JP2006283792A - Moving device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact moving device having a cover capable of setting lower the height of a table by reducing the amount of deflection thereof by its self weight even when the moving device is increased in length according to the moving distance thereof. <P>SOLUTION: This moving device comprises a plurality of linear motion guides 4 guiding a movable body 2 in a prescribed direction and a drive part 6 positioned between the plurality of linear motion guides and capable of moving the movable body along the linear motion guides which are installed on a base 10. Covers 16 and 18 covering the drive part are installed along the moving direction of the movable body, and so formed that can be fixed, at its side part, to the base at a plurality of positions along the moving direction of the movable body. In this case, the covers are formed to have a plurality of cover structures 16k and 18k detachably connectable to each other. The cover structures are formed so as to be fixed, at its side part, to the base at a prescribed interval along the moving direction of the movable body. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a moving device that moves a movable body along a linear motion guide.

  2. Description of the Related Art Conventionally, when inspecting and manufacturing various substrates such as liquid crystal and semiconductor, for example, a moving device that moves a movable body on which an inspection tool, a manufacturing tool, and the like can be mounted along a linear guide is known. In order to isolate the inside of the apparatus from the outside, such a moving apparatus may be configured with a cover as shown in Patent Document 1, for example. As an example, FIGS. 4A to 4C show a moving device in which only a driving unit 6 for moving the movable body 2 along the linear motion guide 4 is covered with a cover 8. The linear motion guides 4 are provided on both sides of the movable body 2 in the moving direction, and the drive unit 6 is interposed in a region between the mutual linear motion guides 4.

  The linear motion guide 4 includes a guide rail 4a extending along the moving direction of the movable body 2 and, for example, two sliders 4b provided slidably along the guide rail 4a. In this case, the guide rail 4 a is fixed on a fixed surface 10 s projecting along the moving direction of the movable body 2 on both sides of the base 10, and the slider 4 b is connected to the movable body 2. In addition, although it does not attach | subject a reference code | symbol in particular, on both the outer sides of the guide rail 4a, the rolling groove | channel which the rolling body not shown extended along the moving direction of the movable body 2 rolls is formed, A rolling groove (not shown) for rolling a rolling element is also formed on both inner sides of the slider 4b. A plurality of rolling elements circulating in the slider 4b can roll between the rolling groove of the opposing guide rail 4a and the rolling groove of the slider 4b. Thereby, the slider 4b slides along the guide rail 4a without detaching from the guide rail 4a or falling off.

  The drive unit 6 is movable along the ball screw 6a by being engaged with the ball screw 6a extending along the moving direction of the movable body 2 and rotating the ball screw 6a. A nut 6b (FIG. 1B) is provided. Both ends of the ball screw 6a are rotatably supported by support portions (not shown), and the support portions are fixed (projected) to the base 10. One end of the ball screw 6a is connected to a rotating shaft of a motor (not shown), and the ball screw 6a can be rotated at a desired rotation speed by rotating the motor. Further, a flange 6f is formed integrally with the nut 6b, and a bracket 12 is attached to the flange 6f. The bracket 12 extends so as not to contact the cover 8 that covers the drive unit 6 and the slider 4 b of the linear motion guide 4, and the extended end portion is connected to the back surface of the movable body 2.

  In such a configuration, when the motor is rotated, the rotational motion is transmitted from the rotating shaft of the motor to the ball screw 6a, and the ball screw 6a is rotated. At this time, the nut 6b moves along the ball screw 6a by the rotation of the ball screw 6a, and the moving force at that time is transmitted from the flange 6f to the movable body 2 via the bracket 12. In this case, each slider 4b fixed to the movable body 2 slides along each guide rail 4a, whereby the movable body 2 can be moved in a predetermined direction.

  Further, the cover 8 used in the moving device of this example includes a long thin plate-like cover body 8a extending along the ball screw 6a of the drive unit 6, and extends downward from both sides of the thin plate-like cover body 8a. The wall portion 8b is formed, and a space region through which the nut 6b and the flange 6f can pass is formed between the wall portions 8b. Such a cover 8 has a thin plate-like cover body 8a interposed between the movable body 2 and the drive section 6, and the base 10 (or a support section for the ball screw 6a) from the screw holes 8c at both ends in the longitudinal direction. ) Is fixed by fastening a fixing screw (not shown). In this state, the drive unit 6 (ball screw 6a, nut 6b) is covered with the thin plate-like cover body 8a on its upper side and both sides thereof are covered with the wall portion 8b, and when moving the movable body 2, the nut 6b And the flange 6f passes through the space area comprised by the thin plate-shaped cover body 8a and both wall part 8b.

