JP2006272299A - Centrifugal membrane device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a centrifugal membrane device capable of efficiently separating even suspended solids such as particulate that is likely to produce fouling and capable of maintaining a separating function of the suspended solids for a long time with regard to the centrifugal membrane device that separates the suspended solids in a treated liquid through a separation membrane. <P>SOLUTION: The centrifugal membrane device 20 is provided with a rotary container 11 to which a raw material liquid is supplied, a rotary shaft 12 that gives rotation force to the container 11, and a separation membrane module 13 positioned and mounted on the shaft 12 in the container 11, the centrifugal force is given to the raw material liquid by rotating the container 11 through the shaft 12 to separate the particulate in the raw material liquid by the actions of the centrifugal force and the module 13. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a centrifugal separation membrane device for separating suspended substances in a liquid to be treated through a separation membrane, and more specifically, an inorganic suspended substance as a liquid to be treated containing a suspended substance. , Including carbon fullerenes, carbon nanotubes, graphite, silicon carbide, colloidal silica and abrasive particles, or organic suspensions such as sludge, fats and oils, microorganisms and enzymes, especially in the semiconductor industry CMP prone to fouling
(Chemical Mechanical Polishing) The present invention relates to a centrifugal separation membrane apparatus suitable for separating inorganic particles such as colloidal silica and abrasive grains contained in polishing wastewater such as wastewater.

  As this type of separation membrane device, for example, techniques described in Patent Document 1, Patent Document 2, and Patent Document 3 are known. Patent Document 1 describes a fixed separation membrane filter, Patent Document 2 describes a rotary membrane separator, and Patent Document 3 describes an abrasive recovery device.

  The fixed flat membrane filter of Patent Document 1 includes an annular fixed separation membrane that is stacked and spaced apart from each other, a rotating shaft that extends through the ring of the fixed separation membrane, and a spaced distance from each other. A stirring plate that is stacked and fixed to the rotating shaft, and a casing that accommodates the fixed separation membrane, the rotating shaft, and the stirring plate are provided. With this configuration, the hold-up amount of the casing is small, the residence time of the stock solution in the casing is short, and the permeation flux of the fixed flat membrane is large. Patent Document 1 also describes a rotary flat membrane filter. In this rotary flat membrane filter, the positional relationship between the fixed separation membrane and the stirring plate is basically reversed, the stirring plate is fixed, and the rotary flat membrane is fixed to the rotating shaft. . In any of these filters, the flat membrane and the stirring plate are alternately arranged, and the flat membrane and the stirring plate rotate relative to each other to stir the liquid to be treated between the flat membranes with the stirring plate, thereby prematurely depositing on the flat membrane. In order to maintain the permeability of the flat membrane relatively long.

  The rotary membrane separation apparatus of Patent Document 2 has a structure in which a rotating shaft is disposed so as to pass through a container having a supply inlet for a liquid to be processed, and the permeated liquid in the container can be transferred. The membrane body is mounted on a rotating shaft, and a baffle is provided on both sides of the membrane body with a gap between the membrane body. Basically, the rotary flat membrane filter of Patent Document 1 is improved. is there. In the case of this rotary separation membrane apparatus, the membrane body has a diameter of 300 to 1000 mm, and the membrane separation performance is effectively exhibited by operating by rotating the membrane body in the range of 50 to 1000 rpm. obtain.

  In the abrasive recovery device of Patent Document 3, the membrane separation device is disposed at the subsequent stage of the centrifuge, the polishing process wastewater is introduced into the centrifuge and centrifuged, and a part of the surfactant is removed. The concentrated solution is introduced into a membrane separator. As a result, the flow rate of the membrane separator for removing coarse solids can be remarkably reduced, the clogging of the membrane separator is prevented, and the membrane replacement frequency is reduced, thereby reducing the running cost. Thus, it is possible to recover the abrasive particles with little impurities stably over a long period of time.

Japanese Patent Laid-Open No. 06-277465 JP 2003-245527 A Japanese Patent Laid-Open No. 2001-2225070

  However, the conventional techniques described in Patent Document 1 and Patent Document 2 have a structure in which the flat film and the stirring plate relatively rotate in the liquid to be processed to separate the liquid to be processed, and should be separated in the liquid to be processed. There is a problem that the particles are constantly stirred and re-diffused throughout the liquid to be treated, the separation efficiency of the particles is poor, and the more the particles become finer, the more prominent. In the case of the technique described in Patent Document 3, coarse particles are separated by a centrifugal separator, and the separated coarse particles are dispersed in pure water and removed again by a membrane separator. In this technique, Since the centrifuge and the membrane separator are installed separately, there is a problem that the equipment cost, the installation area, etc. are increased.

  The present invention has been made in order to solve the above-mentioned problems, and even a suspended substance such as fine particles that easily cause fouling can be efficiently separated, and the suspended substance separation function can be provided for a long time. It aims at providing the centrifugal membrane apparatus which can be maintained over.

  The centrifugal membrane device according to claim 1 of the present invention is a rotary container to which a liquid to be treated containing a suspended substance is supplied, a rotary shaft for applying a rotational force to the rotary vessel, A separation membrane module mounted in a rotating container, and applying the centrifugal force to the liquid to be treated by rotating the rotating container and the separation membrane module via the rotating shaft. And an apparatus for separating suspended substances in the liquid to be processed by the permeation separation action of the separation membrane module, wherein the rotating container is provided with means for supplying the liquid to be processed, and at least a part of the rotating shaft is rotated hollow The hollow rotating shaft is formed as a shaft and is formed as a permeate discharging means communicating with the permeate side of the separation membrane module.

