JP2006272466A - Polishing pad and polishing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing pad that has the improved workability in sticking it to an elastic base material, can not be easily peeled off from the elastic base material, can suppress occurrence of polishing defects, and can execute polishing with high yield, and to provide a polishing method. <P>SOLUTION: The polishing pad 1 is composed such that a cut 1c composed of a row of a large number of holes penetrating the polishing pad 1 is formed from the central part of the polishing pad 1 over the outer peripheral part in a shape that a large number of polygonal contours are arranged side by side. An elastic polisher 3, in which the polishing pad 1 is stuck on the surface of a dome-like elastic base material 2, is mounted to a polishing device. Tension is given to the elastic polisher 3 by applying pressure of 0.1-2.0 kgf/cm<SP>2</SP>to a sealed space formed between the elastic polisher 3 and the polishing device. Consequently, the polishing pad 1 is broken along the cut 1c and separated into many pads, and also, a groove functioning as a water passing groove is formed. The polishing is executed by pressing the elastic polisher 3 against a face of an object to be polished. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a polishing pad and a polishing method, and more particularly to a polishing pad and a polishing method suitable for smoothing or mirroring a curved surface of a lens or the like.

  Conventionally, a concave surface such as a spectacle lens is formed by cutting or the like to form a so-called free curved surface such as a spherical surface, an axially symmetric aspherical surface, an aspherical astigmatic surface, a progressive surface, or a curved surface in which a toric surface and a progressive surface are combined, The mirror surface is finally polished to become an optical surface. For mirror polishing of a simple curved surface such as a spherical surface or a toric surface, rubbing polishing using a rigid polishing dish is used. Since the mirror polishing method using a polishing dish is a method of transferring the surface shape of a polishing dish to a surface to be polished, a free curved surface cannot be polished. Therefore, a method using an elastic polishing tool is generally performed for polishing a free-form surface.

Balloon-type polishing and partial polishing are known as methods using an elastic polishing tool.
In balloon-type polishing, pressure gas is sent to the inside of a balloon-type elastic polishing tool, the balloon-type elastic polishing tool is inflated with internal pressure, and the internal pressure is changed to set a curvature that matches the curved shape of the surface to be polished. In this method, the entire polishing surface is polished by scanning while contacting a rotating balloon-type elastic polishing tool. In addition, partial polishing uses a small dome-shaped elastic polishing tool that is smaller than the average radius of curvature calculated from the shape of the surface to be polished and abuts a part of the surface to be polished, and rotates the elastic polishing tool while rotating it. This is a method of polishing by contacting the surface and scanning the entire surface to be polished.

In any of the polishing methods, an elastic polishing tool can polish a free curved surface by rubbing while deforming following the shape of the concave surface of the lens.
In the elastic polishing tool, a polishing pad is attached to the surface of the elastic base material to constitute an elastic polisher, and polishing is performed by contacting the elastic polisher while supplying a polishing liquid to the surface to be polished.

  In such a polishing method using an elastic polishing tool, a polishing pad bonded to an elastic substrate is difficult to peel off during polishing processing, and a water passage groove having a width of 0.1 to 5 mm is formed so as not to cause poor polishing. A polishing method and an elastic polisher have been proposed in which a polishing pad provided is pressed against a surface to be polished of a polishing object to be polished by pressing the polisher that covers the surface of the elastic substrate (for example, polishing) , See Patent Document 1).

JP 2002-263998 A

However, the polishing pad shown in Patent Document 1 is provided with another polishing pad in the petal-shaped notch portion having a wide notch portion in order to narrow the width of the water passage groove (0.1 to 5 mm width). A water flow groove is formed by adhering to an elastic base material, or by adhering a plurality of polygonal polishing pads one by one with their sides close to each other. The operation of attaching such a plurality of polygonal polishing pads one by one to the elastic base material is complicated and requires skill in the bonding operation. Moreover, since a long work time is required for the pasting work, there are problems such as an increase in work cost.
Therefore, the present invention has been made in view of such circumstances, and the workability to be attached to the elastic base material is improved, and it is difficult to peel off from the elastic base material. An object is to provide a polishing pad and a polishing method that can be performed.

