JP2006292524A5 - - Google Patents

Description

Ignition or discharge plug and optical measuring device used for heat engine or plasma device

The present invention is, for example, a heat engine such as an automobile engine or a gas turbine or a heat engine used in a plasma device or ignition used in the plasma apparatus, or relates to a discharge plug, the heat engine or, in the plasma apparatus The present invention relates to a device incorporating at least one optical system for an optical sensor that detects light from a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region .

Further, the present invention, the heat engine or a spark used in the plasma apparatus or is configured with a discharge plug, the heat engine via the optical system for the optical sensor or the physical and chemical reactions in the plasma apparatus region, for example one, such as a combustion chamber and a plasma reaction region or to an optical measuring device for measuring the light from the physical and chemical reaction amount and its state in the plurality of local.

  The characteristics of physical and chemical reactions such as self-emission, plasma emission, fluorescence, phosphorescence, scattered light, and synchrotron radiation are highly dependent on the microstructure of this physical and chemical reaction and its temporal change. By measuring, the characteristics of physical and chemical reaction quantities and their correlation can be known. In addition, the physical and chemical reaction control by the feedback of the structure data and the device that generates the physical and chemical reaction from the fine structure of the measured physical and chemical reaction and the amount of time fluctuation from the high time resolution measurement data. It is possible to obtain data for improving the above. For example, such measurements include various physical and chemical reactions, such as combustion and plasma reaction analysis, in a heat engine such as an automobile engine or a gas turbine, or a plasma apparatus such as a semiconductor manufacturing apparatus or a medical device. • Very important in the control and improvement of chemical reactors.

  In order to measure the fine structure of the physical / chemical reaction described above, first, local measurement, that is, measurement for a measurement volume sufficiently smaller than the spatial scale of the structure of the physical / chemical reaction is required. In addition, time series measurement, that is, measurement that is repeated continuously for a measurement time sufficiently shorter than the time scale of structural change of physical / chemical reaction is also required.

In order to realize such measurement, "Proceedings of the Thirty-FifthJapanese Symposium on Combustion, p.54-56 (1997)" describes an optical measurement device that measures spontaneous light emission due to physical and chemical reactions. Is described. This optical measurement device uses a reflection optical system optimally designed for local point measurement as a condensing optical system, reduces the measurement volume to 1.6 mm × φ0.2 mm, and can receive light at high speed. Using a photomultiplier tube, measurement is performed at a high sampling rate of 250 kHz, thereby realizing local time-series measurement of physical and chemical reactions. In addition, this document describes that self-luminescence is measured simultaneously by measuring the corresponding wavelengths of light emitted from three components OH ^* , CH ^* , and C ₂ ^* . .

  In addition, an example in which such a measuring device separately measures a plurality of measurement points for an automobile engine is described in `` Proceedings of the Fourth International Symposium on Diagnostics and Modeling of Combustion in Internal Combustion Engines, p.411-416 (1998). )"It is described in.

Furthermore, as described in Patent Document 1, the present inventors previously made it possible to efficiently perform local time-series measurement of light from a plurality of measurement points. Has proposed. This optical measurement device uses a reflection optical system to measure luminescence by a physical / chemical reaction region, for example, a local physical / chemical reaction in a combustion chamber , for example, a combustion or a plasma reaction , and a local physical / chemical reaction. The characteristic is detected.

FIG. 31 is a side view showing a configuration of an optical system for an optical sensor used in a conventional optical measurement device. As shown in FIG. 31, the reflecting optical system reflects and collects the light from the object point 101 by the first concave mirror 102, reflects the reflected light again by the second convex mirror 103, and reflects the reflected light to the first. This is an optical system that emits light to the rear side of the first concave mirror 102 through a through-hole 104 provided in the central portion of the concave mirror 102 to focus.

  In this optical measuring device, the incident end face 107 of the optical fiber 106 is disposed at the focal position 105 of the reflection optical system, and the light guided by the optical fiber 106 is dispersed to hit the object point 101 of the reflection optical system. Measures light by physical and chemical reactions locally in the combustion chamber. In the reflective optical system, the surface that contributes to image formation is the reflective surface, so that no chromatic aberration is generated, and good measurement of light by physical and chemical reactions can be realized.

JP 2000-111398 A

By the way, since the reflection optical system used in the optical measuring apparatus as described above is configured by arranging two reflecting mirrors facing each other, it is difficult to align the reflecting mirrors. Also, miniaturization is difficult. That is, it is difficult to reduce the size of the reflection optical system to such an extent that it can be incorporated in, for example, a heat engine such as an engine , an ignition used in a plasma device , or a discharge plug.

Further, in the reflective optical system, imaging characteristics, temperature variation of the air between the reflectors, density fluctuations, changes in the refractive index due to pressure fluctuations, there is likely to be affected in the turbulence between the reflectors. Further, in this reflection optical system, there is a possibility that dust enters between the respective reflecting mirrors to contaminate each reflecting mirror and deteriorate the imaging characteristics.

Thus, the reflection optical system, for example, a heat engine such as an engine or ignition used in the plasma apparatus, or, if incorporated in the discharge plug, the heat engine or a heat generated by the plasma apparatus, a radical, plasma, electromagnetic waves, such as by airflow and Chiri挨, there is a fear that it becomes difficult to maintain the optical characteristics.

Therefore, the present invention is proposed in view of the above circumstances, and is an optical sensor that is miniaturized and whose optical characteristics are not affected by heat, radicals, plasma, electromagnetic waves, airflow, and dust. a built-in use optical system, the existing heat engine or ignition used in the plasma apparatus, or simply by replacing the discharging plug, the heat engine by the optical measuring apparatus or the like, or one of the physical and chemical reactions region in a plasma device Alternatively , it is an object of the present invention to provide an ignition or discharge plug for use in a heat engine or a plasma device that enables measurement of physical and chemical reaction amounts in a plurality of regions and light from the state.

In addition, the present invention includes an ignition or discharge plug used in such a heat engine or plasma device, and heat, radicals, plasma, electromagnetic waves, air currents, and dust generated by the heat engine or plasma device. It is an object of the present invention to provide an optical measurement device that is not affected by measurement accuracy.

In order to solve the above-described problems and achieve the object, an ignition or discharge plug used in a heat engine or a plasma apparatus according to the present invention has any one of the following configurations.

[Configuration 1]
The insulator part, the ignition / discharge part provided at the tip part of the insulator part, the electric path passing through the insulator part and connected to the ignition / discharge part, and the tip part disposed in the through hole formed in the insulator part the and at least one optical system for an optical sensor and Mase extraordinary the distal end surface of the該碍Ko unit, an optical system for an optical sensor includes an optical element that Mase extraordinary distal end surface at the tip face of the insulator portion The optical element is formed integrally with a first surface and a second surface, the first surface and the second surface each have a first region and a second region, and the first surface The first region of the first surface is a concave transmission surface, the first region of the second surface is a concave reflection surface, the second region of the first surface is a reflection surface, and is reflected on the object point side surface of the first surface. A material film is deposited and formed, and the object point side of the reflective material film is covered with a protective layer, and light from the object point is incident on the first region of the first surface, The light reflected by the first region of the second surface, the reflected light reflected at the second region of the first surface, is characterized in that condenses the reflected light to an image point.

[Configuration 2]
The ignition or discharge plug used in the heat engine having the configuration 1 or the plasma apparatus includes a plurality of optical systems for optical sensors.

[Configuration 3]
In the ignition or discharge plug used in the heat engine or the plasma device having the configuration 1 or 2, the protective layer of the optical element has at least one of heat resistance, corrosion resistance, corrosion resistance, and touch resistance. It is characterized by having.

[Configuration 4]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 3 or the plasma device, the protective layer of the optical element is made of chromium, magnesium fluoride, silicon dioxide, zirconia, titanium oxide, It is characterized by being formed of a single layer film made of any material of alumina or a multilayer film made of two or more of these materials.

[Configuration 5]
In the ignition or discharge plug used in the heat engine having the configuration 4 or the plasma apparatus, the protective layer of the optical element is formed over the entire first surface, and incident light on the first region of the first surface. It has the function of the anti-reflective film about.

[Configuration 6]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 3 or the plasma device, the protective layer of the optical element is the same as the medium between the first surface and the second surface. Depending on the material, it is formed over the entire first surface.

[Configuration 7]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 6 or the plasma device, the first surface of the optical element has a smaller diameter than the second surface. Between the first surface and the second surface, an enlarged portion from the outer diameter of the first surface to the outer diameter of the second surface is formed, and unnecessary light is blocked by the enlarged diameter portion. It is a feature.

[Configuration 8]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 6 or the plasma device, the medium between the first surface and the second surface of the optical element is notched in the side surface portion. A portion is formed, and unnecessary light is blocked by the notch portion.

[Configuration 9]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 8 or the plasma device, the second region of the first surface of the optical element is a convex reflecting surface. Is.

[Configuration 10]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 9 or the plasma device, the first region of the second surface of the optical element is made of a metal material from the image point side. The reflective film is formed by deposition.

[Configuration 11]
In an ignition or discharge plug used in a heat engine having any one of Configurations 1 to 9 or a plasma apparatus, the first region of the second surface of the optical element selectively selects only light in a specific wavelength band. It is characterized by being reflected on the surface.

[Configuration 12]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 11 or the plasma device, the first region of the second surface of the optical element is a spheroid having a focal point as an object point. It is characterized by being.

[Configuration 13]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 12 or the plasma device, the second region of the second surface of the optical element is a convex spherical surface with the image point as the center of curvature. It is a transmissive surface.

[Configuration 14]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 13 or the plasma device, the image point of the optical element is on the second region of the second surface or from the second surface. Is also on the first surface side.

[Configuration 15]
In the ignition or discharge plug used in the heat engine having any one of Configurations 1 to 14 or the plasma device, the first surface and the second surface of the optical element each include a plurality of first regions and second regions. Each of the first regions of the second surface is a reflecting surface formed of a concave surface divided into a plurality of parts having different curvature centers or focal points, and light from an object point is The light is incident on each first region, is correspondingly reflected in each first region on the second surface, is reflected on each second region on the first surface, and is condensed on the image point. .

[Configuration 16]
In an ignition or discharge plug used in a heat engine having any one of Configurations 1 to 15 or a plasma device, the plug includes at least one optical fiber, and an incident end face of the optical fiber is a single optical element, or It is arranged at the position of a plurality of image points.

[Configuration 17]
The ignition or discharge plug used in the heat engine having any one of Configurations 1 to 15 or the plasma device includes an optical fiber array including a plurality of optical fibers, and each incident end face of each optical fiber is optical It is arranged at the positions of a plurality of image points of the element, and is arranged one-dimensionally or three-dimensionally on one plane forming a predetermined angle with respect to the optical axis or at mutually different positions in the optical axis direction. To do.

[Configuration 18]
The ignition or discharge plug used in the heat engine having the configuration 14 or the plasma apparatus includes at least one optical fiber, and the incident end surface of the optical fiber is on the second region of the second surface of the optical element, or It is characterized by being arranged at the position of one or more image points on the first surface side than the second surface.

[Configuration 19]
The ignition or discharge plug used in the heat engine having the configuration 14 or the plasma apparatus includes an optical fiber array including a plurality of optical fibers, and each incident end surface of each optical fiber has a second surface of the optical element. It is arranged at the position of a plurality of image points on the two areas or on the first surface side with respect to the second surface, and is different from each other on one plane forming a predetermined angle with respect to the optical axis or in the optical axis direction. A one-dimensional to three-dimensional array is arranged at a position.

[Configuration 20]
A heat engine having any one of configurations 1 to 15 or an ignition or discharge plug used in a plasma apparatus includes a light receiving element in which a plurality of light receiving portions are arranged at an image point of an optical element. The light from the plurality of image points by the optical element at the plurality of measurement points on the object point side of the optical element is detected.

[Configuration 21]
In the ignition or discharge plug used in the heat engine having the configuration 20 or the plasma device, the plurality of measurement points are arranged in a one-dimensional manner, and the plurality of light receiving units have a plurality of images corresponding to the plurality of measurement points. It is one-dimensionally arranged at the position of the point.

[Configuration 22]
In the ignition or discharge plug used in the heat engine having the configuration 20 or the plasma apparatus, the plurality of measurement points are two-dimensionally arranged in a matrix, and the plurality of light receiving units correspond to the plurality of measurement points. It is characterized in that it is two-dimensionally arranged in a matrix at the positions of a plurality of image points.

[Configuration 23]
In the ignition or discharge plug used in the heat engine having the configuration 20 or the plasma device, the plurality of measurement points are three-dimensionally arranged, and the plurality of light receiving units have a plurality of images corresponding to the plurality of measurement points. It is characterized by being three-dimensionally arranged at the position of the point.

  Moreover, the optical measuring device which concerns on this invention has any one of the following structures.

[Configuration 24]
An optical measurement device for measuring the amount of physical / chemical reaction in one or a plurality of local areas in a heat engine or a plasma apparatus and the light from the state, comprising: any heat engine having one or ignition used in the plasma apparatus or a discharge plug, a spectroscopic means for dispersing the light in the image point of the optical element, a light receiving element for receiving the light dispersed by the spectroscopic means An optical measurement means having a signal processing means for processing a signal obtained by the measurement means, and detecting light of an arbitrary wavelength emitted from one or a plurality of local areas of the physical / chemical reaction region It is what.

