JP2006292873A - Script generation system and script generation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a script generation system and scrip generation method generating the script for a photomask dimensional inspection machine capable of implementing dimensional inspection of a photomask to make measurement efficient in spite of scaling down of graphics and increasing of measurement points, and further, capable of exactly specifying dimension measurement points. <P>SOLUTION: The script is used for making a photomask dimensional inspection machine perform dimensional inspection by assigning dimension measurement points and is used for performing the dimension measurement of the graphics by making the BOX indicating the dimension measurement region as the region thereof within the BOX correspondent to each of the respective measurement positions of the photomask which is the target for the dimension measurement and by recognizing the edge position of the intended dimension measurement graphics. The script generation system generates the above script by using the drawing graphic data for photomask production. The script generation system generates the script from the measurement point list and the image data for pattern matching for exact measurement of each measurement point. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a script generation apparatus and a script generation method for generating a script for specifying a dimension measurement location in photomask dimension inspection using drawing graphic data for manufacturing a photomask.

In recent years, due to the miniaturization of semiconductor processes and the increase in circuit scale due to system-on-chip, the photomask data in photomask manufacturing is also becoming larger, and several gigabytes to hundreds of gigabytes are used for manufacturing one photomask. Order data is used.
The increase in the amount of photomask data increases year by year, and the number of figures accommodated in the data also increases.
In addition, the number of dimension measurement points is increasing due to the demand for high precision of the figure dimensions when the figure is miniaturized and the mask is completed.
In general, a photomask is produced by drawing data using an exposure drawing apparatus such as an electron beam drawing apparatus using drawing data, and undergoing process processing such as development and etching.
Then, the pattern of the photomask is reduced and projected on the wafer to manufacture a semiconductor.

Under such circumstances, in the photomask manufacturing, after the mask manufacturing, the dimensional inspection is carried out by searching for the measurement location (hereinafter also referred to as measurement figure) by the operator manually on the dimensional inspection machine. A BOX representing the measurement area was set up and length measurement was performed in the BOX.
Therefore, due to the recent miniaturization of figures in photomasks, the increase in the number of figures, and the increase in the number of measurement points as described above, the time required for dimensional inspection has been increasing. It is increasing.

As described above, conventionally, when dimensional inspection of a photomask is performed, a measurement BOX is manually set on a figure to be measured on an inspection machine.
However, in recent years, due to the refinement of the figures in the photomask and the increase in the density of the figures, it has become impossible to ignore the effect of the optical proximity effect when the photomask pattern is reduced and projected onto the wafer. As described in Japanese Patent Application Laid-Open No. 2000-310851 (Patent Document 1), in consideration of the effect of the optical proximity effect, the design figure is corrected when the photomask is manufactured. OPC (Optical Proximity Correct, also referred to as optical proximity correction, OPC correction) is added, and the time for dimensional inspection is increasing.
JP, 2000-310851, A OPC mask is called an OPC mask. However, in the case of measuring the dimensions of an OPC mask, there is a problem that the pass / fail judgment changes due to a slight deviation of the position when the BOX is set up on the finished mask. Out. The correction graphic is also referred to as an OPC graphic. The OPC figure has a small unevenness particularly at the corners of the design figure in consideration of the reduced projection onto the wafer. For this reason, the OPC figure is different from the design figure on the figure, and the JOG figure is accompanied with the main figure, and a gentle step is generated in the corresponding figure on the completed mask. However, this level difference is often at a level that cannot be visually determined. As a result, in the dimension inspection by the dimension inspection machine, a slight deviation may occur in the dimension measurement position and the position where the BOX representing the region is raised, and this deviation often has an adverse effect on the measurement result. For example, when OPC correction is performed, the design 10 shown in FIG. 7 (a) is represented by the graphics 1 to 10 on the drawing data as shown in FIG. 7 (b). It is assumed that the pattern 10A becomes a pattern 10B on the corresponding photomask. In this case, the dimension measurement positions P1 and P2 for measuring the width of the graphic 1 are designated on the design data, but in addition to the main graphic 1, this is in the area of the BOX 15 on the corresponding drawing graphic data. As a result, due to the influence of the figure 9 on the drawing figure data, the dimension measurement with the BOX 15a on the corresponding photomask measures the part including a gentle step. Therefore, accurate measurement is not possible. In addition, when a plurality of graphics are adjacent to the photomask, when the BOX interferes with a graphic that is not a measurement target, the dimensional measurement result may be different from the expected result or may not be measured. For example, as shown in FIG. 8A, when dimension measurement positions P1 and P2 (same positions on the design data) for measuring the width of the figure 20A are determined on the drawn figure data, this is handled. As shown in FIG. 8B, the BOX 25a on the photomask overlaps with the graphics 22a and 23a on the photomask adjacent to the graphics 20B on the photomask corresponding to the graphics 20A, that is, the BOX 25a Interfering with a figure other than the figure to be measured on the photomask, and when performing dimension measurement based on the edge of the figure, accurate dimension measurement cannot be performed. Although the target is not a photomask, Japanese Patent Laid-Open No. 5-282388 (Patent Document 2) describes a dimension inspection apparatus. JP-A-5-282388