  Further, for example, FIGS. 5A to 5C show a moving device in which the drive unit 6 and the entire linear motion guide 4 provided on both sides of the drive unit 6 are covered with a cover 14. The cover 14 used in the moving device of this example includes a long thin plate-like cover body 14a covering the entire upper side of the drive unit 6 and the linear motion guide 4, and walls extending downward from both sides of the thin plate-like cover body 14a. Part 14b. Note that the drive unit 6 and the linear motion guide 4 have the same configuration as the above-described moving device (FIGS. 4A and 4B), and thus description thereof is omitted.

  In this case, the thin plate-like cover body 14a is provided with protruding portions 14t protruding in the longitudinal direction from the wall portion 14b, and screw holes 14c are formed on both sides of the protruding portion 14t. Such a cover 14 is provided with a fixing screw (not shown) from each screw hole 14c to the base 10 (or a cover fixing part (not shown)) with the thin plate-like cover body 14a positioned on the upper side of the movable body 2. It is fixed by positioning. Note that the movable body 2 has both side portions extending beyond the thin plate-like cover body 14a and extending in a direction transverse to the longitudinal direction of the cover 14, and projecting toward the upper side of the thin plate-like cover body 14a.

  By the way, the covers 8 and 14 of the moving device as described above both have a long shape along the moving direction of the movable portion 2, and only the both ends in the longitudinal direction are fastened with fixing screws. . In this case, for example, as shown in FIGS. 4D and 5D, the covers 8 and 14 are fixed in a state of being bent by their own weight. This appears as a large deflection as the covers 8, 14 become longer.

  Although it is desired to make the moving device compact in the height direction, conventionally, it is necessary to secure a margin for the upper and lower sides of the device in consideration of the amount of bending of the long covers 8 and 14. The height H had to be set high. In other words, in the conventional mobile device, there is a limit to setting the table height H low (to achieve compactness in the height direction of the device).

In this case, in order to set the table height H low (to achieve compactness in the height direction of the apparatus), the covers 8 and 14 may be shortened. The guide 4 cannot be covered. The back H of the table means that the base 10 is fixed to a reference surface (not shown) from the reference surface to the upper surface of the movable body 2 (in particular, no reference numeral is attached). Refers to the height dimension.
Utility Model Registration Gazette No. 2518611

  The present invention has been made to solve such problems, and its purpose is to reduce the amount of bending due to its own weight even when the length of the movable body is increased according to the moving distance of the movable body, and to set the back of the table low. It is an object of the present invention to provide a compact moving device having a cover that can be used.

  In order to achieve such an object, the present invention provides a plurality of linear motion guides for guiding a movable body in a predetermined direction, and a drive for moving the movable body along the linear motion guides between the plurality of linear motion guides. And a cover that covers both the linear motion guide or drive unit or the linear motion guide and drive unit is provided along the moving direction of the movable body. Is configured such that its side portion can be fixed to the base at a plurality of locations along the moving direction of the movable body. In this case, the cover may be configured not only in the case of a single unit, but also provided with a plurality of cover components that can be detachably connected to each other, and each cover component has a side portion of the movable member. In some cases, it may be configured to be fixed to the base at predetermined intervals along the moving direction.

  In such an invention, the cover structure includes at least one side cover part that covers one side of the drive part, an upper cover part that covers the upper side of the drive part, and a fixing part that fixes the one side cover part to the base. The movable body and the drive unit are connected to each other through a gap formed on the other side of the cover structure. As another configuration, the cover structure is fixed to the base with a one-side cover portion that covers at least one side of the drive portion, an upper cover portion that simultaneously covers the drive portion and the upper side of the linear motion guide, and the one-side cover portion. The movable body and the drive section are connected to each other through a gap formed on the other side of the cover structure.

  Further, in the present invention, the cover structure has an other side cover part that covers the other side of the drive part, and a fixing part that fixes the other side cover part to the base, and the movable body and the drive part are The upper cover part and the other cover part are connected to each other through a gap. Furthermore, the cover structure has a guide cover portion that covers at least one side of the linear guide, and a guide fixing portion that fixes the guide cover portion to the base.