[Configuration 25]
An optical measurement device for measuring the amount of physical / chemical reaction in one or a plurality of local areas in a heat engine or plasma apparatus and the light from the state, comprising 16 to 19 any heat engine having one or ignition used in the plasma apparatus or a discharge plug, light at the image point of the optical element is incident via the optical fiber, a spectroscopic means for spectrally separating the light, spectral means A light measuring means having a light receiving element for receiving the light dispersed by the light and a signal processing means for processing a signal obtained by the measuring means, and emitted from one or a plurality of local areas of the physical / chemical reaction region It is characterized by detecting light of an arbitrary wavelength.

[Configuration 26]
An optical measurement device for measuring the amount of physical / chemical reaction in one or a plurality of local physical / chemical reaction regions and the light from the state in a heat engine or plasma device, comprising 20 to 23 A heat engine having any one of the above , or an ignition or discharge plug used in a plasma device, and a signal processing means for processing a signal obtained by a light receiving element , or one of physical / chemical reaction regions , or It is characterized by detecting light of an arbitrary wavelength emitted from a plurality of local areas.

[Configuration 27]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures emission intensity of different wavelengths in one or a plurality of local plasma fields in the physical / chemical reaction region. To do.

[Configuration 28]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means calculates the plasma characteristics from the light intensity ratio of different wavelengths, the line width of the spectrum, or the shift amount in the plasma field in the physical / chemical reaction region. It is characterized by identifying the quantity.

[Configuration 29]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing unit measures the light intensity of the radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. It is characterized by this.

[Configuration 30]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures the light intensity of radicals and temporal changes in one or a plurality of local areas of the physical / chemical reaction region. It is what.

[Configuration 31]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. , Measuring the local air-fuel ratio in one or a plurality of local areas of the physical / chemical reaction region.

[Configuration 32]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures the thickness of a flame zone or reaction zone in one or a plurality of local areas of the physical / chemical reaction region. To do.

[Configuration 33]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures the arrival speed of a flame zone or a reaction zone in one or a plurality of local areas of the physical / chemical reaction region. To do.

[Configuration 34]
In the optical measuring device having the configuration 33, the signal processing means measures the arrival speed of a flame zone or a reaction zone that differs for each radical composition.

[Configuration 35]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures fluctuations in the arrival speed of the flame zone or reaction zone in one or a plurality of local areas of the physical / chemical reaction region. It is a feature.

[Configuration 36]
In the optical measuring device having the configuration 35, the signal processing means measures fluctuations in the arrival speed of the flame zone or reaction zone that differs for each radical composition.

[Configuration 37]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures the variation frequency of the arrival speed of the flame zone or the reaction zone in one or a plurality of local areas of the physical / chemical reaction region. It is characterized by.

[Configuration 38]
In the optical measurement device having the configuration 37, the signal processing means measures a variation frequency of the arrival speed of the flame zone or the reaction zone that differs for each radical composition.

[Configuration 39]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means measures a direction in which a flame zone or a reaction zone spreads in one or a plurality of local regions of a physical / chemical reaction region. To do.

[Configuration 40]
In the optical measuring device having the configuration 39, the signal processing means measures a direction in which a flame zone or a reaction zone spreads for each radical composition.

[Configuration 41]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. It is characterized by measuring time series fluctuations (cycle fluctuations, etc.) of a heat engine or a plasma apparatus.

[Configuration 42]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. And detecting abnormal reactions such as knocking in a heat engine or a plasma apparatus.

[Configuration 43]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. In addition, it is characterized in that information on the formation of flames or reaction nuclei in one or more physical / chemical reaction regions is measured.

[Configuration 44]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. The temperature information of the flame, gas, or plasma in one or a plurality of local areas of the physical / chemical reaction region is measured.

[Configuration 45]
In the optical measurement device having any one of Configurations 24 to 26, the signal processing means is based on the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. The composition / concentration of gas in one or a plurality of local areas of the physical / chemical reaction region is measured.

Heat engine having a structure 1 or the ignition used in the plasma apparatus, or, in the discharge plug, and Mase extraordinary a tip disposed within the through hole drilled in the insulator portion to the distal end surface of the該碍Ko portion Since the optical element of the optical system for the optical sensor is an integrated optical element having the first surface and the second surface, the refractive index due to temperature variation, density variation, and pressure variation of the medium between the first surface and the second surface. There is little change, and there is no risk of turbulent flow, gas type fluctuations, or dust intrusion between the surfaces. Further, in this optical element, the surface that contributes to the image formation is the reflection surface, so that no chromatic aberration occurs and the image formation characteristics are good. Further, in this optical element, the second region of the first surface, which is the reflective surface, is formed by depositing a reflective material film on the object surface of the first surface, and the object point side of the reflective material film is the protective layer. Therefore, the reflective material film is not damaged by heat, radicals, plasma, electromagnetic waves, dust and the like from the space on the object point side.

Therefore, the optical element of the ignition or discharge plug used in this heat engine or plasma device is easy to manufacture and can be downsized while having good imaging characteristics, Degradation of optical properties due to the influence of radicals, plasma, electromagnetic waves, airflow and dust can be avoided. In this optical element, the interface between the reflective material film and the medium forming the optical element becomes a reflective surface, so that the optical characteristics do not deteriorate even if the outer surface of the reflective material film becomes dirty.

The ignition or discharge plug used in the heat engine or the plasma device having the configuration 2 includes a plurality of optical systems for optical sensors in the ignition or discharge plug used in the heat engine or the plasma device having the configuration 1. Therefore, with these optical sensor optical systems, light from a single or a plurality of object points can be simultaneously focused on a plurality of image points.

Heat engine having a structure 3, or ignition used in the plasma apparatus, or, the discharge plug, configuration 1, or heat engine having a structure 2, or the ignition used in the plasma apparatus, or, in the discharge plug, the optical element Since the protective layer has at least one of heat resistance, corrosion resistance, corrosion resistance, and touch resistance, the reflective material film is corroded, corroded by heat, radicals, plasma, electromagnetic waves and dust from the object point side, Protected from contact.

Heat engine has a structure 4, or ignition used in the plasma apparatus, or, the discharge plug, heat engine having any one of compositions 1 through 3, or the ignition used in the plasma apparatus, or, in the discharge plug, optical The protective layer of the element is formed of a single layer film made of any one of chromium, magnesium fluoride, silicon dioxide, zirconia, titanium oxide, and alumina, or a multilayer film made of these two or more materials. Therefore, it is possible to reliably prevent the reflection material film from being damaged by heat, radicals, plasma, electromagnetic waves and dust from the object point side, corrosion, corrosion, and contact.

Heat engine having a structure 5 or the ignition used in the plasma apparatus, or, the discharge plug, the heat engine has a structure 3, or ignition used in the plasma apparatus, or, in the discharge plug, protective layer of the optical element, the It is formed over the entire surface of one surface and has a function of an antireflection film for incident light on the first region of the first surface, so that heat, radicals, plasma, electromagnetic waves, airflow from the object point side, and It is possible to prevent the reflection material film from being damaged by dust and the like, and to improve the transmittance of incident light in the first region of the first surface.

Heat engine has a structure 6, or ignition used in the plasma apparatus, or, the discharge plug, heat engine having any one of compositions 1 through 3, or the ignition used in the plasma apparatus, or, in the discharge plug, optical Since the protective layer of the element is formed over the entire surface of the first surface with the same material as the medium between the first surface and the second surface, the protective layer and the medium forming the optical element are excellent. Can be joined.

The ignition or discharge plug used in the heat engine having the configuration 7 or the plasma device is an optical component in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 6. The first surface of the element has a smaller diameter than the second surface, and the gap between the first surface and the second surface extends from the outer diameter of the first surface to the outer diameter of the second surface. Since the diameter portion is formed and unnecessary light is blocked by the diameter-increased portion, good imaging characteristics can be realized.

The ignition or discharge plug used in the heat engine having the configuration 8 or the plasma device is an optical component in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 6. In the medium between the first surface and the second surface of the element, a notch is formed in the side surface, and unnecessary light is blocked by the notch, so that good imaging characteristics can be realized. Can do.

The ignition or discharge plug used in the heat engine having the configuration 9 or the plasma device is an optical element in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 8. Since the second region of the first surface of the element is a convex reflecting surface, the position of the image point can be made sufficiently far behind the second surface.

The ignition or discharge plug used in the heat engine having the structure 10 or the plasma device is an optical element in the ignition or discharge plug used in the heat engine or the plasma device having any one of the structures 1 to 9. In the first area of the second surface of the element, a reflective film made of a metal material is deposited from the image point side, so that the reflectance in this area can be increased, and the reflective film and the optical element are Since the interface with the medium to be formed becomes a reflective surface, even if the outer surface of the reflective film becomes dirty, the optical characteristics do not deteriorate.

Heat engine having a structure 11 or, ignition used in the plasma apparatus, or, the discharge plug, heat engine having any one of compositions 1 through 9, or the ignition used in the plasma apparatus, or, in the discharge plug, optical Since the first region of the second surface of the element selectively reflects only light in a specific wavelength band, only light in a specific wavelength band at an object point can be imaged.

The ignition or discharge plug used in the heat engine having the configuration 12 or the plasma device is an optical element in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 11. Since the first region of the second surface of the element is a spheroid with the object point as the focal point, it is possible to realize good imaging characteristics with no aberration.

The ignition or discharge plug used in the heat engine having the configuration 13 or the plasma apparatus is an optical element in the ignition or discharge plug used in the heat engine or the plasma apparatus having any one of the configurations 1 to 12. Since the second region of the second surface of the element is a convex spherical transmission surface with the image point as the center of curvature, the emitted light from this optical element is not refracted in the second region of the second surface. No aberration occurs in this region.

The ignition or discharge plug used in the heat engine having the configuration 14 or the plasma device is an optical element in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 12. Since the image point of the element is on the second region of the second surface or on the first surface side of the second surface, if an optical fiber or the like is bonded to the optical element, Thus, the light at the image point can be directly introduced.

In the ignition or discharge plug used in the heat engine having the configuration 15 or the plasma device, the first region of the second surface of the optical element is divided into a plurality of portions having different curvature centers or focal points. Since the reflecting surface is a concave surface, light from one or a plurality of object points can be simultaneously focused on a plurality of image points.

The ignition or discharge plug used for the heat engine having the configuration 16 or the plasma device is at least the ignition or discharge plug used for the heat engine having the configuration 1 to the configuration 15 or the plasma device. Since the incident end face of the optical fiber is arranged at the position of one or a plurality of image points of the optical element, light from a region conjugate to the incident end face of the optical fiber is received. Detection is possible via this optical fiber.

The ignition or discharge plug used in the heat engine or the plasma device having the configuration 17 is a plurality of ignition or discharge plugs used in the heat engine or the plasma device having any one of the configurations 1 to 15. Each incident end face of each optical fiber is arranged at the position of a plurality of image points of the optical element, on one plane forming a predetermined angle with respect to the optical axis, or Since the one-dimensional to three-dimensional arrays are arranged at different positions in the optical axis direction, light from a region conjugate to the incident end face of these optical fibers can be detected via this optical fiber.

The ignition or discharge plug used in the heat engine or the plasma device having the configuration 18 includes at least one optical fiber in the ignition or discharge plug used in the heat engine or the plasma device having the configuration 14. The incident end face of the optical fiber is disposed on the second region of the second surface of the optical element or at the position of one or more image points on the first surface side with respect to the second surface. Light from a region conjugate to the incident end face of the optical fiber can be directly introduced from the optical element into the optical fiber.

The ignition or discharge plug used in the heat engine having the configuration 19 or the plasma device is an optical fiber comprising a plurality of optical fibers in the ignition or discharge plug used in the heat engine having the configuration 14 or the plasma device. Each incident end face of each optical fiber is disposed on a second region of the second surface of the optical element or at a plurality of image point positions closer to the first surface than the second surface; Since one-dimensional to three-dimensional arrays are arranged on one plane that forms a predetermined angle with respect to the optical axis, or at different positions in the optical axis direction, one-dimensional to three-dimensional conjugate to the incident end face of these optical fibers. Light from the arrayed area can be detected through this optical fiber.

The ignition or discharge plug used in the heat engine having the configuration 20 or the plasma device is an optical element in the ignition or discharge plug used in the heat engine or the plasma device having any one of the configurations 1 to 15. A light receiving element having a plurality of light receiving portions arranged at the image point of the element, and the light receiving element detects light from the plurality of image points by the optical element at the plurality of measurement points on the object point side of the optical element. , it is possible to reduce the size of the apparatus by Ru with a single optical system, and without the movement or relocation of the apparatus, it is possible to perform efficiently the light detection for a plurality of measurement points .

  As the light receiving element, for example, a position detection type optical measuring device using a line sensor, a CCD, or the like can be used.

