JP2006275469A - Heat source installation for treating sensible heat in clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat source installation for treating sensible heat in a clean room, having highly efficient energy saving operation while reducing the power consumption of a refrigerating machine by effectively utilizing natural cooling. <P>SOLUTION: Headers on the upstream and downstream sides of a plurality of cooling towers are separated from each other and joined via valves, pipes between the header and the refrigerating machine are also joined to each other via valves, and an automatic control circuit is used for changing the opening/closing position and opening of each valve with an outside air temperature sensor. This actualizes highly efficient energy saving operation while reducing the power consumption of the refrigerating machine. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a heat source facility for sensible heat treatment in a clean room.

  In a clean room that manufactures and inspects semiconductors and precision equipment, the temperature in the clean room is strictly controlled to maintain high accuracy. In a clean room, the temperature inside the room increases due to heat generated by the manufacturing apparatus and other equipment. Therefore, the indoor dry coil (sensible heat treatment coil) is cooled throughout the year to keep the room constant. FIG. 5 is a block diagram of a conventional dry coil cooling apparatus.

  The sensible heat treatment heat source facility 50 includes a dry coil 9, a cooling tower 51, a refrigerator 52, a cold water tank 53, and a heat exchanger 54.

  The refrigerator 52 produces low-temperature cold water using naturally-cooled cooling water supplied from the cooling tower 51 by the pump 55. The cold water is supplied to the cold water tank 53 by the pump 56 and then supplied to the heat exchanger 54 by the pump 57. In the heat exchanger 54, the cooling water circulated by the pump 58 between the dry coil 9 and the heat exchanger 54 is cooled by the supplied cold water.

  For example, the refrigerator 52 uses the 32 degree cooling water cooled by the cooling tower 51 to produce about 7 degree cold water and supplies it to the cold water tank 53. The heat exchanger 54 cools the cooling water of about 20 degrees returned from the dry coil 9 to about 15 degrees with the supplied cold water of about 7 degrees. Such sensible heat treatment is performed throughout the year.

  And, the heat source equipment 50 for sensible heat treatment in the clean room having such a configuration is required to operate the refrigerator 52 having the largest power consumption among the constituent devices throughout the year in order to produce low temperature (7 degrees) cold water. was there. Further, since the cold water tank 53 is used, the piping system for supplying cold water is an open system, the number of pumps is increased, and the conveying power of the cold water is also increased.

In order to solve such problems, recently, attempts have been made to save energy. For example, heat exchange using heat pipes with the outside air and heat exchange using heat pipes with cold water produced by a refrigerator are performed. There has been proposed a sensible heat removal mechanism that reduces power consumption by using it according to the above conditions (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 11-325507

  However, in the sensible heat removal mechanism described in Patent Document 1, when the outside air temperature is higher than the required temperature in the clean room in summer or intermediate period, heat exchange with the outside air cannot be performed, so the refrigerator is fully operated. It is necessary to let In addition, it is difficult to adjust the operating condition of the refrigerator according to the outside air conditions.

  The present invention has been made in view of such problems, and reduces the power consumption of the refrigerator by effectively utilizing natural cooling, and provides an efficient heat source facility for sensible heat treatment in a clean room that is energy-saving. The purpose is to do.

  In order to achieve the above object, claim 1 of the present invention comprises a first cooling tower provided with headers on the upstream side and the downstream side, a refrigerator, the first cooling tower, and the refrigerator. A first valve to be connected, a cooling water system pipe connecting the refrigerator and an upstream header of the first cooling tower, a second cooling tower provided with headers on the upstream side and the downstream side, and A second valve that connects the second cooling tower and the refrigerator, and the refrigerator and a dry coil provided in a clean room are connected, and an upstream header of the dry coil and the second cooling tower. A chilled water pipe connecting the first cooling tower, a third valve connecting the upstream header of the first cooling tower and the upstream header of the second cooling tower, and the first cooling tower Connecting a header downstream of the second cooling tower and a header downstream of the second cooling tower. , A bypass pipe having one end connected to the pipe between the second valve and the refrigerator, and the other end connected to the cold water system pipe, and a fifth valve provided in the bypass pipe And an outside air temperature measuring sensor for measuring the outside air temperature of the clean room, and a control device for controlling the opening / closing amounts of the first to fifth valves based on the outside air temperature detected by the outside air temperature measuring sensor. It is characterized by.

