JP2006294987A - Sample processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a space saving sample processing device having a short transfer time. <P>SOLUTION: The sample processing device 1 comprises a processing chamber 40 for vacuumizing its inside and processing the sample; a first sample-transfer chamber 30 keeping the inside for transferring the sample to the chamber 40 in a vacuum condition; a second sample-transfer vessel 10 having a sample-transfer robot 11, and keeping the inside for transferring the sample 60 contained in a sample containing cassette 70 in an atmosphere pressure condition; a locking chamber 20 coupled between the chamber 30 and the chamber 10, having a gate large enough to carry the sample in and out the boundary of each sample transfer chamber, and a valve for opening and closing the gate, and keeping the inside in the atmosphere condition or in the vacuum condition by closing the valve; and a control device 50. In the sample processing device 1, a plurality of light shielding sensors 23 are provided at the position where the sample intersects on the transfer path for transferring the sample from the chamber 10 to a sample stand 21 provided in the chamber 20. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sample processing apparatus in a semiconductor manufacturing process or the like.

  A sample processing apparatus such as a semiconductor wafer processing apparatus performs processing on a sample while the inside of the processing chamber is in a vacuum state. A sample is conveyed to the processing chamber in a sheet format. Therefore, a sample transfer chamber equipped with a robot for transferring a sample is connected to the processing chamber. Here, since the inside of the processing chamber is kept in a vacuum state during the operation of the apparatus while the sample processing apparatus is in operation, the inside of the sample transfer chamber is also kept almost always in a vacuum state. However, since the inside of the sample storage cassette for storing the sample before or after the processing is in the atmospheric pressure state, the processing apparatus also includes a robot for transporting the sample under the atmospheric pressure state. Thus, while the sample is transported from the sample storage cassette to the vacuum processing chamber, the sample passes through the sample transport chamber under the atmospheric pressure state and the sample transport chamber under the vacuum state. In between, the sample transfer chamber under the atmospheric pressure state and the sample transfer chamber under the vacuum pressure state are connected, and the inside of the chamber under the connected vacuum state is kept in a vacuum state, or the inside is pressurized or It has a unit called a lock chamber that decompresses and enables sample transfer between the atmosphere side sample transfer robot and the vacuum side sample transfer robot.

  Usually, the atmosphere-side vacuum robot depressurizes the gap between the sample and the hand so as not to drop the sample being conveyed, and conveys the sample while adsorbing the sample and the hand at atmospheric pressure. When the sample is transported using the vacuum adsorption force in this way, the sample does not move on the hand while the transport robot is transporting the sample, so that the sample can be transported at a high speed. However, since the suction force does not work in a vacuum state, a vacuum suction type sample transport robot cannot be used. Therefore, the vacuum side sample transport robot has a structure in which a sample is placed on the upper surface of the hand, a projection is provided around the sample installation surface on the upper surface of the hand, and the position of the sample is limited within the projection.

  When the vacuum side sample transport robot receives the sample from the lock chamber, the sample placed on the lock chamber sample stage is lifted by, for example, a pusher, and the hand of the vacuum side sample transport robot moves between the sample stage and the sample. After insertion, the sample is delivered onto the hand by pulling down the pusher.

  At this time, the inside of the protrusion on the upper surface of the hand has a tapered shape, and when the sample is transferred from the lock chamber to the hand, even if the position of the sample is off the sample setting position on the upper part of the hand, If the position is within the tapered portion of the protrusion, the sample slides down the taper shape book, so that the sample is stored inside the protrusion.

  When the vacuum-side sample transport robot receives a sample from the lock chamber, if the sample and hand position deviation is larger than the allowable deviation, the sample delivery fails or the sample enters the inside of the protrusion on the upper surface of the hand. There is a danger of dropping the sample during transport.

  Here, the sample setting surface inside the protrusion of the hand can be finely moved to the horizontal treasure on the upper surface of the hand. As described above, when the sample freely moves on the hand, the sample transport accuracy decreases.