The heat engine has a structure 21, or ignition used in the plasma apparatus, or, the discharge plug, the heat engine has a structure 20, or ignition used in the plasma apparatus, or, in the discharge plug, the plurality of measurement points, One-dimensionally arranged, and a plurality of light-receiving units are one-dimensionally arranged at the positions of a plurality of image points corresponding to a plurality of measurement points, and ignition used for a heat engine having a configuration 22 or a plasma device , or In the discharge plug, a plurality of measurement points are two-dimensionally arranged in a matrix, and a plurality of light receiving units correspond to a plurality of measurement points in the ignition or discharge plug used in the heat engine having the configuration 20 or the plasma apparatus. They are arranged two-dimensionally in a matrix at positions of a plurality of image points to be further heat engine having a structure 23, or ignition used in the plasma apparatus, or release Plug, the heat engine has a structure 20, or ignition used in the plasma apparatus, or, in the discharge plug, the plurality of measurement points are arranged three-dimensionally, a plurality of images in which a plurality of light receiving portions corresponding to a plurality of measurement points Three-dimensionally arranged at the positions of the points.

  As described above, by arranging the plurality of light receiving units in one to three dimensions, a plurality of lights corresponding to a plurality of measurement points can be efficiently detected.

That is, the present invention incorporates an optical system for an optical sensor that is miniaturized and has optical characteristics that are not affected by heat, radicals, plasma, electromagnetic waves, airflow, and dust, an existing heat engine , or By simply replacing the ignition or discharge plug used in the plasma device, a physical engine or chemical reaction region in a plasma engine such as a heat engine by an optical measuring device or the like, or a semiconductor manufacturing device or a medical device , such as a combustion chamber or a plasma reaction. one such region, or heat engine to allow the measurement of light from the physical and chemical reaction amount and its state in the plurality of local or ignition used in the plasma apparatus, or those capable of providing a discharge plug It is.

As described previously, the heat engine according to the present invention, or ignition used in the plasma apparatus, or, the discharge plug, ignition, or, has the function of a discharge plug, such ignition, or Further, it can be used as an exhaust gas component analyzer or a gas concentration detector without using the function as a discharge plug.

The optical measuring device having the configuration 24 is a spectroscope that splits light at an image point of an optical element , an ignition or discharge plug used in a heat engine or a plasma device having any one of the configurations 1 to 15. Means, a light measuring means having a light receiving element for receiving the light dispersed by the spectroscopic means, and a signal processing means for processing a signal obtained by the measuring means, and a physical / chemical reaction region , for example, a combustion chamber or Since light of an arbitrary wavelength emitted from one or a plurality of local areas such as a plasma reaction region is detected, the apparatus can be miniaturized by using a single optical system, and the apparatus can be moved. Efficient optical measurement can be performed for one or a plurality of measurement points without performing rearrangement or the like.

As light of an arbitrary wavelength emitted by the flame, for example, OH ^* , CH ^* , C ₂ ^*, etc. In the plasma reaction, light from a specific component such as H, O, N, N ₂ , OH, etc. is selectively used. It can be measured. In addition, since the light at the measurement point is self-luminous, plasma emission, fluorescence, phosphorescence, scattered light, and radiated light, it can cope with various physical and chemical reactions.

Further, in this optical measuring device, since an integrated optical element having the first surface and the second surface is used as the optical element, temperature variation, density variation of the medium between the first surface and the second surface, There is little change in the refractive index due to pressure fluctuations, and there is no possibility of turbulent flow, gas type fluctuations or dust intrusion between the surfaces. This optical element is easy to manufacture and can be miniaturized, and has good imaging characteristics, as well as deterioration of optical characteristics due to the effects of heat, radicals, plasma, electromagnetic waves, airflow and dust. It can be avoided.

  Furthermore, in this optical measuring device, since the surface that contributes to image formation in the optical element is a reflection surface, no chromatic aberration is generated, and good image formation characteristics can be realized.

The optical measuring device having the configuration 25 is a heat engine having any one of the configurations 16 to 19 or the ignition or discharge plug used in the plasma device, and light at the image point of the optical element is transmitted through the optical fiber. A spectroscopic means for splitting the incident light; a light measuring means having a light receiving element for receiving the light dispersed by the spectroscopic means; and a signal processing means for processing a signal obtained by the measuring means. Detects light of any wavelength emitted from one or more reaction regions , such as the combustion chamber and plasma reaction region , so the device can be miniaturized by using a single optical system. In addition, efficient optical measurement can be performed on one or a plurality of measurement points without moving or rearranging the apparatus.

As light of an arbitrary wavelength emitted by the flame, for example, OH ^* , CH ^* , C ₂ ^*, etc. In the plasma reaction, light from a specific component such as H, O, N, N ₂ , OH, etc. is selectively used. It can be measured. In addition, since the light at the measurement point is self-luminous, plasma emission, fluorescence, phosphorescence, scattered light, and radiated light, it can cope with various physical and chemical reactions.

Further, in this optical measuring device, since an integrated optical element having the first surface and the second surface is used as the optical element, temperature variation, density variation of the medium between the first surface and the second surface, There is little change in the refractive index due to pressure fluctuations, and there is no possibility of turbulent flow, gas type fluctuations or dust intrusion between the surfaces. This optical element is easy to manufacture and can be miniaturized, and has good imaging characteristics, as well as deterioration of optical characteristics due to the effects of heat, radicals, plasma, electromagnetic waves, airflow and dust. It can be avoided.

  Furthermore, in this optical measuring device, since the surface that contributes to image formation in the optical element is a reflection surface, no chromatic aberration is generated, and good image formation characteristics can be realized.

The optical measuring device having the configuration 26 is a signal processing means for processing a signal obtained by a heat engine having any one of the configurations 20 to 23 or an ignition or discharge plug used in a plasma device and a light receiving element. It uses a single optical system because it detects light of any wavelength emitted from one or more physical / chemical reaction regions , such as combustion chambers and plasma reaction regions . Thus, the apparatus can be reduced in size, and efficient optical measurement can be performed for one or a plurality of measurement points without moving or rearranging the apparatus.

As light of an arbitrary wavelength emitted by the flame, for example, OH ^* , CH ^* , C ₂ ^*, etc. In the plasma reaction, light from a specific component such as H, O, N, N ₂ , OH, etc. is selectively used. It can be measured. In addition, since the light at the measurement point is self-luminous, plasma emission, fluorescence, phosphorescence, scattered light, and radiated light, it can cope with various physical and chemical reactions.

Further, in this optical measuring device, since an integrated optical element having the first surface and the second surface is used as the optical element, temperature variation, density variation of the medium between the first surface and the second surface, There is little change in the refractive index due to pressure fluctuations, and there is no possibility of turbulent flow, gas type fluctuations or dust intrusion between the surfaces. This optical element is easy to manufacture and can be miniaturized, and has good imaging characteristics, as well as deterioration of optical characteristics due to the effects of heat, radicals, plasma, electromagnetic waves, airflow and dust. It can be avoided.

  Furthermore, in this optical measuring device, since the surface that contributes to image formation in the optical element is a reflection surface, no chromatic aberration is generated, and good image formation characteristics can be realized.

The optical measurement apparatus having the configuration 27 is the optical measurement apparatus having any one of the configuration 24 to the configuration 26, and the signal processing means has one of a plasma field in a physical / chemical reaction region or a plurality of different wavelengths in a plurality of local areas. Since the emission intensity is measured, the size of the device can be reduced by using a single optical system, and one or more measurement points can be measured without moving or rearranging the device. Efficient optical measurement can be performed.

As light of an arbitrary wavelength emitted by plasma, for example, light from a specific component such as H, O, N, N ₂ , and OH can be selectively measured. Further, in this optical measuring device, since an integrated optical element having the first surface and the second surface is used as the optical element, temperature variation, density variation of the medium between the first surface and the second surface, There is little change in the refractive index due to pressure fluctuations, and there is no possibility of turbulent flow, gas type fluctuations or dust intrusion between the surfaces. This optical element is easy to manufacture and can be miniaturized, and has good imaging characteristics, as well as deterioration of optical characteristics due to the effects of heat, radicals, plasma, electromagnetic waves, airflow and dust. It can be avoided.

  Further, in this optical measurement device, since the surface that contributes to image formation in the optical element is a reflection surface, there is no occurrence of chromatic aberration, and simultaneous measurement of different wavelengths from the same point can be realized.

  The optical measurement device having the configuration 28 is the optical measurement device having any one of the configuration 24 to the configuration 26, and the signal processing means is a light intensity ratio of different wavelengths in the plasma field in the physical / chemical reaction region, and a spectral line width. Alternatively, since the plasma characteristic amount is identified from the shift amount, it is possible to reduce the size of the apparatus by using a single optical system, and it is possible to reduce the size of the apparatus without moving or rearranging the apparatus. Alternatively, efficient optical measurement can be performed for a plurality of measurement points.

As light of an arbitrary wavelength emitted by plasma, for example, light from a specific component such as H, O, N, N ₂ , and OH can be selectively measured. Further, in this optical measuring device, since an integrated optical element having the first surface and the second surface is used as the optical element, temperature variation, density variation of the medium between the first surface and the second surface, There is little change in the refractive index due to pressure fluctuations, and there is no possibility of turbulent flow, gas type fluctuations or dust intrusion between the surfaces. This optical element is easy to manufacture and can be miniaturized, and has good imaging characteristics, as well as deterioration of optical characteristics due to the effects of heat, radicals, plasma, electromagnetic waves, airflow and dust. It can be avoided.

The optical measurement device having the configuration 29 is the optical measurement device having any one of the configuration 24 to the configuration 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Measures the light intensity of radicals at multiple locations and their spatial and temporal distributions, so physical / chemical reaction regions in plasma engines such as heat engines or semiconductor manufacturing equipment and medical equipment , such as combustion chambers and plasma reactions A lot of information about the state of the area or the like can be acquired.

The optical measurement device having the configuration 30 is the optical measurement device having any one of the configuration 24 to the configuration 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Since the light intensity of radicals at multiple locations and their temporal changes are measured, physical / chemical reaction regions in plasma devices such as heat engines or semiconductor manufacturing devices and medical devices , such as combustion chambers and plasma reaction regions, etc. A lot of information about the state can be obtained.

The optical measurement device having the configuration 31 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , such as a combustion chamber or a plasma reaction region , or Based on the light intensity of radicals in multiple locations and their spatial and temporal distribution, measure the local air-fuel ratio in one or more physical / chemical reaction regions , such as combustion chambers and plasma reaction regions. Therefore, it is possible to acquire information on the local air-fuel ratio from the state of the physical / chemical reaction region , for example, the combustion chamber or the plasma reaction region , in the heat engine or the plasma apparatus such as a semiconductor manufacturing apparatus or a medical device.

The optical measurement device having the configuration 32 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Measures the thickness of the flame zone or reaction zone in multiple locations, so the state of the physical / chemical reaction area in the plasma device such as a heat engine or semiconductor manufacturing equipment or medical equipment , such as a combustion chamber or plasma reaction area Information on the thickness of the flame zone or reaction zone can be obtained from

The optical measurement device having the configuration 33 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Measures the arrival speed of the flame zone or reaction zone in multiple locations, so that the state of the physical or chemical reaction region in the plasma engine, such as a heat engine or semiconductor manufacturing equipment, medical equipment , such as a combustion chamber or plasma reaction zone From this, information on the arrival speed of the flame zone or reaction zone can be acquired.

The optical measurement device having the configuration 34 is the optical measurement device having the configuration 33, and the signal processing means measures the arrival speed of a flame zone or a reaction zone that differs for each radical composition. , physical and chemical reactions region in a plasma device, such as medical devices, for example, it is possible to acquire information for each composition of radical respect arrival rate of the flame zone or reaction zone from conditions such as the combustion chamber and a plasma reaction region.

The optical measurement device having the configuration 35 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Measures fluctuations in the arrival speed of the flame zone or reaction zone in multiple locations, so physical / chemical reaction areas in plasma engines such as heat engines or semiconductor manufacturing equipment, medical equipment , such as combustion chambers and plasma reaction areas From this state, it is possible to obtain information on fluctuations in the arrival speed of the flame zone or reaction zone.

The optical measurement device having the configuration 36 is the same as the optical measurement device having the configuration 35, since the signal processing means measures the variation in the arrival speed of the flame zone or the reaction zone that differs for each radical composition. physical-chemical reaction region in the manufacturing device, a plasma device, such as medical devices, for example, it is possible to acquire information for each composition of radical respect arrival rate of the flame zone or reaction zone from conditions such as the combustion chamber and a plasma reaction region.

The optical measurement device having the configuration 37 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Measures the fluctuation frequency of the arrival speed of the flame zone or reaction zone in multiple local areas , so physical / chemical reaction areas in plasma devices such as heat engines or semiconductor manufacturing equipment, medical equipment , such as combustion chambers and plasma reaction areas From this state, information on the fluctuation frequency of the arrival speed of the flame zone or the reaction zone can be acquired.

Since the optical measurement device having the configuration 38 is the optical measurement device having the configuration 37, the signal processing unit measures the variation frequency of the arrival speed of the flame zone or the reaction zone that is different for each radical composition. semiconductor manufacturing equipment, physical and chemical reactions region in a plasma device, such as medical devices, for example, to obtain information for each composition of radical respect fluctuation frequency of arrival rate of the flame zone or reaction zone from conditions such as the combustion chamber and a plasma reaction region be able to.