  According to claim 1, in the heat source equipment for the sensible heat treatment in the clean room, the cooling water of the refrigerator is cooled by the cooling water system pipe that circulates the first cooling tower and the refrigerator through the pump, and the refrigerator. A cold water system pipe is provided through which the chilled water circulates through the second cooling tower, the refrigerator, and the dry coil via a pump.

  The first cooling tower and the second cooling tower are provided with headers on the upstream side and the downstream side, respectively, and the cooling water system pipe and the chilled water system pipe have an upstream header and a downstream header through valves. Connected to each other. Thereby, the cooling water cooled by each cooling tower is shared by opening and closing of the valve. The temperature of the cooling water supplied from each cooling tower and the temperature of the cooling water supplied to the dry coil are measured by a temperature sensor.

  Conventionally, cold water at a low temperature (7 degrees) was manufactured with a refrigerator throughout the year to cool the cooling water of the dry coil. However, since the heat source equipment for sensible heat treatment in the clean room according to the present invention is constituted by closed piping and devices, the refrigerator only has to produce relatively high-temperature cooling water of about 15 degrees.

  Also, when the outside air temperature is low and the cooling water temperature can be lowered to about 15 degrees by the cooling tower, the refrigerator is stopped and the cooling water cooled by natural cooling by the cooling tower is transferred to the dry coil. Supply. At this time, if the valve connecting the header is opened, all the cooling water cooled by the cooling tower can be supplied to the chilled water system pipe, and the cooling efficiency of the dry coil is increased.

  As a result, it is possible to reduce the power consumption of the refrigerator and provide an efficient heat source facility for sensible heat treatment in a clean room that is energy-saving.

  According to a second aspect of the present invention, in the first aspect, a first temperature sensor is provided between the refrigerator and the dry coil, and the control device is based on a temperature detected by the first temperature sensor. The refrigerator is controlled on and off.

  According to the second aspect, when the temperature of the cooling water supplied from the refrigerator to the dry coil is sufficiently low for cooling by the dry coil, the refrigerator is stopped. Thereby, it is possible to provide an efficient heat source facility for sensible heat treatment in a clean room that is energy-saving.

  According to a third aspect of the present invention, in the first or second aspect, a second temperature sensor is provided between the first cooling tower and the first valve, and the second cooling tower A third temperature sensor is provided between the second valve, and the control device controls an operating state of the first cooling tower based on a temperature detected by the second temperature sensor, and The operation state of the second cooling tower is controlled based on the temperature detected by the third temperature sensor.

  According to claim 3, when sufficiently low-temperature cooling water can be obtained without fully operating the cooling tower, such as in the winter and intermediate periods, the power consumption of the cooling tower is reduced to suppress unnecessary power consumption. Thereby, it is possible to provide an efficient heat source facility for sensible heat treatment in a clean room that is energy-saving.

  As described above, according to the heat source equipment for sensible heat treatment in the clean room of the present invention, the power consumption of the refrigerator is reduced by effectively using natural cooling, so energy efficient and sensible heat treatment in the clean room is achieved. A heat source facility can be provided.

  Hereinafter, a heat source facility for sensible heat treatment in a clean room according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a configuration diagram showing a heat source facility for sensible heat treatment in a clean room according to the present invention.

  A sensible heat treatment heat source facility (hereinafter referred to as a heat source facility) 1 according to the present invention includes a first cooling tower 2 and a second cooling tower 3, which are hermetic cooling towers, and a refrigerator 4.