  Accordingly, when the sample is transferred from the lock chamber to the vacuum side sample transport robot hand, if the area of the sample installation surface on the upper surface of the hand is increased so that an allowable deviation amount between the position of the sample and the hand is increased, If the colleague uses a small hand to extend the sample on the sample installation surface of the vacuum side sample transport robot in order to improve the transport accuracy, the colleague extends the sample at the vacuum side, and the vacuum side sample is removed from the lock chamber. The allowable deviation between the position of the sample and the hand when the transport robot hand receives the sample is reduced.

  If the sample transport accuracy of the vacuum side sample transport robot is poor, the processing performance when the sample is processed in the processing chamber is adversely affected. Therefore, it is important to increase the accuracy of the sample transport position by the sample transport robot. Therefore, when the vacuum side sample transport robot receives the sample from the lock chamber, the sample and hand positions are highly accurate up to the sample delivery position so that the delivery is surely successful even if the allowable deviation between the sample position and the hand position is small. It is required to be arranged in.

  However, in the sample storage cassette, the position of the sample is not accurately positioned. When the atmosphere-side sample transport robot transports the sample from the sample storage cassette to the lock chamber, the sample transport position is shifted from the target transport position for each sample. Therefore, when the vacuum side sample transport robot receives a sample from the lock chamber, if the allowable deviation between the robot hand and the sample position is small, sample transfer may fail.

  Therefore, normally, when the atmosphere-side sample transport robot transports a sample from the sample storage cassette to the lock chamber, the sample stored in the sample storage cassette is centered by a sample called a centering unit by the atmosphere-side sample transport robot. After the centering unit performs centering of the sample, the atmosphere side sample transport robot transports the sample to the lock chamber again. As a result, the sample is conveyed to the target position with high accuracy.

  The centering unit as described above includes a wafer transfer unit that transfers a wafer to a wafer delivery position, and a plurality of sensors that are asymmetrically arranged with respect to the central axis in the transfer direction of the wafer transfer unit and detect a plurality of edge coordinate data of the wafer And determining the center of the wafer based on the edge coordinate data of the three points not including the alignment shape portion formed on the wafer among the plurality of edge coordinate data obtained by the plurality of sensors in the wafer transport unit. A calculation unit that calculates the amount of deviation between the center of the wafer and the center of the transfer position, and a movement that moves the wafer transfer unit in the XY directions to align the center of the wafer with the center of the wafer transfer position based on the amount of shift obtained by the calculation unit. Means (for example, refer to Patent Document 1).

  Here, the positional relationship between the sample centering position of the centering unit and the sample delivery position of the lock chamber depends on the machining tolerance of the machined product such as the atmosphere-side sample transfer chamber housing, the atmosphere-side sample transfer chamber and the lock chamber. Because of the assembly tolerances, etc., there will be a small difference in each device, so the atmosphere side sample transport robot can transport the sample centered in the previous centering unit to the center of the sample table in the lock chamber with high accuracy. In the apparatus assembly stage, fine adjustment of the transfer position called teaching is performed for each apparatus. Teaching is an operation of manually moving the sample transport robot to a target position and storing the position in the drive system of the sample transport robot.

  Similarly, teaching work can be performed on the vacuum side sample transfer robot for each device so that the sample can be transferred to the vacuum side sample transfer device from the lock chamber to the sample stage in the vacuum processing chamber with high accuracy. Done.

  Once the teaching work has been performed, the sample transport robot repeatedly operates with high accuracy up to the teaching position.

Furthermore, as a method for transporting a sample to a target position with high accuracy, a technique has been proposed in which the sample transport robot detects the sample misalignment and corrects the movement of the sample transport robot with respect to the sample transport robot. For example, see Patent Document 2).
JP 2003-254738 A JP-A-10-64971

  As described above, conventionally, in order to transport the sample to the center of the processing table in the processing chamber with high accuracy, the sample is centered using an apparatus called a centering unit, and then the sample is transported to the processing chamber. However, the installation of the centering unit increases the size of the entire apparatus and reduces the maintenance space.

  In addition, the above method has a problem that the transfer time is increased by passing the sample through the centering unit while the sample is transferred to the processing chamber, and the cost of the apparatus is increased by mounting the centering unit. Furthermore, there is a problem that the chance of contaminating the sample is increased by passing the centering unit when the sample is conveyed.

