JP6569902B2 - Printing apparatus, printing method, and printing system - Google Patents

Description

  The present invention relates to a printing apparatus, a printing method, and a printing system.

  Conventionally, a photolithography method using a photoresist has been widely applied to the formation of a fine pattern in an electronic device such as a display device such as a liquid crystal display or a circuit board. However, the resist forming process by the photolithography method includes complicated processes such as resist coating, exposure, and development. On the other hand, as a simpler manufacturing process of a fine pattern in an electronic device, there has been conventionally known a method of directly patterning an etching resist on the surface of a substrate or the like by using various printing techniques such as an offset printing method.

  In the offset printing method, the pattern formed by the ink (ink) applied on the plate is once received (transferred) to the blanket, and then the ink received on the blanket is transferred to the workpiece, which is the printed material, to the workpiece. A printing method for forming a pattern.

  However, in the offset printing method described above, for example, the pattern once received by the blanket is transferred to the workpiece, so that the pattern finally formed on the workpiece is positioned in the printing direction with respect to the pattern formed on the plate. Deviation (dimensional error) may occur. For example, when a sheet-like blanket is wound around a roll, the thickness of the blanket may not be uniform or non-uniform depending on the winding method, in addition to the cylindricity of the roll base material and the runout error. Such a variation in the thickness of the blanket causes a variation in printing pressure such as printing pressure and printing pressure, and appears as a local displacement of the pattern formed on the workpiece, that is, a nonlinear displacement. Here, the plate pressure is a pressure between the plate surface and the blanket when the ink on the plate surface is transferred to the blanket surface. The printing pressure is the pressure between the blanket and the workpiece when transferring the ink on the blanket surface to the workpiece surface.

  In this connection, in the offset printing method, the amount of positional deviation of the actual image pattern printed on the substrate is measured at a plurality of measurement points for the plurality of substrates, and the amount of positional deviation for the plurality of substrates to be measured is measured. Is used as a correction amount at each correction point in a printing plate sucked and fixed to the printing platen, and it is proposed to correct image pattern misalignment by pulling or shrinking each correction point based on the calculated correction amount. (For example, refer to Patent Document 1). However, the technique described in Patent Document 1 requires that the printing plate be attached to and detached from the surface plate every time the positional deviation of the image printed on the substrate is corrected.

JP 2010-82841 A JP-A-5-69650 JP-A-5-69651 JP 2013-136229 A

  The present invention has been invented in view of the above situation, and an object of the present invention is to provide a technique capable of accurately reducing a positional deviation in the printing direction of a pattern by ink.

  A printing apparatus according to the present invention for solving the above-described problems is a rotary unit that is driven to rotate about a rotation axis and that has a cylindrical ink holding surface on the outer peripheral surface, and a printing medium. The work stage unit that is relatively moved in the printing direction orthogonal to the rotation axis direction of the roller unit and the work stage unit that holds the substrate to be printed are relatively moved in the printing direction while the work stage unit is relatively moved. By synchronizing the rotation of the roller unit, the control unit for transferring the ink held on the ink holding surface to the printing medium, and the predetermined reference pattern of the pattern actually formed on the printing medium Of the positional deviation amount in the printing direction, there is no nonlinear position corresponding to each section that divides the entire length of the reference pattern along the printing direction. A storage unit that stores at least the amount of misregistration amount data, and the control unit is configured to transfer a peripheral speed of the roller unit and the work stage when transferring ink from the ink holding surface to the printing medium. The relative relationship with the moving speed of the unit is adjusted according to the nonlinear positional deviation amount for each of the sections stored in the positional deviation amount data.

  According to this, the local positional deviation of the pattern formed by the ink transferred to the printing medium can be suitably reduced.

  In the present invention, the positional deviation amount data stored in the storage unit also stores a linear positional deviation amount in the printing direction with respect to the reference pattern of the ink pattern actually formed on the printing medium. And the controller controls the peripheral speed of the roller unit and the movement of the work stage unit based on the linear positional deviation amount stored in the positional deviation amount data and the nonlinear positional deviation amount of each section. The relative relationship with the speed may be adjusted. With this configuration, in addition to the local positional deviation of the pattern formed on the printing medium, it is possible to suitably suppress the linear enlargement or reduction positional deviation.

  In the present invention, the control unit controls the peripheral speed of the roller unit by independently changing the rotational speed of the roller unit and the contact pressure of the roller unit with respect to the printing medium. May be. In this way, by independently controlling the two printing parameters, both linear and non-linear misalignment of the pattern formed by the ink printed on the printing medium can be easily and accurately controlled simultaneously. it can.

  Further, in the present invention, the control unit adjusts the contact pressure of the roller unit in each section based on the nonlinear positional deviation amount stored in the storage unit to obtain the linear positional deviation amount. Based on this, the rotational speed of the roller unit may be adjusted. Thus, by changing the contact pressure of the roller unit according to the non-linear positional deviation amount for each section, the responsiveness when adjusting the peripheral speed of the roller unit can be greatly enhanced.

  In the present invention, it further includes a plate stage unit that holds a plate to which ink is supplied and is relatively moved in a direction orthogonal to the rotation axis direction of the roller unit, and the control unit holds the plate. While relatively moving the plate stage unit in a direction perpendicular to the rotation axis direction of the roller unit, the rotation of the roller unit is synchronized with the relative movement of the plate stage unit, thereby supplying the ink supplied to the plate The ink holding surface may accept the ink.