  A centrifugal membrane device according to claim 2 of the present invention is the centrifugal membrane device according to claim 1, wherein the hollow rotating shaft is connected to the first hollow rotating shaft portion located in the rotating container and the rotating container outside. The first hollow rotating shaft portion is partitioned into a second hollow rotating shaft portion, and the first hollow rotating shaft portion is connected to the supply passage of the liquid to be processed that communicates with the inside of the rotating container and the permeate liquid that communicates with the permeate side of the separation membrane module. It is divided into a discharge passage, and the hollow portion of the second hollow rotary shaft portion and the supply passage of the liquid to be processed are communicated to form the liquid to be processed.

  According to a third aspect of the present invention, there is provided the centrifugal membrane device according to the second aspect, wherein the first hollow rotating shaft portion is formed as a hollow rotating shaft having a double tube structure, and the double tube is formed. The outer hollow portion of the hollow rotating shaft having the structure is formed as a supply passage for the liquid to be processed, and the inner hollow portion is formed as a discharge passage for the permeated liquid.

  According to a fourth aspect of the present invention, there is provided a centrifugal membrane device comprising: a container to which a liquid to be treated containing a suspended substance is supplied; and the liquid to be treated in the container is circulated in the container. A rotating container having a hole formed therein, a rotating shaft for applying a rotating force to the rotating container in the liquid to be treated, and a separation membrane module mounted on the rotating shaft so as to be positioned in the rotating container. The rotating container and the separation membrane module are rotated via the rotating shaft to give a centrifugal force to the liquid to be treated in the rotating container, and the rotating container is transmitted by the centrifugal force and the separation and separation action of the separation membrane module. An apparatus for separating suspended substances in the liquid to be treated inside, wherein the rotary shaft is formed as a hollow rotary shaft having a double tube structure, and a hollow part outside or inside the hollow rotary shaft is formed in the separation membrane Communication with the permeate side of the module It is characterized in that formed as discharge means for the permeate that.

  In the centrifugal membrane device according to claim 5 of the present invention, in the invention according to claim 4, a hollow portion different from the discharge means of the hollow rotating shaft is separated by the separation membrane module. It is characterized by being formed as a means for discharging suspended substances.

  In addition, the centrifugal membrane device according to claim 6 of the present invention is the invention according to any one of claims 1 to 5, wherein the separation membrane module includes a plurality of disc-shaped separation membrane bodies or A plurality of umbrella-shaped separation membrane bodies are attached over a plurality of stages along the axis of the rotating shaft.

  The centrifugal membrane device according to claim 7 of the present invention is the centrifugal membrane device according to any one of claims 1 to 6, wherein the rotating container is arranged at the maximum diameter portion in the radial direction. It has a discharge means for the suspended substance separated by the separation membrane module.

  The centrifugal membrane device according to an eighth aspect of the present invention is the centrifugal membrane device according to any one of the first to seventh aspects, wherein the supply passage for the liquid to be treated is supplied with a pressure supply means and / or A suction discharge means is provided in the permeate discharge passage.

  According to a ninth aspect of the present invention, there is provided a centrifugal membrane device comprising: a rotary container to which a liquid to be treated containing a suspended substance is supplied; a rotary shaft for applying a rotational force to the rotary container; and the rotary container A separation membrane module that is mounted by partitioning the inside into a chamber to be treated and a permeate chamber, and rotating the rotating container and the separation membrane module via the rotating shaft to rotate the liquid to be treated. Is a device for separating the suspended matter in the liquid to be treated by the centrifugal force and the permeation and separation action of the separation membrane module, wherein the rotating shaft communicates with the liquid chamber side to be treated. And a hollow rotating shaft serving as a supply passage for the liquid to be treated and a hollow rotating shaft communicating with the permeate chamber side and serving as a permeate discharge passage.

  Further, the centrifugal membrane device according to claim 10 of the present invention is the invention according to claim 7, further comprising a non-permeated liquid discharging means communicating with the maximum diameter portion in the radial direction in the liquid chamber to be processed. It is characterized by.

  According to the first to tenth aspects of the present invention, even suspended substances such as fine particles that tend to cause fouling can be efficiently separated, and the function of separating suspended substances is prolonged. A centrifuge membrane device that can be maintained over time can be provided.

  Hereinafter, the present invention will be described based on the embodiment shown in FIGS. 1 is a cross-sectional view schematically showing an entire embodiment of the centrifugal separation membrane device of the present invention, and FIG. 2 is a horizontal direction of a rotating shaft and a disc-shaped separation membrane body of the centrifugal separation membrane device shown in FIG. FIG. 3 is a sectional view schematically showing the whole of another embodiment of the centrifugal membrane device of the present invention, and FIG. 3 is still another embodiment of the centrifugal membrane device of the present invention. FIG.

First embodiment
For example, as shown in FIG. 1, the centrifugal membrane device 10 of the present embodiment applies a centrifugal force to a liquid to be treated (hereinafter referred to as “raw material liquid”), and the raw material liquid and the permeated liquid through the separation membrane. And a pressure difference between them to generate impurities so as to separate impurities in the raw material liquid. Examples of the raw material liquid include waste water containing suspended solids such as inorganic fine particles such as CMP (Chemical Mechanical Polishing) generated in the semiconductor manufacturing process, oil-water mixed waste water, and organic waste water. There are various kinds of sludge and other waste water containing organic suspended matter discharged from the treatment process. The centrifuge membrane device 10 of the present embodiment is preferably used when separating fine particles from wastewater that easily generates fouling containing micron to nano level fine particles such as CMP wastewater generated in a semiconductor manufacturing process. it can.

