JP2006327715A - Work carrying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work carrying device having a structure floating a work with stabilizing attitude thereof without causing cost increase. <P>SOLUTION: In the work carrying device having a plurality of injection holes 16 and a propulsion injection holes 13 opened on an upper lid 22 of a housing 21 of a hollow structure, injecting compressed air supplied to an inside of the housing 21 from the plurality of injection holes 16 and the propulsion injection holes 13 to float the work by air injected from the injection holes 16 and move the work by air injected from the propulsion injection hole 13, a large diameter recess part 17 opening upward is provided on the upper lid 22, the injection holes 16 are opened on a center of a bottom surface 31 of the large diameter recess part 17, and air injected from the injection holes 16 is used for floating the work after being retained in the large diameter recess part 17. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a workpiece transfer device that jets compressed air from an injection hole, floats the workpiece with the air injected from the injection hole, and makes the workpiece movable.

2. Description of the Related Art As a workpiece transfer device, there is known a device in which a plurality of injection holes are provided on a workpiece transfer surface, compressed air is injected from the plurality of injection holes, and the workpiece is floated and moved from the workpiece transfer surface.
However, when the workpiece is levitated, there is a problem that the posture of the workpiece is not stable and easily deviates from a predetermined trajectory due to uneven spraying pressure, inclination of the conveying surface, and the like.

2. Description of the Related Art Conventionally, there has been proposed a workpiece transfer device having a function of stabilizing a workpiece posture and floating (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 10-157851 (FIG. 1)

Patent document 1 is demonstrated based on the following figure.
FIG. 11 is a diagram for explaining a basic configuration of a conventional technique. A workpiece transfer device 100 includes pressure transfer members 101 and 101 each having a plurality of small-diameter injection ports in a transfer path. A device that ejects a fluid as a conveying medium from 101, sucks the ejected fluid with a vacuum conveying member 103, stabilizes the posture of the workpiece, floats it, applies propulsive force at the ejection port 104, and conveys the workpiece. is there.
The pressure conveying member 101 and the vacuum conveying member 103 are formed of a porous material.

  A pressurizing port 105 is connected to the pressurizing and conveying member 101, a vacuum port 107 is connected to the vacuum conveying member 103, and a propulsion and pressurizing port 108 is connected to the injection port 104.

  However, since the conveying members 101 and 103 are made of a porous material, there is no problem if the workpiece to be delivered is a comparatively light and small workpiece such as a semiconductor wafer. In the case of a large and heavy object, high-pressure air is supplied to the pressure port 105 in order to float the work. In order to supply high-pressure air, it is necessary to increase the strength of the pressurization port 105 and increase the size of the pressurization pump, leading to an increase in the cost of the apparatus.

Further, when the conveying length of the apparatus is increased, the difference in the injection pressure is increased depending on the position of the pressure port, so that the posture of the workpiece is not stable.
In order to reduce the difference in the injection pressure depending on the position of the pressurization port, for example, compressed air is supplied from a plurality of locations. Supplying compressed air from a plurality of locations leads to an increase in the cost of the apparatus, such as adding a plurality of piping paths.
There is a demand for a workpiece transfer device having a structure that does not lead to an increase in cost while maintaining the function of stabilizing the posture of the workpiece and floating.

  It is an object of the present invention to provide a workpiece transfer device that has a structure in which the posture of a workpiece can be stabilized and floated and the cost does not increase.

  According to the first aspect of the present invention, a plurality of injection holes are formed in a housing having a hollow structure, compressed air supplied to the inside of the housing is injected from the plurality of injection holes, and the work is floated by the air injected from these injection holes. In the workpiece transfer device that enables the workpiece to move, the upper lid of the housing is provided with large-diameter recesses that open upward, and an injection hole is formed in the center of the bottom of these large-diameter recesses, and the air injected from these injection holes It is characterized in that the workpiece is floated after being retained in the large-diameter recess.

  The invention according to claim 2 is characterized in that a hollow housing is partitioned into an upper chamber and a lower chamber by a perforated plate, and the compressed air is supplied to the lower chamber.

  The invention according to claim 3 is characterized in that the housing is a hollow structure that is long and tapered toward the rear end.

  The invention according to claim 4 is characterized in that a plurality of propulsion injection holes for moving the workpiece are formed in the upper lid.

