CN220290764U - Transmission and position calibration system for process ring and process tray - Google Patents
Transmission and position calibration system for process ring and process tray Download PDFInfo
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- CN220290764U CN220290764U CN202321779239.4U CN202321779239U CN220290764U CN 220290764 U CN220290764 U CN 220290764U CN 202321779239 U CN202321779239 U CN 202321779239U CN 220290764 U CN220290764 U CN 220290764U
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Abstract
The utility model provides a transmission and position calibration system for a process ring and a process tray, which comprises a mechanical arm and at least two laser displacement sensors; the mechanical arm is positioned below the process tray, lifts the process ring and the process tray which are stacked up and down, and drives the process ring and the process tray to move; during the transfer process, the laser displacement sensor is used to detect the edges of the process ring and the process tray, respectively. According to the utility model, whether the process ring and the process tray are deviated or not can be determined according to the edge data measured by the laser displacement sensor, and the mechanical arm performs position compensation correction, so that the accuracy of placing the process ring and the process tray is improved.
Description
Technical Field
The utility model relates to the field of semiconductor manufacturing, in particular to a transmission and position calibration system for a process ring and a process tray.
Background
In order to improve the accuracy of wafer picking and placing and avoid the problems of wafer deviation or breakage, a semiconductor vacuum transmission and position calibration system generally adopts AWC (Active Wafer Centering) function for detection and correction. As shown in fig. 1, two AWC sensors 10 are mounted on the transport path of the wafer 20, and arrow B schematically indicates the direction of wafer movement. When the wafer 20 passes through the AWC sensor 10, the edge position of the wafer 20 can be calculated through the change of the sensor state, and the actual circle center data of the wafer 20 can be calculated by further combining the movement state of the wafer 20; when the wafer 20 is placed, the position of the wafer 20 can be compensated according to the obtained actual circle center data.
In a reaction chamber for performing a semiconductor manufacturing process, a process kit ring is provided around the periphery of the wafer and/or the top of a susceptor carrying the wafer (e.g., an electrostatic chuck) to protect components shielded by the process ring from process gases or plasma in the reaction chamber or to assist in adjusting the processing effect of the edge region of the wafer. The process ring is worn out gradually over time during the machining process and needs to be replaced periodically.
In the replacement process, the process ring is stacked on the top surface of a process tray (Carrier), and a mechanical arm lifts an assembly of the process ring and the process tray and drives the assembly to move to a specified position. For example, the assembly is transferred by a robot arm into a storage facility where the process rings and/or process trays may be stored, the assembly being supported by a rack therein; if the process ring is in an incorrect position or the process tray is in an incorrect direction, a tail window of the storage facility needs to be opened, and the adjustment is performed through manual operation, so that time and labor are wasted, and pollution to the process ring is also possible.
At present, in the process of replacing a process ring, transmitting the process ring and a process tray, an effective technical means for detecting and positioning the positions of the process ring and the process tray is lacking, and an automatic means for adjusting the positions of the process ring and the process tray is also lacking. The AWC technique for detecting and correcting wafers cannot be directly applied to the above-mentioned process of replacing and transferring the process ring, because the conventional AWC sensor uses a correlation sensor, one side is a transmitting end of the light beam and the other side is a receiving end of the light beam; when the stacked process rings and process trays pass through the correlation sensor, the two can simultaneously block the emitted light beams, so that the sensor cannot effectively distinguish boundary conditions of the process rings and the process trays.
Disclosure of Invention
The utility model provides a transmission and position calibration system for a process ring and a process tray, which can improve the accuracy of placing the process ring and the process tray.
In order to achieve the above object, the present utility model provides a system for transporting and calibrating a process ring and a process tray, comprising:
the manipulator is used for conveying the process ring and the process tray; the process tray is positioned below the process ring, the manipulator is positioned below the process tray, and the stacked process ring and process tray are lifted and driven to move;
at least two laser displacement sensors; and in the process of conveying the process ring and the process tray by the manipulator, the laser displacement sensor is used for detecting the edges of the process ring and the process tray respectively.
