JP2006279870A - Lame-mode quartz crystal oscillator - Google Patents

Lame-mode quartz crystal oscillator Download PDF

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JP2006279870A
JP2006279870A JP2005099793A JP2005099793A JP2006279870A JP 2006279870 A JP2006279870 A JP 2006279870A JP 2005099793 A JP2005099793 A JP 2005099793A JP 2005099793 A JP2005099793 A JP 2005099793A JP 2006279870 A JP2006279870 A JP 2006279870A
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vibration
piezoelectric plate
rectangular
vibrator
lame
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JP4724447B2 (en
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Masahiko Goto
正彦 後藤
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To improve a support method of a vibration part for particularly satisfying requirements of downsizing and high accuracy with respect to the vibrator shape of a lame-mode quartz crystal oscillator. <P>SOLUTION: In the lame-mode quartz crystal oscillator for causing a vibration form of contour vibration by using four corner node points of the piezoelectric plate in the case that electric charges are applied to the rectangular shaped piezoelectric plate wherein a piezoelectric plate of a rectangular shape is extended/contracted in a width direction when the piezoelectric plate is extended in a longitudinal direction of the rectangular shape and the piezoelectric plate of a rectangular shape is extended/contracted in the longitudinal direction when the piezoelectric plate is extended in the width direction of the rectangular shape. The vibrator is supported at a center position of the principal side of the piezoelectric plate when the length of sides of the rectangular piezoelectric plate is same. Concretely, the vibrator is supported at a non-vibrating part as the center position of the principal face of the vibrating parts wherein the length of one side of the rectangular piezoelectric plate is defined as L, then the length of the other longer side is a multiple of L. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ラーメモード水晶振動子の振動子形状に関するものであり、特に、小型化、高精度化の要求を満足する振動部の耐衝撃性を向上する支持方法に関するものである。   The present invention relates to a resonator shape of a lame mode crystal resonator, and more particularly to a support method for improving the impact resistance of a vibration part that satisfies the demands for miniaturization and high accuracy.

ラーメモード振動子は小型で低周波数を実現する上で最適な振動モードを得ることができる。そのため低周波の振動子でありながら小型化を実現するということは、近年めざましい進化を遂げている携帯電話、携帯型の小型ゲーム機器などに広く利用される大きな市場がある。   The lame mode vibrator is small and can obtain an optimum vibration mode for realizing a low frequency. Therefore, the realization of miniaturization while being a low-frequency vibrator has a large market widely used in mobile phones, portable small game devices and the like that have made remarkable progress in recent years.

ラーメモード振動子は数10μmの板厚の圧電基板により形成されており、ラーメモード振動子を保持するためには振動の阻害にならないように、振動の節を保持することが一般的である。振動の節は2次モードの場合には4点で支持されている。図8に示すように四隅の接続部を介して支持と保持がなされている。この節からアームを引き出し保持部へ接続しパッケージに組立ることで振動子を得ている。このときのアーム部はなるべく細くすることにより振動の阻害を少なくし、等価直列抵抗を小さくすることができる。そのため、落下衝撃時に強い構造が必要となる。   The lame mode vibrator is formed of a piezoelectric substrate having a thickness of several tens of μm. In order to hold the lame mode vibrator, it is common to hold a vibration node so as not to hinder vibration. The vibration node is supported at four points in the secondary mode. As shown in FIG. 8, it is supported and held through the connecting portions at the four corners. From this node, the arm is pulled out and connected to the holding part and assembled into a package to obtain a vibrator. At this time, by making the arm portion as thin as possible, the inhibition of vibration can be reduced and the equivalent series resistance can be reduced. Therefore, a strong structure is required at the time of drop impact.