As described above, in recent years, the miniaturization and high density of figures in photomasks are intense, and OPC masks to which OPC has been applied have been produced. Increasing the number and generation of inaccurate dimension measurement are becoming problems.
The present invention corresponds to this, and even if the figure is miniaturized and the number of measurement points is increased, the photomask dimension inspection can be performed efficiently, and the dimension measurement point can be specified accurately. An object of the present invention is to provide a script generation device and a script generation method for generating a script for a mask dimension inspection machine.

The script generation apparatus of the present invention is a script for causing a photomask dimension inspection machine to specify a dimension measurement location and perform dimension inspection, and to provide a dimension measurement region for each measurement position of a photomask to be dimensionally measured. A BOX that represents a region to be specified is associated, and the edge position of the target dimension measurement figure is grasped in the BOX, and a script for performing the dimension measurement of the figure is used for drawing for manufacturing a photomask. A script generation device that generates using graphic data, and is a measurement location that is a list including measurement location information for specifying the position and range of a BOX and information necessary for measurement such as measurement length This is generated from a list and image data for pattern matching for accurately specifying each measurement location of the measurement location information. Drawing data corresponding to the drawing, a script generated corresponding to the drawing graphic data, a dimension measurement location list for forming the script, and image data for pattern matching corresponding to each dimension measurement location of the list, etc. Are stored as data, input means for inputting the file name of the drawing graphic data to be processed, the position on the drawing graphic data corresponding to the dimension measurement location, and the first The graphic data within a predetermined range corresponding to the position on the specified data of the drawing graphic data to be processed with the file name input by the input means is fetched from the storage means as the processing target partial graphic data. A drawing graphic data acquisition means and a display means for displaying at least the processing target partial graphic data obtained by the drawing graphic data acquisition means as a graphic. Corresponding to the dimension measurement position input from the input means, or on the processing target partial data obtained by designating the dimension measurement position on the graphic display of the processing target partial graphic data displayed on the display means. BOX generating means for generating BOX data, which is information about the BOX including at least information on the position and area information of the BOX indicating the area for designating the dimension measurement area and information on the measurement width, corresponding to the position of Corresponding to each BOX data generated by the BOX generating means, graphic data in the vicinity of the BOX position is obtained from the processing target partial graphic data obtained by the drawing graphic data acquiring means, respectively, by the display means or other display. BOX corresponding to the predetermined plurality of display magnifications of the means, and is extracted as BOX neighborhood image data for each predetermined magnification. Approximate image data acquisition means, each BOX data, and a plurality of BOX vicinity image data corresponding to each BOX are stored in association with each other from the dimension measurement information storage means and the dimension measurement information storage means, Each BOX data and a plurality of BOX neighborhood image data corresponding to each BOX are extracted, and from these, a measurement location list in which comments relating to the contents of the BOX data are listed for each BOX, and the list In association with each BOX, for each BOX, pattern matching image data in which BOX neighborhood image data corresponding to the plurality of display magnifications are listed is stored in the first storage means. Controlling display on the display means of the means, the BOX data, the BOX neighborhood image data, and the processing target partial graphic data Under the instruction from the display control means and the input means, a set of a measurement location list and pattern matching image data corresponding to predetermined drawing graphic data is extracted from the first storage means, and a measurement position range is obtained. Including a measurement location information for designating a pattern and image data information for pattern matching for accurately specifying each measurement location, and converting the format into a structure corresponding to a device for measuring dimensions, A control for generating a script for specifying a measurement location, and further storing the generated script in the first storage unit and controlling the units in association with each other based on an instruction from the format conversion unit and the input unit Means.
In the script generation apparatus, the BOX generation unit uses the processing target partial graphic data obtained from the drawing graphic data acquisition unit to convert the measurement BOX into a graphic adjacent to the dimension measurement target graphic. A first BOX adjusting unit is provided for adjusting the width, height, or the width, height, and position so as not to interfere with each other.
Further, in any one of the above script generation apparatuses, the BOX generation unit uses a processing target partial graphic data obtained from the drawing graphic data acquisition unit, and there is a JOG graphic of a dimension measurement target graphic. In the case of performing, the second BOX adjusting means for adjusting the width, height, or the width, height, and position of the measurement BOX so that the measurement BOX fits in the area where the JOG figure does not exist is provided. It is a feature.
Further, in any one of the script generation devices described above, the drawing graphic data is obtained by performing OPC (Optical Proximity Correct, also referred to as optical proximity correction). The correction graphic is added as a JOG graphic of the graphic.
The script here means a procedure of dimension inspection processing in which a photomask dimension inspection machine designates a dimension measurement location and performs dimension inspection, and a script language that describes the procedure to be processed by a computer using text, It is a procedure described by either binary data that is readable by a computer.
In addition, the drawing graphic data is drawing graphic data used in a drawing apparatus, for example, drawing graphic data used in an electron beam drawing apparatus using an electron beam, a photo drawing apparatus using a laser beam, or the like. These are not limited.