  In the invention according to claim 1, a large-diameter recess opening upward is provided in the upper lid of the housing, and the air jetted from the injection hole is retained in the large-diameter recess and then used for the floating of the workpiece. It is possible to correct the imbalance in the blast air velocity that exists irreversibly in the air. If the imbalance can be corrected, the workpiece can be lifted uniformly, and the posture of the workpiece can be stabilized and lifted. Since the posture of the workpiece is stabilized, it is possible to prevent the workpiece from being biased.

In addition, the porous material employed in the prior art is expensive, and it is necessary to increase the size of the pressure pump and increase the strength of the pressure port.
In this respect, in the present invention, it is only necessary to form the injection hole and the large-diameter recess in the upper lid, and the injection hole and the large-diameter recess can be easily formed. Since the large-diameter recess does not require an increase in the size of the pressurizing pump or an increase in the strength of the pressurizing port, the cost of the pump device can be reduced.

In addition, since it is only necessary to form a large-diameter recess in the upper lid, processing is easy and processing costs can be reduced.
As a result, it is possible to obtain a workpiece transfer apparatus having a structure that can stably float the workpiece and does not increase the cost.

  In the invention according to claim 2, since the inside of the housing is divided into the upper chamber and the lower chamber by the perforated plate and the compressed air is supplied to the lower chamber, the supplied compressed air is supplied to the lower chamber, the perforated plate, and the upper chamber. It flows in the order of the room. By causing the perforated plate to exert a rectifying effect, air turbulence can be corrected, and stable air can be supplied to the upper chamber. If there is no air turbulence in the upper chamber, air can be uniformly injected from the plurality of injection holes.

In the invention according to claim 3, if the housing is a hollow structure tapered toward the rear end, a part of the compressed air reaches the outside of the housing from the injection hole and the propulsion injection hole, and the remaining part flows in the housing. . Accordingly, the amount of air gradually decreases in the process of flowing through the housing. If the housing is tapered toward the rear end, the flow rate can be kept substantially constant. Since the flow rate is a determinant of dynamic pressure (speed pressure), the dynamic pressure in the housing is uniform if the flow rate is constant.
As a result, air can be uniformly injected from the plurality of injection holes.

  In the invention according to claim 4, since the plurality of propulsion injection holes for moving the workpiece are opened in the upper lid, it is possible to reduce the processing cost by simultaneous processing with the injection holes and the large-diameter concave portions.

The best mode for carrying out the present invention will be described below with reference to the accompanying drawings.
In the figure, the longitudinal direction of the workpiece transfer device is indicated by Ft, Rr, the width direction is indicated by L, R, and the vertical direction is indicated by T, B. The drawings are viewed in the direction of the reference numerals.
FIG. 1 is a plan view of a workpiece transfer device according to the present invention. A workpiece transfer device 10 includes a plurality of floating pocket holes 12... The same applies hereinafter), and between these floating pocket holes 12..., A plurality of propulsion injection holes 13. Guide members 15 and 15 for avoiding deviation from the conveyance surface 11 are provided.

  Each floating pocket hole 12 includes an injection hole 16 and a large-diameter concave portion 17, and a plurality of the floating pocket holes 12 are regularly arranged vertically and horizontally in the width direction and the longitudinal direction on the workpiece conveying surface 11. A plurality of the propelling injection holes 13 are formed in a slit shape in parallel with the width direction on the workpiece conveying surface 11 and at a substantially central portion on the workpiece conveying surface 11.

The width direction of the workpiece transfer device 10 matches the workpiece width direction, and the longitudinal direction of the workpiece transfer device 10 matches the workpiece feed direction.
Note that guide air blowing holes may be provided in the form of slits on both sides of the conveying surface in the workpiece feeding direction, and the guide member 15 may be substituted.
Further, the propulsion injection hole 13 may be omitted when the transport surface 11 descends in the workpiece feeding direction.

2 is a cross-sectional view taken along line 2-2 of FIG.
The workpiece transfer device 10 is arranged so that the housing 21 which is a U-shaped member having a hollow structure is opened upward, and is covered with an upper lid 22 from above the housing 21, and the guide member 15 from the left and right outer sides of the upper lid 22. 15 is attached, and a pipe member 25 serving as an air supply port 23 for supplying compressed air to the housing 21 is attached below the housing 21. Reference numeral 24 denotes a perforated plate provided to divide the space inside the housing 21 vertically. The role of the porous plate 24 will be described with reference to the next figure.