上述のように、ラーメモード水晶振動子は正方形板の場合、四隅が節となって面内で等体積的に振動する振動モードであることから、従来のラーメモード水晶振動子はQ値の高い振動子を得るために振動の節となっている四隅から支持部を引き出すことが最も有効な支持方法であり、実際の支持方法については、振動子の支持部には接続部を介してセラミックなどの基板に導電性接着剤を用いて固定しているのが現状である。
特開2003−101378号公報 川島,平間,斎藤,小山,「水晶振動子とその応用デバイス」,社団法人電子情報通信学会論文誌,VOL.J82−C−I,No.12,1999年12月号,p.667−682 なお出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。
As described above, when the lame mode quartz crystal resonator is a square plate, the conventional lame mode crystal resonator has a high Q value because it is a vibration mode in which the four corners are nodes and vibrates in an equal volume in the plane. The most effective support method is to pull out the support part from the four corners that are the nodes of vibration to obtain the vibrator. For the actual support method, ceramic etc. are connected to the support part of the vibrator via the connection part. At present, the substrate is fixed to the substrate using a conductive adhesive.
JP 2003-101378 A Kawashima, Hirama, Saito, Koyama, "Crystal oscillator and its applied devices", IEICE Transactions, VOL. J82-CI, No. 12, December 1999, p. In addition, the applicant has not found any prior art documents related to the present invention by the time of filing of the present application other than the prior art documents specified by the above-mentioned prior art document information.

上述する従来のラーメモード水晶振動子は振動部の辺比が整数の矩形板となるため、例えば振動部四隅を支持する場合には、振動の節は四隅となり振動変位が小さい部分であることから振動部の保持によるラーメモードの振動を阻害することは無い。   Since the conventional lame mode quartz crystal resonator described above is a rectangular plate with an integer ratio of the vibration part, for example, when supporting the four corners of the vibration part, the vibration nodes are the four corners and the vibration displacement is small. The vibration of the lame mode due to the holding of the vibration part is not hindered.

しかしながら、振動部と支持部と接続部が一体で形成される構造であるために、ラーメモード水晶振動子を容器に実装し収納すると、振動部と支持部とを接続する部分にはラーメモード振動の節から発生するモーメント力が生じるために、そのモーメント力の影響を受けて、接続部には屈曲振動が発生してしまう。   However, since the vibration part, the support part, and the connection part are integrally formed, when the lame mode crystal resonator is mounted and stored in the container, the part that connects the vibration part and the support part has a lame mode vibration. Since the moment force generated from the node is generated, bending vibration is generated at the connecting portion under the influence of the moment force.

従って支持部及び接続部の形状を適切な設計値にしないと振動部の振動漏れが生じ、振動部を保持する支持部や接続部にまで不必要な振動が伝達することから、純粋なラーメモードの振動を阻害されるおそれがある。   Therefore, if the shape of the support part and connection part is not set to appropriate design values, vibration of the vibration part will occur, and unnecessary vibration will be transmitted to the support part and connection part that hold the vibration part. There is a risk that the vibrations of the

加えて、振動部分を何らかの手段により容器に実装するために、支持部及び接続部が必要になってくる。そのために振動子という形態で考えると振動部に加えて支持部と接続部などが一体となった構造が必要となってくるために、全体的な小型化が難しくなっている現状にある。その一方で小型化を推進上で振動部以外の支持部などを軽量化し脆弱な形状にすることにより、Q値を高く維持することはできるものの、支持部を細くすることなどによって耐衝撃性や耐落下強度などと言った衝撃に弱くなることも心配される。   In addition, in order to mount the vibrating part on the container by some means, a support part and a connection part are required. Therefore, when considered in the form of a vibrator, a structure in which a support portion and a connection portion are integrated in addition to the vibration portion is required, so that it is difficult to reduce the overall size. On the other hand, it is possible to maintain a high Q value by reducing the weight of the supporting part other than the vibrating part and making it fragile in propulsion, but by reducing the supporting part, impact resistance and I am also worried that it will be vulnerable to impacts such as the drop-resistant strength.

