JP2006287725A - Piezoelectric acoustic element and piezoelectric acoustic generating device - Google Patents

Piezoelectric acoustic element and piezoelectric acoustic generating device Download PDF

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JP2006287725A
JP2006287725A JP2005106457A JP2005106457A JP2006287725A JP 2006287725 A JP2006287725 A JP 2006287725A JP 2005106457 A JP2005106457 A JP 2005106457A JP 2005106457 A JP2005106457 A JP 2005106457A JP 2006287725 A JP2006287725 A JP 2006287725A
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piezoelectric acoustic
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JP4295238B2 (en
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Tatsuo Kawaguchi
竜生 川口
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NGK Insulators Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an acoustic generating device with high acoustic generation efficiency and small energy loss. <P>SOLUTION: This piezoelectric acoustic generation device 10 having a piezoelectric acoustic element 17 and a panel 12 fixed via a piezoelectric drive element 20 of the piezoelectric acoustic element 17 and generating sound from the panel 12 is provided. The piezoelectric acoustic element 17 constituting the piezoelectric acoustic generating device 10 has the columnar piezoelectric drive element 20 constituted of a plurality of piezoelectric layers and a plurality of electrode layers which are alternately laminated and an elastic body board 11 of which a part is fixed to the piezoelectric drive body 20 and at least one end is a free end. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、振動発生源としての圧電駆動体及び振動増幅器としての板状の弾性体を具備する圧電音響素子と、その圧電音響素子で発生・増幅させた振動をパネルに伝えそのパネルを音響発生源として利用する圧電音響発生装置に関する。   The present invention relates to a piezoelectric acoustic element having a piezoelectric drive body as a vibration generation source and a plate-like elastic body as a vibration amplifier, and transmits the vibration generated and amplified by the piezoelectric acoustic element to the panel to generate the sound. The present invention relates to a piezoelectric acoustic generator used as a source.

近年、携帯電話、デジタルカメラ、PDA(携帯情報端末)等の携帯電子機器において、小型化、軽量化が加速度的に進行しており、それらの発音源として好適な音響発生装置の登場が待たれている。そのような音響発生装置は、小型化、軽量化に適い、高い音響変換効率を実現し広い再生周波数帯域を有するものである必要があるが、従来より、そのような要求に応えるべく技術開発が進められ、提案がなされている。   In recent years, in portable electronic devices such as mobile phones, digital cameras, and PDAs (personal digital assistants), miniaturization and weight reduction are accelerating, and a sound generator suitable as a sound source is awaited. ing. Such a sound generator needs to be suitable for downsizing and weight reduction, to achieve high acoustic conversion efficiency and to have a wide reproduction frequency band. Advancing and proposing.

例えば、特許文献1には、圧電素子(変換器、圧電バイモルフ)がパネル上の支柱に固定された構造の音響発生装置が記載されている(特許文献1のFig.1参照)。これは、自らは駆動力を有さず振動を発生しない小さな支柱部材を介して、パネル上に圧電素子を固定した構造を有し、圧電素子が振動発生源(駆動源)であり再生周波数特性を決定する振動板の機能を兼ねているものである。   For example, Patent Document 1 describes an acoustic generator having a structure in which a piezoelectric element (transducer, piezoelectric bimorph) is fixed to a column on a panel (see FIG. 1 of Patent Document 1). This has a structure in which a piezoelectric element is fixed on the panel through a small support member that does not have a driving force and does not generate vibration, and the piezoelectric element is a vibration source (driving source) and has a reproduction frequency characteristic. It also functions as a diaphragm that determines

又、特許文献2には、液晶表示装置とその保護パネルを有する機器に音圧を発生させる音響発生装置が記載されている。これは、液晶保護パネルの特定の箇所に固定した支柱上に、圧電バイモルフ素子と弾性体板とを一定の間隔を持って並行に配置したものであり、単独の圧電バイモルフ素子を振動発生源(駆動源)とした場合の周波数特性を改善するために、それ自身は駆動力を有さず振動を発生しない弾性体板を組み合わせて、平坦な周波数特性を実現しようとするものである。   Patent Document 2 describes a sound generator that generates sound pressure in a device having a liquid crystal display device and its protective panel. This is a structure in which a piezoelectric bimorph element and an elastic plate are arranged in parallel at a predetermined interval on a column fixed to a specific portion of a liquid crystal protection panel, and a single piezoelectric bimorph element is a vibration generating source ( In order to improve the frequency characteristics in the case of a driving source), an elastic body plate which itself does not have a driving force and does not generate vibration is combined to achieve a flat frequency characteristic.

更に、特許文献3には、携帯電話機等の表示面を覆う透明なパネルを振動させて音波を発生させるための圧電アクチュエータの構造が記載されている.これはパネル上に固定した板状の圧電振動板に衝撃吸収材を配設することにより、落下等の衝撃による破損を防止しようとするものである。
国際公開第01/54450号パンフレット 特開2005−26754号公報 特開2004−104327号公報
Further, Patent Document 3 describes a structure of a piezoelectric actuator for generating a sound wave by vibrating a transparent panel covering a display surface of a mobile phone or the like. This is intended to prevent damage due to impact such as dropping by disposing an impact absorbing material on a plate-like piezoelectric diaphragm fixed on a panel.
International Publication No. 01/54450 Pamphlet JP 2005-26754 A JP 2004-104327 A

しかしながら、上記した従来の音響発生装置においては、圧電バイモルフ素子を弾性体板の機能を発現するものとして評価した場合、圧電バイモルフ素子を構成する圧電セラミックス材料は振動時のエネルギー損失が大きいため、音響発生効率が充分ではない、という問題があった。   However, in the conventional acoustic generator described above, when the piezoelectric bimorph element is evaluated as expressing the function of the elastic body plate, the piezoelectric ceramic material constituting the piezoelectric bimorph element has a large energy loss during vibration. There was a problem that the generation efficiency was not sufficient.

