JP2006281625A - Pattern forming device and pattern forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize the formation of a just pattern without necessitating the artificial adjustment to respective movements of the ends of a blanket cylinder installing truck by a method wherein the rotation of a blanket cylinder is performed through the direct driving of the blanket cylinder without rotation of the blanket cylinder accompaniment to the engagement between a pinion and a rack by a method wherein let the blanket cylinder keep a just posture through the controlling of the respective movements of the end sides of a blanket cylinder installing truck during the running of the blanket cylinder installing truck. <P>SOLUTION: By measuring the moving distances in the running direction of the blanket cylinder installing truck 3 with a measuring means 18 under the condition that the truck ends 16 of the blanket cylinder installing truck 3 are employed as parts to be measured, truck driving means 22 corresponding to the truck ends 16 are respectively controlled so as to make a difference between the measured moving distances of the truck ends 16 constant. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an apparatus and a method for forming a pattern having a combination portion formed by combining repetition of fine patterns such as a color filter used in a liquid crystal display device.

  Conventionally, a photolithographic method using a photoresist material has been adopted for manufacturing a color filter for a liquid crystal display device, but most of the photoresist material as a pixel material is discarded at the time of spin coating, There is a problem that this photoresist material cannot be used economically. In addition, the overall work efficiency is low because the process of exposure and development is performed for each color, and expensive optical equipment such as an exposure apparatus and a development apparatus is required, which makes it impossible to reduce the cost. There is also a problem.

Therefore, in recent years, there are attempts to obtain this color filter by printing. For example, when a pattern is obtained with four pattern constituent colors of black (black matrix), red, green, and blue, a negative plate of each pattern constituent color pattern is prepared, and a relief printing plate is prepared. Ink which is a negative pattern of a pattern to be obtained at the convex portion of the removal plate by applying the pattern composition color ink at a constant thickness and pressing the blanket of the blanket cylinder against the removal plate corresponding to the pattern composition color The pattern is formed on the blanket by transferring and removing the pattern, the pattern is transferred to the substrate, and the pattern is repeated to obtain a high-definition pattern as a color filter (see, for example, Patent Document 1). .
Japanese Patent Laid-Open No. 11-058921

An example of an apparatus for carrying out the above-described high-definition pattern forming method is schematically shown in FIG. This high-definition pattern forming apparatus 1 supports a blanket cylinder 2 in which a blanket made of a silicone resin, which receives ink supplied from an ink supply apparatus (not shown), is arranged on a peripheral surface, and is rotatably supported by a blanket cylinder-mounted carriage 3. The blanket cylinder-mounted carriage 3 is made to travel with respect to the apparatus frame 4.
More specifically, an ink supply device (not shown), the blanket cylinder-mounted carriage 3 that rotatably supports the blanket cylinder 2, the apparatus frame 4, and a relief plate having a high-definition negative pattern. The platen plate 6 that supports the removal plate 5 that is separated after the blanket cylinder 2 is pressed and separated, and a printing medium made of a glass plate, etc., and is separated after the blanket cylinder 2 is pressed. A platen platen 8 that supports the substrate 7 to be moved. The platen platen 6 is arranged so that the removal plate 5 is in contact with the blanket of the blanket cylinder 2 that is rotating as the carriage 3 is mounted. Similarly to the blanket cylinder 2 which is attached to the frame 4, the substrate surface plate 8 is also rotated as the carriage 3 mounted on the blanket cylinder is rotated. Is mounted to the apparatus frame 4 as the plate 7 are in contact with each other. In the drawing, LG indicates a linear guide (linear feed mechanism).
In the high-definition pattern forming apparatus 1, as described above, when the ink is supplied from the ink supply apparatus, a coating film is formed on the surface of the blanket, and the traveling blanket cylinder-mounted carriage 3 reaches the position of the platen plate 6. The blanket of the blanket cylinder 2 rotating with the travel of the carriage 3 mounted on the blanket cylinder is pressed against the removal plate 5 and separated, and the removal plate 5 transfers the ink to a negative pattern from the blanket coating film. A high-definition pattern is formed on the blanket. Further, when the traveling blanket cylinder mounting carriage 3 reaches the position of the substrate surface plate 8, the blanket of the blanket cylinder 2 rotating with the traveling of the blanket cylinder mounting carriage 3 is pressed against the substrate 7 and separated. In FIG. 7, a high-definition pattern is transferred from the blanket. When the high-definition pattern is a color filter of a liquid crystal display device, the pattern is transferred for each filter constituent color using this high-definition pattern forming device.

