JP2006277816A - Method for manufacturing magnetic transfer master disk - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a master disk bearing information to be transferred by magnetic transfer, capable of preventing the generation of internal stress in an electroforming layer during electroforming, and having high flatness and high adhesion to the slave disk of a transfer destination. <P>SOLUTION: The method for manufacturing a magnetic transfer master disk having a magnetic layer formed on a recessed/projected pattern by obtaining a master substrate as a metal board having the recessed/projected pattern corresponding to transfer information transferred to its surface from an inversion die having a reverse recessed/projected pattern by an electroforming step is provided with the initial electroforming step 50 of dividing the electroforming step into 3 or more time bands and executing electroforming at a current density of 65% or more of the average current density of the entire electroforming step for a predetermined time from the start, a main electroforming step 52 executed for a predetermined time after the initial electroforming step to execute electroforming at a current density of 140% or more of the average current density of the entire electroforming step, and a last electroforming step 54 of executing electroforming at a current density of 50% or less of the average current density of the entire electroforming step. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a magnetic transfer master disk, and more particularly to a method of manufacturing a magnetic transfer master disk suitable for transferring magnetic information such as format information to a magnetic disk used in a hard disk device or the like.

  In recent years, magnetic disks (hard disks) used in hard disk drives, which have been rapidly spreading, are written with format information and address information before being installed in the drive after being delivered to the drive manufacturer by the magnetic disk manufacturer. It is common. Although this writing can be performed by a magnetic head, a method of batch transfer from a master disk in which format information and address information are written is efficient and preferable.

  In this magnetic transfer method for batch transfer, a master disk and a transfer target disk (slave disk) are in close contact with each other, and a magnetic field generating means such as an electromagnet device or a permanent magnet device is provided on one side or both sides for transfer. By applying a magnetic field, the information (for example, servo signal) that the master disk has is magnetically transferred to the slave disk. In order to perform magnetic transfer with high accuracy, it is extremely important that the master disk and the slave disk are in close contact with each other without gaps.

By the way, as a master disk used in this magnetic transfer method, a rugged pattern corresponding to an information signal is formed on the surface of a substrate and a magnetic layer is coated on the rugged pattern surface. This master disk for magnetic transfer is electroformed by performing electroforming on an original plate on which information is formed in a concavo-convex pattern, and laminating a metal plate made of an electroformed layer on the original plate and transferring the concavo-convex pattern onto the surface of the metal plate. It is generally manufactured by coating a magnetic layer on the surface of the concavo-convex pattern after passing through a process, a peeling process for peeling the metal disk from the original plate, and a punching process for punching the peeled metal disk to a predetermined size. (For example, refer to Patent Document 1).
JP 2001-256644 A

  However, the conventional master disk manufactured by the above process is likely to generate internal stress in the electroformed layer when performing electroforming, and also includes a peeling process for peeling the metal disk from the original plate and a punching process for punching to a predetermined size. The master disk is not necessarily a flat surface due to deformation or the like that occurs during processing such as warping or distortion.

  By the way, when performing magnetic transfer, in order to transfer a signal with high quality, it is important that the master disk and the slave disk are in close contact with each other without any gap. However, as described above, since the master disk is warped, it has been practiced to increase the contact pressure during transfer or to improve the flatness of the holder that holds the master disk when contacting the slave disk. It was.

  However, increasing the contact pressure may damage the concavo-convex pattern formed on the master disk or cause deformation, which causes a decrease in the durability performance of the master disk.

  On the other hand, the slave disk to which the signal is transferred is also deformed over the entire surface of the substrate, such as shape deformation such as warping and distortion, and shape deformation evaluated by items such as edge drift and ski jump. For this reason, in order to transfer a signal to a desired position, higher adhesion is required. When the adhesion is low, there is a problem that the transferred signal intensity is low due to the spacing between the master disk and the slave disk, and good transfer is not performed.

  The present invention has been made in view of such circumstances, and is a master disk carrying information to be transferred by magnetic transfer, which is less likely to cause internal stress in the electroformed layer during electroforming, and is highly flat. The object is to provide a master disk having high adhesion to a slave disk for transfer.