  According to the present invention, the side portion of the cover is configured to be fixed to the base at predetermined intervals along the moving direction of the movable body, so that even when the length of the cover is increased according to the moving distance of the movable body, the deflection due to its own weight. It is possible to realize a compact moving device having a cover that can be set to a small amount and set the table back low.

  Hereinafter, a mobile device according to a first embodiment of the present invention will be described with reference to FIGS. This embodiment is an improvement of the cover, and other configurations (for example, the linear motion guide 4, the drive unit 6, and the base 10) are the same as those of the conventional moving device (FIGS. 4A and 4B) described above. It is the same configuration. For this reason, the same components are denoted by the same reference numerals in the drawings, and the description thereof is omitted.

  As shown in FIG. 1A, the cover 16 applied to the moving device of the present embodiment is provided along the moving direction of the movable body 2 so as to cover the entire drive unit 6. The side portion is configured to be fixed to the base 10 at a predetermined interval along the moving direction of the movable body 2. More specifically, the cover 16 includes a plurality of cover constituent bodies 16k that can be detachably connected to each other, and each cover constituent body 16k has a side portion thereof in the moving direction of the movable body 2. And fixed to the base 10 at a predetermined interval along.

  Each cover component 16k includes a one-side cover part 16a that covers one side of the drive part 6, an upper cover part 16b that covers the upper side of the drive part 6, and a fixing part 16c that fixes the one-side cover part 16a to the base 10. The movable body 2 and the drive unit 6 are connected to each other through a gap formed on the other side of the cover structure 16k. In this case, in each cover component 16k, the one-side cover portion 16a is raised from the fixed portion 16c along one side of the drive portion 6, and the upper cover portion 16b is extended from the top of the one-side cover portion 16a. The drive unit 6 is folded back in the other direction.

  In such a configuration, first, according to the length of the drive unit 6 (for example, the total length of the ball screw 6a), the number of cover structural bodies 16k that can cover the entire drive unit 6 is prepared. Subsequently, a plurality of cover components 16k are connected to each other along the drive unit 6 (ball screw 6a) so as to cover one side and the upper side of the drive unit 6 by the one-side cover unit 16a and the upper cover unit 16b. . And the fixing | fixed part 16c of each cover structure 16k is fixed to the base 10. FIG.

  Here, as a method of fixing the fixing portion 16c to the base 10, for example, various methods such as screwing, adhesion, welding, and fitting can be applied. Here, as an example, the fixing portion 16c is fixed with a screw P. A method of fixing (fastening) to the base 10 is assumed. In the drawing, each cover component 16k (fixing portion 16c) is fixed (fastened) at two locations on both ends with screws P, but may be fixed (fastened) at three locations or more. .

  Moreover, what is necessary is just to make it the edge parts abut against the connection part of the some cover structure 16k mutual. Alternatively, for example, as shown in FIG. 1B, an engaging portion L folded in a crank shape on one side may be formed and connected. This prevents entry of foreign matter (for example, water, dust, etc.) from the outside and leakage of dust generation (for example, lubricant applied to the ball screw 6a) from the inside at the connection portion. it can.

  Thus, in the state which fixed the some cover structure 16k to the base 10, a clearance gap is comprised by the other side (other side of the drive part 6) of each cover structure 16k. In this case, the movable body 2 and the drive unit 6 can be connected to each other by extending the one end 12a of the bracket 12 through the gap and connecting it to the movable body 2. In addition, as a connection method of the end 12a of the bracket 12 and the movable body 2, various methods, such as screwing, adhesion | attachment, welding, fitting, are applicable, for example.

  As described above, according to the moving device of the present embodiment, only the side portion of the cover 16 can be fixed to the base 10 at a predetermined interval along the moving direction of the movable body 2, thereby moving the movable body 2. Accordingly, even when the drive unit 6 (ball screw 6a) is elongated, the amount of bending due to the weight of the cover 16 can be reduced. In other words, conventionally, only the both ends in the longitudinal direction of the long cover are fixed, so that the amount of bending due to the weight of the cover increases, and it is necessary to secure a margin for the upper and lower sides of the device in consideration of the large amount of bending. There is a limit to setting the table height H low (to make the device compact in the height direction). However, in this embodiment, since the side portion of the cover 16 is fixed to the base 10, the amount of bending due to the weight of the cover 16 can be reduced, and as a result, the table height H is set low. Thus, the height of the apparatus can be reduced.