  That is, as shown in FIG. 1, the centrifugal membrane device 10 of the present embodiment has a rotating container 11 having a substantially hexagonal cross section and a lower surface of the rotating container 11 that passes through the center of the lower surface of the rotating container 11. A rotating shaft 12 connected to the lower surface so as to reach, a separation membrane module 13 that is attached to the rotating shaft 12 and separates the fine particles in the raw material liquid in the rotating container 11, and a motor 14 that rotationally drives the rotating shaft 12. A casing 15 that rotatably houses the rotating container 11, and the rotating container 11 and the separation membrane module 13 are integrally rotated through the rotating shaft 12 in the casing 15 and supplied to the rotating container 11. Fine particles (hereinafter, simply referred to as “fine particles”) in the raw material liquid are separated, and the fine particles are collected to pass through the sludge mainly containing solids, the concentrated liquid having a high fine particle concentration, and the separation membrane module 13. It is configured to separately output the three kinds of the treated water in the liquid. The rotating container 11 is configured to rotate at a rotational speed of, for example, 100 to 1000 rpm, preferably 200 to 300 rpm, using the motor 14 as a drive source.

  As shown in FIG. 1, a shaft portion 11 </ b> A sharing an axis with the rotating container 11 extends vertically downward on the lower surface of the rotating container 11. The rotary container 11 is connected to the rotary shaft 12 at the shaft portion 11A. The shaft portion 11A is supported by a bearing (not shown) attached to the base 16, and the rotary container 11 rotates on the base 16 via the shaft 11A and the bearing. Further, the rotary container 11 having a substantially hexagonal cross section is formed with the maximum diameter portion in the middle of the side surface in the vertical direction. A discharge port 11B for discharging solid content as sludge is formed in the maximum diameter portion, and a pilot valve 17 that operates intermittently as an opening / closing means is mounted on the discharge port 11B. The pilot valve 17 opens and closes the discharge port 11B intermittently to discharge sludge (solid content) accumulated in the maximum diameter portion of the rotary container 11 to the outside.

  As shown in FIG. 1, the rotary shaft 12 is connected to the first hollow rotary shaft portion 121 that supports the separation membrane module 13 in the rotary container 11 and the lower end of the first hollow rotary shaft portion 121 and rotates. The container 11 includes a second hollow rotating shaft portion 122 penetrating through the shaft portion 11A of the container 11, and includes a raw material liquid supply means and a processing liquid discharge means. In other words, the first and second hollow rotating shaft portions 121 and 122 are integrated, and both of these hollow portions are partitioned from each other via the partition wall 123.

  As shown in FIG. 1, the separation membrane module 13 has a plurality of disc-shaped separation membrane bodies 13 </ b> A, and these disc-shaped separation membrane bodies 13 </ b> A are arranged in the vertical direction with respect to the first hollow rotating shaft portion 121. It is attached at a predetermined interval. The disc-shaped separation membrane body 13A is, for example, a disc-shaped porous carrier in which a hollow portion (not shown) is formed by a porous material such as a conventionally known porous ceramic or porous sintered metal. And a film body made of a conventionally known woven fabric, non-woven fabric, organic polymer film or the like coated on the outer surface of the porous carrier, and in the raw material liquid via the organic polymer membrane and the porous carrier The fine particles are separated, and the permeated liquid from which the fine particles have been separated flows into the hollow portion.

  Thus, as shown in FIGS. 1 and 2, the first hollow rotary shaft portion 121 is a double-pipe hollow rotary shaft composed of a small-diameter tube 121A and a large-diameter tube 121B formed larger than the small-diameter tube 121A. Is formed. A gap between the small-diameter pipe 121A and the large-diameter pipe 121B is formed as a raw material supply means, and the inside of the small-diameter pipe 121A is formed as a permeate discharge means for the separation membrane module 13. That is, the upper end of the small-diameter pipe 121A is positioned so as to be retracted downward from the upper end of the large-diameter pipe 121B, and the upper end of the small-diameter pipe 121A is connected to the inner wall of the large-diameter pipe 121B. Is closed at the upper end of the small-diameter pipe 121A to form a raw material liquid supply passage 124. A communication passage that connects the raw material liquid supply passage 124 of the first hollow rotary shaft portion 121 and the hollow portion of the second hollow rotary shaft portion 122 to the partition wall 123 of the first hollow rotary shaft portion 121 and the second hollow rotary shaft portion 122. 123A is formed radially, and the raw material liquid supplied to the hollow portion of the second hollow rotary shaft portion 122 flows into the raw material liquid supply passage 124 through the plurality of communication passages 123A, and extends in the axial direction to the large diameter pipe 121B. The rotating container 11 is supplied from a plurality of holes formed in this manner. The plurality of holes are formed at a plurality of locations in the circumferential direction of the large-diameter pipe 121B, and are arranged between the plurality of disc-shaped separation membrane bodies 13A of the separation membrane module 13. That is, the hollow portion of the second hollow rotary shaft portion 122, the communication passage 123A, and the raw material liquid supply passage 124 are configured as the raw material liquid supply means. The raw material liquid supply means is provided with a pressurizing means such as a pressure pump so that the raw material liquid is supplied into the rotary container 11.