本発明は、このような事情に鑑みてなされたものであり、本発明の目的とするところは、音響発生効率が高くエネルギー損失の小さな音響発生装置を提供することにある。研究が重ねられた結果、従来の音響発生装置のような、圧電バイモルフ素子が駆動源としてだけでなく音響発生の周波数特性を決定する弾性体板の役割を果たしている構造では、音響発生効率の向上に限界があると考えられた。そして、振動をパネルに伝えてパネルから音響を発生させる音響発生装置において、振動を発生させるための駆動源及び所望の周波数特性を実現するための振動板の機能を分離することにより、上記目的が達成されることが見出され、本発明が完成した。   The present invention has been made in view of such circumstances, and an object of the present invention is to provide a sound generator having high sound generation efficiency and low energy loss. As a result of repeated research, in the structure where the piezoelectric bimorph element not only serves as a drive source but also serves as an elastic plate that determines the frequency characteristics of sound generation, as in conventional sound generators, the efficiency of sound generation is improved. It was thought that there was a limit. Then, in the sound generator that transmits vibration to the panel and generates sound from the panel, the above object is achieved by separating the functions of the driving source for generating vibration and the diaphragm for realizing the desired frequency characteristics. This has been found to be achieved and the present invention has been completed.

先ず、本発明によれば、交互に積層された複数の圧電層と複数の電極層とで構成される柱状の圧電駆動体と、その圧電駆動体に一部分が固定され少なくとも一端が自由端である板状の弾性体(弾性体板ともいう)と、を具備する圧電音響素子が提供される。   First, according to the present invention, a columnar piezoelectric driving body composed of a plurality of alternately stacked piezoelectric layers and a plurality of electrode layers, a part of which is fixed to the piezoelectric driving body, and at least one end is a free end. A piezoelectric acoustic element including a plate-like elastic body (also referred to as an elastic plate) is provided.

本発明に係る圧電音響素子において、板状の弾性体は、少なくとも一端が自由端となるように支持されることから、それに用いられる材料は耐衝撃性が高いものであることが好ましく、具体的には、板状の弾性体に用いる好ましい材料として金属又は樹脂を示すことが出来る。   In the piezoelectric acoustic element according to the present invention, since the plate-like elastic body is supported so that at least one end is a free end, it is preferable that the material used therefor has high impact resistance. The metal or resin can be shown as a preferable material used for the plate-like elastic body.

本発明に係る圧電音響素子における柱状の圧電駆動体は、電界誘起歪みに基づく圧電層の変位の繰り返しによって振動発生源となるものであり、板状の弾性体は、振動発生源の役割は有さず圧電駆動体によって加振されて専ら共振周波数を低くする又は周波数特性を平坦化する振動板としての役割を担うものである。   The columnar piezoelectric driving body in the piezoelectric acoustic element according to the present invention serves as a vibration generation source by repeated displacement of the piezoelectric layer based on electric field induced strain, and the plate-like elastic body has a role of the vibration generation source. First, it is vibrated by the piezoelectric driving body and serves exclusively as a diaphragm that lowers the resonance frequency or flattens the frequency characteristics.

圧電駆動体(圧電層)の発現する変位は、電界誘起歪みの縦効果及び電界誘起歪みの横効果の何れでもよく限定されない。電界誘起歪みの縦効果とは、圧電層の分極方向と同じ方向に電界を加えたときに圧電駆動体(圧電層)も同じ方向に伸縮するように変形する現象をいい、電界誘起歪みの横効果とは、圧電層の分極方向と同じ方向に電界を加えたときに圧電駆動体(圧電層)がその方向とは垂直方向に伸縮するように変形する現象をいう。   The displacement generated by the piezoelectric driving body (piezoelectric layer) may be either the longitudinal effect of electric field induced strain or the lateral effect of electric field induced strain. The longitudinal effect of electric field induced strain is a phenomenon in which when an electric field is applied in the same direction as the polarization direction of the piezoelectric layer, the piezoelectric driver (piezoelectric layer) also deforms to expand and contract in the same direction. The effect is a phenomenon in which when an electric field is applied in the same direction as the polarization direction of the piezoelectric layer, the piezoelectric driving body (piezoelectric layer) is deformed so as to expand and contract in a direction perpendicular to the direction.

又、本発明に係る圧電音響素子は、圧電と表現されているが、上記の如く電界によって誘起される歪みを利用する音響素子であって、狭義の意味での、印加電界に概ね比例した歪み量を発生する圧電効果を利用する音響素子に限定されず、印加電界の二乗に概ね比例した歪み量を発生する電歪効果、強誘電体材料全般にみられる分極反転、反強誘電体材料にみられる反強誘電相−強誘電相間の相転移、等の現象を利用する音響素子も含まれる。作製にあたり分極処理が行われるか否かについても、圧電音響素子の主構成要素である圧電層にかかる材料の性質に基づいて適宜決定される。尚、圧電層とは圧電材料(同様に狭義ではない)が層状をしたものをいう。   In addition, the piezoelectric acoustic element according to the present invention is expressed as piezoelectric, but is an acoustic element that utilizes distortion induced by an electric field as described above, and in a narrow sense, is a distortion approximately proportional to an applied electric field. It is not limited to an acoustic element that uses the piezoelectric effect to generate a quantity, but to an electrostrictive effect that generates a distortion amount that is roughly proportional to the square of the applied electric field, a polarization reversal that appears in all ferroelectric materials, and an antiferroelectric material. Also included is an acoustic element that utilizes a phenomenon such as a phase transition between an antiferroelectric phase and a ferroelectric phase. Whether or not the polarization process is performed in the production is also appropriately determined based on the property of the material applied to the piezoelectric layer that is the main component of the piezoelectric acoustic element. The piezoelectric layer refers to a layered piezoelectric material (also not strictly narrow).