3 is a cross-sectional view taken along the line 3-3 in FIG. 1, and the workpiece transfer device 10 is provided with an air supply port 23 at the approximate center of the lower surface 21L of the housing, and a compressed air supply means (not shown) is provided in the air supply port 23. A tube member 25 that can be connected is attached, a perforated plate 24 having a large number of small holes 26... Is attached to a substantially central portion in the height direction of the housing 21, and the housing 21 is covered with an upper lid 22 from above.
The floating pocket holes 12... And the propelling injection holes 13.

The upper lid 22 of the housing 21 is provided with large-diameter recesses 17 that open upward, and the injection holes 16 are formed in the center of the bottom surface 31 of these large-diameter recesses 17, so that the injection holes 16 can be integrated with the housing 21. It becomes.
By providing the injection hole 16 integrally in the housing 21, piping connecting the injection hole 16 and the air passage 32 can be made unnecessary.

FIG. 4 is an enlarged view of part 4 of FIG. 3, and is an enlarged view of the floating pocket hole 12 provided in the workpiece transfer device 10.
The floating pocket hole 12 is formed by forming an injection hole 16 on the upper chamber 27 side of the housing 21 and forming a large-diameter recess 17 coaxially with the injection hole 16 above the injection hole 16.

That is, the upper lid 22 was provided with large-diameter recesses 17 that opened upward, and the injection holes 16 were formed in the center of the bottom surface 31 of these large-diameter recesses 17.
In the present embodiment, the diameter Df of the injection hole 16 is 2 mm, and the diameter Dd of the large-diameter concave portion 17 is 20 mm. However, the present invention is not limited to this, and can be arbitrarily set as long as Df <Dd.

The operation of the workpiece transfer apparatus having the above configuration will be described below.
FIG. 5 is an operation diagram of the work transfer device according to the present invention. When compressed air is supplied to the air supply port 23, the compressed air enters the lower chamber 28 of the housing 21 and the perforated plate 24 partitions the inside of the housing 21 up and down. Passes through a number of small holes 26... Into the upper chamber 27 of the housing 21. And it injects from the injection hole 16 ... and the propulsion injection hole 13 ... which were opened in the workpiece conveyance surface 11 of the upper cover 22.
When the workpiece W comes on the workpiece conveyance surface 11, an upward force is applied to the workpiece W by the air jetted from the injection holes 16. Moves in the direction of arrow F with air jetted obliquely upward.

The perforated plate 24 is provided with a large number of small holes 26... By allowing air to pass through these small holes 26. Air can be supplied to the upper chamber 27. If there is no air turbulence in the upper chamber 27, the air can be uniformly injected from the plurality of injection holes 16.
Similarly, air for propelling the work can be uniformly injected from the upper chamber 27 through the propulsion injection hole 13.

  By dividing the inside of the housing 21 into the upper chamber 27 and the lower chamber 28 by the perforated plate 24, the pressure of the injection hole 16 located near the air supply port 23 is high and the pressure of the injection hole 16 located far from the air supply port. Can reduce the pressure difference.

Since the air pressure difference in the upper chamber 27 can be relaxed, the air supply port 23 can be arranged relatively freely. Specifically, it is possible to move from the center in the longitudinal direction to the front end portion 35 side or the rear end portion 36 side.
If the influence of the pressure difference is small due to a short conveyance distance, the perforated plate 24 can be omitted.

FIG. 6 is an operational view of the floating pocket hole according to the present invention.
In the floating pocket hole 12 composed of the injection hole 16 and the large-diameter concave portion 17, the air jetted from the injection hole 16 is retained in the large-diameter concave portion 17 and then used to float the workpiece W.
Since the flow area of the air injected from the injection hole 16 is enlarged at the large-diameter concave portion 17, the flow velocity is greatly reduced, but the pressure of the air staying at the large-diameter concave portion 17 is increased. A decrease in the flow velocity in the injection hole 16 results in an increase in pressure in the large-diameter concave portion 17. This increase in pressure contributes to the floating of the workpiece W. However, since the increase in pressure becomes gentle with respect to the flow velocity, the imbalance in the blasting air velocity that irreversibly exists between the plurality of injection holes 16 is corrected. be able to.

  If the unbalance can be corrected, the workpiece W can be lifted uniformly, and the posture of the workpiece W can be stably lifted. Since the posture of the workpiece W is stabilized, it is possible to prevent the workpiece W from being biased.