  Furthermore, even if the center of the sample is brought out by the centering unit, there is a problem that if there is an error in attaching the lock chamber to the atmospheric transfer chamber, this attachment error needs to be corrected again.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a sample transport device that can save the space and has a short transport time, and can align the sample in the process of transporting the sample from the sample storage cassette to the lock chamber sample stage. Another object of the present invention is to provide a low-cost sample processing apparatus. Furthermore, another object of the present invention is to reduce the chance of contamination of the sample, and even if an error occurs when a lock chamber is attached to the atmospheric transfer chamber, the sample can be accurately transferred to the lock chamber sample stage. It is to provide a processing apparatus.

  The object is to provide a processing chamber for processing a sample in a vacuum state, a first sample transport chamber for maintaining the interior in a vacuum state for transporting the sample to the processing chamber, and a sample storage cassette having a sample transport robot. Connected to the boundary between each of the second sample transfer chamber and the second sample transfer chamber, which is connected between the first sample transfer chamber and the second sample transfer chamber. Sample processing having a gate that is large enough to load and unload a sample, a valve that opens and closes the gate, a lock chamber that closes the valve to bring the inside into an atmospheric pressure state or a vacuum state, and a control device In the apparatus, this can be achieved by providing a pair of light-shielding sensors at positions where the sample crosses on the transport path for transporting the sample from the second sample transport chamber to the sample stage provided in the lock chamber.

  Further, the object is to provide a sample in the sample processing apparatus in the vicinity of the second sample transfer chamber side gate of the lock chamber and on the transfer path for transferring the sample from the second sample transfer chamber to the sample stage in the lock chamber. This is achieved by providing a pair or more of light shielding sensors at positions that cross each other.

  Further, in the sample processing apparatus, the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to shield the light beam from the sample being transported. This is achieved by measuring the time or time and calculating the position of the sample relative to the position where the shading sensor is attached.

  In the sample processing apparatus, the light shielding sensor has a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to allow the light beam to be shielded by the sample being transported. The time of the sample is calculated to calculate the position of the sample relative to the position where the light-shielding sensor is attached, and the position of the light-shielding sensor relative to the sample stage that is the sample transport destination is clarified. By transporting the sample, the control device calculates the positional relationship between the sample being transported and the sample stage using the output of the light shielding sensor.

  In the sample processing apparatus, the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to shield the light beam from the sample being transported. The time or time is measured to calculate the position of the sample with respect to the position where the light shielding sensor is attached, and the position of the light shielding sensor with respect to the sample stage as the sample transport destination is clarified, and the control device uses the output of the light shielding sensor. This is achieved by calculating the transport speed of the sample and calculating the positional relationship between the position of the sample being transported and the sample stage.

  Further, in the sample processing apparatus, the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to shield the light beam from the sample being transported. Measure the time or time to calculate the position of the sample relative to the position where the shading sensor is attached, and use the output of the shading sensor to calculate the sample transport speed and the positional relationship between the position of the sample being transported and the sample stage. This is achieved by calculating the distance and direction between the sample being transferred and the sample stage based on the result, and further controlling the operation of the sample transfer robot based on the calculation result.

  According to the present invention, it is possible to provide a sample processing apparatus that saves space and has a short transport time. In addition, a low-cost sample processing apparatus can be provided. Furthermore, according to the present invention, it is possible to reduce the chance of contamination of the sample and accurately transport the sample to the lock chamber sample stand without considering this even if an error occurs when the lock chamber is attached to the atmospheric transfer chamber. It is possible to provide a sample processing apparatus capable of

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a top view showing an overall view of a sample processing apparatus according to an embodiment of the present invention. FIG. 2 is a partially cutaway perspective view showing the atmosphere-side sample transfer chamber of the sample processing apparatus according to the embodiment of the present invention. FIG. 3 is a partially cutaway perspective view showing the vacuum side sample transfer chamber of the sample processing apparatus according to the embodiment of the present invention. FIG. 4 is a partially cutaway perspective view showing a state when the atmosphere side sample transport robot of the sample processing apparatus according to the embodiment of the present invention transports the sample into the lock chamber.