  In order to achieve the above object, the present invention provides a master substrate which is a metal disk having a concavo-convex pattern corresponding to transfer information transferred to the surface by an electroforming process from a reversal mold having a reverse concavo-convex pattern. In the method of manufacturing a magnetic transfer master disk in which a magnetic layer is formed on the concavo-convex pattern, the electroforming process is divided into three or more time zones, and a predetermined time from the start time, an average current density of all electroforming processes An initial electroforming step of performing electroforming at a current density of 65% or less, and an electroforming step performed for a predetermined time after the initial electroforming step, wherein the current density is 140% or more of the average current density of all electroforming steps A main electroforming process in which electroforming is performed, and a final electroforming process in which electroforming is performed at a current density equal to or less than 50% of the average current density of the entire electroforming process for a predetermined time until the end. Magnetic transfer master To provide a method of manufacturing a disk.

  According to the present invention, the electroforming process is divided into three or more time zones, and in the initial electroforming process, electroforming is performed at a current density of 65% or less of the average current density of the entire electroforming process. Therefore, the flatness of the disk after electroforming can be maintained with very high accuracy (flatness is small).

  In addition, according to the present invention, in the final electroforming process, electrocasting is performed at a current density of 50% or less of the average current density of all electroforming processes, so the surface roughness of the disk after electroforming is very high accuracy. (With reduced surface roughness).

  On the other hand, in the main electroforming process, the electroforming is performed at a current density of 140% or more of the average current density of the entire electroforming process, so that the electroforming speed can be maintained in the same manner as before and the productivity is not inferior.

  The “average current density of all electroforming processes” is a value obtained by dividing the accumulated current density of all electroforming processes by the time of all electroforming processes. For example, the horizontal axis represents time and the vertical axis represents current density. It is also a value obtained by dividing the area of the XY graph taking the value by the time of the entire electroforming process.

In this invention, it is preferable that the average current density of the said all electroforming process shall be 5-15 A / dm < ² >. With such an average current density, the electroforming speed can be maintained as in the conventional case, and the productivity is not inferior.

  Moreover, in this invention, it is preferable to perform the said initial stage electroforming process for 30 to 75% of time of a total electroforming process. If such a time ratio of the initial electroforming process can be ensured, internal stress is hardly generated in the electroformed layer, and the electroforming speed can be maintained in the same manner as in the prior art, and the productivity is not inferior.

  Moreover, in this invention, it is preferable to perform the said last stage electroforming process for 5 to 10% of time of a total electroforming process. If the time ratio of the final electroforming process can be secured, the surface roughness of the disc after electroforming can be maintained with very high accuracy, and the electroforming speed can be maintained as in the conventional case, resulting in poor productivity. Nor.

  As described above, according to the present invention, internal stress is hardly generated in the electroformed layer, and the flatness of the disc after electroforming can be maintained with very high accuracy (flatness is small).

  The preferred embodiments of the method for manufacturing a magnetic transfer master disk according to the present invention will be described below in detail with reference to the accompanying drawings.

  1 is a partial perspective view of a magnetic transfer master disk 10 (hereinafter referred to as a master disk 10) according to the present invention. FIG. 2 is a cross-sectional view taken along the line AA of FIG. The slave disk 14) is indicated by an imaginary line.

  As shown in FIGS. 1 and 2, the master disk 10 is composed of a metal master substrate 11 and a magnetic layer 12, and a fine uneven pattern P (for example, a servo) corresponding to transfer information on the surface of the master substrate 11. Information pattern), and the concave / convex pattern P is covered with the magnetic layer 12.

  Thereby, the information carrying surface 13 having the fine uneven pattern P in which the magnetic layer 12 is coated on one surface of the master substrate 11 is formed. As can be seen from FIG. 1, this fine uneven pattern P is rectangular in plan view, with the magnetic layer 12 formed, the length p in the track direction (arrow direction in the figure) and the length in the radial direction. L.

  The optimum values of the length p and the length L vary depending on the recording density and the recording signal waveform. For example, the length p can be 80 nm and the length L can be 200 nm. In the case of a servo signal, the fine uneven pattern P is formed long in the radial direction. In this case, for example, the length L in the radial direction is preferably 0.05 to 20 μm, and the length p in the track direction (circumferential direction) is preferably 0.01 to 5 μm.

  It is preferable for the pattern carrying the servo signal to select the concave / convex pattern P that is longer in the radial direction within this range. The depth t (projection height) of the uneven pattern P is preferably in the range of 30 to 800 nm, and more preferably in the range of 50 to 300 nm.

  As shown in FIG. 3, the master substrate 11 is formed in a disk shape having a center hole 11G and is a circle excluding the inner peripheral portion 11D and the outer peripheral portion 11E of the one side (information carrying surface 13). The uneven pattern P is formed in the annular region 11F. The details of the production of the master substrate 11 will be described later. Mainly, the metal plate is formed by electroforming the original plate on which the information is formed by the concavo-convex pattern P, and the electroplating layer is formed on the original plate. It is manufactured by an electroforming process for transferring the uneven pattern P to the board and a peeling process for peeling the metal board from the original plate.