  In order to solve the above problems, the polishing pad of the present invention is the dome-shaped elastic polisher that introduces a pressure fluid into the inside of a dome-shaped elastic base material and abuts against the surface to be polished of the object to be polished. In the polishing pad attached to the surface of the elastic base material, the polishing pad has a pad base material, and the pad base material is attached to the surface of the elastic base material on one side of the pad base material. The double-sided tape to be adhered is provided with a cut formed by a row of a plurality of holes penetrating the polishing pad.

  According to this, it is provided with a cut consisting of a row of a large number of holes penetrating the polishing pad, and is adhered to the surface of the dome-shaped elastic substrate via the adhesive layer, so that the dome-shaped elastic substrate When pressure fluid is introduced to the inside, the single polishing pad expands and contracts following the deformation caused by the expansion and contraction of the elastic base material, and stretches along the cut line made up of a number of holes penetrating the polishing pad. It is torn and forms a groove. The formed groove can function as a water flow groove when polishing. Therefore, a polishing pad in which a water flow groove is formed can be obtained by an easy sticking operation of sticking a single polishing pad without sticking a large number of polishing pads one by one on the elastic substrate.

  Further, the polishing pad of the present invention introduces a pressure fluid into the inside of the dome-shaped elastic substrate, and contacts the surface to be polished of the object to be polished to polish the surface of the dome-shaped elastic substrate. In the polishing pad to be adhered, the polishing pad has a pad base material, and a double-sided tape for adhering the pad base material to the elastic base material surface is adhered to one surface of the pad base material. In addition, it is characterized in that it is provided with a cut consisting of a row of a plurality of holes formed so as to penetrate the pad base material and not penetrate the double-sided tape.

  According to this, the polishing pad consists of a single sheet, and a large number of holes that have a constant thickness such that the polishing pad extends through the pad base material on the polishing pad and extends without penetrating the double-sided tape. When a pressure fluid is introduced into the inside of the dome-shaped elastic base material by providing a cut consisting of a row of holes and being attached to the surface of the dome-shaped elastic base material via an adhesive layer, The existing polishing pad expands and contracts following the deformation caused by the expansion and contraction of the elastic base material, and is torn along a notch formed by a row of many holes leaving a certain thickness of the double-sided tape, thereby forming a groove. The formed groove can function as a water flow groove when polishing. Therefore, a polishing pad in which a water flow groove is formed can be obtained by an easy sticking operation of sticking a single polishing pad without sticking a large number of polishing pads one by one on the elastic substrate.

Moreover, the polishing pad of the present invention has a pad base material, and a double-sided tape for adhering the pad base material to the elastic base material surface is adhered to either one of the pad base materials, and The shape of the cut formed through the pad base material and without penetrating the double-sided tape is a continuous groove shape.
According to this, since the cut is formed in a groove shape in advance by sticking a polishing pad provided with a continuous groove-shaped cut to the surface of the dome-shaped elastic substrate via the adhesive layer, the groove The water flow groove can be easily obtained without applying much external force when forming the.

Moreover, the polishing pad of the present invention is characterized in that the cut is formed in a shape in which a large number of polygonal outlines are arranged in parallel from the center to the outer periphery of the polishing pad.
According to this, the polishing pad consists of one piece, and the cut formed on the polishing pad is formed from the center part of the polishing pad to the outer peripheral part in a shape in which a large number of polygonal contours are arranged in parallel, When the pressure fluid is introduced into the inside of the dome-shaped elastic base material by being attached to the surface of the dome-shaped elastic base material through the adhesive layer, the single polishing pad becomes the elastic base material. Stretches along the cuts, splits into a number of polygonal pads, and forms a groove in which the cut slits communicate with the outer periphery of the polishing pad. Thus, a polishing pad can be obtained in which the supply of slurry and polishing waste are efficiently discharged, and the occurrence of defective polishing is suppressed.

