JP2006267029A - Inspection apparatus displaying simultaneously a plurality of associated test results and the like on same screen - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of implementing failure analysis efficiently of electron devices, such as organic EL element and the like. <P>SOLUTION: The inspection apparatus is provided which is equipped with a means displaying the results of electric analysis and of tests specifying locations of failure portions and verification conditions and the like for controlling test equipments on a single screen and a means displaying simply and rapidly the results of electric analysis and of tests specifying locations of failure portions corresponding to the verification condition obtained by changing verification conditions and verification conditions and the like for controlling test equipments on a single screen. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection apparatus used for failure analysis of an electronic device such as an organic EL.

In order to improve the quality of so-called electronic devices such as semiconductor elements, organic EL elements, and liquid crystal display elements, failure analysis is required in which a defective portion is identified and its cause is grasped. The failure analysis process is roughly divided into a process of electrically analyzing a sample (hereinafter referred to as “electrical analysis process”) and a process of specifying the location of a failure location (hereinafter also referred to as “failure location specifying process”). , Exists. In the electrical analysis process, a specific voltage / current is applied to the sample to measure the current / voltage characteristics at a specific location. The analysis of the location in the fault location process involves analyzing the screen of the distribution of light emitted from the sample with the same voltage and current as those given in the electrical analysis process. The measuring instrument is a CCD camera or the like. The two devices have different properties, and conventionally, these two processes are performed by different devices, and it was impossible to display the results of both devices on one screen for comparison.
Organic EL materials technology Supervision by Yoshiharu Sato CM Publishing Co., Ltd. Organic EL materials and displays Supervised by Keiji Koji CM Publishing Co., Ltd.

  For this reason, when the electrical analysis process and the position specifying process are performed by different devices in this way, the work of comparing the analysis result of the corresponding electrical analysis process and the analysis result of the fault position specifying process is performed. It was necessary. The work of comparing the analysis result of the corresponding electrical analysis process and the analysis result of the fault location specifying process requires considerable attention and time, and is an obstacle to improving the work efficiency of the defect analysis work.

  In failure analysis, the voltage / current applied to the sample is changed in real time, and the current / voltage characteristics at a specific location of the sample and the color distribution map of the light emitted from the sample are analyzed in real time. Is also very useful. However, changing the voltage and current applied to the sample in real time and analyzing the current and voltage characteristics of the specific location of the sample and the color distribution of the light emitted from the sample in real time is an electrical analysis. It was extremely difficult when the device that performs the process and the device that performs the position location process are different devices.

  Therefore, the present invention makes it possible to carry out the electrical analysis process and the fault location specifying process with a single inspection device, and to combine the screens for displaying the inspection results, etc. And an analysis apparatus for simultaneously displaying on one screen a screen for controlling the measurement condition and the analysis result of the fault location specifying process.

In order to solve the above-mentioned problem, the invention according to claim 1 is an inspection apparatus for inspecting characteristics of an electronic device,
Means for applying inspection conditions to the device under test;
A plurality of reaction acquisition / inspection means for inspecting a plurality of reactions from the device under test to which the inspection condition is applied;
The main screen of the display device that constitutes the inspection apparatus is composed of a plurality of sub-screens, and a plurality of reaction / inspection results obtained by the plurality of reaction acquisition / inspection means respectively correspond to the plurality of sub-screens, and The inspection condition and the control condition for controlling the measuring instrument constituting the reaction acquisition / inspection means are displayed as one sub-screen, and the inspection result sub-screen and the inspection condition sub-screen are displayed in the main screen. Display means having a function to:
It is characterized by having

The invention according to claim 2
An inspection apparatus for inspecting characteristics of an electronic device,
Means for applying the inspection condition to the device under test;
A plurality of reaction acquisition / inspection means for inspecting a plurality of reactions from the device under test to which the inspection condition is applied;
The main screen of the display device that constitutes the inspection apparatus is composed of a plurality of sub-screens, and a plurality of reaction / inspection results obtained by the plurality of reaction acquisition / inspection means respectively correspond to the plurality of sub-screens, and The inspection condition and the control condition for controlling the measuring instrument constituting the reaction acquisition / inspection means are displayed as one sub-screen, and the inspection result sub-screen and the inspection condition sub-screen are displayed in the main screen. Display means having a function to:
It is characterized by having. In other words, the invention described in claim 2 is obtained by adding the inspection condition sub-screen to the main screen according to the invention described in claim 1.