In addition, according to the present embodiment, the drive unit 6 can be made as long as necessary (for example, the full length of the ball screw 6a) only by preparing and arranging a plurality of cover components 16k. be able to. This facilitates assembling and fixing the cover 16 to the moving device, and as a result, the manufacturing cost of the moving device can be greatly reduced.
Furthermore, in the past, the entire cover had to be removed when performing the maintenance and inspection of the drive unit 6, but in the present embodiment, since the plurality of cover structural bodies 16k can be partially removed, the maintenance and inspection work is performed. It becomes possible to carry out easily and efficiently.

  In addition, conventionally, both ends in the longitudinal direction of a relatively long integral cover are fixed so as to cover the entire drive unit 6, so it is necessary to secure a space for the fixing on both sides in the longitudinal direction of the apparatus. there were. However, in the present embodiment, since only the side portion of the cover 16 is fixed to the base 10, there is no need to secure a useless space as in the prior art. Along with this, it becomes possible to make the longitudinal direction compact at the same time.

In the above-described embodiment, it is assumed that the moving device is positioned on a horizontal plane. For example, as shown in FIG. 1C, a vertical wall M2 raised vertically to the horizontal plane M1. In the case of fixing the moving device, the one side cover portion 16a of the cover 16 (cover structure 16k) may be fixed so as to be positioned on the horizontal plane M1 side.
Here, assuming that various substrates such as liquid crystal and semiconductor are set on the horizontal plane M1 and an inspection tool, a manufacturing instrument, and the like are mounted on the movable body 2, for example, they are driven on the various substrates during inspection and manufacturing. Dust generation from the inside of the portion 6 (for example, a lubricant applied to the ball screw 6a) may fall. In this case, by positioning the one-side cover portion 16a on the horizontal plane M1 side, it is possible to prevent the dust generation (lubricant) from falling on the horizontal plane M1 with the one-side cover portion 16a. In the case of a device configuration in which foreign matter (for example, water, dust, etc.) enters the drive unit 6 with an emphasis on intrusion, the top and bottom of the moving device is reversed and the one-side cover portion 16a is moved upward (what is the horizontal plane M1 It should be positioned on the opposite side.
In addition, expressions such as “upper cover part” and “one side cover part” in the present specification and claims are based on the fixed surface 10c of the guide rail 4a of the base 10. The same applies to any case where the moving device is fixed to the vertical wall M2.

  Further, as another configuration example of the moving device described above, for example, as shown in FIG. 1 (d), a cover 18 having an L-shaped cross section may be added so as to cover the other side of the drive unit 6. In this configuration example, the cover 18 includes a plurality of cover structural bodies 18k having an other side cover part 18a that covers the other side of the drive unit 6 and a fixing part 18c that fixes the other side cover part 18a to the base 10. ing. In addition, the cover structure 18k is configured to be detachably connectable to each other, like the cover structure 16k described above. Moreover, each cover structure 16k is comprised so that the side part (fixed part 18c) can be fixed to the base 10 at predetermined intervals along the moving direction of the movable body 2. As shown in FIG.

  In this case, a gap is formed between the upper cover portion 16b and the other side cover portion 18a, and the movable body 2 is connected to the movable body 2 by extending one end 12a of the bracket 12 through the gap. 2 and the drive unit 6 can be connected to each other. In addition, as a connection method of the end 12a of the bracket 12 and the movable body 2, various methods, such as screwing, adhesion | attachment, welding, fitting, are applicable, for example. Moreover, the method similar to the fixing | fixed part 16c of the cover 16 mentioned above can be applied to the method of fixing the fixing | fixed part 18c to the base 10. FIG.

  According to such a configuration, since the two covers 16 and 18 are used, both sides and the upper side of the drive unit 6 can be covered at the same time, and therefore foreign matter (for example, water, dust, etc.) to the drive unit 6 is covered. And the leakage of dust generated from the inside of the drive unit 6 (for example, lubricant applied to the ball screw 6a) can be more reliably prevented. In this case, in the configuration in which the moving device is fixed to the vertical wall M2 raised vertically with respect to the horizontal plane M1, for example, as shown in FIG. 1 (e), the cover 18 is positioned on the upper side, or the top and bottom are reversed. Thus, even if the cover 18 is positioned on the horizontal plane M1 side, it is possible to prevent the dust generation (for example, lubricant applied to the ball screw 6a) from dropping from the inside of the drive unit 6. Since other effects are the same as those of the above-described embodiment, description thereof is omitted.