Optionally, the laser displacement sensor measures by coaxially emitting a laser beam and receiving reflected light; the laser displacement sensor is positioned below the process ring, the process tray and the manipulator, and has an upwardly illuminated detection optical axis.
Optionally, the thickness of the process tray matches the resolution of the laser displacement sensor and is within a detectable distance of the laser displacement sensor.
Optionally, the thickness of the process tray is 2-3 mm.
Optionally, the process ring has a circular ring-shaped structure; the process tray is a disc;
the diameter of the process tray is smaller than the outer diameter of the process ring and larger than the inner diameter of the process ring.
Optionally, two laser displacement sensors are provided, which are distributed on both sides of the process ring and the transport path of the process tray.
Optionally, the transmission and position calibration system further comprises a processor in signal connection with the laser displacement sensor for receiving the following data measured by the laser displacement sensor:
when the outer edge of the first side of the process ring shields the detection optical axis of the laser displacement sensor, a first group of data corresponding to the outer edge of the first side of the process ring, which is detected by the laser displacement sensor;
when the outer edge of the first side of the process tray shields the detection optical axis of the laser displacement sensor, the laser displacement sensor detects a second group of data corresponding to the outer edge of the first side of the process tray;
when the outer edge of the second side of the process tray shields the detection optical axis of the laser displacement sensor, a third group of data corresponding to the outer edge of the second side of the process tray, which is detected by the laser displacement sensor;
when the outer edge of the second side of the process ring shields the detection optical axis of the laser displacement sensor, a fourth group of data corresponding to the outer edge of the second side of the process ring, which is measured by the laser displacement sensor;
the outer edges of the first sides of the process ring and the process tray are the sides close to the laser displacement sensor before the process ring and the process tray are transmitted above the laser displacement sensor; the second side outer edges of the process ring and the process tray are opposite to the first side outer edge and are the sides far away from the laser displacement sensor before the process ring and the process tray are transmitted above the laser displacement sensor;
the processor is used for calculating actual circle center data of the process ring and the process tray according to the received first group of data to the fourth group of data, judging whether the process ring and/or the process tray is deviated or not, and outputting a corresponding first instruction to the manipulator when the deviation is judged; the first instructions are for actuating the robot to adjust a position when the process ring and/or the process tray are placed.
Optionally, the manipulator is further configured to transmit the process ring separately and send the measured following data to the processor: when the outer edge of the first side of the process ring shields the detection optical axis of the laser displacement sensor, a fifth group of data corresponding to the outer edge of the first side of the process ring, which is measured by the laser displacement sensor; and a sixth set of data corresponding to the second side outer edge of the process ring, as measured by the laser displacement sensor, when the second side outer edge of the process ring obstructs the detection optical axis of the laser displacement sensor;
the processor is further configured to calculate actual circle center data of the process ring according to the received fifth set of data and the sixth set of data, determine whether the process ring is deviated, and output a corresponding second instruction to the manipulator when the deviation is determined, where the second instruction is used to drive the manipulator to adjust a position when the process ring is placed.
Optionally, the robot is further configured to transfer the process tray separately and send the measured following data to the processor: when the outer edge of the first side of the process tray shields the detection optical axis of the laser displacement sensor, a seventh group of data corresponding to the outer edge of the first side of the process tray, which is detected by the laser displacement sensor; and when the second side outer edge of the process tray shields the detection optical axis of the laser displacement sensor, an eighth set of data corresponding to the second side outer edge of the process tray, which is detected by the laser displacement sensor;
the processor is further configured to calculate actual circle center data of the process tray according to the received seventh set of data and the received eighth set of data, determine whether the process tray is deviated, and output a corresponding third instruction to the manipulator when the deviation is determined, where the third instruction is used to drive the manipulator to adjust a position when the process tray is placed.
