JP2006301301A - Conveyance error measuring method, calibration method, drawing method, exposure drawing method, drawing device, and exposure drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure drawing method or the like with which deviation of a drawing position due to meandering, pitching vibration or the like accompanying conveyance of a work is highly accurately measured and is reflected on drawing processing. <P>SOLUTION: An exposure drawing device is equipped with: a first conveying portion 100 to convey a work 36a for measurement relative to an exposure head; a first drawing portion 102 to continuously draw a plurality of test pattern images on the work 36a for measurement with the exposure head; a measuring portion 104 to measure at least a relative conveyance error of the work 36a for measurement on the basis of the drawing condition of the plurality of test pattern images drawn on the work 36a for measurement; a correcting portion 106 to generate information on timing of drawing and deformation of the image on the basis of the conveyance error; a second conveying portion 108 to convey a normal work 36 relative to the exposure head; and a second drawing portion 110 to draw an image to be drawn on the normal work 36 on the basis of the information generated by the correcting portion 106. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention provides, for example, a transport error measurement method for measuring a transport error of a work prior to image drawing on a work put into a manufacturing process, a calibration method for calibrating a drawing position related to image drawing on a work, A drawing method for drawing an image on a workpiece, an exposure drawing method for drawing an image on the workpiece by exposure, a drawing apparatus for drawing an image on the workpiece, and an exposure for performing image drawing on the workpiece by exposure The present invention relates to a drawing apparatus.

  For example, an exposure apparatus has been developed that manufactures a filter or a printed circuit board such as a liquid crystal display or a plasma display by controlling a laser beam according to a desired image pattern and exposing and scanning a sheet-like photosensitive material. FIG. 26 shows a schematic configuration of such an exposure apparatus 200 (see Patent Document 1).

  The exposure apparatus 200 includes, for example, a rectangular platen 204 supported by six legs 202, and a movable stage 208 movable along two guide rails 206a and 206b disposed on the platen 204. And a columnar column 210 disposed on the surface plate 204, and a scanner 214 that irradiates an exposure object 212 (work) fixed to the column 210 and positioned on the moving stage 208 with a laser beam.

  While the workpiece 212 is moved in the direction of the arrow together with the moving stage 208, a two-dimensional image is recorded by irradiating the laser beam output from the scanner 214 in a direction orthogonal to the direction of the arrow.

  Here, the scanner 214 is composed of a plurality of exposure heads using a spatial light modulation element such as a digital micromirror device (DMD) as a pattern generator, and each exposure head produces a high-definition and high-speed two-dimensional image pattern. Is configured to record.

  The DMD is a mirror device in which a large number of micromirrors whose reflection surfaces change in response to a control signal are two-dimensionally arranged on a semiconductor substrate such as silicon. The laser beam output from a laser light source is collimated by a collimator lens. After the collimation, the two-dimensional image pattern is recorded by selectively reflecting with a DMD whose angle of the reflecting surface is controlled and condensing on the work 212 through the microlens array.

  That is, a two-dimensional image pattern (simply referred to as an image pattern) formed on the workpiece 212 is formed by an array of a plurality of images by laser beams emitted from each exposure head. Of course, it is also possible to form a linear image pattern by arranging a plurality of images on a straight line.

JP 2004-62155 A

  By the way, when the moving stage 208 is moved for pattern drawing on the workpiece 212, meandering occurs in the moving stage 208 due to the movement, the positional shift occurs in the moving stage 208, and the pattern drawn on the workpiece 212 is distorted. There is a problem. This meandering refers to a shift in the direction intersecting the moving direction with respect to the workpiece mounting surface of the moving stage 208 generated by the movement of the moving stage 208, and in the direction in which the workpiece mounting surface of the moving stage intersects by the movement. Therefore, the position where the light beam is irradiated onto the workpiece 212 from the exposure head is shifted.

  In addition, when the moving stage 208 on which the work 212 is placed is moved for pattern drawing, pitching vibration is generated in the moving stage 208 due to the movement, so that the moving stage 208 is displaced, and the pattern drawn on the work 212 is drawn. There is a problem that distortion occurs. This pitching vibration refers to an arc-shaped pendulum vibration in the vertical direction of the moving stage 208, which inclines the work placement surface of the moving stage 208. Therefore, the optical path of the light beam irradiated from above the moving stage 208 The length changes, and this change becomes a shift in the scanning pitch of the work placement surface of the moving stage 208.

  Further, when the moving stage 208 is moved, a slightly different meandering operation occurs at each position due to a yawing operation (an operation in the moving direction of the moving stage 208), or the moving stage 208 slightly changes at each position. Different pitching vibrations occur.

  The present invention has been made in consideration of such problems, and can accurately measure a drawing position shift due to meandering, pitching vibration, or the like accompanying the conveyance of the workpiece. For example, image drawing on the workpiece thereafter Another object of the present invention is to provide a transport error measurement method and a calibration method capable of performing exposure with high accuracy.

  Another object of the present invention is to accurately measure a drawing position shift due to meandering or pitching vibration accompanying workpiece conveyance, and logically reflect the measurement result on a drawn image. Provided are a drawing method, an exposure drawing method, a drawing apparatus, and an exposure drawing apparatus that can eliminate a deviation of an exposure position due to vibration or the like and can perform image drawing and exposure on a workpiece with high accuracy and low cost. For the purpose.

  The conveyance error measuring method according to the present invention includes a conveyance step of conveying a stage holding a workpiece relative to the drawing unit, and a drawing step of drawing a plurality of test pattern images on the workpiece by the drawing unit. And a measuring step for measuring at least a relative conveyance error of the workpiece based on a drawing state of a plurality of test pattern images drawn on the workpiece.

  Thereby, it is possible to measure the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece with high accuracy. For example, it is possible to perform subsequent image drawing or exposure on the workpiece with high accuracy.

  In the method, the measurement step may perform measurement based on a drawing state of a plurality of test pattern images continuously drawn on the workpiece.

  In the drawing step, the plurality of test pattern images may be drawn on the work by multiple drawing by the drawing unit, or the plurality of test patterns may be drawn using pixels in a partial area of the drawing unit. A pattern image may be drawn on the workpiece.

  Further, the measuring step may be performed along the direction of the test pattern image from a reference position in a direction orthogonal to a relative conveyance direction of the workpiece based on a drawing state of the plurality of test pattern images drawn on the workpiece. The amount of deviation may be measured.

  The measuring step measures a shift amount of the test pattern image along the conveyance direction from a reference position in the relative conveyance direction of the workpiece based on a drawing state of a plurality of test pattern images drawn on the workpiece. You may make it do.

  Further, the drawing step may draw on the work using pixels in at least two regions separated along a direction orthogonal to the relative transport direction of the work in the drawing unit. .

  The measuring step may measure a rotation component with respect to a relative conveyance direction of the workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the workpiece. .

  Next, a calibration method according to the present invention is characterized in that the drawing position by the drawing unit is calibrated using the above-described transport error measurement method according to the present invention.

  Thereby, it is possible to measure the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece with high accuracy. For example, it is possible to perform subsequent image drawing or exposure on the workpiece with high accuracy.

  Next, a drawing method according to the present invention includes a first transfer step of transferring a stage on which a measurement work is held relative to a drawing unit, and a plurality of test pattern images for the measurement work. A first drawing step for drawing by the drawing unit; a measurement step for measuring at least a relative conveyance error of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece; Based on the conveyance error measured in the measurement step, a correction step for creating information related to drawing of the drawing unit, and a normal work is held on the stage and conveyed relative to the drawing unit. A second conveyance step, and a second drawing step for drawing an image to be drawn on the regular workpiece based on the drawing-related information created in the correction step. And having a drawing step.

