JP2006283088A - Golden ornament and its manufacturing method - Google Patents

Golden ornament and its manufacturing method Download PDF

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JP2006283088A
JP2006283088A JP2005103446A JP2005103446A JP2006283088A JP 2006283088 A JP2006283088 A JP 2006283088A JP 2005103446 A JP2005103446 A JP 2005103446A JP 2005103446 A JP2005103446 A JP 2005103446A JP 2006283088 A JP2006283088 A JP 2006283088A
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tin
film
coating
gradient
atoms
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Koichi Naoi
直井  孝一
Fumio Tase
文雄 田勢
Masayoshi Ushikubo
政義 牛窪
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Citizen Watch Co Ltd
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Citizen Watch Co Ltd
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Priority to JP2005103446A priority Critical patent/JP2006283088A/en
Priority to KR1020077024682A priority patent/KR100962104B1/en
Priority to CN201210454466XA priority patent/CN102994949A/en
Priority to CN200680010467.8A priority patent/CN101160418B/en
Priority to US11/910,163 priority patent/US7771836B2/en
Priority to PCT/JP2006/306955 priority patent/WO2006106981A1/en
Priority to EP06730903A priority patent/EP1870486A4/en
Publication of JP2006283088A publication Critical patent/JP2006283088A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ornament having excellent wear resistance and scratch resistance and having a golden film layer which is not peeled even when the film thickness is made extremely thin. <P>SOLUTION: The golden ornament comprises a base material, a Ti film deposited on the surface of the base material under the inert gas atmosphere other than nitrogen while the rate of content of Ti atoms is fixed in the film thickness direction, a TiN inclined film deposited on the Ti film while the rate of content of N atoms has the gradient in the film thickness direction, a TiN film deposited on the TiN inclined film while the rate of content of Ti atoms and N atoms is fixed in the film thickness direction, an Au-TiN mixed inclined film deposited on the TiN film while the rate of content of Au atoms has the gradient in the film thickness direction, and an Au-TiN mixed film deposited on the Au-TiN mixed inclined film while the rate of content of Au atoms, Ti atoms and N atoms is fixed in the film thickness direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、耐擦傷性および耐剥離性に優れた金色装飾品およびその製造方法に関する。   The present invention relates to a golden decorative article having excellent scratch resistance and peel resistance and a method for producing the same.

時計や装身具などの外装部品は、装飾的要素である色調と機能的要素である耐摩耗性とを同時に備えることが要求される。金はこの要求に最適であり、従来から素材をそのまま加工したり、他の金属上に金メッキ被覆層を形成して使用されている。ところが、特に耐食性が要求されない場合には、金色を示すという意味で1ミクロン以下の被複層でも目的は達成されていたが、腕時計のケースやバンド、装身具では汗や水蒸気等に対する高度の耐性が要求されるため、金メッキは少なくとも10ミクロン以上の膜厚が必要であった。   Exterior parts such as watches and accessories are required to have a color tone as a decorative element and wear resistance as a functional element at the same time. Gold is most suitable for this requirement, and has been conventionally used by processing a raw material as it is or by forming a gold plating coating layer on another metal. However, when corrosion resistance is not required, the purpose has been achieved even in a multilayer of 1 micron or less in the sense of showing a gold color. Since it was required, the gold plating required a film thickness of at least 10 microns or more.

しかしながら、金は非常に高価な金属であるため十分な耐食性と耐摩耗性を有する外装部品に使用するには制限があった。また、金は硬さが350Hv程度であるため、耐擦傷性に劣り、腕時計や装身具の携帯により傷が付きやすいという問題があった。このため、より安価で十分な機能を発揮する金色の被覆層の開発が望まれていた。   However, since gold is a very expensive metal, there is a limit to use it for exterior parts having sufficient corrosion resistance and wear resistance. Further, since the hardness of gold is about 350 Hv, there is a problem that it is inferior in scratch resistance and easily damaged by carrying a wristwatch or jewelry. For this reason, it has been desired to develop a gold-colored coating layer that is cheaper and exhibits a sufficient function.

そこで、イオンプレ−テイングやスパッタリングなどの乾式メッキ技術によって、窒化チタンと金または金合金とからなる被覆層が提案され(たとえば、特許文献1〜3参照)、耐食性および耐摩耗性に優れ、膜厚が薄く、安価な金色被覆が形成されるようになった。   Therefore, a coating layer made of titanium nitride and gold or a gold alloy has been proposed by dry plating techniques such as ion plating and sputtering (see, for example, Patent Documents 1 to 3), and has excellent corrosion resistance and wear resistance. However, a thin and inexpensive golden coating has been formed.

ところが、この窒化チタンと金または金合金とからなる被覆層は、従来の金メッキ被覆層に比べて、チタンや窒化チタンなどからなる下地金属層との密着性は改善されているものの、その密着性にはまだ改良の余地があった。特に、窒化チタンと金または金合金とからなる被覆層の膜厚を極端に薄くすると、容易に剥離するという問題があった。
特開昭54−2942号公報 特開昭58−104176号公報 特開昭60−67654号公報
However, although the coating layer made of titanium nitride and gold or gold alloy has improved adhesion to the underlying metal layer made of titanium, titanium nitride or the like compared to the conventional gold plating coating layer, the adhesion There was still room for improvement. In particular, when the coating layer made of titanium nitride and gold or a gold alloy is made extremely thin, there is a problem that it easily peels off.
JP-A-54-2942 JP 58-104176 A JP-A-60-67654

本発明は、上記のような従来技術に伴う問題を解決しようとするものであって、耐摩耗性および耐擦傷性に優れ、かつ膜厚を極端に薄くしても剥離しない金色被膜層を有する装飾品およびその製造方法を提供することを目的としている。   The present invention is intended to solve the problems associated with the prior art as described above, and has a golden coating layer that is excellent in wear resistance and scratch resistance and does not peel even if the film thickness is extremely thin. The object is to provide a decorative article and a method for manufacturing the same.

本発明に係る金色装飾品の製造方法は、基材の表面に、乾式メッキ装置内で窒素以外の不活性ガス雰囲気下にチタンをその単位時間当りの蒸発量が一定となるように蒸発させてTi被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように蒸発させながら、この乾式メッキ装置内の窒素量が経時的に増大するように乾式メッキ装置内に窒素ガスを導入して、前記Ti被膜の上に、N原子の含有率が膜厚方向に勾配を有するTiN傾斜被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように蒸発させながら、この乾式メッキ装置内の窒素量を一定に保持して、前記TiN傾斜被膜の上にTiN被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように
蒸発させ、かつこの乾式メッキ装置内の窒素量を一定に保持しながら、単位時間当りの金の蒸発量が経時的に増大するように金または金と他の金属とを蒸発させて、前記TiN被膜の上に、Au原子の含有率が膜厚方向に勾配を有するAu−TiN混合傾斜被膜を形成させ、
次いで、この乾式メッキ装置内の窒素量を一定に保持しながら、この乾式メッキ装置内でチタンと金またはチタンと金と他の金属とをこれらの単位時間当りの蒸発量が一定となるように蒸発させて、前記Au−TiN混合傾斜被膜の上に、Au−TiN混合被膜を形成させることを特徴とする。
In the method for producing a golden ornament according to the present invention, titanium is evaporated on the surface of a base material in an inert gas atmosphere other than nitrogen in a dry plating apparatus so that the amount of evaporation per unit time is constant. Forming a Ti coating;
Next, while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant, nitrogen gas in the dry plating apparatus is increased so that the nitrogen amount in the dry plating apparatus increases with time. To form a TiN gradient coating film having a N atom content gradient in the film thickness direction on the Ti coating film,
Next, while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant, the nitrogen amount in the dry plating apparatus is kept constant, and TiN is deposited on the TiN gradient coating. Forming a film,
Next, the evaporation amount of gold per unit time while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant and keeping the nitrogen amount in the dry plating apparatus constant. As a result, gold or gold and other metals are evaporated so as to increase with time, and an Au—TiN mixed gradient film having a gradient in the film thickness direction of the content of Au atoms is formed on the TiN film. ,
Next, while keeping the amount of nitrogen in the dry plating apparatus constant, the evaporation amount per unit time of titanium and gold or titanium, gold, and other metals is constant in the dry plating apparatus. Evaporating to form an Au—TiN mixed coating film on the Au—TiN mixed gradient coating.

Au−TiN混合傾斜被膜を形成させる際に、該Au−TiN混合傾斜被膜中のAu原子の含有率が2〜10原子%/0.001μmの割合で膜厚方向に増大するように単位時間当りの金の蒸発量を経時的に増大させることが好ましく、乾式メッキ装置内に、TiN被膜形成時の窒素ガス供給量の2.5倍量以上の窒素ガスを供給することも好ましい。   When forming the Au-TiN mixed gradient coating, the Au atom content in the Au-TiN mixed gradient coating is increased per unit time so as to increase in the film thickness direction at a rate of 2 to 10 atomic% / 0.001 μm. It is preferable to increase the evaporation amount of gold over time, and it is also preferable to supply nitrogen gas in a dry plating apparatus that is 2.5 times the nitrogen gas supply amount at the time of TiN film formation.