  Further, the disc-shaped separation membrane body 13A constituting the separation membrane module 13 has a through-hole through which the first hollow rotating shaft portion 121 penetrates in a close contact state as shown in FIGS. ing. As shown partially in FIG. 2, a plurality of holes arranged in the through-holes of the disc-shaped separation membrane body 13A are formed at predetermined intervals in the circumferential direction on the peripheral wall of the large-diameter pipe 121B. Is formed with a hole corresponding to the hole of the large diameter pipe 121B. The hole of the small diameter pipe 121A and the hole of the large diameter pipe 121B are connected by a communication pipe 121C, and the permeate discharge passage 125 formed by the hollow part of the disc-shaped separation membrane body 13A and the hollow part of the small diameter pipe 121A communicates. It communicates via the pipe 121C. In FIG. 2, a broken line portion indicates a state in which the raw material liquid is supplied into the rotary container 11 from a plurality of holes formed between the upper and lower disk-shaped separation membrane bodies 13A along the axial direction in the large diameter pipe 121B. Show. Further, as shown in FIG. 1, an enlarged diameter portion 18A of the permeate discharge pipe 18 is disposed near the inner surface of the sealing plate at the upper end of the large diameter pipe 121B, and the permeate of the separation membrane module 13 is disposed in the enlarged diameter portion 18A. Are introduced at a plurality of locations in the permeate discharge pipe 18 (not shown). Accordingly, the permeated liquid of the disc-shaped separation membrane body 13A is discharged from the permeated liquid discharge pipe 18 to the outside of the rotary container 11 via the communication pipe 121C and the permeated liquid discharge passage 125 of the first hollow rotary shaft 121. It is like that. A suction means such as a vacuum pump is provided on the permeate discharge side as required, and the permeate is discharged by the suction means.

  Further, as shown in FIG. 1, a concentrated liquid discharge pipe 19 surrounding the permeate discharge pipe 18 is attached to the upper part of the rotating container 11, and the lower end of the concentrated liquid discharge pipe 19 is a large diameter pipe 121 </ b> B of the rotary shaft 12. Near the top of The concentrate discharge pipe 19 may be provided with suction means, and the concentrate may be sucked and discharged by the suction means. The concentrated liquid discharge pipe 19 and the permeated liquid discharge pipe 18 are formed as a double pipe sharing an axial center, and a gap between the both 18 and 19 serves as a concentrated liquid discharge passage. The lower end of the concentrated liquid discharge pipe 19 is expanded in a hollow disk shape with a gap between the lower end of the first hollow rotating shaft part 121 and the concentrated liquid is spread over the entire outer peripheral surface of the expanded diameter part 19A. An inflow port is formed. Accordingly, the rotary shaft 12 having a double pipe structure including the permeate discharge pipe 18 and the concentrate discharge pipe 19 passes through the upper portion of the rotary container 11, and the rotary container 11 is pivotally supported by the rotary shaft 12 having a double pipe structure. It is designed to rotate in a state that has been applied.

  Further, a baffle plate 126 having an outer peripheral edge bent downward is attached to the upper end of the second hollow rotary shaft 121, and a concentrated liquid passage is provided between the baffle plate 126 and the upper surface of the rotary container 11. And the raw material liquid in the rotating container 11 is prevented from being mixed into the concentrated liquid.

  Next, the operation will be described. In this embodiment, a case will be described in which CMP wastewater containing fine particles such as colloidal silica and abrasive grains is treated as a raw material liquid. When CMP waste water is supplied from the raw material liquid supply source to the centrifugal separation membrane device 10 as a raw material liquid (for example, polishing waste water), the raw material liquid is supplied to the raw material liquid supply passage 124, that is, the hollow portion of the second hollow rotating shaft portion 122, the partition wall 123. The communication passage 123 </ b> A and the raw material liquid supply passage 124 of the first hollow rotary shaft 121 flow into the rotary container 11. At this time, since the motor 14 is already driven, the rotating container 11 is rotated at a predetermined rotation speed (for example, 200 to 300 rpm) via the rotating shaft 12 and is mounted on the first hollow rotating shaft portion 121. The separation membrane module 13 also rotates together with the rotating container 11 and imparts centrifugal force to the raw material liquid in the rotating container 11. The raw material liquid receives centrifugal force in the rotating container 11 and is pressed against the inner wall surface, and the fine particles in the raw material liquid gradually gather at the maximum diameter part of the rotating container 11 due to the difference in specific gravity with water, and the central part of the rotating container 11 Then, the concentration of fine particles is low, and the concentration of the fine particles increases toward the inner wall surface.

  Since the disc-shaped separation membrane body 13A is disposed on the radially outer side of the permeate discharge passage 125 in the second hollow rotary shaft portion 121, when a centrifugal force is applied to the raw material liquid in the rotary container 11, the disc-shaped separation membrane body 13A is disc-shaped. A pressure difference due to centrifugal force is generated between the outer surface side of the separation membrane body 13A and the internal discharge passage side, and the fine particles of the raw material liquid are separated by this pressure difference, as shown by arrows in FIGS. Then, the permeated liquid reaches the permeated liquid discharge passage 125 from the hollow portion of the disc-shaped separation membrane body 13 </ b> A via the connecting pipe 121 </ b> C of the first hollow rotary shaft portion 121. And it is discharged | emitted outside via the permeate discharge pipe 18 from the enlarged diameter part 18A of the permeate discharge pipe 18 inserted in the 1st hollow rotating shaft part 121. FIG.