Furthermore, in order to run the blanket cylinder mounting carriage 3 in the high-definition pattern forming apparatus 1 described above, the following mechanism is provided.
In this high-definition pattern forming apparatus 1, as shown in FIG. 1, the drive for traveling the blanket cylinder mounting carriage 3 is arranged on one side of the apparatus frame 4 along the traveling direction of the blanket cylinder mounting carriage 3. The servo motor 9 and the ball screw 10 are uniaxially driven. The pinion gears 11 are attached to the end portions of the blanket cylinder shaft and parallel to the device frame 4 so as to face the axial direction of the blanket cylinder. The rack gear 12 disposed in the pattern formation area so as to mesh with the pinion gear 11 has a mechanism in which the blanket cylinder 2 is rotated along with the travel of the blanket cylinder-mounted carriage 3 and the drive transmission from the blanket cylinder-mounted carriage 3. Yes.
In the example shown in FIG. 1, the servo motor 9 rotates the ball screw 10, and there is a portion screwed into the ball screw 10 on one end side of the blanket cylinder mounting carriage 3, The blanket cylinder-mounted carriage 3 is caused to travel as the ball screw 10 rotates.

When the apparatus 1 is operated without adjustment, the force for running the blanket cylinder-mounted carriage is applied from only one of the blanket cylinder-mounted carriages, and the attitude of the blanket cylinder-mounted carriage in the running direction collapses, as shown in FIG. The shape of the printed matter (for example, the shape of the pattern transferred to the substrate described above) is distorted. In FIG. 2, a pattern a representing a design value is shown in a shape in which squares are arranged vertically and horizontally, and a pattern b representing an actual measurement value obtained by actually measuring a printed matter formed based on the design value is substantially rhombus. It is shown in a distorted shape. The arrow indicates the printing direction.
Therefore, by correcting the phase of the rack gear along the traveling direction of the carriage with the blanket cylinder on the device frame, the distortion of the printed matter is corrected, that is, the posture of the carriage with the blanket cylinder is corrected by machine adjustment by a skilled worker. .
However, it is impossible to completely correct the distortion with a single correction, and since the correction is repeated a plurality of times while viewing the result of the printed matter, a large amount of time is spent on correcting the distortion of the printed matter.

In addition, it is considered that the blanket cylinder mounted carriage 3 and the blanket cylinder 2 have independent driving without using the blanket cylinder rotation mechanism by the meshing mechanism of the rack gear and the pinion gear, As shown in FIG. 3, the drive mechanism of the ball screw 10 located on the apparatus frame 4 along the traveling direction of the blanket cylinder mounting carriage 3 and the servo motor 9 that can move along the ball screw 10 is connected to both ends of the blanket cylinder mounting carriage 3. A device structure in which the blanket cylinder mounting carriage 3 is provided on the side of the vehicle and is driven by the pair of drive mechanisms, and a blanket cylinder rotation motor 13 for rotating the blanket cylinder 2 is disposed on the blanket cylinder mounting carriage 3 is provided. Is possible. In the case of the high-definition pattern forming apparatus 1 shown in FIG. 3, each of the ball screws 10 does not rotate, and the side of the servo motor 9 that is screwed to the ball screw 10 rotates, so that the blanket cylinder mounting carriage 3 on which the servo motor 9 is arranged. Is trying to travel.
In such a configuration, since the meshing mechanism of the rack gear and the pinion gear is not used, the movement of the carriage with the blanket cylinder and the rotation of the blanket cylinder are synchronized (the amount of movement of the blanket cylinder and the rolling length of the blanket cylinder). Must be the same). Specifically, as shown in FIG. 3, linear scales 14 (linear scales for reading encoders) are arranged in pairs on the apparatus frame 4 so as to correspond to both end sides of the blanket cylinder-mounted carriage 3, respectively. Sometimes, it is necessary to read the moving distance of the portion corresponding to the linear scale of the carriage 3 mounted on the blanket cylinder with the encoder 15 using the linear scale 14 and to control the blanket cylinder 2 by providing the encoder 15.
As described above, the distortion of the shape of the printed matter is caused by the attitude control of the blanket cylinder mounted carriage 3 (that is, the blanket cylinder) at the time of printing (in the case of the above-described reverse offset method, the transfer removal and the transfer correspond). Is important, but the pulse deviation of the pulse generated by measuring each of the linear scales 14 arranged on the apparatus frame 4 corresponding to the both ends of the blanket cylinder-mounted carriage 3 is made smaller than the command value. It is common to perform feedback control such as controlling each of the paired drive mechanisms (a combination of a ball screw and a servo motor) and further measuring the result of the operation of each drive mechanism for which the control is performed.