  In the present invention, various types of metals and alloys can be used as the electroformed layer. In the present embodiment, an example of a Ni electroformed layer will be described below as a preferable example. Since this Ni electroformed layer has flexibility, electroforming is performed while controlling the current density during electroforming so as to have a defined crystal structure. The current density during electroforming will be described later.

  Next, a method for manufacturing the master disk 10 of the present invention configured as described above will be described in detail.

  FIG. 4 is a process diagram showing steps for manufacturing the master disk 10. First, as shown in FIG. 4A, pretreatment such as formation of an adhesion layer is performed on an original plate 15 (which may be a glass plate or a quartz plate) made of a silicone wafer having a smooth and clean surface, and an electron beam resist. The liquid is applied by spin coating or the like to form a resist film 16 and baked.

  Then, an electron beam exposure apparatus (not shown) equipped with a high-precision rotary stage or XY stage irradiates the original plate 15 mounted on the stage with an electron beam B modulated in accordance with a servo signal or the like. Then, a desired concavo-convex pattern P ′ is drawn and exposed on the resist film 16.

  Next, as shown in FIG. 4B, the resist film 16 is developed, and a desired concavo-convex pattern P ′ is formed by the resist film 16 remaining after removing the exposed portion. An Ni conductive film (not shown) is applied on the concavo-convex pattern P ′ by, for example, stamping to produce an electroformed original plate 17.

  Next, as shown in FIG. 4C, the entire surface of the original plate 17 is subjected to an electroforming process by an electroforming apparatus, and a metal plate 18 (Ni electroformed layer) having a desired thickness made of Ni metal is laminated. Ni has a crystal structure of a face-centered cubic lattice and is electroformed so as to have a prescribed crystal structure by controlling the current density during electroforming.

  FIG. 5 is a cross-sectional view of the electroforming apparatus 60. The electroforming apparatus 60 is filled with a plating tank 64 for storing a plating solution (bath) 62, a drain tank 66 for receiving the plating solution 62 overflowed from the plating tank 64, and Ni pellets 68, 68. The anode chamber 70 receives the plating solution 62 overflowed from the plating tank 64, the cathode 72 holding the original plate 17, and the like.

  A plating solution 62 is supplied to the plating tank 64 from a plating solution supply pipe 74. Further, the plating solution 62 overflowed from the plating tank 64 to the drain tank 66 is recovered from the drain tank drain pipe 76. Further, the plating solution 62 overflowed from the plating tank 64 to the anode chamber 70 is recovered from the anode chamber drain pipe 78.

  The plating tank 64 and the anode chamber 70 are separated by a partition plate 80. An electrode shielding plate 82 is fixed on the surface of the partition plate 80 on the plating tank 64 side so as to face the cathode 72. The electrode shielding plate 82 is formed so as to cover a predetermined portion of the electrode so that the electroformed film thickness is uniform in the plane.

  In the electroforming apparatus 60 having the above-described configuration, the master substrate 11 is electroformed by holding the original plate 17 on the cathode 72, connecting the negative electrode to the cathode 72, and connecting the positive electrode of the anode chamber 70 to energize. Is done.

  In electroforming, in the present embodiment, the current density during electroforming is controlled by the pattern shown in FIG. That is, the electroforming process is divided into three or more time zones, and the initial electroforming process 50 for performing electroforming at a current density of 65% or less of the average current density of all electroforming processes for a predetermined time from the start, An electroforming process performed for a predetermined time after the electroforming process, in which electroforming is performed at a current density of 140% or more of the average current density of the entire electroforming process, and for a predetermined time until the end, A final electroforming step 54 in which electroforming is performed at a current density of 50% or less of the average current density of the electroforming step.

  FIG. 6 is an XY graph with time on the horizontal axis and current density on the vertical axis. A time 50T of the initial electroforming process 50, a time 52T of the main electroforming process 52, and a time 54T of the final electroforming process 54 are shown.

The time 50T of the initial electroforming process 50 is preferably 30 to 75% of the total electroforming process, and the time 54T of the final electroforming process 54 is 5 to 10% of the total electroforming process. It is preferable to do. Moreover, it is preferable that the average current density of all the electroforming processes shall be 5-15 A / dm < ² >.