  The invention according to claim 3 relates to the inspection apparatus according to claim 1 or 2, wherein when the inspection condition is applied to the device under test, the plurality of reaction acquisition / inspection means include a plurality of reactions. It is characterized by continuous acquisition and inspection.

The invention according to claim 4 relates to the inspection apparatus according to claim 1,
The inspection condition application means has a function of changing the inspection condition over time and applying it,
The reaction acquisition / inspection means is the reaction acquisition / inspection means for inspecting a plurality of temporally changing reactions from the device under test to which an inspection condition that changes with time is applied from the inspection condition application means. ,
The multiple result display means displays a plurality of the reaction / test results that change over time.

The invention according to claim 5 relates to the inspection apparatus according to claim 2,
The inspection condition application means has a function of changing the inspection condition over time and applying it,
The reaction acquisition / inspection means is the reaction acquisition / inspection means for inspecting a plurality of temporally changing reactions from the device under test to which an inspection condition that changes with time is applied from the inspection condition application means. ,
The multi-result display means displays the test result sub-screen and the sub-screen such as the test conditions, which are representation formats in which the temporal transition of the reaction test result can be grasped.

The invention described in claim 6 relates to the inspection apparatus according to claims 4 and 5,
When the inspection condition is applied to the device under test, the plurality of reaction acquisition / inspection means continuously perform a plurality of reaction acquisition / inspection.

The invention according to claim 7 relates to the inspection apparatus according to claim 1,
The device under test is an organic EL element, and the inspection condition is a voltage applied to the organic EL, and the reaction acquisition / inspection configured by at least a voltage / ammeter in the plurality of reaction acquisition / inspection means The reaction acquisition / inspection means comprising a means, a CCD camera, and a microscope is included, and the reaction / inspection results include voltage / current characteristics of the inspection device and light emission distribution of the device under test. Features.

The invention according to claim 8 relates to the inspection apparatus according to claim 2,
The device under test is an organic EL element, and the inspection condition is a voltage applied to the organic EL, and the reaction acquisition / inspection configured by at least a voltage / ammeter in the plurality of reaction acquisition / inspection means The reaction acquisition / inspection means comprising a means, a CCD camera, and a microscope is included, and the reaction / inspection results include voltage / current characteristics of the inspection device and light emission distribution of the device under test. Features.

The invention according to claim 9 relates to the inspection apparatus according to claim 3,
The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. Distribution.

The invention according to claim 10 relates to the inspection apparatus according to claim 4,
The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. Distribution.

The invention according to claim 11 relates to the inspection apparatus according to claim 5,
The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. Distribution.

The invention described in claim 12 relates to the inspection apparatus described in claim 6,
The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. Distribution.

The invention according to claim 13 relates to the inspection apparatus according to claim 7,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention as set forth in claim 14
The inspection apparatus according to claim 8,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention described in claim 15 relates to the inspection apparatus according to claim 9,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention described in claim 16 relates to the inspection apparatus described in claim 10,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention according to claim 17 relates to the inspection apparatus according to claim 11,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention according to claim 18 relates to the inspection apparatus according to claim 12,
The characteristic inspection condition is not more than a light emission start voltage of the organic EL element.

The invention according to claim 19 relates to the inspection apparatus according to claims 1 to 18,
One of the plurality of reaction result sub-screens indicates a result of voltage / current characteristics, and when one point of the reaction result sub-screen is specified by a mouse or a keyboard, the other reaction result sub-screens are The content corresponding to the specified condition is displayed.

The invention according to claim 20 relates to the inspection apparatus according to claims 2, 5, 8, 11, 14 and 17,
When one point of the inspection condition sub-screen is specified by a mouse or a keyboard, the reaction result sub-screen displays contents corresponding to the specified condition.