本発明に係る圧電音響素子は、限定されるものではないが、圧電駆動体にかかる複数の圧電層のそれぞれの厚さが、5〜200μmであることが好ましい。より好ましくは5〜100μmである。このように圧電層を薄くすることにより、一定の厚さ(高さ又は幅)で、圧電層をより多く(数十〜数百オーダーで)積層することが出来、例えば、トータルの厚さが同じで、1層の圧電層がより厚く、積層数がより少ない圧電駆動体と比較すると、同一駆動電圧でも電界強度が高くなり、相対的により大きな変位量と高い発生力を得ることが出来る。又、変位量と発生力が同じならば、より低い駆動電圧にすることが出来、省エネルギー化が図れる。圧電駆動体にかかる複数の圧電層の層数は、限定されるものではないが、2〜100層であることが好ましい。圧電音響素子として適用するに十分な発生力が得られるからである。   Although the piezoelectric acoustic element which concerns on this invention is not limited, It is preferable that each thickness of the several piezoelectric layer concerning a piezoelectric drive body is 5-200 micrometers. More preferably, it is 5-100 micrometers. By thinning the piezoelectric layer in this way, it is possible to stack more piezoelectric layers (in the order of several tens to several hundreds) with a constant thickness (height or width). In the same manner, compared with a piezoelectric driving body having a thicker one piezoelectric layer and a smaller number of stacked layers, the electric field strength is increased even with the same driving voltage, and a relatively larger displacement and higher generation force can be obtained. Further, if the amount of displacement and the generated force are the same, a lower drive voltage can be obtained, and energy saving can be achieved. The number of layers of the plurality of piezoelectric layers applied to the piezoelectric driver is not limited, but is preferably 2 to 100 layers. This is because sufficient generation force can be obtained for application as a piezoelectric acoustic element.

圧電駆動体にかかる複数の電極層の厚さは、限定されるものではなく用途に応じて適宜の厚さとされることとなるが、圧電層の表面に均一な電極層を形成することが可能な限りにおいて、10μm以下とすることが好ましい。より好ましくは5μm以下の厚さで形成する。10μmよりも厚くなると、電極自体の変形が困難となって、圧電駆動体としての変位(振動)が妨げられエネルギー損失が増大するおそれがあるからである。   The thickness of the plurality of electrode layers applied to the piezoelectric driving body is not limited and may be an appropriate thickness depending on the application, but a uniform electrode layer can be formed on the surface of the piezoelectric layer. In particular, the thickness is preferably 10 μm or less. More preferably, it is formed with a thickness of 5 μm or less. If the thickness is greater than 10 μm, it is difficult to deform the electrode itself, and displacement (vibration) as a piezoelectric driving body may be hindered and energy loss may increase.

本発明に係る圧電音響素子は、限定されるものではないが、少なくとも圧電駆動体が焼成一体化されて形成されることが好ましい。振動発生のために繰り返し変位を生じても圧電層と電極層との剥がれ等の構造的変化が生じ難く、長期の信頼性に優れ、振動発生源として安定した質の振動を板状の弾性体に伝え得て、その板状の弾性体のもたらす所望の周波数特性を安定して実現し得るからである。又、圧電駆動体の形状は、柱状である限りにおいて制限はなく、この圧電音響素子を利用する本発明に係る圧電音響発生装置におけるパネルとの関係において形状を定めればよい。好ましい形状として角柱状である直方体形が例示される。   The piezoelectric acoustic element according to the present invention is not limited, but is preferably formed by firing and integrating at least the piezoelectric driving body. Even if displacement occurs repeatedly due to vibration generation, structural changes such as peeling between the piezoelectric layer and electrode layer are difficult to occur, long-term reliability is excellent, and stable quality vibration as a vibration source is a plate-like elastic body This is because the desired frequency characteristic provided by the plate-like elastic body can be stably realized. The shape of the piezoelectric driving body is not limited as long as it is columnar, and the shape may be determined in relation to the panel in the piezoelectric acoustic generator according to the present invention using this piezoelectric acoustic element. As a preferable shape, a rectangular parallelepiped shape which is a prism shape is exemplified.

本発明に係る圧電音響素子において、板状の弾性体の形状は、所望の(再生)周波数特性に基づき決定されるものであり、それ以外の条件で制限はなく、円形、楕円形、正方形等、あるいは非対称な形状であってもよいが、より好ましい形状は長方形である。又、板状の弾性体は、振動板としての機能を果たすために少なくとも一端が自由端であるように圧電駆動体に固定されるものであり、その限りにおいて板状の弾性体と柱状の圧電駆動体との接続態様は制限されず、例えば、板状の弾性体が長方形である場合に、その長手方向の一方の端において圧電駆動体に固定され、他方の端を自由端とする態様や、同じく板状の弾性体が長方形である場合に、その長手方向の中心において圧電駆動体に固定され、両方の端を自由端とする態様が示される。   In the piezoelectric acoustic element according to the present invention, the shape of the plate-like elastic body is determined based on a desired (reproduction) frequency characteristic, and there is no limitation under other conditions, such as a circle, an ellipse, a square, etc. Alternatively, an asymmetric shape may be used, but a more preferable shape is a rectangle. Further, the plate-like elastic body is fixed to the piezoelectric drive body so that at least one end is a free end in order to fulfill the function as a vibration plate. The connection mode with the driving body is not limited. For example, when the plate-like elastic body is rectangular, the one is fixed to the piezoelectric driving body at one end in the longitudinal direction and the other end is a free end. Similarly, when the plate-like elastic body is rectangular, it is fixed to the piezoelectric driving body at the center in the longitudinal direction and both ends are free ends.

本発明に係る圧電音響素子において、板状の弾性体の数は限定されず、1枚であっても2枚以上の複数であってもよい。2枚以上の場合には、特許文献1のFig.9及びFig.12aの如き態様をとることが出来る。   In the piezoelectric acoustic element according to the present invention, the number of plate-like elastic bodies is not limited, and may be one or two or more. In the case of two or more sheets, FIG. 9 and FIG. An embodiment like 12a can be taken.