The optical measurement device having configuration 39 is the optical measurement device having any one of configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , such as a combustion chamber or a plasma reaction region , or Measures the direction of the spread of the flame zone or reaction zone in multiple local areas , so the state of the physical / chemical reaction region , such as a combustion chamber or plasma reaction region , in a heat engine or plasma device such as a semiconductor manufacturing device or medical device From this, information on the direction in which the flame zone or reaction zone spreads can be acquired.

The optical measuring device having the configuration 40 is the optical measuring device having the configuration 39, and the signal processing means measures the direction in which a different flame zone or reaction zone spreads for each radical composition. In addition, it is possible to acquire information for each radical composition with respect to a direction in which a flame zone or a reaction zone spreads from a state of a physical / chemical reaction region in a plasma device such as a medical device , for example, a combustion chamber or a plasma reaction region .

The optical measurement device having the configuration 41 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Based on the light intensity of radicals at multiple locations and their spatial and temporal distribution, time series fluctuations (cycle fluctuations, etc.) of a heat engine or a plasma device such as a semiconductor manufacturing apparatus or medical device are measured. Information on time-series fluctuations (cycle fluctuations, etc.) can be acquired from the state of the engine or the physical / chemical reaction region in the plasma device , for example, the combustion chamber or the plasma reaction region .

The optical measurement device having the configuration 42 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or based on the light intensity and its spatial and temporal distribution of radicals in the plurality of local heat engine, or a semiconductor manufacturing device, and detects an abnormal reaction such as knocking in the plasma apparatus such as medical devices, heat engine or, In addition, information regarding abnormal reactions such as knocking can be acquired from physical / chemical reaction regions in the plasma device , for example, states of the combustion chamber , plasma reaction region, and the like.

The optical measurement device having the configuration 43 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Based on the light intensity of the radicals at multiple locations and their spatial and temporal distribution, the physical or chemical reaction area , for example, the combustion chamber or plasma reaction area , or one or more local flames or reaction nuclei Since formation information is measured, information on the formation of flames or reaction nuclei from the state of the physical or chemical reaction region , such as a combustion chamber or plasma reaction region , in a plasma device such as a heat engine, semiconductor manufacturing device, or medical device is obtained. Can be acquired.

The optical measurement device having the configuration 44 is the optical measurement device having any one of the configurations 24 to 26, and the signal processing means is one of a physical / chemical reaction region , for example, a combustion chamber or a plasma reaction region , or Based on the light intensity of radicals at multiple locations and their spatial and temporal distribution, one or more local flames, gases, or physical / chemical reaction regions such as combustion chambers and plasma reaction regions Since temperature information of plasma is measured, it can be used as a flame, gas, or plasma from the state of a physical or chemical reaction region , such as a combustion chamber or plasma reaction region , in a plasma device such as a heat engine, semiconductor manufacturing device, or medical device. Temperature information can be acquired.

The optical measurement device having the configuration 45 is the optical measurement device having any one of the configuration 24 to the configuration 26, in which the signal processing means is a light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and Since the composition / concentration of gas in one or more physical / chemical reaction regions is measured based on the spatial / temporal distribution, it can be used in heat engines or plasma devices such as semiconductor manufacturing equipment and medical equipment. Information on the composition and concentration of the gas can be acquired from the state of the physical / chemical reaction region , for example, the combustion chamber or the plasma reaction region .

That is, the present invention includes an ignition or discharge plug used in the heat engine or plasma device as described above, and generates heat, radicals, plasma generated by the heat engine, or a plasma device such as a semiconductor manufacturing device or a medical device. It is possible to provide an optical measurement device that is not affected by measurement accuracy due to electromagnetic waves, airflow, dust, and the like.

As described previously, the optical measuring apparatus according to the present invention, the ignition or the heat engine has a function as a discharge plug, or ignition used in the plasma apparatus, or is provided with the discharge plug, such It can also be used as an exhaust gas component analysis device or a gas concentration detection device without using a function as a simple ignition or a discharge plug.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

[Embodiment of ignition or discharge plug used in heat engine or plasma device]
As shown in FIG. 1, the ignition or discharge plug used in the heat engine or the plasma apparatus according to the present invention includes an insulator portion 1 and an ignition (discharge) portion 2 provided at the tip of the insulator portion 1. And an electric circuit 3 that passes through the insulator 1 and is connected to the ignition (discharge) unit 2.

In the ignition or discharge plug used in this heat engine or plasma device, at least one optical sensor optical system 5 is disposed in the through hole 4 formed in the insulator portion 1. . The optical system 5 for an optical sensor is Mase extraordinary a tip on the distal end surface of the insulator portion 1. The optical system 5 for an optical sensor is configured to have an optical element 10 that Mase extraordinary distal end surface at the tip face of the insulator portion 1.

The ignition or discharge plug used in this heat engine or plasma device can be replaced with an existing spark plug in the target heat engine or plasma device such as a semiconductor manufacturing device or medical device. The spark plug has the same size and outer shape as the spark plug. The target heat engine or plasma device is used in other gasoline engines for automobiles (reciprocating engines and rotary engines), diesel engines, spray combustion furnaces and boilers using oil burners, aircraft and thermal power generation. Physical / chemical reactions such as gas turbines, rams, scramjet engine combustors, water heaters, fuel cells, hydrogen engines, sterilizers / sterilizers, various heat engines, semiconductor manufacturing equipment, plasma equipment for medical equipment, etc. Device.

The ignition or discharge plug used in the heat engine or plasma device according to the present invention can be replaced with a spark plug or a glow plug in these heat engines or plasma devices such as semiconductor manufacturing devices and medical devices. It has become. That is, the ignition (discharge) unit 2 may be configured as any of an ignition unit that performs ignition by raising the temperature and a discharge unit that performs discharge such as arc discharge and glow discharge.

The ignition or discharge plug used in the heat engine or plasma device according to the present invention may include a plurality of optical systems 5 for optical sensors.

[Configuration of optical element]
As shown in FIG. 2, the optical element 10 constituting the optical sensor optical system 5 in the ignition or discharge plug used in the heat engine or plasma apparatus according to the present invention includes a first surface 11 and a second surface 12. Is an integrated optical element. A space between the first surface 11 and the second surface 12 is a uniform medium such as so-called optical glass or synthetic quartz.

The first surface 11 and the second surface 12 have first regions 11a and 2a on the outer peripheral side and second regions 11b and 2b at the center. Note that the second region 11b, 1 2b in the first and second surfaces 11 and 12 need not be the center of the first and second surfaces 11 and 12, relative to the first and second surfaces 11 and 12 And may be formed at an eccentric position.

  In this optical element, light from the object point O enters the first region 11 a of the first surface 11, travels in the medium between the first surface 11 and the second surface 12, and Reflected in the first region 12a. Then, the light reflected by the first region 12 a of the second surface 12 is reflected by the second region 11 b of the first surface 11, emitted through the second region 12 b of the second surface 12, and condensed on the image point I. To do.

  The first region 11a of the first surface 11 is a concave transmission surface. The first region 11a of the first surface 11 is preferably a concave spherical transmission surface with the object point O as the center of curvature. In this case, the light from the object point O goes straight without being refracted when passing through the first region 11 a of the first surface 11.

  The first region 12a of the second surface 12 is a concave reflecting surface and has a characteristic of collecting incident light. The second region 11b of the first surface 11 is a reflecting surface. The second region 12b of the second surface 12 is a convex transmission surface (as viewed from the light incident side). The second region 12b of the second surface 12 is desirably a convex spherical transmission surface with the image point as the center of curvature. In this case, the light traveling toward the image point I travels straight without being refracted when passing through the second region 12 b of the second surface 12. That is, in this case, in this optical element, the only surface that contributes to image formation is the reflecting surface, and no chromatic aberration occurs.

  The second region 12b of the second surface 12 is not a convex spherical surface having the image point as the center of curvature, but is continuous with the flat surface or the first region 12a of the second surface 12 (as viewed from the light incident side). It may be a concave spherical surface. Also in this case, since the angle of the incident light with respect to the second region 12b of the second surface 12 is nearly vertical, a large aberration that causes a practical problem does not occur.

  In this optical element, the first surface 11 has a smaller diameter than the second surface 12. A step portion 13 is formed between the first surface 11 and the second surface 12 so as to expand from the outer diameter of the first surface 11 to the outer diameter of the second surface 12. Since the step portion 13 blocks a part of unnecessary light that enters the second surface 12 from the point other than the object point O through the first surface 11, the optical characteristics of the optical element are improved.

  Moreover, in this optical element, as shown in FIG. 3, you may form between the 1st surface 11 and the 2nd surface 12 as the diameter expansion part 13a expanded in a taper shape. Also in this case, unnecessary light incident on the second surface 12 through the first surface 11 from a point other than the object point O by applying a light shielding material or arranging a light shielding member on the outer surface portion of the enlarged diameter portion 13a. And the optical characteristics of the optical element can be improved.

  Furthermore, in this optical element, as shown in FIG. 4, a notch 13b is formed in the side surface of the medium between the first surface 11 and the second surface 12, and the notch 13b notch Unnecessary light may be blocked. In this case, a light shielding material may be applied or a light shielding member may be disposed in the notch 13b. In this case, the first surface 11 and the second surface 12 may be surfaces having the same diameter.

  Further, in this optical element, the first region 12a of the second surface 12 and the second region 11b of the first surface 11 are coated with a reflective material such as a metal material, for example, reflective films 14 and 15 made of aluminum. Is formed. These reflective films 14 and 15 improve the reflectance in the first region 12 a of the second surface 12 and the second region 11 b of the first surface 11.

In this optical element, since the interface between the reflective films 14 and 15 and the medium forming the optical element is a reflective surface, the outer surfaces of the reflective films 14 and 15 are heat, radicals, plasma, electromagnetic waves, air currents, and dust. Even if it is damaged or dirty due to the above, the optical characteristics are not deteriorated. Further, in this optical element, even if the surface shapes of the outer surfaces of the reflective films 14 and 15 are rough, the optical in the first region 12a of the second surface 12 and the second region 11b of the first surface 11 are optical. characteristic is not degraded.

Further, the reflective film 14 formed on the second region 11 b of the first surface 11 is protected by a protective layer 14 a formed on the outer surface side of the reflective film 14. The protective layer 14a is formed over a wider area than the reflective film 14 so as to protect the surface portion and the outer peripheral edge of the reflective film 14, and the outer peripheral side is bonded to the first surface 11 of the optical element. ing.

The protective layer 14a has at least one of heat resistance, plasma resistance, electromagnetic wave resistance, corrosion resistance, corrosion resistance, and touch resistance. That is, the protective layer 14a protects the reflective film 14 from damage such as corrosion, corrosion, contact, etc. caused by heat, radicals, plasma, electromagnetic waves and dust.

Examples of the material forming such a protective layer 14a include chromium (Cr), magnesium fluoride (MgF ₂ ), silicon dioxide (SiO ₂ ) in view of characteristics such as heat resistance and affinity for a medium such as synthetic quartz. ₂ ), zirconia dioxide (ZrO ₂ ), titanium oxide (TiO ₂ ), alumina (Al ₂ O ₃ ) and the like are preferable. The protective layer 14a may be a single layer film made of any of these materials, or may be a multilayer film made of two or more of these materials.

The protective layer 14 a may be formed over the entire first surface 11. In this case, the protective layer 14a can have a function of an antireflection film for light incident on the first region 11a of the first surface 11. Thus, in order for the protective layer 14a to have the function of an antireflection film, the thickness of the protective layer 14a has a certain relation to the wavelength λ of incident light, for example, [nλ / 4]. It is necessary to.

Further, as shown in FIG. 5, in this optical element, the protective layer 14a is made of the same material as the medium constituting the optical element, and the protective layer 14a has a sufficient thickness and has a first surface 11. It may be formed over the entire surface.

In this case, the protective layer 14a may be bonded to the first surface 11 by welding or the like with the reflective film 14 interposed therebetween. In this case, the object point side surface of the protective layer 14a is preferably a concave spherical surface with the object point O as the center of curvature. In this case, the joint surface between the protective layer 14a and the first surface 11 does not have to be a concave spherical surface with the object point O as the center of curvature, and thus may be a flat surface or the shape of the reflective film 14 ( That is, the surface shape of the second region 11b of the first surface 11 can be a desired shape.

  In this optical element, the first region 12a of the second surface 12 is preferably a spheroid with the object point O as the focal point. Since the first region 12a of the second surface 12 is a spheroid, the light emitted from the first focal point of this spheroid is focused on the second focal point without any aberration, so that a good result is obtained. Image characteristics can be realized.

  In this optical element, the second region 11b of the first surface 11 is preferably a convex reflecting surface. Since the second region 11b of the first surface 11 is a convex reflecting surface, the position of the image point I can be made sufficiently far behind the second surface 12, and the light at the image point I Detection and the like can be easily performed.