According to the invention of claim 1,
According to the first aspect of the present invention, the inspection result sub-screen showing a plurality of the reaction inspection results can be displayed in a state that can be compared and examined simultaneously in the main screen, for example, physical failure analysis of an electronic device. In the main screen, the inspection result sub-screen showing data for performing an electrical analysis, and the inspection result sub-screen showing the light emission distribution of the device under test for specifying the position of the failure location in the electronic device, In particular, it is possible to identify failure locations more efficiently by side-by-side comparison and examination, thereby reducing failure analysis costs.

According to the invention of claim 2,
Compared to the first aspect of the invention, the sub-screen such as the inspection condition can be displayed in the main screen, for example, data for performing electrical analysis in physical failure analysis of an electronic device. Comparing and examining the inspection result sub-screen indicating the position of the failure location in the electronic device and the inspection result sub-screen indicating the light emission distribution of the device under test. The control conditions for controlling the measuring equipment constituting the reaction acquisition / inspection means can be taken into account, the failure location can be identified more efficiently, and the failure analysis cost can be reduced.

According to the invention of claim 3,
After applying the inspection conditions to the device under test, inspection of different types of reactions from the device under test can be performed without repeating the same preparation process, and the quality and efficiency of failure analysis can be improved. The reason why it is possible to improve the quality of failure analysis is that mistakes may occur in the preparation process.

According to the invention as set forth in claim 4,
In failure analysis of an electronic device, the reaction inspection result can be displayed on the inspection result sub-screen, for example, with the time axis set in the horizontal direction and the voltage set in the vertical direction. This makes it possible to improve the accuracy and efficiency of failure analysis.

According to the invention as set forth in claim 5,
In addition to the invention according to claim 4, by being able to display the sub-screen such as the inspection condition, it becomes possible to add the inspection condition and the control condition to the related reaction inspection result, thereby improving the efficiency of failure analysis. It becomes possible to improve.

According to the invention as set forth in claim 6,
In addition to the effects of the inventions of claims 4 and 5,
After applying the inspection conditions to the device under test, inspection of different types of reactions from the device under test can be performed without repeating the same preparation process, and the quality and efficiency of failure analysis can be improved. The reason why it is possible to improve the quality of failure analysis is that mistakes may occur in the preparation process.

According to the invention of claim 7,
The efficiency of failure analysis of the organic EL element can be improved. In the case of the organic EL element, the light emission distribution changes depending on the value of the voltage applied to the organic EL element, and the applied voltage and the light emission distribution can be simultaneously compared and examined on the same screen. It is because it can reduce.

According to the invention as set forth in claim 8,
In addition to the effect of the invention described in claim 7, the efficiency of failure analysis of the organic EL element can be further improved. This is because, in addition to being able to compare and examine the applied voltage and the emission distribution simultaneously on the same screen, the analysis time and labor can be further reduced by comparing and examining the inspection conditions on the same screen. .

According to the invention of claim 9,
In addition to the effects of the inventions of claims 7 and 8,
Furthermore, the quality and efficiency of failure analysis can be improved. This is because, after applying the inspection conditions to the device under test, inspection of different types of reactions from the device under test can be performed without repeating the same preparation process.

According to the invention as set forth in claim 10,
In addition to the effect of the invention according to claim 7, in the failure analysis of the organic EL element, the reaction test result with the time axis as a horizontal direction and the voltage as a vertical direction can be displayed on the test result sub-screen, for example. In the failure analysis, the time transition of the reaction result can be easily observed, so that the accuracy and efficiency of the failure analysis can be further improved.

According to the invention of claim 11,
In addition to the effect of the invention of claim 10, the efficiency of failure analysis of the organic EL element can be further improved. This is because, in addition to being able to compare and examine the applied voltage and the emission distribution simultaneously on the same screen, the analysis time and labor can be further reduced by comparing and examining the inspection conditions on the same screen. .

According to the invention of claim 12,
In addition to the effects of the inventions of claims 10 and 11, the quality and efficiency of failure analysis can be further improved. This is because, after applying the inspection conditions to the device under test, inspection of different types of reactions from the device under test can be performed without repeating the same preparation process.