  As a result, the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece is measured with high accuracy, and the measurement result is logically reflected in the drawn image, and the deviation of the exposure position due to the meandering or pitching vibration or the like. Therefore, image drawing and exposure on the workpiece can be performed with high accuracy and at low cost.

  In the method, the measurement step may perform measurement based on a drawing state of a plurality of test pattern images continuously drawn on the measurement work.

  In the first drawing step, the plurality of test pattern images may be drawn on the measurement work by multiple drawing by the drawing unit, or pixels in a partial region of the drawing unit may be drawn. The plurality of test pattern images may be used and drawn on the measurement workpiece.

  In addition, the measurement step may include the step of measuring the test pattern image from a reference position in a direction orthogonal to the relative conveyance direction of the measurement workpiece based on the drawing state of the plurality of test pattern images drawn on the measurement workpiece. You may make it measure the deviation | shift amount along the said direction.

  The measurement step is based on a drawing state of a plurality of test pattern images drawn on the measurement work, along a conveyance direction of the test pattern image from a reference position in a relative conveyance direction of the measurement work. You may make it measure deviation | shift amount.

  In addition, the drawing unit includes one or more drawing heads, and the correction step logically determines the image data to be drawn for each drawing head based on the transport error measured in the measurement step. And a table creating step for creating information relating to the deformation as an information table, wherein the second drawing step is configured to draw the drawing on the regular workpiece based on the information relating to the deformation stored in the information table. You may make it draw the image which should be.

  The drawing unit includes one or more drawing heads, and the correction step starts reading out the image data to be drawn for each drawing head based on the transport error measured in the measurement step. A table creation step of logically changing an address and creating information about the address change as an information table, wherein the second drawing step is based on the information about the address change stored in the information table; The image to be drawn may be drawn on a regular work.

  Further, the first drawing step uses the pixels in at least two regions separated along a direction orthogonal to a relative conveyance direction of the measurement work in the drawing unit to each of the measurement work. You may make it draw.

  The measurement step measures a rotation component with respect to a relative conveyance direction of the measurement workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece, In the correcting step, information related to drawing by the drawing unit may be created by reflecting the rotation component.

  Next, an exposure drawing method according to the present invention is characterized in that at least the regular workpiece is exposed using the drawing method according to the present invention described above.

  As a result, the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece is measured with high accuracy, and the measurement result is logically reflected in the drawn image, and the deviation of the exposure position due to the meandering or pitching vibration or the like. Therefore, image drawing and exposure on the workpiece can be performed with high accuracy and at low cost.

  Next, a drawing apparatus according to the present invention includes a first transport unit that transports a stage holding a measurement work relative to the drawing unit, and a plurality of test pattern images for the measurement work. A first drawing unit for drawing by the drawing unit; a measuring unit for measuring at least a relative conveyance error of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece; Based on the conveyance error measured in the measurement step, correction means for creating information related to drawing of the drawing unit, and holding a regular work on the stage, the sample is conveyed relative to the drawing unit. A second conveying unit, and a second drawing unit that draws an image to be drawn on the regular workpiece based on the drawing-related information created in the correction step. It is characterized in.

  As a result, the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece is measured with high accuracy, and the measurement result is logically reflected in the drawn image, and the deviation of the exposure position due to the meandering or pitching vibration or the like. Therefore, image drawing and exposure on the workpiece can be performed with high accuracy and at low cost.

  In the drawing apparatus, the measurement unit may perform measurement based on a drawing state of a plurality of test pattern images continuously drawn on the measurement work.

  The first drawing unit may draw the plurality of test pattern images on the measurement work by multiple drawing by the drawing unit, or may select pixels in a partial area of the drawing unit. The plurality of test pattern images may be used and drawn on the measurement workpiece.

  In addition, the measurement unit may determine the test pattern image from a reference position in a direction orthogonal to a relative conveyance direction of the measurement workpiece based on a drawing state of the plurality of test pattern images drawn on the measurement workpiece. You may make it measure the deviation | shift amount along the said direction.

  The measurement means follows the transport direction of the test pattern image from the reference position in the relative transport direction of the measurement workpiece based on the drawing state of a plurality of test pattern images drawn on the measurement workpiece. You may make it measure deviation | shift amount.

  Further, the drawing unit includes one or more drawing heads, and the correction unit logically outputs the image data to be drawn for each drawing head based on the transport error measured by the measuring unit. And a table creating means for creating information relating to the deformation as an information table, wherein the second drawing means draws the drawing on the regular workpiece based on the information relating to the deformation stored in the information table. You may make it draw the image which should be.

  The drawing unit includes one or more drawing heads, and the correction unit starts reading out the image data to be drawn for each drawing head based on the transport error measured by the measuring unit. A table creating means for logically changing an address and creating information relating to the address change as an information table, wherein the second drawing means includes the information relating to the address change stored in the information table; The image to be drawn may be drawn on a regular work.

  The first drawing means draws on the measurement work using pixels in at least two regions separated along a direction orthogonal to a relative conveyance direction of the measurement work in the drawing unit. You may do it.

  The measuring means measures a rotation component with respect to a relative conveyance direction of the measurement workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece, The correction unit may create information related to drawing by the drawing unit by reflecting the rotation component.

  Next, an exposure drawing apparatus according to the present invention includes the drawing apparatus according to the present invention described above, and draws the image by exposure on at least the regular workpiece.

  As a result, the displacement of the drawing position due to meandering or pitching vibration accompanying the conveyance of the workpiece is measured with high accuracy, and the measurement result is logically reflected in the drawn image, and the deviation of the exposure position due to the meandering or pitching vibration or the like. Therefore, image drawing and exposure on the workpiece can be performed with high accuracy and at low cost.

  As described above, according to the conveyance error measuring method and the calibration method according to the present invention, it is possible to measure the deviation of the drawing position due to meandering, pitching vibration, etc. accompanying the conveyance of the workpiece with high accuracy, for example, the subsequent workpiece It is possible to perform image drawing and exposure with high accuracy.

  Moreover, according to the drawing method, the exposure drawing method, the drawing apparatus, and the exposure drawing apparatus according to the present invention, the drawing position shift due to meandering or pitching vibration accompanying the conveyance of the workpiece is measured with high accuracy, and the measurement result is drawn. By logically reflecting it on the image, it is possible to eliminate the shift of the exposure position due to the meandering, pitching vibration, etc., and it is possible to perform image drawing and exposure on the work with high accuracy and at low cost.

  Hereinafter, referring to FIGS. 1 to 25, embodiments of the present invention in which a transport error measuring method, calibration method, drawing method, exposure drawing method, drawing apparatus, and exposure drawing apparatus according to the present invention are applied to a digital exposure apparatus having a DMD, for example. While explaining.

  As shown in FIG. 1, the exposure apparatus 10 according to the present embodiment is arranged on a rectangular surface plate (base) 14 supported by, for example, six legs 12 and the surface plate 14. A movable stage 18 movable in the directions of arrows A and B along the two guide rails 16a and 16b, columns 20a and 20b disposed on the surface plate 14, and a scanner fixed between the columns 20a and 20b. A surface plate 22, eight sets of exposure heads 24a to 24h positioned and fixed to the scanner surface plate 22, a camera surface plate 26 fixed between the columns 20a and 20b, and a position fixed to the camera surface plate 26. It is basically composed of two alignment cameras 28a and 28b (CCD camera or the like). At least two columns 20a and 20b and a scanner surface plate 22 constitute a portal-type head holding structure 30.

  The moving stage 18 is provided on a moving pedestal 32 that moves along guide rails 16a and 16b provided on the surface plate 14, and is provided on the upper surface of the moving pedestal 32 via an elevating mechanism 34. And an exposure table 38 for positioning and holding the workpiece 36. Examples of the work 36 include a substrate, a photosensitive material, a printed circuit board, a display device substrate, a display device filter, and the like.