  The sample processing apparatus shown in this embodiment processes a sample by reducing the pressure inside the processing chamber to a vacuum state. The sample processing apparatus 1 includes an atmosphere-side sample transfer chamber 10, a vacuum-side sample transfer chamber 30, a plurality of lock chambers 20 connected to the atmosphere-side sample transfer chamber 10 and the vacuum-side sample transfer chamber 30, and a vacuum-side sample transfer. A plurality of sample processing chambers (vacuum processing chambers) 40 connected to the chamber 30, a cassette mounting table (not shown) mounted on the atmosphere-side sample transfer chamber 10 on which the sample storage cassette 70 is mounted, and a control device 50.

  An atmosphere-side sample transfer robot 11 is provided inside the atmosphere-side sample transfer chamber 10, and a vacuum-side sample transfer robot 31 is provided inside the vacuum-side sample transfer chamber 30. In addition, a lock chamber sample stage 21 on which a sample is placed is provided inside a lock chamber 20 that is connected to the atmosphere-side sample transfer chamber 10 and the vacuum-side sample transfer chamber 30 with bolts or the like. A sample processing table 41 is provided in each 40. The lock chamber 20 and the vacuum processing chamber 40 are workstations on which samples are placed and work is performed.

  The insides of the vacuum processing chamber 40 and the vacuum side sample transfer chamber 30 are almost always in a vacuum state, and the atmosphere side sample transfer chamber 10 and the sample storage cassette 70 for storing a sample before or after processing are always in an atmospheric state. . The lock chamber 20 has an opening large enough to load or unload a sample before and after the lock chamber 20 and a valve that can be opened and closed at the opening, and closes the valve to pressurize or depressurize the inside. It can be arranged in a vacuum vessel.

  The sample 60 stored in the sample storage cassette 70 is transferred to the lock chamber sample stage 21 installed in the lock chamber 20 by the atmosphere side sample transfer robot 11 installed in the atmosphere side sample transfer chamber 10. . That is, the lock chamber 20 is a destination for conveyance. At this time, the inside of the lock chamber 20 is in an atmospheric state, and the vacuum side gate in the lock chamber is closed. After the sample 60 is transferred onto the lock chamber sample stage 21, the atmosphere side gate of the lock chamber 20 is closed, and the inside of the lock chamber 20 is depressurized to be in a vacuum state. After the inside of the lock chamber 20 is in a vacuum state, the vacuum side gate is opened, and the sample 60 is placed inside the sample processing chamber 40 by the vacuum side sample carrying robot 31 stored inside the vacuum side sample carrying chamber 30. The sample processing table 41 is conveyed. A valve is provided at the boundary between the sample processing chamber 40 and the vacuum side sample transfer chamber 30. After the valve is closed, the sample is processed inside the sample processing chamber 40. The processed sample 60 is collected in the sample storage cassette 70 via the vacuum side sample transport robot 31, the lock chamber 20, and the atmosphere side sample transport robot 11 in the same manner as described above.

  Here, a delivery method when the vacuum-side sample transport robot 31 delivers the lock chamber 20 and the sample 60 will be described with reference to FIG. The sample 60 transported from the atmosphere-side sample transport robot 11 is placed on the lock chamber sample base 21. The lock chamber sample stage 21 is provided with a pusher 25. The pusher 25 is attached perpendicularly to the upper surface of the lock chamber sample stage, and is pushed up and down by the vertical movement of the pusher 25 or pulled back into the lock chamber sample stage. In a state where the sample 60 is placed on the lock chamber sample stage 21, the pusher 25 is pushed up from the lock chamber sample stage 21, whereby the sample 60 is pushed up above the lock chamber sample stage 21. In a state where the pusher 25 pushes up the sample 60, the robot hand 311 of the vacuum side sample transport robot 31 is inserted into the space between the lock chamber sample stage 21 and the sample 60 pushed up by the pusher 25, and the pusher 25 is locked. The sample 60 is transferred from the lock chamber sample table 21 to the vacuum side sample transport robot 31 in the lock chamber 20 by being pulled back into the chamber sample table 21.