According to the invention of claim 13,
The effect of the invention of claim 7 can also be obtained when a voltage equal to or lower than the emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention as set forth in claim 14,
The effect of the invention of claim 8 can be obtained even when a voltage equal to or lower than the emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention as set forth in claim 15,
The effect of the invention of claim 9 can also be obtained when a voltage equal to or lower than the emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention as set forth in claim 16,
The effect of the invention of claim 10 can also be obtained when a voltage equal to or lower than the emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention of claim 17,
The effect of the invention of claim 11 can also be obtained when a voltage equal to or lower than the light emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention as set forth in claim 18,
The effect of the invention of claim 12 can be obtained even when a voltage equal to or lower than the emission start voltage of the organic EL is applied as the applied voltage. Further, by applying a voltage equal to or lower than the light emission start voltage of the organic EL as the applied voltage, light emission in a state where light should not be emitted can be captured, and the efficiency and quality of failure analysis can be improved.

According to the invention of claim 19,
In addition to the effects of the inventions of claims 10 and 11, the quality and efficiency of failure analysis can be further improved. This is because by simply specifying one point of the reaction result sub-screen showing the voltage / current characteristics with the mouse or the keyboard, the data in the other reaction result sub-screen corresponding thereto can be viewed.

According to the invention of claim 20,
In addition to the effects of the inventions according to claims 2, 5, 8, 11, 14, and 17, the quality and efficiency of failure analysis can be further improved. This is because by simply specifying one point on the inspection condition sub-screen with the mouse or the keyboard, the corresponding data in the other reaction result sub-screen can be viewed.

  Hereinafter, the best mode for carrying out the invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a block diagram showing hardware constituting the inspection apparatus according to Embodiment 1 of the present invention. In FIG. 1, reference numeral 101 denotes a screen display device of an inspection apparatus. Reference numeral 100 denotes a main screen of the screen display device 101. Reference numeral 102 denotes one of a plurality of inspection result sub-screens (hereinafter referred to as “first inspection result sub-screen”), and 103 denotes a second inspection result sub-screen (hereinafter referred to as “second inspection result sub-screen”). It is. Reference numeral 104 denotes an inspection condition sub-screen. A central processing unit 105 controls the inspection apparatus. Reference numeral 106 denotes a reaction acquisition / inspection unit (hereinafter referred to as “first reaction acquisition / inspection unit”) which is one of a plurality of reaction acquisition / inspection means. Reference numeral 107 denotes a second reaction acquisition / inspection unit (hereinafter referred to as “second reaction acquisition / inspection unit”). In the present embodiment, there are two reaction acquisition / inspection units. Reference numeral 108 denotes a device under test that is a target of failure analysis. Reference numeral 109 denotes an inspection condition application unit that applies the inspection conditions to the device under test 108. Reference numeral 110 denotes a probe, which is in electrical contact with the test object 108 through the probe 110. In the present embodiment, there are two inspection result sub-screens. The device under test 108 is an organic EL element, and the inspection condition applied to the device under test 108 is a voltage. The first reaction acquisition / inspection unit 106 includes a microscope 111 and a CCD camera 112, and acquires the emission distribution of the device under test 108. The second reaction acquisition / inspection unit 107 includes an ammeter and measures the current flowing through the device under test 108. As a specific device, in the first embodiment, the second reaction acquisition / inspection unit 107 and the inspection condition application unit 109 are configured by a single source meter 113.

  FIG. 2 is a block diagram functionally showing the inspection apparatus according to Embodiment 1 of the present invention.