  As shown in FIG. 2, the control unit 40 that controls the exposure apparatus 10 controls the moving stage driving unit 42 to move the moving stage 18, and also aligns the alignment marks of the work 36 photographed by the alignment cameras 28a and 28b. Alignment unit 44 that adjusts the image recording position based on the above, and exposure processing unit that controls light source unit 46 and exposure heads 24a to 24h to expose and record a desired image pattern (a combination of two-dimensional images) on work 36. 48. In this case, as shown in FIG. 3, each of the exposure heads 24a to 24h arranged in a two-row zigzag pattern simultaneously records a two-dimensional image composed of a plurality of pixels in each of the exposure areas 50a to 50h.

  As shown in FIG. 4, image data 52 (one piece of image data drawn on a work) for one frame that is a source of a two-dimensional image is stored in one frame memory 54, and is sent to the work 36. At the time of exposure drawing, as shown in FIG. 5, the image dividing unit 56 in the control unit 40 divides the image into eight according to the number of exposure heads 24a to 24h (eight image data 52a to 52h). Are stored in the corresponding data files 58a to 58h. Then, the image data 52a to 52h stored in the data files 54a to 54h are respectively supplied to the corresponding exposure heads 24a to 24h, and a two-dimensional image is drawn on the work 36 as described above. .

  As shown in FIG. 2, a linear encoder 60 is provided below the moving stage 18, and a pulse Pi is output from the linear encoder 60 as the moving stage 18 moves. Position information and scanning speed along the guide rails 16a and 16b can be detected.

  The linear encoder 60 outputs a pulse Pi every time the moving stage 18 moves by a predetermined amount (for example, 0.1 μm). In order to increase the adjustment resolution in the control unit 40, as shown in FIG. 6A, a pulse having a pitch of 0.1 μm may be doubled and output as a pulse Pi having a pitch of 0.05 μm.

  Further, the exposure processing unit 48 counts, for example, 40 pulses of the pulse Pi from the linear encoder 60 detected by the movement of the moving stage 18 to obtain a timing pulse Pt. This timing pulse Pt is a timing at which a light beam is irradiated from the exposure heads 24a to 24h. That is, the timing pulse Pt is also a light irradiation timing. Therefore, the timing pulse Pt is output once every 2.0 μm as shown in FIG. 6B.

  As shown in FIG. 7, for example, laser beams La output from a plurality of semiconductor lasers constituting the light source unit 46 are combined and introduced into the exposure heads 24 a to 24 h via the optical fiber 62. A rod lens 64, a reflection mirror 66, and a digital micromirror device (DMD) 68 are arranged in order at the exit end of the optical fiber 62 into which the laser beam La is introduced. The DMD 68 is a spatial light modulation element including a number of micromirrors that reflect the laser beam La, and each micromirror is driven and controlled in accordance with image information by a drive signal from the control unit 40.

  On the reflection side of the laser beam La by the DMD 68, the first imaging optical lenses 70 and 72 that are the magnifying optical system, the micro lens array 74 in which a large number of lenses are arranged corresponding to each micro mirror of the DMD 68, and 1 × optical The second imaging optical lenses 76 and 78 as a system and the prism pair 80 as a focus fine adjustment mechanism are sequentially arranged. Before and after the microlens array 74, microaperture arrays 82 and 84 are provided for removing stray light and adjusting the laser beam La to a predetermined diameter. That is, the exposure heads 24 a to 24 h are controlled in units of dots and expose the dot pattern to the work 36. In this embodiment, the density of one pixel is expressed using a plurality of dot patterns.

  Further, as shown in FIGS. 3 and 8B, the plurality of exposure heads 24a to 24h are arranged in a substantially matrix form of m rows and n columns (for example, 2 rows and 4 columns), and the plurality of exposure heads 24a to 24h. 24h are arranged in a direction orthogonal to the moving direction of the moving stage 18 (hereinafter referred to as the stage moving direction). In the present embodiment, a total of eight exposure heads are provided in two rows in relation to the width of the work 36. Further, as the moving stage 18 moves, the exposure heads 24a to 24h relatively move in the opposite direction, and this direction is set as the scanning direction.

  Here, the exposure area 50h by one exposure head (for example, 24h) has a rectangular shape whose short side is the stage moving direction and is inclined at a predetermined inclination angle with respect to the scanning direction. Along with the movement, a strip-shaped exposed region is formed on the work 36 for each of the exposure heads 24a to 24h (see FIG. 8A).

  The exposure heads 24a to 24h described above are formed by 20 dots that are two-dimensionally arranged (for example, 4 × 5) as shown in FIG.

  In addition, the two-dimensional dot pattern is inclined with respect to the scanning direction so that each dot arranged in the scanning direction passes between dots arranged in the direction intersecting the scanning direction. The pitch between dots can be narrowed, and high resolution can be achieved. In particular, in this embodiment, the image data of each row recorded in the frame memory 54 is drawn with all or some of the dots provided in the eight exposure heads 24a to 24h. That is, for example, the image data is drawn line by line with all the dots of the eight exposure heads 24a to 24h.

  Here, the operation of the exposure apparatus 10 according to the embodiment will be briefly described with reference to FIG.

  First, the control unit 40 controls the moving stage drive unit 42 (see FIG. 2) to move the moving stage 18 on which the workpiece 36 is positioned and fixed in the direction of arrow A along the guide rails 16a and 16b of the surface plate 14. Let When the moving stage 18 passes between the columns 20a and 20b, the alignment cameras 28a and 28b fixed to the camera surface plate 26 photograph an alignment mark (not shown) recorded in advance at a predetermined position of the work 36. .

  The control unit 40 detects a positional deviation or deformation of the workpiece 36 from the photographed alignment mark image, and creates correction data for image information recorded on the workpiece 36. Further, the control unit 40 drives the elevating mechanism 34 that constitutes the moving stage 18 to elevate the exposure table 38 and controls the prism pair 80 (see FIG. 7) that constitutes the exposure heads 24a to 24h. The focus adjustment process of the work 36 is performed for 24a to 24h.

  Next, the moving stage 18 moves in the direction of arrow B, and recording processing of a two-dimensional image pattern (simply referred to as an image pattern) is performed by the exposure heads 24a to 24h. That is, the laser beam La output from the light source unit 46 is guided to the exposure heads 24 a to 24 h via the optical fiber 62. The laser beam La enters the DMD 68 from the rod lens 64 via the reflection mirror 66. The laser beam La incident on the DMD 68 is selectively reflected by a plurality of micromirrors controlled according to the information of the image data 52, magnified by the first imaging optical lenses 70 and 72, and then the microaperture array 82. Through the microlens array 74. The microlens array 74 forms an image of each laser beam La on the work 36 via the second imaging optical lenses 76 and 78 and the prism pair 80.

  Here, the drawing timing in the exposure processing unit 48 in the control unit 40 will be briefly described. As illustrated in FIG. 2, the exposure processing unit 48 includes a pulse counting circuit 86, a register 88, and a timing generation circuit 90. When the exposure process is started, the exposure processing unit 48 calculates the output timing of the timing pulse Pt based on the pulse Pi from the linear encoder 60 detected as the moving stage 18 moves. In this calculation, the pulse counting circuit 86 counts the pulse Pi from the linear encoder 60 and activates the timing generation circuit 90 when the pulse Pi matches the count value (for example, 40 pulses) stored in the register 88. A timing pulse Pt is output from the timing generation circuit 90. In synchronization with the output timing of the timing pulse Pt, the laser beam La is irradiated onto the DMD 68, and the laser beam reflected when the micromirror of the DMD 68 is in the on state is guided to the work 36 through the optical system. An image is formed on the work 36.

  By the way, meandering, pitching vibration, and the like are generated in the moving stage 18 as the moving stage occurs, and the moving stage 18 is displaced. Therefore, there is a problem that the image exposed to the work 36 on the moving stage 18 is distorted. is there.