Au−TiN混合被膜を形成させる際に、乾式メッキ装置内に、TiN被膜形成時の窒素ガス供給量の2.5倍量以上の窒素ガスを供給することが好ましい。
TiN傾斜被膜を形成させる際に、該TiN傾斜被膜中のN原子の含有率が4〜12原子%/0.1μmの割合で膜厚方向に増大するようにこの乾式メッキ装置内の窒素量を経時的に増大させることが好ましい。
When forming the Au—TiN mixed film, it is preferable to supply nitrogen gas in a dry plating apparatus that is at least 2.5 times the amount of nitrogen gas supplied when the TiN film is formed.
When forming the TiN gradient coating, the amount of nitrogen in the dry plating apparatus is adjusted so that the N atom content in the TiN gradient coating increases in the film thickness direction at a rate of 4 to 12 atomic% / 0.1 μm. Increasing with time is preferred.

本発明に係る金色装飾品は、基材と、この基材表面に窒素以外の不活性ガス雰囲気下で形成された、Ti原子の含有率が膜厚方向に一定であるTi被膜と、このTi被膜上に形成された、N原子の含有率が膜厚方向に勾配を有するTiN傾斜被膜と、このTiN傾斜被膜上に形成された、Ti原子およびN原子の含有率が膜厚方向に一定であるTiN被膜と、このTiN被膜上に形成された、Au原子の含有率が膜厚方向に勾配を有するAu−TiN混合傾斜被膜と、このAu−TiN混合傾斜被膜上に形成された、Au原子、Ti原子およびN原子の含有率が膜厚方向に一定であるAu−TiN混合被膜とを有することを特徴とする。   The golden ornament according to the present invention includes a base material, a Ti coating formed on the surface of the base material in an inert gas atmosphere other than nitrogen and having a constant Ti atom content in the film thickness direction, and the Ti coating. The TiN gradient coating formed on the coating has a gradient in the film thickness direction of N atoms, and the content of Ti atoms and N atoms formed on the TiN gradient coating is constant in the film thickness. A certain TiN film, an Au-TiN mixed gradient film formed on the TiN film and having an Au atom content gradient in the film thickness direction, and an Au atom formed on the Au-TiN mixed gradient film And an Au—TiN mixed film in which the content of Ti atoms and N atoms is constant in the film thickness direction.

Au−TiN混合傾斜被膜において、Au原子の含有率がTiN被膜からAu−TiN混合被膜への膜厚方向に対して増大することが好ましく、Au原子の含有率が2〜10原子%/0.001μmの割合で増大することが好ましい。   In the Au—TiN mixed gradient coating, it is preferable that the content of Au atoms increases in the film thickness direction from the TiN coating to the Au—TiN mixed coating, and the content of Au atoms is 2 to 10 atomic% / 0.00%. It is preferable to increase at a rate of 001 μm.

TiN傾斜被膜において、N原子の含有率がTi被膜からTiN被膜への膜厚方向に対して増大することが好ましく、N原子の含有率が4〜12原子%/0.1μmの割合で増大することが好ましい。   In the TiN gradient coating, it is preferable that the content of N atoms increases in the film thickness direction from the Ti coating to the TiN coating, and the content of N atoms increases at a rate of 4 to 12 atomic% / 0.1 μm. It is preferable.

本発明に係る金色装飾品は、Ti被膜の膜厚が0.1〜0.5μmであり、TiN傾斜被膜とTiN被膜との合計膜厚が0.5〜2.0μmであり、かつ該合計膜厚に対するTiN傾斜被膜の膜厚の割合が10〜60%の範囲にあり、Au−TiN混合傾斜被膜の膜厚とAu−TiN混合被膜との合計膜厚が0.005〜0.1μmであり、かつかつ該合計膜厚に対するAu−TiN混合傾斜被膜の膜厚の割合が10〜90%の範囲にあることが好ましい。   The golden ornament according to the present invention has a Ti film thickness of 0.1 to 0.5 μm, a total film thickness of the TiN gradient film and the TiN film is 0.5 to 2.0 μm, and the total The ratio of the film thickness of the TiN gradient coating film to the film thickness is in the range of 10 to 60%, and the total film thickness of the Au—TiN mixed gradient coating film and the Au—TiN mixed coating film is 0.005 to 0.1 μm. And the ratio of the thickness of the Au—TiN mixed gradient coating to the total thickness is preferably in the range of 10 to 90%.

本発明に係る金色装飾品は、各被膜層が互いに密着性に優れ、かつ最外層であるAu−TiN混合被膜は表面硬度が高く、耐食性、耐磨耗性および耐擦傷性に優れている。特に、Au−TiN混合傾斜被膜がAu−TiN混合被膜とTiN被膜との両被膜に対して優れた密着性を示すため、Au−TiN混合傾斜被膜を極端に薄くしても金色装飾品の表面に摩耗や摩擦キズ、さらには被膜の剥離が発生しない。このため、金の使用量を低減する
ことができ、安価に金色装飾品を得ることができる。
In the golden decorative article according to the present invention, each coating layer has excellent adhesion to each other, and the outermost Au-TiN mixed coating has high surface hardness and excellent corrosion resistance, abrasion resistance and scratch resistance. In particular, since the Au-TiN mixed gradient coating exhibits excellent adhesion to both the Au-TiN mixed coating and the TiN coating, even if the Au-TiN mixed gradient coating is extremely thin, the surface of the golden decorative article No wear, frictional flaws, or peeling of the coating occurs. For this reason, the usage-amount of gold | metal | money can be reduced and a golden ornament can be obtained cheaply.

また、本発明に係る金色装飾品の製造方法によれば、このような金色装飾品を製造することができる。   Moreover, according to the manufacturing method of the golden ornament which concerns on this invention, such a golden ornament can be manufactured.

以下、本発明に係る金色装飾品およびその製造方法について具体的に説明する。
本発明に係る金色装飾品は、乾式メッキ法により、基材の表面にTi被膜を形成し、このTi被膜上にTiN傾斜被膜を形成し、このTiN傾斜被膜上にTiN被膜を形成し、このTiN被膜上にAu−TiN混合傾斜被膜を形成し、このAu−TiN混合傾斜被膜の上にAu−TiN混合被膜を形成することにより製造することができる。
Hereinafter, the golden decorative article and the manufacturing method thereof according to the present invention will be described in detail.
The golden ornament according to the present invention forms a Ti film on the surface of a substrate by a dry plating method, forms a TiN gradient film on the Ti film, forms a TiN film on the TiN gradient film, It can be manufactured by forming an Au-TiN mixed gradient coating on the TiN coating and forming an Au-TiN mixed coating on the Au-TiN mixed gradient coating.

本発明に用いられる乾式メッキ法としては、真空蒸着法、スッパタ法、イオンプレーティング法などが挙げられる。これらのうち、イオンプレーティング法が好ましく用いられる。   Examples of the dry plating method used in the present invention include a vacuum deposition method, a sputtering method, and an ion plating method. Of these, the ion plating method is preferably used.

以下、各被膜の形成方法を詳細に説明する。
(1)Ti被膜の形成
まず、基材を乾式メッキ装置に配置し、乾式メッキ装置内を排気した後、窒素以外の不活性ガスを導入する。次いで、この不活性ガス雰囲気下にチタンを単位時間当りのチタンの蒸発量が一定となるように、すなわち定常的に蒸発させて乾式メッキ法により基材の表面にTi被膜を形成させる。このとき、単位時間当りのチタンの蒸発量は、Ti被膜の成膜速度が好ましくは0.005〜0.05μm/分、より好ましくは0.01〜0.03μm/分となるように設定することが望ましい。
Hereinafter, a method for forming each film will be described in detail.
(1) Formation of Ti film First, the base material is placed in a dry plating apparatus, and after evacuating the dry plating apparatus, an inert gas other than nitrogen is introduced. Next, a titanium film is formed on the surface of the substrate by dry plating so that the amount of titanium evaporated per unit time is constant in this inert gas atmosphere, that is, the titanium is constantly evaporated. At this time, the evaporation amount of titanium per unit time is set so that the film formation rate of the Ti film is preferably 0.005 to 0.05 μm / min, more preferably 0.01 to 0.03 μm / min. It is desirable.