FIG. 3 is a flowchart showing a flow of processing at the time of inspection according to the first embodiment. The main process is to obtain the current value and light emission distribution flowing through the device under test 108 for each voltage while changing the voltage applied to the device under test 108, and display the light emission distribution and voltage / current curve on the screen display device. And inspection conditions such as applied voltage are displayed. This will be described below. First, in step S301, a voltage is applied as an inspection condition to the organic EL element that is the device under test 108. The voltage is applied from the inspection condition application unit 109 through the probe 110. Next, in step S302, an emission data acquisition command is issued to the first reaction acquisition / inspection unit 106. The contents of the command are the magnification of the microscope 111, the photographing conditions for the CCD camera 112, and the like. Next, in step S303, a command for acquiring the value of the current flowing through the device under test 108 is issued to the second reaction acquisition / inspection unit 107. Next, in step S304, the first reaction acquisition / inspection unit 106 acquires luminescence data. Next, in step S305, the second reaction acquisition / inspection unit 107 acquires a current value. Next, in step S306, the central processing unit 105 displays the first inspection result sub-screen 102, the second inspection result sub-screen 103, and the inspection condition etc. sub-screen 104 in the main screen 100 of the screen display device 101. To do. Specifically, the light emission distribution acquired by the first reaction acquisition / inspection unit 106 is displayed on the first inspection result sub-screen 102, and the second reaction acquisition / inspection unit acquired on the second inspection result sub-screen 103. A voltage / current curve based on the current value is displayed, and the inspection condition etc. sub-screen 104 controls the voltage value applied to the device under test 108, the magnification for controlling the microscope 111, and the high sensitivity CCD camera 112. For example, the shutter speed is displayed.
In step S307, it is determined whether or not the current applied voltage value is the last one. If it is the last time, the process ends. If it is not the last, the process proceeds to step S308. In step 308, the applied voltage is changed to the following. And it progresses to step S301 and repeats the following steps.
(Effect of the invention according to Embodiment 1)

  Next, the effects of the invention according to the first embodiment will be described based on actual examples. The present Example 1 is applied while changing the applied voltage to the organic EL element, obtains the corresponding current value and light emission distribution, compares and examines the obtained voltage / current curve and light emission distribution, The failure mode was efficiently grasped compared with the analysis by the conventional inspection apparatus.

  Hereinafter, a description will be given based on FIG. FIG. 5 is a graph showing a voltage / current curve according to Example 1 and an image diagram showing a light emission distribution of the organic EL element. 501 in FIG. 5A is a second inspection result sub-screen, which shows the current value that flows through the organic EL element when a predetermined voltage is applied to the organic EL element, and the horizontal axis is the voltage value. Yes, the vertical axis is the current value. 5C is a voltage at which the organic EL element starts to emit light (hereinafter also referred to as “emission start voltage”). 5A is a normal organic EL that does not emit light, and a faulty organic EL element emits light due to current leakage or the like. This is the area where Reference numeral 5B denotes an applied voltage (2 V) in this embodiment, and the light emission distribution when this voltage is applied is shown in FIG. 5B. Further, 5E and 5F + marks are points at which the CCD camera 112 has acquired a light emission image. Reference numeral 502 denotes a first inspection result sub-screen according to the first embodiment. Reference numeral 5D denotes a portion that emits light when a voltage equal to or lower than the light emission start voltage in Example 1 is applied. This light emission occurs in a state where 2 V, which is equal to or lower than the light emission start voltage, is applied to the organic EL element, and it is presumed that some leakage current is generated at this location.

  Next, a case where a voltage equal to or higher than the emission start voltage is applied to the same organic EL element will be described. FIG. 6 shows a voltage / current curve when a voltage equal to or higher than the emission start voltage is applied to the same organic EL element and a light emission distribution of the organic EL element when the applied voltage is equal to or higher than the emission start voltage. is there. 601 in FIG. 6 is a second inspection result sub-screen according to the second embodiment, and shows a current value flowing through the organic EL element when a predetermined voltage is applied to the organic EL element, and the horizontal axis indicates the voltage value. The vertical axis is the current value. Reference numeral 602 denotes a first inspection result sub-screen according to the second embodiment, which displays the light emission distribution of the organic EL. In Example 2, the entire organic EL element emitted light, and light emission different from the other parts was observed around the 5D point emitted in Example 1 below the emission start voltage.

This will be described in more detail below. 6C on the second inspection result sub-screen 601 is a vertical line indicating the light emission start voltage. Here, it can be seen that the characteristics of the voltage / current curve are different on the left and right sides of the 6C vertical line, and on the right side, the current value increases as the voltage value increases. This corresponds to the fact that when the organic EL element starts emitting light, it is necessary to inject current into the organic EL element. The intersection of the 6C vertical line and the voltage / current curve is an inflection point, and the 6C vertical line indicates It can be confirmed that the voltage is the light emission start voltage.
Reference numeral 6A denotes a voltage region where the organic EL element emits light. 6B indicates the applied voltage in the second embodiment. Reference numerals 6F, 6G, and 6H are points at which the CCD camera 112 has acquired a light emission image.