  Therefore, the control unit 40 in the exposure apparatus 10 according to the present embodiment has a functional unit using software and / or hardware described below.

  That is, as shown in FIG. 2, the control unit 40 includes a first transport unit 100, a first drawing unit 102, a measurement unit 104, a correction unit 106, a second transport unit 108, and a second drawing unit 110. Have These configurations and functions will be described with reference to the flowchart of FIG. 10 and FIGS.

  The first transport unit 100 controls the alignment unit 44 to transport the moving stage 18 holding a work used for measurement (hereinafter referred to as a measurement work 36a) relative to the exposure heads 24a to 24h. Let The measurement workpiece 36a may be the same material as the above-described workpiece 36 (referred to as a regular workpiece 36 to distinguish it from the measurement workpiece), or may be a glass substrate coated with a photosensitive material.

  The first drawing unit 102 controls the exposure processing unit 48 to continuously draw a plurality of test pattern images 112 (see FIGS. 11A to 11D) on the measurement workpiece 36a by the exposure heads 24a to 24h. . Of course, a plurality of test pattern images 112 may be divided and rendered a plurality of times.

  Specifically, in step S1 of FIG. 10, the first transport unit 100 moves the moving stage 18 holding the measurement workpiece 36a by the driving force of a linear motor (not shown) to guide rails 16a of the surface plate 14. , 16b along one direction (direction A in FIG. 1) at a constant speed (outward movement). During the forward movement, the alignment mark formed on the measurement workpiece 36a is detected. This alignment mark is collated with a mark stored in advance, and the exposure start timing by the exposure heads 24a to 24h is corrected based on the positional relationship.

  In addition, the first transport unit 100 moves the moving stage 18 at a constant speed in a direction opposite to the one direction (direction B in FIG. 1) when the moving stage 18 reaches the end of the forward path. Move). In step S2 of FIG. 10, the first drawing unit 102 starts the drawing process of the test pattern image 112 on the measurement workpiece 36a by controlling the exposure processing unit 48 during the backward movement of the moving stage 18. .

  Examples of the test pattern image 112 include a circular image 112a as shown in FIG. 11A, an image 112b in which a plurality of vertical lines are arranged as shown in FIG. 11B, and a plurality of horizontal lines as shown in FIG. 11C. And an image 112d in which a plurality of vertical lines and horizontal lines are arranged, as shown in FIG. 11D. Among these, it is easy to measure the center of gravity (center position) of the circular image 112a, and the degree of deviation from the reference position can be easily measured using, for example, a three-dimensional measuring device or a CCD camera. Therefore, it is preferable. These test pattern images 112 may be drawn with one exposure head (any one of 24a to 24h) or drawn with a plurality of exposure heads (any one of 24a to 24h). Also good. Moreover, you may make it draw with the pixel in the one part area | region of one exposure head (any one of 24a-24h).

  Furthermore, as described above, the exposure heads 24a to 24h used in the present embodiment can realize multiple exposure by being inclined with respect to the scanning direction. That is, as shown in FIG. 12A, when the exposure heads 24a to 24h are provided with a certain inclination angle with respect to the scanning direction, as shown in FIG. 12B, each dot is drawn at a different position. One line segment is drawn (so-called single drawing). On the other hand, as shown in FIG. 13A, when the exposure heads 24a to 24h are further inclined than in the case of FIG. 12A, the same position can be drawn with a large number of dots as shown in FIG. Multiple drawing). In the example of FIG. 13B, the portion indicated by the section 114 is double-drawn.

  According to this multiple drawing, even if there is a variation in the light intensity distribution of each dot (including defects), the light intensity distribution can be averaged by drawing multiple times. For example, as shown in FIG. 11A The circular image 112a can be drawn with high accuracy, and subsequent measurement becomes easy.

  When the test pattern image 112 is drawn, the pulse Pi from the linear encoder 60 output as the moving stage 18 is moved is counted, and the test pattern image 112 is drawn every time a predetermined count value is reached. . The arrangement pitch of the test pattern image 112 is 10 mm, 50 mm, or the like. As a result, for example, as shown in FIG. 11A, a plurality of test pattern images 112 are drawn on the measurement work 36a along the scanning direction. Of course, a 1 mm or the like may be adopted as the arrangement pitch of the test pattern images 112 to form a strip-shaped test pattern image.

  When the first drawing unit 102 draws a plurality of test pattern images 112 on the measurement workpiece 36a, meandering occurs in the moving stage 18 as the moving stage 18 moves, and the moving stage As a result, pitching vibration is generated in 18 and a displacement occurs in the moving stage 18. Further, due to the yawing operation (movement of the moving stage 18 in the moving direction), a slightly different meandering operation occurs at each position or a slightly different pitching vibration occurs at each position. It becomes.

  As a result, as shown in FIG. 11A, the first reference position (the position based on the ideal arrangement pitch of the test pattern image 112, and the reference position in the direction orthogonal to the scanning direction: indicated by reference numeral 116. Line) to the left or right side, and further to the second reference position (reference position in the scanning direction: a line indicated by reference numeral 118) to the upper side (upstream in the transport direction) or the lower side (downstream in the transport direction). It becomes. For example, as the first reference position 116, an arbitrary position can be selected, but a position that can be easily measured by a subsequent three-dimensional measuring instrument or the like is preferable. The second reference position 118 is located on the first reference position 116 and at the same arrangement pitch as the ideal arrangement pitch of the test pattern image 112. Then, the test pattern image 112 is drawn with an intersection point (denoted as an absolute reference 120 for convenience) of the first reference position 116 and the second reference position 118 as a target.

  In step S3 in FIG. 10, the measurement unit 104 measures at least a relative conveyance error of the measurement workpiece 36a based on the drawing state of the plurality of test pattern images 112 drawn on the measurement workpiece 36a. In this measurement, the measurement workpiece 36a held on the moving stage 18 is photographed by, for example, the alignment cameras 28a and 28b to measure the position of the test pattern image 112, and the drawing of the test pattern image 112 is finished. The measurement workpiece 36a is held on the moving stage 18, or removed from the moving stage 18 and transported to another measuring equipment, and the position of the test pattern image 112 is accurately measured using a three-dimensional measuring instrument or the like. Etc. The imaging results obtained by the alignment cameras 28a and 28b and the measurement results obtained by the three-dimensional measuring device are supplied to the measuring unit 104 as imaging data or by numerical input by an operator.

  In step S4 of FIG. 10, the measurement unit 104 calculates each shift amount from the measurement result and stores it in the corresponding data file.

  That is, based on the imaging results (imaging data) by the alignment cameras 28a and 28b and the measurement results (numerical data) by the three-dimensional measuring device, the amount of deviation from the first reference position 116 of the center position of each test pattern image 112 ( A deviation amount in a direction orthogonal to the scanning direction: a first deviation amount 124a) is calculated and stored in the first data file 122a (see FIG. 2), and the first position corresponding to the center position of each test pattern image 112 is calculated. 2 is calculated from the reference position 118 (a shift amount in the scanning direction: a second shift amount 124b) and stored in the second data file 118b.

  Further, based on these calculation results, the measurement unit 104 calculates the data of the envelope 126 connecting the drawing positions of the test pattern image 112 as shown in FIG. 14, and the envelope 126 and the absolute reference 120 are calculated. Shift amount, in particular, a shift amount along the direction orthogonal to the scanning direction (third shift amount 124c) is calculated and stored in the third data file 122c.

  In the above example, it is assumed that pitching vibration is generated as the moving stage 18 is moved. However, depending on the mechanism of the moving stage 18, the pitching vibration may not be generated. That is, it may not be necessary to shift the timing of light irradiation. In that case, the measurement unit 104 does not create the third data file 122c.