Further, the present invention can be specified as a printing method. That is, according to the present invention, a work stage unit that holds a printing medium is orthogonal to the rotation axis direction with respect to a roller unit that is driven to rotate about a rotation axis and is provided with a cylindrical ink holding surface on an outer peripheral surface. A printing method for forming a pattern on a printing medium by transferring the ink held by the roller unit to the printing medium while relatively moving in the printing direction to be actually formed on the printing medium Among the positional deviation amounts in the printing direction with respect to a predetermined reference pattern, the positional deviation amount storing at least a nonlinear positional deviation amount corresponding to each section dividing the entire length of the reference pattern along the printing direction. A step of storing data in a storage unit of a computer, and the non-linearity for each section stored in the positional deviation amount data stored in the storage unit Depending on the location shift amount, an adjustment step of adjusting the relationship between the moving speed of the peripheral speed of the roller unit and the work stage unit, the peripheral speed of the roller unit is adjusted in the adjustment step and the work stage unit And a transfer step of transferring the ink held on the ink holding surface to the printing medium based on the relative relationship with the moving speed.

  Further, the present invention can be specified as a printing method. That is, the printing system according to the present invention is driven to rotate about a rotation axis, and has a roller unit having a cylindrical ink holding surface on the outer peripheral surface, and a substrate to be printed, and the rotation axis of the roller unit. While rotating the work stage unit relatively moved in the printing direction orthogonal to the direction and the work stage unit holding the substrate to be printed in the printing direction, the roller unit is rotated relative to the work stage unit. And a control unit for transferring the ink held on the ink holding surface to the printing medium, and a communication device provided to be able to communicate with the printing apparatus. Of the positional deviation amount in the printing direction with respect to the predetermined reference pattern of the formed pattern, the total length of the reference pattern is along the printing direction. A measuring device that measures at least a nonlinear positional deviation amount corresponding to each section to be divided, and the printing apparatus includes a storage unit that stores positional deviation amount data storing at least the nonlinear positional deviation amount for each section. The controller further includes a relative relationship between the peripheral speed of the roller unit and the moving speed of the work stage unit when transferring ink from the ink holding surface to the printing medium as the positional deviation amount data. The adjustment is performed in accordance with the amount of the nonlinear positional deviation for each of the stored sections.

  Note that the above-described means for solving the problems can be used in appropriate combination.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the technique which can reduce the position shift in the printing direction of the pattern by an ink accurately.

FIG. 1 is a schematic configuration diagram of a printing system according to the first embodiment. FIG. 2 is a diagram for explaining the operation of the printing apparatus according to the first embodiment (1). FIG. 3 is a diagram for explaining the operation of the printing apparatus according to the first embodiment (2). FIG. 4 is a sequence diagram executed in the printing system according to the first embodiment. FIG. 5 is a diagram illustrating a misalignment measurement grid pattern printed on the workpiece according to the first embodiment. FIG. 6 is an apparatus configuration diagram illustrating an example of a computer according to the first embodiment. FIG. 7 is a diagram conceptually illustrating a method of decomposing a composite positional shift amount in the positional shift measurement grid pattern according to the first embodiment into a linear positional shift amount and a nonlinear positional shift amount. FIG. 8 is a diagram illustrating a misregistration amount storage table according to the first embodiment.

<Example 1>
Embodiments of the present invention will be described below with reference to the drawings. The following examples are one embodiment of the present invention and do not limit the technical scope of the present invention.

  FIG. 1 is a schematic configuration diagram of a printing system S according to the first embodiment. The printing system S according to the first embodiment includes a printing device 1 and a measuring device 20. The printing apparatus 1 is a so-called gravure offset printing apparatus. FIG. 1A is a plan view, and FIG. 1B is a front view. In the following, the horizontal direction of the paper surface in FIGS. 1A and 1B is defined as the horizontal direction of the printing apparatus 1, and the vertical direction of the paper surface in FIG.

  As shown in FIG. 1, the printing apparatus 1 includes a base unit 2, a plate stage unit 4 on which a plate (printing plate) 3 is held (installed), an ink supply unit 5, and a cylindrical blanket 6 on the outer peripheral surface. A roller unit 7, a work stage unit 9 for holding (installing) a work 8 as a printing medium, a control unit 10 and the like. The base unit 2 is a frame on which the plate stage unit 4, the ink supply unit 5, the roller unit 7, the work stage unit 9 and the like are installed. The printing apparatus 1 receives (transfers) the ink paste IP applied on the plate 3 to the blanket 6 and then transfers the ink paste IP from the blanket 6 to a work 8 such as a substrate.

The control unit 10 is a computer that includes, for example, a central processing unit (hereinafter referred to as “CPU”), a storage device that stores a control program and control data, and the CPU is stored in the storage device. By executing the control program, the plate stage unit 4, the ink supply unit 5, the roller unit 7, the work stage unit 9 and the like are controlled. In addition to the control program, the storage device of the control unit 10 also stores data necessary for the CPU to perform control.

  The plate stage unit 4 and the work stage unit 9 are driven by a driving mechanism (not shown) including, for example, a ball screw and a motor. Further, the roller unit 7 is configured to be rotationally driven by a rotational driving mechanism (not shown) around the rotational axis C shown in FIG. The roller unit 7 is moved up and down by a lifting mechanism (not shown). Also, the roller unit 7 and the work stage unit 9 can reciprocate linearly in a direction orthogonal to the direction of the rotation axis C of the roller unit 7 as indicated by arrows A and B in FIG. The roller unit 7 and the work stage unit 9 can be moved from the position shown in FIG.