FIG. 7 is a view for explaining the structure and operation of the propulsion injection holes according to the present invention, and is characterized in that the propulsion injection holes 13... The floating pocket hole was omitted.
In (a), a plurality of propulsion injection holes 13 are arranged so as to be inclined in the feed direction from the vertical direction by an angle θ, and compressed air is passed through the propulsion injection holes 13 from the upper chamber 27 of the housing 21 toward the work conveying surface 11. And propulsive force F is applied to the workpiece W on the workpiece conveyance surface 11.

In (b), the work W can be conveyed in the feed direction by the propulsive force F from the propulsion injection holes 13.
Since the propelling injection holes 13 are opened in the upper lid 22, it is possible to reduce the processing cost by simultaneous processing with the injection holes and the large-diameter recesses.

FIG. 8 is a cross-sectional view of a workpiece transfer device according to the present invention and a comparative example thereof.
(A) is sectional drawing of the workpiece conveyance apparatus which concerns on this invention, As mentioned above, the housing 21 which is a U-shaped member is used as the air path 32, and the air supply port 23 which supplies compressed air to this air path 32 is shown. A pipe member 25 is provided, and the upper opening 22 is hermetically sealed with the upper lid 22, and guide members 15 are provided on the left and right sides of the conveying surface 11 that forms the upper surface of the upper lid 22, and the injection hole 16 and the large diameter are provided on the upper lid 22. A plurality of floating pocket holes 12 including the recesses 17 are opened.

  By using the U-shaped member housing 21 which also serves as the air passage 32, a U-shaped member such as a grooved steel, which is a general-purpose product, can be used. For example, the housing 21 can be manufactured at a lower cost than the housing 21 formed by casting. And weight reduction can be easily achieved.

  The injection holes 16 and the large-diameter recesses 17 are circular holes whose center axes are vertically upward in plan view, and are opened so as to be coaxial with each other. For this reason, a dedicated attachment / tool is not required for drilling, and an angle adjustment operation for inclining the housing is not required, so that the processing is easy.

In (b), the housing 21B including the air passage 32B is manufactured by, for example, casting, and after the casting surface 11B of the housing 21B is cast to be a smooth surface, the injection holes 16B are opened. A plurality of injection holes 16B are arranged symmetrically with respect to the center line C, but in order to open the left and right injection holes 16B so as to stabilize the posture of the work W and prevent the work from being biased, Dedicated attachments and tools are required, and precise angle adjustment work is required to incline the housing, which increases the number of processing steps and increases processing costs.
Even if the injection hole 16B has a slit structure instead of a hole structure, the angle setting work at the time of slit processing remains, and the processing cost increases.

  Thus, according to (a), the large-diameter recess 17 is opened above the upper lid 22 of the housing 21 and the injection hole 16 is opened at the center of the bottom surface 31 of the large-diameter recess 17. The recess 17 can be easily processed. Therefore, the processing cost can be reduced.

  Since the hollow-shaped housing 21 that is a U-shaped member is a member that also serves as the air passage 32, it is not necessary to form the air passage 32 using another member such as a pipe, and a grooved steel that is a general-purpose product. By using, cost can be reduced.

  As a result, an inexpensive general-purpose product can be used for the housing 21 and processing can be easily performed, so that the apparatus cost can be reduced.

FIG. 9 shows another embodiment of FIG. 3 and its operation.
In (a), the point different from the embodiment is that the housing 21 is formed so as to provide the air supply port 23 at the front end portion 35 of the work transfer device.

(B) shows an operation diagram of (a), and the inside of the hollow housing 21 is divided into an upper chamber 27 and a lower chamber 28 by a perforated plate 24 and compressed air is supplied to the lower chamber 28.
The inside of the housing 21 is divided into an upper chamber 27 and a lower chamber 28 by a perforated plate 24, and an air supply port 23 is provided at the front end portion 35 of the housing 21 so that compressed air is supplied to the lower chamber 28.
The compressed air that has entered the lower chamber 28 passes through the small holes 26 of the perforated plate 24, flows in the direction of the arrow 38, and enters the upper chamber 27.

  The rectifying effect can be exerted on the perforated plate 24, air disturbance can be corrected, and stable air can be supplied to the upper chamber 27. If there is no air turbulence in the upper chamber 27, the air can be uniformly injected from the plurality of injection holes 16... If the uniform air is injected from the injection holes 16.・ ・ The pressure is uniform.

