使用するターゲット材の片端には、次の焼結工程において、焼結装置に吊るすために使用される凹部又は凸部の設けられたガラス棒が接続されている(特許公報1参照)。
The glass rods used for the above applications were previously disposed of each time. However, due to the recent demand for reduction in production costs, the glass rods used in the production costs can be reduced by repeatedly using them as much as possible. There is a need to reduce the rate.
However, at present, glass rods connected to both ends of a target material having a core used in the OVD process are difficult to use multiple times for the following reasons. That is, the glass rod provided with the recessed part or the convex part used in order to hang it to a sintering apparatus in the next sintering process is connected to one end of the target material used in the OVD process (Patent Publication 1). reference).

例えば、OVD工程で製作された多孔質母材の焼結には、図1に示すような装置が用いられる。多孔質母材1は、炉心管2内に回転機構3により回転自在に吊下げられ、ヒータ4で加熱され焼結される。ガス導入口5からはHeガスや塩素系ガスが供給され、排気口6から排気される。多孔質母材1は、吊り下げ治具である吊具7を介して回転軸8に接続されている。ネジ棒9には支持棒10が係合し、昇降機構11によって、支持棒10及び回転軸8を介して多孔質母材1が焼結の進行に合わせて昇降される。   For example, an apparatus as shown in FIG. 1 is used for sintering of a porous base material manufactured by the OVD process. The porous base material 1 is suspended in a furnace core tube 2 by a rotation mechanism 3 so as to be freely rotatable, and is heated and sintered by a heater 4. He gas or chlorine-based gas is supplied from the gas inlet 5 and exhausted from the exhaust port 6. The porous base material 1 is connected to a rotating shaft 8 via a hanging tool 7 that is a hanging jig. A support rod 10 is engaged with the screw rod 9, and the porous base material 1 is moved up and down by the elevating mechanism 11 through the support rod 10 and the rotating shaft 8 as the sintering progresses.

図2は、図1の吊具7を拡大した図であり、(a)はその正面図、(b)は側面図である。多孔質母材1に接続されたガラス棒12は、若干の余裕を持った石英ガラス製の管13に挿入され、ガラス棒12の一側面に設けられた切込み凹部14に、管13に設けられた穴15から、管13の内壁面と切込み凹部14との間隙にピン16を挿通することにより、吊具7を介して、ガラス棒12すなわち多孔質母材1が回転軸8に吊下げられる。なお、ピン16は、円柱の側面に平坦面17を有し、この平坦面17で切込み凹部14の傾斜面と接触する。   FIG. 2 is an enlarged view of the hanging tool 7 of FIG. 1, (a) is a front view thereof, and (b) is a side view thereof. The glass rod 12 connected to the porous base material 1 is inserted into a quartz glass tube 13 having a slight margin, and is provided in the tube 13 in a cut recess 14 provided on one side of the glass rod 12. By inserting the pin 16 from the hole 15 into the gap between the inner wall surface of the tube 13 and the cut recess 14, the glass rod 12, that is, the porous base material 1 is suspended from the rotating shaft 8 via the hanging tool 7. . The pin 16 has a flat surface 17 on the side surface of the cylinder, and the flat surface 17 contacts the inclined surface of the cut recess 14.

このような吊具7を用いて多孔質母材1を吊り下げる場合、光ファイバでの接続損失の原因となるコア部分の偏芯を防止することができる。しかし、このような吊具7を用いて焼結を行うと、管13に挿入されているガラス棒12の表面に0.5〜2.0mm程度の打痕状の傷が生じる。
なお、傷の発生原因としては、以下が推測される。すなわち、多孔質母材1の焼結は、吊具7に吊下げられた状態で、高温下に曝された後、常温まで冷却されるという、一連の温度サイクルによって行われる。このため冷却時に、吊具の管とガラス棒との間の熱膨張係数の差により生じる焼きばめ現象により、ガラス棒に傷が発生する。
When the porous preform 1 is suspended using such a hanging tool 7, it is possible to prevent the eccentricity of the core portion that causes connection loss in the optical fiber. However, when sintering is performed using such a hanging tool 7, a dent-like scratch of about 0.5 to 2.0 mm is generated on the surface of the glass rod 12 inserted into the tube 13.
In addition, the following is estimated as a cause of generation | occurrence | production of a damage | wound. That is, the sintering of the porous base material 1 is performed by a series of temperature cycles in which the porous base material 1 is exposed to a high temperature in a state where it is suspended by the hanger 7 and then cooled to room temperature. For this reason, at the time of cooling, a damage | wound generate | occur | produces on a glass rod by the shrink-fitting phenomenon produced by the difference of the thermal expansion coefficient between the pipe | tube of a hanger, and a glass rod.