  On the other hand, when the separation of the fine particles by the separation membrane module 13 proceeds, the fine particles are deposited on the surface of each disk-shaped separation membrane body 13A, and the fine particles are aggregated due to the pressure difference inside and outside the disk-shaped separation membrane body 13A. Grows and coarsens as particles. When the fine particles become larger and larger, the grown particles receive centrifugal force on the surface of the disc-shaped separation membrane body 13A and are separated from the surface, so that the maximum diameter portion of the inner wall surface of the rotating vessel 11 is removed by so-called self-cleaning action (self-cleaning). That is, it accumulates in the vicinity of the discharge port 11B. The grown particles have a dense particle structure due to the differential pressure inside and outside the disc-shaped separation membrane body 13A, and the separation membrane module 13 rotates together with the rotating container 11 so that the upper and lower disc-shaped separation membrane bodies 13A. Since the raw material liquid between 13A is not agitated, it does not return to the original fine particles even if it is peeled off from the disc-shaped separation membrane body 13A, and remains as grown particles by the action of centrifugal force. It collects as sludge (solid content) in 11B.

  The concentrated liquid in the rotating container 11 reaches the enlarged diameter portion 19A of the concentrated liquid discharge pipe 19 at the upper part of the rotating container 11 through the gap between the upper surface of the rotating container 11 and the baffle plate 126, and enters the inside from the enlarged diameter section 19A. It flows in and is discharged from the concentrate discharge pipe 19 to the outside. Further, sludge accumulated in the maximum diameter portion of the rotating container 11 such as grown particles is discharged to the outside of the rotating container 11 by the pilot valve 17 being intermittently operated.

  As described above, according to the present embodiment, the rotary container 11 to which the raw material liquid is supplied, the rotary shaft 12 that applies a rotational force to the rotary container 11, and the rotary shaft 12 is positioned in the rotary container 11. The separation membrane module 13 is mounted on the rotating vessel 11, and the rotating vessel 11 is rotated to apply a centrifugal force to the raw material liquid. The centrifugal force and the separation membrane module 13 act to act on the fine particles in the raw material liquid. In the raw material liquid, the fine particles move to the maximum diameter portion of the rotating container 11 due to the difference in specific gravity with water, and the fine particles separated by the separation membrane module 13 grow on the surface of each disc-shaped separation membrane body 13A. Since the coarsened particles are separated from each disk-shaped separation membrane body 13A under centrifugal force, each disk-shaped separation membrane body 13A is always subjected to a self-cleaning action for a long time. Maintain separation function Rukoto can.

  In addition, according to the present embodiment, the rotating shaft 12 is connected to the second hollow rotating shaft portion 122 that penetrates the lower portion of the rotating container 11, and the second hollow rotating shaft portion 122, and the second hollow rotating shaft portion 122. And the first hollow rotary shaft portion 121 sharing the shaft core, and the hollow portion located at the shaft core of the first hollow rotary shaft portion 121 and the permeate side of the separation membrane module 13 communicate with each other via the connecting pipe 121C. In addition, since the shaft hollow portion is formed as the permeate discharge passage 125, the permeate can be discharged to the outside of the rotary container 11 through the first hollow rotary shaft portion 121.

  In addition, according to the present embodiment, the first hollow rotary shaft portion 121 of the rotary shaft 12 has a double tube structure, and the raw material liquid supply passage 124 and the permeate discharge passage 125 that open to the raw material liquid side are partitioned therein. In addition, the raw material liquid supply passage 124 of the first hollow rotary shaft portion 121 and the hollow portion of the second hollow rotary shaft portion 122 communicate with each other via a communication passage 123A, and further, the permeate side of the separation membrane module 13 Since the permeate discharge passage 125 of the first hollow rotary shaft portion 121 communicates with the communication pipe 121C, the raw material liquid supply passage 124 and the permeate permeate discharge passage 125 are formed in the rotary shaft 12. The separation membrane module 13 can be rotated together with the rotary container 11 via the rotary shaft 12, and the separation efficiency of the fine particles in the raw material liquid can be increased.

Second embodiment
As shown in FIG. 3, the centrifugal membrane device 20 of the present embodiment processes the raw material liquid and divides it into two types of concentrated liquid and permeated liquid and discharges them to the outside of the rotating container. In the first embodiment, the raw material liquid is treated and divided into three types of concentrate, permeate, and sludge and discharged to the outside of the rotating container. In this embodiment, however, the fine particles are concentrated without being collected as solids. It is different from the above embodiment in that it is discharged as a liquid.

  That is, as shown in FIG. 3, the centrifugal membrane device 20 of this embodiment includes a rotating container 21, a rotating shaft 22, a separation membrane module 23, a motor 24 and a container 25, and the rotating container 21 is supplied into the container 25. The raw material liquid is configured to rotate through a rotating shaft 22 and to apply centrifugal force to the raw material liquid to separate the fine particles in the raw material liquid. As in the first embodiment, the raw material liquid supply means is provided with a pressurizing means, and the permeate discharge means is provided with a suction means. The raw material liquid may be filled in the container 25.

  Thus, the rotary container 21 has a bell-shaped cross section as shown in FIG. 3, the maximum diameter portion is formed at the lower filtrate outlet, and is immersed in the raw material liquid in the container 25. . The rotating container 21 is mounted on a rotating shaft 22 that passes through the shaft core, and is fixed to the rotating shaft 22 at the upper end thereof. A hole 21A through which the raw material liquid enters is formed at the center of the lower surface of the rotating container 21, and a plurality of holes 21B are formed on the upper surface so as to surround the rotating shaft. The raw material liquid flows into the inside of the hole 21 </ b> A on the lower surface of the rotating container 21, flows out of the plurality of holes 21 </ b> B on the upper surface, and circulates in the container 25.