  Here, the robot hand 311 of the vacuum side sample transport robot 31 has a shape having a protrusion 312 at least at the front and rear or left and right ends of the sample installation surface 313, and the vacuum side sample transport robot 31 from the lock chamber 20. If the position of the sample 60 pushed up by the pusher 25 is shifted to the outside of the inclined portion of the sample mounting surface 313 of the robot hand 311 and the protruding portion 312 around the sample 60, the sample 60 is moved to the robot. The sample is not placed on the sample setting surface 313 of the hand 311 and a conveyance error occurs.

  The cause of the failure in delivering the sample 60 from the lock chamber 20 to the robot hand 311 is that the position of the sample 60 pushed up by the pusher 25 or the position of the robot hand 311 inserted below the sample 60 is appropriate. By shifting from position.

  Therefore, the insertion position of the sample transport robot hand 311 is finely adjusted called teaching when the apparatus is assembled. The robot hand 311 after teaching can move to the teaching position with high accuracy even if it is repeatedly operated.

  Further, in order for the atmosphere-side sample transport robot 11 to transport the sample 60 from the sample storage cassette 70 to the delivery position with high accuracy, a light shielding sensor is attached in the vicinity of the entrance of the lock chamber 20 to transport the sample 60 being transported. By detecting the relative positional relationship with the center of the lock chamber sample stage 21 that is the tip, adjusting the position according to the result, and transporting the sample 60, the sample 60 is transported with high accuracy.

  The system will be described in detail with reference to FIG. 4 which is a top perspective view in which the atmosphere-side sample transfer chamber 10 and the lock chamber 20 are partially cut open. In the lock chamber 20, the detection light beam 24 is shielded by the sample 60 being transported in the space between the opening 22 at the boundary between the lock chamber sample stage 21 and the atmosphere-side sample transport chamber 10. Two sets of light-shielding sensors 23 installed between the lock chamber sample stage 21 and the opening 22 are provided on the left and right of the central path of the sample 60. The light shielding sensor 23 includes a radiator 23R that emits the light beam and a detector 23D that receives and detects the light beam 24 emitted from the radiator 23R. A detector 23 </ b> D of the light beam 24 is attached outside the upper surface of the lock chamber 20, and a radiator 23 </ b> R of the light beam 24 is attached outside the lower surface of the lock chamber 20. A light-transmitting material, for example, transparent vinyl chloride is used for a portion through which the light beam 24 of the parts constituting the upper and lower surfaces of the lock chamber 20 passes. As the detection sensor, a sensor having high directivity can be used in addition to the optical sensor.

  When the sample 60 starts to be carried into the lock chamber 20, the light beam 24 is shielded by the sample 60 being transferred. A conceptual diagram showing a state immediately before the sample 60 starts to be carried into the lock chamber 20 and the sample 60 blocks the light beam 24 is shown in FIG. FIG. 5B is a conceptual diagram showing a state when the sample 60 being transported blocks the light beam 24. At this time, the sample 60 being conveyed is conveyed at a predetermined constant speed. The attachment positions of the two sets of light shielding sensors 23 with respect to the lock chamber sample stage 21 are known. In this example, they are arranged equidistantly at symmetrical positions with respect to a line passing through the center of the lock chamber sample stage 21.

  Here, if one set of the light beam radiator 23R and the light beam detector 23D is a light shielding sensor A and the other one is a light shielding sensor B, the light beam 24 of the light shielding sensor A starts to be shielded by the sample 60 being conveyed. Time t1 (A) and the time t2 (A) when the light beam detector 23D starts detecting the light beam 24 again when the light beam that has been shielded by the sample 60 being conveyed passes by the sample 60. Is detected. Therefore, the time Ta = (t2 (A) −t1 (A)) in which the light beam 24 of the light shielding sensor A is shielded by the sample 60 being conveyed is detected. Similarly, a time Tb = (t2 (B) −t1 (B)) in which the light beam 24 of the optical sensor B is shielded by the sample 60 being conveyed is detected.

