JP2006285258A - Device and method for manufacturing stamper for printing lcd alignment layer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a large-size stamper with a constant thickness value for the purpose of significantly preventing a defect even in printing a large-size LCD alignment layer. <P>SOLUTION: The device for manufacturing the stamper for printing the LCD alignment layer is characterized by being equipped with: a laminating section 10 to form a laminated body 100 by sequentially laminating a base film 3, a liquid photosensitive resin S, a cover film 5, and an image film 7; a base exposing section 20 to make an ultraviolet ray irradiate the base film 3 side of the laminated body 100; a thickness adjusting section 30 to adjust a gap between the base film 3 and the image film 7; a pattern exposing section 40 to make the ultraviolet ray irradiate the image film 7 side; and a transfer means to discharge the base film 3 and the stamper 100 from the laminating section 10 via the pattern exposing section 40. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a stamper manufacturing apparatus and manufacturing method for LCD alignment film printing.

  LCD (Liquid Crystal Display) displays images by utilizing the change in optical properties of liquid crystals when voltage is applied, and it is becoming larger and larger as the performances such as high brightness and high definition are improved recently. is there.

  In a general LCD, as shown in FIG. 1, a liquid crystal 370 is filled between a pair of alignment films 320 and 320 separated by a spacer 310, and a transparent electrode 330 is disposed on the outer surface of one alignment film 320. The color filter 340 is disposed on the outer surface of the other alignment film 320. A glass substrate 350 and a polarizing film 360 are laminated on the outer surfaces of the transparent electrode 330 and the color filter 340.

  The alignment film 320 controls the alignment and movement of the liquid crystal 370, and plays a very important role in improving the overall display quality of the LCD 301 by speeding up the response of the liquid crystal 370 to an external electric field. The alignment film 320 serves to prevent the liquid crystal 370 from coming into direct contact with the color filter 340 and the transparent electrode 330.

  The alignment film 320 is printed on a glass substrate 350 provided with a transparent electrode 330 and a glass substrate 350 provided with a color filter 340, respectively, and flexographic printing is widely used as the printing method. In flexographic printing, as schematically illustrated in FIGS. 2 and 3, a roll type alignment film printing stamper 100 ′ coated with ink for alignment film 320 is pressed against each glass substrate 350 with a predetermined pressure. Thus, the alignment film 320 is printed on the upper surfaces of the transparent electrode 330 and the color filter 340, respectively.

  As the alignment film 320 ink, a UV curable liquid polyimide ink is widely used. As the stamper 100 ', a flat type can be used in addition to the roll type.

  Various methods for manufacturing alignment film printing stamper 100 'have been developed. Recently, a stamper 100' is manufactured by forming a pattern corresponding to alignment film 320 using a UV photosensitive resin and then curing the pattern. The method is in the limelight.

  A process of manufacturing a conventional alignment film printing stamper 100 'using a UV photosensitive resin is schematically shown in FIG. The first transparent glass substrate 221 is fixed horizontally (S101), the base film 203 is placed on the first glass substrate 221 (S102), and the liquid UV photosensitive resin S ′ is placed on the upper surface of the base film 203. Apply (S103). The flatness and thickness of the liquid UV photosensitive resin S 'are adjusted (S104 and S105), and a thin transparent cover film 205 and an image film 207 are sequentially laminated on the liquid UV photosensitive resin S' (S106 and S107). The image film 207 has a translucent part 207a that forms the stamper 100 'and a non-translucent part 207b around it.

  A second transparent glass substrate 241 is fixed on the upper surface of the image film 207. In this state, when UV light is irradiated for a predetermined time from the outside of the image film 207 and the base film 203 by the UV irradiation device 250, the UV photosensitive resin S ′ on the base film 203 side and under the light transmitting portion 207a of the image film 207 Is cured, but the UV photosensitive resin S ′ under the non-translucent portion 207b of the image film 207 is not cured (S108). After elapse of a predetermined UV curing time, the cover film 205 and the image film 207 are removed and washed with an appropriate solvent, whereby the uncured UV photosensitive resin S ′ is removed, and the UV cured resin portion corresponding to the alignment film 320 is removed. The alignment film printing stamper 100 ′ having the above is obtained (S109).