  The first cooling tower 2 of the hermetic cooling tower is provided with a header 23 on the upstream side and a header 25 on the downstream side, and is driven by a motor 21. The first cooling tower 2 and the cooling passage 4 a for cooling the refrigerator 4 are connected via a first valve 5. The cooling passage 4a is further connected to the header 23, and a cooling water system pipe 6 is formed.

  A second temperature sensor 19 is provided between the first cooling tower 2 and the first valve 5 to detect the temperature of the cooling water supplied from the first cooling tower 2.

  The second cooling tower 3 of the hermetic cooling tower is provided with a header 24 on the upstream side and a header 26 on the downstream side, and is driven by a motor 22. The second cooling tower 3 and the cooling passage 4 b in which the cooling by the refrigerator 4 is performed are connected via a second valve 7. Further, the cooling passage 4b and the dry coil 9 in the clean room 8 are connected, and the dry coil 9 is connected from the dry coil 9 to the header 24 to constitute the cold water system pipe 10.

  A third temperature sensor 20 is provided between the second cooling tower 3 and the second valve 7 to detect the temperature of the cooling water supplied from the second cooling tower 3. A first temperature sensor 18 is provided between the refrigerator 4 and the dry coil 9 to detect the temperature of the cooling water supplied from the refrigerator 4.

  The cooling water piping 6 and the cooling water piping 10 are connected to each other through a third valve 11 with a header 23 and a header 24. Further, the cooling water system pipe 6 and the cooling water system pipe 10 are connected to each other by a fourth valve 12 at a header 25 and a header 26.

  The cold water system pipe 10 is provided with a bypass pipe 28 having one end connected to the pipe between the second valve 7 and the refrigerator 4 and the other end connected to a pipe connecting the dry coil 9 and the header 24. It has been. The bypass pipe 28 is provided with a fifth valve 13.

  Pumps 14 and 15 are respectively disposed at the inlets of the refrigerator 4 in the cooling water system pipe 6 and the cold water system pipe 10, and water is supplied to the cooling water system pipe 6 and the cold water system pipe 10.

  An outside air temperature measurement sensor 16 is provided outside the heat source facility 1 to detect the outside air temperature. The detection results of the first temperature sensor 18, the second temperature sensor 19, the third temperature sensor 20, and the outside air temperature measurement sensor 16 are input to the control device 17. The control device 17 controls each device in the heat source facility 1 through the inverter 27 based on the input detection value.

  Next, the operation of the heat source facility for sensible heat treatment in the clean room according to the embodiment of the present invention will be described. 2 is a block diagram showing a summer operation state of the heat source facility 1, FIG. 3 is a block diagram showing a winter operation state of the heat source facility 1, and FIG. 4 is a diagram between the summer operation and the winter operation of the heat source facility 1. It is the block diagram which showed the intermediate | middle driving | operation.

  First, the summer driving state will be described. When the temperature detected by the outside air temperature measurement sensor 16 exceeds a set temperature (for example, 32 ° C.) set in the control device 17, the summer operation is started. In the summer operation state, the first valve 5, the third valve 11, the fourth valve 12, and the fifth valve 13 are opened, and the second valve 7 is closed.

  When the third valve 11 and the fourth valve 12 are opened and the second valve 7 is closed, the second cooling tower 3 is connected to the cooling water system pipe 6, and the first cooling tower 2 and the second cooling tower 2 are connected. The cooling water cooled by the cooling tower 3 is sent to the cooling passage 4 a for cooling the refrigerator 4 through the pump 14.

  When the fifth valve 13 is opened and the second valve 7 is closed, the cooling water flowing through the chilled water piping 10 is circulated between the dry coil 9 and the refrigerator 4 via the pump 15. . The cooling water flowing through the cold water system pipe 10 is cooled to a set temperature (for example, 15 ° C.) set in the control device 17 in the cooling passage 4 b of the refrigerator 4.