Since such an optical element is an integral optical element, there is little change in the refractive index due to temperature variation, density variation, and pressure variation of the medium between the first surface and the second surface, and turbulent flow between the surfaces. There is no risk of gas species fluctuations or dust intrusion. In other words, this optical element has very little deterioration in optical properties due to the effects of heat, radicals, plasma, electromagnetic waves, air currents and dust. It is possible to maintain good optical characteristics even in an environment in which the optical film can come into contact with the liquid crystal.

In addition, this optical element can be easily manufactured with high accuracy even when the diameter of the second surface 12 is about 1 mm. As described above, ignition or discharge used in a heat engine or plasma device is possible. The size can be reduced to such an extent that it can be incorporated into a plug. Furthermore, since this optical element does not cause aberrations on the transmission surface and the reflection surface, it can be easily produced with a high numerical aperture (NA). When the diameter of the second surface 12 is about 1 mm, the distance from the object point O to the first surface 11 (working distance) is about 0.8 mm, and the distance from the second surface 12 to the image point I (back) A lens having a focus of about 0.3 mm can be created. Further, when the diameter of the second surface 12 is 3.6 mm, for example, the distance (working distance) from the object point O to the first surface 11 is 3.0 mm, and the distance from the second surface 12 to the image point I is, for example. A distance (back focus) of 1.2 mm can be created.

Further, in this optical element 10, light from multiple measurement points is reflected by the first surface 11 and the second surface 12 , passes through the second region 12 b of the second surface 12, and then converges. The light is focused and imaged on each of the plurality of light collecting points.

  Further, as shown in FIG. 6, the optical element is configured such that the first region 12a of the second surface 12 is a surface made of a concave surface divided into a plurality of parts having different curvature centers or focal points. Also good. In this case, since each part of the first region 12a of the second surface 12 has a different focal point, a plurality of image points can be formed by one optical element.

  Further, the reflective film 15 in the first region 12a of the second surface 12 may be formed of a dielectric film or the like, for example, to have spectral characteristics with respect to the reflectance. In this case, it is possible to configure an optical element that forms an image by reflecting only light in a specific wavelength band.

  Furthermore, when the first region 12a of the second surface 12 is configured as a surface made of a concave surface divided into a plurality of portions having different curvature centers or focal points, the spectral reflection characteristics of these portions are different from each other. It can also be.

[Configuration of optical system for optical sensor]
The optical system for the optical sensor in the ignition or discharge plug used in the heat engine or plasma apparatus according to the present invention is composed of the above-described optical element and optical fiber 16, as shown in FIG. can do.

  This optical sensor optical system is configured such that an incident end face 16a of an optical fiber 16 is disposed at an image point I of an optical element. The outgoing light from the optical element enters the incident end face 16 a of the optical fiber 16 through the stray light stop 17.

  In this optical sensor optical system, light from a region conjugate with the incident end face 16a of the optical fiber 16, that is, a region corresponding to the diameter of the optical fiber 16 around the object point O is passed through the optical fiber 16. Can be detected.

Further, in this optical sensor optical system, as shown in FIG. 7, a plurality of optical fibers 16 are arranged in a two-dimensional form (matrix form) with their respective incident end faces 16a within the region including the image point I. By arranging, the region to be detected can be a two-dimensionally arranged region in the region including the object point O. That is, the respective entrance end faces 16a of the optical fibers 16, light from a plurality of object points _{O 12, O 2, O 3} ··· O n is incident correspondingly.

  Further, by moving the plurality of optical fibers 16 arranged in this way in the approaching / separating direction with respect to the optical element, or by setting the position of the incident end face 16a of each optical fiber 16 to a position where the distance to the optical element is different. The region to be detected can be a three-dimensionally arranged region in the region including the object point O.

  In addition, as shown in FIG. 8, this optical sensor optical system is such that the image point in the optical element is formed on the second region 12a of the second surface 12, or as shown in FIG. The image point in the element is formed at a position closer to the first surface 11 than the second surface 12, and the incident end surface 16a of the optical fiber 16 is placed on the second region 12a of the second surface 12 of the optical element, or The image point may be arranged at the position of the image point closer to the first surface 11 than the second surface 12. In this case, light from an object point that is a conjugate region with respect to the incident end face 16 a of the optical fiber 16 can be directly introduced into the optical fiber 16 from the optical element.

  When a plurality of optical fibers 16 are used, the incident end faces of the plurality of optical fibers 16 are respectively arranged corresponding to the plurality of condensing point positions by the optical element. Further, the condensing points and the optical fibers corresponding to these measurement points can be arranged in a one-dimensional array, a matrix-like two-dimensional array, or a three-dimensional array. -An optical measuring device capable of measuring and observing a chemical reaction state can be configured.

  As for the setting and selection of these optical systems for optical sensors and optical fibers, a suitable one can be selected as appropriate based on the position resolution and measurement volume required for measurement, the interval between multiple points, and the like. . For example, the working distance of the optical system for the optical sensor may be a short-distance focus (150 mm or less), an intermediate focus (150 to 600 mm), or a long-distance focus (600 mm or more). Various settings can be made.

  Further, the optical system for the optical sensor receives light so that a plurality of light receiving portions are positioned at the position where the incident end face 16a of the optical fiber 16 is disposed in the above description, that is, at the position of the image point in the optical element. You may comprise by arrange | positioning an element. In this optical sensor optical system, it is not necessary to use an optical fiber.

  In this optical sensor optical system, the light receiving element can detect light from a plurality of image points by the optical element at a plurality of measurement points on the object point side of the optical element. The light receiving portions of the light receiving element can be arranged in a one-dimensional arrangement, a two-dimensional arrangement in a matrix, or a three-dimensional arrangement corresponding to a plurality of measurement points.

[Configuration of optical system for optical sensor in ignition or discharge plug used in heat engine or plasma device]
As shown in FIG. 10, the optical system for an optical sensor configured as described above is accommodated in a case 20 so that the ignition or discharge plug used in the heat engine or plasma apparatus according to the present invention is obtained. Incorporated in Nobuko 1 The case 20 is formed of a material such as stainless steel in a cylindrical shape whose inner diameter is substantially equal to the diameter of the second surface 12 of the optical element. An opening 20 a having an inner diameter substantially equal to the diameter of the first surface 11 of the optical element is formed at the tip of the case 20.

  In the case 20, the optical element 10 is housed on the distal end side so that the first surface 11 faces outward from the opening 20a. A ferrule 22 that holds the optical fiber 16 is inserted through the O-ring 21 on the rear surface side of the optical element 10. Then, the rear end side of the case 20 is closed by screwing the cap 23 therein. The optical fiber 16 is drawn out to the rear side through a through hole formed along the central axis of the ferrule 22 and the cap 23.

  As shown in FIG. 11, the optical element 10 and the optical fiber 16 accommodated in the case 20 are held by the case 20 and the ferrule 22 so as to have a predetermined positional relationship with each other. The opening facing the incident end face 16a of the optical fiber 16 on the distal end side of the ferrule 22 has a function as an aperture stop for the incident end face 16a of the optical fiber 16 by appropriately setting the opening diameter and the opening shape. Can be.

The optical system for the optical sensor thus housed in the case 20 can be incorporated into the insulator 1 of the ignition or discharge plug used in the heat engine or the plasma device together with the case 20. Heat engine or ignition used in the plasma apparatus, or insulators optical system for an optical sensor incorporated in one of the discharge plug, the heat engine or a semiconductor manufacturing device, a physical-chemical reactions in the plasma apparatus such as medical devices For example, a predetermined local area of combustion or plasma reaction is set as an object point O, and light from a region around the object point O can be guided to a spectroscope described later via an optical fiber 16. It is possible to perform measurement of light by physical / chemical reaction in the predetermined local area , for example, combustion or plasma reaction.

  In this optical sensor optical system, the region (object point) to be detected is moved relative to the optical element 10 by moving the position of the incident end face 16a of the optical fiber 16 with respect to the optical element 10 described above. Can be moved. In this case, slight spherical aberration and coma aberration may occur in the light from the light detection region to the incident end face 16a of the optical fiber 16, but this aberration amount is in a range smaller than the diameter of the optical fiber 16. If it is, the influence on the detection result of light is small.

[Embodiment of optical measuring device]
The optical measurement apparatus according to the present invention is an optical measurement apparatus having an optical system for an optical sensor that can detect light from multiple points as described above. In this optical measuring device, physical and chemical reactions in plasma devices such as various heat engines, semiconductor manufacturing devices, and medical equipment, for example, self-luminescence or plasma emission in one or more local areas of combustion or plasma reaction. Measurement of light by physical / chemical reactions such as fluorescence, phosphorescence, scattered light, and radiant light can be performed simultaneously or sequentially.

That is, this optical measuring device is a physical / chemical reaction region in a heat engine such as an engine, or a plasma device such as a semiconductor manufacturing device or a medical device , for example, an occurrence point of a physical / chemical reaction in a combustion chamber or a plasma reaction region. Movement (flame zone or reaction spatial movement), physical / chemical reaction state change during movement (temporal change), physical / chemical reaction area , for example, physicochemical reaction characteristics in combustion chamber or plasma reaction area Can be measured.

The optical measuring device, the heat engine according to the present invention described above, or ignition used in the plasma apparatus or is configured to include a discharge plug, the heat engine or ignition used in the plasma apparatus, or, the discharge plug It is used in place of an existing spark plug or discharge plug in a heat engine such as an engine, or in a plasma apparatus such as a semiconductor manufacturing apparatus or a medical device. The ignition or discharge plug used in the above-described heat engine or plasma device according to the present invention has the same size and outer shape as the existing spark plug in the heat engine or plasma device. because there, the heat engine or, without the modification of the plasma device, the heat engine or, may be attached to the plasma device.

In this embodiment, as shown in FIG. 12, the optical measuring device according to the present invention is shown attached to the gasoline reciprocating engine 201, and the ignition used for the heat engine or plasma device according to the present invention , or, the optical element 10 of the optical system for an optical sensor of the discharge plug, the first surface 11 physical and chemical reaction area 202, for example, is placed Mase extraordinary in the combustion chamber and a plasma reaction region. The optical sensor optical system collects light at a local measurement point emitted by a physical / chemical reaction region 202 , for example, a physical / chemical reaction in the combustion chamber or plasma reaction region , for example, combustion or plasma reaction. Thus, the light is guided to the optical fiber 16.

In the gasoline reciprocating engine 201, intake air that has passed through the air cleaner 203 and the flow meter 204 is introduced into the physical / chemical reaction region 202 , for example, the combustion chamber or the plasma reaction region , through the intake manifold 205. This intake air is mixed with fuel , such as gasoline, in the intake manifold 205. This fuel is sent from the fuel tank 206 to the intake manifold 205 via the fuel filter 207, the fuel pump 208, and the regulator 209. That is, a mixture of air and fuel is introduced into the physical / chemical reaction region 202 , for example, the combustion chamber or the plasma reaction region . The physical and chemical reaction area 202, for example, in a combustion chamber and a plasma reaction zone, the gas mixture is physical-chemical reaction, for example, cause combustion or plasma reaction, physical and chemical reactions, for example, the exhaust gas after combustion and plasma reaction Is discharged from the exhaust manifold 210.

Energy due to the physical / chemical reaction of the air-fuel mixture , for example, combustion or plasma reaction , moves the piston 211. The movement of the piston 211 is taken out as a rotational force through the crankshaft 212. A pressure sensor 213 is installed in the physical / chemical reaction region 202 , for example, in a combustion chamber or a plasma reaction region .

  In this embodiment, a single-cylinder engine having a displacement of 223 cc (bore / stroke: 70 mm × 58 mm) and a compression ratio of 9.5 is used as the gasoline reciprocating engine 201.

In the ignition or discharge plug used in the heat engine or plasma device according to the present invention attached to such a gasoline reciprocating engine 201, the optical system for the optical sensor has a physical / chemical reaction such as combustion or plasma. The light at the local measurement point generated by the reaction is made incident on the spectroscope 30 or the spectroscopic unit 31 serving as the spectroscopic means via the optical fiber 16.

The spectroscope 30 is a device that divides incident light according to which of three types of radicals (OH ^* , CH ^*, and C ₂ ^* ) emits light. For example, as shown in FIG. By using the diffraction grating 30a as an element, OH ^* , CH ^* and C ₂ ^* which are particularly important intermediate products in physical and chemical reactions of hydrocarbons , for example, combustion and plasma reactions (in plasma reactions, H, O, The device is configured to measure light components from N, N ₂ , OH, etc.). Further, regarding C ₂ ^* , measurement may be performed for two components (C ₂ ^* (1) and C ₂ ^* (2)). OH emission is observed in response to physical / chemical reactions such as combustion, plasma reaction and high temperature gas, and CH ^* / C ₂ ^* emission is highly correlated with the physical / chemical reaction region (reaction zone). ₂ ^* Luminescence is strongly related to reaction and soot formation. Therefore, by measuring the light emitted from these radicals, it is possible to obtain important information on physical / chemical reactions such as combustion and plasma reactions. Further, by performing simultaneous measurement of two or more wavelength components for the same radical (for example, C ₂ ^* ), information on temperature and the like can be obtained.

In the spectroscope 30, a two-dimensional light image by light can be measured or imaged by a position detection type optical measuring element. An image sensor 36 such as a CCD (solid-state imaging device) capable of high-speed operation can be used as the high-sensitivity and high-speed position detection type optical measurement element.