  In this way, by controlling the current density and time of the electroforming process, internal stress is hardly generated in the electroformed layer, and the flatness of the disc after electroforming can be maintained with very high accuracy (flatness is reduced). . In addition, the surface roughness of the disc after electroforming can be maintained with very high accuracy (small surface roughness). Furthermore, the electroforming speed can be maintained as in the conventional case, and the productivity is not inferior.

  If the current density in the initial electroforming process 50 exceeds 65% of the average current density in the entire electroforming process, an internal stress is generated in the electroformed layer, which is not preferable. When the average current density is more than 50% of the total electroforming process, the surface roughness of the disk after electroforming is inferior, which is not preferable.

  Further, if the time 50T of the initial electroforming process 50 is less than 30% of the total electroforming process, internal stress is generated in the electroformed layer, which is not preferable, and the time 50T is 75% of the total electroforming process. If the time is exceeded, the productivity is inferior, which is not preferable.

  Similarly, if the time 54T of the final electroforming process 54 is set to be less than 5% of the time of the entire electroforming process, the surface roughness of the disc after electroforming is inferior. If the time exceeds 10%, the productivity is inferior, which is not preferable.

  As described above, the “average current density in all electroforming processes” is a value obtained by dividing the accumulated current density in all electroforming processes by the time of all electroforming processes, and the area of the graph in FIG. Is a value obtained by dividing by the time of the entire electroforming process.

  Returning to FIG. 4, next, the metal plate 18 having the crystal structure defined as described above is peeled off from the original plate 17, and the remaining resist film 16 is removed and washed. As a result, as shown in FIG. 4D, the master 11 ′ of the master substrate 11 having the inverted concavo-convex pattern P and having the outer diameter D before being punched into a predetermined size is obtained.

  This master 11 'is punched out to obtain a master substrate 11 of a predetermined size having an outer diameter d shown in FIG. 4 (e). The master disk 10 can be manufactured by forming the magnetic layer 12 on the concave / convex pattern surface of the master substrate 11.

  As another manufacturing process of the master disk 10, the original plate 17 is electroformed to produce a second original plate. Then, electrocasting is performed using the second original plate, a metal disk having an inverted concavo-convex pattern is produced, and a master substrate may be punched into a predetermined size.

  Furthermore, the second original plate is electroformed, or the resin liquid is pressed and cured to produce a third original plate, and the third original plate is electroformed to produce a metal plate, and the inverted uneven pattern It is also possible to peel off a metal plate having a master substrate. A plurality of metal plates 18 can be produced by repeatedly using the second original plate or the third original plate.

  In the production of the original, the resist film may be removed after the resist film is exposed and developed, and then etched to form an uneven pattern by etching on the surface of the original.

  The magnetic layer 12 is formed by depositing a magnetic material by vacuum film forming means such as vacuum deposition, sputtering, or ion plating, or by plating, coating, or the like. As the magnetic material of the magnetic layer, Co, Co alloy (CoNi, CoNiZr, CoNbTaZr, etc.), Fe, Fe alloy (FeCo, FeCoNi, FeNiMo, FeAlSi, FeAl, FeTaN, etc.), Ni, Ni alloy (NiFe, etc.) are used. Can be used. In particular, FeCo and FeCoNi can be preferably used. The thickness of the magnetic layer 12 is preferably in the range of 50 to 500 nm, and more preferably in the range of 100 to 400 nm.

  A protective film such as diamond-like carbon (DLC) or sputtered carbon is preferably provided on the magnetic layer 12, and a lubricant layer may be further provided on the protective film. In this case, it is preferable to use a DLC film having a thickness of 3 to 30 nm and a lubricant layer as the protective film.

  Further, an adhesion enhancing layer such as Si may be provided between the magnetic layer and the protective film. The lubricant has an effect of improving deterioration of durability such as generation of scratches due to friction when correcting the deviation caused in the contact process with the slave disk 14.

  In the present invention, in the lamination of the metal plate 18 by electroforming, the current density and time are controlled so that a Ni electroformed layer having a very small residual stress is formed.

  Usually, the metal used for the master disk 10 is nickel (Ni). However, when the master disk 10 is manufactured by electroforming, a nickel sulfamate bath in which a master substrate 11 having a small stress can be easily obtained is used. Is preferred.

  The nickel sulfamate bath may contain, for example, an additive such as a surfactant (for example, sodium lauryl sulfate) based on 400 to 800 g / L of nickel sulfamate and 20 to 50 g / L of boric acid (supersaturated). It is what was added. The bath temperature of the plating bath is preferably 40 to 60 ° C. It is preferable to use a nickel ball in a titanium case for the counter electrode during electroforming.