The script generation method according to the present invention is a script for causing a photomask dimension inspection machine to specify a dimension measurement location and perform dimension inspection, and to provide a dimension measurement region for each measurement position of a photomask to be dimensionally measured. A BOX that represents a region to be specified is associated, and the edge position of the target dimension measurement figure is grasped in the BOX, and a script for performing the dimension measurement of the figure is used for drawing for manufacturing a photomask. A script generation method for generating using graphic data, a measurement location list which is a list including measurement location information for specifying the position and range of a BOX and information necessary for measurement such as measurement length, The pattern is generated from image data for pattern matching for accurately specifying each measurement location of the measurement location information. As the image data for image processing, graphic data in the vicinity of the BOX position is drawn for each BOX from the drawing graphic data to be processed at predetermined predetermined magnifications corresponding to a plurality of predetermined display magnifications of the display means. In addition, a group of extracted BOX neighborhood image data is used, respectively.
In the script generation method described above, for each BOX, the graphic data in the vicinity of the BOX position obtained from the drawing graphic data to be processed is used so as not to interfere with the adjacent graphic of the dimension measurement target graphic. Further, the width, height, or the width, height, and position are adjusted.
Further, in any one of the script generation methods described above, when there is a JOG figure as a dimension measurement target figure, each BOX has a location near the BOX position obtained from the drawing figure data to be processed. Using the graphic data, the width, the height, or the width, the height, and the position are adjusted so that the measurement BOX fits in the area where the JOG graphic does not exist.

(Function)
The script generation apparatus of the present invention is configured for such a photomask dimension inspection machine that can efficiently perform a photomask dimension inspection even if the figure is miniaturized and the number of measurement points increases. It is possible to provide a script generation device that generates a script.
A script (including image data) for performing dimension inspection machine control using drawing data outside the dimension inspection machine can be created in advance.
Specifically, first storage means, input means, drawing graphic data acquisition means, display means, BOX generation means, BOX neighborhood image data acquisition means, dimension measurement information storage means, and dimension measurement This is achieved by including information storage means, display control means, format conversion means, and control means.
Specifically, by providing the drawing graphic data acquisition means, the file name input by the input means from the first storage means at the position on the designated data of the drawing graphic data to be processed. Corresponding graphic data within a predetermined range can be captured as processing target partial data.
Then, a display means is provided, and the drawing data to be drawn is used, the partial data is displayed, and the dimension measurement location can be specified.
As a result, it is possible to accurately specify the dimension measurement location before carrying out the dimension inspection of the photomask.
Further, by providing the BOX vicinity image acquiring means, the graphic data in the vicinity of the BOX position is converted from the graphic data obtained by the drawing graphic data acquiring means to a predetermined plurality of predetermined display means or other display means. Corresponding to the display magnification, it is possible to obtain BOX vicinity image data for each predetermined predetermined magnification.
Further, by providing the dimension measurement information storage means, each BOX and a plurality of BOX neighborhood image data corresponding to each BOX can be stored in association with each other.
Further, by providing the dimension measurement information storage means, each BOX and a plurality of BOX neighborhood image data corresponding to each BOX are extracted from the dimension measurement information storage means, a measurement location list, and each measurement It is assumed that the pattern matching image data including a plurality of BOX neighborhood image data can be accumulated and stored in the first storage means for each measurement location in association with the location.
Further, by providing a format conversion means, a set of a measurement location list and pattern match image data corresponding to predetermined drawing graphic data is stored from the first storage means under the instruction from the input means. The format is converted into a structure that includes measurement location information for specifying the measurement position range and pattern match image data information for accurately specifying each measurement location, and that is compatible with the device that performs dimension measurement. Thus, it is possible to generate a script for specifying a dimension measurement location, and to save the generated script in the first storage means.
In particular, the script may differ depending on the dimension measuring / inspecting machine, but by providing the format conversion means, it is possible to cope with various dimension measuring / inspecting machines having different data structures and formats of the script.
That is, based on the measurement location list and pattern match image data, a script file in a readable format is output to various dimension measuring apparatuses and is read into various dimension inspection apparatuses, thereby performing dimension measurement in full auto or semi auto. Making it possible.
Further, by adopting the configuration of the invention of claim 2 and further by adopting the configuration of the invention of claim 3, even if the figure is miniaturized and the number of measurement points increases, the dimension measurement point can be specified accurately. It is possible to provide a script generation device that generates a script.
In particular, the drawing graphic data has been subjected to OPC (Optical Proximity Correct, also referred to as optical proximity correction), and the figure to which the correction data is applied as the JOG figure of the graphic is subjected to the OPC of the design data. In the case of the structure of Claim 4 added, it is effective.