Optionally, the robot is an atmospheric robot for transferring the process ring and process tray between the transport pod and the transition chamber; the transport box and the transition chamber are respectively connected to two sides of the factory interface section, and the atmospheric manipulator is positioned in the factory interface section;
the laser displacement sensor is used for detecting in a first transmission process that the atmospheric manipulator drives the process ring and/or the process tray to be transmitted into the transition chamber from the transport box;
and/or the laser displacement sensor is used for detecting in a second transmission process that the atmospheric manipulator drives the process ring and/or the process tray to be transmitted into the transport box from the transition chamber.
Optionally, the laser displacement sensor is located on a side of the factory interface section adjacent to the transition chamber.
The transmission and position calibration system of the utility model has at least the following beneficial effects:
if the problems of incorrect position of the process ring or incorrect direction of the process tray occur, the window of the storage facility for placing the materials needs to be opened, the process ring and/or the process tray are manually adjusted, the operation is complicated, the efficiency is low, and the risk of polluting or damaging the process ring is also caused. According to the utility model, the edges of the process ring and the process tray are detected by using the sensor, the actual positions of the process ring and the process tray are determined, and if deviation occurs, the manipulator can be driven to compensate and correct when the process ring and the process tray are placed, so that the automation degree is high, and the effect of efficiently and accurately placing materials is realized.
Conventional AWC sensors are used to detect and calibrate wafers, and use correlation sensors that can only detect one material at a time in space, and cannot distinguish the boundary between stacked process rings and process trays. The utility model realizes the edge detection and distinction of the stacked objects in the process of transmitting the process ring and the process tray by applying the coaxial displacement sensor, thereby determining the respective center positions of the stacked objects. In addition, the utility model can also realize detection by using the existing AWC technology by aiming at the condition that the mechanical arm independently carries and transmits the process ring or the process tray, and drive the mechanical arm to carry out compensation correction of the placement position in the process of independently transmitting and placing the process ring or the process tray.
In an example of the utility model, position detection and correction of the atmospheric robot during transfer of the process ring and/or process pallet between the transport case and the transition chamber can be achieved, improving accuracy when placing the process ring and/or process pallet within the transport case or transition chamber.
Drawings
FIG. 1 is a schematic illustration of prior art detection and correction of wafer position by an AWC sensor;
FIG. 2 is a schematic diagram of a transmission and position calibration system according to the present utility model;
FIG. 3 is a top view of a sensor layout in the transmission and position calibration system of the present utility model;
FIG. 4 is a side view of the motion pattern of the process ring and process tray during inspection by the transfer and position calibration system of the present utility model;
FIG. 5 is a schematic view of a partial structure of the detection principle of the transmission and position calibration system of the present utility model;
fig. 6 is a schematic diagram of the overall structure of an exemplary transmission and position calibration system of the present utility model.
Detailed Description
As shown in fig. 2, the present utility model provides a transfer and position calibration system comprising a robot 4 that transfers a process ring 3 and a process tray 2, and at least two sensors 1 disposed on a transfer path for detecting edges of the process ring 3 and/or the process tray 2.
As shown in fig. 2 to 4, the process ring 3 has a circular ring structure, and is a consumable material in a semiconductor manufacturing process. The process tray 2 is a disc with a certain thickness a (see fig. 5) and is used during the process of replacing the process ring 3; the process ring 3 and the process tray 2 are stacked up and down and are concentrically arranged; the process pallet 2 is below the process ring 3 to lift the process ring 3. The manipulator 4 is located below the process tray 2, lifts the assembly formed by stacking the process ring 3 and the process tray 2, and can drive the assembly to move towards a required direction, so as to convey the assembly to a specified position. Arrows C in fig. 3 to 4 schematically represent the direction of movement of the process ring 3 and the process pallet 2.
