JP4890912B2 - Method for manufacturing a lame mode crystal resonator - Google Patents

Method for manufacturing a lame mode crystal resonator Download PDF

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JP4890912B2
JP4890912B2 JP2006097477A JP2006097477A JP4890912B2 JP 4890912 B2 JP4890912 B2 JP 4890912B2 JP 2006097477 A JP2006097477 A JP 2006097477A JP 2006097477 A JP2006097477 A JP 2006097477A JP 4890912 B2 JP4890912 B2 JP 4890912B2
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crystal
lame mode
vibration
crystal resonator
quartz
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JP2007274348A (en
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忠孝 上山
正彦 後藤
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京セラキンセキ株式会社
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Description

  The present invention relates to a resonator shape of a lame mode crystal resonator, and more particularly, to a manufacturing method that realizes downsizing, high accuracy, and a low CI value and improves the mechanical strength of the entire lame mode crystal resonator. Is.
  The lame mode crystal resonator is small and can obtain an optimum vibration mode for realizing a low frequency. Therefore, the realization of miniaturization while being a low-frequency vibrator has a large market widely used in mobile phones, portable small game devices and the like that have made remarkable progress in recent years.
  The lame mode crystal unit is formed of a piezoelectric substrate with a thickness of several tens of μm. In order to hold the lame mode crystal unit, there is a rotational moment but no displacement so as not to hinder vibrations. It is common to keep clauses. As shown in FIG. 6, it is supported and held through the connecting portions at the four corners. From this node, the arm is pulled out and connected to the holding portion, and mounted on the package via the connecting portion and assembled to obtain a vibrator. At this time, by making the arm portion as thin as possible, the inhibition of vibration can be reduced and the equivalent series resistance can be reduced. Therefore, a strong structure is required at the time of drop impact.
  In short, conventionally, when a vibrator is manufactured, support portions are provided at the four corners of a square serving as a node of vibration in order to avoid an increase in the equivalent resistance value R1, and accordingly, the vibration portion, the support portion, Since the connecting portions are integrally formed, moment forces are generated at the four corners that are vibration nodes. Therefore, if the design of the support portion is not appropriate, vibration energy leaks to the support portion, and the equivalent resistance value R1 increases. Furthermore, in order to reduce the equivalent resistance value R1, in order to reduce the increase in the equivalent resistance value R1, if the width and thickness of the support part from the four corners are reduced, it may be affected by an impact such as dropping or an excessive excitation current. There is a risk of damage if the amplitude increases.
  As described above, when the lame mode crystal resonator is a square plate, it is a vibration mode in which the four corners are nodes (rotation nodes) and vibrate in the same volume in the plane. In order to obtain a vibrator having a good (low) equivalent resistance value R1, it is the most effective support method to pull out the support portions from the four corners which are the nodes of vibration. The actual support method is as follows. At present, it is fixed to a substrate such as ceramic using a conductive adhesive via a connecting portion.
  An example of the above-described process is shown in FIG. 7. A series of wafer cleaning, light etching, protective vapor deposition film (CrAu), resist coating, exposure, development, patterning, etching, resist stripping, CrAu stripping, cleaning, excitation electrode deposition An element is formed in the process, and is mounted on a package made of a ceramic material or the like with a conductive adhesive to obtain a lame mode crystal resonator.
JP 2003-142979 A JP 2001-31537 A JP 2004-242256 A JP, 2005-244702, A In addition to the prior art literature specified by the above-mentioned prior art literature information, the applicant did not find the prior art literature relevant to the present invention by the time of this application.
  Since the conventional lame mode quartz crystal resonator described above is a rectangular plate with an integer ratio of the vibration part, for example, when supporting the four corners of the vibration part, the vibration nodes are the four corners and the vibration displacement is small. The vibration of the lame mode due to the holding of the vibration part is not hindered.
  However, since the vibration part, the support part, and the connection part are integrally formed, when the lame mode crystal resonator is mounted and stored in the container, the part that connects the vibration part and the support part has a lame mode vibration. Since the moment force generated from the node is generated, bending vibration is generated at the connecting portion under the influence of the moment force.
  Therefore, if the shape of the support part and the connection part is not set to appropriate design values, vibration of the vibration part will occur, and unnecessary vibration will be transmitted to the support part and connection part that hold the vibration part. There is a risk that the vibrations of the
  In addition, in order to mount the vibrating part on the container by some means, a support part and a connection part are required. For this reason, when considered in the form of a vibrator, a structure in which a support part and a connection part are integrated in addition to the vibration part is required, so that it is difficult to reduce the overall size. On the other hand, in order to promote downsizing, it is possible to maintain a high Q value by reducing the weight of the supporting part other than the vibrating part and making it fragile. At present, it is difficult to keep the impedance (CI value) of the vibrator low.
  Therefore, a technique for suppressing the CI value by reducing only the vibration part is known. In that case, there is a description that uses a powder beam to realize the thickness processing of the vibrator and a chemical etching method, but since the powder beam is a mechanical processing process, it is difficult to reduce the cost in the manufacturing process, Considering the processing time, it is expected that a lot of processing time will be required for mass production. In addition, it is conceivable that making only the vibration part thin may cause insufficient mechanical strength, and there is a problem that it is difficult to withstand practical use.