  Next, the basic operation of the printing apparatus 1 will be described with reference to FIGS. First, as a preparation for printing, the plate 3 is installed in the plate stage unit 4. The plate 3 is an intaglio for gravure offset printing made of, for example, glass, resin, metal or the like. A concave portion 3 a corresponding to an image pattern to be formed (printed) on the workpiece 8 is formed on the surface of the plate 3. Here, when the purpose of printing is to form a very fine pattern with high accuracy, such as pattern printing of an electronic device, it is preferable to apply an intaglio to the plate 3. By using the intaglio, it is possible to realize finer and higher-precision printing than when using a relief or flat plate. In addition, the film thickness of the pattern can be easily controlled by changing the depth of the recess. The shape of the plate 3 is not particularly limited, and in the example shown in FIG. 1, it is a flat plate shape, but may be a shape wound around a circular cylinder.

  Further, before starting printing, a work 8 as a printing medium is placed on the work stage unit 9. The workpiece 8 is a flat substrate, for example, a color filter film or black matrix substrate for various panels, a transparent electrode film for various elements including transistor elements, wiring formation, or a substrate for electronic components. It is. The workpiece 8 may be, for example, glass such as soda lime glass, low alkali glass, non-alkali glass, or quartz glass; a resin film or resin plate such as polyethylene terephthalate (PET) or polycarbonate; a metal thin plate;

After the plate 3 is installed on the plate stage unit 4 and the workpiece 8 is placed on the work stage unit 9, as shown in FIG. 2A, the concave portion 3a of the plate 3 is formed by the doctor blade 51 provided in the ink supply unit 5. The ink paste IP is filled inside. The material of the ink paste is not particularly limited. However, depending on the application, the main component is selected from materials such as a wiring material, a transparent electrode material, a resist, an insulating material, and a coloring material. What applied the adjustment method of a viscosity can be utilized.

  Next, as shown in FIG. 2B, the plate stage unit 4 is moved from the left to the right in the drawing to the lower side of the roller unit 7 by the drive mechanism. Here, the blanket 6 of the roller unit 7 can be elastically deformed, and is formed of, for example, silicon rubber. When the plate stage unit 4 enters below the roller unit 7, the roller unit 7 rotates in synchronization with the linear movement of the plate stage unit 4 with the surface of the blanket 6 in contact with the surface of the plate 3. As shown in 2 (c), the ink paste IP in the recess 3 a of the plate 3 is received on the blanket 6. In the present embodiment, the blanket 6 that receives the ink paste IP from the concave portion 3a of the plate 3 corresponds to the ink holding surface in the present invention.

  Next, as shown in FIG. 3A, the work stage unit 9 on which the work 8 is placed is moved from the right to the left in the drawing by the drive mechanism. When the work stage unit 9 enters the lower side of the roller unit 7, the roller unit 7 rotates in synchronization with the linear movement of the work stage unit 9 with the surface of the blanket 6 in contact with the surface of the work 8. Then, as shown in FIG. 3B, the ink paste IP on the blanket 6 is transferred onto the workpiece 8 placed on the workpiece stage unit 9. As a result, an ink pattern by the ink paste IP is formed on the work 8. Thereafter, the work 8 that has been printed is removed from the work stage unit 9, and the work 8 to be printed next is placed on the work stage unit 9.

  By the way, forming an ink pattern with high accuracy on the workpiece 8 is a basic required performance for the printing apparatus 1, but as a matter of fact, it is formed by ink printed on the workpiece 8 due to various factors. Pattern may be distorted, and positional deviation may occur with respect to the ink pattern formed on the plate 3. In the method of transferring the ink (pattern) received by the blanket 6 to the work 8 while rotating the blanket 6 in synchronization with the linear movement of the work 8 as in the offset printing method, the printing direction of the ink (pattern) Misalignment tends to occur along (the rotation direction of the blanket 6 and the movement direction of the workpiece 8).

  In addition, when the sheet-like blanket 6 is wound around the roll base material in the roller unit 7, the thickness of the blanket 6 may be uniform depending on how the blanket 6 is wound in addition to the cylindricity of the roll base material and the runout error. However, it may become non-uniform. Such a thickness variation in the blanket 6 causes a variation in printing pressure such as printing pressure and printing pressure, and a local positional deviation of a pattern formed by ink on the workpiece 8, that is, a nonlinear positional deviation. It is easy to appear as. Here, the plate pressure refers to the pressure between the plate 3 and the blanket 6 when the ink of the plate 3 is received by the blanket 6. The printing pressure refers to the pressure between the blanket 6 and the work 8 when the ink of the blanket 6 is transferred to the work 8. Also, the thickness variation in the blanket 6 changes over time due to deterioration of the blanket 6 due to repeated printing, sag, and the like. Therefore, in order to maintain the dimensional accuracy of the pattern formed on the work 8 with high accuracy, it is necessary to promptly reflect the positional deviation information of the pattern actually printed on the work 8 in the printing parameters of the printing apparatus 1. is there.

  Therefore, in the printing apparatus 1 according to the present embodiment and the printing system S including the same, the relative relationship between the peripheral speed of the blanket 6 and the moving speed of the work stage unit 9 in the roller unit 7 is adjusted, so The positional deviation along the printing direction of the pattern to be formed is suppressed. The details will be described below.