The sensor 1 of the present utility model is a laser displacement sensor that performs measurement by coaxially emitting a laser beam and receiving reflected light. Two of the above-described sensors 1 are disposed on both sides of the transmission path. The positions of the two sensors 1 are lower than the mechanical arm 4, namely, the sensors 1 are below the process ring 3, the process tray 2 and the mechanical arm 4, and the detection optical axes 5 of the two sensors 1 are irradiated upwards in parallel; the process ring 3 and/or the process tray 2, which are/is moved horizontally towards the detection optical axis 5 by the robot 4, reflect the light beam when passing over the sensor 1 and are detected by the sensor 1. Illustratively, the connection of the two sensors 1 is perpendicular to the transmission path; the two sensors 1 are each at a different distance from the drop foot.
The laser displacement sensor can accurately detect the distance from an object in a fixed range to the end face of the sensor; for example, the sensor resolution of this example is 25um and the detection range is 20mm. The thickness a of the process tray 2 is matched to the resolution and detectable distance range of the sensor 1 such that the sensor 1 can effectively distinguish between the process ring 3 and the process tray 2 in terms of a height difference corresponding to the thickness a of the process tray 2, whereby the respective edges of the process ring 3 and the process tray 2 can be distinguished by a change in the height difference.
The exemplary process tray 2 is an aluminum alloy article having a thickness a of 2-3 mm, consistent with the resolution and detectable distance range of the sensor 1; meanwhile, the thickness A can also meet the limit requirement of the weight of the manipulator 4. If the weight of the process pallet 2 and the process ring 3 is too heavy (e.g. more than 1000 g), the robot 4 may sag significantly (e.g. 2-3 mm), which will affect the transfer. Therefore, the weight of the process tray 2 can be reduced by controlling the thickness a of the process tray 2 (e.g., setting the thickness a to 2 to 3 mm).
The diameter of the process tray 2 is smaller than the outer diameter of the process ring 3 and larger than the inner diameter of the process ring 3; the exemplary process tray 2 has a diameter 8-10 mm smaller than the outer diameter of the process ring 3. Because, when the process ring 3 is placed in a storage facility (such as the transport box 11 or the transition chamber 13 of fig. 6) where the process ring 3 and the process pallet 2 are stored, it is necessary to place the process ring 3 on the support frame and then place the process pallet 2; the allowance between the outer edge of the process tray 2 and the outer diameter of the process ring 3 is used for avoiding the interference between the process tray 2 and the transmission box in the process of placing the process ring 3.
The process tray 2 of the embodiment is solid, so that interference of the hollowed-out part on the sensor 1 can be avoided. In addition, after the process tray 2 is made into a disc, the direction is not changed, and the reverse direction of the tray 2 is not required to be corrected. When the sensor 1 and the manipulator 4 are arranged, the detection optical axis 5 of the sensor 1 needs to be kept away from the manipulator 4. For example, when setting the distance between the two sensors 1 or selecting the shape or size of the manipulator 4, it is necessary to avoid the detection optical axis 5 from the edge of the manipulator 4; in this way, the robot 4 itself is not detected by the sensor 1 when the process ring 3 and/or the process tray 2 are transported in the set direction.
As shown in fig. 5, when the stacked process ring 3 and process tray 2 are moved towards the sensor 1 under the drive of the manipulator 4, the outer diameter of the process ring 3 is larger, so that the detection optical axis 5 of the sensor 1 is firstly blocked, and at the moment, a first set of data corresponding to the first side outer edge 6 of the process ring 3 is recorded; the process tray 2 then also obscures the detection optical axis 5, at which time a second set of data corresponding to the first lateral outer edge 7 of the process tray 2 is recorded. Similarly, after the process ring 3 and the process tray 2 continue to move, the process tray 2 cannot cover the detection optical axis 5, and at this time, a third set of data corresponding to the second side outer edge of the process tray 2 is recorded; when the movement to the process ring 3 is continued and the detection optical axis 5 is no longer blocked, a fourth set of data corresponding to the outer edge of the second side of the process ring 3 is recorded. Wherein the first side outer edges 6 and 7 of the process ring 3 and the process tray 2 are the sides that are close to the sensor 1 when the transfer is initiated, not yet transferred over the sensor 1; while the second side outer edge is opposite to the first side outer edge, i.e. the second side outer edge is the side remote from the sensor 1 compared to the first side outer edge when the transfer is initiated and has not yet been transferred over the sensor 1.