  As shown in FIG. 2, the correction unit 106 includes at least a light irradiation correction unit 128 and a meandering correction unit 130.

  In step S5 of FIG. 10, the light irradiation correction unit 128 is configured to shift the light irradiation timing based on the second shift amount 124b for each test pattern image 112 stored in the second data file 122b. And the result is stored in the first information table 132a. That is, the first information table 132a is created.

  Here, for example, as shown in Fig. 15, the first test pattern image (point of 50 mm) indicates that +4.5 µm ("+" is shifted toward the point of 100 mm). Is detected), the linear encoder 60 outputs a pulse Pi multiplied by 2 every time the moving stage 18 moves, for example, 0.05 μm, so that the generated deviation of +4.5 μm is corrected. For this purpose, by performing correction to reduce the amount of 4.5 μm / 0.05 μm = 90 pulses, it is possible to correct the deviation generated during the 0-50 mm interval. In addition, when a displacement of +5.3 μm is detected in the second test pattern image (point of 100 mm), the interval between the first test pattern image and the second test pattern image (50 to 100 mm interval) ) Is +5.3 μm−4.5 μm = + 0.8 μm. Therefore, in order to correct the generated deviation of 0.8 μm, it is possible to correct the deviation generated during the 50 to 100 mm section by performing correction to reduce 0.8 μm / 0.05 μm = 16 pulses. .

  Similarly, in the case where a position shift of −1.2 μm (“−” indicates a shift toward the 50 mm point) is detected in the third test pattern image (a point of 150 mm), The deviation of −1.2 μm−5.3 μm = −6.5 μm increases between the second test pattern image and the third test pattern image (100 to 150 mm section). Therefore, in order to correct the generated deviation of −6.5 μm, the deviation generated during the interval of 100 to 150 mm is corrected by performing an increase of −6.5 μm / 0.05 μm = 130 pulses. Can do.

  Then, the light irradiation correction unit 128 reads the second shift amount 124b of each test pattern image 122 from the second data file 122b in accordance with the above-described procedure, and each interval (0 to 50 mm, 50 to 100 mm, 100 to 100). The number of correction pulses corresponding to 150 mm... Is calculated and stored in the first information table 132a as shown in FIG.

  Next, in step S6 of FIG. 10, the meandering correction unit 130 stores image data for one frame based on the third shift amount 124c for each test pattern image 112 stored in the third data file 122c. Information for deforming (one piece of image data drawn on the regular work 36) (information on deformation of image data) is calculated, and the result is stored in the second information table 132b and the third information table 132c. Store. That is, the second information table 132b and the third information table 132c are created.

  Of course, when the shift of the light irradiation timing due to the pitching vibration is not taken into consideration, the image data for one frame is based on the first shift amount 124a for each test pattern image 112 stored in the first information table 132a. Calculate information for transforming.

  Here, the significance of creating the two information tables 132b and 132c will be described. As shown in FIG. 8B, the eight exposure heads 24a to 24h are arranged in an array of 2 rows and 4 columns, and the first row. A distance L that cannot be ignored exists between the four exposure heads 24a to 24d and the four exposure heads 24e to 24h in the second row. That is, the meandering amount of the moving stage 18 at the timing of drawing with the exposure heads 24a to 24d in the first row and the meandering amount of the moving stage 18 at the timing of drawing with the exposure heads 24e to 24h of the second row may be greatly different. Because there is.

  In view of this, the meandering correction unit 130 stores information related to the deformation of the image data corresponding to the exposure heads 24a to 24d in the first row in the second information table 132b, and corresponds to the exposure heads 24e to 24h in the second row. Information regarding the deformation of the image data is stored in the third information table 132c.

  There are two methods for modifying the image data. The first method transforms the image data 52 for one frame stored in the frame memory 54. The image data 52 recorded in the frame memory 54 has a configuration in which dot data is two-dimensionally expanded in accordance with an actually drawn image pattern. If the image data 52 to be drawn is monochrome data (2 gradations), the pixel data has a logical value of “1” or “0”, and the gradation of the image data 52 to be drawn is greater than 2 gradations. Data (multi-gradation), the number of bits having a depth corresponding to the maximum gradation is assigned. Further, the storage capacity of the frame memory 54, particularly the two-dimensional expansion, has a size larger than the recording range of the image data 52 drawn on the regular work 36. Of the recording range of the frame memory 54, the initial value (0: logical value for which exposure is not performed) is recorded in a portion excluding the image data 52. Therefore, when reading the image data 52 from the frame memory 54 in units of rows, it is necessary to specify the start row address and the start column address. In this first method, the start row address is automatically updated every time the image data 52 is read out in units of rows, but the start column address is fixed. When the first method is adopted, the image data in units of rows is shifted on the frame memory 54 due to the deformation of the image data 52. Therefore, as shown in FIGS. 4 and 17A, the maximum shift amount is estimated in advance. It is preferable that the starting column address is determined in advance.

  In the first method, the third shift amount 124c for each test pattern image 112 stored in the third data file 122c is read in step S101 of FIG. Subsequently, in step S102, the envelope 126 (see FIG. 14) measured by the measurement unit is restored using approximate calculation or the like based on the third deviation 124c. Thereafter, in step S103, the shift amount of the image data 52 in units of rows is calculated. At this time, the shift amount (fourth shift amount) of the image data 52 by the first row exposure heads 24a to 24d and the second row separated by the distance L from the first row exposure heads 24a to 24d. A shift amount (fifth shift amount) in units of rows of the image data 52 by the exposure heads 24e to 24h is calculated. Further, in step S104, the shift direction and the shift amount of the pixel data related to the corresponding row are calculated based on each fourth shift amount (see FIG. 17B). Similarly, in step S105, each fifth shift amount is calculated. Based on this, the shift direction and shift amount of the pixel data for the corresponding row are calculated. FIG. 17B shows an example in which the image data 52 is shifted. At this correction processing stage, the image data 52 is not shifted, and only the information (shift direction and shift amount) is calculated. Since pixel data has no concept of a sign bit, 0 (indicating pixel data not subjected to exposure) is forcibly stored in vacant pixel data after shifting.

  Then, in step S106 of FIG. 18, the shift direction and shift amount of each pixel data calculated for each row based on the fourth shift amount are stored in the second information table for each row (see FIG. 17C). In step S107, the shift direction and shift amount of each pixel data calculated in units of rows based on the fifth shift amount are stored in the third information table in units of rows (see FIG. 17C).

  Next, the second method will be described with reference to FIGS. 19 and 20A to 20C. In the second method, the start column address for reading the image data 52 does not need to consider the maximum shift amount as in the first method. Therefore, as shown in FIG. 20A, the initial start column address is the same as the start column address of the image data 52.

  First, in step S201 to step S203 in FIG. 19, similarly to the above-described step S101 to step S103, the shift amount (fourth shift amount) in units of rows of the image data 52 by the exposure heads 24a to 24d of the first row. The shift amount (fifth shift amount) in units of rows of the image data 52 by the exposure heads 24e to 24h in the second row is calculated. Thereafter, in step S204, among all the rows, the fourth shift amount is the largest and is shifted to the left when viewed in the example of FIG. 17B (reference row in address calculation: FIG. 17B). In step S205, the fifth shift amount is the largest and the line shifted in the left direction (reference line in address calculation) is specified in step S205. Thereafter, in step S206, a start column address for the corresponding row is obtained based on each fourth shift amount. At this time, the start column address of the row specified in step S204 is used as a reference (the same as the initial start column address of the image data 52 in FIG. 20A), and the start column address of the other row is set to the corresponding fourth shift. Depending on the amount, the left column in FIG. 20B is designated. The same applies to the specification of the start column address based on the fifth shift amount (step S207). As described above, the pixel data shift operation is virtually performed by changing the readout start column address in units of rows. Note that the start row address is automatically updated every time image data is read out in units of rows, as in the first method.