  By adopting such a configuration, the script generation method of the present invention can efficiently carry out the dimensional inspection of the photomask even if the figure is miniaturized and the number of measurement points increases. It is possible to provide a script generation method for generating a script for a photomask dimension inspection machine that can specify a location.

As described above, the present invention is capable of carrying out dimensional inspection of a photomask efficiently even if the figure is miniaturized and the number of measurement points increases. It has become possible to provide a script generation device and a script generation method for generating a script for an inspection machine.
Specifically, the inspection efficiency is improved because the operation on the dimension inspection can be simplified by creating the inspection script outside the dimension inspection machine.
In addition, errors can be prevented from being mixed into the dimension measurement result due to JOG or the like.
As a result, the comparison with the required accuracy of the finished dimensions is performed correctly.
Further, the alignment of the measurement position can be automatically performed by matching the image on the dimension inspection machine with the script image.

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing a functional configuration and data flow of an example of an embodiment of the script generation device of the present invention, and FIG. 2 is a flow showing an example of the operation of the script generation device shown in FIG. 3 is a diagram showing a processing flow in the generation of BOX data, FIG. 4 is a diagram showing a processing flow in the generation of BOX data, and FIG. 5A is a diagram showing the format of the measurement location list. FIG. 5B is a diagram showing an example of the measurement location list, FIG. 6 is a diagram showing an example of the image match image data, and FIG. 7 shows a conventional case where OPC correction is performed. FIG. 8 is a schematic diagram for explaining the dimension measurement and the dimension measurement of the present invention. FIG. 8 shows a case in which a figure interference occurs in the conventional dimension measurement apparatus, and the figure interference does not occur when the apparatus of the present invention is used. It is the figure which showed that a dimension can be measured.
7A shows the design 10 on the design data, FIGS. 7B and 7D show the design 10A on the drawing data and the corresponding BOX, and FIG. 7C and FIG. 7 (e) shows the pattern 10B on the photomask and the corresponding BOX, FIG. 8 (a) shows the pattern on the drawing data, and FIG. 8 (b) shows the pattern on the photomask. FIG. 8C shows a picture on the drawing data and the corresponding BOX, and FIG. 8D shows a picture on the photomask and the corresponding BOX.
Further, S11 to S17 in FIG. 2, S21 to S27 in FIG. 3, and S31 to S36 in FIG. 4 represent processing steps, respectively.
1, 7, and 8, 110 is a first storage means (here, a magnetic disk), 111 is drawing graphic data, 115 is a measurement location list, 116 is pattern match image data, 117 is a script, 120 is Input means, 130 is a control unit, 140 is drawing graphic data acquisition means, 150 is a BOX neighborhood image acquisition means, 160 is display control means, 170 is display means, 190 is a dimension measurement information storage means (also called second storage means) 200) dimension measurement information storage means, 210 is format conversion means, 251 is display position data, 252 is partial graphic data to be processed, 253 is BOX neighborhood image data, 261 is BOX position data, 262 is BOX data, 10 Design data pattern, 10A is a pattern after OPC correction, 10B is a pattern on the mask, 1 to 9 are figures, 15, 15a, 6 and 16a are BOX, 20A is a figure to be measured (on the drawing graphic data), 20B is a figure to be measured (on the mask), 21 to 23 are figures (on the drawing graphic data), Reference numerals 21a to 23a are figures (on the mask), and reference numerals 25a, 26, and 26a are BOX.