Next, 6I on the first inspection result sub-screen 602 is abnormal light emission occurring at the same position as the light emission point 5D when the voltage shown in FIG. 5B is applied to the organic EL element in Example 1.
6D is a portion around 6I that emits light with a color (light blue) different from other portions. Reference numeral 6E denotes a portion other than 6I and 6D, which emits light yellow light. This portion is considered to be a portion that emits light normally as an organic EL element because it emits light when the applied voltage becomes equal to or higher than the light emission start voltage.

  As described above, by using the inspection apparatus according to the first embodiment of the present invention, the voltage / current curve and the light emission distribution can be instantaneously compared and examined. It is possible to quickly determine whether or not the EL element emits light normally. From the above analysis, it can be confirmed that 6E in FIG. 6 is a portion emitting normal light (light yellow) when a voltage higher than the emission start voltage of the organic EL element is applied, and 6D is 6I. The surrounding area is emitting abnormal light (light blue), and the failure part of FIG. 5D, which is a defective part, also has a cause that affects the surrounding area. I understand. If there is such a cause of failure, it is necessary to investigate what production process caused the failure and improve the process. By performing such a failure analysis, the process can be improved. The quality of organic EL elements can be improved.

With conventional inspection equipment, in order to grasp such failure modes, after acquiring the voltage / current curve, the emission distribution must be obtained with another inspection equipment, so it is necessary to set up the inspection equipment again. In addition, if setup is restarted, it will be necessary to reconfirm that the same inspection conditions are met, and even if the same analysis result is finally obtained, considerable effort and time are required. It was. In comparison, when using the inspection apparatus according to the present invention, the voltage / current curve and the light emission distribution can be compared and examined instantaneously, and the inspection conditions can be changed, so that failure analysis with much superior efficiency and quality can be performed. This makes it possible to classify the cause of failure and reduce the labor required for process improvement.
(Embodiment 2)
Next, as the second embodiment, the same voltage is applied as an inspection condition to the organic EL element of the device under test 108, and the change in the value of the current flowing through the organic EL element that is the device under test 108 as the application time elapses. An embodiment for comparing and examining changes in the light emission distribution under the same conditions while measuring will be described.

  Since the equipment constituting the inspection apparatus is the same as that in the first embodiment, the hardware constituting the inspection apparatus according to the second embodiment will also be described with reference to FIG. Only the parts different from the case of the first embodiment will be described below.

  Although the number of inspection result sub-screens is two, it is the same as in the first embodiment, but the displayed contents are different. In the first inspection result sub-screen, the emission distribution corresponding to the change in the applied voltage is displayed in the first embodiment, whereas in the second embodiment, the applied voltage is the same, and the voltage A light emission distribution corresponding to the passage of time during which is applied is displayed. In the second inspection result sub-screen, the current value corresponding to the change in the applied voltage is displayed in the first embodiment, while the same voltage is continuously applied in the second embodiment. The current value corresponding to the passage of time is displayed. The first inspection result sub-screen is the same, and the light emission distribution corresponding to the passage of time in a state where the same voltage is continuously applied is displayed.

  Hereinafter, the flow of processing at the time of inspection according to the second embodiment will be described.

  FIG. 4 is a flowchart showing the flow of processing. Specifically, first, in step S401, a voltage is applied as an inspection condition to the organic EL element that is the device under test 108. The voltage is applied from the inspection condition application unit 109 through the probe 110. Next, in step S402, an emission data acquisition command is issued to the first reaction acquisition / inspection unit 106. The contents of the command include the magnification of the microscope and the photographing conditions for the CCD camera. Next, in step S403, a command for acquiring the value of the current flowing through the device under test 108 is issued to the second reaction acquisition / inspection unit 107. Next, in step S404, the first reaction acquisition / inspection unit acquires luminescence data. Next, in step S405, the second reaction acquisition / inspection unit acquires a current value. Next, in step S406, the central processing unit 105 includes a first inspection result sub-screen 102, a second inspection result sub-screen 103, an inspection condition etc. sub-screen 104 in the main screen 100 of the screen display device 102. Is displayed. As contents of each sub screen, the first inspection result sub screen 102 displays the light emission distribution acquired by the first reaction acquisition / inspection unit 106. Specifically, the light emission distribution captured by the CCD camera is displayed. The second inspection result sub-screen 103 displays a voltage / time value curve corresponding to the passage of time based on the current value acquired by the second reaction acquisition / inspection unit. Further, the inspection condition sub-screen 104 displays the inspection conditions, such as applied voltage, microscope magnification, and CCD camera imaging conditions.