  Further, as the position detection type optical measurement element, an image sensor 36 is used, for example, an image tube such as an image intensifier connected to a CCD, or an image in which an electron-implanted CCD is used on a fluorescent screen. A tube or the like can also be used.

In addition, as described above, such a position detection type optical measuring element is a part of the optical system for the optical sensor, and is not directly guided by the optical fiber array, but directly on the light collecting surface of the optical element. It is also possible to arrange them, or to arrange them on the exit end face of the optical fiber array. In addition, the light from a plurality of points guided by the optical fiber array is simultaneously spectroscopically detected by the position detection type optical measuring element as described above in which an optical filter (interference filter or the like) is arranged. The optical measuring device can be downsized.

Further, in this spectroscope 30, as shown in FIG. 13, in correspondence with the light by OH ^* , CH ^* , C ₂ ^* (1) and C ₂ ^* (2) dispersed by the diffraction grating 30a, In place of the image sensor 36, four light receiving elements 36a to 36d such as a multi-anode type photomultiplier tube may be arranged to perform high resolution spectroscopic measurement.

In the spectroscope 30, the light introduced by the optical fiber 16 is wavelength-resolved by the diffraction grating 30a, and light in the wavelength band of each light component is incident on the corresponding light receiving elements 36a to 36d. As shown in FIG. 13, the light receiving elements 36 a to 36 d are arranged such that the direction of wavelength division coincides with the direction of wavelength decomposition, and thereby, the selected wavelength band is further wavelength-resolved with higher resolution. Te measured, rather than bamboo that measures the intensity of each light component, the fine structure spectrum is measured at a high speed and a time series, the physical and chemical reactions, for example, more of such temperature and pressure by the combustion or plasma reaction Information can be obtained.

  In the case of measurement using an optical filter such as an interference filter, the selected wavelength band is measured with a wide bandwidth of several nm to several tens of nm. However, in temperature analysis and detailed chemical reaction analysis, optical spectrum measurement with a wavelength resolution of 1 nm or less may be required. Optical spectrum time-series measurement with a high wavelength resolution of about 0.1 to 0.5 nm is achieved by high-resolution spectroscopy using a spectroscopic element (diffraction grating) and a light-receiving element (multi-anode type photomultiplier tube) as described above. As a result, it is possible to realize time series measurement of local temperature, which has been difficult in the past.

  In addition, by using a multi-anode type photomultiplier tube as the light receiving elements 36a to 36d, the apparatus can be significantly downsized compared to a case where a plurality of light receiving elements are arranged. The application of such a multi-anode type photomultiplier tube is not limited to the case where a spectroscopic element (diffraction grating) is used. For example, it can be used in combination with an optical filter (interference filter).

  Outputs from the image sensor 36 or the light receiving elements 36a to 36d are sent to a computer 40 as signal processing means as shown in FIG. 12, and various signal processing described later is performed.

The spectroscopic unit 31 is also the incident light, the three radicals ^(OH *, CH ^* and _C ^{2 *,} Further, in the plasma _{reaction, H, O, N, N} 2, OH , etc.) of the It is a device that divides according to which light emission. That is, the spectroscopic unit 31 is a device that selects and measures a light component from a substance to be observed among the light guided by the optical fiber 16. As shown in FIG. 14, the spectroscopic unit 31 is configured to measure light components from OH ^* , CH ^*, and C ₂ ^* . Further, regarding C ₂ ^* , measurement may be performed for two components (C ₂ ^* (1) and C ₂ ^* (2)).

Spectroscopic unit 31, ^{respectively,} OH ^*, CH _*, is configured ^{C 2} * (1) and _C ² * ⁽²⁾ according to a first to fourth spectral element 31a~31d corresponds to the light The The selection wavelengths of the spectroscopic elements 31a to 31d are the wavelength 306.4 nm and the half-value width 10 to 15 nm for the first spectroscopic element 31a, and the wavelength 431.5 nm and the half-value width 1 to 2 nm for the second spectroscopic element 31b. In the third spectroscopic element 31c, the wavelength 473.3 nm and the half-value width 1 to 2 nm are set, and in the fourth spectroscopic element 31 d, the wavelength 516.5 nm and the half-value width 1 to 2 nm are set.

The first spectroscopic element 31a includes a dichroic mirror 32a, an optical filter 33a such as an interference filter, and a light receiving element 34a serving as an optical measuring means such as a photomultiplier tube. The light separated from the incident light by the dichroic mirror 32a is incident on the optical filter 33a, and the light component having the selected wavelength corresponding to the light from OH ^* is selected and transmitted, and is incident on the light receiving element 34a. The light component incident on the light receiving element 34 a is photoelectrically converted and multiplied by the light receiving element 34 a, and is output to the signal amplifying means (amplifier) 35. The configurations of the second to fourth spectroscopic elements 31b to 31d are the same as those of the first spectroscopic element 31a, but the respective selection wavelengths are set to the wavelengths of the corresponding light components.

  As shown in FIG. 12, the output from the signal amplifying means 35 is sent to a computer 41 serving as a signal processing means for various signal processing described later.

  In this embodiment, in particular, by using the light receiving elements 34a to 34d such as photomultiplier tubes capable of high-speed operation for optical measurement, high-speed time-series measurement can be performed. Correspondingly, the measurement sampling rate can be set to about 100 kHz to several hundred MHz, for example.

  In addition, when performing measurement for a plurality of chemical species at the same time, the conventional measurement method using a laser requires a laser light source for each chemical species, which increases the size and complexity of the apparatus. Measurement was difficult. In contrast, in the present invention, simultaneous measurement of a plurality of chemical species can be easily performed by using optical measurement.

Thus, in this optical measuring device, for example, light from a measurement point in a physical / chemical reaction region such as combustion or plasma reaction is measured by each light receiving element or the like via the optical sensor optical system 5. Is done. This light is emitted spontaneously due to H, O, N, N ₂ , OH, etc. in the plasma reaction, such as OH ^* , CH ^* , C ₂ ^* in physical and chemical reactions such as combustion and plasma reaction. Physical / chemical reaction luminescence, which has a correlation with reaction intensity of physical / chemical reaction or heat generation, and is a direct indicator of physical / chemical reaction state.

  Here, since the physical / chemical reaction luminescence includes ultraviolet rays, it is desirable to use an ultraviolet transmissive quartz fiber as the optical fiber 16. Moreover, although the position resolution of measurement can be increased by reducing the core diameter of the optical fiber 16, on the other hand, if the core diameter is reduced, the amount of light to be guided decreases, so depending on the conditions required for measurement. Need to choose the best one.

  For example, when the core diameter is 200 μm, the measurement volume is about 1.6 mm × φ0.2 mm. This measurement volume is in the same order as the measurement volume of a laser Doppler velocimeter (LDV) or a phase Doppler velocimeter (PDA).

  In the case where a plurality of optical fibers 16 are used, the emission end face of each optical fiber 16 is connected to the spectroscope 30 or the spectroscopic unit 31, respectively, and the light from each measurement point is spectroscope 30 or spectroscopic. The light enters the unit 31. By configuring in this way, light from multiple points can be simultaneously measured using the spectroscope 30 or the spectroscopic unit 31 separately arranged for each, for example, in two dimensions in real time. It is possible to observe the physical / chemical reaction state and its change over time.

  In other words, this optical measurement device realizes local and time-series measurements of light at multiple points, thereby obtaining information on the fine structure of physical and chemical reactions such as plasma, fluorescence, combustion, and plasma reaction. Is possible.

[Measurement procedure in optical measuring device]
A lot of important information can be obtained by using the measuring device as described above for analysis of physical and chemical reaction in physical and chemical reaction devices such as plasma devices such as various heat engines, semiconductor manufacturing devices and medical devices. Can do. For example, in an automobile engine, a physical / chemical reaction , for example, a combustion or plasma reaction, forms a physical / chemical reaction zone having an order of 0.1 mm or less in width, and moves / propagates at a predetermined moving speed. . At this time, when light is measured at the measurement point, a rise (peak) of light intensity corresponding to the passage of the physical / chemical reaction zone is observed. It is possible to obtain information about the passage time from the peak time, the time required for passage from the peak width Δt, and the physical / chemical reaction intensity from the peak intensity.

  However, even if optical measurement as described above is performed, the width and moving speed cannot be obtained depending on the measurement at a single measurement point. By seeing the correlation, it is possible to obtain direct information about the physical / chemical reaction state and its temporal change for the first time. Further, for example, by setting the multipoint to a matrix-like two-dimensional configuration or a three-dimensional configuration, it is possible to efficiently obtain a lot of information such as a physical / chemical reaction moving direction.

In addition, by performing high-resolution measurement, it is possible to elucidate a finer structure such as the reaction intensity distribution inside the physical / chemical reaction zone. In addition, one or a plurality of local air / fuel ratios (A / F: Air / Fuel), turbulent structure and the number of local damkellers related to these, etc. Obtain a lot of information such as time-series fluctuations (cycle fluctuations), abnormal reaction states such as knocking, information on the formation of flames or reaction nuclei in one or more local areas, temperature information on flames or reaction nuclei, etc. Can do.

That is, in this optical measuring device, as shown in FIG. 15, the computer 40 is based on optical information obtained through an optical sensor optical system for ignition or discharge plug used in a heat engine or plasma device. , 41, various measurements can be performed. That is, from the optical information obtained through the optical system for photosensors, the spectroscope 30 can perform time series measurement of the radical emission spectrum (FIG. 16). Further, from the optical information obtained through the optical system for the optical sensor, the spectral unit 31 can perform time series measurement of the emission intensity from the characteristic radicals (OH ^* , CH ^* and C ₂ ^* ) (FIG. 17).

Further, from the time series measurement of emission intensity from characteristic radicals (OH ^* , CH ^* and C ₂ ^* ), the arrival speed of the flame zone or reaction zone and the thickness of the flame zone or reaction zone can be measured ( FIG. 18). Further, the average value and time-series fluctuation (cycle fluctuation, etc.) of the emission intensity peak from each radical are obtained (FIG. 19), and the average value and time-series fluctuation (cycle fluctuation, etc.) of the peak ratio of emission intensity from each radical are obtained. ) Is obtained (FIG. 20). Then, by using the calibration curve (FIG. 23), the average value of the local air-fuel ratio and time series fluctuation (cycle fluctuation, etc.) are obtained (FIG. 24).

  On the other hand, the average value of the thickness of the flame zone or reaction zone and the time series fluctuation (cycle fluctuation, etc.) can be measured (FIG. 29), and the average value of the arrival speed of the flame zone or reaction zone and the time series fluctuation (cycle). Variation, etc.) can be measured (FIG. 30).

(1) Time-series measurement of radical emission spectrum The time-series measurement result of the radical emission spectrum is based on the emission spectrum in the physical / chemical reaction region in a heat engine or a plasma apparatus such as a semiconductor manufacturing apparatus or a medical device. As shown in FIG. 4, the horizontal axis represents wavelength, the vertical axis represents emission intensity, and depth represents time. In addition, the time-series measurement results of the radical emission spectrum are measured by a pressure sensor based on the emission spectrum in the physical / chemical reaction region in a heat engine or plasma apparatus, with the horizontal axis as time, as shown in FIG. The pressure signal in the physical / chemical reaction region and the emission intensity from each radical (OH ^* , CH ^* and C ₂ ^* ) can be shown in a related state. Here, the results of 5 cycles of engine physical / chemical reaction , for example, combustion and plasma reaction cycle are shown.

(2) Measurement of arrival speed of flame zone or reaction zone and thickness of flame zone or reaction zone Measurement of arrival rate of flame zone or reaction zone and thickness of flame zone or reaction zone is as shown in FIG. The distance between the ignition (discharge) part and the measurement point is set as d, and is obtained based on the time t ₁ from the ignition (ignition timing) to the rise of the flame emission spectrum and the initial peak width t ₂ of the flame emission spectrum. Can do. That is, the arrival speed of the flame zone can be obtained by d / t ₁ . Further, the thickness of the flame zone can be obtained by d · t ₂ / t ₁ .

(3) Average peak of emission intensity from each radical and time series fluctuation (cycle fluctuation, etc.)
The average value and time-series fluctuation (cycle fluctuation, etc.) of the peak of the emission intensity from each radical trace the temporal change of the peak intensity of light from OH ^* , CH ^* and C ₂ ^* as shown in FIG. Can be measured. FIG. 19 shows the cycle fluctuation of the emission intensity peak. In FIG. 19, the horizontal axis indicates the cycle, the vertical axis indicates the peak intensity, the dot indicates the peak intensity of the continuous cycle, and the solid line indicates the average value. The bar graph on the right side shows a peak intensity histogram, and the numerical values in the figure show the average value and standard deviation of the peak intensity.