  FIG. 4 is a diagram illustrating a sequence executed in the printing system S according to the first embodiment. First, the printing apparatus 1 prints the ink paste IP on the workpiece 8 so that a grid pattern Pa (hereinafter referred to as a “grid pattern for misalignment measurement”) Pa predetermined for misalignment measurement is formed. (FIG. 4: Step S101). FIG. 5 is a diagram showing a misalignment measurement grid pattern Pa actually printed on the workpiece 8. A chain line shown in FIG. 5 is a design lattice pattern (hereinafter referred to as “reference lattice pattern”) Pb to be printed on the workpiece 8, and the plate 3 has a recess 3a in a pattern corresponding to the reference lattice pattern Pb. Is formed.

  The reference lattice pattern Pb is formed as a matrix pattern of 4 rows × 4 columns. The printing direction shown in the figure is that the blanket 6 that has received the ink paste IP rotates in synchronization with the linear movement of the workpiece 8 held by the workpiece stage unit 9 as described in FIG. The direction in which the transfer of the ink paste IP from the blanket 6 onto the work 8 proceeds. Therefore, the printing direction of the pattern by the ink paste IP is defined as a direction orthogonal to the rotation axis C of the blanket 6.

  5 indicates the “pattern start position” of the reference grid pattern Pb, and the code Lb4 indicates the “pattern end position” of the reference grid pattern Pb. A distance ΔLa from the pattern start position Lb0 to the pattern end position Lb4 is the total length in the printing direction of the reference lattice pattern Pb. The reference lattice pattern Pb is divided by the first section Zb1 to the fourth section Zb4. The symbol Lb1 indicates the boundary position between the first interval Zb1 and the second interval Zb2, the symbol Lb2 indicates the boundary position between the second interval Zb2 and the third interval Zb3, and the symbol Lb3 indicates the third interval Zb3 and the fourth interval Zb4. Indicates the boundary position. In the present embodiment, all the section lengths of the first section Zb1 to the fourth section Zb4 are constant.

  Similarly, a symbol La0 illustrated in FIG. 5 indicates a “pattern start end position” of the misalignment measurement lattice pattern Pa, and a symbol La4 indicates a “pattern end position” of the misalignment measurement lattice pattern Pa. The misalignment measurement grid pattern Pa starts printing at the pattern start end position La0 and ends printing at the pattern end position La4. A distance ΔLa from the pattern start position La0 to the pattern end position La4 is the total length in the printing direction of the misalignment measurement lattice pattern Pa. Symbols Za1 to Za4 are the first to fourth sections of the positional deviation measuring grid pattern Pa, and correspond to the first section Zb1 to the fourth section Zb4 of the reference grid pattern Pb, respectively. Reference numerals La1 to La3 correspond to the boundary positions Lb1 to Lb3 of the reference lattice pattern Pb, respectively. As shown in FIG. 5, the misalignment measurement grid pattern Pa actually printed on the workpiece 8 is misaligned in the printing direction with respect to the reference lattice pattern Pb. Further, since the positional deviation of the positional deviation measurement grid pattern Pa with respect to the reference grid pattern Pb includes local expansion and contraction due to nonlinear components in addition to uniform expansion and contraction due to linear components, in each section Za1 to Za4. It can be seen that the amount of positional deviation is not uniform.

Returning to FIG. 4, the printing system S images the measurement grid pattern Pa formed on the workpiece 8 by the camera 21 which is an imaging unit provided in the measurement device 20 (FIG. 4: step S <b> 102). The measuring device 20 is a computer capable of data communication with the control unit 10 of the printing device 1. FIG. 6 is an apparatus configuration diagram illustrating an example of a computer 1000 according to the first embodiment. The control unit 10 and the measuring device 20 of the printing apparatus 1 are a computer 1000 as shown in FIG. A computer 1000 illustrated in FIG. 6 includes a CPU (Central Processing Unit) 1001.
A main storage device 1002, an auxiliary storage device 1003, a communication IF (Interface) 1004, an input / output IF (Interface) 1005, a communication bus 1007, and the like.

  The CPU 1001 performs various processes by executing a program (also referred to as “software” or “application”). The main storage device 1002 caches programs and data read by the CPU 1001 and develops a work area of the CPU. Specifically, the main storage device 1002 is a RAM (Random Access Memory), a ROM (Read Only Memory), or the like. The auxiliary storage device 1003 stores programs executed by the CPU 1001 and various types of information. Specifically, the auxiliary storage device 1003 is an HDD (Hard-disk Drive), an SSD (Solid State Drive), a flash memory, or the like.

  The communication IF 1004 transmits / receives data to / from other computers. The communication IF 1004 is specifically a wired or wireless network card or the like. The input / output IF 1005 is connected to the input / output device and accepts an operation from the user or presents information to the user. Specifically, the input / output device is a keyboard, a mouse, a display, a touch panel, or the like. The drive device 1006 reads data recorded on a storage medium such as a magnetic disk, a magneto-optical disk, and an optical disk, and writes data to the storage medium. The above components are connected by a communication bus 1007. A plurality of these components may be provided, or some of the components (for example, the drive device 1006) may not be provided. In addition, the imaging data of the misalignment measurement grid pattern Pa captured by the camera 21 in step S102 of FIG. 4 is stored in the auxiliary storage device 1003 of the measuring device 20, for example.