このとき、乾式メッキ装置内を通常5〜0.1mPa、好ましくは1〜0.1mPaまで排気した後、窒素以外の不活性ガスを通常0.01〜1.0Pa、好ましくは0.1〜0.5Paまで導入する。この窒素以外の不活性ガスとしては、アルゴン、ヘリウム、ネオンなどが挙げられる。乾式メッキ装置内の排気圧力はできる限り低くすることが好ましく、これにより、装置内部の不可避成分(窒素、酸素、炭素)の残存量を十分に低減して純度の高いTi被膜を得ることができる。   At this time, after evacuating the inside of the dry plating apparatus to usually 5 to 0.1 mPa, preferably 1 to 0.1 mPa, an inert gas other than nitrogen is usually 0.01 to 1.0 Pa, preferably 0.1 to 0. Introduced up to 5 Pa. Examples of the inert gas other than nitrogen include argon, helium, and neon. It is preferable to lower the exhaust pressure in the dry plating apparatus as much as possible. Thereby, the remaining amount of inevitable components (nitrogen, oxygen, carbon) inside the apparatus can be sufficiently reduced to obtain a high purity Ti coating. .

また、基材の材質としては、ステンレス鋼、チタン、チタン合金、銅、銅合金、タングステンカーバイド、セラミックスなどが挙げられる。このような基材は乾式メッキ装置に配置する前に、その表面を有機溶剤などで洗浄、脱脂することが好ましい。   Examples of the material of the base material include stainless steel, titanium, titanium alloy, copper, copper alloy, tungsten carbide, ceramics, and the like. Such a substrate is preferably cleaned and degreased with an organic solvent or the like before placing the substrate in a dry plating apparatus.

このようにして形成されたTi被膜は、Ti原子の含有率が膜厚方向にほぼ一定となる。このTi被膜には、窒素、酸素、炭素のうちの少なくとも1種からなる不可避成分が、好ましくは0.5〜20原子%、より好ましくは0.5〜12原子%、特に好ましくは0.5〜5原子%で含まれていてもよい。このとき、Ti原子の含有率は、好ましくは80〜99.5原子%、より好ましくは88〜99.5原子%、より好ましくは95〜99.5原子%である。   In the Ti film formed in this way, the content of Ti atoms is substantially constant in the film thickness direction. In this Ti film, an inevitable component consisting of at least one of nitrogen, oxygen, and carbon is preferably 0.5 to 20 atomic%, more preferably 0.5 to 12 atomic%, and particularly preferably 0.5. It may be contained at ˜5 atomic%. At this time, the content rate of Ti atom becomes like this. Preferably it is 80-99.5 atomic%, More preferably, it is 88-99.5 atomic%, More preferably, it is 95-99.5 atomic%.

なお、上記Ti被膜において、Ti原子および不可避成分の含有率の合計を100原子%とする。
(2)TiN傾斜被膜の形成
上記(1)に続けて、チタンを定常的に蒸発させて乾式メッキ装置内のTi原子量を一定に保持しながら、この乾式メッキ装置内に窒素ガスを導入する。この窒素ガスの導入開始により乾式メッキ装置内の窒素量、すなわちN原子量が経時的に増大する。N原子量が経時的に増大している状態で、乾式メッキ法により上記Ti被膜上にTiとNとを含有す
る被膜を形成する。このようにして形成された被膜は、N原子およびTi原子の含有率が膜厚方向に勾配を有する(以下、この被膜を「TiN傾斜被膜」という)。
In the Ti coating, the total content of Ti atoms and inevitable components is 100 atomic%.
(2) Formation of TiN Inclined Film Following (1) above, nitrogen gas is introduced into the dry plating apparatus while titanium is constantly evaporated to keep the Ti atom amount in the dry plating apparatus constant. By the introduction of this nitrogen gas, the amount of nitrogen in the dry plating apparatus, that is, the amount of N atoms increases with time. A film containing Ti and N is formed on the Ti film by a dry plating method in a state where the N atomic weight is increasing with time. The film thus formed has a gradient in the film thickness direction of the content of N atoms and Ti atoms (hereinafter, this film is referred to as “TiN gradient film”).

このとき、乾式メッキ装置内の窒素量を、形成されるTiN傾斜被膜中のN原子の含有率が好ましくは4〜12原子%/0.1μm、好ましくは6〜10原子%/0.1μm、より好ましくは7〜9原子%/0.1μmの割合で膜厚方向に増大するように、経時的に増大させることが望ましい。   At this time, the nitrogen content in the dry plating apparatus is such that the content of N atoms in the formed TiN gradient coating is preferably 4 to 12 atomic% / 0.1 μm, preferably 6 to 10 atomic% / 0.1 μm, More preferably, it is desirable to increase with time so as to increase in the film thickness direction at a rate of 7-9 atomic% / 0.1 μm.

たとえば、導入ガスとして、窒素ガスとアルゴンなどの不活性ガスとの混合ガスを使用する場合、混合ガス中の窒素ガスの割合を経時的に増大させることにより、乾式メッキ装置内の窒素量を経時的に増大させることができる。窒素ガスの導入条件は、上記含有率勾配を有するTiN傾斜被膜が形成されるように、乾式メッキ装置やメッキ条件等により適宜設定される。たとえば、窒素ガスと不活性ガスとの流量比(窒素ガス/不活性ガス)を0から開始して、好ましくは1.5〜3.0の範囲まで、より好ましくは1.8〜2.5の範囲まで、好ましくは10〜60分間で、より好ましくは20〜40分間で増大させる。   For example, when a mixed gas of nitrogen gas and an inert gas such as argon is used as the introduced gas, the amount of nitrogen in the dry plating apparatus is increased over time by increasing the ratio of the nitrogen gas in the mixed gas over time. Can be increased. Nitrogen gas introduction conditions are appropriately set depending on the dry plating apparatus, plating conditions, and the like so that the TiN gradient coating film having the above-described content rate gradient is formed. For example, the flow rate ratio of nitrogen gas to inert gas (nitrogen gas / inert gas) is started from 0, preferably in the range of 1.5 to 3.0, more preferably 1.8 to 2.5. To the range, preferably in 10-60 minutes, more preferably in 20-40 minutes.

単位時間当りのチタンの蒸発量は、TiN傾斜被膜の成膜速度が好ましくは0.005〜0.05μm/分、より好ましくは0.01〜0.03μm/分となるように設定することが望ましい。たとえば、上記Ti被膜の形成時の単位時間当りのチタンの蒸発量と同一の条件でチタンを蒸発させることが望ましい。   The amount of evaporation of titanium per unit time may be set so that the TiN gradient coating film formation rate is preferably 0.005 to 0.05 μm / min, more preferably 0.01 to 0.03 μm / min. desirable. For example, it is desirable to evaporate titanium under the same conditions as the amount of titanium evaporation per unit time when the Ti film is formed.

このようにして形成されたTiN傾斜被膜中のN原子の含有率がTi被膜からTiN被膜へ膜厚方向に対して増大し、Ti原子の含有率がTi被膜からTiN被膜へ膜厚方向に対して減少することが好ましい。具体的には、N原子の含有率は上記範囲の割合でTi被膜からTiN被膜へ膜厚方向に対して増大することが好ましい。また、Ti原子の含有率は、好ましくは4〜12原子%/0.1μm、好ましくは6〜10原子%/0.1μm、より好ましくは7〜9原子%/0.1μmの割合でTi被膜からTiN被膜への膜厚方向に対して減少することが望ましい。   The N atom content in the thus formed TiN gradient coating increases from the Ti coating to the TiN coating in the film thickness direction, and the Ti atom content increases from the Ti coating to the TiN coating in the film thickness direction. Is preferably reduced. Specifically, the N atom content is preferably increased from the Ti film to the TiN film in the film thickness direction at a rate within the above range. The Ti atom content is preferably 4 to 12 atom% / 0.1 μm, preferably 6 to 10 atom% / 0.1 μm, more preferably 7 to 9 atom% / 0.1 μm. It is desirable to decrease with respect to the film thickness direction from TiN to TiN film.

N原子およびTi原子が上記のような割合で増大または減少するTiN傾斜被膜は、Ti被膜およびTiN被膜の両被膜との密着性に優れている。
このTiN傾斜被膜には、酸素、炭素のうちの少なくとも1種からなる不可避成分が、好ましくは0.5〜20原子%、より好ましくは0.5〜12原子%、特に好ましくは0.5〜5原子%で含まれていてもよい。
The TiN gradient coating in which N atoms and Ti atoms increase or decrease at the above-described ratio is excellent in adhesion to both the Ti coating and the TiN coating.
The TiN gradient coating has an inevitable component consisting of at least one of oxygen and carbon, preferably 0.5 to 20 atomic%, more preferably 0.5 to 12 atomic%, and particularly preferably 0.5 to It may be contained at 5 atomic%.