  Next, a magnetic transfer method for transferring the uneven pattern P of the master disk 10 manufactured as described above to the slave disk 14 will be described. FIG. 7 is a perspective view of a main part of a magnetic transfer apparatus 20 for performing magnetic transfer using the master disk 10 of the present invention.

  At the time of magnetic transfer, the slave surface (magnetic recording surface) of the slave disk 14 after initial DC magnetization described later shown in FIG. 9A is brought into contact with the information carrying surface 13 of the master disk 10 to obtain a predetermined pressing force. Adhere with. Then, with the slave disk 14 and the master disk 10 in close contact with each other, a magnetic field for transfer is applied by the magnetic field generating means 30 to transfer the concave / convex pattern P of the master disk 10 to the slave disk 14.

  The slave disk 14 is a disk-shaped recording medium such as a hard disk or a flexible disk having a magnetic recording layer formed on both sides or one side. A cleaning process (burnishing or the like) for removing adhering dust is performed as necessary.

  As the magnetic recording layer of the slave disk 14, a coating type magnetic recording layer, a plating type magnetic recording layer, or a metal thin film type magnetic recording layer can be adopted. Magnetic materials for the metal thin film type magnetic recording layer include Co, Co alloys (CoPtCr, CoCr, CoPtCrTa, CoPtCrNbTa, CoCrB, CoNi, etc.), Fe, Fe alloys (FeCo, FePt, FeCoNi, etc.), Ni, Ni alloys (NiFe Etc.) can be used.

  These are preferable because they have a high magnetic flux density and have magnetic field anisotropy in the same direction as the magnetic field application direction (in-plane direction for in-plane recording), thereby enabling clear transfer. In order to provide the necessary magnetic anisotropy under the magnetic material (on the support side), it is preferable to provide a nonmagnetic underlayer. This underlayer needs to match the crystal structure and lattice constant to the magnetic layer 12. For that purpose, it is preferable to use Cr, CrTi, CoCr, CrTa, CrMo, NiAl, Ru or the like.

  The magnetic transfer by the master disk 10 is performed when the master disk 10 is brought into close contact with one side of the slave disk 14 and the transfer is performed on one side of the slave disk 14. There are cases where simultaneous transfer is performed.

  The magnetic field generating means 30 for applying the transfer magnetic field includes electromagnet devices 34 and 34 each having a coil 33 wound around a core 32 having a gap 31 extending in the radial direction between the slave disk 14 and the master disk 10 held in close contact with each other. A transfer magnetic field having magnetic field lines G (see FIG. 8) parallel to the track direction is applied in the same direction in the vertical direction. FIG. 8 shows the relationship between the circumferential tracks 14A, 14A...

  When a magnetic field is applied, a magnetic field for transfer is applied by the magnetic field generating means 30 while rotating the slave disk 14 and the master disk 10 together, and the uneven pattern of the master disk 10 is magnetically transferred to the slave surface of the slave disk 14. . In addition to this configuration, the magnetic field generation means may be rotated.

  The transfer magnetic field does not have any magnetic field strength exceeding the maximum value in the optimum transfer magnetic field strength range (0.6 to 1.3 times the coercive force Hc of the slave disk 14) in any of the track directions. There are at least one portion having a magnetic field strength within the range in one track direction, and the magnetic field strength in the opposite track direction is less than the minimum value in the optimum transfer magnetic field strength range at any position in the track direction. A magnetic field having a certain magnetic field intensity distribution is generated in a part of the track direction.

  FIG. 9 is an explanatory diagram for explaining the basic steps of the magnetic transfer method using in-plane recording. First, as shown in FIG. 9A, the initial magnetic field (DC demagnetization) is applied to the slave disk 14 in advance by applying an initial magnetic field Hi in one direction in the track direction.

  Next, as shown in FIG. 9B, the recording surface (magnetic recording portion) of the slave disk 14 and the information carrying surface 13 on which the concave / convex pattern P of the master disk 10 is formed are brought into close contact with each other. Magnetic transfer is performed by applying a transfer magnetic field Hd in the direction opposite to the initial magnetic field Hi in the track direction. The transfer magnetic field Hd is sucked into the convex magnetic layer 12 of the concavo-convex pattern P and the magnetization of this portion is not reversed, and the magnetic field of the other portion is reversed. As a result, as shown in FIG. The uneven pattern P of the master disk 10 is magnetically transferred and recorded on the magnetic recording surface of the disk 14.