However, the blanket cylinder attitude control method described above, in which a blanket cylinder-mounted carriage is driven by a pair of drives consisting of a ball screw and a servo motor, and each of the drive mechanisms is feedback controlled based on information read by an encoder during the driving. In some cases, a printed matter having a distortion as shown in FIG.
In FIG. 4, (a) shows the pattern c of the printing plate in a form in which squares are arranged in a square shape, and (B) shows the pattern d of the printed matter obtained in practice. Furthermore, (c) measures each end of the blanket cylinder mounted carriage at the time of printing with a laser length measuring device, obtains the end position of the blanket cylinder mounted carriage at each of a plurality of arbitrary points, The blanket cylinder posture is represented by a line e connecting the first end and the other end portion, and the change in the posture is shown as a locus. As shown in FIG. 4, it can be seen that the posture of the carriage with the blanket cylinder greatly affects the distortion of the printed matter.

A possible cause is that the linear scale is not straight. This linear scale is calibrated after installation. However, since the linear scale is attached to the apparatus frame, it is also affected by the straightness of the apparatus frame, and there is a possibility that the correct movement amount of the carriage with the blanket cylinder cannot be detected.
Further, the linear scale is often provided in the vicinity of the drive unit, and is positioned around the height of the pattern formation area of the apparatus frame as shown in FIG. On the other hand, at present, pattern formation on large-sized substrates is the mainstream. In this case, of course, the diameter of the blanket cylinder is naturally large, the center of gravity of the blanket cylinder mounted carriage is also high, and it is mounted in the blanket cylinder mounted carriage during transfer. The most important thing is the attitude of the blanket cylinder. However, it is difficult to assume that the posture state of the blanket cylinder at the high position is accurately reflected in the data read from the linear scale at the low position, which is also considered to be the cause.

Further, the following two phenomena occur in the method of the rank and pinion method described above.
This is a case where the print coordinate pitch of a certain section expands or contracts (see FIG. 6). This has a limit in the machining accuracy of the pinion gear and the rack gear, and an error occurs when the inter-tooth pitch is on the order of several μm. The method in which the blanket cylinder is rotated by the pinion gear and the rack gear has been described above. However, pitch errors accumulate during transfer, and the print coordinates expand and contract. Therefore, in the method of rotating the blanket cylinder by meshing the pinion gear and the rack gear, mechanical adjustment is difficult and has been a problem.

  Therefore, in view of the above circumstances, the present invention controls the movement of each end side of the blanket cylinder-mounted carriage so that the bracket cylinder is in an appropriate posture during the travel of the blanket cylinder-mounted carriage, and the pinion gear and the rack gear are engaged. The objective is to rotate the blanket cylinder by a single drive to the blanket cylinder without rotating the blanket cylinder by alignment, and artificially adjust the movement of each end of the blanket cylinder mounted carriage. The object is to enable an appropriate pattern to be formed without the need.

  The present invention has been made in consideration of the above problems, and includes an ink supply device, and a blanket cylinder-equipped carriage that rotatably supports a blanket cylinder having a blanket that receives ink supplied from the ink supply device disposed on a peripheral surface thereof. An apparatus frame that movably supports the blanket cylinder-mounted carriage, and a relief plate that is a negative pattern of the pattern to be formed and supports a removal plate that is separated after the blanket cylinder blanket is pressed, and the apparatus frame A platen platen, and a substrate platen that is a printed substrate made of a glass plate or the like and supports a substrate to be separated after being pressed by the blanket of the blanket cylinder, and is located on the apparatus frame, A blanket cylinder-mounted carriage having a coating film formed on the surface of the blanket upon receipt of ink from the ink supply device is mounted. The blanket cylinder rotates against the frame, and the blanket cylinder rotating under the carriage running on the blanket cylinder is pressed against the removal plate and separated, and the blanket is removed by the removal plate. The ink is transferred and removed from the coating film to form a pattern on the blanket, and after the transfer and removal, the blanket cylinder blanket rotating under the carriage running on the blanket cylinder is pressed against the substrate. In the pattern forming apparatus in which the blanket transfers a high-definition pattern to the substrate, the carriage end is blanket corresponding to each of the carriage ends facing the axial direction of the blanket cylinder in the blanket cylinder mounting carriage. A carriage driving means for moving the trunk mounted carriage in the traveling direction, and the blanket cylinder mounting base Measuring each of the positions near the end of the blanket cylinder in the measurement section, and measuring the movement distance of the measurement section in the travel direction of the carriage mounted on the blanket cylinder, and the measurement section measured by the measurement means There is provided a pattern forming apparatus characterized by having a control means for operating the carriage driving means so that the difference in the movement distance is constant.