Since the thickness a of the process tray 2 is matched with the resolution of the sensor 1 and is within a detectable distance range (the thickness a of the tray 2 in this example is 3mm, and the resolution of the sensor 1 is 0.25 um), when the first side outer edge of the process tray 2 is blocked to the detection optical axis 5, and when the second side outer edge of the process tray 2 is not blocked to the detection optical axis 5, the measured values of the sensor 1 are respectively changed by a distance corresponding to the thickness a (about 3 mm) of the tray 2, thereby distinguishing the outer edges of the process tray 2.
The four groups of data corresponding to the two side edges of the process ring 3 and the process tray 2 are sent to a processor for calculation processing, and the actual circle center data of the process ring 3 and the process tray 2 are obtained according to a calculation mode applicable to the existing AWC technology, so that whether the positions of the process ring 3 and the process tray 2 deviate or not is judged; if the offset occurs, the manipulator 4 can be driven to compensate the center positions of the process ring 3 and the process tray 2 respectively when the process ring 3 and the process tray 2 are placed subsequently, so that the effect of accurate placement is achieved.
As shown in fig. 6, the robot of the present utility model may be an atmospheric robot 121 for transferring the assembly of process rings and process trays between the transport pod 11 and the transition chamber 13. In some cases, the atmospheric robot 121 may also be used to transfer process trays or process rings individually.
In one exemplary transport and position calibration system, one or more transport pods 11 may be attached to a load port on one side of the factory interface section 12 or may be detached from the factory interface section 12; one or more transition chambers 13 connected to the other side of the factory interface section 12 by respective first vacuum ports; a robot provided with an atmospheric robot 121 is located within the factory interface section 12. One or more transition chambers 13 are connected to the transfer chamber 14 through respective second vacuum ports, the transfer chamber 14 is connected to one or more reaction chambers 15 performing semiconductor manufacturing processes, and a robot provided with a vacuum robot 141 is disposed in the transfer chamber 14. The transport case 11 and the factory interface section 12 are in the atmospheric environment; the transfer chamber 14 and the reaction chamber 15 are under vacuum; when the first vacuum port and the second vacuum port are closed, respectively, the transition chamber 13 can be switched between a vacuum environment and an atmospheric environment.
New process rings can be stored in the transport case 11; a first assembly of new process rings stacked with process trays may be removed from the transport box 11 by the atmospheric robot 121, transferred to the transition chamber 13, and placed on a rack within the transition chamber 13; during the first transfer of the first component from the transport box 11 to the transition chamber 13, the sensor 1 can perform a detection of the respective edges of the process ring and the process tray. The sensor 1 can be located anywhere along the transport box 11 to transition chamber 13 transport path; for example, two sensors 1 may be arranged in the factory interface section 12 at a position near the side of the transition chamber 13. The vacuum robot 141 may further transfer the new process ring or the first component thereof within the transition chamber 13 to the reaction chamber 15 where the new process ring is needed and place the new process ring at the susceptor around the periphery of the wafer and/or susceptor (in various examples, the new process ring is separated from the process tray within the transition chamber 13 or within the reaction chamber 15).
The old process ring (or its second assembly stacked with the process tray) that was replaced has previously been moved out of the reaction chamber 15 under the drive of the vacuum robot 141 and placed on the support of the transition chamber 13 (in a different example, the old process ring forms the assembly with the process tray within the reaction chamber 15 or within the transition chamber 13). The atmospheric robot 121 may remove the old process ring and second assembly of process trays from the transition chamber 13, transfer to the transport box 11, and place onto the rack within the transport box 11; the sensor 1 can then perform a detection of the respective edges of the process ring and the process tray during the second transfer of the second component from the transition chamber 13 to the transport box 11. Furthermore, the sensor 1 for detection in the first transmission process can be used for detection in the second transmission process without adding other additional sensors 1. Of course, the utility model is not limited to detecting only during the first transmission process or only during the second transmission process in some examples.