このような、切込み凹部を有しかつ傷の生じたガラス棒を再利用すると、OVD工程においてガラス微粒子の堆積中に、ガラス棒に傷を起点とする亀裂が発生し、堆積途中で母材が落下するという事故が発生する。また、堆積工程で事故が発生しなかった場合でも、焼結工程でのヒートサイクルにより、焼結工程において落下事故が発生する可能性が大きくなっている。母材の落下事故が発生すると、母材の廃棄に加えて設備に大きな損傷を与える。このため、傷が生じたガラス棒は再利用されず、廃棄処分される。   When such a glass rod having a cut recess and having scratches is reused, cracks originating from scratches occur in the glass rod during the deposition of glass particles in the OVD process, and the base material is in the middle of the deposition. An accident of falling occurs. Even if no accident occurs in the deposition process, there is a high possibility that a fall accident will occur in the sintering process due to the heat cycle in the sintering process. If a base material fall accident occurs, in addition to discarding the base material, the equipment will be seriously damaged. For this reason, the damaged glass rod is not reused but discarded.

上記傷の発生は、多孔質母材の焼結工程の次に行われるガラス母材の延伸工程においても同様の現象が発生することが判明した。
なお、これらの多孔質母材及びガラス母材を含めて、以下、光ファイバ用母材もしくは単に母材と称する。
特開2001-287916号公報
It has been found that the occurrence of the flaws also occurs in the same phenomenon in the glass base material stretching step performed after the porous base material sintering step.
The porous base material and the glass base material are hereinafter referred to as an optical fiber base material or simply as a base material.
Japanese Patent Laid-Open No. 2001-287916

本発明は、光ファイバ用母材の焼結工程あるいは延伸工程において、母材に接続されるガラス棒の再利用を可能とし、生産コストをより低減させることのできる光ファイバ用母材の加熱処理方法を提供することを目的としている。   The present invention provides a heat treatment of an optical fiber preform that enables reuse of a glass rod connected to the preform in the sintering process or the stretching process of the optical fiber preform and further reduces the production cost. It aims to provide a method.

本発明の光ファイバ用母材の加熱処理方法は、光ファイバ用母材の焼結工程又は延伸工程において、該母材をガラス棒に接続し吊り下げ治具を介して加熱処理装置に吊り下げる際に、該吊り下げ治具を構成する内径D1の管に外径D2の前記ガラス棒を挿入し、管とガラス棒との隙間(D1−D2)が、1.0≦[(D1−D2)/D2]×100≦5.0の関係を満たすことを特徴としている。
なお、管とガラス棒との隙間の少なくとも一部に、炭素を主原料とする可撓性緩衝材を挿入するのが好ましく、可撓性緩衝材の炭素の含有量は97%以上とする。
The method for heat-treating an optical fiber preform according to the present invention comprises connecting the preform to a glass rod and suspending it from a heat treatment apparatus via a suspension jig in the optical fiber preform sintering or stretching process. At this time, the glass rod having the outer diameter D2 is inserted into the tube having the inner diameter D1 constituting the suspension jig, and the gap (D1-D2) between the tube and the glass rod is 1.0 ≦ [(D1-D2) / D2] × 100 ≦ 5.0 is satisfied.
In addition, it is preferable to insert a flexible cushioning material mainly made of carbon into at least a part of the gap between the tube and the glass rod, and the carbon content of the flexible cushioning material is 97% or more.