  In this invention, it is attached to the blanket cylinder mounting carriage, and has blanket cylinder driving means for rotating the blanket cylinder by changing the rotational angular velocity of the blanket cylinder according to the position in the traveling direction of the blanket cylinder mounting carriage, When the ink is transferred and removed by the removal plate or transferred to the substrate, the rotation of the blanket cylinder and the travel of the blanket cylinder mounting carriage are made asynchronous by controlling the rotation of the blanket cylinder of the blanket cylinder driving means. It is good.

  Another invention is an ink supply device, a blanket cylinder-mounted carriage that rotatably supports a blanket cylinder having a blanket that receives ink supplied from the ink supply apparatus, and the blanket cylinder-mounted carriage. And a platen plate that is positioned on the apparatus frame and supports a removal plate that is a negative pattern of a pattern to be formed, and that supports a removal plate that is separated after the blanket of the blanket cylinder is pressed. And a substrate surface plate positioned on the apparatus frame for supporting a substrate to be separated after the blanket of the blanket cylinder is pressed by a blanket of the blanket cylinder. A blanket cylinder mounted carriage with a coating film formed on the surface of the blanket is supplied to the apparatus frame. The blanket cylinder is rotated, and the blanket of the blanket cylinder rotating under the carriage traveling on the blanket cylinder is pressed against the removal plate and separated from the coating film of the blanket by the removal plate. The ink is transferred and removed as a negative pattern to form a pattern on the blanket, and after the transfer and removal, the blanket cylinder blanket rotating under the carriage running on the blanket cylinder is pressed against the substrate and separated. In the pattern forming method in which the blanket transfers the pattern to the substrate, the carriage end portion corresponds to each carriage end portion facing the axial direction of the blanket cylinder in the blanket cylinder mounting carriage, and the carriage end portion is moved in the running direction of the blanket cylinder mounting carriage. And a blanket cylinder in the blanket cylinder mounted carriage. Each of the positions near the end portion as a measured portion, and a measuring means for measuring a movement distance of the measured portion in the travel direction of the blanket drum mounted carriage, and the measured portion measured by the measuring means A pattern forming method characterized in that the transfer removal and transfer are performed under the operation of a carriage driving means that makes a difference in moving distance constant, and this pattern forming method is provided to solve the above-mentioned problems. is there.

  In this invention, it is attached to the blanket cylinder mounting carriage, and has blanket cylinder driving means for rotating the blanket cylinder by changing the rotational angular velocity of the blanket cylinder according to the position in the traveling direction of the blanket cylinder mounting carriage, It is preferable that the rotation of the blanket cylinder and the travel of the carriage mounted on the blanket cylinder are asynchronously controlled by the rotation control of the blanket cylinder of the blanket cylinder driving means for the transfer removal of the ink by the removal plate or the transfer to the substrate. It is.

(Effect of Claim 1)
According to the first aspect of the present invention, when the blanket cylinder-mounted carriage travels, the control means controls each of the end portions of the blanket cylinder-mounted carriage based on the movement distance of each end of the blanket cylinder-mounted carriage measured by the measuring means. Since the movement is controlled so that the direction of the carriage with the blanket cylinder is in an appropriate state, the posture of the blanket cylinder can be always in an appropriate state. For this reason, a pattern with an appropriate shape is formed on the blanket when transferring and removing with the removal plate, and a pattern with an appropriate shape can be formed on the substrate when transferring to the substrate.
In addition, since the control is performed so that the difference in the moving distance of the end of the carriage with the blanket cylinder is constant, an appropriate pattern can be obtained without manual adjustment of the machine by the operator, and the labor required for machine adjustment is reduced. Can be reduced.

(Effect of claim 2)
According to the invention of claim 2, if the print coordinates in a state where the print coordinate pitch of the section having the pattern is extended or contracted are obtained in advance, such as before the machine adjustment, the print coordinates adjusted according to the pitch are adapted. The pattern forming apparatus can adjust the angular velocity of the blanket cylinder and correct the coordinate position in the printing direction.