  Next, the CPU 1001 of the measuring device 20 uses the positional deviation measurement grid pattern Pa actually formed on the workpiece 8 based on the image data of the positional deviation measurement grid pattern Pa stored in the auxiliary storage device 1003. The positional deviation amount ST in the printing direction with respect to the reference grid pattern Pb is acquired (FIG. 4: Step S103). In step S103, the CPU 1001 of the measuring device 20 obtains the positional deviation amount ST at each of the pattern start end position La0, the boundary positions La1 to La3, and the pattern end position La4 in the positional deviation measurement lattice pattern Pa. Derived based on The positional deviation amount ST here includes a linear component positional deviation amount (hereinafter referred to as “linear positional deviation amount”) SL and a non-linear component positional deviation amount (hereinafter referred to as “nonlinear positional deviation amount”) SNL. Hereinafter, it is referred to as “composite displacement amount”.

  FIG. 7 is a diagram conceptually illustrating a method of decomposing the composite misregistration amount ST in the misregistration measurement lattice pattern Pa according to the first embodiment into a linear misregistration amount SL and a non-linear misregistration amount SNL. FIG. 7A shows the relationship between the composite misregistration amount ST in the misregistration measurement lattice pattern Pa and the printing position (separation distance from the pattern start end position La0 in the printing direction). FIG. 7B shows the relationship between the linear displacement amount SL and the printing position in the displacement measurement lattice pattern Pa. FIG. 7C shows the relationship between the non-linear positional deviation amount SNL and the printing position in the positional deviation measurement lattice pattern Pa. When the linear positional deviation SL shown in FIG. 7B and the nonlinear positional deviation SNL shown in FIG. 7C are combined, the positional deviation ST shown in FIG. 7A is obtained. In other words, the positional deviation ST shown in FIG. 7A can be decomposed into a linear positional deviation SL shown in FIG. 7B and a nonlinear positional deviation SNL shown in FIG. 7C.

  Here, the CPU 1001 of the measurement apparatus 20 is based on the pattern misalignment amounts ST at the pattern start end position La0, the boundary positions La1 to La3, and the pattern end position La4 of the misalignment measurement lattice pattern Pa acquired at step S103. Then, non-linear positional deviation amounts SNL1 to SNL4 (see FIG. 7C) corresponding to the sections Za1 to Za4 are derived.

Further, the CPU 1001 of the measuring device 20 correlates the print position with each composite misregistration amount ST corresponding to the pattern start position La0, the boundary positions La1 to La3, and the pattern end position La4 (see FIG. 7A). Based on the above, for example, using a known conventional method such as the least square method,
A relationship (see FIG. 7B) between the linear misregistration amount SL and the printing position in the misregistration measurement lattice pattern Pa is derived, and the linear misregistration amount SL included in the total length ΔLa of the misregistration measurement lattice pattern Pa. Ask for.

  The measurement apparatus 20 stores the linear displacement amount SL of the displacement measurement lattice pattern Pa derived as described above and the nonlinear displacement amounts SNL1 to SNL4 corresponding to the sections Za1 to Za4, as shown in FIG. The table is stored in the table TL, and the misregistration amount storage table TL is transmitted to the control unit 10 of the printing apparatus 1 (FIG. 4: step S104). The positional deviation amount storage table TL is stored, for example, in the auxiliary storage device 1003 of the measuring device 20 and transmitted via the communication IF 1004.

  On the other hand, the control unit 10 of the printing apparatus 1 stores, for example, the misregistration amount storage table TL acquired from the measurement apparatus 20 via the communication IF 1004 in the auxiliary storage device 1003 of the control unit 10 (FIG. 4: step S105). The misregistration amount storage table TL in this embodiment corresponds to the misregistration amount data in the present invention.

  The CPU 1001 of the control unit 10 is a roller for transferring the ink paste IP from the blanket 12 to the work 17 based on the linear positional deviation amount SL stored in the positional deviation amount table TL and the nonlinear positional deviation amounts SNL1 to SNL4. The relative relationship between the peripheral speed V of the unit 7 and the moving speed of the work stage unit 9 is adjusted. The control unit 10 can adjust the rotational speed Vn (angular speed ω) of the roller unit 7 during printing by controlling a rotation driving mechanism (not shown) that rotationally drives the roller unit 7.

In the present embodiment, the positional deviation due to the linear component is suppressed by adjusting (correcting) the peripheral speed Vr of the roller unit 7 (the blanket 6) according to the linear positional deviation amount SL in the positional deviation measurement lattice pattern Pa. . Here, an initial set value of the peripheral velocity Vr of the blanket 6 is set to “a blanket peripheral velocity initial value Vri”. In addition, the peripheral speed Vr of the blanket 6 that is corrected according to the linear displacement amount SL is defined as “a blanket corrected peripheral speed Vrm”. In this case, the blanket correction peripheral speed Vrm can be obtained by the following equation (1). In this example, the set value of the moving speed of the work stage unit 9 is not changed.

Vrm = Vri × ΔLa ′ / ΔLb (1)

ΔLa ′ is the sum of the total length ΔLb of the reference lattice pattern Pb and the linear displacement amount SL in the displacement measurement lattice pattern Pa (ΔLa ′ = ΔLb + SL).

  By the way, when the linear displacement amount SL in the displacement measurement lattice pattern Pa is a positive value (SL> 0), the displacement measurement lattice pattern Pa is linear with respect to the reference lattice pattern Pb in the printing direction. It means that it was extended. In this case, the blanket correction peripheral speed Vrm is calculated based on the equation (1) as a speed larger than the blanket peripheral speed initial value Vri. As a result, the blanket 6 is driven to rotate at a higher speed in the printing direction with respect to the work stage unit 9 that is linearly moved in the printing direction by a drive mechanism (not shown). As a result, the total length of the pattern formed on the workpiece 8 is reduced as compared with that before the correction, and as a result, linear displacement can be suitably suppressed.