Further, the polishing method of the present invention comprises a single polishing pad, and a cut formed by a row of a plurality of holes penetrating the polishing pad or a continuous cut leaving a constant thickness of the double-sided tape has a large number of polygons. The polishing pad formed from the center part of the polishing pad to the outer periphery in the shape in which the contours are arranged side by side is attached to the polishing apparatus with an elastic polisher attached to the surface of the dome-shaped elastic base material, A pressure of 0.1 to 2.0 kgf / cm ² is applied to the sealed space formed between the elastic polisher and the polishing apparatus to apply tension to the elastic polisher, and the elastic polisher is applied to the object to be polished. It is characterized by being pressed against the polishing surface for polishing.

According to this polishing method, a slit formed of a single sheet and formed of a plurality of holes penetrating the upper and lower surfaces of the polishing pad, or a continuous cut leaving a constant thickness of the double-sided tape is formed of a number of polygons. The polishing pad formed from the center part of the polishing pad to the outer peripheral part in a shape in which the contours are arranged in parallel, and an elastic polisher bonded to the surface of an elastic base material having elasticity via an adhesive layer, and polishing By applying a pressure of 0.1 to 2.0 kgf / cm ² to the sealed space formed with the apparatus, one polishing pad tears along the cut and is separated into a number of pads. Each separated pad expands and contracts following the deformation caused by expansion and contraction of the elastic base material, and is difficult to peel off from the elastic base material. Therefore, it is possible to suppress the occurrence of polishing failure due to the peeling of the polishing pad and perform polishing with good yield.

  In the case of using partial polishing using a small dome-shaped elastic polishing tool that contacts a part of the surface to be polished of the spectacle lens, the cut of the polishing pad penetrates the pad base material and the double-sided tape Using a polishing pad that is a continuous cut in the form of a groove that extends without penetrating the same effect can be obtained without applying pressure to the sealed space formed between the elastic polisher and the polishing apparatus. can get.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. This embodiment will be described using a balloon-type elastic polishing tool that polishes the entire surface to be polished.
FIG. 1A is a top view of an elastic polisher to which the polishing pad of the present invention is attached, and FIG. 1B is a cross-sectional view of the elastic polisher to which the polishing pad is attached. 2A and 2B are partially enlarged views of a cut line formed on the polishing pad, where FIG. 2A is a top view and FIG. 2B is a cross-sectional view.

In FIG. 1, a polishing pad 1 is composed of a pad base 1a and a double-sided tape 1b, and is attached to an elastic base 2 via a double-sided tape 1b to form an elastic polisher 3.
In the polishing pad 1, for example, a double-sided tape 1b in which a strong adhesive is applied to both sides of a polyester tape base material is attached to one surface of a pad base material 1a made of nonwoven fabric.

  In addition, the polishing pad 1 includes an elongated rectangular hole 1d penetrating the polishing pad 1 (pad base material 1a and double-sided tape 1b), as shown in a partially enlarged view of a cut formed on the polishing pad in FIG. A cut line-shaped cut 1c composed of a bridge-shaped connecting portion 1e is formed from the center portion of the polishing pad 1 to the outer peripheral portion in a shape in which a number of regular hexagons are arranged in a honeycomb shape (see FIG. 1A). Has been.

  In addition, as a region where the polishing pad 1 is provided on the surface of the elastic base material 2, an area covering at least a range A (indicated by a two-dot chain line) in which the polishing object slides and moves when the polishing object is polished. Is set. Further, the width α of the elongated rectangular hole 1d that forms the cut 1c needs to have a width that functions as a water supply groove for supplying slurry in which abrasive grains are dispersed in the processing liquid and discharging polishing debris during polishing. And is set to about 0.1 to 5 mm, preferably about 0.2 to 3 mm.

  Moreover, as a raw material of the pad base material 1a, the sheet | seat comprised by porous materials, such as felt and a polyurethane other than a nonwoven fabric, the thing by which the short fiber was planted in the sheet | seat of a synthetic resin, etc. can be used. Furthermore, it has the polishing pad which has the structure by which the primer layer (binder layer) and the weak adhesive layer were laminated | stacked on the surface of the nonwoven fabric generally marketed, or only a primer layer, or only a weak adhesive layer You may use the polishing pad which consists of a nonwoven fabric.