  However, such a conventional method has a problem that it is difficult to manufacture a stamper for printing an LCD alignment film having a size of 1600 mm × 1200 mm × 2.84 mm or more. This is because when the fixed glass substrate used in the UV irradiation process is 1600 mm x 1200 mm or more, the flatness or straightness of 15 μm or less required for the LCD alignment film printing stamper is caused by bending deformation of the fixed glass substrate. This is because it becomes difficult to satisfy. Even if a glass substrate of 1600 mm x 1200 mm or more is fixed, the required flatness cannot be maintained because it bends due to its own weight.

  Due to the lack of flatness of the fixed glass substrate, the thickness of the LCD alignment film printing stamper to be manufactured becomes non-uniform, and the alignment film cannot be manufactured with high accuracy. For this reason, it has been impossible to accurately produce an alignment film for LCDs of 1600 mm × 1200 mm or more using a single stamper.

  In addition, since the stamper is manufactured by placing the base film, liquid UV photosensitive resin, cover film, image film, etc. between the first fixed glass substrate and the second fixed glass substrate, the stamper cannot be manufactured continuously. There was a problem of being.

  In order to solve the above-mentioned problems of the conventional method for manufacturing an LCD alignment film printing stamper, Korean Patent Publication No. 2003-76885 (Patent Document 1) has a first pattern portion and a mark on a first base film. Forming a first mask stamper, forming a second pattern portion on the second base film to prepare a second mask stamper, and arranging and bonding the first and second mask stampers; Thus, a method of manufacturing a large-sized alignment film manufacturing mask stamper is disclosed. However, this method has a problem in that since the process of bonding the first mask stamper and the second mask stamper is newly added, the entire manufacturing process becomes complicated and the manufacturing cost of the final product increases greatly. .

  In addition, since the LCD alignment film is required to have high accuracy, the mask stamper cannot be bonded with high accuracy, and defects frequently occur in the bonding process. Due to such a problem, there is a fatal defect that it can be applied only to a system in which unit cells of the same pattern are repeated.

Korean Patent Publication No. 2003-76885 Specification

  Accordingly, an object of the present invention is to provide an apparatus for manufacturing an LCD alignment film printing stamper that can manufacture a single large stamper with a constant thickness, and can greatly prevent printing defects even with a large LCD alignment film. Is to provide a method.

  Another object of the present invention is not limited to a stamper made up of unit cells of the same pattern, but a single stamper made up of various patterns can be produced continuously, and the production process is simple, so that the production cost is markedly reduced. It is an object of the present invention to provide a manufacturing apparatus and a manufacturing method for an LCD alignment film printing stamper that can be reduced to a minimum.

  Accordingly, the stamper manufacturing apparatus for LCD alignment film printing according to the present invention includes (a) a laminate portion for laminating a base film, a liquid photosensitive resin, a cover film and an image film, and (b) the base film on the obtained laminate. A base exposure unit that irradiates UV light from the side; (c) a thickness adjustment unit that adjusts a distance between the base film and the image film; and (d) UV light that irradiates the laminate from the image film side. And (e) means for transporting the laminated body through the respective parts.

  The base exposure unit includes a transparent base glass plate having a predetermined flatness that is fixed so that the base film is transported horizontally, and a lower portion of the photosensitive resin through the base glass plate and the base film. It is desirable to have a base UV irradiation device that irradiates the region with UV light.

  The thickness adjusting unit adjusts an interval between the thickness adjusting member and at least a pair of thickness adjusting members contacting the lower surface of the base film and the upper surface of the image film so as to correspond to a target thickness of the stamper. It is desirable to have an interval adjusting device.

  It is preferable that the thickness adjusting member has a rod shape, and at least a portion in contact with the base film and the image film has a curved surface shape.

  It is preferable that the distance adjusting device includes a support portion for supporting the thickness adjusting member, and the support portion has a rack and pinion structure or a vertical slide structure and can be adjusted up and down with an accuracy of μm order.

  The pattern exposure unit is spaced from the pattern glass plate, a pattern UV irradiation device that irradiates the image film with UV light through the pattern glass plate, and a stamper target thickness. It is desirable to have a thickness correction base and a flatness adjusting means for adjusting the flatness of the thickness correction base.

  The flatness adjusting means preferably includes a fixed base that is in contact with the entire lower surface of the thickness correction base and has a plurality of vertical holes, and a fine adjustment bolt that is fitted to each hole so as to be movable up and down. .

  The pattern exposure unit preferably includes a plurality of suction holes provided in at least one of the thickness correction base and the pattern glass plate, and a suction device that sucks air from the suction holes.