そこで本発明は、矩形状の圧電素板に電荷を加えた場合に前記圧電素板の角部4点を節として、前記矩形状の長手方向に伸びたときには短手方向に伸縮し、かつ、前記矩形状の短手方向に伸びたときには長手方向に伸縮する輪郭振動の振動形態を生じるラーメモード水晶振動子において、前記矩形状の圧電素板の無振動部である節部および/または節部側面で支持することを特徴とするラーメモード水晶振動子であり、前述の節部側面とは、該圧電素板を基板にし、基板の振動部の一方の辺の寸法を1とし、もう一方の辺の寸法との辺比が整数倍(1〜n)を満たす前記矩形状の圧電素板であって、前記矩形状の圧電素板の一辺をLとしたとき、もう一辺がLの倍数の寸法関係にあるラーメモード水晶振動子である。   Therefore, in the present invention, when a charge is applied to the rectangular piezoelectric element plate, the four corners of the piezoelectric element plate are nodes, and when extending in the longitudinal direction of the rectangular shape, the piezoelectric element plate expands and contracts in the short direction, and In the lame mode quartz crystal resonator that generates a vibration form of contour vibration that expands and contracts in the longitudinal direction when extending in the short direction of the rectangular shape, a node portion and / or a node portion that is a non-vibrating portion of the rectangular piezoelectric element plate The lame mode quartz crystal resonator is characterized in that it is supported by a side surface. The above-mentioned node side surface is a substrate in which the piezoelectric element plate is a substrate, the dimension of one side of the vibration portion of the substrate is 1, and the other side surface The rectangular piezoelectric element plate satisfying an integer ratio (1 to n) of the side dimension and when one side of the rectangular piezoelectric element plate is L, the other side is a multiple of L. It is a lamé mode crystal resonator in a dimensional relationship.

要するにラーメモード水晶振動子は、ラーメモード振動子は数10μmの板厚の圧電基板により形成されており、ラーメモード振動子を保持するためには振動の阻害にならないように、振動の節を保持することが一般的であるが、支持部に対する強度が不足していることから、特に複数次のラーメモード振動子においては、従来2点または4点のアームで振動子を支持していたことに対し、更に振動の節となる中心部付近の各最低次数で振動するラーメモード振動子の頂点となる部分を支持することにより、支持点数を増やし耐衝撃性を向上した剛性を持った支持形態のラーメモード振動子を得ることができる。   In short, the lame mode crystal resonator is formed of a piezoelectric substrate having a thickness of several tens of μm, and in order to hold the lame mode resonator, the vibration node is held so as not to inhibit the vibration. However, since the strength to the support part is insufficient, the multi-order Lame mode vibrator has conventionally supported the vibrator with two or four arms. On the other hand, by supporting the part that becomes the apex of the lame mode vibrator that vibrates at the lowest order near the central part that becomes the node of vibration, the support form with rigidity that increased the number of support points and improved impact resistance A Lame mode vibrator can be obtained.

上述のように本発明のラーメモード水晶振動子の支持部を高次モードの振動子の場合において、圧電素板の無振動部である節部および/または節部側面で支持する箇所を増やし、低周波の振動モードでありながら、振動子全体を小型化にしても接続部の強度を確保することができる。なおこの場合、側面で支持する箇所は、基板の振動部の一方の辺の寸法を1とし、もう一方の辺の寸法との辺比が整数倍(1〜n)を満たす前記矩形状の圧電素板であって、前記矩形状の圧電素板の一辺をLとしたとき、もう一辺がLの倍数の寸法関係にある。   As described above, in the case of the higher-order mode resonator, the support portion of the lame mode crystal resonator of the present invention increases the number of portions to be supported by the nodal portion and / or the nodal side surface of the piezoelectric element plate, Even in the low frequency vibration mode, the strength of the connecting portion can be ensured even if the entire vibrator is downsized. In this case, the portion to be supported by the side surface is the rectangular piezoelectric element in which the dimension of one side of the vibrating portion of the substrate is 1, and the ratio of the side to the dimension of the other side satisfies an integer multiple (1 to n). In the base plate, when one side of the rectangular piezoelectric base plate is L, the other side has a dimensional relationship that is a multiple of L.