  The elastic base material 2 is made of a sheet having elasticity, and is a shape in which a dome-shaped portion 2a formed in a dome shape and a ring-shaped flange portion 2b protruding in the outer peripheral direction at the periphery of the dome-shaped portion 2a are integrally formed. Have

  The shape of the dome surface of the dome-shaped portion 2a is formed to be a curved surface substantially along the shape of the surface to be polished (concave surface) of the lens to be polished. It is desirable that the diameter of the dome-shaped portion 2a is 1.1 to 10 times, preferably 1.5 to 5 times the diameter of the lens to be polished. Further, the surface area of the dome-shaped portion 2a is set to be larger than the area of the polished surface of the lens to be polished.

  As a result, it is possible to polish the dome-shaped portion 2a in contact with almost the entire surface to be polished. Further, by setting the area of the dome-shaped portion 2a to be larger than the area of the polished surface of the lens to be polished, the peripheral speed of rotation of the elastic base material 2 is increased to improve the polishing speed, and the elastic base The shape following property of the material 2 can be improved.

The elastic sheet is made of natural rubber, nitrile rubber, chloroprene rubber, styrene-butadiene rubber (SBR), acrylonitrile-butadiene rubber (NBR), rubber such as silicon rubber or fluoro rubber, or thermoplastic resin such as polyethylene or nylon. And thermoplastic resin elastomers such as styrene and urethane. The thickness of the elastic sheet is preferably 0.1 to 10 mm, particularly preferably 0.2 to 5 mm, JIS-A hardness (type A durometer) 10 to 100, Young's modulus 10 ² to 10 ³ Ncm ^−2. What has the physical-property value of is preferable.

The elastic polisher 3 configured as described above is fixed to a mounting jig of a polishing apparatus and used as an elastic polishing tool.
FIG. 3 is a schematic cross-sectional view of a polishing portion of a polishing apparatus showing an embodiment in which a concave surface of a lens is balloon-shaped polished. With reference to FIG. 3, the structure of the mounting jig and the method of mounting the elastic polisher on the mounting jig Will be explained.

  The mounting jig 4 holds the elastic polisher 3, forms a sealed space 21 on the inner surface side of the elastic polisher 3 (dome-shaped portion 2 a), and functions as a flow path for introducing pressure fluid into the sealed space 21. The attachment jig 4 includes an attachment jig main body 41 and a ring-shaped pressing member 42.

The mounting jig body 41 has a cylindrical shape of the cylindrical portion 411 and an outer peripheral portion of an upper end projecting in a direction orthogonal to the central axis of the cylindrical portion 411 so that the central axis of the cylindrical portion 411 is coaxial. And an elastic polisher mounting portion 412. A tapered mounting portion 413 is provided at the lower end portion of the cylindrical portion 411 so as to protrude outward. A mounting portion 413 is mounted and fixed on a turntable (not shown) of the polishing apparatus.
The pressing member 42 is a ring-shaped member having a flat bottom surface and substantially the same outer periphery as the outer periphery of the elastic polisher mounting portion 412.

  The elastic polisher 3 is fixed to the mounting jig 4 configured as described above. In the fixing method, the flange portion 2b of the elastic polisher 3 is placed on the elastic polisher mounting portion 412, and the pressing member 42 is placed on the placed flange portion 2b. Then, using a bolt or the like (not shown), the flange portion 2b is sandwiched and fixed between the elastic polisher mounting portion 412 and the pressing member 42. As a result, a dome-shaped sealed space 21 is formed between the inner surface of the dome-shaped portion 2 a of the elastic polisher 3 and the upper surface of the elastic polisher mounting portion 412. The sealed space 21 communicates with the outside through the internal space of the cylindrical portion 411. A predetermined pressure, which will be described later, is introduced into the sealed space 21 through the internal space of the cylindrical portion 411.

Next, a polishing method for polishing an object to be polished using an elastic polishing tool in which the elastic polisher 3 is fixed to the mounting jig 4 will be described. The polishing method will be described as an example in which the concave surface of the spectacle lens is polished as an object to be polished.
FIG. 3 is a schematic cross-sectional view of a polishing portion of a polishing apparatus showing an embodiment in which a concave surface of an eyeglass lens is balloon-shaped polished. FIG. 4 is a partially enlarged view of a polishing pad that is torn along a cut line. Is a top view, and (b) is a cross-sectional view.