(4) Average value of peak ratio of emission intensity from each radical and time series fluctuation (cycle fluctuation, etc.)
As shown in FIG. 20, the average value of the peak ratio of the emission intensity from each radical and the time series fluctuation (cycle fluctuation, etc.) are the ratios of the peak intensity of light from OH ^* , CH ^* and C ₂ ^* (C ₂ ^* / CH ^* , C ₂ ^* / OH ^* , OH ^* / CH ^* ) can be measured by tracing the temporal change. FIG. 20 shows the cycle variation of the ratio of the emission intensity peak. In FIG. 20, the horizontal axis indicates the cycle, the vertical axis indicates the ratio of the peak intensity, the dot indicates the ratio of the peak intensity of successive cycles, and the solid line indicates the average value. The bar graph on the right side shows a histogram of the peak intensity ratio, and the numerical values in the figure show the average value and standard deviation of the peak intensity ratio.

FIG. 21 shows the relationship between the peak intensity of light from each radical and the engine speed. In FIG. 21A, the horizontal axis indicates the engine speed, the vertical axis indicates the peak intensity, and in FIG. 21B, the horizontal axis indicates the engine speed, and the vertical axis indicates the peak intensity ratio. The local air / fuel ratio is 14.7. In (a) of FIG. 21, when the engine speed increases, the flame emission becomes stronger, and the peak intensity of light from OH ^* , CH ^* and C ₂ ^* increases. In FIG. 21 (b), the intensity ratio of light from each radical is close to constant even when the engine speed changes. From this, it can be seen that if the relative ratio is used instead of the signal intensity, it can be one parameter regardless of the rotation speed.

FIG. 22 shows the relationship between the peak intensity of light from each radical and the engine speed when the local air-fuel ratio is 16.0.
22A, the horizontal axis indicates the engine speed, the vertical axis indicates the peak intensity, and in FIG. 22B, the horizontal axis indicates the engine speed, and the vertical axis indicates the peak intensity ratio. In FIG. 22A, when the engine speed increases, the flame emission becomes stronger, and the peak intensity of light from OH ^* , CH ^* and C ₂ ^* increases. In FIG. 22 (b), the intensity ratio of light from each radical is close to constant even when the engine speed changes. From this, it can be seen that if the relative ratio is used instead of the signal intensity, it can be one parameter regardless of the rotational speed and even under different conditions of the local air-fuel ratio (fuel concentration).

(5) Calibration curve FIG. 23 shows the relationship between the peak ratio of the emission intensity from each radical and the air / fuel ratio (A / F: Air / Fuel) as a setting condition, and the air / fuel ratio (A / F) with the horizontal axis set. ), And the vertical axis represents the peak ratio of the emission intensity from each radical. When the engine speed is constant (for example, 7000 rpm), the relationship between the beak intensity of light from radicals and the set air-fuel ratio (A / F) depends on each radical (OH ^* , CH ^* and C ₂ ^* ). Since these are different, when these ratios are taken, three curves are obtained as shown in FIG. In FIG. 23, it can be seen that the value of the air-fuel ratio (A / F) can be calculated from the peak ratio of the emission intensity from each radical on the vertical axis. That is, the curve shown in FIG. 23 is a calibration curve for calculating the local air-fuel ratio (A / F).

(6) Average value of local air-fuel ratio and time series fluctuation (cycle fluctuation, etc.)
As shown in FIG. 24, the average value of local air-fuel ratio and time-series fluctuation (cycle fluctuation, etc.) are shown in FIG. 23, with the horizontal axis representing the cycle and the vertical axis representing the local air-fuel ratio (A / F). It is obtained as a result of calculating the variation of the local air-fuel ratio (A / F) based on the emission intensity from each radical using the calibration curve.

In FIG. 23, the horizontal axis indicates the cycle, the vertical axis indicates the calculated local air-fuel ratio (A / F), the dots indicate the continuous local air-fuel ratio (A / F), and the solid line indicates the average value. The bar graph on the right shows a histogram of the local air-fuel ratio (A / F), and the numerical values in the figure show the average value of the local air-fuel ratio (A / F) and the standard deviation. That is, FIG. 24 shows the cycle variation of the local air-fuel ratio (A / F) obtained by the optical engine for the photosensor built in the ignition or discharge plug used in the heat engine or plasma apparatus according to the present invention. Is shown. The set value of the air-fuel ratio (A / F) was 14.7, and the average value of the local air-fuel ratio (A / F) obtained using the calibration curve was 14.8 to 14.9.

  FIG. 25 shows the correlation between the initial combustion period (ΔCA 10%) and the average effective pressure (IMEP).

In FIG. 25, the horizontal axis represents the mean effective pressure (IMEP), and the vertical axis represents the initial combustion period (ΔCA 10%) obtained from the light emission from each radical (OH ^* , CH ^* and C ₂ ^* ). The initial combustion period (ΔCA 10%) indicates the time from the ignition until the flame emission intensity reaches the peak intensity of 10%. The relationship between the initial flame information measured by the optical engine for the optical sensor built in the ignition used for a heat engine or a plasma apparatus or a discharge plug, and IMEP measured by the pressure sensor is shown.

  FIG. 26 shows changes in the initial combustion period depending on the engine speed.

In FIG. 26, the horizontal axis represents the engine speed, and the vertical axis represents the initial combustion period obtained from the light emission signal from CH ^* . It shows the relationship between the engine speed and the ignition information used in the heat engine or plasma device , or the initial flame information measured by the optical system for photosensors built in the discharge plug.

  FIG. 27 shows the relationship between the initial combustion period and the set air-fuel ratio (A / F).

In FIG. 27, the horizontal axis indicates the set air-fuel ratio (A / F), and the vertical axis indicates the initial combustion period obtained from the light emission signal from each radical (OH ^* , CH ^*, and C ₂ ^* ). It shows the relationship between the set air-fuel ratio (A / F) and the initial flame information measured by the optical system for photosensors built in the ignition or discharge plug of the heat engine or plasma device.

FIG. 28 shows the cycle variation of local air-fuel ratio (A / F) and mean effective pressure (IMEP).

In FIG. 28, the horizontal axis is the cycle, the vertical axis is the ignition used for the heat engine or plasma device , or the local air-fuel ratio (A / F) measured by the optical system for the optical sensor built in the discharge plug and Average effective pressure (IMEP) is shown. Cycle variations of local air-fuel ratio (A / F) and mean effective pressure (IMEP) measured by an optical system for an optical sensor built in an ignition or discharge plug used in a heat engine or plasma device are shown. .

(7) Measurement of average value of flame zone or reaction zone and time series fluctuation (cycle fluctuation, etc.) Measurement of average value of flame zone or reaction zone and time series fluctuation (cycle fluctuation, etc.) As shown in FIG. 29, it can be measured by tracing the temporal change in the thickness of the flame zone or reaction zone calculated based on the light from OH ^* , CH ^* and C ₂ ^* . FIG. 29 shows the cycle variation of the thickness of the flame zone. In FIG. 29, the horizontal axis indicates the cycle, the vertical axis indicates the thickness of the flame zone for each radical, the dots indicate the thickness of the flame zone of successive cycles, and the solid line indicates the average value thereof. The bar graph on the right shows a histogram of the thickness of the flame zone.

(8) Measurement of average value and time series fluctuation (cycle fluctuation, etc.) of arrival speed in flame zone or reaction zone Measurement of average value and time series fluctuation (cycle fluctuation, etc.) of flame zone or reaction zone As shown at 30, it can be measured by tracing the temporal change in the arrival speed of the flame zone or reaction zone calculated based on the light from OH ^* , CH ^* and C ₂ ^* . FIG. 30 shows cycle fluctuations in the arrival speed of the flame zone. In FIG. 30, the horizontal axis indicates the cycle, the vertical axis indicates the arrival speed of the flame zone for each radical, the dots indicate the arrival speed of the flame zone of successive cycles, and the solid line indicates the average value. The bar graph on the right shows a histogram of the arrival speed of the flame zone.

(9) Abnormal reaction detection such as knocking and measurement of temperature information of flame or reaction nucleus Further, in this optical measurement device, one or a plurality of physical / chemical reaction regions , for example, a combustion chamber or a plasma reaction region Abnormal reactions such as knocking in a heat engine or a plasma device can also be detected based on the local light intensity of the radical and its spatial and temporal distribution.

An abnormal reaction such as knocking is detected based on a signal in which light emission from OH ^* (OH radical) is detected. That is, when an abnormal reaction such as knocking occurs, the emission intensity from OH ^* increases due to instantaneous combustion or plasma reaction, so that the emission intensity from OH ^* increases rapidly or other radicals (CH An abnormal reaction such as knocking can be detected by comparing the intensity ratio with ^* , C ₂ ^* ), radical generation , or peak position. Further, by performing measurement in a plurality of local areas, it is possible to identify the position of an abnormal reaction such as knocking by the time lag of detecting an abnormal reaction such as knocking in each local area.

Further, in this optical measurement device, physical / chemical reaction regions , for example, based on the light intensity of radicals in one or a plurality of local combustion chambers or plasma reaction regions and their spatial / temporal distribution, Temperature information of a chemical reaction region , for example, a flame or reaction nucleus in one or a plurality of local combustion chambers or plasma reaction regions , or flame, gas, or plasma temperature can also be measured.

  The temperature information of the flame or the nucleus of the reaction can be calculated from a detailed spectrum, from a Boltzmann plot, a characteristic spectrum intensity ratio, a broadening of the spectrum line width, and the like.

Furthermore, in the optical measurement device according to the present invention, when applied to a plasma device, the emission intensity of different wavelengths in one or a plurality of local areas in the physical / chemical reaction region is measured at the same point. You can also.

  Further, in the optical measurement device according to the present invention, when applied to a plasma device, the plasma characteristics are determined from the light intensity ratios of different wavelengths, the line width of the spectrum, or the shift amount in the plasma field in the physical / chemical reaction region. The amount can be identified.

And in the optical measurement device according to the present invention, one of the physical and chemical reaction regions , or one of the physical and chemical reaction regions based on the light intensity of the radicals in a plurality of local areas and their spatial and temporal distribution , Alternatively, the composition / concentration of gas in a plurality of local areas can be measured.

  In addition, the application object of various measurement and detection as described above is not limited to an automobile engine, but is a spray combustion type furnace or boiler using an oil burner, an aircraft, a gas turbine used for thermal power generation, a ram, or a scram. Applicable to various heat engines such as jet engine combustors, water heaters, fuel cells, hydrogen engines, physical / chemical reaction devices such as semiconductor manufacturing devices, plasma devices such as medical devices, and sterilization and sterilization devices be able to.

Further, it becomes possible to obtain more information by using a conventional physical / chemical reaction state measurement method other than optical measurement. In particular, since the optical system for the optical sensor in the optical measurement device according to the present invention has a very high light collection rate compared with a normal lens system, the light collection system for laser measurement of physical and chemical reactions. it is also possible to apply as a.

For example, the measurement volume of the optical measurement according to the present invention is comparable to or less than that of a laser Doppler velocimeter (LDV) or a phase Doppler velocimeter (PDA). By performing the above, it is possible to estimate a local physical / chemical reaction , for example, a combustion or plasma reaction rate , from the local gas flow velocity and the moving speed of the physical / chemical reaction. In addition, the measurement volume of laser Doppler velocimeter (LDV) and phase Doppler velocimeter (PDA) generally has a length of about several hundreds of nanometers to several tens of millimeters in the direction of the optical axis. By performing simultaneous measurement as the type setting, it is possible to measure the distribution of flow velocity measurement values in the measurement volume of a laser Doppler velocimeter (LDV) or a phase Doppler velocimeter (PDA). Moreover, it becomes possible to acquire the knowledge about a chemical reaction mechanism by using together the measurement by LIF method.