以下、図面に従ってこの発明の実施例を説明する。なお、各図において同一の符号は同様の対象を示すものとする。
圧電素板1を基板にし、その基板の辺比の一方の寸法を1としたとき、もう一方の寸法が整数比(1〜n)を満たす板に無数に存在する振動モードをラーメモード振動子と呼んでいる。図1に示すように正方形板の場合は四隅が節となって向かい合う2辺Aが正方形の中心方向に変位したときはもう一方の2辺Bが正方形の外方向に変位し、また向かい合う2辺Aが正方形の外方向に変位したときはもう一方の2辺Bが正方形の中心方向に変位する振動形態である。従って、図1(a)と図1(b)の動作を繰り返す形態で振動する。この図1は正方形板の最低次の振動モードと呼ぶ。また図1(c)には振動板の寸法概念を示す。そして図2にはその振動モードの模式図を示している。
Embodiments of the present invention will be described below with reference to the drawings. In each figure, the same numerals indicate the same objects.
When the piezoelectric element plate 1 is a substrate, and one dimension of the side ratio of the substrate is 1, the lame mode vibrator has an infinite number of vibration modes existing on a plate in which the other dimension satisfies the integer ratio (1 to n). It is called. In the case of a square plate as shown in FIG. 1, when the two sides A facing each other with the corners at the four corners are displaced toward the center of the square, the other two sides B are displaced outwardly of the square, and the two sides facing each other When A is displaced in the outward direction of the square, the other two sides B are in a vibration form that is displaced in the center direction of the square. Therefore, it vibrates in such a manner that the operations of FIG. 1A and FIG. 1B are repeated. This FIG. 1 is called the lowest order vibration mode of a square plate. FIG. 1 (c) shows a dimensional concept of the diaphragm. FIG. 2 shows a schematic diagram of the vibration mode.

一方、図3の(a)〜(b)には高次の振動モードを実現するための模式図を描画したものである。図3(a)は辺比が1:2、図3(b)は辺比が1:3のラーメモード振動子の解析例である。このようにラーメモード振動は矩形状の板の辺比が整数の板に無数に存在する振動モードである。そしてその振動モードの模式図をそれぞれ図4と図5に示している。   On the other hand, FIGS. 3A to 3B are schematic diagrams for realizing higher-order vibration modes. FIG. 3A shows an example of analysis of a lame mode vibrator having an edge ratio of 1: 2, and FIG. 3B an edge ratio of 1: 3. As described above, the lame mode vibration is a vibration mode infinitely existing on a plate having a rectangular side ratio of an integer. A schematic diagram of the vibration mode is shown in FIGS. 4 and 5, respectively.

本発明では、上述の高次の振動モードを支持するときに、従来では振動子の角部だけを支持していたものを振動子の無振動部全てを保持することに特徴をもたせたものである。その支持形態の一例としては、図6に示すように、振動子の無振動部である節部(各最低次数で振動するラーメモード振動子の頂点となる部分)は圧電素板1を基板にし、基板の振動部の側面の一方の辺の寸法を1とし、もう一方の辺の寸法との辺比が整数倍(1〜n)を満たす矩形状の圧電素板1であって、前記矩形状の圧電素板1の一辺をLとしたとき、もう一辺がLの倍数の寸法関係にあることを特徴とする。   In the present invention, when the above-described higher-order vibration mode is supported, what is conventionally supported only for the corner portion of the vibrator is characterized by retaining all the vibration-free portions of the vibrator. is there. As an example of the supporting form, as shown in FIG. 6, the nodal portion of the vibrator (the portion that becomes the apex of the lame mode vibrator that vibrates at the lowest order) is formed by using the piezoelectric element plate 1 as a substrate. A rectangular piezoelectric element plate 1 in which the dimension of one side of the side surface of the vibration part of the substrate is 1, and the ratio of the other side to the dimension of the other side is an integral multiple (1 to n), When one side of the piezoelectric element plate 1 is L, the other side has a dimensional relationship that is a multiple of L.

本発明の他の支持形態については図7(a)、図7(b)に示すような支持形態が考えられ、各々の支持部2については、図6を基本として考えられたもので、図7(a)については図面の縦方向である高次に配列する方向の一部の接続部3を欠いたものであり、図7(b)については、図面の横方向の接続部3の一部を欠いたものである。なお、図7に図示する範囲での接続部3の組み合わせ構成であって同様の効果を奏するのは言うまでも無い。   7A and 7B can be considered for other support modes of the present invention, and each support portion 2 is considered based on FIG. 7 (a) lacks a part of the connecting portions 3 in the high-order arrangement direction which is the vertical direction of the drawing, and FIG. 7 (b) shows one of the connecting portions 3 in the horizontal direction of the drawing. It lacks a part. In addition, it is needless to say that the combined configuration of the connecting portions 3 in the range illustrated in FIG.