On the other hand, when the linear displacement SL in the displacement measurement lattice pattern Pa is negative (SL <0), the displacement measurement lattice pattern Pa is linear in the printing direction with respect to the reference lattice pattern Pb. It means that it reduced to. In this case, the blanket corrected peripheral speed Vrm is calculated based on the formula (1) as a peripheral speed smaller than the blanket peripheral speed initial value Vri. As a result, the blanket 6 is driven to rotate at a lower speed in the printing direction with respect to the work stage unit 9 that is linearly moved in the printing direction by a driving mechanism (not shown). Thereby, as a result of extending the entire length of the pattern formed on the workpiece 8 as compared with that before the correction, it is possible to suitably suppress the linear displacement.

  The linear displacement amount SL can be read from the displacement amount table TL stored in the auxiliary storage device 1003. As described above, the CPU 1001 of the control unit 10 calculates the blanket correction peripheral speed Vrm in accordance with the nonlinear displacement amount SL (FIG. 4: step S106).

  On the other hand, in the present embodiment, the printing pressure (contact pressure) of the roller unit 7 (the blanket 6) with respect to the workpiece 8 according to the nonlinear positional deviation amounts SNL1 to SNL4 corresponding to the sections Za1 to Za4 in the positional deviation measurement lattice pattern Pa. ) By adjusting (correcting) Pr for each of the sections Za1 to Za4, positional deviation due to nonlinear components is suppressed. The control unit 10 of the printing apparatus 1 can adjust the printing pressure Pr of the roller unit 7 during printing by controlling a lifting mechanism (not shown) that lifts and lowers the roller unit 7.

Here, for example, an initial setting value of the printing pressure of the blanket 6 with respect to the workpiece 8 is set to “printing pressure initial value Pri”. Further, the printing pressure of the blanket 6 after correction that is corrected according to the magnitude of the non-linear positional deviation amount SNL is referred to as “blanket correction printing pressure Prm”. In this case, the blanket correction printing pressure Prm can be obtained by the following equation (2).

Prm (i) = Pri−C × SNL (i) (2) equation

However, C is a coefficient. Further, for each of the first section Za1 to the fourth section Za4, the blanket correction printing pressure Prm can be obtained according to the corresponding non-linear positional deviation amounts SNL1 to SNL4. Note that the non-linear misregistration amounts SNL1 to SNL4 can be read from the misregistration amount table TL stored in the auxiliary storage device 1003. As described above, the CPU 1001 of the control unit 10 in the printing apparatus 1 calculates the blanket correction printing pressure Prm in accordance with the non-linear positional deviation amounts SNL1 to SNL4 corresponding to the first section Za1 to the fourth section Za4. (FIG. 4: Step S107).

  In step S107 described above, when the non-linear positional deviation amount SNL corresponding to a certain section is positive (SNL> 0), the positional deviation measurement grid pattern Pa is localized with respect to the reference grid pattern Pb in the section. It means that it was extended. In this case, the blanket correction printing pressure Prm is calculated based on the equation (2) as a printing pressure smaller than the printing pressure initial value Pri. When the printing pressure decreases, it is considered that the radius of the blanket 6 that is pressed against the workpiece 8 and elastically deforms increases. As a result, the peripheral speed in the printing direction of the blanket 6 relative to the moving speed of the work stage unit 9 in the printing direction is relatively greater than before the correction. As a result, in the section in which the printing pressure of the blanket 6 is reduced and corrected, the section length of the pattern is reduced as compared with that before the correction, so that local positional deviation in the section can be suitably suppressed.

On the other hand, in step S107, when the non-linear positional deviation amount SNL corresponding to a certain section is negative (SNL <0), the positional deviation measurement grid pattern Pa is locally reduced with respect to the reference grid pattern Pb in the section. Means that In this case, the blanket correction printing pressure Prm is calculated based on the equation (2) as a printing pressure larger than the printing pressure initial value Pri. When the printing pressure increases, the radius of the blanket 6 that is pressed against the workpiece 8 and elastically deforms is considered to be small. As a result, the peripheral speed in the printing direction of the blanket 6 relative to the moving speed of the work stage unit 9 in the printing direction is relatively greater than before the correction. As a result, in the section in which the printing pressure of the blanket 6 is reduced and corrected, the section length of the pattern is reduced as compared with that before the correction, so that local positional deviation in the section can be suitably suppressed.

  Next, the CPU 1001 of the control unit 10 in the printing apparatus 1 sets the peripheral speed Vr of the blanket 6 to the blanket corrected peripheral speed Vrm calculated in step S105, and sets the printing pressure Pr of the blanket 6 in each section Za1 to Za4 in S107. The blanket correction printing pressure Prm corresponding to the calculated sections Za1 to Za4 is set, and the ink paste IP is printed on the workpiece 8 (hereinafter referred to as “positional displacement correction printing”) (FIG. 4: step S108). When the process of step S108 ends, this sequence is temporarily ended. Note that the processing related to the sequence illustrated in FIG. 4 may be performed periodically while the printing apparatus 1 is in operation.