なお、上記TiN傾斜被膜において、Ti原子、N原子および不可避成分の含有率の合計を100原子%とする。
(3)TiN被膜の形成
上記(2)に続けて、乾式メッキ装置内に定常的に窒素ガスを供給してこの乾式メッキ装置内の窒素量を一定に保持しながら、この乾式メッキ装置内のTi原子量が一定となるようにチタンを定常的に蒸発させて、乾式メッキ法により上記TiN傾斜被膜の上にTiN被膜を形成させる。
In the TiN gradient coating, the total content of Ti atoms, N atoms and inevitable components is 100 atomic%.
(3) Formation of TiN film Following (2) above, nitrogen gas is constantly supplied into the dry plating apparatus to keep the amount of nitrogen in the dry plating apparatus constant, Titanium is steadily evaporated so that the Ti atomic weight is constant, and a TiN film is formed on the TiN gradient film by a dry plating method.

このとき、乾式メッキ装置内の窒素量は、形成されるTiN被膜中のN原子の含有率が好ましくは10〜60原子%、より好ましくは20〜50原子%、特に好ましくは30〜45原子%となるように、一定に保持させる。このとき、乾式メッキ装置内に供給される窒素ガス量は、乾式メッキ装置内の窒素量が一定に保持されるように、乾式メッキ装置やメッキ条件等により適宜設定される。   At this time, the amount of nitrogen in the dry plating apparatus is such that the content of N atoms in the formed TiN film is preferably 10 to 60 atom%, more preferably 20 to 50 atom%, and particularly preferably 30 to 45 atom%. So that it is constant. At this time, the amount of nitrogen gas supplied into the dry plating apparatus is appropriately set depending on the dry plating apparatus, plating conditions, etc. so that the amount of nitrogen in the dry plating apparatus is kept constant.

たとえば、導入ガスとして、窒素ガスとアルゴンなどの不活性ガスとの混合ガスを使用する場合、窒素ガスと不活性ガスとの流量比(窒素ガス/不活性ガス)を好ましくは1.5〜3.0、より好ましくは1.8〜2.5の範囲で一定に保持することが望ましい。   For example, when a mixed gas of nitrogen gas and an inert gas such as argon is used as the introduction gas, the flow rate ratio of nitrogen gas to inert gas (nitrogen gas / inert gas) is preferably 1.5-3. It is desirable to keep it constant within a range of 0.0, more preferably 1.8 to 2.5.

単位時間当りのチタンの蒸発量は、TiN被膜の成膜速度が好ましくは0.005〜0.05μm/分、より好ましくは0.01〜0.03μm/分となるように設定することが望ましい。たとえば、上記Ti被膜の形成時の単位時間当りのチタンの蒸発量と同一の条件でチタンを蒸発させることが望ましい。   The amount of titanium evaporation per unit time is desirably set so that the deposition rate of the TiN film is preferably 0.005 to 0.05 μm / min, more preferably 0.01 to 0.03 μm / min. . For example, it is desirable to evaporate titanium under the same conditions as the amount of titanium evaporation per unit time when the Ti film is formed.

このようにして形成されたTiN被膜は、Ti原子およびN原子の含有率が膜厚方向にほぼ一定となる。N原子の含有率は上記範囲にあり、Ti原子の含有率は、好ましくは30〜80原子%、より好ましくは40〜70原子%、特に好ましくは45〜60原子%である。   In the TiN film thus formed, the content of Ti atoms and N atoms is substantially constant in the film thickness direction. The N atom content is in the above range, and the Ti atom content is preferably 30 to 80 atom%, more preferably 40 to 70 atom%, and particularly preferably 45 to 60 atom%.

また、このTiN被膜には、酸素、炭素のうちの少なくとも1種からなる不可避成分が、好ましくは0.5〜20原子%、より好ましくは0.5〜12原子%、特に好ましくは0.5〜5原子%で含まれていてもよい。   In addition, the TiN film has an inevitable component consisting of at least one of oxygen and carbon, preferably 0.5 to 20 atomic%, more preferably 0.5 to 12 atomic%, and particularly preferably 0.5. It may be contained at ˜5 atomic%.

なお、上記TiN被膜において、Ti原子、N原子および不可避成分の含有率の合計を100原子%とする。
(4)Au−TiN混合傾斜被膜の形成
上記(3)に続けて、乾式メッキ装置内に窒素ガスを定常的に供給してこの乾式メッキ装置内の窒素量を一定に保持しながら、この乾式メッキ装置内のTi原子量が一定となるようにチタンを定常的に蒸発させる。このとき、窒素ガスは、上記TiN被膜形成時の乾式メッキ装置内への窒素ガス供給量の好ましくは2.5倍量以上、より好ましくは2.8倍量以上窒素ガスを乾式メッキ装置内に供給することが望ましい。窒素ガス供給量を上記のように増大させて保持することにより、より金色色相を呈する装飾品を得ることができる。
In the TiN coating, the total content of Ti atoms, N atoms and inevitable components is 100 atomic%.
(4) Formation of Au-TiN mixed gradient coating Following the above (3), this dry process is carried out while constantly supplying nitrogen gas into the dry plating apparatus and keeping the amount of nitrogen in the dry plating apparatus constant. Titanium is constantly evaporated so that the amount of Ti atoms in the plating apparatus is constant. At this time, the nitrogen gas is preferably 2.5 times or more, more preferably 2.8 times or more the amount of nitrogen gas supplied into the dry plating apparatus when the TiN film is formed. It is desirable to supply. By increasing and maintaining the nitrogen gas supply amount as described above, a decorative product exhibiting a more golden hue can be obtained.

単位時間当りのチタンの蒸発量は、Au−TiN混合傾斜被膜の成膜速度が好ましくは0.005〜0.05μm/分、より好ましくは0.01〜0.03μm/分となるように設定することが望ましい。たとえば、上記Ti被膜の形成時の単位時間当りのチタンの蒸発量と同一の条件でチタンを蒸発させることが望ましい。   The amount of evaporation of titanium per unit time is set so that the deposition rate of the Au—TiN mixed gradient coating is preferably 0.005 to 0.05 μm / min, more preferably 0.01 to 0.03 μm / min. It is desirable to do. For example, it is desirable to evaporate titanium under the same conditions as the amount of titanium evaporation per unit time when the Ti film is formed.

上記状態を保持しながら、単位時間当りの金の蒸発量が経時的に増大するように金または金と他の金属とを蒸発させて、この乾式メッキ装置内にAu原子またはAu原子と他の金属原子とを導入する。次いで、単位時間当りの金の蒸発量を経時的に増大させながら、乾式メッキ法により上記TiN被膜上にTiとNとAuと必要に応じて他の金属とを含有する被膜を形成する。上記のように単位時間当りの金の蒸発量を経時的に増大させることにより、単位時間当りの金の蒸着量が経時的に増大し、膜成長方向に金の含有量が増大する傾斜膜を形成することができる。このようにして形成された被膜は、Ti原子、N原子、Au原子および他の金属原子の含有率が膜厚方向に勾配を有する(以下、この被膜を「Au−TiN混合傾斜被膜」という)。   While maintaining the above state, gold or gold and other metals are evaporated so that the amount of gold evaporation per unit time increases over time, and Au atoms or Au atoms and other metals are evaporated in this dry plating apparatus. Introduce metal atoms. Next, a film containing Ti, N, Au, and, if necessary, another metal is formed on the TiN film by a dry plating method while increasing the evaporation amount of gold per unit time with time. By increasing the amount of gold evaporation per unit time over time as described above, the deposition amount of gold per unit time increases with time, and a gradient film in which the gold content increases in the film growth direction is obtained. Can be formed. In the film formed in this way, the content of Ti atoms, N atoms, Au atoms and other metal atoms has a gradient in the film thickness direction (hereinafter this film is referred to as “Au—TiN mixed gradient film”). .

このとき、単位時間当りの金の蒸発量は、形成されるAu−TiN混合傾斜被膜中のAu原子の含有率が好ましくは2〜10原子%/0.001μm、より好ましくは4〜9原子%/0.001μm、特に好ましくは6〜8原子%/0.001μmの割合で膜厚方向に増大するように、経時的に増大させることが望ましい。   At this time, the evaporation amount of gold per unit time is preferably 2 to 10 atomic% / 0.001 μm, more preferably 4 to 9 atomic% in terms of the content of Au atoms in the formed Au—TiN mixed gradient coating. It is desirable to increase it with time so that it increases in the film thickness direction at a ratio of /0.001 μm, particularly preferably 6 to 8 atomic% / 0.001 μm.

たとえば、成膜速度0.02μm/分でAu−TiN混合傾斜被膜を成膜した場合に換
算すると、単位時間当りに蒸着した全原子中のAu原子の含有量が、1秒間に、好ましくは0.6〜3.4原子%、より好ましくは1.3〜3.0原子%、特に好ましくは2.0〜2.7原子%の割合で増加するように金を蒸発させることが望ましい。
For example, when converted into a case where an Au—TiN mixed gradient film is formed at a film formation rate of 0.02 μm / min, the content of Au atoms in all atoms deposited per unit time is preferably 0 per second. It is desirable to evaporate gold so that it increases at a rate of .6 to 3.4 atom%, more preferably 1.3 to 3.0 atom%, and particularly preferably 2.0 to 2.7 atom%.