  In step S407, it is determined whether or not the current examination time is the last time. If it is not the last, the process proceeds to step 408 and waits for a certain time. Then, the process proceeds to step S409. In step 409, it is determined whether it is time to measure the current value or the like next. If it is time to measure, the process proceeds to step S401, and the subsequent steps are repeated. If it is not yet time to measure, the process returns to step S408. By repeating steps 401 to 409, the process is terminated at the last time.

It is a block diagram which shows the hardware which comprises the inspection apparatus which concerns on embodiment of this invention. 1 is a block diagram functionally showing an inspection apparatus according to an embodiment of the present invention. It is a flowchart which shows the flow of the process at the time of the test | inspection of the invention which concerns on this Embodiment 1. FIG. It is a flowchart which shows the flow of the process at the time of the test | inspection of the invention which concerns on Embodiment 2 of this invention. FIG. 2 is a graph showing a voltage / current curve according to Example 1 and an image diagram showing a light emission distribution of an organic EL element. It is a graph which shows the electric current and time curve which concerns on the measurement example 2, and an image figure which shows the light emission distribution of an organic EL element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Main screen of screen display apparatus 101 Screen display apparatus of inspection apparatus 102 1st inspection result subscreen 103 2nd inspection result subscreen 104 Inspection conditions etc. subscreen 105 Central processing unit 106 1st reaction acquisition and inspection part 107 2nd Reaction acquisition / inspection unit 108 Device under test 109 Inspection condition application unit 110 Probe 111 Microscope 112 CCD camera 113 Source meter
S301 Voltage application step
S302 Light emission data acquisition command step
S303 Current value acquisition command step
S304 Light emission data acquisition step
S305 Current value acquisition step
S306 Light emission data display step
S307 Final voltage judgment step
S308 Voltage value change step
S401 Voltage application step
S402 Light emission data acquisition command step
S403 Current value acquisition command step
S404 Light emission data acquisition step
S405 Current value acquisition step
S406 Light emission data display step
S406 Light emission data display step
S407 Final time judgment step
S409 Standby step 501 Second inspection result sub-screen according to Example 1 502 First inspection result sub-screen according to Example 1 5A Applied voltage region below emission start voltage 5B Point indicating applied voltage in Example 1 5C Example 1 5D Point indicating light emission start voltage 5D A portion that emits light when a voltage equal to or lower than the light emission start voltage is applied in Example 1. 5E Issued image acquisition point 5F Issued image acquisition point 601 Second inspection result sub-screen 602 according to Example 2 First inspection result sub-screen according to Example 2 6A Organic EL element light emission start region 6B Line indicating applied voltage in Example 2 6C Vertical line indicating light emission start voltage 6D 6I Around 6I, abnormal light emission (light blue) 6E Area that emits light (light yellow) as a normal organic EL element 6F Issued image acquisition point 6G Issued image Image acquisition point 6H Issued image acquisition point 6I Example of abnormal light emission when voltage is applied in Example 2

Claims (20)