  As shown in FIG. 3, the rotating shaft 22 is integrated as a hollow rotating shaft having a double tube structure including a small diameter tube 22A and a large diameter tube 22B, and is connected to a motor 24 via the small diameter tube 22A. The small-diameter pipe 22A forms a concentrated liquid discharge passage 22C by the separation membrane module 23, and a concentrated liquid hollow discharge port (impeller) 26 is connected to the lower end of the small diameter pipe 22A, and a concentrated liquid discharge pipe is connected to the upper end of the small diameter pipe 22A. 27 is attached. The small-diameter pipe 22A is configured to be rotatable with respect to the hollow disc portion 27A at one end of the concentrate discharge pipe 27, and discharges the concentrate to the concentrate discharge pipe 27 from a plurality of holes formed in the peripheral wall thereof. A sliding member (not shown) is interposed between the small diameter tube 21A and the hollow disc portion 27A to prevent liquid leakage. Further, the upper end of the large-diameter tube 22B protrudes slightly upward from the surface of the raw material liquid, and is connected to the small-diameter tube 22A at the upper end. A gap between the large diameter tube 22B and the small diameter tube 22A is formed as a permeate discharge passage 22D of the separation membrane module 23. The large-diameter tube 22B is configured to be rotatable with respect to a hollow disk portion 28A connected to one end of the concentrate discharge tube 28, and is led to the permeate discharge tube 28 from a plurality of holes formed in the circumferential direction thereof. . A sliding member (not shown) is interposed between the large diameter tube 22B and the hollow disk portion 28A to prevent liquid leakage.

  The separation membrane module 23 includes a plurality of umbrella-shaped separation membrane bodies 23 </ b> A and is configured to rotate integrally with the rotary container 21 via the rotation shaft 22. The umbrella-shaped separation membrane body 23A is formed in a hollow shape by a porous carrier and an organic polymer membrane that covers the porous carrier, like the disc-shaped separation membrane body of the above embodiment, and the hollow portion rotates. The large diameter pipe 22B of the shaft 22 communicates with the permeate discharge passage 22D through a plurality of holes formed in the circumferential direction. The rotary container 21 surrounds the separation membrane module 23 and is formed so as to guide the concentrated liquid into an impeller 26 disposed below the separation membrane module 23 along an inner peripheral wall surface thereof.

  A raw material liquid supply nozzle 25A is provided on the upper surface of the container 25 so as to be biased outward from the center thereof, and the raw material liquid is supplied into the container 25 from the raw material liquid supply pipe 25A. A support nozzle 25B that supports the motor 24 is formed at the center of the upper surface of the container 25, and the motor 24 is fixed on the support nozzle 25B via a flange. A concentrate discharge pipe 27 penetrates the support nozzle 25B in the horizontal direction and is connected to an external concentrate discharge pipe (not shown). Further, a permeate discharge pipe 28 penetrates the upper surface of the container 25 in the vertical direction, and is connected to an external permeate discharge pipe (not shown).

  Next, the operation will be described. The raw material liquid is supplied from the raw material liquid nozzle 25 </ b> A into the container 25, and when the liquid level reaches a predetermined liquid level, the motor 24 rotates, and both the rotary container 21 and the separation membrane module 23 pass through the rotating shaft 22 in the raw material liquid. When centrifugal force is applied to the raw material liquid by rotating, the fine particles generate a particle size distribution in which the particle size increases from the central part toward the peripheral part due to the specific gravity difference, and a differential pressure is generated inside and outside the separation membrane module 23. Due to the pressure, the liquid component in the raw material liquid permeates the umbrella-shaped separation membrane body 23A, and solids such as fine particles in the raw material liquid or concentrated suspended substances are separated. The separated fine particles are deposited and grow on the surface of the umbrella-shaped separation film body 23, and the grown fine particles are separated by centrifugal force and gather at the maximum diameter portion of the rotating container 21. The concentration of the fine particles increases toward the inner wall surface. The concentrated liquid is guided downward along the inner wall surface of the rotating container 21 and flows into the impeller 26 disposed at the maximum diameter portion. The concentrated liquid is discharged from the concentrated liquid discharge pipe 27 to the outside at any time via the concentrated liquid discharge passage 22C inside the small diameter pipe 22A of the rotary shaft 22.

  In the separation membrane module 23, the fine particles are separated in the umbrella-shaped separation membrane body 23A, and the permeate is formed in the large-diameter tube 22B and the small-diameter tube 22A of the rotary shaft 22 from the hollow portion inside the umbrella-shaped separation membrane body 23A. It is discharged to the outside from the permeate discharge pipe 28 via the permeate discharge passage 22D. Therefore, in the present embodiment, the same effects can be obtained as in the above-described embodiment except that the raw material liquid is discharged as the concentrated liquid and the permeated liquid to the outside of the rotating container 21.

Third embodiment
As shown in FIG. 4, the centrifugal membrane device 30 of the present embodiment includes a rotating container 31, a rotating shaft 32, and a separation membrane module 33. As shown in the figure, the rotary container 31 has a substantially hexagonal cross section. A separation membrane module 33 is attached to the maximum diameter portion of the rotating container 31, and the inside of the rotating container 31 is divided into two upper and lower chambers by the separation membrane module 33. First and second rotating shafts 32A and 32B are connected to the upper and lower central portions of the rotating container 31, respectively. These rotating shafts 32A and 32B are both formed as hollow rotating shafts. The first rotating shaft 32A also serves as a raw material liquid supply pipe, and the second rotating shaft 32B also serves as a permeate discharge pipe.

  The separation membrane module 33 is formed as a circular flat membrane having a porous carrier and an organic polymer membrane. A raw material liquid chamber 31 A is formed above the separation membrane module 33 in the rotary container 31, and a permeate chamber 31 B is formed below the separation membrane module 33. In the present embodiment, a pressure difference is applied between the raw material liquid chamber 31A side and the permeate liquid chamber 31B side, and the fine particles in the raw material liquid B are separated by this pressure difference. In the figure, the pores of the separation membrane module 33 are shown schematically large, but it goes without saying that the pores are actually extremely fine.