  The transfer means is preferably provided downstream of the pattern exposure unit, and has a winding roll for winding the cover film and a motor for rotating the winding roll in the winding direction.

  In the laminated portion, it is preferable that the tip portions of the base film and the image film are attached to the cover film.

  The stamper manufacturing method for LCD alignment film printing according to the present invention includes a lamination step of laminating a base film, a liquid photosensitive resin, a cover film, and an image film, and irradiating the obtained laminate with UV light from the base film side. The method includes a base curing step, a thickness adjusting step of adjusting a gap between the base film and the image film, and a pattern curing step of irradiating the laminated body with UV light from the image film side.

  In the base curing step, it is preferable that only a lower region of the liquid photosensitive resin adjacent to the base film is cured by a predetermined thickness.

  The thickness adjustment is preferably performed with an accuracy of the order of μm.

  In the pattern curing step, it is preferable that the UV light passes through the light transmitting portion of the image film and the portion corresponding to the light transmitting portion of the liquid photosensitive resin is cured.

  With the apparatus and method of the present invention for manufacturing an LCD alignment film printing stamper, it is possible to manufacture a single large stamper with a constant thickness, thereby greatly reducing the printing defect rate of the large LCD alignment film. Can do. Further, since the stamper manufacturing process is simple, the manufacturing cost can be significantly reduced. In addition, not only small cells having the same pattern but also a large single stamper can be manufactured continuously.

  The present invention will be described in detail below with reference to the accompanying drawings. 5 shows an LCD alignment film printing stamper manufacturing apparatus according to an embodiment of the present invention, FIG. 6 shows an enlarged base exposure part of FIG. 5, and FIG. 7 shows an enlarged thickness adjustment part of FIG. FIG. 8 shows an enlarged view of the pattern exposure portion of FIG.

[1] Stamper manufacturing equipment for LCD alignment film printing
The stamper manufacturing apparatus 1 for LCD alignment film printing includes a base film 3, a liquid UV photosensitive resin S, a cover film 5, and a laminated part 10 for laminating an image film 7, and the obtained laminated body 100 from the base film 3 side. A base exposure unit 20 that irradiates UV light, a thickness adjustment unit 30 that adjusts the distance between the base film 3 and the image film 7, and a pattern exposure unit 40 that irradiates the laminate 100 with UV light from the image film 7 side; And means 50 for transferring the laminated body 100 from the laminated part 10 to the finished product discharging part 51 through the pattern exposure part 40.

  The stacking unit 10 includes a supply base 11 having a base surface 11a on which the base film 3 supplied from the roll 13 slides, a container 15 for storing the liquid UV photosensitive resin S supplied to the upper surface of the base film 3, and a liquid The unit 17 is configured to supply a pattern forming film (the cover film 5 and the image film 7) to the upper surface of the UV photosensitive resin S.

  The supply base surface 11a has a predetermined flatness and is fixed horizontally. Although the flatness of the base surface 11a does not directly affect the flatness of the stamper 100a, it is preferable that the flatness of the base film 3 can be maintained.

  The base film supply roll 13 rotatably accommodated in the base film accommodating portion 13a may be either the base film 3 wound around the roll 13b or the base film 3 itself wound. The front end portion of the base film 3 is attached to the cover film 5 and the remaining portion is not attached to the cover film 5 and is conveyed to the supply base surface 11a by the transfer means 50 described later. The base film 3 conveyed to the base surface 11a is transferred to the base exposure unit 20 in a state of being in close contact with the base surface 11a due to the weight of the liquid UV photosensitive resin S supplied thereon.

  The container 15 provided above the supply base 11 has a supply port 15b having an openable / closable cover 15a. When the supply port 15b is opened, the liquid UV photosensitive resin S accommodated in the container 15 is supplied to the upper surface of the base film 3 transferred along the base surface 11a.

  The pattern forming film supply unit 17 includes a rotatable roll 17a for supplying the cover film 5 and the image film 7 to the supply base 11, a rotatable roll 17b for supplying the cover film 5 to the roll 17a, and an image film for the roll 17a. 7 and a guide 17c for supplying 7.

  The roll 17a is adjacent to the supply port 15b of the container 15. The roll 17a is spaced above the base surface 11a so that the gap a between the base film 3 and the cover film 5 is equal to the desired thickness of the UV photosensitive resin S formed on the upper surface of the base film 3. . The cover film 5 and the image film 7 are supplied to the roll 17a in close contact with each other.