(Effect of claim 3)
According to the invention of claim 3, when the blanket cylinder-mounted carriage travels, the control means is based on the moving distance of each end portion of the blanket cylinder-mounted carriage measured by the measurement means. Since the movement is controlled so that the direction of the carriage on which the blanket cylinder is mounted is in an appropriate state, and transfer and removal are performed while the posture of the blanket cylinder is in an appropriate state, a pattern with an appropriate shape can be formed on the substrate. It becomes like this.
In addition, since the control is performed so that the difference in the moving distance of the end of the carriage with the blanket cylinder is constant, an appropriate pattern can be obtained without manual adjustment of the machine by the operator, and the labor required for machine adjustment is reduced. Can be reduced.

(Effect of claim 4)
According to the invention of claim 4, if the print coordinates in a state where the print coordinate pitch of the section with the pattern is extended or contracted are obtained in advance, such as before the machine adjustment, the print coordinates adjusted according to the pitch are adjusted. The blanket cylinder rotation angular velocity can be adjusted, and the coordinate position in the printing direction can be corrected.

Next, the present invention will be described in detail with reference to FIGS. 1 and 3 are denoted by the same reference numerals, and the description thereof is omitted.
In the high-definition pattern forming apparatus 1 of the present invention, the blanket cylinder-mounted carriage 3 having a coating film formed on the surface of the blanket after receiving ink supply from the ink supply apparatus travels with respect to the apparatus frame 4. The blanket cylinder 2 rotates and the blanket of the blanket cylinder 2 rotating under the travel of the carriage 3 mounted on the blanket cylinder is pressed against the removal plate 5 supported by the plate surface plate 6 and separated and removed. The plate 5 is used to transfer and remove the ink from the blanket coating film as a negative pattern to form a high-definition pattern on the blanket. After the transfer and removal, the blanket cylinder 2 rotating under the traveling of the blanket cylinder mounted carriage 3 In that the blanket is pressed against the substrate 7 supported by the substrate surface plate 8 and separated, and the blanket transfers the high-definition pattern to the substrate 7. Is the same as the location.

In the high-definition pattern forming apparatus 1, as in the apparatus 1 shown in FIG. 3, the carriage end portions corresponding to the carriage end portions 16 facing the axial direction of the blanket cylinder 2 of the blanket cylinder mounting carriage 3. A pair of carriage driving means 17 capable of transferring 16 in the direction of travel of the blanket cylinder mounted carriage 3 is provided. Each of the cart driving means 17 includes a ball screw 10 which is attached to the apparatus frame 4 and does not rotate on its axis, and a servo motor 9 which can be moved along the ball screw 10 by being screwed into the ball screw 10 and rotating. The servo motor 9 is attached to the carriage end 16. Therefore, the blanket cylinder mounted carriage 3 is provided to run by operating in a state where each of the pair of carriage driving means 17 is controlled.
Further, the high-definition pattern forming apparatus 1 has a measuring means 18. The measuring means 18 is a laser in which a position near the end of the blanket cylinder 2 on one side surface of the blanket cylinder-mounted carriage 3 is a measured part, and a reflection mirror 19 is attached to each measured part and fixed to the apparatus frame 4. Laser light is emitted from the length measuring device 20, and the laser light is branched by the branch mirror 21 into one measured part side and the other measured part side to reach each reflecting mirror 19, and the reflecting mirror 19. By receiving the return of the laser beam from, the movement distance (displacement) in the traveling direction of each measured part at the carriage end 16 of the traveling blanket tower body carriage 3 is obtained, and the two measured parts The difference in displacement (displacement difference) is constantly measured.
The positional relationship between the reflection mirror 19 located at the part to be measured and the end of the blanket cylinder 2 is always constant. Therefore, the measuring means 18 obtains the movement distance (displacement) in the traveling direction of the end portion of the blanket cylinder 2 and plays a role of constantly measuring the difference (displacement difference) in the movement distance between the both end portions.

Further, the high-definition putter forming apparatus 1 has a control means 22 for controlling the direction of the blanket cylinder-mounted carriage 3. The control means 22 constantly monitors the difference in the movement distance of the measured part at the end of the carriage of the blanket cylinder mounted carriage 3 measured by the measurement means 18 so that the difference in the movement distance is constant including zero. The pair of carriage driving means 17 is operated to control the blanket cylinder-mounted carriage 3 so that the direction of the blanket cylinder axis direction in the blanket cylinder-mounted carriage traveling range including the space forming area is always parallel. In particular, at the time of transferring and removing the ink from the blanket and transferring to the substrate, feedback control for further operating the carriage driving means 17 is performed on the basis of the result of operating the carriage driving means 17 respectively. It is provided so as to guarantee the straightness of the blanket cylinder-mounted carriage 3 during the transfer.
As described above, since the positional relationship between the reflection mirror 19 located at the measurement target and the end of the blanket cylinder 2 is always constant, the straightness of the blanket cylinder-mounted carriage 3 during transfer removal and transfer is guaranteed. This guarantees straightness of the blanket cylinder 2 itself.
Since the measuring means 18 uses the laser beam with its optical path bent, it is preferable that the position of each part to be measured is aligned with the height of the axis of the blanket cylinder.