In FIG. 3, the spectacle lens 5 as an object to be polished is positioned and fixed to the attachment jig 7 via a block portion 6 made of a low melting point metal on the other convex surface side of the concave surface of the surface to be polished. The spectacle lens 5 positioned and fixed to the mounting jig 7 is attached to a chuck (not shown) of the polishing apparatus.
The chuck rotates (rotates) around the central axis of the chuck and performs a swinging motion that reciprocates between the vicinity of the apex of the dome-shaped portion 2a of the elastic polisher 3 and the end side. The chuck moves in the direction of the mounting jig 4 by applying, for example, air pressure, and an elastic polisher 3 (elastic base material 2) in which the polished surface of the spectacle lens 5 is fixed to the mounting jig 4 with a predetermined pressure. It has a mechanism to press against.

  At the time of polishing, a predetermined pressure is compressed in the dome-shaped sealed space 21 formed between the mounting jig 4 and the elastic polisher 3 fixed to the mounting jig 4 via the internal gap of the cylindrical portion 411. Bring in air. When the compressed air is sent and the sealed space 21 reaches a predetermined pressure, the dome-shaped portion 2a of the elastic polisher 3 (elastic base material 2) is stretched, and the polishing pad 1 attached to the elastic base material 2 is The elastic base material 2 (dome-shaped part 2a) extends.

Due to this elongation, as shown in the partial enlarged view of the polishing pad that has been torn along the cut line in FIG. 4, the bridge-like connecting portion 1 e of the cut line 1 c formed on the polishing pad 1 is formed on the elastic base material 2 by pressure. Without being able to withstand the elongation, it tears along the cut 1c. As a result, the polishing pad 1 is divided along the cuts 1c in which a large number of regular hexagons are formed in a honeycomb shape, and is separated into a large number of regular hexagonal pads. In addition, the predetermined pressure of the compressed air sent into the dome-shaped sealed space 21 is about 0.1 to ² kgf / cm ² .

  Spacing portions of a large number of regular hexagonal pads separated along the cut 1c form grooves 1f communicating with each other and function as water passage grooves when polishing. The width of the groove 1f that functions as a water flow groove is about the width α of the elongated rectangular hole 1d that forms the cut 1c. The ease of tearing due to the elongation of the cut 1c can be adjusted by selecting the length of the bridge-like connecting portion 1e forming the cut 1c (the interval between the rectangular holes 1d).

Then, after separating the polishing pad 1 into a number of regular hexagonal pads, the central axis of the cylindrical portion 411 of the mounting jig 4 is adjusted while maintaining the pressure in the sealed space 21 and tensioning the dome-shaped portion 2a. It is rotated at a predetermined rotation speed as a rotation axis.
And the chuck | zipper of a grinding | polishing apparatus is rotationally driven, and the spectacle lens 5 positioned and fixed to the attachment jig 7 is rotated (autorotated) at a predetermined rotational speed. Then, the chuck of the polishing apparatus is pressed against the elastic polisher 3 (polishing pad 1) of an elastic polishing tool that rotates at a predetermined polishing pressure, and the object to be polished is given a swinging motion to polish the concave surface of the spectacle lens 5. Is called. At the time of polishing, a slurry 9 in which abrasive grains are dispersed in a processing liquid is supplied from the nozzle 8 to the surface of the elastic polisher 3 (polishing pad 1).

  When polishing the concave surface of the spectacle lens 5, the groove 1 f having a width of 0.1 to 5 mm separated along the cut 1 c is a water passage groove for discharging the slurry 9 and polishing waste supplied from the nozzle 8. Function.

According to the polishing pad and the polishing method of the present embodiment described above, the pressure is applied to the elastic substrate 2 by applying a pressure of 0.1 to 2.0 kgf / cm ² to the elastic polisher 3 (sealed space 21). The polished polishing pad 1 is separated into a number of pads. Each separated pad expands and contracts following the deformation caused by the expansion and contraction of the elastic base material 2, and becomes more difficult to peel from the elastic base material 2. Therefore, generation | occurrence | production of the polishing defect by peeling of the polishing pad 1 can be suppressed, and it can grind | polish with a sufficient yield.