  The roll 17b is adjacent to the roll 17a. The cover film 5 rewound from the roll 17b passes through the container 15 side of the roll 17a, passes through the laminating unit 10, the base exposure unit 20, the thickness adjusting unit 30, and the pattern exposure unit 40, and then a roll 53 of the transfer means 50 described later. Rolled up.

  The guide 17c adjacent to the roll 17b includes a horizontal portion 17d for horizontally transferring the image film 7 and a downward inclined portion 17e directed from the horizontal portion 17d to the roll 17b. Due to this structure of the guide 17c, the image film 7 is prevented from being bent or deformed. Of course, the guide 17c can be formed in various shapes such as a roll, as long as damage such as bending deformation of the image film 7 can be prevented. The leading end of the image film 7 is attached to the cover film 5 before the roll 17b, and the remaining portion is not attached to the cover film 5, and is supplied to the base surface 11a through 17a by the transfer means 50 described later. . Since the image film 7 adheres to the outer surface of the cover film 5, it comes into contact with the liquid UV photosensitive resin S when passing through the laminating part 10, the base exposing part 20, the thickness adjusting part 30 and the pattern exposing part 40 through the roll 17 a. Never do. Thereby, the image film 7 to be reused is protected from the UV photosensitive resin S.

  As shown in an enlarged view in FIG. 6, the base exposure unit 20 provided downstream of the supply base 11 is a predetermined flat surface fixed so that the upper surface thereof is positioned substantially on the same horizontal plane as the base surface 11 a of the supply base 11. A transparent base glass plate 21 having a temperature, and a base UV irradiation device 23 provided below the base glass plate 21 so as to irradiate the base glass plate 21 with UV light.

  When the base exposure unit 20 irradiates the laminated body 100 with UV light from the base film 3 side, the lower region of the UV photosensitive resin S is cured by a predetermined thickness. After passing through the base exposure part 20 in this way, the lower region of the liquid UV photosensitive resin S filled in the gap a between the base film 3 and the cover film 5 is cured by UV light and adheres to the base film 3. To do. The UV photosensitive resin S remaining in the upper region of the gap a passes through the base exposure unit 20 while remaining in a liquid state. The base UV irradiation device 23 can have a lamp structure that emits UV light when energized.

  As shown in an enlarged view in FIG. 7, the thickness adjusting unit 30 includes at least a pair of thickness adjusting members 31 that are in contact with the upper and lower surfaces of the stacked body 100 transferred from the base exposure unit 20, And an interval adjusting device 33 that adjusts the interval to a desired thickness of the stamper 100a.

  In order to prevent damage to the base film 3 and the image film 7, each thickness adjusting member 31 is preferably a rod having a predetermined length, and at least a portion in contact with the base film 3 or the image film 7 is preferably curved. . The thickness adjusting member 31 is more preferably cylindrical. Of course, as long as the base film 3 and the image film 7 are not damaged, the cross-sectional shape of the thickness adjusting member 31 can be various. In order to precisely adjust the thickness of the laminate 100, the thickness adjusting members 31 are respectively paired on the side adjacent to the downstream end of the base exposure unit 20 and on the side adjacent to the upstream end of the pattern exposure unit 40 described later. Multiple pairs are provided.

  The interval adjusting device 33 raises and lowers each pair of thickness adjusting members 31. The support part that supports the thickness adjusting member 31 above and below the image film 7 and the base film 3 can take various vertical movement structures such as a rack and pinion structure or a vertical slide structure. The thickness adjusting members 31 can be moved in the vertical direction with respect to each other. The interval adjusting device 33 can finely adjust the interval of the thickness adjusting member 31 with an accuracy of the order of μm.

  The pattern exposure unit 40 downstream of the thickness adjusting unit 30 includes a pattern glass plate 41 fixed to the frame 40a and a pattern UV for irradiating the pattern glass plate 41 with UV light as shown in FIG. An irradiation device 43, a thickness correction base 45 that has a base surface 45a on which the laminate 100 slides and corrects the thickness of the laminate 100, and a flatness adjusting means 47 that adjusts the flatness of the thickness correction base 45 And a base film adsorbing means 49 for bringing the base film 3 into close contact with the thickness correction base 45.