  In the misalignment correction printing executed in step S108, the linear misalignment in the printing direction of the pattern formed on the workpiece 8 is reduced by setting the peripheral speed Vr of the blanket 6 to the blanket correction peripheral speed Vrm. can do. Further, the printing pressure of the blanket 6 is set to the blanket correction peripheral speed Vrm corresponding to each of the sections Za1 to Za4 in accordance with the non-linear position shift amounts SNL1 to SNL4 corresponding to the sections Za1 to Za4 in the lattice pattern Pa for position shift measurement. By doing so, it is possible to reduce nonlinear positional deviation in the printing direction of the pattern formed on the workpiece 8.

  As described above, according to the printing apparatus 1, the printing system S, and the printing method according to the present embodiment, when the ink paste IP is printed on the workpiece 8 to form a pattern, the positional deviation in the printing direction (dimensional error). ) Can be accurately suppressed. In particular, in this embodiment, the roller unit rotational speed Vn (angular speed ω) and the printing pressure (contact pressure) Pr of the roller unit 7 with respect to the workpiece 8 are independently changed to change the roller parameters. Since the peripheral speed Vr of the unit is controlled independently, both linear and non-linear misalignment of the pattern formed by the ink paste IP printed on the workpiece 8 can be accurately and easily performed simultaneously. Can be suppressed.

  Further, in this embodiment, the non-linear positional deviation of the pattern formed on the workpiece 8 is dealt with by adjusting the printing pressure (contact pressure) Pr of the roller unit 7 with respect to the workpiece 8, and the pattern formed on the workpiece 8. The linear positional deviation of is addressed by adjusting the rotational speed Vn (angular speed ω) of the roller unit. Thus, by changing the printing pressure (contact pressure) Pr of the roller unit 7 for each section in accordance with the nonlinear positional deviation amount, the responsiveness when adjusting the peripheral speed Vr of the roller unit 7 can be greatly enhanced. it can. As a result, it is possible to accurately suppress local positional deviation for each section in which the pattern on the work 8 is divided in the printing direction. However, as a modification, the rotational speed Vn (angular velocity ω) of the roller unit 7 is adjusted according to the amount of non-linear positional deviation of the pattern formed on the workpiece 8, and the mark of the roller unit 7 is marked according to the amount of linear positional deviation of the pattern. The pressure (contact pressure) Pr may be adjusted, and by controlling in this way, both the linear positional deviation and the local positional deviation of the pattern can be suitably reduced.

Further, in the printing system S according to the present embodiment, the measuring device 20 is provided in the printing device 1, but is not limited thereto. For example, even if the measuring device 20 is installed at a position separated from the printing apparatus 1 and the amount of positional deviation in the printing direction with respect to a predetermined reference pattern of the pattern actually formed on the workpiece 8 that is the printing medium is measured. good. However, as in this embodiment, the measuring device 20 is provided in the printing apparatus 1 to measure the amount of pattern misalignment on the workpiece 8 in-line, and the measurement result is fed back to the printing apparatus 1 to quickly The control value of the printing parameter can be adjusted. Further, in the printing apparatus 1 according to the present embodiment, the printing pressure Pr of the blanket 6 during printing is adjusted by controlling a lifting mechanism that lifts and lowers the roller unit 7, but a lifting mechanism that lifts and lowers the work stage unit 9 is provided. May be. And the control part 10 in the printing apparatus 1 may adjust the printing pressure Pr of the blanket 6 at the time of printing by controlling the raising / lowering mechanism which raises / lowers the work stage unit 9. FIG.

<Modification>
The printing apparatus, printing method, and printing system according to the present embodiment can be variously changed, improved, combined, and the like. For example, in the above embodiment, when adjusting the relative relationship between the peripheral speed of the roller unit 7 and the moving speed of the work stage unit 9, the moving speed of the work stage unit 9 is fixed to a constant value, and the linear displacement amount SL is set. Although the peripheral speed Vr of the blanket 6 is adjusted according to the size of the blanket 6, it is not limited to this.

  For example, the peripheral speed Vr of the blanket 6 may be fixed to a constant value, and the movement speed of the work stage unit 9 may be adjusted according to the magnitude of the linear displacement amount SL. At this time, when the linear displacement SL in the displacement measurement grid pattern Pa is a positive value (SL> 0), the movement speed of the work stage unit 9 in the printing direction is corrected to be slower. good. By making the moving speed of the work stage unit 9 in the printing direction relatively slow with respect to the peripheral speed Vr of the blanket 6, it is possible to eliminate the linear positional deviation that extends the entire length of the pattern formed on the work 8. . On the other hand, when the linear displacement amount SL is a negative value (SL <0), it is preferable to correct so that the moving speed of the work stage unit 9 in the printing direction becomes higher. By increasing the moving speed of the work stage unit 9 in the printing direction relative to the peripheral speed Vr of the blanket 6, it is possible to eliminate the linear displacement that reduces the overall length of the pattern formed on the work 8. it can. As another modification, both the peripheral speed Vr of the blanket 6 and the moving speed of the work stage unit 9 may be adjusted according to the magnitude of the linear displacement amount SL.

  In the above embodiment, when adjusting the relative relationship between the peripheral speed of the roller unit 7 and the moving speed of the work stage unit 9, the moving speed of the work stage unit 9 is fixed to a constant value, and the linear displacement SL Although the peripheral speed Vr of the blanket 6 is adjusted according to the size of the blanket 6, it is not limited to this.