本発明により、光ファイバ用母材の焼結工程又は延伸工程において、吊具内に挿入されるガラス棒は、表面に生じる傷の発生が防止され、ガラス棒の再利用が可能となり、光ファイバ母材の製造コストの低減に寄与する。   According to the present invention, in the optical fiber preform sintering process or drawing process, the glass rod inserted into the hanger is prevented from being scratched on the surface, and the glass rod can be reused. Contributes to reducing the manufacturing cost of the base material.

本発明者等は、上記課題を解決するため鋭意研究の結果、以下の知見を得て本発明を達成した。
光ファイバ用母材の加熱処理、すなわち、多孔質母材の焼結工程又はガラス母材の延伸工程において、吊具の管と挿入されるガラス棒との焼きばめによる傷発生を防止するための有効な手段の一つとして、ガラス棒と挿入される管との間に一定幅以上のクリアランスを大きく取ることが考えられる。
As a result of intensive studies to solve the above problems, the present inventors have obtained the following knowledge and achieved the present invention.
In order to prevent the occurrence of scratches due to shrink fitting between the hanger tube and the inserted glass rod in the heat treatment of the optical fiber preform, that is, in the sintering process of the porous preform or the stretching process of the glass preform. As one of the effective means, it is conceivable to provide a clearance of a certain width or more between the glass rod and the inserted tube.

しかし、この場合には、以下の問題が発生する。
単純に、挿入される管とガラス棒とのクリアランスのみを大きくすると、焼結工程で回転を開始した際に、母材に振れ回りが発生して均等に加熱されず、その結果、偏肉及び偏芯を引き起こす。同様に延伸工程においても、クリアランスを大きくすると、吊り下げられた母材に鉛直方向に対して傾きが生じ、延伸して得られるプリフォームが湾曲したものとなる。
このように、ガラス棒が挿入される管とガラス棒との隙間の大きさと、処理後のガラス棒表面に発生する傷とはトレードオフの関係になっており、両者が両立する条件が求められる。
However, in this case, the following problem occurs.
Simply increasing the clearance between the tube to be inserted and the glass rod only, when the rotation is started in the sintering process, the base material will run out and will not be heated evenly. Causes eccentricity. Similarly, in the stretching process, when the clearance is increased, the suspended base material is inclined with respect to the vertical direction, and the preform obtained by stretching is curved.
As described above, the size of the gap between the tube into which the glass rod is inserted and the scratch on the surface of the glass rod after the treatment are in a trade-off relationship, and a condition where both are compatible is required. .

鋭意研究の結果、発明者らは、ガラス棒が挿入される管の内径D1及びガラス棒の外径D2と、挿入される管とガラス棒との隙間(D1−D2) との関係が、1.0≦[(D1−D2)/D2]×100≦5.0の関係を満たし、さらに、加熱処理の際にその隙間の一部に炭素を主原料とする可撓性緩衝材を挿入することで、焼結後の偏芯や延伸して得られたプリフォームに湾曲が生じることなく、管とガラス棒との焼きばめによる傷を防止できることを見出し、本発明を達成した。   As a result of intensive research, the inventors have found that the relationship between the inner diameter D1 of the tube into which the glass rod is inserted and the outer diameter D2 of the glass rod, and the gap (D1-D2) between the inserted tube and the glass rod is 1.0. ≦ [(D1−D2) / D2] × 100 ≦ 5.0 is satisfied, and a flexible cushioning material mainly composed of carbon is inserted into a part of the gap during the heat treatment. The present invention has been achieved by finding that damages caused by shrink fitting between a tube and a glass rod can be prevented without causing bending in the eccentric after stretching and the preform obtained by stretching.

ここで、[(D1−D2)/D2]×100 <1.0とした場合には、隙間が小さすぎて可撓性緩衝材の挿入が非常に難しくなる。肉厚の薄い緩衝材を挿入しようとしても、挿入の際に緩衝材に部分的にシワまたは亀裂が入り、その結果、処理後のガラス棒表面の一部に傷が発生する。   Here, when [(D1−D2) / D2] × 100 <1.0, the gap is too small and it becomes very difficult to insert the flexible cushioning material. Even if a buffer material with a small thickness is to be inserted, the buffer material is partially wrinkled or cracked during the insertion, and as a result, a part of the surface of the glass rod after processing is damaged.