次に、本発明によれば、上記に記載の圧電音響素子と、その圧電音響素子の圧電駆動体を介して固定されたパネルと、を具備するとともに、圧電駆動体の複数の電極層に一層おきに接続された一対の信号入力部を備え、その信号入力部に電気信号が入力されることにより、パネルから音響を発生する圧電音響発生装置が提供される。   Next, according to the present invention, the piezoelectric acoustic element described above and a panel fixed via the piezoelectric driving body of the piezoelectric acoustic element are provided, and a plurality of electrode layers of the piezoelectric driving body are provided on one layer. A piezoelectric sound generating device is provided that includes a pair of signal input units connected to each other, and an electric signal is input to the signal input unit to generate sound from the panel.

パネルは、本発明に係る圧電音響発生装置においては音響発生源の役割を担うものとして特定されるが、パネルの具体的態様は、この圧電音響発生装置を適用する(例えば)携帯電子機器の設計によって特定されるべきものである。通常、液晶画面を見ながら音声を聴くことが好ましいことからパネルとして液晶保護パネルを用いる態様が例示される。但し、限定されるものではなく、携帯電子機器の所定の場所に設けた、当該携帯電子機器のケースの一部等であってもよい。   The panel is specified as a sound generation source in the piezoelectric sound generation device according to the present invention, and a specific aspect of the panel is a design of a portable electronic device to which this piezoelectric sound generation device is applied (for example). Should be specified by. Usually, it is preferable to listen to the sound while watching the liquid crystal screen, and therefore, an embodiment using a liquid crystal protection panel as the panel is exemplified. However, it is not limited, and may be a part of the case of the portable electronic device provided in a predetermined place of the portable electronic device.

本発明に係る圧電音響発生装置は、少なくとも一端が自由端になるように板状の弾性体の一部分が圧電駆動体に固定され、パネルが圧電駆動体を介して固定されていれば、具体的態様の制限はないが、好ましい態様として、板状の弾性体と(板状の)パネルとの支柱部分を圧電駆動体とするものを例示出来る。   The piezoelectric acoustic generator according to the present invention is specific if a part of the plate-like elastic body is fixed to the piezoelectric driving body so that at least one end is a free end, and the panel is fixed via the piezoelectric driving body. Although there is no restriction | limiting of an aspect, As a preferable aspect, what uses the support | pillar part of a plate-shaped elastic body and a (plate-shaped) panel as a piezoelectric drive body can be illustrated.

本発明に係る圧電音響発生装置においては、一対の信号入力部に電気信号を入力するための配線パターンが、パネルに形成されていることが好ましい。   In the piezoelectric acoustic generator according to the present invention, it is preferable that a wiring pattern for inputting an electric signal to the pair of signal input portions is formed on the panel.

本発明に係る圧電音響素子は、柱状の圧電駆動体と板状の弾性体とを具備するものであり、圧電駆動体が振動発生源(駆動源)の機能を有し、一方、板状の弾性体は振動発生源の役割は有さず、一端が自由端であり専ら振動を増幅し周波数特性を平坦化する、又は低音域における音響特性を向上させる、等のための振動板としての役割を担う。本発明に係る圧電音響素子は、このように、振動発生機能部分と、所望の周波数特性を実現するための音響周波数特性形成機能部分と、を完全に分離することにより、エネルギー損失を抑え、高い音響発生効率を実現し得る。   The piezoelectric acoustic element according to the present invention includes a columnar piezoelectric driving body and a plate-like elastic body, and the piezoelectric driving body has a function of a vibration generation source (driving source), The elastic body has no role as a vibration source, and has one end as a free end, which exclusively amplifies vibration and flattens the frequency characteristics, or improves the acoustic characteristics in the low frequency range, etc. Take on. In this way, the piezoelectric acoustic element according to the present invention suppresses energy loss by completely separating the vibration generating function part and the acoustic frequency characteristic forming function part for realizing a desired frequency characteristic, and is high. Sound generation efficiency can be realized.

本発明に係る圧電音響発生装置は、パネルが本発明に係る圧電音響素子の圧電駆動体を介して固定され、パネルから音響を発生するものである。板状の弾性体を振動発生源(駆動源)とせず、例えばパネルと板状の弾性体とを支柱で固定し、その支柱部分を、振動発生源である柱状の圧電駆動体とすることにより、圧電駆動体が発生させた微小な振動を、板状の弾性体で増幅するとともに、所望の音響周波数特性を実現出来る。小型で音響変換効率の高い音響発生装置を実現するためには、振動発生源で発生する振動の共振周波数が、再生周波数帯の比較的低音域に合致することが望ましいが、本発明に係る圧電音響発生装置は、このような周波数特性を実現し得るものである。又、本発明に係る圧電音響発生装置は、パネルから音響を発生するために入力する電気信号にかかる配線パターンが、パネル自体に形成されており、リード線等を用いていないので、リード線等を用いた場合に生じ得る振動エネルギーの損失及び圧電駆動体の振動特性への影響を抑制することが出来る。   The piezoelectric acoustic generator according to the present invention generates sound from the panel by fixing the panel via the piezoelectric driving body of the piezoelectric acoustic element according to the present invention. A plate-like elastic body is not used as a vibration generation source (drive source). For example, a panel and a plate-like elastic body are fixed with a support column, and the column portion is a columnar piezoelectric drive unit that is a vibration generation source. In addition to amplifying minute vibrations generated by the piezoelectric driving body with a plate-like elastic body, a desired acoustic frequency characteristic can be realized. In order to realize a small acoustic generator with high acoustic conversion efficiency, it is desirable that the resonance frequency of the vibration generated by the vibration source matches the relatively low sound range of the reproduction frequency band. The sound generator can realize such frequency characteristics. Further, in the piezoelectric sound generating device according to the present invention, the wiring pattern for the electric signal input to generate sound from the panel is formed on the panel itself, and no lead wire is used. It is possible to suppress the loss of vibration energy and the influence on the vibration characteristics of the piezoelectric driving body that may occur when using.