The high-definition pattern forming apparatus 1 has a blanket cylinder driving means 23 including a blanket cylinder rotation motor 13 that rotates the blanket cylinder 2 independently as in the conventional example shown in FIG. This blanket cylinder driving means 23 drives and rotates the blanket cylinder 2 so that the rotational angular velocity of the blanket cylinder 2 changes according to the position of the blanket cylinder mounting carriage 3 in the traveling direction. When there is an expansion or contraction in the printing coordinate pitch in a section having a pattern in (2), the blanket cylinder driving means 23 changes the rotational angular velocity of the blanket cylinder 2 to correct the pitch.
When a pattern is formed on the substrate 7 by performing transfer removal and transfer in a state where the straight travel performance of the above-described blanket cylinder mounting carriage 3 is ensured, a certain section is obtained in the traveling direction of the pattern obtained as shown in FIG. In h (third section), when the print coordinate pitch is extended and the pattern is inaccurate with respect to the print coordinates in the design (a), or conversely, the pattern is contracted in the design. There are cases (b) in which pattern formation has a deviation from the print coordinates. In such a case, the print coordinates having a deviation in the print coordinate pitch are obtained in advance, and the blanket cylinder driving means 23 adjusts the pitch when the blanket cylinder approaches the section where the print coordinate pitch is incorrect. The rotational angular velocity is changed in the correction direction.
The operation of the blanket cylinder driving means 23 is controlled by the control means 22, and the correction of the printing coordinate pitch is performed either at the time of transfer removal or at the time of transfer, and when the pitch is increased, the carriage mounted on the blanket cylinder. The traveling distance of the blanket cylinder 3 itself is made longer than the rolling length of the blanket cylinder. When shrinking,
The travel distance of the blanket cylinder 3 is shorter than the rolling length of the blanket cylinder, assuming that the traveling speed of the carriage 3 with the blanket cylinder is smaller than the rotational angular velocity of the blanket cylinder. In this way, the pitch is corrected by making the rotation of the blanket cylinder and the running of the carriage with the blanket cylinder asynchronous. In the section not related to the correction operation, the operation of the blanket cylinder driving means 23 is controlled based on the position information when the blanket cylinder mounted carriage 3 is traveling so that the rotation of the blanket cylinder and the traveling of the carriage mounted with the blanket cylinder are synchronized. Controlled by means 23.

A drive mechanism comprising a servo motor, a ball screw, and a linear motor was provided corresponding to each end of the carriage of a carriage with a blanket cylinder mounted with a blanket cylinder with a blanket made of silicon resin on the peripheral surface. The blanket cylinder body was rotated by a servo motor.
As described above, in order to form a highly accurate pattern, it is essential to synchronize the amount of movement of the carriage with the blanket cylinder mounted in the traveling direction and the rotation of the blanket cylinder. The amount of movement of the blanket cylinder mounted carriage was measured by a built-in laser length measuring device installed on the frame base (equipment frame).
At the time of transfer, the attitude control of the carriage with the blanket cylinder is constantly monitored so that the distance deviation of the movement distance of the carriage end measured by the laser length measuring device becomes small, and feedback is made to each of the above drive mechanisms of the carriage with the blanket cylinder. I made it. As a result, the printed matter (pattern on the substrate) is not distorted due to the attitude of the blanket cylinder-mounted carriage as shown in FIG. The load of the carriage with the blanket cylinder was supported by a linear guide.
The amount of rotation of the blanket cylinder is controlled by detecting the rotation angle of a high-precision encoder provided on the shaft of the blanket cylinder so that feedback is provided to the servo motor side so as to match the command value.