  In such a magnetic transfer, it is important to make the slave disk 14 and the master disk 10 in close contact with each other with high precision. By using the highly flat master disk 10 of the present invention, Good adhesion can be achieved.

  As mentioned above, although embodiment of the manufacturing method of the master disk for magnetic transfer concerning this invention was described, this invention is not limited to the said embodiment, Various aspects can be taken.

  For example, in this embodiment, the entire electroforming process is divided into three time zones of an initial electroforming step 50, a main electroforming step 52, and a final electroforming step 54. It is also possible to adopt a method of dividing into two. As described above, it is also preferable to divide into a number of time zones and perform finer control.

  In the present embodiment, the back surface of the master disk 10 is not processed, but an embodiment in which the back surface of the master disk 10 is subjected to machining or the like so as to eliminate the plate thickness deviation can be employed.

  Furthermore, although the master disk 10 of the present embodiment is an annular (doughnut) shape having an inner diameter, it may be a disk shape having no inner diameter.

  Next, examples and comparative examples of the present invention will be described. In addition, this invention is not limited to this Example.

  The master substrate 11 was electroformed using the above-described electroforming apparatus 60 shown in FIG. The capacity of the plating tank 64 of the electroforming apparatus 60 is 30L. The composition of the plating solution (bath) 62 is as follows.

-Nickel sulfamate: 600 g / L
・ Boric acid: 40 g / L
-Surfactant (Nalauryl sulfate): 0.15 g / L
The temperature of the plating solution (bath) 62 was controlled at 55 ° C.

  In the example, the current density during the electroforming of the master substrate 11 was controlled by the pattern shown in FIG. In FIG. 10, the PH value was measured simultaneously with the current density, and plotted similarly.

  On the other hand, in the comparative example, the current density at the time of electroforming was set to the average current density of the entire electroforming process of the pattern shown in FIG. 10 and was not changed.

  In the Example, when the flatness of the master substrate 11 after electroforming was measured, it was 15 μm. In the comparative example, the flatness of the master substrate 11 after electroforming was measured and found to be 242 μm.

  Moreover, in the Example, when the surface roughness of the master substrate 11 after electroforming was measured, it was 0.52 micrometer in Ra. In the comparative example, when the surface roughness of the master substrate 11 after electroforming was measured, it was 1.73 μm in Ra.

  That is, the comparative example was low evaluation compared with the Example.

Partial perspective view of the master disk of the present invention Sectional drawing along the AA line of FIG. Plan view of master board Process drawing in one Embodiment of the manufacturing method of the master disk of this invention Cross section of electroforming equipment Graph showing current density pattern during electroforming Perspective view of main part of magnetic transfer device Plan view showing how to apply magnetic field for transfer Process diagram showing the basic steps of the magnetic transfer method The graph which shows the current density pattern etc. at the time of electroforming in an Example

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Master disk (master disk for magnetic transfer), 11 ... Master substrate, 12 ... Magnetic layer, 14 ... Slave disk, 20 ... Magnetic transfer apparatus, 50 ... Initial electroforming process, 52 ... Main electroforming process, 54 ... Final stage Electroforming process, P ... Uneven pattern

Claims (4)

A master substrate which is a metal disk having a concavo-convex pattern corresponding to transfer information transferred to the surface by an electroforming process from an inverted mold having a reverse concavo-convex pattern, and having a magnetic layer formed on the concavo-convex pattern of the master substrate In the method of manufacturing a transfer master disk,
Dividing the electroforming process into three or more time zones;
An initial electroforming process in which electroforming is performed at a current density of 65% or less of the average current density of the entire electroforming process for a predetermined time from the start;
An electroforming process for a predetermined time after the initial electroforming process, the electroforming process performing electroforming at a current density of 140% or more of the average current density of the entire electroforming process;
A final electroforming process in which electroforming is performed at a current density of 50% or less of the average current density of the entire electroforming process for a predetermined time until the end,
A method of manufacturing a master disk for magnetic transfer, comprising: The method for producing a magnetic transfer master disk according to claim 1, 5~15A / dm ² the average current density of all electroforming process.   The method for producing a master disk for magnetic transfer according to claim 1 or 2, wherein the initial electroforming process is performed for 30 to 75% of the time of the entire electroforming process. The method for producing a master disk for magnetic transfer according to any one of claims 1 to 3, wherein the final electroforming process is performed for 5 to 10% of the time of the entire electroforming process.

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