  When the temperature of the cooling water flowing from the cooling passage 4b to the dry coil 9 is detected by the first temperature sensor 18 and is lower than the set temperature set in the control device 17, the operation of the refrigerator 4 is stopped and the set temperature is set. If it exceeds, the operation of the refrigerator 4 is resumed.

  Next, the winter driving state will be described. When the temperature detected by the outside air temperature measurement sensor 16 is lower than the set temperature (for example, 0 ° C.) set in the control device 17, the winter operation state is started. In the winter operation state, the second valve 7, the third valve 11, and the fourth valve 12 are opened, and the first valve 5 is closed. The opening degree of the fifth valve 13 is adjusted according to the situation, and the refrigerator 4 and the pump 14 are stopped.

  When the third valve 11 and the fourth valve 12 are opened and the first valve 5 is closed, the first cooling tower 2 is connected to the chilled water system pipe 10. The cooling water cooled by the first cooling tower 2 and the second cooling tower 3 is sent to the dry coil 9 by the pump 15 without being cooled by the cooling passage 4b.

  The temperature of the cooling water supplied from the first cooling tower 2 detected by the second temperature sensor 19 and the temperature of the cooling water supplied from the second cooling tower 3 detected by the third temperature sensor 20. Is lower than a set temperature (for example, 15 ° C.) set in the control device 17, the driving of the motor 21 or the motor 22 is suppressed and the first cooling tower is prevented so that the cooling water is not cooled excessively. 2 and the operation status of the second cooling tower 3 are controlled.

  Further, when the temperature detected by the first temperature sensor 18 is low, the opening degree of the fifth valve 13 is adjusted, and the cooling water whose temperature is returned from the dry coil 9 is changed to the first cooling tower 2, And it mixes with the cooling water from the 2nd cooling tower 3, and adjusts temperature.

  Next, the intermediate operation state will be described. When the outside air temperature detected by the outside air temperature measuring sensor 16 is lower than the set temperature (for example, 32 ° C.) in the summer operation state and higher than the set temperature (for example, 0 ° C.) in the winter operation state, the intermediate operation is performed. .

  In the intermediate operation state, the second valve 7 is opened, the first valve 5, the third valve 11, the fourth valve 12, and the fifth valve 13 are closed, and the pump 14 is driven. And will change depending on the situation.

  When the control device 17 determines that the temperature detected by the outside air temperature measurement sensor 16 is close to summer and the cooling water cannot be cooled to a set temperature (for example, 15 ° C.) by only natural cooling, the first device The valve 5 is opened, the pump 14 is driven, and the refrigerator 4 is operated. At this time, the temperature of the cooling water circulating through the cold water system pipe 10 is lower than the summer operation state because the outside air temperature is lower than the summer season, and the operating power of the refrigerator 4 is smaller than the summer operation state.

  When the temperature of the cooling water flowing to the dry coil 9 is detected by the first temperature sensor 18 and is lower than the set temperature set in the control device 17, the operation of the refrigerator 4 is stopped and only natural cooling by the cooling tower is performed. And At this time, the 3rd valve 11 and the 4th valve 12 are opened, and the 1st cooling tower 2 is connected to cold water system piping 10, and raises the efficiency of natural cooling.

  When the controller 17 determines that the temperature detected by the outside air temperature measurement sensor 16 is close to winter and cooling water can be cooled to a set temperature (for example, 15 ° C.) only by natural cooling. The first valve 5 is closed, the pump 14 is stopped, and the refrigerator 4 is stopped. Along with this, the third valve 11 and the fourth valve 12 are opened, and the first cooling tower 2 is connected to the chilled water piping 10 to increase the efficiency of natural cooling.

  When the temperature of the cooling water flowing to the dry coil 9 detected by the first temperature sensor 18 is lower than the set temperature set in the control device 17, the opening degree of the fifth valve 13 is adjusted and the dry coil is adjusted. The cooling water whose temperature has returned from 9 is mixed with the cooling water from the first cooling tower 2 and the second cooling tower 3 to adjust the temperature.