  An example of the time-series data of the light beam detection amount of the light beam detector 23D is shown in FIG. Since the positional relationship between the sample transport speed and the sensor mounting position and the sample stage 21 of the lock chamber 20 as the target transport destination is known, Ta or Tb is detected, so that the center of the lock chamber sample stage 21 is being transported. The lateral position of the sample 60 in the transport direction can be calculated. However, in order to improve the reliability of the calculation result, in this embodiment, the calculation accuracy is improved by using two pairs of light shielding sensors 23. Also, the time t1 (A), t1 (B) when the sample being transported begins to shield the light beam 24, or the time t2 (A), t2 (when the light shielding sensor 23 begins to detect the light beam 24 again. The distance in the transport direction from the center of the sample stage 21 to the center of the sample 60 can be calculated using B). Therefore, the positional relationship between the sample being transported and the center position of the lock chamber sample stage 21 that is the target transport destination is detected, and the transport position is determined according to the detection result, so that the sample is stored inside the sample storage cassette 70. Even if the position is not fixed every time, the sample can be conveyed to the center of the lock chamber sample stage 21 with high accuracy.

  The previously detected or set sample transport speed and the distance from the center of the lock chamber sample base 21 as the transport destination to the light shielding sensor mounting position are stored in a storage medium (not shown) so as to be readable as necessary. These information and data measured by the light shielding sensor 23 are taken into the control device 50, and a control signal is sent from the control device 50 to the atmosphere-side sample transport robot 11.

  Here, since the positional relationship between the lock chamber sample stage 21 and the light shielding sensor 23 attached to the lock chamber 20 is set with high accuracy or the detected positional relationship is required, The chamber to be attached and the chamber to which the light-shielding sensor 23 is attached are preferably the same parts. In this embodiment, the chamber part of the lock chamber 20 is composed of one part, and the sample stage 21 and the light shielding sensor 23 are attached to this chamber part. Further, the light shielding sensor 23 may be attached to the lock chamber sample base 21.

  The light-shielding sensor 23 is always arranged at an arbitrary position where the sample 60 being transported crosses the light beam 24 in the space from the sample storage cassette 70 to the lock chamber sample stage 21 being transported. Also good. However, for example, when the light shielding sensor 23 is installed in the atmosphere-side sample transport chamber 10, the positional relationship between the light-shielding sensor installation position and the sample stage 21 of the lock chamber 20 that is the target transport destination is the housing of the atmosphere-side sample transport chamber 10. Since the positional relationship is not clear for each apparatus due to the body processing tolerance and the assembly tolerance of the casing of the atmosphere-side sample transfer chamber 10 and the lock chamber 20, the position where the sensor is installed and the position of the lock chamber 20 up to the sample stage 21 The relationship needs to be taught after assembly of the device.

  When the present invention is used, the sample 60 transported from the sample storage cassette 70 to the sample stage 21 of the lock chamber 20 is transported with high accuracy because the positional deviation is reduced for each sample 60. When the sample 60 is delivered from the table 21 to the vacuum side sample transport robot 31, the failure of delivery is suppressed.

  Further, when the present invention is used, the transport time is shortened compared to the case of transporting the sample via the centering unit.

The top view explaining the structure of the sample processing apparatus concerning this invention. FIG. 4 is a partially cutaway perspective view illustrating the structure of the atmosphere-side sample transfer chamber of the sample processing apparatus according to the present invention. The partially cutaway perspective view explaining the structure of the vacuum side sample conveyance chamber of the sample processing apparatus concerning this invention. In the sample processing apparatus according to the present invention, a partially cutaway perspective view showing a state when the atmosphere-side sample transport robot transports a sample into the lock chamber. In the sample processing apparatus concerning this invention, when the atmosphere side sample conveyance robot conveys a sample to the inside of a lock chamber, the conceptual diagram which shows a mode just before a sample passes the light-shielding sensor attached to a lock chamber. In the sample processing apparatus concerning this invention, when the atmosphere side sample conveyance robot conveys a sample to the inside of a lock chamber, it is a conceptual diagram which shows a mode that it passes through the light-shielding sensor attached to a lock chamber, light-shielding. The conceptual diagram which shows a mode when a sample is handed over to the vacuum side sample conveyance robot hand from a lock chamber. Schematic showing the time series data of the light beam received amount which the detector of the said light-shielding sensor detected.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Sample processing apparatus, 10 ... Atmosphere side sample conveyance chamber, 11 ... Atmosphere side sample conveyance robot, 20 ... Lock chamber, 21 ... Lock chamber sample stand, 22 ... Opening part, 23 ... Light-shielding sensor, 23R ... Light beam projector 23D ... Light beam detector, 24 ... Light beam, 25 ... Pusher, 30 ... Vacuum side sample transfer chamber, 31 ... Vacuum side sample transfer robot, 311 ... Vacuum robot hand, 312 ... Protrusion, 313 ... Sample mounting surface, DESCRIPTION OF SYMBOLS 40 ... Vacuum processing chamber, 41 ... Vacuum processing chamber processing stand, 50 ... Control apparatus, 60 ... Sample, 70 ... Sample storage cassette