このようにして形成されたAu−TiN混合傾斜被膜は、Au原子の含有率がTiN被膜からAu−TiN混合被膜への膜厚方向に対して増大し、Ti原子およびN原子の含有率がTiN被膜からAu−TiN混合被膜への膜厚方向に対して減少することが好ましい。具体的には、Au原子の含有率は上記範囲の割合でTiN被膜からAu−TiN混合被膜への膜厚方向に対して増大することが望ましい。また、Ti原子の含有率は、好ましくは1〜10原子%/0.001μm、より好ましくは2〜8原子%/0.001μm、特に好ましくは3〜5原子%/0.001μmの割合でTiN被膜からAu−TiN混合被膜への膜厚方向に対して減少することが望ましい。さらに、N原子の含有率は、好ましくは1〜10原子%/0.001μm、より好ましくは2〜8原子%/0.001μm、特に好ましくは4〜6原子%/0.001μmの割合でTiN被膜からAu−TiN混合被膜への膜厚方向に対して減少することが望ましい。   In the Au-TiN mixed gradient coating thus formed, the content of Au atoms increases in the film thickness direction from the TiN coating to the Au-TiN mixed coating, and the content of Ti atoms and N atoms is TiN. It is preferable to decrease in the film thickness direction from the coating to the Au—TiN mixed coating. Specifically, it is desirable that the content of Au atoms is increased in the film thickness direction from the TiN coating to the Au—TiN mixed coating at a rate within the above range. The Ti atom content is preferably 1-10 atomic% / 0.001 μm, more preferably 2-8 atomic% / 0.001 μm, and particularly preferably 3-5 atomic% / 0.001 μm. It is desirable to decrease in the film thickness direction from the coating to the Au—TiN mixed coating. Further, the content of N atoms is preferably 1-10 atomic% / 0.001 μm, more preferably 2-8 atomic% / 0.001 μm, particularly preferably 4-6 atomic% / 0.001 μm. It is desirable to decrease in the film thickness direction from the coating to the Au—TiN mixed coating.

Au原子、Ti原子およびN原子が上記のような割合で増大または減少するAu−TiN混合傾斜被膜は、TiN被膜およびAu−TiN混合被膜の両被膜との密着性に優れている。   The Au—TiN mixed gradient coating in which Au atoms, Ti atoms, and N atoms increase or decrease at the above-described ratio has excellent adhesion to both the TiN coating and the Au—TiN mixed coating.

このAu−TiN混合傾斜被膜が他の金属原子を含有する場合、Au原子と他の金属原子とが金合金を形成していることが好ましい。他の金属原子としては、ゲルマニウム、ケイ素、銀、銅、パラジウム、ニッケル、鉄、白金、ニオブ、クロムなどが挙げられる。他の金属原子の含有率は、好ましくは1〜20原子%、より好ましくは3〜15原子%、特に好ましくは5〜10原子%である。   When this Au-TiN mixed gradient coating contains another metal atom, it is preferable that the Au atom and the other metal atom form a gold alloy. Examples of other metal atoms include germanium, silicon, silver, copper, palladium, nickel, iron, platinum, niobium, and chromium. The content of other metal atoms is preferably 1 to 20 atomic%, more preferably 3 to 15 atomic%, and particularly preferably 5 to 10 atomic%.

また、Au−TiN混合傾斜被膜には、酸素、炭素のうちの少なくとも1種からなる不可避成分が、好ましくは0.5〜20原子%、より好ましくは0.5〜12原子%、特に好ましくは0.5〜5原子%で含まれていてもよい。   The Au—TiN mixed gradient coating preferably contains at least one of oxygen and carbon, preferably 0.5 to 20 atomic%, more preferably 0.5 to 12 atomic%, and particularly preferably. It may be contained at 0.5 to 5 atomic%.

なお、上記Au−TiN混合傾斜被膜において、Ti原子、Au原子、N原子および不可避成分の含有率の合計を100原子%とする。
(5)Au−TiN混合被膜の形成
上記(4)に続けて、乾式メッキ装置内に窒素ガスを定常的に供給してこの乾式メッキ装置内の窒素量を一定に保持しながら、この乾式メッキ装置内のTi原子量およびAu原子量が一定となるようにチタンと金またはチタンと金と他の金属とを定常的に蒸発させて、乾式メッキ法により上記Au−TiN混合傾斜被膜の上にAu−TiN混合被膜を形成させる。
In the Au—TiN mixed gradient coating, the total content of Ti atoms, Au atoms, N atoms and unavoidable components is 100 atomic%.
(5) Formation of Au—TiN mixed film Following the above (4), this dry plating is performed while constantly supplying nitrogen gas into the dry plating apparatus to keep the amount of nitrogen in the dry plating apparatus constant. Titanium and gold or titanium, gold and other metals are steadily evaporated so that the Ti atomic weight and Au atomic weight in the apparatus are constant, and Au—TiN mixed gradient coating is formed on the Au—TiN mixed gradient coating by dry plating. A TiN mixed film is formed.

このとき、乾式メッキ装置内の窒素量は、形成されるAu−TiN混合被膜中のN原子の含有率が好ましくは5〜50原子%、より好ましくは15〜40原子%、特に好ましくは20〜30原子%となるように、一定に保持させる。このとき、窒素ガスは、上記Au−TiN混合傾斜被膜形成時と同様に、上記TiN被膜形成時の乾式メッキ装置内への窒素ガス供給量の好ましくは2.5倍量以上、より好ましくは2.8倍量以上窒素ガスを乾式メッキ装置内に供給することが望ましい。窒素ガス供給量を上記のように増大させて保持することにより、より金色色相を呈する装飾品を得ることができる。乾式メッキ装置内に供給される窒素ガス量は、乾式メッキ装置内の窒素量が一定に保持されるように、上記TiN被膜形成時と同様に、乾式メッキ装置やメッキ条件等により適宜設定される。   At this time, the amount of nitrogen in the dry plating apparatus is preferably 5 to 50 atom%, more preferably 15 to 40 atom%, and particularly preferably 20 to 20% by atom content in the Au—TiN mixed film to be formed. It is kept constant so as to be 30 atomic%. At this time, the nitrogen gas is preferably 2.5 times or more, more preferably 2 times the amount of nitrogen gas supplied into the dry plating apparatus when the TiN film is formed, as in the formation of the Au-TiN mixed gradient film. It is desirable to supply more than 8 times the amount of nitrogen gas into the dry plating apparatus. By increasing and maintaining the nitrogen gas supply amount as described above, a decorative product exhibiting a more golden hue can be obtained. The amount of nitrogen gas supplied into the dry plating apparatus is appropriately set according to the dry plating apparatus, plating conditions, etc., as in the case of forming the TiN film, so that the nitrogen amount in the dry plating apparatus is kept constant. .

単位時間当りのチタンの蒸発量は、Au−TiN混合被膜の成膜速度が好ましくは0.
005〜0.05μm/分、より好ましくは0.01〜0.03μm/分となるように設定することが望ましい。たとえば、上記Ti被膜の形成時の単位時間当りのチタンの蒸発量と同一の条件でチタンを蒸発させることが望ましい。
The evaporation amount of titanium per unit time is preferably set to a film formation speed of the Au—TiN mixed film.
It is desirable to set it to be 005 to 0.05 μm / min, more preferably 0.01 to 0.03 μm / min. For example, it is desirable to evaporate titanium under the same conditions as the amount of titanium evaporation per unit time when the Ti film is formed.

単位時間当りの金の蒸発量は、形成されるAu−TiN混合被膜中のAu原子の含有率が好ましくは10〜60原子%、より好ましくは20〜55原子%、特に好ましくは25〜45原子%となるように、一定に保持させる。   The amount of gold evaporation per unit time is preferably 10 to 60 atomic%, more preferably 20 to 55 atomic%, and particularly preferably 25 to 45 atoms in terms of the Au atom content in the Au—TiN mixed film to be formed. % To keep constant.

このようにして形成されたAu−TiN混合被膜は、Au原子、Ti原子およびN原子の含有率が膜厚方向にほぼ一定となる。Au原子およびN原子の含有率は上記範囲にあり、Ti原子の含有率は、好ましくは10〜60原子%、より好ましくは20〜50原子%、特に好ましくは30〜45原子%である。   In the Au—TiN mixed film thus formed, the content of Au atoms, Ti atoms, and N atoms is substantially constant in the film thickness direction. The content of Au atoms and N atoms is in the above range, and the content of Ti atoms is preferably 10 to 60 atomic%, more preferably 20 to 50 atomic%, and particularly preferably 30 to 45 atomic%.