  The first rotary shaft 32A is connected to the raw material supply pipe 35 via a rotary joint 34A, and the second rotary shaft 32B is connected to a permeate discharge pipe 36 via a rotary joint 34B. Therefore, the rotary container 31 is configured to rotate between the upper and lower rotary joints 34A and 34B. Although not shown, the raw material liquid supply pipe 35 is provided with pressurizing means such as a pressurizing pump, and the permeate discharge pipe 36 is provided with suction means such as a vacuum pump. The pressurizing means and the suction means can provide a differential pressure between the raw material liquid chamber 31A and the permeate liquid chamber 31B, supply the raw material liquid from the raw material liquid supply pipe 35, and discharge the permeate from the permeate discharge pipe 36. In addition, it may be attached to at least one of the raw material liquid supply pipe 35 and the permeate discharge pipe 36.

  In the first rotating shaft 32A and the raw material supply pipe 35, there are provided concentrated liquid discharge pipes 37 passing through the respective shaft cores, and this concentrated liquid discharge pipe 37 is extended from the first rotating shaft 32A into the rotary container 31; The extended end reaches the maximum diameter portion of the rotating container 31. Accordingly, the raw material liquid B is supplied into the rotary container 31 from the first rotary shaft 32A, and the concentrated liquid is discharged from the concentrated liquid discharge pipe 37 to the outside. Further, the permeate C is discharged from the second rotating shaft 32B to the outside.

  Next, the operation will be described. When the raw material liquid B is pressurized and supplied from the raw material liquid supply pipe 35 while the rotary container 21 rotates, the raw material liquid B flows into the raw material liquid chamber 31A of the rotary container 31 from the first rotating shaft 32A. At this time, since the rotating container 31 is rotating at a predetermined speed as indicated by an arrow A in FIG. 4, the fine particles in the raw material liquid B are subjected to centrifugal force, and the fine particles are in the raw material liquid chamber 31A due to the specific gravity difference from the liquid. A particle size distribution is generated from the center to the outer periphery, and fine particles having a large particle size are accumulated on the inner peripheral surface of the raw material liquid chamber 31A to form a concentrated liquid. Further, the fine particles in the raw material liquid B are separated by the separation membrane module 33 due to the pressure difference between the raw material liquid chamber 31A and the permeate liquid chamber 31B, and the fine particles are gradually deposited on the upper surface of the separation membrane module 33. It passes through the membrane module 33 and flows into the permeate chamber 31B. The permeate C in the permeate chamber 31B is discharged to the outside through a permeate discharge pipe 36 that is a hollow portion of the second rotating shaft 32B.

  When the fine particles grow and become larger on the upper surface of the separation membrane module 33, the grown fine particles are separated from the separation membrane module 33 under the centrifugal force larger than that of the fine particles and return to the raw material liquid B. However, the growing fine particles move to the concentrated liquid side closer to the inner peripheral surface of the raw material liquid chamber 31A due to a large specific gravity difference with the liquid component, and are accumulated in the maximum diameter portion of the raw material liquid chamber 31A to become a concentrated liquid. Therefore, the upper surface of the separation membrane module 33 is self-cleaned by centrifugal force and is always kept clean, and the fine particles in the raw material liquid B can be separated for a long time. Further, the concentrated liquid collected near the inner peripheral surface of the raw material liquid chamber 31 </ b> A is discharged to the outside through the concentrated liquid discharge pipe 37.

  Therefore, according to the present embodiment, since the concentrate discharge pipe 37 is provided at the maximum diameter portion in the rotary container 31 on the upstream side of the separation membrane module 33, the concentrate can be continuously discharged. Also in the present embodiment, the raw material liquid B can be subjected to separation treatment over a long period of time, and the effects according to the above embodiments can be expected.

  In each of the above embodiments, when the raw material liquid is processed for a long time, clogging occurs in the separation membrane modules 13, 23, 33. In this case, the separation membrane modules 13, 23, 33 are passed through the permeate. Clogging can be eliminated by passing a permeate or a cleaning liquid from the side toward the raw material liquid side and backwashing.

Other embodiments
In the first embodiment, a separation membrane module having a plurality of disc-shaped separation membrane bodies has been described. In the second embodiment, a separation membrane module having a plurality of umbrella-shaped separation membrane bodies has been described. In the embodiment of 2, the separation membrane body is a composite plane membrane or a composite curved membrane made of a porous carrier and an organic polymer membrane. However, as the separation membrane body, a plate-like separation membrane body or a tubular separation membrane body is used. A radial plate-like separation membrane body or a radial rod-like separation membrane body may be attached to the rotation shaft in a plurality of stages. As these plate-like separation membrane bodies or tubular separation membrane bodies, for example, separation membrane modules in which hollow fiber membranes are bundled and their ends are assembled can also be used. Other configurations are configured in accordance with the above embodiments.

In this example, the centrifugal drainage of the CMP waste water was performed using the centrifugal separation membrane apparatus having the umbrella-shaped separation membrane shown in FIG. Comparative Example 1 shows a case where neither the rotating container nor the separation membrane module is rotated, Comparative Example 2 shows a case where only the rotating container is rotated, and Comparative Example 3 shows a case where only the separation membrane module is rotated.

  According to the results shown in Table 1, it was found that in any of Examples 1 to 3, the continuous operation time was as long as 10 hours or more, and the performance of the separation membrane module could be maintained for a long time. In contrast, in the case of Comparative Example 1 in which neither the rotating container nor the separation membrane module was rotated, it was found that the operation time was as extremely short as 30 minutes.