以下、本発明について、適宜、図面を参酌しながら、実施の形態を説明するが、本発明はこれらに限定されて解釈されるべきものではない。本発明の要旨を損なわない範囲で、当業者の知識に基づいて、種々の変更、修正、改良、置換を加え得るものである。例えば、図面は、好適な本発明の実施の形態を表すものであるが、本発明は図面に表される態様や図面に示される情報により制限されない。本発明を実施し又は検証する上では、本明細書中に記述されたものと同様の手段若しくは均等な手段が適用され得るが、好適な手段は、以下に記述される手段である。   Hereinafter, embodiments of the present invention will be described with appropriate reference to the drawings, but the present invention should not be construed as being limited thereto. Various changes, modifications, improvements, and substitutions can be added based on the knowledge of those skilled in the art without departing from the scope of the present invention. For example, the drawings show preferred embodiments of the present invention, but the present invention is not limited by the modes shown in the drawings or the information shown in the drawings. In practicing or verifying the present invention, the same means as described in this specification or equivalent means can be applied, but preferred means are those described below.

図1は、本発明に係る圧電音響素子を具備する本発明に係る圧電音響発生装置の一の実施形態を模式的に示す斜視図であり、図2は、図1の一部(圧電駆動体)を拡大して示す部分拡大斜視図である。図1に示される圧電音響発生装置10は、角柱状の圧電駆動体20及びその圧電駆動体20の(図中における)上部で固定された(例えば)金属製の弾性体板11(板状の弾性体)からなる圧電音響素子17と、圧電駆動体20の(図中における)下部で固定された(例えば)アクリル製のパネル12とを備え、パネル12から音響18を発生する装置である。   FIG. 1 is a perspective view schematically showing one embodiment of a piezoelectric acoustic generator according to the present invention including the piezoelectric acoustic element according to the present invention, and FIG. 2 is a partial view of FIG. FIG. A piezoelectric acoustic generator 10 shown in FIG. 1 includes a prismatic piezoelectric driving body 20 and a metal elastic plate 11 (for example, plate-like) fixed at an upper portion (in the drawing) of the piezoelectric driving body 20. The device includes a piezoelectric acoustic element 17 formed of an elastic body and an acrylic panel 12 (for example) fixed at a lower portion (in the drawing) of the piezoelectric driving body 20, and generates sound 18 from the panel 12.

長方形状の弾性体板11は、その概ね中心部分で圧電駆動体20により固定されており、その両端が自由端であり、容易に振動させ易くなっている。圧電音響発生装置10(圧電音響素子17)において、圧電駆動体20の(例えば)14層からなる電極層48,49に、一層おきに接続された一対の信号入力部としての共通電極78,79へ電気信号が入力されると、それに導通した対向する電極層48,49間に電圧が印加され電界が形成される。そして、電極層48,49で挟まれた圧電層44に、電界誘起歪みに基づく変位が生じ、この変位の繰り返しによって、圧電層44を積層してなる圧電駆動体20全体が振動を発生する。圧電層44の分極方向は積層方向と同じS1方向(図2参照)であり、それと同じ方向に電界を加えたときに、圧電駆動体20(圧電層44)もS1方向と同じS2方向に伸縮する。即ち、圧電駆動体20において、圧電層44の変位は、電界誘起歪みの縦効果に基づくものである。   The rectangular elastic body plate 11 is fixed by the piezoelectric driving body 20 at a substantially central portion thereof, and both ends thereof are free ends, and are easily vibrated. In the piezoelectric acoustic generator 10 (piezoelectric acoustic element 17), common electrodes 78 and 79 as a pair of signal input units connected to every other electrode layers 48 and 49 of (for example) 14 layers of the piezoelectric driving body 20. When an electrical signal is input to the electrode, a voltage is applied between the opposing electrode layers 48 and 49 that are conducted to form an electric field. Then, a displacement based on the electric field induced strain occurs in the piezoelectric layer 44 sandwiched between the electrode layers 48 and 49, and the entire piezoelectric driving body 20 formed by laminating the piezoelectric layer 44 generates vibration due to the repetition of the displacement. The polarization direction of the piezoelectric layer 44 is the same S1 direction as the stacking direction (see FIG. 2). When an electric field is applied in the same direction, the piezoelectric driver 20 (piezoelectric layer 44) expands and contracts in the same S2 direction as the S1 direction. To do. That is, in the piezoelectric driving body 20, the displacement of the piezoelectric layer 44 is based on the longitudinal effect of the electric field induced strain.

弾性体板11は、自らは振動を発生させず、圧電駆動体20の起こす振動によって加振され、周波数特性を平坦化する等の役割を担う。圧電音響発生装置10では、共通電極78,79(一対の信号入力部)に電気信号を入力するための配線パターン21,22が、パネル12に形成されているから、圧電駆動体20自らが起こす振動及びそれによる弾性体板11の振動によって、電気信号にかかる配線部分の振動・揺れは生じない。   The elastic plate 11 itself does not generate vibration but is vibrated by vibration generated by the piezoelectric driving body 20 and plays a role of flattening frequency characteristics. In the piezoelectric acoustic generator 10, since the wiring patterns 21 and 22 for inputting electric signals to the common electrodes 78 and 79 (a pair of signal input portions) are formed on the panel 12, the piezoelectric driver 20 itself wakes up. Due to the vibration and the vibration of the elastic plate 11 caused by the vibration, the wiring portion applied to the electric signal does not vibrate or shake.

圧電音響発生装置10では、交互に積層された複数の圧電層44と複数の電極層48,49とで構成される柱状の圧電駆動体20は、焼成一体化されて形成されている。一方、圧電駆動体20の上部に金属板である弾性体板11を固定する手段、及び、圧電駆動体20の下部にアクリル板であるパネル12を固定する手段は、接着である。   In the piezoelectric acoustic generator 10, the columnar piezoelectric driver 20 including a plurality of piezoelectric layers 44 and a plurality of electrode layers 48 and 49 that are alternately stacked is formed by firing and integration. On the other hand, the means for fixing the elastic plate 11 that is a metal plate to the upper portion of the piezoelectric drive body 20 and the means for fixing the panel 12 that is an acrylic plate to the lower portion of the piezoelectric drive body 20 are adhesion.