このAu−TiN混合被膜が他の金属原子を含有する場合、Au原子と他の金属原子とが金合金を形成していることが好ましい。他の金属原子としては、ゲルマニウム、ケイ素、銀、銅、パラジウム、ニッケル、鉄、白金、ニオブ、クロムなどが挙げられる。他の金属原子の含有率は、好ましくは1〜20原子%、より好ましくは3〜15原子%、特に好ましくは5〜10原子%である。   When this Au-TiN mixed film contains another metal atom, it is preferable that the Au atom and the other metal atom form a gold alloy. Examples of other metal atoms include germanium, silicon, silver, copper, palladium, nickel, iron, platinum, niobium, and chromium. The content of other metal atoms is preferably 1 to 20 atomic%, more preferably 3 to 15 atomic%, and particularly preferably 5 to 10 atomic%.

また、このAu−TiN混合被膜には、酸素、炭素のうちの少なくとも1種からなる不可避成分が、好ましくは0.5〜20原子%、より好ましくは0.5〜12原子%、特に好ましくは0.5〜5原子%で含まれていてもよい。   In addition, the Au—TiN mixed film has an inevitable component composed of at least one of oxygen and carbon, preferably 0.5 to 20 atomic%, more preferably 0.5 to 12 atomic%, particularly preferably. It may be contained at 0.5 to 5 atomic%.

なお、上記Au−TiN混合被膜において、Ti原子、Au原子、N原子および不可避成分の含有率の合計を100原子%とする。
本発明に係る金色装飾品は、上記製造方法により製造することができる。この金色装飾品は、Au−TiN混合被膜とTiN被膜とがAu−TiN混合傾斜被膜を介して積層されているため、密着性に優れている。これにより、Au−TiN混合被膜を極端に薄くすることができる。また、Au−TiN混合被膜を極端に薄くできるため、TiN被膜を厚くすることも可能であり、積層膜としての強度も向上する。
In the Au—TiN mixed film, the total content of Ti atoms, Au atoms, N atoms and inevitable components is 100 atomic%.
The golden ornament according to the present invention can be manufactured by the above manufacturing method. This golden decorative article is excellent in adhesion because the Au—TiN mixed coating and the TiN coating are laminated via the Au—TiN mixed gradient coating. Thereby, an Au-TiN mixed film can be made extremely thin. Moreover, since the Au—TiN mixed coating can be made extremely thin, it is possible to increase the thickness of the TiN coating and to improve the strength as a laminated film.

この金色装飾品の各被膜の好ましい膜厚の範囲を以下に示す。Ti被膜の膜厚は好ましくは0.1〜0.5μm、より好ましくは0.2〜0.5μm、特に好ましくは0.3〜0.5μmである。   The preferable range of the film thickness of each film of this golden decorative article is shown below. The thickness of the Ti coating is preferably 0.1 to 0.5 μm, more preferably 0.2 to 0.5 μm, and particularly preferably 0.3 to 0.5 μm.

TiN傾斜被膜とTiN被膜との合計膜厚は、好ましくは0.5〜2.0μm、より好ましくは0.7〜1.8μm、特に好ましくは1.0〜1.5μmである。TiN傾斜被膜とTiN被膜との合計膜厚に対するTiN傾斜被膜の膜厚の割合は、好ましくは10〜60%、より好ましくは20〜55%、特に好ましくは30〜50%である。TiN傾斜被膜の膜厚の割合が上記上限を超えるとTiN被膜の割合が減少して膜強度が低下することがある。   The total film thickness of the TiN gradient coating and the TiN coating is preferably 0.5 to 2.0 μm, more preferably 0.7 to 1.8 μm, and particularly preferably 1.0 to 1.5 μm. The ratio of the thickness of the TiN gradient coating to the total thickness of the TiN gradient coating and the TiN coating is preferably 10 to 60%, more preferably 20 to 55%, and particularly preferably 30 to 50%. If the film thickness ratio of the TiN gradient coating exceeds the upper limit, the TiN film ratio may decrease and the film strength may decrease.

Au−TiN混合傾斜被膜の膜厚とAu−TiN混合被膜との合計膜厚は、好ましくは0.005〜0.1μm、より好ましくは0.005〜0.05μm、特に好ましくは0.01〜0.02μmである。、Au−TiN混合傾斜被膜の膜厚とAu−TiN混合被膜との合計膜厚に対するAu−TiN混合傾斜被膜の膜厚の割合が好ましくは10〜90%、より好ましくは20〜70%、特に好ましくは30〜50%である。Au−TiN混合傾斜被膜の膜厚の割合が上記範囲にあると、金色装飾品はより金色色相を呈する。   The total film thickness of the Au—TiN mixed gradient coating and the Au—TiN mixed coating is preferably 0.005 to 0.1 μm, more preferably 0.005 to 0.05 μm, and particularly preferably 0.01 to 0.02 μm. The ratio of the thickness of the Au-TiN mixed gradient coating to the total thickness of the Au-TiN mixed gradient coating and the Au-TiN mixed coating is preferably 10 to 90%, more preferably 20 to 70%, particularly Preferably it is 30 to 50%. When the ratio of the film thickness of the Au—TiN mixed gradient coating is within the above range, the golden ornament exhibits a golden hue.

各層の膜厚が上記範囲にあると、各層の層間剥離が起こらず、密着性に優れた金色装飾
品を得ることができる。
このような金色装飾品は、最外層の被膜硬度が高く、たとえば、ナノインデンターにより荷重50μNの条件で測定して換算したビッカース硬度が、好ましくは500〜800Hv、より好ましくは600〜700Hvである。なお、従来の金色装飾品の最外層の硬度は約370Hvである。
When the film thickness of each layer is in the above range, delamination of each layer does not occur, and a golden decorative article having excellent adhesion can be obtained.
Such a golden decorative article has a high coating hardness of the outermost layer. For example, the Vickers hardness measured and converted under the condition of a load of 50 μN with a nanoindenter is preferably 500 to 800 Hv, more preferably 600 to 700 Hv. . The hardness of the outermost layer of the conventional golden ornament is about 370 Hv.

[実施例]
以下、本発明を実施例により説明するが、本発明は、この実施例により何ら限定されるものではない。なお、実施例における耐食性試験および摩耗試験は、下記の方法に従って実施した。
[Example]
EXAMPLES Hereinafter, although an Example demonstrates this invention, this invention is not limited at all by this Example. In addition, the corrosion resistance test and the abrasion test in the examples were performed according to the following methods.

(1)耐食性試験
耐食性試験は、JIS H8502(キャス(CASS)試験)に従って行なった。試験時間は96時間とし、その試験面の耐食性評価は、レイティングナンバ標準図表によってレイティングナンバが9.8以上のとき、合格とした。
(2)摩耗試験
図1に示すように、被膜形成した試験片1をその被膜形成面側を下向きにして、試験片押さえ板2と試験片押さえネジ3とによって、試験片取付台4の開口部に固定した。次いで、摩耗輪5に研磨紙(図示せず)を貼り付けた。この摩耗輪5に、図示しない天秤機構によって研磨紙を試験片1に押しつけるような上向きの荷重を加えた。
(1) Corrosion resistance test The corrosion resistance test was performed according to JIS H8502 (CASS test). The test time was 96 hours, and the corrosion resistance evaluation of the test surface was accepted when the rating number was 9.8 or more according to the rating number standard chart.
(2) Abrasion test As shown in FIG. 1, the test piece mounting base 4 is opened by the test piece presser plate 2 and the test piece presser screw 3 with the test piece 1 having the coating formed facing downward. Fixed to the part. Next, abrasive paper (not shown) was attached to the wear wheel 5. An upward load that presses the abrasive paper against the test piece 1 was applied to the wear wheel 5 by a balance mechanism (not shown).

その後、試験片取付台4を、図示しないモータの回転運動を往復運動に変換する機構によって往復運動させ、さらに摩耗輪5を試験片取付台4の1往復ごとに角度0.9゜ずつ矢印方向に回転させた。この回転によって、試験片1は摩耗輪5に貼り付けられた研磨紙の摩耗していない新しい領域に常に接触する。試験片取付台4の往復回数は自動設定することができ、設定した回数で摩耗試験機は自動停止する。   Thereafter, the specimen mounting base 4 is reciprocated by a mechanism that converts the rotational movement of the motor (not shown) into a reciprocating movement, and the wear wheel 5 is moved in the direction of the arrow by an angle of 0.9 ° for each reciprocation of the specimen mounting base 4. Rotated. By this rotation, the test piece 1 always comes into contact with a new area of the abrasive paper affixed to the wear ring 5 that is not worn. The number of reciprocations of the test specimen mounting base 4 can be automatically set, and the wear tester automatically stops at the set number of times.