The pattern forming configuration in the high-definition pattern forming apparatus was as follows.
(1) The blanket was coated with an ink supply device using a nozzle.
(2) In a state where the blanket cylinder did not contact the substrate, the blanket cylinder was idled in the direction on the right side in FIG.
(3) Wait until the blanket cylinder is in contact with the removal plate and move the blanket cylinder-mounted carriage on the removal plate in the direction to the left in FIG. 5, and the blanket cylinder rolls and is applied to the blanket. Unnecessary ink in the coated film was removed, and a necessary pattern was formed on the blanket.
(4) Subsequently, the carriage on which the blanket cylinder was mounted was moved onto the substrate, and the blanket cylinder was rolled in the same manner as in the case of the removal plate to form a pattern on the substrate.

The adjustment of the print coordinate pitch will be described.
As shown in FIG. 6 (a), the printing coordinates of the first section f, the second section g, and the fourth section i on the printed material (formed on the substrate) with respect to the removed plate pattern formed at an appropriate coordinate pitch. The position and the section length (printing direction) of the first section f, the second section g, and the fourth section i are normal, and the printing coordinates on the printed matter in the third section h are in advance in a pattern extending in the printing direction. Set.
Then, at the time of transferring and removing unnecessary ink from the blanket, the moving speed of the carriage with the blanket cylinder was controlled with respect to the extending section. As described above, this point may be either at the time of transfer and removal of unnecessary ink from the blanket or at the time of transfer to the substrate, control of the moving speed of the carriage mounted on the blanket cylinder, or control of the rotational angular speed of the blanket cylinder. You can do either.
If the third section h is continuously contracted, the fourth section i is also contracted. Therefore, in the part related to the fourth section i, the control opposite to the control in the part related to the third section h, that is, the blanket cylinder is mounted. Control was performed so that the moving speed of the carriage> the angular velocity of the blanket cylinder.
As a result, a pattern in which the printing coordinate position in the printing direction was corrected was obtained.

  Basically, the movement of the carriage with the blanket cylinder and the rotation of the blanket cylinder can be synchronized, and if the same state is maintained when transferring the blanket-free ink and transferring to the substrate, the same pattern as the removed plate pattern However, in reality, there are variations in the thickness of the blanket and waviness on the surface of the surface plate, and the printing coordinate position may deviate on the order of several μm with respect to the removed plate. When a color filter is manufactured using this high-definition pattern forming device and bonded to the array side (liquid crystal driving circuit forming side) in the liquid crystal display device, the pitch deviation between the color filter and the array side is caused at that time. It may occur and the bonding may not be successful. Then, there is a case where the pitch is corrected on the color filter side. For this reason, pitch correction is an essential mechanism in a high-definition pattern forming apparatus.

An example of the conventional high-definition pattern formation apparatus of a uniaxial drive is shown, (A) is explanatory drawing which shows the state seen from upper direction, (B) is explanatory drawing which shows the state seen from the side. It is explanatory drawing which shows the pattern of a design value when using the conventional high-definition pattern formation apparatus of a uniaxial drive, and the pattern of the measured value of printed matter. The example of the high-definition pattern formation apparatus which separated the conventional trolley | bogie drive and blanket cylinder drive is shown, (A) is explanatory drawing which shows the state seen from upper direction, (B) shows the state seen from the side It is explanatory drawing. The pattern formation by the high-definition pattern forming apparatus which separated the conventional cart drive and the blanket cylinder drive is shown, (A) is an explanatory view showing a pattern of a plate, (B) is an explanatory view showing a pattern of a printed matter, ( (C) is an explanatory view showing the posture of the blanket cylinder. BRIEF DESCRIPTION OF THE DRAWINGS It shows an example of the high-definition pattern formation apparatus which concerns on this invention, (A) is explanatory drawing which shows the state seen from upper direction, (B) is explanatory drawing which shows the state seen from the side. The pattern before the printing coordinate pitch correction is shown. (A) is an explanatory diagram showing a pattern in which the printing coordinate pitch of one section is extended. (B) is a pattern in which the printing coordinate pitch of one section is extended. It is explanatory drawing shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... High-definition pattern formation apparatus 2 ... Blanket cylinder 3 ... Blanket cylinder mounting cart 4 ... Apparatus frame 5 ... Removal plate 7 ... Substrate 16 ... Dolly end 17 ... Dolly drive means 18 ... Measuring means 20 ... Laser length measuring instrument 22 ... Control means 3 ... Blanket cylinder driving means f ... First section g ... Second section h ... Third section i ... Fourth section

Claims (4)