また、5.0<[(D1−D2)/D2]×100 とした場合においては、可撓性緩衝材を挿入した状態でも、焼結工程において回転による振れ回りが発生する。この振れ回りの発生により、母材は均等に加熱されず、結果的に偏肉を生じ、偏芯を引き起こす。また、延伸工程においても吊り下げた母材に傾きが生じ、延伸後のプリフォームに湾曲が発生する。   Further, in the case of 5.0 <[(D1-D2) / D2] × 100, whirling due to rotation occurs in the sintering process even when the flexible cushioning material is inserted. Due to the occurrence of this swaying, the base material is not heated evenly, resulting in uneven thickness and eccentricity. Further, in the stretching process, the suspended base material is inclined, and the preform after stretching is curved.

可撓性緩衝材は、焼結工程にて1,500℃程度まで加熱されることを考慮し、炭素を主原料とするものを用いる。一例として、ニカフィルム(日本カーボン社製、商品名)が挙げられる。ただし、本例はあくまでも一例であり、本発明を限定するものではない。
なお、可撓性緩衝材の主原料として用いる炭素は、純度97%以上のものとするのが好ましい。炭素の純度が97%未満では、高温処理条件下において、可撓性緩衝材中に含まれる不純物により、ガラス棒の表面に失透が発生する。
Considering that the flexible buffer material is heated to about 1,500 ° C. in the sintering process, a material having carbon as a main raw material is used. An example is a Nika film (trade name, manufactured by Nippon Carbon Co., Ltd.). However, this example is merely an example, and does not limit the present invention.
In addition, it is preferable that the carbon used as the main raw material of the flexible buffer material has a purity of 97% or more. If the purity of the carbon is less than 97%, devitrification occurs on the surface of the glass rod due to impurities contained in the flexible buffer material under high temperature treatment conditions.

以下に、本発明の実施例を示すが、本発明はこれらに限定されず、様々な態様が可能である。
(実施例1)
図1に示した縦型焼結装置を用いて、直径300mm、重量80kgの光ファイバ用母材(多孔質母材)の焼結を行った。
母材1は、セラミック製のシャフト8の先端に取り付けられた吊り下げ治具(吊具)7に取り付け、装置に吊り下げた。母材1をモーター3で10rpmにて回転させ、その状態でヒータ4を1500℃まで加熱した後、ネジ棒9を用いた昇降機構11により母材1を2.0mm/minの速度で下降させ、先端から順次焼結を行った。焼結中、Heガス及び塩素系ガスをそれぞれ、10 L/min、3 L/minの流量にてガス導入口5より炉心管2内に導入し、排気口6から排気した。
Examples of the present invention are shown below, but the present invention is not limited to these, and various modes are possible.
Example 1
The optical fiber preform (porous preform) having a diameter of 300 mm and a weight of 80 kg was sintered using the vertical sintering apparatus shown in FIG.
The base material 1 was attached to a suspension jig (suspender) 7 attached to the tip of a ceramic shaft 8 and suspended from the apparatus. The base material 1 is rotated at 10 rpm by the motor 3 and the heater 4 is heated to 1500 ° C. in this state, and then the base material 1 is lowered at a speed of 2.0 mm / min by the lifting mechanism 11 using the screw rod 9. Sintering was performed sequentially from the tip. During sintering, He gas and chlorine-based gas were introduced into the core tube 2 from the gas inlet 5 at flow rates of 10 L / min and 3 L / min, respectively, and exhausted from the exhaust port 6.