さらに、摩耗輪5に貼り付ける研磨紙としては、ラッピングフィルム(フィルム表面に粒子径12μmのAl23粒子を有する、#1200)を用い、この研磨紙と試験片1との接触荷重が500g、試験片取付台4の往復運動回数が100回の条件で、摩耗試験機(スガ試験機(株)製、NUS−ISO−2)により摩耗試験を行なった。 Further, as the abrasive paper to be affixed to the wear ring 5, a wrapping film (# 1200 having Al 2 O 3 particles having a particle diameter of 12 μm on the film surface) is used, and the contact load between the abrasive paper and the test piece 1 is 500 g. The wear test was performed with a wear tester (NUS-ISO-2, manufactured by Suga Test Instruments Co., Ltd.) under the condition that the number of reciprocating motions of the test specimen mounting base 4 was 100 times.

ステンレス鋼(SUS316L)を機械加工して得られた鏡面仕上げの腕時計用ケースを有機溶剤で洗浄・脱脂し、この基材をイオンプレーティング装置内に取り付けた。
次いで、装置内を1.3mPaまで排気した後、アルゴンガスを0.13Paまで導入した。このアルゴン雰囲気中で、装置内部に備えられたプラズマ銃でプラズマを発生させた後、チタンを10分間定常的に蒸発させて腕時計用基材の表面に膜厚0.2μmのTi被膜を形成させた。
A mirror-finished wristwatch case obtained by machining stainless steel (SUS316L) was washed and degreased with an organic solvent, and this substrate was mounted in an ion plating apparatus.
Next, after evacuating the inside of the apparatus to 1.3 mPa, argon gas was introduced to 0.13 Pa. In this argon atmosphere, plasma was generated by a plasma gun provided inside the apparatus, and then titanium was constantly evaporated for 10 minutes to form a Ti film having a thickness of 0.2 μm on the surface of the watch base material. It was.

続いて、上記Ti被膜形成時と同一条件でチタンを蒸発させながら、導入ガスをアルゴンガスから窒素とアルゴンとの混合ガスに切り替えた。このとき、ガス流量を300sccmで一定に保持した状態で、窒素ガスとアルゴンガスとの流量比(N2/Ar)を0か
ら2.0まで35分間かけて増大させた。これにより、上記Ti被膜上に膜厚0.6μmのTiN傾斜被膜が形成した。
Subsequently, the introduced gas was switched from an argon gas to a mixed gas of nitrogen and argon while evaporating titanium under the same conditions as when the Ti film was formed. At this time, with the gas flow rate kept constant at 300 sccm, the flow rate ratio (N 2 / Ar) of nitrogen gas and argon gas was increased from 0 to 2.0 over 35 minutes. As a result, a TiN gradient coating having a thickness of 0.6 μm was formed on the Ti coating.

次いで、上記Ti被膜形成終了時と同一条件で、チタンの蒸発および窒素とアルゴンとの混合ガスの供給を定常的に継続して、上記TiN傾斜被膜上に膜厚0.6μmのTiN被膜を形成させた。   Next, under the same conditions as when the Ti film was formed, the evaporation of titanium and the supply of a mixed gas of nitrogen and argon were continuously continued to form a 0.6 μm thick TiN film on the TiN gradient film. I let you.

続いて、上記TiN被膜形成時と同一条件でチタンを定常的に蒸発させ、かつ流量比(N2/Ar)が5.8の窒素とアルゴンとの混合ガスを流量680sccmで供給しなが
ら、金を蒸発させ、上記TiN被膜上に膜厚0.005μmのAu−TiN混合傾斜被膜を形成させた。このとき、単位時間当りの全原子の蒸着量に対するAu原子の含有率が1秒間に2.67原子%増大するように金の単位時間当りの蒸発量を経時的に増大させた。具体的には、このAu−TiN混合傾斜被膜を成膜速度0.02μm/分で15秒間成膜し、このとき、Au−TiN混合傾斜被膜中のAu含有率が膜成長方向に8原子%/0.001μmの割合で増大するように金の蒸発量を経時的に増大させた。
Subsequently, while constantly evaporating titanium under the same conditions as those for forming the TiN film and supplying a mixed gas of nitrogen and argon having a flow rate ratio (N 2 / Ar) of 5.8 at a flow rate of 680 sccm, Was evaporated to form a 0.005 μm thick Au—TiN mixed gradient coating on the TiN coating. At this time, the evaporation amount of gold per unit time was increased with time so that the content of Au atoms with respect to the deposition amount of all atoms per unit time increased by 2.67 atom% per second. Specifically, this Au—TiN mixed gradient coating was formed at a film formation rate of 0.02 μm / min for 15 seconds. At this time, the Au content in the Au—TiN mixed gradient coating was 8 atomic% in the film growth direction. The amount of evaporation of gold was increased with time so as to increase at a rate of /0.001 μm.

次いで、上記Au−TiN混合傾斜被膜形成終了時と同一条件で、チタンおよび金の蒸発、ならびに窒素とアルゴンとの混合ガスの供給を定常的に継続して、上記Au−TiN混合傾斜被膜上に膜厚0.01μmのAu−TiN混合被膜を形成させた。   Next, under the same conditions as the end of the Au-TiN mixed gradient coating formation, the titanium and gold evaporation and the supply of the mixed gas of nitrogen and argon are continuously continued to form the Au-TiN mixed gradient coating on the Au-TiN mixed gradient coating. An Au—TiN mixed film having a thickness of 0.01 μm was formed.

得られた腕時計用ケースは、均一な金色調を有していた。
得られた腕時計用ケースについて、耐食性試験を実施したところ、レイティングナンバの値は9.9であった。また、摩耗試験を実施したところ、表面に摩耗は認められず、また、摩耗キズも認められなかった。さらに、Au−TiN混合被膜の剥離も認められなかった。
The obtained wristwatch case had a uniform gold color tone.
When the corrosion resistance test was conducted on the obtained wristwatch case, the rating number was 9.9. Further, when the abrasion test was carried out, no abrasion was observed on the surface and no abrasion scratch was observed. Further, no peeling of the Au—TiN mixed film was observed.

得られた腕時計用ケースの組成をX線光電子分析装置(ESCA)により分析した結果、Au−TiN混合被膜は、金40原子%、チタン38原子%、窒素20原子%、酸素1原子%、炭素1原子%から構成されていた。また、TiN被膜は、チタン54原子%、窒素45原子%、酸素0.5原子%、炭素0.5原子%から構成されていた。さらに、Au−TiN混合傾斜被膜は、Au原子の含有率が8原子%/0.001μmの割合で増加し、Ti原子の含有率が3.2原子%/0.001μmの割合で減少し、N原子の含有率が5原子%/0.001μmの割合で減少していた。また、TiN傾斜被膜は、N原子の含有率が7.5原子%/0.1μmの割合で増加、Ti原子の含有率が7.7原子%/0.1μmの割合で減少していた。なお、この腕時計用ケースのAu−TiN混合被膜からTiN被膜までの膜厚方向への組成変化を図2に示す。   As a result of analyzing the composition of the obtained wristwatch case with an X-ray photoelectron analyzer (ESCA), the Au—TiN mixed film is 40 atomic% gold, 38 atomic% titanium, 20 atomic% nitrogen, 1 atomic% oxygen, carbon. It was composed of 1 atom%. The TiN film was composed of 54 atom% titanium, 45 atom% nitrogen, 0.5 atom% oxygen, and 0.5 atom% carbon. Furthermore, in the Au-TiN mixed gradient coating, the content of Au atoms increases at a rate of 8 atomic% / 0.001 μm, and the content of Ti atoms decreases at a rate of 3.2 atomic% / 0.001 μm, The N atom content decreased at a rate of 5 atomic% / 0.001 μm. In the TiN gradient coating film, the N atom content increased at a rate of 7.5 atomic% / 0.1 μm, and the Ti atom content decreased at a rate of 7.7 atomic% / 0.1 μm. The change in composition in the film thickness direction from the Au—TiN mixed coating to the TiN coating of this watch case is shown in FIG.

本発明は、たとえば、腕時計ケース、腕時計バンド、腕時計のリューズ、腕時計の裏蓋等の時計外装部品、ベルトのバックル、指輪、ネックレス、ブレスレット、イヤリング、ペンダント、ブローチ、カフスボタン、ネクタイ止め、バッジ、メダル、眼鏡のフレーム、カメラのボディ、ドアノブなどに適用することができる。   The present invention includes, for example, a watch case, a watch band, a watch crown, a watch exterior part such as a watch back cover, a belt buckle, a ring, a necklace, a bracelet, an earring, a pendant, a brooch, a cufflink, a necktie, a badge, It can be applied to medals, eyeglass frames, camera bodies, door knobs, and the like.

図1は、摩耗試験の方法を説明するための摩耗試験機の模式平面図である。FIG. 1 is a schematic plan view of a wear tester for explaining a wear test method. 図2は、実施例で製造された時計用ケースの被膜の膜厚方向への組成分析結果を示すグラフである。FIG. 2 is a graph showing the result of composition analysis in the film thickness direction of the film of the watch case manufactured in the example.