  Note that the present invention is not limited to the above-described embodiments, and each component can be appropriately changed in design as necessary.

  The present invention can be suitably used for a centrifugal membrane device used in the fields of petroleum, chemical industry, food industry, pharmaceutical industry, biotechnology, and the like.

It is sectional drawing which shows typically the whole one Embodiment of the centrifuge membrane apparatus of this invention. It is sectional drawing which shows the cross section of the horizontal direction of the 1st hollow rotating shaft part of the rotating shaft of the centrifuge membrane apparatus shown in FIG. It is sectional drawing which shows typically the whole other embodiment of the centrifuge membrane apparatus of this invention. It is a conceptual diagram shown in other embodiment of the centrifuge membrane apparatus of this invention.

Explanation of symbols

10, 20, 30 Centrifugal membrane device 11, 21, 31 Rotating container 12, 22, 32A, 32B Rotating shaft
13, 23, 33 Separation membrane module 13A Disc-shaped separation membrane body 18 Concentrated liquid discharge pipe 19 Permeate liquid discharge pipe 23A Umbrella-shaped separation membrane body 26 Raw material liquid supply pipe 28 Permeate discharge pipe 121 First hollow rotating shaft part 122 First 2 Hollow rotating shaft 124 Raw material liquid supply passage (supplying means for liquid to be processed)

Claims (10)

  A rotating container to which a liquid to be treated containing a suspended substance is supplied; a rotating shaft for applying a rotating force to the rotating container; and a separation membrane module mounted on the rotating shaft so as to be positioned in the rotating container; And rotating the rotating container and the separation membrane module via the rotating shaft to apply a centrifugal force to the liquid to be treated, and the centrifugal force and the permeation separation action of the separation membrane module in the liquid to be treated. An apparatus for separating the suspended solids of the apparatus, wherein the rotating vessel is provided with means for supplying a liquid to be treated, and at least a part of the rotating shaft is formed as a hollow rotating shaft, and the hollow portion of the hollow rotating shaft is separated. A centrifugal membrane device characterized in that it is formed as a permeate discharging means communicating with a permeate side of a membrane module.   The hollow rotation shaft is partitioned into a first hollow rotation shaft portion located inside the rotation container and a second hollow rotation shaft portion located outside the rotation container, and the first hollow rotation shaft portion is divided into the rotation container. A treatment liquid supply passage communicating with the inside and a permeate discharge passage communicating with the permeate side of the separation membrane module; and a hollow portion of the second hollow rotary shaft portion and a treatment liquid supply passage; The centrifuge membrane device according to claim 1, wherein the centrifuge membrane device is formed as a means for supplying the liquid to be processed.   The first hollow rotating shaft portion is formed as a hollow rotating shaft having a double tube structure, the outer hollow portion of the hollow rotating shaft having the double tube structure is formed as a supply passage for the liquid to be treated, and the inner hollow portion is transmitted therethrough. The centrifuge membrane device according to claim 2, wherein the centrifuge membrane device is formed as a liquid discharge passage.   A container to which a liquid to be treated containing suspended substances is supplied, a rotating container disposed in the container and having a hole through which the liquid to be treated in the container circulates, and the liquid to be treated in the rotating container A rotating shaft for applying a rotational force, and a separation membrane module mounted on the rotating shaft so as to be positioned in the rotating vessel, and the rotating vessel and the separation membrane module are rotated via the rotating shaft. In this device, a centrifugal force is applied to the liquid to be treated in the rotating container, and the suspended substance in the liquid to be treated is separated in the rotating container by the centrifugal force and the permeation separation action of the separation membrane module. The rotating shaft is formed as a hollow rotating shaft having a double-pipe structure, and the outer or inner hollow portion of the hollow rotating shaft is formed as a permeate discharging means communicating with the permeate side of the separation membrane module. Features Centrifugal separation membrane device.   5. The centrifugal separation membrane device according to claim 4, wherein a hollow portion different from the discharge means of the hollow rotating shaft is formed as a discharge means for the suspended matter separated by the separation membrane module.   2. The separation membrane module, wherein a plurality of disc-shaped separation membrane bodies or a plurality of umbrella-like separation membrane bodies are attached in a plurality of stages along the axis of the rotating shaft. The centrifuge membrane device according to claim 5.   The said rotary container has the discharge means of the suspended solid isolate | separated with the said separation membrane module in the largest diameter part of the radial direction, The any one of Claims 1-6 characterized by the above-mentioned. Centrifugal membrane device.   The centrifugal separation membrane according to any one of claims 1 to 7, wherein a pressure supply means and / or a suction discharge means is provided in the permeate discharge passage in the liquid supply passage. apparatus.   A rotating container to which a liquid to be treated containing a suspended substance is supplied, a rotating shaft for applying a rotational force to the rotating container, and the inside of the rotating container are divided into a chamber to be processed and a permeating liquid chamber. A separation membrane module to be mounted, and a centrifugal force is applied to the liquid to be treated by rotating the rotary container and the separation membrane module via the rotation shaft, and the centrifugal force and the permeation of the separation membrane module. An apparatus for separating suspended substances in the liquid to be treated by a separation action, wherein the rotary shaft communicates with the liquid chamber side to be treated and serves as a supply passage for the liquid to be treated and the permeate. A centrifugal membrane device characterized in that it is formed as a hollow rotating shaft that communicates with the chamber side and serves as a permeate discharge passage.   10. The centrifugal membrane device according to claim 9, further comprising a non-permeate discharging means that communicates with the radially largest diameter portion in the liquid chamber to be treated.

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