Further, by applying a pressure of 0.1 to 2.0 kgf / cm ^{2 to} the elastic polisher 3 (sealed space 21), the polishing pad 1 attached to the elastic base material 2 is torn along the cut 1c and polished. The pad 1 is separated into a large number of pads, and the gaps between the separated pads form a groove 1f that communicates with each other, and the groove 1f functions as a water flow groove for supplying slurry 9 and discharging polishing debris when polishing. To do. Therefore, there is a water flow groove that communicates from the center portion of the polishing pad 1 to the outer peripheral portion by an easy sticking operation of sticking the polishing pad 1 without sticking a large number of polishing pads one by one to the elastic substrate 2. The formed elastic polisher 3 (elastic polishing tool) is obtained.

  In addition, since the polishing pad 1 is separated, it follows the expansion and contraction of the elastic base material 2 and is difficult to peel off, and the polishing pad 1 is attached to the elastic base material 2 with a strong adhesive. By sticking the polishing pad 1 to the elastic substrate 2 once, the elastic polisher 3 (elastic polishing tool) can be repeatedly used for polishing, and the manufacturing cost can be reduced.

  In addition, since the polishing pad 1 is separated into a large number of pads and the width of the groove 1f formed from the central portion of the polishing pad 1 to the outer peripheral portion is as narrow as 0.1 to 5 mm, While functioning as a water flow groove for discharging polishing debris, it is possible to prevent the polishing pad 1 from being peeled off by the peripheral edge of the spectacle lens 5 to be polished at the time of polishing, thereby preventing occurrence of poor polishing due to peeling.

Furthermore, the region where the polishing pad 1 is adhered to the surface of the elastic base 2 is set so as to cover at least the range A in which the spectacle lens 5 to be polished slides (oscillates). The peripheral edge of the lens 5 does not hit the edge of the polishing pad 1, and the peeling prevention effect of the polishing pad 1 is further enhanced.
The above description has been given of the polishing pad 1 having a cut line made up of a plurality of holes passing through the polishing pad 1 (pad base material 1a and double-sided tape 1b). The same effect as described above can be obtained even when a polishing pad having a cross-sectional shape that is not formed (cross-sectional shape as shown in FIG. Is possible.

A modification of the above embodiment is shown below.
(1) The case where compressed air having a predetermined pressure is introduced into the dome-shaped sealed space 21 formed between the elastic polisher 3 and the polishing apparatus (mounting jig 4) has been described. Alternatively, it may be filled with an elastic material.

  (2) The case where the cut 1c formed on the polishing pad 1 is composed of the elongated rectangular hole 1d and the bridge-shaped connecting portion 1e has been described. However, the circular hole array is formed in a perforated shape. It may be. The hole diameter in this case is such that the bridge-shaped connecting portion 1e tears along the perforated hole, and the grooves 1f communicating with each other serve as water passage grooves for discharging the slurry 9 and polishing debris supplied from the nozzle 8. It is necessary to have a functioning width, and is set to about 0.1 to 5 mm, preferably about 0.2 to 3 mm.

  (3) The case where the cut 1c is formed in a shape in which a number of regular hexagons are arranged in a honeycomb shape on the polishing pad 1 has been described. Also good. Further, the cut 1c may have any shape formed so as to communicate with each other from the center portion of the polishing pad 1 to the outer peripheral end portion. For example, as shown in the top view of the elastic polisher 31 to which the polishing pad 11 of FIG. 5 is attached, a ripple-like circular cut 11a having a ring shape and a radial cut 11b extending from the central portion to the outer peripheral end portion. A combined shape may also be used.