  In the above embodiment, the example in which the printing apparatus 1 is configured as an offset printing apparatus has been described. However, the present invention is not limited to this. For example, the present invention may be applied to a flexographic printing apparatus or the like. In this case, the cylindrical ink holding surface according to the present invention is formed on the outer peripheral surface of the plate cylinder that is rotationally driven. Even when applied to a flexographic printing apparatus in this way, when the ink paste IP supplied to the ink holding surface of the plate cylinder is transferred to the work, the relative relationship between the peripheral speed of the plate cylinder and the movement speed of the work is expressed. By adjusting, it is possible to make it difficult for the pattern formed on the workpiece to be displaced. Further, in the above embodiment, the predetermined reference pattern is formed as a design value pattern to be printed on the workpiece 8, but the present invention is not limited to this. For example, a pattern is laminated on the workpiece 8 in a plurality of layers. The pattern formed in the lower layer may be used as the reference pattern.

S ... Printing system 1 ... Printing device 2 ... Base unit 3 ... Plate 4 ... Plate stage unit 5 ... Ink supply unit 6 ... Blanket 7 ... Roller unit 8 ..Work 9 ... Work stage unit 10 ... Control unit 20 ... Measurement device 21 ... Camera

Claims (7)

A roller unit that is driven to rotate about a rotation axis and is provided with a cylindrical ink holding surface on the outer peripheral surface;
A work stage unit that holds a substrate to be printed and is relatively moved in a printing direction orthogonal to the rotation axis direction of the roller unit;
While relatively moving the work stage unit holding the substrate to be printed in the printing direction, by synchronizing the rotation of the roller unit with the relative movement of the work stage unit, the ink held on the ink holding surface is A control unit for transferring to the substrate,
Of the positional deviation amount in the printing direction with respect to a predetermined reference pattern of the pattern actually formed on the printing medium, a nonlinear positional deviation corresponding to each section that divides the entire length of the reference pattern along the printing direction. A storage unit for storing positional deviation amount data storing at least the amount;
With
The control unit stores a relative relationship between the peripheral speed of the roller unit and the moving speed of the work stage unit when transferring ink from the ink holding surface to the printing medium, in the positional deviation amount data. The printing apparatus is adjusted according to the non-linear positional deviation amount for each of the sections. The positional deviation amount data stored in the storage unit also stores the linear positional deviation amount in the printing direction with respect to the reference pattern of the ink pattern actually formed on the printing medium,
The control unit, based on the linear displacement amount stored in the displacement amount data and the nonlinear displacement amount of each section, the peripheral speed of the roller unit and the movement speed of the work stage unit, The printing apparatus according to claim 1, wherein the relative relationship is adjusted.   The said control part controls the circumferential speed of the said roller unit by changing each of the rotational speed of the said roller unit, and the contact pressure of the said roller unit with respect to the said to-be-printed body independently. Item 3. The printing apparatus according to Item 2.   The control unit adjusts the contact pressure of the roller unit in each section based on the non-linear positional deviation amount of each section stored in the storage unit, and based on the linear positional deviation amount, The printing apparatus according to claim 3, wherein the rotation speed is adjusted. A plate stage unit that holds a plate to which ink is supplied and is relatively moved in a direction orthogonal to the rotation axis direction of the roller unit;
The control unit synchronizes the rotation of the roller unit with the relative movement of the plate stage unit while relatively moving the plate stage unit holding the plate in a direction perpendicular to the rotation axis direction of the roller unit. The printing apparatus according to any one of claims 1 to 4, wherein the ink supplied to the plate is received by the ink holding surface. The work stage unit that holds the substrate to be printed is relatively moved in the printing direction orthogonal to the rotation axis direction with respect to the roller unit that is driven to rotate about the rotation axis and has a cylindrical ink holding surface on the outer peripheral surface. A printing method for forming a pattern on the printing medium by transferring the ink held by the roller unit to the printing medium,
Of the positional deviation amount in the printing direction with respect to a predetermined reference pattern of the pattern actually formed on the printing medium, a nonlinear positional deviation corresponding to each section that divides the entire length of the reference pattern along the printing direction. Storing at least the amount of misregistration amount data stored in the storage unit of the computer;
The relative relationship between the peripheral speed of the roller unit and the moving speed of the work stage unit is adjusted according to the non-linear positional deviation amount for each section stored in the positional deviation amount data stored in the storage unit. Adjustment process;
A transfer step of transferring the ink held on the ink holding surface to the printing medium based on the relative relationship between the peripheral speed of the roller unit adjusted in the adjustment step and the moving speed of the work stage unit;
A printing method characterized by comprising: A roller unit that is driven to rotate about a rotation axis and is provided with a cylindrical ink holding surface on the outer peripheral surface;
A work stage unit that holds a substrate to be printed and is relatively moved in a printing direction orthogonal to the rotation axis direction of the roller unit;
While relatively moving the work stage unit holding the substrate to be printed in the printing direction, by synchronizing the rotation of the roller unit with the relative movement of the work stage unit, the ink held on the ink holding surface is A control unit for transferring to the substrate,
A printing apparatus comprising:
Of the positional deviation amount in the printing direction with respect to a predetermined reference pattern of a pattern that is provided so as to be communicable with the printing apparatus and is actually formed on the substrate, the entire length of the reference pattern is divided along the printing direction. A measuring device that measures at least the amount of nonlinear positional deviation corresponding to each section
Including
The printing apparatus further includes a storage unit that stores misregistration amount data storing at least the nonlinear misregistration amount for each section.
The control unit stores a relative relationship between the peripheral speed of the roller unit and the moving speed of the work stage unit when transferring ink from the ink holding surface to the printing medium, in the positional deviation amount data. The printing system is adjusted according to the non-linear positional deviation amount for each section.

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