Claims (6)

A processing chamber in which the sample is processed in a vacuum state, a first sample transfer chamber in which the inside of the sample is transferred to the processing chamber in a vacuum state, and a sample transfer robot are stored in a sample storage cassette. A sample is transferred into and out of the boundary between each of the second sample transfer chamber, which is set to atmospheric pressure inside the sample transfer chamber, and between the first sample transfer chamber and the second sample transfer chamber. A sample processing apparatus having a gate that is large enough to open, a valve that opens and closes the gate, a lock chamber that closes the valve to bring the inside into an atmospheric pressure state or a vacuum state, and a control device. ,
A sample processing apparatus comprising a pair of light-shielding sensors at a position where a sample crosses on a transport path for transporting a sample from a second sample transport chamber to a sample stage provided in a lock chamber. A processing chamber in which the sample is processed in a vacuum state, a first sample transfer chamber in which the inside of the sample is transferred to the processing chamber in a vacuum state, and a sample transfer robot are stored in a sample storage cassette. A sample is transferred into and out of the boundary between each of the second sample transfer chamber, which is set to atmospheric pressure inside the sample transfer chamber, and between the first sample transfer chamber and the second sample transfer chamber. A sample processing apparatus having a gate that is large enough to open, a valve that opens and closes the gate, a lock chamber that closes the valve to bring the inside into an atmospheric pressure state or a vacuum state, and a control device. ,
A pair of light-shielding sensors are provided in the vicinity of the second sample transfer chamber side gate of the lock chamber and at a position where the sample crosses on the transfer path for transferring the sample from the second sample transfer chamber to the sample stage in the lock chamber. A sample processing apparatus.   3. The sample processing apparatus according to claim 1, wherein the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to transmit the light beam. A sample processing apparatus that measures the time or time of light shielding by a sample and calculates the position of the sample relative to the position where the light shielding sensor is attached.   3. The sample processing apparatus according to claim 1, wherein the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to transmit the light beam. The time or time when light is shielded by the sample is measured to calculate the position of the sample relative to the position where the light-shielding sensor is attached, and the position of the light-shielding sensor relative to the sample stage that is the sample transport destination is clarified. A sample processing apparatus, wherein a control device calculates a positional relationship between a sample being transported and a sample stage by using the output of a light shielding sensor by transporting the sample at a predetermined constant transport speed.   3. The sample processing apparatus according to claim 1, wherein the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to transmit the light beam. The position or position of the sample with respect to the position where the light shielding sensor is mounted is calculated by detecting the time or time when the light is shielded by the sample, and the position of the light shielding sensor with respect to the sample stage as the sample transport destination is clarified. A sample processing apparatus characterized by calculating a transport speed of a sample using an output of a sensor and calculating a positional relationship between a position of a sample being transported and a sample stage.   3. The sample processing apparatus according to claim 1, wherein the light shielding sensor includes a light beam emitting unit and a light beam detecting unit, and the control device uses the output of the light shielding sensor to transmit the light beam. Measures the time or time of light shielding by the sample and calculates the position of the sample relative to the position where the light shielding sensor is attached. Using the output of the light shielding sensor, the sample transport speed and the position of the sample being transported and the sample stage A sample processing apparatus that calculates a positional relationship, calculates a distance and direction between a sample being transferred and a sample stage based on the result, and controls the operation of the sample transfer robot based on the calculation result .

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