An ink supply device, a blanket cylinder-mounted carriage that rotatably supports a blanket cylinder having a blanket that receives ink supplied from the ink supply apparatus, and a device frame that movably supports the blanket cylinder-mounted carriage And a relief plate that is a negative pattern of the pattern to be formed, supporting a removal plate that is separated after the blanket of the blanket cylinder is pressed, and a platen plate that is located on the apparatus frame, and a cover plate made of a glass plate, etc. A printed body, supporting a substrate to be separated after being pressed by a blanket of the blanket cylinder, and comprising a substrate surface plate positioned on the apparatus frame,
A blanket cylinder-mounted carriage having a coating film formed on the surface of the blanket after receiving ink supply from the ink supply apparatus runs on the apparatus frame, the blanket cylinder rotates, and the blanket cylinder-mounted carriage runs under The blanket of the blanket cylinder rotating in the press is separated after being pressed against the removal plate, and the removal plate forms a negative pattern from the blanket coating film to transfer and remove the ink to form a pattern on the blanket, In the pattern forming apparatus, after the transfer and removal, the blanket of the blanket cylinder rotating under the carriage running on the blanket cylinder is pressed against the substrate and separated, and the blanket transfers the high-definition pattern to the substrate.
Corresponding to each end of the carriage facing the axial direction of the blanket cylinder in the blanket cylinder mounted carriage, a carriage driving means for moving the end of the carriage in the traveling direction of the blanket cylinder mounted carriage,
Measuring means for measuring the moving distance of the measured portion in the travel direction of the blanket cylinder mounted carriage, each of the positions near the end of the blanket cylinder in the blanket cylinder mounted carriage as a measured portion;
A pattern forming apparatus comprising: a control unit that operates the carriage driving unit so that a difference in moving distance of the measurement target measured by the measuring unit is constant.   A blanket cylinder driving means attached to the blanket cylinder-mounted carriage, and changing the rotational angular velocity of the blanket cylinder according to the position of the blanket cylinder-mounted carriage in the traveling direction to rotate the blanket cylinder, 2. The configuration according to claim 1, wherein the rotation of the blanket cylinder and the travel of the blanket cylinder-mounted carriage are made asynchronous by controlling the rotation of the blanket cylinder of the blanket cylinder driving means at the time of transferring and removing the ink or transferring to the substrate. Pattern forming device. An ink supply device, a blanket cylinder-mounted carriage that rotatably supports a blanket cylinder having a blanket that receives ink supplied from the ink supply apparatus, and a device frame that movably supports the blanket cylinder-mounted carriage And a relief plate that is a negative pattern of the pattern to be formed, supporting a removal plate that is separated after the blanket of the blanket cylinder is pressed, and a platen plate that is located on the apparatus frame, and a cover plate made of a glass plate, etc. A printed body, supporting a substrate to be separated after being pressed by a blanket of the blanket cylinder, and comprising a substrate surface plate positioned on the apparatus frame,
A blanket cylinder-mounted carriage having a coating film formed on the surface of the blanket after receiving ink supply from the ink supply apparatus runs on the apparatus frame, the blanket cylinder rotates, and the blanket cylinder-mounted carriage runs under The blanket of the blanket cylinder rotating in the press is separated after being pressed against the removal plate, and the removal plate forms a negative pattern from the blanket coating film to transfer and remove the ink to form a pattern on the blanket, In the pattern formation method, after the transfer removal, the blanket of the blanket cylinder rotating under the carriage running on the blanket cylinder is pressed against the substrate and then separated, and the blanket transfers the high-definition pattern to the substrate.
Corresponding to each end of the carriage facing the axial direction of the blanket cylinder in the blanket cylinder mounted carriage, a carriage driving means for moving the end of the carriage in the traveling direction of the blanket cylinder mounted carriage,
With each of the positions near the end of the blanket cylinder in the blanket cylinder-mounted carriage as a measured part, measuring means for measuring the movement distance of the measured part in the travel direction of the blanket cylinder-mounted carriage,
A pattern forming method, wherein the transfer removal and the transfer are performed under the operation of a carriage driving unit that makes a difference in moving distance of the part to be measured measured by the measuring unit constant.   A blanket cylinder driving means attached to the blanket cylinder-mounted carriage and changing the rotational angular velocity of the blanket cylinder according to the position in the traveling direction of the blanket cylinder-mounted carriage, and rotating the blanket cylinder, The pattern according to claim 3, wherein the rotation of the blanket cylinder and the travel of the blanket cylinder-mounted carriage are made asynchronous by controlling the rotation of the blanket cylinder of the blanket cylinder driving means for transferring the ink to the substrate or transferring to the substrate. Forming method.

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