It is a side view which shows the structure of the ignition used for the heat engine which concerns on this invention , or a plasma apparatus , or a discharge plug. It is a sectional side view which shows the structure of the optical system for the ignition used for the said heat engine or a plasma apparatus , or a discharge plug. It is a sectional side view which shows the other example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the further another example of a structure of the said optical system for optical sensors. It is a sectional side view which shows the principal part of the ignition used for the said heat engine or a plasma apparatus , or a discharge plug. It is a sectional side view which shows the principal part of the optical system for the ignition or discharge plug used for the said heat engine or a plasma apparatus. It is a block diagram which shows the structure of the optical measuring device which concerns on this invention. It is a perspective view which shows the structure of the spectrometer in the said optical measuring device. It is a side view which shows the structure of the spectroscopy unit in the said optical measuring device. It is a flowchart which shows the measurement procedure in the said optical measurement apparatus. It is a graph which shows the time series measurement result of the radical emission spectrum in the said optical measuring device. It is a graph which shows the time series measurement result of the radical emission spectrum in the said optical measurement apparatus for every cycle. It is a graph which shows the measurement result of the arrival speed of a flame zone, and the thickness of a flame zone in the optical measuring device. It is a graph which shows the measurement result of the average value and cycle fluctuation | variation of the peak of the emitted light intensity from each radical in the said optical measurement apparatus. It is a graph which shows the measurement result of the average value of the peak ratio of the emitted light intensity from each radical in the said optical measurement apparatus, and cycle fluctuation | variation. It is a graph which shows the measurement result of the relationship (A / F = 14.7) of the radical peak intensity | strength and engine speed in the said optical measuring device. It is a graph which shows the measurement result of the relationship (A / F = 16.0) of the radical peak intensity | strength and engine speed in the said optical measuring device. It is a graph which shows the calibration curve in the said optical measurement apparatus. It is a graph which shows the measurement result of the average value of a local air fuel ratio in the said optical measuring device, and cycle fluctuation | variation. It is a graph which shows the measurement result of the correlation with (DELTA) CA10% and IMEP in the said optical measuring device. It is a graph which shows the measurement result of the initial combustion period in the engine speed in the said optical measuring device. It is a graph which shows the measurement result of the relationship of the initial combustion period and A / F in the said optical measuring device. It is a graph which shows the measurement result of the cycle fluctuation of A / F and IMEP in the optical measuring device. It is a graph which shows the measurement result of the average value of the thickness of a flame zone, and a cycle fluctuation | variation in the said optical measuring device. It is a graph which shows the measurement result of the average value of the arrival speed of the flame zone in the said optical measuring device, and cycle fluctuation | variation. It is a side view which shows the structure of the optical system for optical sensors used in the conventional optical measuring device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Insulator part 2 Ignition (discharge) part 3 Electric circuit 4 Through-hole 5 Optical system for optical sensors 10 Optical element 11 1st surface 11a 1st area | region 11b 2nd area | region 12 2nd surface 12a 1st area | region 12b 2nd area | region 13 Step part 13a Expanded diameter portion 13b Notched portion 14, 15 Reflective film
14a Protective layer 16 Optical fiber 30 Spectrometer 31 Spectrometer unit 40, 41 Computer

Claims (45)

Isogo and
An ignition / discharge part provided at the tip of the insulator part;
An electric circuit passing through the insulator and connected to the ignition / discharge unit;
The insulator portion disposed drilled in holes in, and an optical system for at least one optical sensor are Mase extraordinary the distal end surface of the該碍Ko portion tip portion,
The optical system for an optical sensor is configured to have an optical element that Mase extraordinary distal end surface at the tip face of the insulator portion,
The optical element is integrally formed with a first surface and a second surface, and the first surface and the second surface have a first region and a second region, respectively, The first region is a concave transmission surface, the first region of the second surface is a concave reflection surface, the second region of the first surface is a reflection surface, and is reflected on the object point side surface of the first surface. A material film is deposited and formed, and the object point side of the reflective material film is covered with a protective layer, and light from the object point is incident on the first region of the first surface, A heat engine or a plasma apparatus that reflects the first surface of the second surface, reflects the reflected light on the second region of the first surface, and focuses the reflected light on an image point. Ignition or discharge plug to use. The ignition or discharge plug used for a heat engine or a plasma device according to claim 1, comprising a plurality of optical systems for the optical sensor. The heat engine according to claim 1 or 2, wherein the protective layer of the optical element has at least one of heat resistance, corrosion resistance, corrosion resistance, and touch resistance . Ignition or discharge plug used in plasma devices. The protective layer of the optical element is formed of a single layer film made of any one of chromium, magnesium fluoride, silicon dioxide, zirconia, titanium oxide, and alumina, or a multilayer film made of two or more of these materials. An ignition or discharge plug for use in a heat engine or a plasma device according to any one of claims 1 to 3. The protective layer of the optical element is formed over the entire surface of the first surface, and has a function of an antireflection film for incident light on the first region of the first surface. Item 5. An ignition or discharge plug used in the heat engine or plasma device according to Item 4. The protective layer of the optical element is formed over the entire surface of the first surface by the same material as the medium between the first surface and the second surface. The ignition or discharge plug used for the heat engine or plasma device according to any one of claims 3 to 4. The first surface of the optical element is a surface having a smaller diameter than the second surface,
Between the first surface and the second surface, an enlarged portion from the outer diameter of the first surface to the outer diameter of the second surface is formed,
The ignition or discharge plug used in the heat engine or plasma device according to any one of claims 1 to 6, wherein unnecessary light is blocked by the enlarged diameter portion. The medium between the first surface and the second surface of the optical element has a notch formed in the side surface,
The ignition or discharge plug used in the heat engine or plasma device according to any one of claims 1 to 6, wherein unnecessary light is blocked by the notch. The second region of the first surface of the optical element is a convex reflecting surface , or the ignition used in the heat engine or plasma device according to any one of claims 1 to 8 , or Discharge plug. The reflective film made of a metal material is deposited on the first region of the second surface of the optical element from the image point side. Ignition or discharge plug for use in the described heat engine or plasma device. The heat engine according to any one of claims 1 to 9, wherein the first region of the second surface of the optical element selectively reflects only light in a specific wavelength band . Ignition or discharge plug used in plasma devices. The heat engine or plasma according to any one of claims 1 to 11, wherein the first region of the second surface of the optical element is a spheroid with the object point as a focal point. Ignition or discharge plug used in the device. The heat according to any one of claims 1 to 12, wherein the second region of the second surface of the optical element is a convex spherical transmission surface having the image point as a center of curvature. Ignition or discharge plugs used in engines or plasma devices. The image point of the optical element is on the second region of the second surface or on the first surface side with respect to the second surface. Ignition or discharge plug used in the heat engine or plasma device described in 1. The first surface and the second surface of the optical element each have a plurality of first regions and second regions,
Each first region of the second surface is a reflective surface composed of a concave surface divided into a plurality of parts having different centers of curvature or focal points.
The light from the object point is incident on each first region of the first surface, is correspondingly reflected in each first region of the second surface, and is reflected on each second region of the first surface, The ignition or discharge plug for use in a heat engine or a plasma device according to any one of claims 1 to 14, wherein the light is condensed at an image point. Comprising at least one optical fiber,
The heat engine according to any one of claims 1 to 15, wherein an incident end face of the optical fiber is disposed at a position of one or a plurality of image points of the optical element , or Ignition or discharge plugs used in plasma devices. An optical fiber array comprising a plurality of optical fibers is provided,
Each incident end face of each optical fiber is arranged at the position of a plurality of image points of the optical element, and is 1 on one plane that forms a predetermined angle with respect to the optical axis or at a position different from each other in the optical axis direction. The ignition or discharge plug for use in a heat engine or a plasma device according to any one of claims 1 to 15, wherein the ignition or discharge plug is arranged in a three-dimensional array. Comprising at least one optical fiber,
The incident end face of the optical fiber is disposed on the second region of the second face of the optical element or at the position of a single image point or a plurality of image points on the first face side of the second face. The ignition or discharge plug for use in a heat engine or a plasma device according to claim 14. An optical fiber array comprising a plurality of optical fibers is provided,
Each incident end face of each optical fiber is arranged on a second region of the second surface of the optical element or at a plurality of image point positions closer to the first surface than the second surface. 15. The heat engine or plasma apparatus according to claim 14, wherein the heat engine or the plasma apparatus is arranged in a one-dimensional to three-dimensional array on a plane that forms a predetermined angle with respect to the optical axis, or at different positions in the optical axis direction. Ignition or discharge plug used for A light receiving element in which a plurality of light receiving portions are arranged at an image point of the optical element;
The light from a plurality of image points by the optical element of light at a plurality of measurement points on the object point side of the optical element is detected by the light receiving element. Ignition or discharge plug used in the heat engine or plasma device described in 1. The plurality of measurement points are one-dimensionally arranged,
21. The ignition used for a heat engine or a plasma device according to claim 20, wherein the plurality of light receiving units are one-dimensionally arranged at positions of a plurality of image points corresponding to the plurality of measurement points , or , Discharge plug. The plurality of measurement points are two-dimensionally arranged in a matrix,
The heat engine or the plasma apparatus according to claim 20, wherein the plurality of light receiving units are two-dimensionally arranged in a matrix at positions of a plurality of image points corresponding to the plurality of measurement points. Ignition or discharge plug. The plurality of measurement points are arranged three-dimensionally,
21. The ignition used for a heat engine or a plasma apparatus according to claim 20, wherein the plurality of light receiving units are three-dimensionally arranged at positions of a plurality of image points corresponding to the plurality of measurement points , or , Discharge plug. An optical measuring device for measuring light from a physical / chemical reaction amount and its state in one or a plurality of physical / chemical reaction regions in a heat engine or plasma device,
Ignition or discharge plug used in the heat engine or plasma device according to any one of claims 1 to 15,
A spectroscopic means for dispersing light at an image point of the optical element;
A light measuring means having a light receiving element for receiving the light split by the spectroscopic means;
Signal processing means for processing the signal obtained by the measurement means,
An optical measurement apparatus that detects light having an arbitrary wavelength emitted from one or a plurality of local areas of the physical / chemical reaction region. An optical measuring device for measuring light from a physical / chemical reaction amount and its state in one or a plurality of physical / chemical reaction regions in a heat engine or plasma device,
Ignition or discharge plug used in the heat engine or plasma device according to any one of claims 16 to 19,
The light at the image point of the optical element is incident through the optical fiber, and the spectral means for splitting the light,
A light measuring means having a light receiving element for receiving the light split by the spectroscopic means;
Signal processing means for processing the signal obtained by the measurement means,
An optical measurement apparatus that detects light having an arbitrary wavelength emitted from one or a plurality of local areas of the physical / chemical reaction region. An optical measuring device for measuring light from a physical / chemical reaction amount and its state in one or a plurality of physical / chemical reaction regions in a heat engine or plasma device,
An ignition or discharge plug for use in the heat engine or plasma device according to any one of claims 20 to 23;
Signal processing means for processing a signal obtained by the light receiving element,
An optical measurement apparatus that detects light having an arbitrary wavelength emitted from one or a plurality of local areas of the physical / chemical reaction region. 27. The signal processing means measures emission intensity of different wavelengths in one or a plurality of local plasma fields in the physical / chemical reaction region. Optical measuring device.   25. The plasma processing apparatus according to claim 24, wherein the signal processing unit identifies a plasma characteristic amount from a light intensity ratio of different wavelengths, a spectral line width, or a shift amount in the plasma field of the physical / chemical reaction region. Item 27. The optical measurement device according to any one of Items 26. 27. The signal processing means measures a light intensity of a radical and a spatial / temporal distribution thereof in one or a plurality of local areas of the physical / chemical reaction region. The optical measuring device according to claim 1. 27. The signal processing means measures the light intensity of radicals in one or a plurality of local areas of the physical / chemical reaction region and temporal changes thereof. The optical measuring device described. Said signal processing means, one of the physical-chemical reaction region or, based on the light intensity and its spatial and temporal distribution of radicals in the plurality of local, one of the physical and chemical reaction zone or a plurality of 27. The optical measurement apparatus according to claim 24, wherein a local air-fuel ratio in a local area is measured. 27. The signal processing unit measures a thickness of a flame zone or a reaction zone in one or a plurality of local areas of the physical / chemical reaction region. Optical measuring device. 27. The signal processing means measures the arrival speed of a flame zone or a reaction zone in one or a plurality of local areas of the physical / chemical reaction region. Optical measuring device.   34. The optical measurement device according to claim 33, wherein the signal processing means measures the arrival speed of the flame zone or reaction zone that differs for each radical composition. 27. The signal processing means measures fluctuations in the arrival speed of a flame zone or reaction zone in one or a plurality of local areas of the physical / chemical reaction region. The optical measuring device described in 1.   36. The optical measurement apparatus according to claim 35, wherein the signal processing means measures fluctuations in the arrival speed of the flame zone or reaction zone that differs for each radical composition. 27. The signal processing means measures a fluctuating frequency of an arrival speed of a flame zone or a reaction zone in one or a plurality of local areas of the physical / chemical reaction region. The optical measuring device described in 1.   38. The optical measuring device according to claim 37, wherein the signal processing means measures a variation frequency of an arrival speed of the flame zone or reaction zone that differs for each radical composition. 27. The signal processing unit measures a direction in which a flame zone or a reaction zone spreads in one or a plurality of local areas of the physical / chemical reaction region. Optical measuring device.   40. The optical measuring device according to claim 39, wherein the signal processing means measures a direction in which the flame zone or the reaction zone spreads for each radical composition. The signal processing means performs time series fluctuations of the heat engine or the plasma apparatus based on the light intensity of the radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. 27. The optical measurement apparatus according to claim 24, wherein measurement is performed. The signal processing means is configured to detect abnormalities such as knocking in the heat engine or plasma apparatus based on the light intensity of the radicals in one or a plurality of local areas of the physical / chemical reaction region and the spatial / temporal distribution thereof. 27. The optical measurement device according to claim 24, wherein a reaction is detected. Said signal processing means, one of the physical-chemical reaction region or, based on the light intensity and its spatial and temporal distribution of radicals in the plurality of local, one of the physical and chemical reaction zone or a plurality of 27. The optical measurement apparatus according to claim 24, wherein information on formation of a local flame or reaction nucleus is measured. Said signal processing means, one of the physical-chemical reaction region or, based on the light intensity and its spatial and temporal distribution of radicals in the plurality of local, one of the physical and chemical reaction zone or a plurality of 27. The optical measurement device according to claim 24, wherein temperature information of a local flame, gas, or plasma is measured. Said signal processing means, one of the physical-chemical reaction region or, based on the light intensity and its spatial and temporal distribution of radicals in the plurality of local, one of the physical and chemical reaction zone or a plurality of 27. The optical measurement apparatus according to claim 24, wherein the composition / concentration of a gas in a local area is measured.