本実施例で使用した吊り下げ治具の概略を図3に示した。なお、図3の(a)はその縦断面図であり、(b)は横断面図である。
吊具7を構成する挿入管13の内径D1は41.0mmであり、挿入したガラス棒12の外径D2は40.0mmである。挿入管13に挿入した部分のガラス棒12の長さLは80mmである。さらに、挿入管13とガラス棒12との隙間(D1−D2)に、高さ80mm、幅30mm、厚さ0.2mmの炭素製の可撓性緩衝材20を図3のA方向からガラス棒表面を覆うように挿入した。
この状態で母材1の焼結を行い、焼結終了後、装置から取り外してガラス棒12の表面を観察したところ、表面に傷は認められなかった。透明ガラス化された母材の偏芯率は0.1%以下であった。
An outline of the hanging jig used in this example is shown in FIG. 3A is a longitudinal sectional view, and FIG. 3B is a transverse sectional view.
The inner diameter D1 of the insertion tube 13 constituting the hanger 7 is 41.0 mm, and the outer diameter D2 of the inserted glass rod 12 is 40.0 mm. The length L of the glass rod 12 at the portion inserted into the insertion tube 13 is 80 mm. Furthermore, in the gap (D1-D2) between the insertion tube 13 and the glass rod 12, a carbon flexible cushioning material 20 having a height of 80 mm, a width of 30 mm, and a thickness of 0.2 mm is inserted from the direction A in FIG. Was inserted to cover.
In this state, the base material 1 was sintered. After the sintering, the base material 1 was removed from the apparatus and the surface of the glass rod 12 was observed. As a result, no scratch was observed on the surface. The eccentricity of the transparent vitrified base material was 0.1% or less.

(実施例2〜4)
実施例1で用いた光ファイバ用母材(多孔質母材)と同様の外径、重量を有する母材1を3本用意した。図3に示すような構造を有し、それぞれ内径D1の異なる挿入管(40.5mm、41.5mm、42.0mm)13を使用し、挿入管13とガラス棒12との隙間に、高さ80mm、幅30mm、厚さ0.4mmの炭素製の可撓性緩衝材20を挿入した以外は、実施例1と同様にして焼結を行った。
焼結終了後、装置から取り外して、3本の透明ガラス化された母材のガラス棒表面を観察したところ、いずれの挿入管13を使用したものも、ガラス棒表面に傷は認められなかった。また、いずれの母材もその偏芯率は0.1%以下であった。
(Examples 2 to 4)
Three base materials 1 having the same outer diameter and weight as the optical fiber base material (porous base material) used in Example 1 were prepared. The structure shown in Fig. 3 is used. Insertion tubes (40.5mm, 41.5mm, 42.0mm) 13 with different inner diameters D1 are used, and the gap between the insertion tube 13 and the glass rod 12 is 80mm high and wide. Sintering was performed in the same manner as in Example 1 except that carbon flexible buffer material 20 having a thickness of 30 mm and a thickness of 0.4 mm was inserted.
After completion of sintering, the glass rod surface of the three transparent vitrified base materials was removed from the apparatus, and no damage was observed on the glass rod surface using any of the insertion tubes 13 . In addition, the eccentricity of each base material was 0.1% or less.

(比較例1,2)
実施例1で用いた光ファイバ用母材(多孔質母材)と同様の外径、重量を有する母材1を2本用意した。図3に示すような構造を有し、それぞれ内径D1の異なる挿入管(40.4mm、42.5mm)13を使用し、挿入管13とガラス棒12との隙間に、高さ80mm、幅30mm、厚さ0.4mmの炭素製の可撓性緩衝材20を挿入した以外は、実施例1と同様にして焼結を行った。
なお、挿入管13として内径D1が40.4mmのものを使用した場合は、ガラス棒12との隙間が非常に狭いため、挿入の際に、可撓性緩衝材20の一部に亀裂およびシワが生じた。
(Comparative Examples 1 and 2)
Two base materials 1 having the same outer diameter and weight as the optical fiber base material (porous base material) used in Example 1 were prepared. The insertion tube (40.4mm, 42.5mm) 13 has a structure as shown in Fig. 3, each with a different inner diameter D1, and the gap between the insertion tube 13 and the glass rod 12 is 80mm high, 30mm wide, and thick. Sintering was performed in the same manner as in Example 1 except that a carbon flexible buffer material 20 having a thickness of 0.4 mm was inserted.
When the insertion tube 13 having an inner diameter D1 of 40.4 mm is used, the gap with the glass rod 12 is very narrow. occured.