次に、図3は、上記圧電音響発生装置10とは圧電音響素子の圧電駆動体のみが異なる態様の圧電音響発生装置における、その圧電駆動体を拡大して示す部分拡大斜視図である。この圧電音響発生装置において採用されている角柱状の圧電駆動体30において、(例えば)8層からなる電極層48,49に、一層おきに接続された一対の信号入力部としての共通電極78,79へ電気信号が入力されると、それに導通した対向する電極層48,49間に電圧が印加され電界が形成される。そして、圧電駆動体20と同様に、電極層48,49で挟まれた圧電層44に、電界誘起歪みに基づく変位が生じ、この変位の繰り返しによって、圧電層44を積層してなる圧電駆動体20全体が振動を発生する。圧電駆動体30では、圧電層44の分極方向は積層方向と同じS3方向(図3参照)であり、それと同じ方向に電界を加えたときに、圧電駆動体30(圧電層44)は、S3方向に直交するS4方向に伸縮する。即ち、圧電駆動体30において、圧電層44の変位は、電界誘起歪みの横効果に基づくものである。   Next, FIG. 3 is a partially enlarged perspective view showing the piezoelectric driving body in an enlarged manner in the piezoelectric acoustic generating apparatus in which only the piezoelectric driving body of the piezoelectric acoustic element is different from the piezoelectric acoustic generating apparatus 10. In the prismatic piezoelectric driving body 30 employed in this piezoelectric acoustic generator, a common electrode 78 as a pair of signal inputs connected to (for example) electrode layers 48 and 49 each consisting of eight layers. When an electrical signal is input to 79, a voltage is applied between the opposing electrode layers 48 and 49 conducted therethrough to form an electric field. Similarly to the piezoelectric driving body 20, a displacement based on the electric field induced strain occurs in the piezoelectric layer 44 sandwiched between the electrode layers 48 and 49, and the piezoelectric driving body formed by laminating the piezoelectric layers 44 by repeating this displacement. The whole 20 generates vibration. In the piezoelectric driving body 30, the polarization direction of the piezoelectric layer 44 is the same S3 direction (see FIG. 3) as the stacking direction, and when an electric field is applied in the same direction, the piezoelectric driving body 30 (piezoelectric layer 44) It expands and contracts in the S4 direction orthogonal to the direction. That is, in the piezoelectric driving body 30, the displacement of the piezoelectric layer 44 is based on the lateral effect of the electric field induced strain.

次に、本発明の圧電音響素子及び圧電音響発生装置を製造する方法について説明する。先ず、板状の弾性体の製造方法について説明する。板状の弾性体は、その製造方法を限定せず、例えば市販の所望の厚さの金属板を打抜加工や切断加工、あるいはエッチング加工等で作製することが出来る。   Next, a method for manufacturing the piezoelectric acoustic element and the piezoelectric acoustic generator of the present invention will be described. First, a method for producing a plate-like elastic body will be described. The manufacturing method of the plate-like elastic body is not limited. For example, a commercially available metal plate having a desired thickness can be produced by punching, cutting, etching, or the like.

次に、圧電駆動体の製造方法について説明する。複数の圧電層及び電極層からなる圧電駆動体は、公知の各種の膜形成法やシート積層法が適宜に採用され、圧電層及び電極層を順次形成し積層することにより作製出来る。膜形成法としては、例えば、スクリーン印刷、スプレー、ディッピング、塗布、電気泳動等の厚膜形成手法、イオンビーム、スパッタリング、真空蒸着、イオンプレーティング、CVD、メッキ等の薄膜形成手法が適宜に選択される。尚、共通電極の形成、及びパネル上への配線パターンの形成にも同様の手段が採用される。   Next, a method for manufacturing a piezoelectric driving body will be described. A piezoelectric driving body composed of a plurality of piezoelectric layers and electrode layers can be manufactured by appropriately forming and laminating piezoelectric layers and electrode layers in accordance with various known film forming methods and sheet laminating methods as appropriate. As the film forming method, for example, a thick film forming method such as screen printing, spraying, dipping, coating, electrophoresis, etc., and a thin film forming method such as ion beam, sputtering, vacuum deposition, ion plating, CVD, plating, etc. are appropriately selected. Is done. Note that the same means is employed for forming the common electrode and forming the wiring pattern on the panel.

特に、圧電層を形成するには、スクリーン印刷、スプレー、ディッピング、塗布等による厚膜形成手法、又はドクターブレード法、リバースロールコーター法等のシート成形法が好適に採用される。   In particular, for forming the piezoelectric layer, a thick film forming method by screen printing, spraying, dipping, coating, or the like, or a sheet forming method such as a doctor blade method or a reverse roll coater method is suitably employed.

上記方法で形成された電極層及び圧電層は、それぞれの層の形成の都度、焼成(熱処理)を施してもよく、又、全ての層を形成し更に共通電極を形成した後に、同時に焼成して、各層が同時に一体化するようにしてもよい。このように形成された電極層及び圧電層を一体化するための焼成(熱処理)温度は、一般に800℃〜1400℃程度の温度が採用され、好ましくは900℃〜1200℃℃の範囲の温度が有利に選択される。又、圧電層を焼成する場合には、高温時に圧電層の組成が不安定とならないように、圧電層を形成する圧電材料の蒸発源とともに雰囲気制御を行ないながら、焼成することが好ましい。   The electrode layer and the piezoelectric layer formed by the above method may be fired (heat treatment) each time the respective layers are formed, or after all the layers are formed and the common electrode is formed, they are fired simultaneously. Each layer may be integrated at the same time. The firing (heat treatment) temperature for integrating the electrode layer and the piezoelectric layer formed in this way is generally a temperature of about 800 ° C. to 1400 ° C., preferably a temperature in the range of 900 ° C. to 1200 ° C. Is advantageously selected. Further, when firing the piezoelectric layer, it is preferable to perform firing while controlling the atmosphere together with the evaporation source of the piezoelectric material forming the piezoelectric layer so that the composition of the piezoelectric layer does not become unstable at high temperatures.