  Further, in the above-described covers 16 and 18, the lengths of the cover structural bodies 16k and 18k, the heights of the one side cover portion 16a and the other side cover portion 18a, and the width of the upper cover portion 16b have not been particularly described. Since these are arbitrarily set according to, for example, the size and shape of the drive unit 6, there is no particular numerical limitation here. Further, the lengths of the cover components 16k, 18k may all be set to the same dimension, or the cover components 16k, 16k, 18k having different lengths depending on the length of the moving device and the length of the drive unit 6. 18k may be configured.

  In the embodiment described above, the covers 16 and 18 for covering the drive unit 6 have been described. However, the present invention is not limited to this, and other configurations of the moving device (for example, the linear motion guide 4). ) You may add a cover to cover the whole. The cover is also configured to fix only the side portion to the base 10.

  As a first modification, for example, FIG. 2A shows a moving device having a cover 16, and the cover 20 provided in the moving device includes a guide cover portion 20 a that covers the linear guide 4. A plurality of cover structural bodies 20k having guide fixing portions (side portions) 20b for fixing the guide cover portion 20a to the base 10 are provided. The cover structure 20k of this configuration example is configured to be detachably connectable to each other, like the cover structures 16k and 18k described above, and a predetermined number of covers according to the length of the linear guide 4 By connecting the structural bodies 20k to each other, the entire linear motion guide 4 can be covered.

  In this case, the guide cover portion 20a extends from the side surface of the base 10 beyond the linear guide 4 and its upper part is folded back to the movable body 2 side. May be. In the drawing, the two cover structural bodies 20k are arranged so as to cover the two linear motion guides 4 from both sides, but may be configured by only one of them. Further, as a method of fixing the guide fixing portion 20b to the base 10, the same method as the fixing portions 16c and 18c of the covers 16 and 18 described above can be applied.

According to such a configuration, since the linear motion guide 4 can be isolated from the outside by the cover 20, foreign matter (for example, between the guide rail 4a and the slider 4b) (for example, between the guide rail 4a and the slider 4b) Intrusion of water, dust, etc.) can be prevented. As a result, it becomes possible to keep the movement stability and movement smoothness of the movable body 2 constant over a long period of time.
Further, since the cover 20 is provided, the drive unit 6 is double-covered by the cover 16 and the cover 20, and foreign matter enters the drive unit 6 and generates dust from the drive unit 6 to the outside. It is possible to prevent leakage of the air more reliably.

As a second modification, for example, as shown in FIG. 2B, a cover 20 may be further added to the moving device having the covers 16 and 18. Note that the configuration of the cover 20 is the same as that of the above-described first modification (FIG. 2A), and thus the description thereof is omitted.
According to such a configuration, both sides of the drive unit 6 can be doubly covered with the two covers 16, 20 and 18, 20, respectively. Therefore, for example, as shown in FIG. Even when fixed to M2, foreign matter does not enter the drive unit 6 and the linear motion guide 4, and dust generation (lubricant) does not fall from the drive unit 6 to the horizontal plane M1. Such an effect is the same even when the moving device is reversed and fixed. Since other effects are the same as those of the first modification described above, description thereof is omitted.

  As a third modification, for example, as shown in FIG. 2C, the cover 18 may be configured in the same shape as the cover 16, and the covers 16 and 18 may be disposed opposite to each other with the drive unit 6 interposed therebetween. . In this case, the upper cover portion 18 b is added to the cover 18 so as to face the upper cover portion 16 b of the cover 16. The movable body 2 and the drive unit 6 can be connected to each other by extending the one end 12a of the bracket 12 through the gap between the upper cover portions 16b and 18b and connecting it to the movable body 2. . In addition, as a connection method of the end 12a of the bracket 12 and the movable body 2, various methods, such as screwing, adhesion | attachment, welding, fitting, are applicable, for example.

  As a fourth modified example, as shown in FIG. 2D, for example, a cover 20 may be further added to the moving device of the third modified example described above. Note that the configuration of the cover 20 is the same as that of the above-described first modification (FIG. 2A), and thus the description thereof is omitted.