  In step S208, the start column address calculated for each row based on the fourth shift amount is stored in the second information table 132b for each row (see FIG. 20C). The start column address calculated for each row based on the shift amount is stored in the third information table 132c for each row (see FIG. 20C).

  Next, configurations and processing operations of the second transport unit 108 and the second drawing unit 110 will be described.

  First, the second transport unit 108 transports the moving stage 18 holding the regular work 36 in place of the measurement work 36a relative to the exposure heads 24a to 24h.

  The second drawing unit 110 generates image data 52 to be drawn on the regular work 36 being conveyed based on at least the first to third information tables 132 a to 132 c created by the correction unit 106. draw.

  Specifically, the second transport unit 108 drives a linear motor (not shown) on the moving stage 18 holding the regular work 36 in the same manner as the first transport unit 100 in step S7 of FIG. It moves at a constant speed in one direction (direction A in FIG. 1) along the guide rails 16a and 16b of the surface plate 14 by the force (outward movement). During this forward movement, the alignment mark formed on the regular workpiece 36 is detected. This alignment mark is collated with a mark stored in advance, and the exposure start timing by the exposure heads 24a to 24h is corrected based on the positional relationship.

  In addition, when the moving stage 18 reaches the forward path end, the second transport unit 108 moves the moving stage 18 in a direction opposite to the one direction (direction B in FIG. 1) at a constant speed (return path). Move). Then, in step S8 of FIG. 10, the second drawing unit 110 starts drawing the image on the regular work 36 during the return path movement.

  In the drawing process by the second drawing unit 110 in step S8, an image data reading process (step S8a), a drawing timing changing process (step S8b), and a drawing process (step S8c) are performed.

  Here, the image data reading process in step S8a will be described with reference to FIG.

  First, different processes are performed according to the two methods in the meandering correction unit 130. That is, when the first method is adopted, the image data 52 is shifted with respect to the exposure heads 24a to 24d in the first row in step S301 in FIG. Specifically, the shift direction and shift amount of each pixel data are read out from the second information table 132b in units of rows, and the corresponding rows of the image data 52 stored in the frame memory 54 are read as shown in FIG. 17B. Shift the pixel data. Of course, there are also rows where pixel data is not shifted. Then, after performing the shift operation for all the rows, in the next step S302, the second drawing unit 110 gives an initial start row address and a fixed start column address to the image dividing unit 56. The image dividing unit 56 reads the image data 52 stored in the frame memory 54 in units of rows. The starting row address is automatically updated as described above. Accordingly, the image data 52 for each row is read from the given fixed start column address. The image data read out in units of rows is divided into eight image data 52a to 52h corresponding to the exposure heads 24a to 24h, and four images corresponding to the exposure heads 24a to 24d in the first row are included. Data 52a to 52d are stored in the corresponding four data files 58a to 58d, respectively. This operation is performed for all rows.

  Thereafter, in step S303, the image data 52 is shifted with respect to the exposure heads 24e to 24h in the second row. In this case, the deformed image data 52 in the frame memory 54 is restored to the original state in advance, that is, the image data 52 in the state before the transformation by the shift operation in step S301 is restored. Then, the shift direction and shift amount of each pixel data are read from the third information table 132c in units of rows, and the pixel data in the corresponding rows of the image data 52 stored in the frame memory 54 are shifted. After performing the shift operation for all the rows, in the next step S304, as in step S302 described above, the image dividing unit 56 reads the image data 52 stored in the frame memory 54 in units of rows. The image data is divided into eight image data 52a to 52h corresponding to the exposure heads 24a to 24h. Of the eight image data 52a to 52h, the four image data 52e to 52h corresponding to the exposure heads 24e to 24h in the second row are stored in the corresponding four data files 58e to 58h, respectively. This operation is performed for all rows.

  As a result of the above-described processing, the data files 58a to 58h store the image data 52 to be supplied to the corresponding exposure heads 24a to 24h in the period of one frame.

  On the other hand, when the meandering correction unit 130 adopts the second method, in step S401 in FIG. 22, the start column address change processing of the image data related to the exposure heads 24a to 24d in the first row is performed. Specifically, a start column address is read from the second information table 132b in units of rows, and a read start address is given to the image dividing unit 56. This read start address initially gives the initial start row address and the start column address of the read image data of the first row. Thereafter, the start row address sequentially read from the second information table is given.

  In step S402, the image dividing unit reads the image data 52 stored in the frame memory 54 in units of rows. The starting row address is automatically updated as described above. Therefore, the image data for each row is read from the given start column address as shown in FIG. 20B. The image data read out in units of rows is divided into eight image data 52a to 52h corresponding to the exposure heads 24a to 24h, and four images corresponding to the exposure heads 24a to 24d in the first row are included. Data 52a to 52d are stored in the corresponding four data files 58a to 58d, respectively. This operation is performed for all rows.

  Thereafter, in step S403, image data shift processing for the exposure heads 24e to 24h in the second row is performed. In this case, the start column address is read from the third information table 132c in units of rows and is given to the image dividing unit 56. Since this operation is the same as step S401 described above, its details are omitted. Thereafter, in step S404, the image dividing unit 56 reads the image data 52 stored in the frame memory 54 in units of rows. The image data read out in units of rows is divided into eight image data 52a to 52h corresponding to the exposure heads 24a to 24h, of which four image data corresponding to the exposure heads 24e to 24h in the second row. 52e to 52h are stored in the corresponding four data files 58e to 58h, respectively. This operation is performed for all rows.

  As a result, the data files 58a to 58h store the image data 52 to be supplied to the corresponding exposure heads 24a to 24h in the period of one frame.

  In this second method, since only the start column address is changed, it is not necessary to transform the image data in the frame memory 54, the calculation speed can be greatly improved, and a high-definition image can be obtained. This is suitable for drawing.

  Next, the drawing timing change process in step S8b of FIG. 10 will be described. In this drawing timing process, the second drawing unit 110 reads the number of correction pulses from the second information table 132b, and based on the number of correction pulses, the corresponding sections (0 to 50 mm, 50 to 100 mm, 100, respectively). ˜150 mm,...)) Is corrected.

  Specifically, as shown in FIG. 6B and FIG. 23A, the timing pulse Pt is output once every 2.0 μm movement, and 25,000 times every interval (50 mm) of the ideal test pattern image 112. Is output. For example, when 16 pulses (0.8 μm) are reduced in a 50 to 100 mm section by correction, as shown in FIG. 23B, the count of pulses Pi is defined for 16 timing pulses Pt out of 25000 times. From 40 pulses to 39 pulses, that is, by changing the count value stored in the register 88 (see FIG. 2) from 40 pulses to 39 pulses, the pulse period for 16 timing pulses Pt is 0.05 μm, respectively. The light irradiation timing can be shortened by 0.8 μm as a result.

  On the other hand, for example, when 130 pulses (6.5 μm) are increased in the 100 to 150 mm section, as shown in FIG. 23C, the count of the pulse Pi is defined for 130 timing pulses Pt out of 25,000 times. By changing the count value stored in the register 88 from 40 pulses to 41 pulses, that is, from 40 pulses to 41 pulses, the pulse period for 130 timing pulses Pt can be increased by 0.05 μm. As a result, the light irradiation timing can be lengthened by 6.5 μm.

  The interval in which the number of pulses is reduced may be evenly spaced in 25000 times, and the interval may be appropriately changed using, for example, a random number.

  In the drawing process in step S8c of FIG. 10, the second drawing unit 110 supplies the deformed image data 52 stored in the data files 58a to 58h to the corresponding exposure heads 24a to 24h. As a result, the exposure heads 24a to 24h draw the image data 52 at the corrected light emission timing.