符号の説明Explanation of symbols

1・・・試験片
2・・・試験片押さえ板
3・・・試験片押さえネジ
4・・・試験片取付台
5・・・摩耗輪
DESCRIPTION OF SYMBOLS 1 ... Test piece 2 ... Test piece holding plate 3 ... Test piece holding screw 4 ... Test piece mounting base 5 ... Wear wheel

Claims (11)

基材の表面に、乾式メッキ装置内で窒素以外の不活性ガス雰囲気下にチタンをその単位時間当りの蒸発量が一定となるように蒸発させてTi被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように蒸発させながら、この乾式メッキ装置内の窒素量が経時的に増大するように乾式メッキ装置内に窒素ガスを導入して、前記Ti被膜の上に、N原子の含有率が膜厚方向に勾配を有するTiN傾斜被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように蒸発させながら、この乾式メッキ装置内の窒素量を一定に保持して、前記TiN傾斜被膜の上にTiN被膜を形成させ、
次いで、この乾式メッキ装置内でチタンをその単位時間当りの蒸発量が一定となるように蒸発させ、かつこの乾式メッキ装置内の窒素量を一定に保持しながら、単位時間当りの金の蒸発量が経時的に増大するように金または金と他の金属とを蒸発させて、前記TiN被膜の上に、Au原子の含有率が膜厚方向に勾配を有するAu−TiN混合傾斜被膜を形成させ、
次いで、この乾式メッキ装置内の窒素量を一定に保持しながら、この乾式メッキ装置内でチタンと金またはチタンと金と他の金属とをこれらの単位時間当りの蒸発量が一定となるように蒸発させて、前記Au−TiN混合傾斜被膜の上に、Au−TiN混合被膜を形成させることを特徴とする金色装飾品の製造方法。
On the surface of the base material, a titanium film is formed by evaporating titanium in an inert gas atmosphere other than nitrogen in a dry plating apparatus so that the amount of evaporation per unit time is constant,
Next, while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant, nitrogen gas in the dry plating apparatus is increased so that the nitrogen amount in the dry plating apparatus increases with time. To form a TiN gradient coating film having a N atom content gradient in the film thickness direction on the Ti coating film,
Next, while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant, the nitrogen amount in the dry plating apparatus is kept constant, and TiN is deposited on the TiN gradient coating. Forming a film,
Next, the evaporation amount of gold per unit time while evaporating titanium in the dry plating apparatus so that the evaporation amount per unit time is constant and keeping the nitrogen amount in the dry plating apparatus constant. As a result, gold or gold and other metals are evaporated so as to increase with time, and an Au—TiN mixed gradient film having a gradient in the film thickness direction of the content of Au atoms is formed on the TiN film. ,
Next, while keeping the amount of nitrogen in the dry plating apparatus constant, the evaporation amount per unit time of titanium and gold or titanium, gold and other metals in the dry plating apparatus is constant. A method for producing a golden ornament, characterized by evaporating to form an Au-TiN mixed coating film on the Au-TiN mixed gradient coating.
Au−TiN混合傾斜被膜を形成させる際に、該Au−TiN混合傾斜被膜中のAu原子の含有率が2〜10原子%/0.001μmの割合で膜厚方向に増大するように単位時間当りの金の蒸発量を経時的に増大させることを特徴とする請求項1に記載の金色装飾品の製造方法。   When forming the Au-TiN mixed gradient coating, the Au atom content in the Au-TiN mixed gradient coating is increased per unit time so as to increase in the film thickness direction at a rate of 2 to 10 atomic% / 0.001 μm. The method for producing a golden ornament according to claim 1, wherein the amount of evaporation of gold is increased over time. Au−TiN混合傾斜被膜を形成させる際、乾式メッキ装置内に、TiN被膜形成時の窒素ガス供給量の2.5倍量以上の窒素ガスを供給することを特徴とする請求項1または2に記載の金色装飾品の製造方法。   3. The nitrogen gas of 2.5 times or more of the nitrogen gas supply amount at the time of TiN film formation is supplied into the dry plating apparatus when forming the Au-TiN mixed gradient film. The manufacturing method of the golden ornament of description. Au−TiN混合被膜を形成させる際、乾式メッキ装置内に、TiN被膜形成時の窒素ガス供給量の2.5倍量以上の窒素ガスを供給することを特徴とする請求項1に記載の金色装飾品の製造方法。   2. The gold color according to claim 1, wherein when the Au—TiN mixed film is formed, nitrogen gas is supplied into the dry plating apparatus at least 2.5 times the amount of nitrogen gas supplied when the TiN film is formed. A method for manufacturing ornaments. TiN傾斜被膜を形成させる際に、該TiN傾斜被膜中のN原子の含有率が4〜12原子%/0.1μmの割合で膜厚方向に増大するようにこの乾式メッキ装置内の窒素量を経時的に増大させることを特徴とする請求項1に記載の金色装飾品の製造方法。   When forming the TiN gradient coating, the amount of nitrogen in the dry plating apparatus is adjusted so that the N atom content in the TiN gradient coating increases in the film thickness direction at a rate of 4 to 12 atomic% / 0.1 μm. The method for producing a golden ornament according to claim 1, wherein the method increases over time. 基材と、この基材表面に窒素以外の不活性ガス雰囲気下で形成された、Ti原子の含有率が膜厚方向に一定であるTi被膜と、このTi被膜上に形成された、N原子の含有率が膜厚方向に勾配を有するTiN傾斜被膜と、このTiN傾斜被膜上に形成された、Ti原子およびN原子の含有率が膜厚方向に一定であるTiN被膜と、このTiN被膜上に形成された、Au原子の含有率が膜厚方向に勾配を有するAu−TiN混合傾斜被膜と、このAu−TiN混合傾斜被膜上に形成された、Au原子、Ti原子およびN原子の含有率が膜厚方向に一定であるAu−TiN混合被膜とを有する金色装飾品。   A base material, a Ti film formed in an inert gas atmosphere other than nitrogen on the surface of the base material, with a Ti atom content constant in the film thickness direction, and an N atom formed on the Ti film TiN gradient coating having a gradient in the film thickness direction, TiN coating formed on the TiN gradient coating with a constant content of Ti atoms and N atoms in the film thickness direction, and on the TiN coating An Au—TiN mixed gradient coating having an Au atom content gradient in the film thickness direction, and an Au atom, Ti atom, and N atom content formed on the Au—TiN mixed gradient coating A golden decorative article having an Au—TiN mixed film in which the thickness is constant in the film thickness direction. Au−TiN混合傾斜被膜において、Au原子の含有率がTiN被膜からAu−TiN混合被膜への膜厚方向に対して増大することを特徴とする請求項6に記載の金色装飾品。   The gold decorative article according to claim 6, wherein the Au-TiN mixed gradient coating increases the content of Au atoms in the film thickness direction from the TiN coating to the Au-TiN mixed coating. Au−TiN混合傾斜被膜において、Au原子の含有率が2〜10原子%/0.001
μmの割合で増大することを特徴とする請求項7に記載の金色装飾品。
In the Au—TiN mixed gradient coating, the content of Au atoms is 2 to 10 atomic% / 0.001.
The golden decorative article according to claim 7, wherein the golden decorative article increases at a rate of μm.
TiN傾斜被膜において、N原子の含有率がTi被膜からTiN被膜への膜厚方向に対して増大することを特徴とする請求項6に記載の金色装飾品。   The golden decorative article according to claim 6, wherein in the TiN gradient coating film, the content of N atoms increases in the film thickness direction from the Ti coating film to the TiN coating film. TiN傾斜被膜において、N原子の含有率が4〜12原子%/0.1μmの割合で増大することを特徴とする請求項9に記載の金色装飾品。   The golden decorative article according to claim 9, wherein in the TiN gradient coating film, the content of N atoms increases at a rate of 4 to 12 atomic% / 0.1 μm. Ti被膜の膜厚が0.1〜0.5μmであり、
TiN傾斜被膜とTiN被膜との合計膜厚が0.5〜2.0μmであり、かつ該合計膜厚に対するTiN傾斜被膜の膜厚の割合が10〜60%の範囲にあり、
Au−TiN混合傾斜被膜の膜厚とAu−TiN混合被膜との合計膜厚が0.005〜0.1μmであり、かつ該合計膜厚に対するAu−TiN混合傾斜被膜の膜厚の割合が10〜90%の範囲にあることを特徴とする請求項6〜10のいずれかに記載の金色装飾品。
The film thickness of the Ti coating is 0.1 to 0.5 μm,
The total thickness of the TiN gradient coating and the TiN coating is 0.5 to 2.0 μm, and the ratio of the thickness of the TiN gradient coating to the total thickness is in the range of 10 to 60%.
The total thickness of the Au—TiN mixed gradient coating and the Au—TiN mixed coating is 0.005 to 0.1 μm, and the ratio of the thickness of the Au—TiN mixed gradient coating to the total thickness is 10 The golden ornament according to any one of claims 6 to 10, which is in a range of -90%.
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