  The patterned glass plate 41 having a flatness corresponding to the desired flatness of the stamper 100a is in sliding contact with the upper surface of the image film 7. In order to smoothly introduce the laminated body 100 and adjust the thickness, it is desirable to provide a tapered surface 41a at the upstream end of the patterned glass plate 41.

  The pattern UV irradiation device 43 can have a lamp structure that emits UV light when energized. The UV light passes through the pattern glass plate 41 and reaches the image film 7. The UV light reaching the image film 7 passes only through the translucent part 7a corresponding to the stamper 100a. Of the liquid UV photosensitive resin S, only the portion corresponding to the translucent portion 7a is cured, and the portion corresponding to the non-translucent portion 7b remains liquid. As will be described later, the non-cured portion is removed by washing with an appropriate solvent, whereby the stamper 100a having the alignment film printing surface is formed.

  The thickness correction base 45 that functions as a transfer surface of the laminated body 100 has a flatness corresponding to the flatness of the patterned glass plate 41. The thickness correction base 45 is preferably formed of an iron plate or the like having a desired thickness so that deformation such as bending does not occur.

  The flatness adjusting means 47 in contact with the entire lower surface of the thickness correction base 45 includes a fixed base 47a having a plurality of vertical holes 47b drilled at predetermined intervals, and a bolt 47c fitted to each hole 47b so as to be movable up and down. Composed. If there is a part with poor flatness on the pattern glass plate 41 or the thickness correction base 45, the flatness of the thickness correction base 45 is adjusted by raising and lowering the bolt 47c located in that part, thereby eliminating the lack of flatness. can do. The flatness adjusting means 47 may have any structure as long as the height of the region obtained by virtually dividing the thickness correction base 45 at a predetermined interval can be finely adjusted. Fine adjustment of the height of the thickness correction base 45 is performed with an accuracy of the order of μm.

  The base film suction means 49 includes a plurality of suction holes 49a formed at predetermined intervals over the entire base surface 45a, and a suction device 49b that sucks air from the suction holes 49a. By sucking air from the plurality of suction holes 49a, the base film 3 passing through the pattern exposure unit 40 is brought into close contact with the base surface 45a. Thereby, the flatness and thickness defect of the stamper 100a can be more reliably prevented. The suction holes 49a may be provided at predetermined intervals over the entire area of the pattern glass plate 41, or may be provided at predetermined intervals over the entire area of both the thickness correction base 45 and the pattern glass plate 41.

  A finished product discharge unit 51 is provided downstream of the pattern exposure unit 40 for discharging the finished product while maintaining the level.

  The transfer means 50 downstream of the finished product discharge unit 51 includes a winding roll 53 and a motor 55 that rotates the winding roll 53. As described above, the front end portion of the cover film 5 is wound in advance on the take-up roll 53, and only the front end portions of the base film 3 and the image film 7 are attached to the cover film 5. When the take-up roll 53 is rotated while supplying the resin S onto the base film 3, a laminate 100 is formed and passes through each process part.

[2] Manufacturing Method of LCD Alignment Film Printing Stamper A manufacturing method of the stamper 100a using the LCD alignment film printing stamper manufacturing apparatus 1 having the above-described configuration will be described in detail with reference to FIG. 9 and FIGS. To do. The stamper 100a is manufactured by a step of laminating the base film 3, the liquid UV photosensitive resin S, the cover film 5 and the image film 7, and curing the lower region of the liquid UV photosensitive resin S to form the base film. A base curing step (S02) for fixing to 3; a thickness adjusting step (S03) for adjusting the thickness of the laminate 100 to correspond to the target thickness of the stamper 100a; and an image film 7 of the UV photosensitive resin S. A pattern curing step (S04) for curing the portion corresponding to the transparent portion 7a and a washing step (S05) for washing away the non-cured portion of the liquid UV photosensitive resin S.

  In the laminating step (S01), as shown in FIGS. 10 and 11, the base film 3, the liquid UV photosensitive resin S, the cover film 5 and the image film 7 are laminated in the laminating portion 10. Before supplying the liquid UV photosensitive resin S, the front end portion of the cover film 5 is attached to the take-up roll 53, and the front end portions of the base film 3 and the image film 7 are attached to the cover film 5 in the laminated portion 10. In this state, when the supply port 15b of the container 15 is opened and the motor 55 is driven, the liquid UV photosensitive resin S is supplied between the base film 3 and the cover film 5, and the obtained laminate 100 is cured by the base. It is transferred to the base exposure unit 20 for performing the step (S02).