  (4) Although the case where the cut 1c is formed on the polishing pad 1 has been described, FIG. 6 is a partially enlarged view of the polishing pad formed with the cut ((a) is a top view, (b) is a cross-sectional view). As shown, the same effect can be obtained by forming a continuous cut 1g leaving a thickness β on the polishing pad 1. The remaining thickness β of the cut 1g is set to the thickness of the pad base material 1a of the polishing pad 1 or the thickness of the entire double-sided tape 1b. Thereby, the polishing pad 1 consisting of a single sheet having continuous cuts 1g can be easily attached to the elastic substrate 2, and the slurry 9 and polishing scraps supplied from the nozzle 8 by the cuts 1g can be removed. Can function as a drainage channel to discharge. In this case, the width of the cut 1g is set to about 0.1 to 5 mm, preferably about 0.2 to 3 mm. In addition, since the polishing pad 1 in which the cut 1g is formed has a continuous groove formed in advance, when compressed air is fed into the dome-shaped sealed space 21 and tears along the cut 1g, Even if the cut 1g does not tear, the same effect can be obtained.

(5) Although the polishing pad and the polishing method have been described in the case of balloon-type elastic polishing in which the entire surface to be polished of the spectacle lens 5 is polished, the small dome-like elasticity that contacts a part of the surface to be polished of the spectacle lens 5 Similar effects can be obtained even with partial polishing using a polishing tool.
A polishing pad and a polishing method in the partial polishing method will be described based on a schematic cross-sectional view of a polishing portion of a polishing apparatus showing an aspect in which a concave surface of a lens is partially polished using an elastic polishing tool shown in FIG.

The elastic polishing tool 53 includes a polishing pad 51, an elastic polishing body 52, and a polishing body base material 54. The elastic polishing body 52 is attached to the upper surface of the polishing body base material 54, and the polishing pad 51 is further mounted on the upper surface of the elastic polishing body 52. Is attached.
The elastic polishing body 52 is formed of an elastic material such as silicon rubber whose shape can be changed following the surface to be polished (concave surface) 55a of the spectacle lens 55, and has spectacles on one surface (convex surface) of the cylindrical shape. A dome-shaped curved surface having a predetermined radius of curvature close to the polished surface shape of the lens 55 is formed. The diameter of the elastic polishing body 52 is set smaller than the outermost diameter of the spectacle lens 55 in order to polish without breaking the optical surface shape of the surface 55a to be polished of the spectacle lens 55.

  The polishing pad 51 is composed of a pad base material made of a circular non-woven fabric and a double-sided tape in which an adhesive is applied to both sides of the tape base material. The polishing pad 51 has a constant thickness β of the polishing pad left on the polishing pad 51 continuously. A groove-shaped cut 1g is formed (see FIG. 6). The polishing pad 51 is attached to the dome-shaped curved surface of the elastic polishing body 52 via a double-sided tape. The outer diameter of the circular polishing pad 51 covers the entire surface of the dome-shaped curved surface of the elastic polishing body 52, and is preferably about the size of the cylindrical outer diameter of the elastic polishing body 52.

  The elastic polishing tool 53 configured as described above is attached to a polishing shaft (not shown) of the polishing apparatus. The polishing shaft of the polishing apparatus includes a mechanism that presses the elastic polishing tool 53 against the surface 55a to be polished of the spectacle lens 55 with a predetermined polishing pressure, for example, by applying air pressure.

On the other hand, the spectacle lens 55 as an object to be polished is positioned and fixed to the attachment jig 57 via a block portion 56 made of a low melting point metal or the like on the surface (convex surface) opposite to the surface 55a to be polished. The mounting jig 57 on which the spectacle lens 55 is positioned and fixed is mounted and fixed to a chuck (not shown) of the polishing apparatus. The chuck of the polishing apparatus includes a rotation (rotation) mechanism and a swing mechanism.
Further, the polishing apparatus includes a nozzle 58 that supplies a slurry 59 in which abrasive grains are dispersed in a processing liquid between the elastic polishing tool 53 and the surface 55a to be polished of the spectacle lens 55.

In the polishing method of the surface 55a to be polished of the spectacle lens 55, first, the polishing shaft of the polishing apparatus is driven to rotate, and the elastic polishing tool 53 mounted on the polishing shaft is rotated. Then, air pressure is applied to the mechanism for pressing the polishing shaft against the surface 55a to be polished, the elastic polishing tool 53 is pressed against the surface 55a to be polished of the spectacle lens 55 with a predetermined pressure, and the chuck is rotated by the rotation mechanism with a predetermined rotation. The rotation mechanism operates while rotating (spinning) by a number, and the spectacle lens 55 swings on the elastic polishing tool 53 (polishing pad 51).
Along with the rotation of the chuck and the polishing shaft, the slurry 59 is supplied from the nozzle 58 between the elastic polishing tool 53 and the surface 55a to be polished, and the surface 55a to be polished of the spectacle lens 55 is polished.