First, an example of an embodiment of the script generation device of the present invention will be described with reference to FIG.
The script generation apparatus of this example is a script 117 for causing a photomask dimension inspection machine to specify a dimension measurement location and perform dimension inspection, and for each measurement position of a photomask to be dimensionally measured, a dimension measurement region. A script 117 for associating a BOX representing an area for designating a region, grasping an edge position of a target dimension measurement figure in the BOX, and measuring the dimension of the figure is provided for manufacturing a photomask. A measurement location list 115 which is a list including measurement location information for specifying the position and range of a BOX and information necessary for measurement such as measurement length in a script generation device that generates using the drawing graphic data 111; And image data 116 for pattern matching for accurately specifying each measurement location of the measurement location information, and further using these, photo data It was converted to a format in dimension measuring apparatus for inspecting the disk, and generates a script 117 for inspection.
Then, the drawing graphic data 111 corresponding to the photomask to be inspected, the script 117 generated corresponding to the drawing graphic data 111, the dimension measurement location list 115 for forming the script, and each dimension measurement of the list Pattern matching image data 116 for pattern matching corresponding to the location is stored as data, the first storage means 110, the file name of the drawing graphic data 111 to be processed, and the drawing corresponding to the dimension measurement location On the specified data of the drawing graphic data 111 to be processed of the file name input by the input means 120 from the input means 120 for inputting the position on the graphic data 111 and the first storage means 110 The drawing figure which takes in the graphic data in the predetermined range corresponding to the position of as the processing target partial graphic data 252 Corresponding to the dimension measurement position input from the data acquisition means 140, the display means 170 that displays at least the processing target partial graphic data 252 obtained by the drawing graphic data acquisition means as a graphic, and the input means 120, Alternatively, the BOX representing the dimension measurement region corresponding to the position on the processing target partial data 252 obtained by designating the dimension measuring position on the graphic display of the processing target partial graphic data displayed on the display unit 170. BOX generation means 180 that generates BOX data 262 that is information about the BOX including at least position and area information and information about the measurement width, and corresponding to each BOX data 262 generated by the BOX generation means 180, respectively. From the processing target partial graphic data 252 obtained by the drawing graphic data acquisition means 140, B BOX neighborhood image data acquisition means for extracting graphic data near the X position as BOX neighborhood image data 253 for each predetermined magnification corresponding to a plurality of predetermined display magnifications of the display means 170. 150, the dimension measurement information storage unit 190 and the dimension measurement information storage unit 190, which store the BOX data 262 and the plurality of BOX neighborhood image data 253 corresponding to the BOX in association with each other, respectively. Each BOX data 262 and a plurality of BOX neighborhood image data 253 corresponding to each BOX are taken out, and from these, a measurement location list 115 in which comments related to the contents of the BOX data 262 are listed for each BOX, and The BOX neighborhood corresponding to each of the plurality of display magnifications is associated with each BOX in the list. The pattern matching image data 116 listing the image data 253 is stored in the first storage unit 110. The dimension measurement information storage unit 200, the BOX data 262, the BOX neighborhood image data 253, and the processing target portion. Based on instructions from the display control means 160 and the input means 120 for controlling the display of the graphic data 252 on the display means 170, predetermined drawing graphic data 111 from the first storage means 110. Including a measurement location list 115 and a pattern match image data 116 corresponding to the measurement location information for specifying the measurement location range, and pattern match image data information for accurately specifying each measurement location, In addition, the format is converted into a structure corresponding to a device for measuring dimensions, and a script 11 for specifying the dimension measurement location is used. And a format conversion unit 210 that stores the generated script in the first storage unit 110, and a control unit 130 that associates and controls each unit based on an instruction from the input unit. Have.
In the dimension measuring and inspecting machine, the script 117 is used to associate a BOX representing the dimension measuring area as the area for each measurement position of the photomask to be dimension measured, and the target dimension measuring figure in the BOX. The edge position is grasped and the dimension of the figure is measured.

In the script generation apparatus of this example, the BOX generation unit 180 is not illustrated, but the measurement BOX is a dimension measurement target using the processing target partial graphic data 252 obtained from the drawing graphic data acquisition unit 140. Adjustment means (also referred to as first BOX adjustment means) is provided for adjusting the width, height, and position of the figure so as not to interfere with an adjacent figure.
Although not shown, the BOX generation unit 180 uses the processing target partial graphic data 252 obtained from the drawing graphic data acquisition unit 140 to display a dimensional measurement target graphic JOG graphic. Includes adjustment means (also referred to as second BOX adjustment means) for adjusting the width, height, and position of the measurement BOX so that the measurement BOX fits in an area where no JOG figure exists.