An inspection apparatus for inspecting characteristics of an electronic device,
Means for applying inspection conditions to be applied to the electronic device to be tested (hereinafter also referred to as “test device”) (hereinafter also referred to as “test condition application means”);
A plurality of reaction acquisition / inspection means for inspecting a plurality of reactions from the device under test to which the inspection condition is applied;
The screen (hereinafter also referred to as “main screen”) of the display device constituting the inspection apparatus is composed of a plurality of small screens (hereinafter also referred to as “sub-screens”), and a plurality of screens obtained by the plurality of reaction acquisition / inspection means. Display means (hereinafter also referred to as “multiple result display means”) as a plurality of sub-screens corresponding to each of the inspection results (hereinafter also referred to as “reaction test results”). Characteristic inspection device. An inspection apparatus for inspecting characteristics of an electronic device,
Means for applying the inspection condition to the device under test;
A plurality of reaction acquisition / inspection means for inspecting a plurality of reactions from the device under test to which the inspection condition is applied;
The main screen of the display device constituting the inspection apparatus is composed of a plurality of sub-screens, and a plurality of sub-screens (hereinafter referred to as “inspection results” respectively corresponding to a plurality of inspection results obtained by the plurality of reaction acquisition / inspection means. Sub-screen ”) and the control conditions for controlling the test conditions and the measuring equipment constituting the reaction acquisition / inspection means as one sub-screen (hereinafter also referred to as“ sub-screens such as test conditions ”), Display means (hereinafter also referred to as “composite display means”) having a function of displaying the inspection result sub-screen and the inspection condition sub-screen in the main screen;
An inspection apparatus comprising:   3. The inspection apparatus according to claim 1, wherein when the inspection condition is applied to the device under test, the plurality of reaction acquisition / inspection means continuously perform a plurality of reaction acquisition / inspection. The inspection condition application means has a function of changing the inspection condition over time and applying it,
The reaction acquisition / inspection means is the reaction acquisition / inspection means for inspecting a plurality of temporally changing reactions from the device under test to which an inspection condition that changes with time is applied from the inspection condition application means. ,
The inspection apparatus according to claim 1, wherein the multi-result display unit displays the inspection result sub-screen which is an expression format in which a temporal transition of the reaction inspection result can be grasped. The inspection condition application means has a function of changing the inspection condition over time and applying it,
The reaction acquisition / inspection means is the reaction acquisition / inspection means for inspecting a plurality of temporally changing reactions from the device under test to which an inspection condition that changes with time is applied from the inspection condition application means. ,
The said multiple result display means displays the said test result subscreen which is the expression format which can grasp | ascertain the temporal transition of the said reaction test result, and the said test condition etc. subscreens, It is characterized by the above-mentioned. The inspection device described in 1.   6. The inspection apparatus according to claim 4, wherein when the inspection condition is applied to the device under test, the plurality of reaction acquisition / inspection means continuously perform a plurality of reaction acquisition / inspection.   The device under test is an organic EL element, and the inspection condition is a voltage applied to the organic EL, and the reaction acquisition / inspection configured by at least a voltage / ammeter in the plurality of reaction acquisition / inspection means The reaction acquisition / inspection means comprising a means, a CCD camera, and a microscope is included, and the reaction / inspection results include voltage / current characteristics of the inspection device and light emission distribution of the device under test. The inspection apparatus according to claim 1, characterized in that:   The device under test is an organic EL element, and the inspection condition is a voltage applied to the organic EL, and the reaction acquisition / inspection configured by at least a voltage / ammeter in the plurality of reaction acquisition / inspection means The reaction acquisition / inspection means comprising a means, a CCD camera, and a microscope is included, and the reaction / inspection results include voltage / current characteristics of the inspection device and light emission distribution of the device under test. The inspection apparatus according to claim 2, wherein the inspection apparatus is characterized.   The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. The inspection apparatus according to claim 3, comprising a distribution.   The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. The inspection apparatus according to claim 4, comprising a distribution.   The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. The inspection apparatus according to claim 5, comprising a distribution.   The device under test is an organic EL element, and the specific inspection condition is a voltage applied to the organic EL, and the reaction / inspection result includes voltage / current characteristics of the inspection device and light emission of the inspection device. The inspection apparatus according to claim 6, comprising a distribution.   The inspection apparatus according to claim 7, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   The inspection apparatus according to claim 8, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   The inspection apparatus according to claim 9, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   The inspection apparatus according to claim 10, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   The inspection apparatus according to claim 11, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   The inspection apparatus according to claim 12, wherein the characteristic inspection condition is equal to or lower than a light emission start voltage of the organic EL element.   One of the plurality of reaction result sub-screens indicates a result of voltage / current characteristics, and when one point of the reaction result sub-screen is specified by a mouse or a keyboard, the other reaction result sub-screens are 19. The inspection apparatus according to claim 1, wherein contents corresponding to the specified condition are displayed.   The point corresponding to the specified condition is displayed on the reaction result subscreen when one point of the inspection condition subscreen is specified with a mouse or a keyboard. , 14 and 17.

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