In some cases, new or old process rings, empty process trays, etc., may be placed on the carrier 11 or the rack of the transition chamber 13 alone; the process ring or process tray may be transported individually between the transport pod 11 and the transition chamber 13 by the atmospheric robot 121. Then, according to the use mode of the existing AWC sensor, the laser displacement sensor is utilized to measure the fifth group of data and the sixth group of data which respectively correspond to the outer edges of the first side and the second side of the process ring in the process of independently transmitting the process ring; similarly, a seventh set of data and an eighth set of data corresponding to the outer edges of the first side and the second side of the process tray, respectively, are measured during the separate transfer of the process tray using the laser displacement sensor. Receiving, by the processor, a fifth set of data and a sixth set of data (or receiving a seventh set of data and an eighth set of data), and obtaining actual circle center data of the currently separately transmitted process ring (or process tray) according to a calculation mode applicable in the existing AWC technology; if the actual center data indicates an offset, the atmospheric robot 121 is driven to correct the process ring (or process tray) when it is placed.
In summary, in the transmission and position calibration system of the present utility model, in the process of transporting single-layer materials or transporting stacked multi-layer materials (such as process rings, process trays, components of process rings and process trays) by using the manipulator, the laser displacement sensor detects the edge of each layer of materials to calculate the central data, and the manipulator automatically adjusts and corrects the position, so as to achieve the effect of accurately placing the materials.
While the present utility model has been described in detail through the foregoing description of the preferred embodiment, it should be understood that the foregoing description is not to be considered as limiting the utility model. Many modifications and substitutions of the present utility model will become apparent to those of ordinary skill in the art upon reading the foregoing. Accordingly, the scope of the utility model should be limited only by the attached claims.
Claims (10)
1. A transfer and position calibration system for a process ring and a process tray, comprising:
the manipulator is used for conveying the process ring and the process tray; the process tray is positioned below the process ring, the manipulator is positioned below the process tray, and the stacked process ring and process tray are lifted and driven to move;
at least two laser displacement sensors; and in the process of conveying the process ring and the process tray by the manipulator, the laser displacement sensor is used for detecting the edges of the process ring and the process tray respectively.
2. The transmission and position calibration system of claim 1,
the laser displacement sensor is used for measuring by coaxially emitting laser beams and receiving reflected light;
the laser displacement sensor is positioned below the process ring, the process tray and the manipulator, and has an upwardly illuminated detection optical axis.
3. The transmission and position calibration system of claim 1,
the thickness of the process tray is matched with the resolution of the laser displacement sensor and is within the detectable distance range of the laser displacement sensor.
4. The transmission and position calibration system of claim 1,
the process ring is of an annular structure; the process tray is a disc;
the diameter of the process tray is smaller than the outer diameter of the process ring and larger than the inner diameter of the process ring.
5. The transmission and position calibration system of claim 1,
two laser displacement sensors are distributed on both sides of the transmission path of the process ring and the process tray.