  In the base curing step (S02), as shown in FIG. 12, when the laminate 100 is irradiated with UV light from the base film 3 side, the lower region of the liquid UV photosensitive resin S adjacent to the base film 3 has a predetermined thickness. Then, it is cured and fixed to the base film 3. The remaining UV photosensitive resin S in the upper region is transferred to the thickness adjusting unit 30 that performs the thickness adjusting step (S03) while being in a liquid state.

  In the thickness adjusting step (S03), as shown in FIG. 13, the gap a between the base film 3 and the image film 7 of the laminate 100 is adjusted so as to correspond to the target thickness of the stamper 100a. As a result, air bubbles between the image film 7 and the cover film 5 and between the cover film 5 and the liquid UV photosensitive resin S are removed, and the pattern exposure step (S04) for performing the pattern curing step (S04) in a state where they are in close contact with each other. Transferred to 40.

  In the pattern curing step (S04), as shown in FIG. 14, when the laminate 100 is irradiated with UV light, the UV light passes through the light transmitting portion 7a of the image film 7 and is liquid UV photosensitive under the light transmitting portion 7a. The resin S part is cured. The portion of the liquid UV photosensitive resin S corresponding to the non-translucent portion 7b remains liquid without being cured. Thereby, the portion of the liquid UV photosensitive resin S corresponding to the translucent portion 7a is integrated with the cured lower region.

  In the cleaning step (S05), a non-cured portion of the liquid UV photosensitive resin S is removed by cleaning with an appropriate solvent, whereby a stamper 100a as shown in FIG. 15 is obtained.

  According to the above manufacturing process, the process from lamination to completion of the stamper 100a can be continuously performed, and various processes such as a small light-transmitting portion 7a and a large light-transmitting portion 7a (for example, 1600 mm × 1200 mm or more) are possible. By using the image film 7 having the following pattern, various stampers 100a such as a stamper 100a having a plurality of small stamp surfaces or a stamper 100a having one large (for example, 1600 mm × 1200 mm or more) stamp surface are continuously formed. Can be manufactured.

  In the apparatus and method of the present invention for manufacturing an LCD alignment film printing stamper, a base film, a liquid UV photosensitive resin, a cover film and an image film are laminated, and the steps of base curing, fine thickness adjustment, pattern curing and washing are performed. By doing so, a stamper with a constant thickness can be obtained.

  Needless to say a small stamper, a large stamper of 1600 mm × 1200 mm or more can be manufactured to meet the requirements of target thickness and flatness (particularly flatness of 15 μm or less). As a result, a large LCD alignment film can be printed with high quality.

  Since the manufacturing process is simple, the manufacturing cost of the stamper can be significantly reduced. Further, not only the production of a plurality of stamp surfaces, but also a stamper having a large single stamp surface can be produced continuously.

  According to the manufacturing apparatus and method for the LCD alignment film printing stamper of the present invention, since the large stamper can be continuously manufactured to a uniform thickness, defects in the large LCD alignment film printing are remarkably reduced. Further, since the manufacturing process is simple, there is an advantage that the manufacturing cost of the stamper is remarkably reduced.

It is sectional drawing which shows the general structure of LCD. It is a perspective view which shows an example of a LCD alignment film printing process. It is a perspective view which shows another example of an LCD alignment film printing process. It is a figure which shows the manufacturing process of the conventional stamper for alignment film printing. 1 is a schematic view showing an apparatus for manufacturing a stamper for LCD alignment film printing according to an embodiment of the present invention. It is an enlarged view which shows the base exposure part of FIG. It is an enlarged view which shows the thickness adjustment part of FIG. It is an enlarged view which shows the pattern exposure part of FIG. 3 is a flowchart illustrating a method for manufacturing a stamper for printing an alignment film according to an embodiment of the present invention. It is a figure which shows the manufacturing process of the stamper for LCD alignment film printing by one Example of this invention. It is the schematic which shows the manufacturing process of the stamper for LCD alignment film printing by one Example of this invention. It is the schematic which shows the manufacturing process of the stamper for LCD alignment film printing by one Example of this invention. It is the schematic which shows the manufacturing process of the stamper for LCD alignment film printing by one Example of this invention. It is the schematic which shows the manufacturing process of the stamper for LCD alignment film printing by one Example of this invention. It is a perspective view which shows an example of the stamper for LCD alignment film printing manufactured by this invention.