A processing flow of the graphic dimension measurement processing in the script generation apparatus of this example will be briefly described based on FIG. 2 with reference to FIG.
This replaces the description of the embodiment of the script generation method of the present invention.
First, the file name of the drawing graphic data 111 to be processed is designated from the input unit 120, and the display position is designated. (S11)
Next, the drawing graphic data acquisition unit 140 receives the display position data under the control of the control unit 130, and extracts the graphic data of the drawing graphic data 111 corresponding to the display position data from the first storage unit 110. (S12)
The extracted graphic data is the processing target partial graphic data 252.
Next, under the control of the display control means 160, the processing target partial graphic data 252 is displayed on the display means 170, and two positions (corresponding to P1 and P2 in FIGS. 7 and 8) of the dimension measurement locations are determined. (S13)
Thus, the position coordinates of the two position points P 1 and P 2 determined by the display unit 170 are the BOX position data 261.
Based on the file name on the first storage unit (magnetic disk) 110 obtained from the input unit 120, the control unit 130 displays on the display unit 170 the pattern on the drawing graphic data corresponding to the actually manufactured photomask. indicate.
When changing the display position of the data in the drawing graphic data acquisition means 140, the coordinate designation from the mouse or keyboard of the input means 120 is followed.
It is also possible to obtain a desired dimensional inspection location while enlarging or reducing it.

Next, a BOX representing a position area for dimension measurement is generated based on the BOX position data 261. At this time, the processing target partial graphic data 252 is used so that there is no interference with a graphic other than the graphic to be measured. Also, the size and position of the BOX are adjusted so that the accuracy of dimension measurement is not affected by the JOG figure. (S14)
This adjustment is performed by the first BOX adjusting means and the second BOX adjusting means described above.
An example of the processing of the first BOX adjusting unit will be briefly described with reference to FIG.
In this case, there is no JOG figure that touches the figure to be measured.
As described above, when the BOX position is determined (S21) and the BOX position data is given to the BOX generation means 180, the BOX generation means 180 corresponds to the coordinates of P1 and P2 as the position (here, the BOX). BOX center positions X1 and Y1), a rectangular region having a predetermined width W1 and height H1 is set as a temporary BOX (also referred to as a temporary BOX). (S22)
Next, it is checked whether or not the temporary BOX interferes with a graphic other than the graphic to be processed. If not, the temporary BOX is used as it is as a normal BOX, and the position of the normal BOX (X0 , Y0), width W0, and height H0 are stored as BOX data (S23, S25). If there is interference, the width and height of the temporary BOX are adjusted and the position is shifted to cause interference. Adjust until there is no more. (S24)
Then, the adjusted temporary BOX is set as a regular BOX. (S23, S24, S25)
In other words, the adjusted position (X2, Y2), width W2, and height H2 of the temporary BOX are set to the normal box position (X0, Y0), width W0, and height H0, respectively.
An example of the processing of the second BOX adjusting unit will be briefly described with reference to FIG.
Here, the temporary BOX does not interfere with a graphic other than the graphic to be measured.
Similarly, when the BOX position is determined (S31) and the BOX position data is given to the BOX generation means 180, the BOX generation means 180 corresponds to the coordinates of P1 and P2 as a BOX (here, the BOX position). Center positions X1 and Y1), a rectangular region having a predetermined width W1 and height H1 is set as a temporary BOX (also referred to as a temporary BOX). (S32)
Next, it is checked whether or not the temporary BOX has a JOG graphic that touches the graphic to be processed. If not, the temporary BOX is left as a normal BOX, and the position of the normal BOX (X0, Y0), width W0, and height H0 are saved as BOX data (S33, S35). If there is a JOG figure that touches the figure to be processed, the width and height of the temporary BOX are adjusted, and the position Shifting is performed so that the influence of the contacting JOG figure does not affect the accuracy of measurement. (S24)
Then, the adjusted temporary BOX is set as a regular BOX. (S23, S24, S25)
In other words, the adjusted position (X2, Y2), width W2, and height H2 of the temporary BOX are set to the normal box position (X0, Y0), width W0, and height H0, respectively.
In the case where there is a JOG figure in contact with the figure to be measured and the temporary BOX interferes with a figure other than the figure to be measured, the processing by the first adjusting means described above and the second adjustment are performed. Combined with processing by means.
The data on the position, width, and height of the BOX obtained in this way and the information added as necessary are referred to as BOX data 262.
As the BOX data 262, in addition to the center position (X, Y), width W, and height H of the BOX, a measurement length L at the time of dimension measurement, an angle θ of the BOX, and a PN determination are entered.
The PN judgment is POSI if there is a figure in the BOX, and NEGA if there is a figure.