  As described above, the heat source equipment for sensible heat treatment in the clean room according to the present invention is constituted by a closed system pipe and apparatus, and the refrigerator only has to produce relatively high-temperature cooling water of about 15 degrees. Further, cooling by natural cooling and cooling by a refrigerator can be used separately or combined according to the situation in the summer, winter and intermediate periods.

  Thus, it is possible to reduce the power consumption of the refrigerator and provide an efficient heat source facility for sensible heat treatment in a clean room that is energy-saving.

  In the present embodiment, two cooling towers, the first cooling tower 2 and the second cooling tower 3, are used, but the number of cooling towers may be increased to two or more.

  Moreover, although control of each device in the heat source facility 1 is performed by the control device 17, a configuration may be adopted in which each device is provided with a control device and controlled by local control in each device, or operated by manual operation. .

  Furthermore, in the present embodiment, it is possible to control to switch in consideration of the start-up time of the refrigerator at the boundary of each period operation, such as from the summer operation condition to the intermediate period operation condition, using the outside air weather prediction. preferable.

The block diagram which showed the heat source equipment for sensible heat processing in the clean room which concerns on this invention. The block diagram which showed the summer driving | running state. The block diagram which showed the winter driving | running state. The block diagram which showed the intermediate | middle period driving | operation between a summer driving | operation and a winter driving | operation. The block diagram which showed the heat source equipment for the sensible heat processing in the conventional clean room.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 50 ... Heat source equipment for sensible heat treatment (heat source equipment), 2 ... 1st cooling tower, 3 ... 2nd cooling tower, 4 ... Refrigerator, 5 ... 1st valve, 6 ... Cooling water system piping, 7 ... 2nd valve, 8 ... Clean room, 9 ... Dry coil, 10 ... Cold water piping, 11 ... 3rd valve, 12 ... 4th valve, 13 ... 5th valve, 14, 15 ... Pump, 16 ... Outside air Temperature / humidity sensor for measurement, 17 ... control device, 18, 19, 20 ... temperature sensor, 21, 22 ... motor

Claims (3)

A first cooling tower provided with headers on the upstream side and the downstream side;
A refrigerator,
A first valve connecting the first cooling tower and the refrigerator;
A cooling water system pipe connecting the refrigerator and the upstream header of the first cooling tower;
A second cooling tower provided with headers on the upstream side and the downstream side;
A second valve connecting the second cooling tower and the refrigerator;
A chilled water system pipe connecting the refrigerator and a dry coil provided in a clean room, and connecting the dry coil and an upstream header of the second cooling tower,
A third valve connecting the upstream header of the first cooling tower and the upstream header of the second cooling tower;
A fourth valve connecting a header on the downstream side of the first cooling tower and a header on the downstream side of the second cooling tower;
A bypass pipe having one end connected to the pipe between the second valve and the refrigerator and the other end connected to the cold water system pipe;
A fifth valve provided in the bypass pipe;
An outside temperature sensor that measures the outside temperature of the clean room,
A control device for controlling the opening / closing amounts of the first to fifth valves based on the outside air temperature detected by the outside air temperature measuring sensor;
A heat source facility for sensible heat treatment in a clean room. A first temperature sensor is provided between the refrigerator and the dry coil,
2. The heat source equipment for sensible heat treatment in a clean room according to claim 1, wherein the control device performs on / off control of the refrigerator based on a temperature detected by the first temperature sensor. A second temperature sensor is provided between the first cooling tower and the first valve,
A third temperature sensor is provided between the second cooling tower and the second valve,
The control device controls an operation state of the first cooling tower based on a temperature detected by the second temperature sensor, and an operation state of the second cooling tower based on a temperature detected by the third temperature sensor. The heat source equipment for sensible heat treatment in a clean room according to claim 1 or 2, wherein

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