Therefore, the present invention is such that when a charge is applied to a rectangular crystal element, the four corners of the crystal element are nodes, and when extending in the longitudinal direction of the rectangular shape, the rectangular crystal element contracts in the short direction, and the rectangular element An LQ1T-cut or LQ2T-cut quartz substrate that produces a vibration form of contour vibration that shrinks in the longitudinal direction when it extends in the short direction of the shape. In the manufacturing method, a step of forming an electrode on one principal surface of the plate-like quartz material forming the quartz element, and a protective film on the concave inner surface of the container body having a concave shape made of a glass material connected in plural. A step of forming, a step of bonding the crystal element to the concave opening surface of the container body, a step of patterning a lame mode crystal resonator from the surface of the crystal element in the bonded state, This is a method of manufacturing a lame mode crystal resonator comprising a step of forming an electrode on the remaining main surface of the crystal element and a step of dividing the crystal element into individual lame mode crystal resonator forms. Further, a wet etching method is used in the process of patterning the crystal element described above.
  In short, the present invention overcomes the weakness of the original element of the lame mode crystal resonator by performing the patterning process of the crystal element in a state where the container body made of glass and the crystal element are bonded in advance. Instead of patterning the lame mode crystal resonator in the form of a crystal element, patterning in the state of joining and integrating with the container body first, damage of the element during the manufacturing process or lame mode crystal vibration By improving the mechanical strength in the form of a child, the conventional problems were improved.
  As described above, in the method of manufacturing a lame mode crystal resonator according to the present invention, the manufacturing method with improved overall mechanical strength is used to improve the yield in the manufacturing process and reduce the manufacturing cost. In addition, the quality of the lame mode crystal resonator can be improved.
Embodiments of the present invention will be described below with reference to the drawings. In each figure, the same numerals indicate the same objects.
A crystal element 1 having a piezoelectric element plate as a substrate. When one dimension of the side ratio of the substrate is 1 (L), the other corners of the plate satisfy an integer ratio (1 (L) to n). The feature of the lame mode vibrator is that it has no vibration part. In the case of a square plate as shown in FIG. 1, when the two sides A facing each other with the corners at the four corners are displaced toward the center of the square, the other two sides B are displaced outwardly of the square, and the two sides facing each other When A is displaced in the outward direction of the square, the other two sides B are in a vibration form that is displaced in the center direction of the square.
  Therefore, it vibrates in the form of repeating the operations of FIG. 1A and FIG. This FIG. 1 is called the lowest order vibration mode of a square plate. FIG. 1C shows a dimensional concept of the diaphragm. FIG. 2 shows a schematic diagram of the vibration mode. FIG. 3 shows an example of a high-order vibration mode based on the basic shape. The concept is the same as the basic form of FIG. 1, FIG. 3 (a) shows the case of the secondary (mode), and FIG. 3 (b) shows the case of the tertiary (mode). 1 and 3 indicate a non-vibrating portion of the lame mode vibrator.
Here, the flow of the manufacturing process of the present invention is shown. When a charge is applied to the rectangular crystal element 1, the four corners of the crystal element 1 are nodes, and when it extends in the longitudinal direction of the rectangular shape, it contracts in the short direction, and in the rectangular short direction. when extending results in vibration form of contour vibration shrinks longitudinally, LQ1T cut or made from a quartz substrate LQ2T cut vibrating portion, the supporting portion, the keep manufacturing method of Lame mode quartz crystal resonator 5 which constitutes the connection section A step of forming an electrode 2 on one main surface of a plate-like quartz material forming the quartz element 1, and a step of forming a protective film on the concave inner surface of the container body 3 having a concave shape made of a glass material in which a plurality are connected. A step of bonding the crystal element 1 to the surface of the concave opening 4 of the container body 3, a step of patterning the lame mode crystal resonator 5 from the surface of the bonded crystal element 1, and the crystal element 1 remaining. On one side Forming a pole 2, Lame mode quartz crystal resonator 5 is manufactured by a step of dividing the form of individual Lame mode quartz crystal resonator 5. In this case, a wet etching method is used for the process of patterning the crystal element 1.
  The outline of the shape of the crystal element 1 obtained in the manufacturing process of the above flow will be described with reference to the sectional view of FIG. In FIG. 5A, a plate-like quartz material for forming the quartz crystal element 1 is prepared, and the electrode 2 is formed on one main surface (container side) of the quartz crystal element 1, and a plurality of FIG. A container body 3 having a concave shape made of a glass material is prepared and bonded integrally with the quartz crystal material in a later step.
At this time, a protective film is also formed so that the concave inner surface in the container body 3 is not eroded by the etching solution. Then, the crystal element 1 is bonded to the surface of the concave opening 4 of the container body 3 as depicted in FIG. 5C, and patterning of the lame mode crystal resonator 5 is performed from the surface of the crystal element 1 in the bonded state. 5D, an electrode 2 is formed on the remaining main surface of the crystal element 1 as shown in FIG. 5 (d), and divided into individual lame mode crystal resonators 5 in FIG. 5 (e). This is a feature of the present invention.
In addition, although shown with the dotted line in FIG.5 (e), the actual lame mode quartz crystal vibrator finally becomes the form which covered the cover body.
  By forming the pattern of the lame mode crystal resonator 5 in a form in which the concave container 3 is bonded to the crystal device 1 in the entire manufacturing process, the vulnerability of the element of the original lame mode crystal resonator 5 is improved. The mechanical strength in the state where the element is damaged during the manufacturing process or in the form of the lame mode crystal resonator 5 can be improved.
It is a top view which shows the primary form of a lamé mode crystal oscillator. This is a mode for analyzing the vibration form shown in FIG. It is a top view which shows the vibration form in the case of a higher order based on the basic form of FIG. It is a flowchart which shows the flow of manufacture of the lame mode vibrator | oscillator of this invention. It is a conceptual diagram of the form obtained by the flow of element formation of the present invention. It is a conceptual diagram of the lame mode crystal resonator form shown as a conventional example. It is a flowchart which shows the manufacturing process which forms the element of a lame mode vibrator.
Explanation of symbols
DESCRIPTION OF SYMBOLS 1 Crystal element 2 Electrode 3 Container body 4 Opening part 5 Lame mode crystal resonator