  As described above, in the exposure apparatus 10 according to the present embodiment, the first drawing unit 102 continuously draws the plurality of test pattern images 112 on the measurement workpiece 36a by the exposure heads 24a to 24h, In the measurement unit 104, a first shift amount 124a (a shift amount of the test pattern image 112 from the first reference position 116) and a second shift amount 124b (a second reference position corresponding to each test pattern image 112). 118) and the third shift amount 124c (the shift amount between the envelope 126 connecting the drawing position of the test pattern image 112 and the absolute reference 120), the movement of the moving stage 18 is calculated. It is possible to measure the displacement of the drawing position due to meandering, pitching vibration, and the like accompanying with high accuracy.

  Further, in the exposure apparatus 10 according to the present embodiment, information for shifting the light irradiation timing is calculated based on the second shift amount 124b for each test pattern image 112 calculated in the measurement unit 104 described above. Then, the first information table 132a is created based on the result, and the third shift amount 124c (or the first shift amount 124a) for each test pattern image 112 calculated by the measurement unit 104 described above is used. Based on this, information for transforming the image data 52 for one frame (one piece of image data drawn on the regular work 36) is calculated, and based on the result, the second and third information tables 132b are calculated. And 132c are created, when the second drawing unit 110 draws an image on the regular work 36 thereafter, the first to third information items are created. It is possible to draw a picture with high precision by using information table 132a to 132c.

  That is, the exposure apparatus 10 according to the present embodiment measures a drawing position shift due to meandering or pitching vibration accompanying the conveyance of the work 36 with high accuracy, and logically reflects the measurement result on the drawing image. The deviation of the exposure position due to the meandering or pitching vibration can be eliminated, and the image drawing and exposure on the workpiece 36 can be performed with high accuracy and at low cost.

  In the above-described example, one test pattern image 112 is drawn with respect to one second reference position 118 of the measurement work 36a. However, as shown in FIG. For example, two test pattern images 112 may be drawn with respect to two second reference positions 118.

  In this case, the measurement unit 104 can measure a rotation component (for example, an angle θ) with respect to a direction orthogonal to the line segment 134 and the scanning direction specified by the two drawn test pattern images 112. As the angle θ, as shown in FIG. 25, when the direction orthogonal to the scanning direction is the x-axis direction of the xy coordinate system and only a real number region of 0 or more is considered, when the line segment 204A is in the first quadrant, + Θ, and in the fourth quadrant, −θ.

  Moreover, since the test pattern image 112 is drawn at a pitch of, for example, 50 mm along the scanning direction, it is possible to measure a rotation component in units of 50 mm. Then, as shown in FIG. 2, the rotation component correction unit 136 is incorporated in the correction unit 106, and the rotation component correction unit 136 creates a rotation component for each section as the fourth information table 132d, thereby generating the second information table 132d. Can be easily reflected in the correction of the light irradiation timing based on the first information table 132a and the deformation of the image data 52 based on the second and third information tables 132b and 132c. Accurate image drawing can be realized.

  In the above-described embodiment, the example applied to the exposure apparatus 10 has been described. However, the present invention can also be applied to an analog exposure apparatus, an inkjet apparatus, and various alignment apparatuses.

  That is, the conveyance error measurement method, calibration method, drawing method, exposure drawing method, drawing apparatus, and exposure drawing apparatus according to the present invention are not limited to the above-described embodiments, and various types can be made without departing from the gist of the present invention. Of course, the configuration can be adopted.

It is a perspective view which shows schematic structure of the exposure apparatus which concerns on this Embodiment. It is a block diagram which shows the structure of the control system of the exposure apparatus which concerns on this Embodiment. It is explanatory drawing of the two-dimensional image formation process by the exposure head which comprises the exposure apparatus which concerns on this Embodiment. It is explanatory drawing which shows the image data recorded on the frame memory. It is explanatory drawing which shows the division | segmentation of image data. 6A is a timing chart showing pulses output from the linear encoder, and FIG. 6B is a timing chart showing timing pulses output from the timing generation circuit. It is a block diagram of the exposure head which comprises the exposure apparatus which concerns on this Embodiment. FIG. 8A is a plan view showing an exposure area by the exposure head, and FIG. 8B is a plan view showing an example of an array pattern of the exposure head. It is a top view which shows an example of the arrangement | sequence state of the dot pattern of an exposure head. It is a flowchart which shows the processing operation by the exposure apparatus which concerns on this Embodiment. 11A is a plan view showing a circular test pattern image, FIG. 11B is a plan view showing a test pattern image in which a plurality of vertical lines are arranged, and FIG. 11C is a test pattern image in which a plurality of horizontal lines are arranged. FIG. 11D is a plan view showing a test pattern image in which a plurality of vertical lines and horizontal lines are arranged. FIG. 12A is an explanatory view showing an example of the tilt state of the exposure head when performing single drawing, and FIG. 12B is an explanatory view showing a state where single drawing is performed at the drawing position. FIG. 13A is an explanatory view showing an example of the tilt state of the exposure head when performing double drawing, and FIG. 13B is an explanatory view showing a state where double drawing is performed at the drawing position. FIG. 11B is an enlarged view of FIG. 11A for explaining the first shift amount to the third shift amount. It is a figure which shows an example of the position shift amount by the pitching vibration which generate | occur | produces in a movement stage. It is explanatory drawing which shows the breakdown of a 1st information table. FIG. 17A is a diagram for explaining a start column address (fixed) of image data when the first method is adopted in the meandering correction unit, and FIG. 17B is a third deviation amount (or first deviation amount). FIG. 17C is a diagram illustrating a breakdown of the second and third information tables. FIG. It is a flowchart which shows the processing operation by the 1st system of a meandering correction | amendment part. It is a flowchart which shows the processing operation by the 2nd system of a meandering correction | amendment part. FIG. 20A is a diagram for explaining the start column address (initial) of image data when the second method is adopted in the meandering correction unit, and FIG. 20B is a third deviation amount (or first deviation amount). FIG. 20C is a diagram illustrating a breakdown of the second and third information tables. FIG. 20C is a diagram for explaining the designation of the start column address of the image data based on the row. It is a flowchart which shows the process in the 2nd drawing part when a meandering correction | amendment part employ | adopts a 1st system, especially an image read-out process. It is a flowchart which shows the process in the 2nd drawing part when a meandering correction part employ | adopts a 2nd system, especially an image read-out process. FIG. 23A is a timing chart showing the output timing of the normal timing pulse, FIG. 23B is a timing chart showing the output timing of the timing pulse when the decrease correction for 16 pulses is performed, and FIG. 23C is an increase for 130 pulses. It is a timing chart which shows the output timing of the timing pulse in the case of performing correction. It is explanatory drawing which shows the state which drawn two test pattern images with respect to one 2nd reference position of the workpiece | work for measurement. It is explanatory drawing which shows the relationship of the rotation component based on the line segment specified by two test pattern images. It is a perspective view which shows schematic structure of the digital exposure apparatus which concerns on a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Exposure apparatus 18 ... Moving stage 24a-24h ... Exposure head 36 ... Workpiece (regular work)
36a ... Work for measurement 40 ... Control unit 48 ... Exposure processing unit 52 ... Image data 54 ... Frame memory 56 ... Image division unit 60 ... Linear encoder 100 ... First transport unit 102 ... First drawing unit 104 ... Measurement unit 106 ... correction unit 108 ... second transport unit 110 ... second drawing unit 112 ... test pattern image 124a ... first deviation amount 124b ... second deviation amount 124c ... third deviation amount 128 ... light irradiation correction unit 130 ... Meandering correction units 132a to 132d ... First to fourth information tables 136 ... Rotation component correction unit

Claims (31)