このようにして得られた圧電駆動体に、接着剤を用いて板状の弾性体を固定すれば、本発明に係る圧電音響素子が得られる。接着剤は、熱可塑性、熱硬化性、合成ゴム系の何れでもよく使用雰囲気等に基づき選択出来る。例えば、エポキシ樹脂系等の熱硬化性樹脂を採用することが好ましい。   A piezoelectric acoustic element according to the present invention can be obtained by fixing a plate-like elastic body to the piezoelectric driving body thus obtained using an adhesive. The adhesive may be any of thermoplastic, thermosetting, and synthetic rubber, and can be selected based on the use atmosphere. For example, it is preferable to employ a thermosetting resin such as an epoxy resin.

次に、パネルの製造方法について説明する。パネルは、その製造方法を限定せず、例えば市販の所望の厚さのガラス板、又はアクリル等の樹脂系材料からなる薄板、等を成形、打抜、切断加工により所定形状に加工することで作製することが出来る。   Next, a method for manufacturing a panel will be described. The panel is not limited in its manufacturing method. For example, a commercially available glass plate having a desired thickness or a thin plate made of a resin-based material such as acrylic is processed into a predetermined shape by molding, punching, and cutting. Can be produced.

先に作製した圧電音響素子に、接着剤や接着テープを用いてパネルを固定し、導電材料を用いて圧電音響素子の圧電駆動体の共通電極に導通するようにパネル上に配線パターンを形成すれば、本発明に係る圧電音響発生装置が得られる。パネルを固定するための接着剤は、圧電駆動体と板状の弾性体との接着に用いたものと同様のものを採用出来る。   The panel is fixed to the previously produced piezoelectric acoustic element using an adhesive or an adhesive tape, and a conductive material is used to form a wiring pattern on the panel so as to conduct to the common electrode of the piezoelectric actuator of the piezoelectric acoustic element. Thus, the piezoelectric acoustic generator according to the present invention is obtained. As the adhesive for fixing the panel, the same adhesive as that used for bonding the piezoelectric driving body and the plate-like elastic body can be adopted.

以上、製造方法について説明したが、続いて、以下に、本発明の圧電音響素子及び圧電音響発生装置に用いられる材料について説明する。先ず、板状の弾性体を形成する材料について説明する。弾性とは塑性に対する弾性を意味し、板状の弾性体の材料は、物体に外から力を加えれば変形しその力を取り除けば元の形に戻ろうとする性質を備えたものであれば限定されるものではない。例えば、アルミニウム、ステンレス等の金属材料、アルミナやジルコニア等のセラミックス材料、ポリイミド等の樹脂材料が用いられる。より好ましいのは金属材料である。   Although the manufacturing method has been described above, materials used for the piezoelectric acoustic element and the piezoelectric acoustic generator according to the present invention will be described below. First, a material for forming a plate-like elastic body will be described. Elasticity means elasticity against plasticity, and the material of a plate-like elastic body is limited as long as it has the property of deforming when applying force from the outside to the object and returning to its original shape when removing the force. Is not to be done. For example, a metal material such as aluminum or stainless steel, a ceramic material such as alumina or zirconia, or a resin material such as polyimide is used. More preferred is a metal material.

次に、圧電駆動体を構成する圧電層及び電極層の材料について説明する。先ず、圧電層を形成する圧電材料としては、高い圧電定数、高い電気機械結合係数を有する材料が好ましく、具体的には、ジルコン酸鉛、マンガンタングステン酸鉛、チタン酸ナトリウムビスマス、鉄酸ビスマス、ニオブ酸カリウムナトリウム、タンタル酸ストロンチウムビスマス、マグネシウムニオブ酸鉛、ニッケルニオブ酸鉛、亜鉛ニオブ酸鉛、マンガンニオブ酸鉛、マグネシウムタンタル酸鉛、ニッケルタンタル酸鉛、アンチモンスズ酸鉛、チタン酸鉛、チタン酸バリウム、銅タングステン酸バリウム、マグネシウムタングステン酸鉛、コバルトニオブ酸鉛、あるいはこれらのうちの2種以上からなる複合酸化物を挙げることが出来る。   Next, the materials of the piezoelectric layer and the electrode layer constituting the piezoelectric driver will be described. First, as a piezoelectric material forming the piezoelectric layer, a material having a high piezoelectric constant and a high electromechanical coupling coefficient is preferable. Specifically, lead zirconate, lead manganese tungstate, sodium bismuth titanate, bismuth ferrate, Sodium potassium niobate, strontium bismuth tantalate, lead magnesium niobate, lead nickel niobate, lead zinc niobate, lead manganese niobate, lead magnesium tantalate, lead nickel tantalate, lead antimony stannate, lead titanate, titanium Examples thereof include barium oxide, barium copper tungstate, lead magnesium tungstate, lead cobalt niobate, and composite oxides composed of two or more of these.

又、これらの圧電材料には、ランタン、カルシウム、ストロンチウム、モリブデン、タングステン、バリウム、ニオブ、亜鉛、ニッケル、マンガン、セリウム、カドミウム、クロム、コバルト、アンチモン、鉄、イットリウム、タンタル、リチウム、ビスマス、スズ、銅等の酸化物が固溶されていてもよい。   These piezoelectric materials include lanthanum, calcium, strontium, molybdenum, tungsten, barium, niobium, zinc, nickel, manganese, cerium, cadmium, chromium, cobalt, antimony, iron, yttrium, tantalum, lithium, bismuth and tin. An oxide such as copper may be dissolved.

更に、上記した材料に、ビスマス酸リチウム、ゲルマン酸鉛等を添加した材料、例えばジルコン酸鉛、チタン酸鉛、及びマグネシウムニオブ酸鉛の複合酸化物に、ビスマス酸リチウム乃至ゲルマン酸鉛を添加した材料を採用出来る。これらの材料は、その圧電層の低温焼成を実現しつつ高い材料特性を発現出来る。   Furthermore, lithium bismutate or lead germanate is added to a material obtained by adding lithium bismutate, lead germanate, or the like to the above materials, for example, a composite oxide of lead zirconate, lead titanate, and lead magnesium niobate. Material can be adopted. These materials can exhibit high material properties while realizing low-temperature firing of the piezoelectric layer.