なお、図8は従来の支持形態の一例で、従来は振動子を作製する際にはQ値の低下を避けるために振動の節となっている正方形の四隅に支持部2を設けており、その関係で、振動部と支持部2及び接続部3は一体で形成されるため振動の節となっている四隅にはモーメント力が生じてしまう。   FIG. 8 shows an example of a conventional support form. Conventionally, when a vibrator is manufactured, support portions 2 are provided at four corners of a square that is a node of vibration in order to avoid a decrease in Q value. In this relation, the vibration part, the support part 2 and the connection part 3 are formed integrally, so that moment force is generated at the four corners serving as vibration nodes.

それにより支持部2の設計が適切でない場合、振動のエネルギーが支持部2に漏れてしまい等価抵抗値R1が大きくなってしまう。更に等価抵抗値R1を小さくすること及びQ値の低下を軽減する目的で四隅からの支持部2の幅、及び厚みを小さくすると落下等の衝撃を受けた場合や過大な励振電流により振幅が大きくなった場合に破損するおそれがある。   As a result, when the design of the support portion 2 is not appropriate, vibration energy leaks to the support portion 2 and the equivalent resistance value R1 increases. Furthermore, if the equivalent resistance value R1 is reduced and the width and thickness of the support part 2 from the four corners are reduced for the purpose of reducing the decrease in the Q value, the amplitude increases due to an impact such as a drop or excessive excitation current. There is a risk of damage.

ラーメモード水晶振動子の1次の形態を示す平面図である。It is a top view which shows the primary form of a lamé mode crystal oscillator. 図1に示す振動形態を解析するモードである。This is a mode for analyzing the vibration form shown in FIG. ラーメモード水晶振動子の高次モードを説明する平面図である。It is a top view explaining the higher order mode of a lamé mode crystal oscillator. 図3に示す高次のモードで2次モードを示す模式図である。FIG. 4 is a schematic diagram showing a secondary mode in the higher-order mode shown in FIG. 3. 図3に示す高次のモードで3次モードを示す模式図である。It is a schematic diagram which shows a tertiary mode in the high-order mode shown in FIG. 本発明の支持形態の一例を示す平面図である。It is a top view which shows an example of the support form of this invention. 本発明の他の支持形態を示す平面図である。It is a top view which shows the other support form of this invention. 従来例としたラーメモード水晶振動子の支持形態の概念図を示す平面図である。It is a top view which shows the conceptual diagram of the support form of the lame mode crystal resonator made into the prior art example.

符号の説明Explanation of symbols

1 圧電素板
2 支持部
3 接続部
1 Piezoelectric substrate
2 Support part 3 Connection part

Claims (1)

矩形状の圧電素板に電荷を加えた場合に前記圧電素板の角部4点を節として、前記矩形状の長手方向に伸びたときには短手方向に伸縮し、かつ、前記矩形状の短手方向に伸びたときには長手方向に伸縮する輪郭振動の振動形態を生じるラーメモード水晶振動子において、
前記矩形状の圧電素板の無振動部である節部および/または節部側面で支持することを特徴とするラーメモード水晶振動子。
When a charge is applied to the rectangular piezoelectric element plate, the four corners of the piezoelectric element plate serve as nodes, and when extending in the longitudinal direction of the rectangular shape, it expands and contracts in the short direction, and the rectangular short shape In a lame mode crystal resonator that produces a vibration form of contour vibration that expands and contracts in the longitudinal direction when stretched in the hand direction,
A lame mode quartz crystal resonator supported by a nodal portion and / or a side surface of the nodal portion of the rectangular piezoelectric element plate.
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Publication number Priority date Publication date Assignee Title
JP2003023338A (en) * 2001-07-06 2003-01-24 Piedekku Gijutsu Kenkyusho:Kk Vertical-width piezoelectric crystal vibrator
JP2004023780A (en) * 2002-06-18 2004-01-22 Piedekku Gijutsu Kenkyusho:Kk Breadthwise longitudinal crystal vibrator and crystal unit
JP2003101378A (en) * 2002-09-17 2003-04-04 Piedekku Gijutsu Kenkyusho:Kk Lame mode quartz resonator
JP2004135357A (en) * 2002-09-19 2004-04-30 Piedekku Gijutsu Kenkyusho:Kk Quartz resonator, quartz unit, crystal oscillator, and manufacturing method thereof

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