Next, BOX neighborhood image data 253 corresponding to the display magnification is created for each magnification from the BOX data 262 and the processing target partial graphic data 252. (S15)
Then, the BOX data 262 and the BOX neighborhood image data 253 are associated with each other and stored in the dimension measurement information storage unit 190. (S16)
Furthermore, the measurement location list 115 and the pattern match image data 116 are created from the BOX data 262 and the BOX neighborhood image data 253 of the dimension measurement information storage means 190 by the dimension measurement information storage means 200, and the first storage means. Store in 110. (S17)
This completes the preparation for generating the script.
An example of the format of the measurement location list 115 is shown in FIG. 5A, and an example is expressed as shown in FIG. 5B.
CD means width measurement, and the CD column includes information necessary for measurement such as measurement location information and measurement length for specifying the position and range of the BOX.
The measurement is not limited to width measurement.
IMF means image data for pattern matching (corresponding to BOX neighborhood image data 253), and the IMF column includes the position, magnification, etc. of the image data.
The pattern match image data 116 is expressed as shown in FIG. 6, for example.
In this case, each column consists of a hexadecimal representation of the number of X pixels of the image, the number of Y pixels of the image, and a binary bitmap image.

Then, the script 117 is generated from the measurement location list 115 and the pattern match image data 116 into a format corresponding to the inspection machine that performs the dimension measurement, and causes the inspection machine to perform the dimension inspection. (S18)
The format and data structure of the script 117 are matched to the inspection machine to be used.
In this way, the script 117 is generated.

In the script generation apparatus of this example, the BOX position data 261 is determined from the display unit 170 as described above, but the present invention is not limited to this.
BOX position data may be input directly from the input means 120.

It is the schematic block diagram which showed the function structure of 1 example of embodiment of the script production | generation apparatus of this invention, and the flow of data. FIG. 2 is a flowchart showing an example of the operation of the script generation device shown in FIG. 1. It is the figure which showed the processing flow in the production | generation of BOX data. It is the figure which showed the processing flow in the production | generation of BOX data. FIG. 5A shows the format of the measurement location list, and FIG. 5B shows an example of the measurement location list. It is the figure which showed one example of the image match image data. It is the schematic explaining the conventional dimension measurement and the dimension measurement of this invention in case OPC correction | amendment is performed. FIG. 10 is a diagram showing that, when a figure interference occurs in a conventional dimension measuring apparatus, the dimension can be measured without causing a figure interference when the apparatus of the present invention is used.

Explanation of symbols

110 First storage means (here, magnetic disk)
111 Drawing graphic data 115 Measurement location list 116 Pattern match image data 117 Script 120 Input unit 130 Control unit 140 Drawing graphic data acquisition unit 150 BOX neighborhood image acquisition unit 160 Display control unit 170 Display unit 190 Dimension measurement information storage unit (first 2)
200 Dimensional measurement information storage means 210 Format conversion means 251 Display position data 252 Processing target partial figure data 253 BOX neighborhood image data 261 BOX position data 262 BOX data 10 Design data pattern 10A Pattern 10B after OPC correction Pattern 1 on the mask ~ 9 Figure 15, 15a, 16, 16a BOX
20A Dimension measurement target graphic 20B (on the drawing graphic data) Dimension measurement target graphic 21 to 23 (on the drawing graphic data) Graphic 21a to 23a (on the mask) graphic 25a, 26, 26a BOX

Claims (7)