As a result, the pressure difference that the pressure of the injection holes 16... Located near the air supply port 23 is high and the pressure of the injection holes 16. Can do.
In addition, since the air pressure difference is further moderated by the floating pocket hole 12 composed of the injection hole 16 and the large-diameter concave portion 17, the pressure of the floating pocket hole 12 located near the air supply port 23 is high, and the air supply The pressure difference that the pressure of the floating pocket hole 12 located far from the mouth 23 is small can be further reduced.

  By disposing the perforated plate 24 between the air supply port 23 and the injection hole 16, the pressure difference of the air in the upper chamber 27 can be relaxed, and the air supply port 23 can be disposed relatively freely. .

FIG. 10 is a diagram showing still another embodiment of FIG. 3 and its operation.
In (a), the difference from the embodiment is that the housing 21 is formed so as to provide the air supply port 23 at the front end portion 35, the air supply port 23 is provided at the rear end portion 36, and the front end portion of the housing 21 is provided. The point is that the housing 21 is formed so that the cross-sectional area of the air passage 32 that is a hollow portion is reduced from 35 toward the rear end portion 36. The housing 21 is a hollow structure 37 that is long and tapered toward the rear end portion 36.
In this embodiment, since the porous plate 24 is provided in the housing 21, the air pressure difference in the upper chamber 27 can be further reduced.

(B) shows the action diagram of (a). In addition to the porous plate 24, if the housing 21 is a hollow structure 37 tapered toward the rear end portion 36, the compressed air is partly injected into the injection holes 16 and From the propulsion injection hole 13 to the outside of the housing 21, the remaining part flows in the housing 21. Accordingly, the amount of air gradually decreases in the process of flowing through the housing 21. If the housing 21 is tapered toward the rear end portion 36, the flow velocity can be kept substantially constant. Since the flow rate is a determinant of dynamic pressure (speed pressure), if the flow rate is constant, the dynamic pressure in the upper chamber 27 in the housing 21 is uniform.
As a result, air can be uniformly injected from the plurality of injection holes 16.

  Although the present invention is applied to a thin steel plate in the embodiment, it can also be applied to a glass plate or a wafer.

  The present invention is suitable for conveying plate-like workpieces.

It is a top view of the workpiece conveyance apparatus which concerns on this invention. FIG. 2 is a sectional view taken along line 2-2 of FIG. FIG. 3 is a sectional view taken along line 3-3 in FIG. 1. FIG. 4 is an enlarged view of part 4 of FIG. 3. It is an effect | action figure of the workpiece conveyance apparatus which concerns on this invention. It is an effect | action figure of the floating pocket hole which concerns on this invention. It is a figure explaining the structure and effect | action of a propulsion injection hole which concern on this invention. It is sectional drawing of the workpiece conveyance apparatus which concerns on this invention, and its comparative example figure. It is another Example figure of FIG. 3, and its effect | action figure. FIG. 4 is a diagram showing still another embodiment of FIG. 3 and its operation diagram. It is a figure explaining the basic composition of the conventional technology.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Work conveying apparatus, 13 ... Propulsion injection hole, 16 ... Injection hole, 17 ... Large diameter recessed part, 21 ... Housing, 22 ... Upper lid, 24 ... Perforated plate, 27 ... Upper chamber, 28 ... Lower chamber, 31 ... Large diameter Bottom surface of recess, 36 ... rear end, 37 ... hollow structure.

Claims (4)

A plurality of injection holes are opened in a hollow housing, compressed air supplied to the inside of the housing is injected from the plurality of injection holes, the work is floated by the air injected from these injection holes, and the work can be moved In the workpiece transfer device
The upper lid of the housing is provided with large-diameter recesses that open upward, the injection holes are opened in the center of the bottom surface of these large-diameter recesses, and the air injected from these injection holes is retained in the large-diameter recesses before the work A workpiece transfer device characterized by being used for levitation.   2. The workpiece transfer apparatus according to claim 1, wherein the hollow housing is divided into an upper chamber and a lower chamber by a perforated plate, and the compressed air is supplied to the lower chamber.   3. The workpiece transfer apparatus according to claim 1, wherein the housing is a hollow structure that is long and tapered toward the rear end. The work conveying apparatus according to claim 1, wherein a plurality of propulsion injection holes for moving a work are formed in the upper lid.

Images