Explanation of symbols

3 ... Base film 5 ... Cover film 7 ... Image film
10 ... Laminated part
20 ... Base exposure section
30 ・ ・ ・ Thickness adjuster
31 ・ ・ ・ Thickness adjustment member
33 ... Interval adjustment device
40 ... Pattern exposure part
50 ・ ・ ・ Transporting means
100 ... Laminate
100a ... Stamper

Claims (14)

  An apparatus for producing an alignment film printing stamper, wherein (a) a base film, a liquid photosensitive resin, a cover film and an image film are laminated, and (b) the resulting laminate from the base film side. A base exposure part for irradiating UV light; (c) a thickness adjusting part for adjusting a distance between the base film and the image film; and (d) a pattern for irradiating the laminate with UV light from the image film side. An apparatus for manufacturing a stamper for LCD alignment film printing, comprising: an exposure unit; and (e) means for transporting the laminated body through the units.   The LCD alignment film printing stamper manufacturing apparatus according to claim 1, wherein the base exposure unit includes a transparent base glass plate having a predetermined flatness that is fixed so that the base film is transported horizontally; An apparatus comprising: a base UV irradiation device that irradiates UV light to a lower region of the photosensitive resin through a base glass plate and the base film.   3. The stamper manufacturing apparatus for LCD alignment film printing according to claim 1, wherein the thickness adjusting unit includes at least a pair of thickness adjusting members that are in contact with a lower surface of the base film and an upper surface of the image film, respectively, And a distance adjusting device for adjusting the distance of the thickness adjusting member so as to correspond to the target thickness of the stamper.   4. The stamper manufacturing apparatus for LCD alignment film printing according to claim 3, wherein the thickness adjusting member has a rod shape, and at least a portion in contact with the base film and the image film has a curved surface shape.   5. The stamper manufacturing apparatus for LCD alignment film printing according to claim 3 or 4, wherein the distance adjusting device includes a support portion that supports the thickness adjusting member, and the support portion has a rack and pinion structure or a vertical slide structure. A device that can be adjusted up and down with an accuracy of the order of μm.   In the stamper manufacturing apparatus for LCD alignment film printing in any one of Claims 1-5, the said pattern exposure part is pattern UV which irradiates UV light to the said image film through the said pattern glass plate. An irradiation apparatus, a thickness correction base that is separated from the pattern glass plate so as to correspond to a target thickness of a stamper, and a flatness adjusting means that adjusts the flatness of the thickness correction base. Equipment.   7. The stamper manufacturing apparatus for LCD alignment film printing according to claim 6, wherein the flatness adjusting means is in contact with the entire lower surface of the thickness correction base and has a fixed base having a plurality of vertical holes, and a hole in each hole. An apparatus comprising: a fine adjustment bolt fitted so as to be movable up and down.   The LCD alignment film printing stamper manufacturing apparatus according to claim 6, wherein the pattern exposure unit includes a plurality of suction holes provided in at least one of the thickness correction base and the pattern glass plate, and the suction holes. And a suction device for sucking air.   In the stamper manufacturing apparatus for LCD alignment film printing in any one of Claims 1-7, the said transfer means is provided downstream of the said pattern exposure part, the winding roll which winds up the said cover film, and the said winding-up And a motor for rotating the roll in the winding direction.   The apparatus for producing a stamper for LCD alignment film printing according to any one of claims 1 to 9, wherein the base film and the tip of the image film are attached to the cover film.   A method for producing a stamper for LCD alignment film printing, comprising: a step of laminating a base film, a liquid photosensitive resin, a cover film and an image film; and a base for irradiating the obtained laminate with UV light from the base film side A method comprising: a curing step; a thickness adjusting step for adjusting a gap between the base film and the image film; and a pattern curing step for irradiating the laminate with UV light from the image film side.   12. The method for producing an alignment film printing stamper according to claim 11, wherein in the base curing step, only a lower region of the liquid photosensitive resin adjacent to the base film is cured by a predetermined thickness. .   13. The method for producing a stamper for LCD alignment film printing according to claim 11 or 12, wherein the thickness adjustment is performed with an accuracy on the order of μm.   14. The LCD alignment film printing stamper manufacturing method according to claim 11, wherein, in the pattern curing step, the UV light passes through a light-transmitting portion of the image film, and the light-transmitting light of the liquid photosensitive resin is obtained. Curing the portion corresponding to the portion.

Images