  A BOX that represents a region for designating a dimension measurement region for each measurement position of a photomask to be dimensionally measured, and a script for designating a dimension measurement location by a photomask dimension inspection machine and performing a dimension inspection. In the BOX, the edge position of the target dimension measurement figure is grasped, and a script for performing the dimension measurement of the figure is generated using the drawing figure data for manufacturing the photomask. A script generation device, wherein the script includes a measurement location list that is a list including measurement location information for specifying a position and range of a BOX and information necessary for measurement such as a measurement length, and the measurement location information. It is generated from image data for pattern matching to accurately identify each measurement location, drawing graphic data corresponding to the photomask to be inspected, A script generated corresponding to drawing graphic data, a dimension measurement location list for forming the script, and pattern matching image data corresponding to each dimension measurement location of the list are stored as data. The first storage means, the input means for inputting the file name of the drawing graphic data to be processed, the position on the drawing graphic data corresponding to the dimension measurement location, and the input means from the first storage means. A drawing graphic data obtaining means for taking in graphic data within a predetermined range corresponding to the position on the designated data of the drawing data to be processed with the file name as processing target partial graphic data; Display means for displaying at least the processing target partial figure data obtained by the drawing figure data obtaining means as a figure, and dimensions inputted from the input means Dimension measurement corresponding to the measurement position or corresponding to the position on the processing target partial data obtained by specifying the dimension measurement position on the graphic display of the processing target partial graphic data displayed on the display means BOX generation means for generating BOX data, which is information about a BOX including at least information on the position and area information of the BOX for designating an area and information on the measurement width, and each BOX generated by the BOX generation means Corresponding to the data, the graphic data in the vicinity of the BOX position from the processing target partial graphic data obtained by the drawing graphic data acquisition means is respectively converted into a plurality of predetermined display magnifications of the display means or other display means. Correspondingly, for each predetermined predetermined magnification, BOX vicinity image data acquisition means for extracting as BOX vicinity image data, respectively, Each BOX data and a plurality of BOX neighborhood image data corresponding to each BOX are stored in association with each other, from the dimension measurement information storage means, from each of the dimension measurement information storage means, to each BOX data and each BOX A plurality of BOX neighborhood image data corresponding to each of the BOX data, and a measurement location list in which comments related to the contents of the BOX data are listed for each BOX, and each BOX in the list is associated with each BOX. Dimension measurement information storage means for storing pattern matching image data listing BOX neighborhood image data corresponding to the plurality of display magnifications in the first storage means for each BOX, and the BOX data; From display control means for controlling display on the display means of the BOX vicinity image data and the processing target partial graphic data, and input means Under the instruction, from the first storage means, a measurement location list corresponding to predetermined drawing graphic data and a set of image data for pattern matching are extracted, and measurement location information for designating a measurement location range and , Including image data information for pattern matching to accurately identify each measurement location, and format conversion to a structure corresponding to the device for dimension measurement to generate a script for identifying the dimension measurement location And a format conversion means for storing the generated script in the first storage means, and a control means for controlling the means in association with each other based on an instruction from the input means. Characteristic script generator.   The script generation device according to claim 1, wherein the BOX generation unit uses the processing target partial graphic data obtained from the drawing graphic data acquisition unit, and the measurement BOX is adjacent to the dimension measurement target graphic. A script generation device comprising first BOX adjusting means for adjusting the width, height, or the width, height, and position so as not to interfere with a figure.   3. The script generation device according to claim 1, wherein the BOX generation unit uses a processing target partial graphic data obtained from the drawing graphic data acquisition unit to measure a dimension. Second BOX adjusting means for adjusting the width, height, or the width, height, and position so that the measurement BOX fits in the area where the JOG figure does not exist when the figure JOG figure exists A script generation device comprising:   4. The script generation device according to claim 1, wherein the drawing graphic data is subjected to OPC (Optical Proximity Correct, also referred to as optical proximity correction), and is OPC of design data. A script generation apparatus characterized in that a figure for correction is added with a correction figure as a JOG figure of the figure.   A BOX that represents a region for designating a dimension measurement region for each measurement position of a photomask to be dimensionally measured, and a script for designating a dimension measurement location by a photomask dimension inspection machine and performing a dimension inspection. In the BOX, the edge position of the target dimension measurement figure is grasped, and a script for performing the dimension measurement of the figure is generated using the drawing figure data for manufacturing the photomask. A script generation method, which is a measurement location list which is a list including measurement location information for specifying the position and range of a BOX and information necessary for measurement such as measurement length, and each measurement location of the measurement location information. The script is generated from image data for pattern matching for specifying accurately, and processed as image data for pattern matching. From the graphic data for drawing elephants, for each BOX, the graphic data in the vicinity of the BOX position is extracted for each predetermined magnification corresponding to a plurality of predetermined display magnifications of the display means. A script generation method characterized by using a group of image data.   6. The script generation method according to claim 5, wherein for each BOX, interfering with an adjacent graphic of a dimension measurement target graphic using graphic data near the BOX position obtained from the drawing graphic data to be processed. The script generation method is characterized in that the width, height, or the width, height, and position thereof are adjusted so as not to be. The script generation method according to any one of claims 5 to 6, wherein when there is a JOG figure as a dimension measurement target figure, it is obtained from each drawing target drawing data for each BOX. Using the graphic data in the vicinity of the BOX position, the width, height, or the width, height, and position are adjusted so that the measurement BOX fits in the area where no JOG graphic exists. Script generation method.

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