  Next, a mobile device according to a second embodiment of the present invention will be described with reference to FIGS. This embodiment is an improvement of the cover 16 (cover structure 16k), and the other structure is the same as that of the above-described first embodiment (FIG. 1). For this reason, the same components are denoted by the same reference numerals in the drawings, and the description thereof is omitted.

  As shown in FIG. 3A, in the cover 16 (cover structure 16k) of the present embodiment, the upper cover portion 16b is configured to cover the linear motion guide 4 and the drive portion 6 at the same time. Yes. In order to realize this configuration, projecting portions 16d projecting by a predetermined amount in the directions of the respective linear motion guides 4 are provided on both sides of the upper cover portion 16b. The protrusion 16d of the portion 16b is simultaneously covered. In this case, it is preferable that the movable body 2 is provided with an escape portion 2g so as not to come into contact with the protruding portion 16d during the movement of the movable body 2. The size of the escape portion 2g can be changed as appropriate according to the protruding amount of the protruding portion 16d.

  As described above, according to the present embodiment, the linear motion guide 4 and the drive unit 6 can be covered at the same time by providing the protruding portions 16d on both sides of the upper cover portion 16b. In this case, since a separate cover for covering the linear motion guide 4 is not required, the number of parts of the entire apparatus can be reduced, and as a result, the manufacturing cost of the moving apparatus can be reduced. Since other effects are the same as those of the first embodiment described above, description thereof is omitted.

  In the above-described embodiment, it is assumed that the moving device is positioned on the horizontal plane. For example, as shown in FIG. 3B, the moving apparatus moves to the vertical wall M2 raised vertically to the horizontal plane M1. When the device is fixed, the cover 16 (cover structure 16k) may be fixed so that the one side cover portion 16a is positioned on the horizontal plane M1 side. According to such an arrangement, it is possible to prevent dust generation (for example, a lubricant applied to the ball screw 6a) from the inside of the drive unit 6 from falling on the horizontal plane M1. In this case, in the case of a device configuration in which foreign matter (for example, water, dust, etc.) enters the drive unit 6 with an emphasis on intrusion, the top and bottom of the moving device is reversed and the one side cover portion 16a is moved upward (with the horizontal plane M1) Should be positioned on the opposite side.

As another configuration example of the present embodiment, for example, as shown in FIG. 3C, a cover 18 (cover structure 18k) that covers the other side of the drive unit 6 may be further arranged. In this case, the configuration and effects of the cover 18 (cover structure 18k) are the same as those in the first embodiment (FIG. 1 (d)) described above, and thus the description thereof is omitted. Further, for example, a cover 20 (FIG. 2A) as described in the first modification is provided on the moving device of the present embodiment (FIGS. 3A and 3C), and each linear motion guide 4 is provided. You may comprise so that it may be covered.
Further, the structure of the cover shown in FIG. 3 (c) or the structure of the cover shown in FIGS. 3 (a) and 3 (c) with the cover 20 as described in the first modification is added to the vertical wall M2. It is also possible to fix to the above, and it is possible to appropriately select a configuration in which those top and bottom are reversed.

In the first and second embodiments described above, the covers 16, 18, and 20 are made up of a plurality of cover components 16k, 18k, and 20k, but one (single) cover 16, 18 is provided. , 20, the side portions may be fixed to the base 10 at a plurality of locations along the moving direction of the movable body 2, so that the bending can be suppressed.
In the first and second embodiments described above, the drive unit 6 including a combination of the ball screw 6a and the nut 6b is assumed. However, the present invention is not limited to this, and the movable body 2 is linearly guided. Any driving mechanism (for example, belt driving, linear motor, air cylinder, etc.) can be applied as the driving unit 6 as long as the driving unit 6 can move along the driving unit 6.

  As an example, in the belt-driven drive unit 6, a belt that travels along the linear motion guide 4 is disposed on the base 10, and the belt and the movable body 2 are connected by a predetermined connecting member. As a result, when the belt is run, the movable body 2 can be moved along the linear guide 4 together with the connecting member.