6. The transmission and position calibration system of claim 1,
the transmission and position calibration system further comprises a processor in signal connection with the laser displacement sensor for receiving the following data measured by the laser displacement sensor:
when the outer edge of the first side of the process ring shields the detection optical axis of the laser displacement sensor, a first group of data corresponding to the outer edge of the first side of the process ring, which is detected by the laser displacement sensor;
when the outer edge of the first side of the process tray shields the detection optical axis of the laser displacement sensor, the laser displacement sensor detects a second group of data corresponding to the outer edge of the first side of the process tray;
when the outer edge of the second side of the process tray shields the detection optical axis of the laser displacement sensor, a third group of data corresponding to the outer edge of the second side of the process tray, which is detected by the laser displacement sensor;
when the outer edge of the second side of the process ring shields the detection optical axis of the laser displacement sensor, a fourth group of data corresponding to the outer edge of the second side of the process ring, which is measured by the laser displacement sensor;
the outer edges of the first sides of the process ring and the process tray are the sides close to the laser displacement sensor before the process ring and the process tray are transmitted above the laser displacement sensor; the second side outer edges of the process ring and the process tray are opposite to the first side outer edge and are the sides far away from the laser displacement sensor before the process ring and the process tray are transmitted above the laser displacement sensor;
the processor is used for calculating actual circle center data of the process ring and the process tray according to the received first group of data to the fourth group of data, judging whether the process ring and/or the process tray is deviated or not, and outputting a corresponding first instruction to the manipulator when the deviation is judged; the first instructions are for actuating the robot to adjust a position when the process ring and/or the process tray are placed.
7. The transmission and position calibration system of claim 6, wherein,
the manipulator is also used for independently transmitting the process ring and sending the measured following data to the processor: when the outer edge of the first side of the process ring shields the detection optical axis of the laser displacement sensor, a fifth group of data corresponding to the outer edge of the first side of the process ring, which is measured by the laser displacement sensor; and a sixth set of data corresponding to the second side outer edge of the process ring, as measured by the laser displacement sensor, when the second side outer edge of the process ring obstructs the detection optical axis of the laser displacement sensor;
the processor is further used for calculating actual circle center data of the process ring according to the received fifth group of data and the sixth group of data, judging whether the process ring is deviated or not, and outputting a corresponding second instruction to the manipulator when the deviation is judged to occur, wherein the second instruction is used for driving the manipulator to adjust the position when the process ring is placed;
or, the manipulator is further used for independently transmitting the process tray, and sending the measured following data to the processor: when the outer edge of the first side of the process tray shields the detection optical axis of the laser displacement sensor, a seventh group of data corresponding to the outer edge of the first side of the process tray, which is detected by the laser displacement sensor; and when the second side outer edge of the process tray shields the detection optical axis of the laser displacement sensor, an eighth set of data corresponding to the second side outer edge of the process tray, which is detected by the laser displacement sensor; the processor is further configured to calculate actual circle center data of the process tray according to the received seventh set of data and the received eighth set of data, determine whether the process tray is deviated, and output a corresponding third instruction to the manipulator when the deviation is determined, where the third instruction is used to drive the manipulator to adjust a position when the process tray is placed.
8. The transmission and position calibration system of claim 1,
the robot is an atmospheric robot for transferring the process ring and process tray between the transport case and the transition chamber; the transport box and the transition chamber are respectively connected to two sides of the factory interface section, and the atmospheric manipulator is positioned in the factory interface section;
the laser displacement sensor is used for detecting in a first transmission process that the atmospheric manipulator drives the process ring and/or the process tray to be transmitted into the transition chamber from the transport box;
and/or the laser displacement sensor is used for detecting in a second transmission process that the atmospheric manipulator drives the process ring and/or the process tray to be transmitted into the transport box from the transition chamber.
9. The transmission and position calibration system of claim 7,
the laser displacement sensor is located on a side of the factory interface section adjacent to the transition chamber.
10. The transmission and position calibration system of claim 3,
the thickness of the process tray is 2-3 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321779239.4U CN220290764U (en) | 2023-07-07 | 2023-07-07 | Transmission and position calibration system for process ring and process tray |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321779239.4U CN220290764U (en) | 2023-07-07 | 2023-07-07 | Transmission and position calibration system for process ring and process tray |
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| CN220290764U true CN220290764U (en) | 2024-01-02 |
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| CN202321779239.4U Active CN220290764U (en) | 2023-07-07 | 2023-07-07 | Transmission and position calibration system for process ring and process tray |
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