A transport step for transporting the stage holding the workpiece relative to the drawing unit;
A drawing step of drawing a plurality of test pattern images on the workpiece by the drawing unit;
And a measurement step of measuring at least a relative conveyance error of the workpiece based on a drawing state of a plurality of test pattern images drawn on the workpiece. In the conveyance error measuring method according to claim 1,
The transport error measuring method according to claim 1, wherein the measuring step performs measurement based on a drawing state of a plurality of test pattern images continuously drawn on the workpiece. In the conveyance error measuring method according to claim 1 or 2,
In the drawing step, the plurality of test pattern images are drawn on the work by multiple drawing by the drawing unit. In the conveyance error measuring method according to any one of claims 1 to 3,
In the drawing step, the plurality of test pattern images are drawn on the work by using pixels in a partial area of the drawing unit. In the conveyance error measuring method according to any one of claims 1 to 4,
The measuring step includes a deviation along the direction of the test pattern image from a reference position in a direction orthogonal to a relative conveyance direction of the workpiece based on a drawing state of a plurality of test pattern images drawn on the workpiece. A conveyance error measuring method characterized by measuring a quantity. In the conveyance error measuring method according to any one of claims 1 to 5,
The measuring step measures a shift amount of the test pattern image along the conveyance direction from a reference position in the relative conveyance direction of the workpiece based on a drawing state of a plurality of test pattern images drawn on the workpiece. A method for measuring a conveyance error. In the conveyance error measuring method according to any one of claims 1 to 6,
In the drawing step, the drawing error is drawn on the work using pixels in at least two regions separated along a direction orthogonal to a relative carrying direction of the work in the drawing unit. Measurement method. In the conveyance error measuring method according to claim 7,
The measuring step measures a rotation component with respect to a relative conveyance direction of the workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the workpiece. Transport error measurement method.   A calibration method, wherein the drawing position by the drawing unit is calibrated using the transport error measurement method according to claim 1. A first transport step for transporting the stage on which the measurement workpiece is held relative to the drawing unit;
A first drawing step of drawing a plurality of test pattern images on the measurement work by the drawing unit;
A measurement step of measuring at least a relative conveyance error of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece;
Based on the transport error measured in the measurement step, a correction step for creating information related to drawing of the drawing unit;
A second transfer step of holding a regular workpiece on the stage and transferring the workpiece relative to the drawing unit;
A drawing method comprising: a second drawing step of drawing an image to be drawn on the regular workpiece based on the drawing-related information created in the correction step. The drawing method according to claim 10.
The drawing method, wherein the measuring step performs measurement based on a drawing state of a plurality of test pattern images continuously drawn on the measurement work. The drawing method according to claim 10 or 11,
In the drawing method, the first drawing step draws the plurality of test pattern images on the measurement work by multiple drawing by the drawing unit. The drawing method according to any one of claims 10 to 12,
In the drawing method, the first drawing step draws the plurality of test pattern images on the measurement work by using pixels in a partial area of the drawing unit. The drawing method according to any one of claims 10 to 13,
In the measurement step, the direction of the test pattern image from a reference position in a direction orthogonal to a relative conveyance direction of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece. A drawing method characterized by measuring a deviation amount along the line. The drawing method according to any one of claims 10 to 14,
The measurement step is based on a drawing state of a plurality of test pattern images drawn on the measurement work, along a conveyance direction of the test pattern image from a reference position in a relative conveyance direction of the measurement work. A drawing method characterized by measuring a deviation amount. The drawing method according to any one of claims 10 to 15,
The drawing unit has one or more drawing heads,
The correction step logically deforms the image data to be drawn for each of the drawing heads based on the transport error measured in the measurement step, and creates a table for creating information on the deformation as an information table Has steps,
The drawing method, wherein the second drawing step draws the image to be drawn on the regular work based on the information on the deformation stored in the information table. The drawing method according to any one of claims 10 to 15,
The drawing unit has one or more drawing heads,
The correction step logically changes a read start address for each of the drawing heads in the image data to be drawn based on the conveyance error measured in the measurement step, and stores information on the address change in an information table Has a table creation step to create as
The drawing method, wherein the second drawing step draws the image to be drawn on the regular work based on the information on the address change stored in the information table. The drawing method according to any one of claims 10 to 17,
In the first drawing step, drawing is performed on the measurement work using pixels in at least two regions separated along a direction orthogonal to the relative conveyance direction of the measurement work in the drawing unit. A drawing method characterized by that. The drawing method according to claim 18, wherein
The measurement step measures a rotation component with respect to a relative conveyance direction of the measurement workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece,
In the drawing method, the correction step includes creating information relating to drawing by the drawing unit by reflecting the rotation component.   An exposure drawing method, wherein at least the regular workpiece is exposed using the drawing method according to claim 10. A first transport means for transporting the stage holding the measurement workpiece relative to the drawing unit;
First drawing means for drawing a plurality of test pattern images on the measurement work by the drawing unit;
Measuring means for measuring at least a relative conveyance error of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece;
Based on the transport error measured in the measurement step, correction means for creating information related to drawing of the drawing unit;
Second conveying means for holding a regular workpiece on the stage and conveying the workpiece relative to the drawing unit;
A drawing apparatus comprising: a second drawing unit that draws an image to be drawn on the regular workpiece based on the information relating to the drawing created in the correction step. The drawing apparatus according to claim 21, wherein
The drawing device, wherein the measuring unit performs measurement based on a drawing state of a plurality of test pattern images continuously drawn on the measurement work. The drawing apparatus according to claim 21 or 20,
The drawing apparatus, wherein the first drawing means draws the plurality of test pattern images on the measurement work by multiple drawing by the drawing unit. The drawing apparatus according to any one of claims 21 to 23,
The drawing apparatus, wherein the first drawing means draws the plurality of test pattern images on the measurement work by using pixels in a partial area of the drawing unit. The drawing apparatus according to any one of claims 21 to 24,
The measurement means is configured to determine the direction of the test pattern image from a reference position in a direction orthogonal to a relative conveyance direction of the measurement workpiece based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece. A drawing apparatus for measuring a deviation amount along the line. The drawing apparatus according to any one of claims 21 to 25,
The measurement means follows the transport direction of the test pattern image from the reference position in the relative transport direction of the measurement workpiece based on the drawing state of a plurality of test pattern images drawn on the measurement workpiece. A drawing apparatus for measuring a deviation amount. The drawing apparatus according to any one of claims 21 to 26,
The drawing unit has one or more drawing heads,
The correction unit logically deforms the image data to be drawn for each of the drawing heads based on the transport error measured by the measuring unit, and creates a table for creating information on the deformation as an information table Having means,
The drawing apparatus, wherein the second drawing means draws the image to be drawn on the regular work based on information on the deformation stored in the information table. The drawing apparatus according to any one of claims 21 to 26,
The drawing unit has one or more drawing heads,
The correction unit logically changes a read start address for each of the drawing heads in the image data to be drawn based on the transport error measured by the measuring unit, and stores information on the address change in an information table As a table creation means to create as
The drawing apparatus, wherein the second drawing means draws the image to be drawn on the regular work based on information on the address change stored in the information table. The drawing apparatus according to any one of claims 21 to 28,
The first drawing means draws on the measurement work using pixels in at least two regions separated along a direction orthogonal to a relative conveyance direction of the measurement work in the drawing unit. A drawing apparatus characterized by that. The drawing apparatus according to claim 29, wherein
The measuring means measures a rotation component with respect to a relative conveyance direction of the measurement workpiece or a direction orthogonal to the conveyance direction based on a drawing state of a plurality of test pattern images drawn on the measurement workpiece,
The drawing unit, wherein the correction unit creates information related to drawing by the drawing unit by reflecting the rotation component.   31. An exposure drawing apparatus comprising the drawing apparatus according to claim 21, wherein the image is drawn on at least the regular work by exposure.

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