焼結終了後、装置から取り外して、2本の透明ガラス化された母材のガラス棒表面を観察したところ、内径D1が40.5mmの挿入管を用いたものは、ガラス棒12の表面に直径0.2mm大の傷が1個、確認された。また、内径D1が42.5mmの挿入管を用いたものは、ガラス棒の表面に傷の発生は確認されなかったが、焼結中に母材の触れ周りが目視で確認され、結果的にその偏芯率は0.2%となり、実施例1〜4と比べて悪化していた。   After the sintering was completed, the glass rod surface of the two transparent vitrified base materials was observed. When an insertion tube having an inner diameter D1 of 40.5 mm was used, the surface of the glass rod 12 had a diameter. One 0.2mm large scratch was confirmed. In addition, in the case of using an insertion tube having an inner diameter D1 of 42.5 mm, no scratches were confirmed on the surface of the glass rod, but the contact area of the base material was visually confirmed during sintering, and as a result The eccentricity was 0.2%, which was worse than that of Examples 1 to 4.

光ファイバ用母材に接続されるガラス棒の再利用が可能となり、製造コストの低減に寄与する。   The glass rod connected to the optical fiber preform can be reused, contributing to a reduction in manufacturing costs.

縦型焼結装置の一例を示す概略縦断面図である。It is a schematic longitudinal cross-sectional view which shows an example of a vertical sintering apparatus. 光ファイバ用母材の吊具の一例を示す概略図であり、(a)はその正面図、(b)は側面図である。It is the schematic which shows an example of the hanging tool of the preform | base_material for optical fibers, (a) is the front view, (b) is a side view. 本発明の光ファイバ用母材の吊具の一例を示す概略図であり、(a)はその縦断面図、(b)は横断面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic which shows an example of the hanging tool of the optical fiber preform | base_material of this invention, (a) is the longitudinal cross-sectional view, (b) is a cross-sectional view.

符号の説明Explanation of symbols

1……多孔質母材(母材)、
2……炉心管、
3……モーター(回転機構)、
4……ヒータ、
5……ガス導入口、
6……排気口、
7……吊り下げ治具(吊具)、
8……シャフト(回転軸)、
9……ネジ棒、
10……支持棒、
11……昇降機構、
12……ガラス棒、
13……挿入管(管)、
14……切込み凹部、
15……穴、
16……ピン、
17……平坦面、
19……隙間、
20……可撓性緩衝材。
1 ... Porous base material (base material),
2 ... Core tube,
3 …… Motor (rotation mechanism),
4 ... Heater,
5 …… Gas inlet,
6 …… Exhaust port,
7 …… Hanging jig (hanging tool),
8 …… Shaft (rotating shaft),
9 …… Screw rod,
10 …… Support bar,
11 …… Elevating mechanism,
12 …… Glass rod,
13 …… Insertion tube (tube),
14 …… Incision recess,
15 …… hole,
16 …… Pin,
17 …… Flat surface,
19 …… Gap,
20 …… Flexible cushioning material.

Claims (3)

光ファイバ用母材の焼結工程又は延伸工程において、該母材をガラス棒に接続し吊り下げ治具を介して加熱処理装置に吊り下げる際に、該吊り下げ治具を構成する内径D1の管に外径D2の前記ガラス棒を挿入し、管とガラス棒との隙間(D1−D2)が、1.0≦[(D1−D2)/D2]×100≦5.0の関係を満たすことを特徴とする光ファイバ用母材の加熱処理方法。 In the sintering process or drawing process of the optical fiber preform, when the preform is connected to the glass rod and suspended in the heat treatment apparatus via the suspension jig, the inner diameter D1 constituting the suspension jig The glass rod having the outer diameter D2 is inserted into the tube, and the gap (D1−D2) between the tube and the glass rod satisfies the relationship of 1.0 ≦ [(D1−D2) / D2] × 100 ≦ 5.0. Heat treatment method for optical fiber preform. 管とガラス棒との隙間の少なくとも一部に、炭素を主原料とする可撓性緩衝材を挿入する請求項1に記載の光ファイバ用母材の加熱処理方法。 The method for heat-treating an optical fiber preform according to claim 1, wherein a flexible cushioning material mainly made of carbon is inserted into at least a part of a gap between the tube and the glass rod. 可撓性緩衝材の炭素の含有量が97%以上である請求項2に記載の光ファイバ用母材の加熱処理方法。

The method for heat-treating an optical fiber preform according to claim 2, wherein the flexible buffer material has a carbon content of 97% or more.