In the linear motor driving section 6, for example, a three-phase coil is mounted on the lower surface of the movable body 2, for example. The surface of the base 10 (the surface facing the coil) is configured as a stator, and a plurality of permanent magnets are arranged at predetermined intervals along the moving direction of the movable body 2. In this case, the plurality of permanent magnets are arranged so that the magnetic poles (N pole and S pole) of adjacent permanent magnets are alternately arranged. As a result, when a current is sequentially passed from the controller to the three-phase coil and the magnetic pole of each coil is changed to the S pole or N pole, the magnetic pole at that time reacts with the magnetic flux of the permanent magnet, so that the left hand of Fleming The movable body 2 can be moved along the linear guide 4 according to the law.
In each of the above embodiments, a rolling guide including a rolling element is used as the linear motion guide. However, the present invention is not limited to this, and other types such as a linear motion guide using a hydrostatic bearing can be used. is there.

  In addition, for the materials of the covers 16, 18, and 20 described above, any material (metal material, insulating material, resin material, wood, etc.) can be applied depending on the purpose and environment of use of the moving device. There is no particular limitation here.

(a) is the perspective view which cuts and shows the structure of the cover applied to the moving apparatus which concerns on the 1st Embodiment of this invention, (b) is for connecting several cover structure bodies mutually (C) is a cross-sectional view taken along line XX in FIG. 6 (a), and is a cross-sectional view showing a configuration example in which the moving device is fixed to a vertical wall; FIG. 4 is a cross-sectional view taken along line XX in FIG. 4A, and is a cross-sectional view showing another configuration example of the moving device. FIG. 5E is a diagram illustrating the moving device of FIG. Sectional drawing which shows a structural example. (a) is a sectional view showing a configuration example of a moving device according to a first modification of the present invention, (b) is a sectional view showing a configuration example of a moving device according to a second modification of the present invention, (c) is sectional drawing which shows the structural example of the moving apparatus which concerns on the 3rd modification of this invention, (d) is sectional drawing which shows the structural example of the moving apparatus which concerns on the 4th modification of this invention. (a) is sectional drawing which shows the structural example of the cover applied to the moving apparatus which concerns on the 2nd Embodiment of this invention, (b) is the structure which fixed the moving apparatus of the same figure (a) to the vertical wall Sectional drawing which shows an example, (c) is sectional drawing which shows the other structural example of a moving apparatus. (a) is a plan view of a moving device to which a cover of a conventional use example is applied, (b) is a cross-sectional view taken along line XX of FIG. (a), and (c) is a cover of a conventional use example. (D) is a perspective view which shows the state which the cover of the prior art usage example bent. (a) is a plan view of a moving device to which another cover of a conventional use example is applied, (b) is a cross-sectional view taken along line XX of FIG. (a), and (c) is a conventional use example. The perspective view of other cover, (d) is a perspective view which shows the state which the cover of the example of conventional use bent.

Explanation of symbols

2 Movable body 4 Linear motion guide 6 Drive unit 10 Base
16,18 cover
16k, 18k cover assembly

Claims (6)

A moving device in which a base is provided with a plurality of linear motion guides for guiding the movable body in a predetermined direction and a drive unit that moves between the linear motion guides and moves the movable body along the linear motion guides. ,
A cover that covers the linear motion guide or the drive unit, or both the linear motion guide and the drive unit is provided along the moving direction of the movable body,
The cover is configured to be fixed to the base at a plurality of locations along the moving direction of the movable body.   The cover includes a plurality of cover components that can be detachably connected to each other, and each cover component is fixed to the base at predetermined intervals along the moving direction of the movable member. The moving apparatus according to claim 1, wherein the moving apparatus is configured to be capable of being configured.   The cover structure has at least one side cover part that covers one side of the drive part, an upper cover part that covers the upper side of the drive part, and a fixed part that fixes the one side cover part to the base. The moving device according to claim 2, wherein the body and the drive unit are connected to each other through a gap formed on the other side of the cover structure.   The cover structure has at least one side cover part that covers one side of the drive part, an upper cover part that simultaneously covers the drive part and the upper side of the linear motion guide, and a fixing part that fixes the one side cover part to the base. The moving device according to claim 2, wherein the movable body and the drive unit are connected to each other through a gap formed on the other side of the cover structure.   The cover structure has an other side cover part that covers the other side of the drive part, and a fixing part that fixes the other side cover part to the base. The movable body and the drive part include the upper cover part and the other parts. The moving device according to claim 3 or 4, wherein the moving device is connected to each other through a gap formed between the side cover portion and the side cover portion. 6. The cover structure includes a guide cover portion that covers at least one side of the linear motion guide, and a guide fixing portion that fixes the guide cover portion to the base. The moving device according to 1.

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