次に、電極層を形成する材料は、室温で固体であり、導電性に優れた金属で構成されていることが好ましく、例えば、アルミニウム、チタン、クロム、鉄、コバルト、ニッケル、銅、亜鉛、ニオブ、モリブデン、ルテニウム、パラジウム、ロジウム、銀、スズ、タンタル、タングステン、イリジウム、白金、金、鉛等の金属単体、若しくはこれらの合金が用いられる。又、これらに圧電層あるいはシム板と同じ材料を分散させたサーメット材料を用いてもよく、この場合は、5〜30体積%程度の割合で分散させることが好ましい。尚、配線パターンも同様の材料を選択することが出来る。   Next, the material for forming the electrode layer is preferably made of a metal that is solid at room temperature and has excellent conductivity. For example, aluminum, titanium, chromium, iron, cobalt, nickel, copper, zinc, A simple metal such as niobium, molybdenum, ruthenium, palladium, rhodium, silver, tin, tantalum, tungsten, iridium, platinum, gold, lead, or an alloy thereof is used. Further, a cermet material in which the same material as the piezoelectric layer or shim plate is dispersed may be used. In this case, it is preferable to disperse the cermet material at a ratio of about 5 to 30% by volume. Note that the same material can be selected for the wiring pattern.

次に、パネルを形成する材料について説明する。パネルの材料は、音響を発生し得るものであれば限定されるものではない。例えば、アクリル、ABS、ポリカーボネート等の樹脂材料、燐酸−珪酸ガラス等のガラス材料、カーボン繊維材料、アルミニウム、ステンレス等の金属材料、等が用いられる。   Next, materials for forming the panel will be described. The material of the panel is not limited as long as it can generate sound. For example, resin materials such as acrylic, ABS, and polycarbonate, glass materials such as phosphoric acid-silicate glass, carbon fiber materials, metal materials such as aluminum and stainless steel, and the like are used.

本発明の圧電音響素子及びそれを利用した圧電音響発生装置は、ノート型パソコンや、電話・カメラ・GPS・ラジオ・テレビ等の機能を選択的に備えた携帯電子機器に組み込まれ、一般的なスピーカの代わりに使用される。例えば、携帯電子機器の液晶保護パネルを本発明に係る圧電音響発生装置におけるパネルとして採用し、本発明に係る圧電音響発生装置を携帯電子機器に組み込むことにより、液晶画面を保護するパネル自体から良質の音響を発生させることが出来る。   The piezoelectric acoustic element of the present invention and the piezoelectric acoustic generator using the piezoelectric acoustic element are incorporated in portable electronic devices that are selectively equipped with functions of a notebook computer, telephone, camera, GPS, radio, television, etc. Used instead of a speaker. For example, a liquid crystal protection panel of a portable electronic device is adopted as a panel in the piezoelectric sound generating device according to the present invention, and the piezoelectric sound generating device according to the present invention is incorporated into the portable electronic device, so that the panel itself protecting the liquid crystal screen can be improved The sound can be generated.

本発明に係る圧電音響発生装置の一の実施形態を模式的に示す斜視図である。1 is a perspective view schematically showing one embodiment of a piezoelectric acoustic generator according to the present invention. 図1の一部(圧電駆動体)を拡大した部分拡大斜視図である。FIG. 2 is a partially enlarged perspective view in which a part (piezoelectric drive body) of FIG. 1 is enlarged. 本発明に係る圧電音響発生装置の他の実施形態を模式的に示す図であり、一部を拡大した部分拡大斜視図である。It is a figure which shows typically other embodiment of the piezoelectric acoustic generator which concerns on this invention, and is the partial expansion perspective view which expanded a part.

符号の説明Explanation of symbols

10…圧電音響発生装置、11…弾性体板(板状の弾性体)、12…パネル、17…圧電音響素子、18…音響、20,30…圧電駆動体、21,22…配線パターン、44…圧電層、48,49…電極層、78,79…共通電極。 DESCRIPTION OF SYMBOLS 10 ... Piezoelectric sound generator, 11 ... Elastic board (plate-shaped elastic body), 12 ... Panel, 17 ... Piezoelectric acoustic element, 18 ... Sound, 20, 30 ... Piezoelectric drive body, 21,22 ... Wiring pattern, 44 ... Piezoelectric layer, 48, 49 ... Electrode layer, 78, 79 ... Common electrode.

Claims (4)

交互に積層された複数の圧電層と複数の電極層とで構成される柱状の圧電駆動体と、その圧電駆動体に一部分が固定され少なくとも一端が自由端である板状の弾性体と、を具備する圧電音響素子。   A columnar piezoelectric driving body composed of a plurality of alternately laminated piezoelectric layers and a plurality of electrode layers, and a plate-like elastic body having a part fixed to the piezoelectric driving body and having at least one free end. A piezoelectric acoustic element provided. 前記板状の弾性体に用いる材料が、金属又は樹脂である請求項1に記載の圧電音響素子。   The piezoelectric acoustic element according to claim 1, wherein a material used for the plate-like elastic body is a metal or a resin. 請求項1又は2に記載の圧電音響素子と、その圧電音響素子の前記圧電駆動体を介して固定されたパネルと、を具備するとともに、前記圧電駆動体の複数の電極層に一層おきに接続された一対の信号入力部を備え、その信号入力部に電気信号が入力されることにより、前記パネルから音響を発生する圧電音響発生装置。   A piezoelectric acoustic element according to claim 1 and a panel fixed via the piezoelectric driving body of the piezoelectric acoustic element, and connected to a plurality of electrode layers of the piezoelectric driving body every other layer. A piezoelectric acoustic generator that includes a pair of signal input units and generates sound from the panel when an electric signal is input to the signal input unit. 前記一対の信号入力部に前記電気信号を入力するための配線パターンが、前記パネルに形成されている請求項3に記載の圧電音響発生装置。   The piezoelectric acoustic generator according to claim 3, wherein a wiring pattern for inputting the electric signal to the pair of signal input portions is formed on the panel.
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