JP2005155855A 2005-05-27 2005-05-27 Heat treatment method for optical fiber preform Active JP4398404B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005155855A JP4398404B2 (en) 2005-05-27 2005-05-27 Heat treatment method for optical fiber preform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005155855A JP4398404B2 (en) 2005-05-27 2005-05-27 Heat treatment method for optical fiber preform

Publications (2)

Publication Number Publication Date
JP2006327896A true JP2006327896A (en) 2006-12-07
JP4398404B2 JP4398404B2 (en) 2010-01-13

Family

ID=37549978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005155855A Active JP4398404B2 (en) 2005-05-27 2005-05-27 Heat treatment method for optical fiber preform

Country Status (1)

Country Link
JP (1) JP4398404B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010059011A (en) * 2008-09-03 2010-03-18 Fujikura Ltd Method of producing optical fiber preform
JP2012066972A (en) * 2010-09-24 2012-04-05 Shin-Etsu Chemical Co Ltd Optical fiber preform suspender
JP2016179934A (en) * 2015-03-24 2016-10-13 信越化学工業株式会社 Sintering device, and sintering method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010059011A (en) * 2008-09-03 2010-03-18 Fujikura Ltd Method of producing optical fiber preform
JP2012066972A (en) * 2010-09-24 2012-04-05 Shin-Etsu Chemical Co Ltd Optical fiber preform suspender
JP2016179934A (en) * 2015-03-24 2016-10-13 信越化学工業株式会社 Sintering device, and sintering method

Also Published As

Publication number Publication date
JP4398404B2 (en) 2010-01-13

Similar Documents

Publication Publication Date Title
JP5038435B2 (en) Synthetic quartz glass hollow cylinder manufacturing method and thick hollow cylinder by the manufacturing method
JP5419453B2 (en) Thermal reflow of fused silica and glass
JP4398404B2 (en) Heat treatment method for optical fiber preform
WO2018126805A1 (en) Large-size optical fiber perform dehydroxylation annealing method and device
WO2007039426A1 (en) Welding method for joining components consisting of a high-silica material, and apparatus for performing the method
JP2010059033A (en) Method for manufacturing optical fiber preform
JPH0624784A (en) Production of optical fiber
CN111453979A (en) High strength welding process for making heavy duty glass preforms having large cross-sectional areas
JP2006516526A (en) Method of manufacturing a hollow cylinder of synthetic quartz glass using a holding device and a holding device suitable for carrying out this method
JP2005263577A (en) Apparatus for manufacturing glass preform for optical fiber
CN114804612A (en) Method and apparatus for elongating glass base material
US6550280B1 (en) Process of sintering a hanging silica tube so as to exhibit a low bow
JP2012066972A (en) Optical fiber preform suspender
JP4094787B2 (en) Optical fiber glass rod processing equipment
JP4325888B2 (en) Eccentric hollow wafer holding rod and method for manufacturing wafer holding apparatus using the holding rod
US20070125128A1 (en) Optical fiber perform cone shaping or preparation method
JP2004161563A (en) Method and apparatus for drawing optical fiber
US20070062223A1 (en) Optical fiber having reduced polarization mode dispersion (PMD) and method for producing the same
JP2004035369A (en) Method of manufacturing optical fiber preform
JP4464321B2 (en) Method and apparatus for producing quartz glass rod
WO2004101457A1 (en) Process for producing glass parent material of optical fiber
WO2008038298A2 (en) A process for preparing a mandrel for producing flawless optical fiber preform and a preform produced therefrom
JPH0288441A (en) Production device for high purity quartz pipe
TW202413296A (en) Tube made of quartz glass and method for producing the same
JP6622977B2 (en) Optical fiber preform manufacturing method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070522

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090715

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090721

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090917

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20091019

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091022

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121030

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4398404

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151030

Year of fee payment: 6