Claims (2)

  1. When a charge is applied to the rectangular crystal element, the corners of the four corners of the crystal element are nodes, and when extending in the longitudinal direction of the rectangular shape, it contracts in the short direction, and the rectangular short direction resulting in vibration form of contour vibration shrinks in the longitudinal direction when elongated in, LQ1T cut or made from a quartz substrate LQ2T cut vibrating portion, the supporting portion, keep manufacturing method of Lame mode quartz crystal resonator constituting the connection portion,
    A step of forming an electrode on one main surface of a plate-like quartz material forming the quartz element, a step of forming a protective film on the concave inner surface of a container body having a concave shape made of a plurality of glass materials, and The step of bonding the crystal element to the surface of the concave opening of the container body, the step of patterning the lame mode crystal resonator from the surface of the bonded crystal element, and the remaining one main surface of the crystal element A manufacturing method of a lame mode crystal resonator comprising a step of forming an electrode and a step of dividing into individual lame mode crystal resonator forms.
  2. 2. The method of manufacturing a lame mode crystal resonator according to claim 1, wherein a wet etching method is used for patterning the crystal element.
JP2006097477A 2006-03-31 2006-03-31 Method for manufacturing a lame mode crystal resonator Active JP4890912B2 (en)

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Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0870230A (en) * 1994-08-26 1996-03-12 Murata Mfg Co Ltd Production of piezoelectric component
JPH09298434A (en) * 1996-04-26 1997-11-18 Kinseki Ltd Manufacture of piezoelectric vibrator
JPH10209785A (en) * 1997-01-23 1998-08-07 Matsushita Electric Ind Co Ltd Manufacture of vibrator
JP2002299977A (en) * 2001-03-30 2002-10-11 Kinseki Ltd Method for manufacturing piezoelectric vibrator
JP2003142979A (en) * 2001-10-31 2003-05-16 River Eletec Kk Crystal vibrator and its manufacturing method
JP4319845B2 (en) * 2003-02-10 2009-08-26 リバーエレテック株式会社 Quartz crystal resonator and manufacturing method thereof
JP2004361269A (en) * 2003-06-05 2004-12-24 Canon Inc Multichannel sensor and method for manufacturing the same and biosensor system and method for manufacturing the same
US7394326B2 (en) * 2004-03-30 2008-07-01 Citizen Holdings Co., Ltd. Quartz oscillator manufacturing method and quartz oscillator
JP4567357B2 (en) * 2004-03-31 2010-10-20 京セラキンセキ株式会社 Method for manufacturing quartz diaphragm
JP2006049971A (en) * 2004-07-30 2006-02-16 Kyocera Kinseki Corp Method of manufacturing crystal resonator

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