  (6) The polishing method using the elastic polisher is an example in which the concave surface of the spectacle lens is polished as an object to be polished. However, the object to be polished is limited if it requires smoothing or mirror polishing. There is no. For example, in addition to optical lenses represented by camera lenses, telescope lenses, microscope lenses, stepper condenser lenses, etc., optical parts such as glass molds for cast polymerization of plastic lenses, cover glasses for portable devices, etc. Can be mentioned.

(A) is a top view of the elastic polisher to which the polishing pad of this invention was stuck, (b) is sectional drawing of the elastic polisher to which the polishing pad was stuck. It is the elements on larger scale of the cut | interruption formed on the polishing pad, (a) is a top view, (b) is sectional drawing. The cross-sectional schematic diagram of the grinding | polishing part of the grinding | polishing apparatus which shows the aspect which carries out balloon type grinding | polishing of the concave surface of a lens. The partial enlarged view of the polishing pad torn along the cut is shown, (a) is a top view, (b) is a cross-sectional view. The top view of the elastic polisher in which another polishing pad was stuck. It is the elements on larger scale of the polishing pad in which another cut | interruption was formed, (a) is a top view, (b) is sectional drawing. The cross-sectional schematic diagram of the grinding | polishing part of the grinding | polishing apparatus which shows the aspect which partially grinds the concave surface of a lens.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,11,51 ... Polishing pad, 1a ... Pad base material, 1b ... Double-sided tape, 1c, 1g, 11a, 11b ... Cut, 1f ... Groove, 2 ... Elastic base material, 2a ... Dome-shaped part, 2b ... Flange part 3, 31 ... elastic polisher, 4, 7, 57 ... mounting jig, 5, 55 ... spectacle lens, 6, 56 ... block portion, 8, 58 ... nozzle, 9, 59 ... slurry, 21 ... sealed space, 41 DESCRIPTION OF SYMBOLS ... Attachment jig main body, 42 ... Holding member, 52 ... Elastic polishing body, 53 ... Elastic polishing tool, 54 ... Polishing body base material, 55a ... Polishing surface, 411 ... Cylindrical part, 412 ... Elastic polisher attachment part, 413 ... Attached part, A ... A range in which an object to be polished moves.

Claims (5)

In the polishing pad attached to the surface of the dome-shaped elastic base material, the pressure polisher is introduced into the inside of the dome-shaped elastic base material and polished against the surface to be polished of the object to be polished.
The polishing pad has a pad base material, and a double-sided tape for adhering the pad base material to the elastic base material surface is adhered to one surface of the pad base material, and penetrates the polishing pad. A polishing pad comprising a plurality of holes formed by a plurality of holes. In the polishing pad attached to the surface of the dome-shaped elastic base material, the pressure polisher is introduced into the inside of the dome-shaped elastic base material and polished against the surface to be polished of the object to be polished.
The polishing pad has a pad base material, and a double-sided tape for adhering the pad base material to the elastic base material surface is adhered to one surface of the pad base material, and the pad base material A polishing pad comprising a cut formed by a row of a plurality of holes formed so as to pass through and not through the double-sided tape. The polishing pad according to claim 2, wherein
The polishing pad, wherein the shape of the cut is a continuous groove shape. The polishing pad according to any one of claims 1 to 3,
The polishing pad, wherein the cut is formed in a shape in which a large number of polygonal outlines are arranged side by side from a central portion to an outer peripheral portion of the polishing pad. The polishing pad according to any one of claims 1 to 4 is mounted on a polishing apparatus with the elastic polisher attached to the surface of the dome-shaped elastic substrate,
In a sealed space formed between the elastic polisher and the polishing apparatus,
Apply a pressure of 0.1 to 2.0 kgf / cm ² to give tension to the elastic polisher,
A polishing method, wherein the elastic polisher is pressed against a surface to be polished of an object to be polished.

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